JPH0695022B2 - Angular velocity sensor - Google Patents
Angular velocity sensorInfo
- Publication number
- JPH0695022B2 JPH0695022B2 JP3172825A JP17282591A JPH0695022B2 JP H0695022 B2 JPH0695022 B2 JP H0695022B2 JP 3172825 A JP3172825 A JP 3172825A JP 17282591 A JP17282591 A JP 17282591A JP H0695022 B2 JPH0695022 B2 JP H0695022B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped portion
- angular velocity
- portions
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 11
- 230000008602 contraction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910020676 Co—N Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は圧電振動型の角速度セン
サに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibration type angular velocity sensor.
【０００２】[0002]
【従来の技術】従来、この種の角速度センサとしては、
特開昭５８−１７４８５４号公報に記載されたものがあ
る。これは図２に示す構成を有している。即ち、金属板
の表裏面に圧電体により形成した駆動部１、１, と、同
じく金属板の表裏面に圧電体により形成した検知部２、
２' とを接着剤３、３' を介して互いに直交、配置した
構成である。そして、駆動部１、１, に交流電圧を印加
して該駆動部１、１, の位相を１８０°ずらして中心軸
Ａに対して互いに図中矢印の反対方向へ駆動、振動（な
お、検知部も連れ動く）させ、その振動時に中心軸Ａの
回りに角速度が生じると周知のコリオリの力によって検
知部２、２' が駆動部１、１, の振動方向に対して直交
する方向に屈曲し、その屈曲に伴う該検知部２、２' の
圧電体に発生する電気信号を測定して角速度を検知する
ものである。2. Description of the Related Art Conventionally, as this kind of angular velocity sensor,
There is one described in JP-A-58-174854. It has the configuration shown in FIG. That is, the driving units 1 , 1 formed by the piezoelectric body on the front and back surfaces of the metal plate, and the detection unit 2 also formed by the piezoelectric body on the front and back surfaces of the metal plate,
Orthogonal 'and an adhesive 3,3' 2 via an arrangement configuration. Then, the driving driving unit 1,1, a by applying an AC voltage to the opposite direction to each other in an arrow with respect to the central axis A the driving unit 1,1, of the phase shifted 180 °, the vibration (Note that the detection When the angular velocity is generated around the central axis A during the vibration, the detectors 2 and 2 ′ are bent in a direction orthogonal to the vibration direction of the drive parts 1 and 1 by the well-known Coriolis force. However, the angular velocity is detected by measuring an electric signal generated in the piezoelectric body of the detection unit 2, 2 ′ due to the bending.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来のものでは駆動部１、１, と検知部２、２' とを直接
に直交、配置して接続した構成であるため、両者の接続
強度が弱く、繰り返しの振動モードによって接続部に疲
労が生じやすく、場合によっては角速度の検知が不可能
になるという問題がある。[SUMMARY OF THE INVENTION However, the conventional intended driving unit 1,1, a detection unit 2, 2 'directly to orthogonal, because it is the connection configuration arranged to, connection strength therebetween is There is a problem that a weak vibration is likely to cause fatigue in the connection portion due to the repeated vibration mode, and in some cases, the angular velocity cannot be detected.
【０００４】本発明は両板状部分の結合強度を向上する
ことにより、上述の問題を解決しようとするものであ
る。The present invention is intended to solve the above problems by improving the bonding strength of both plate-shaped portions.
【０００５】[0005]
【課題を解決するための手段】本発明は上記の点に鑑み
て案出されたものであって、第１の板状部分と、第２の
板状部分とを有し、かつ前記第１の板状部分に圧電体に
より構成された駆動部を、前記第２の板状部分に圧電体
により構成された検知部をそれぞれ形成した構成の角速
度センサであって、前記第１の板状部分の端部の側面と
前記第２の板状部分の端部の側面とが直交関係に配置さ
れるよう、前記両板状部分を金属部材により一体に構成
したという技術的手段を採用したものである。The present invention has been devised in view of the above points, and has a first plate-shaped portion and a second plate-shaped portion, and the first plate-shaped portion is provided. An angular velocity sensor having a driving portion formed of a piezoelectric material on the plate-shaped portion and a detection portion formed of a piezoelectric material on the second plate-shaped portion. A technical means is adopted in which the plate-shaped portions are integrally formed of a metal member so that the side surfaces of the end portions and the side surfaces of the end portions of the second plate-shaped portion are arranged in an orthogonal relationship. is there.
【０００６】[0006]
【作用】両板状部分を金属部材により一体に構成したた
め、両板状部分の結合部分の破損を回避できる。Since both plate-shaped portions are integrally formed of a metal member, it is possible to avoid damage to the joint portion of both plate-shaped portions.
【０００７】[0007]
【発明の効果】耐久性のよい角速度センサが得られる。As described above, the angular velocity sensor having good durability can be obtained.
【０００８】[0008]
【実施例】図１において、４０、４１は本発明に係わる
金属板であり、例えば厚さ０．５ｍｍのＦｅ−Ｃｏ−Ｎ
ｉ合金製の金属よりなる。金属板４０、４１はそれぞれ
偏平かつ長方形状の一対の第１の板状部分４２、４３お
よび一対の第２の板状部分４４、４５を有する構成であ
る。そして、第１の板状部分４２、４３の端部の側面
と、第２の板状部分４４、４５の端部の側面とがＬ字状
となるように互いに直交関係に配置されており、上記金
属板４０、４１を曲げ加工にてかかる配置関係を構成す
ることができる。また、第１の板状部分４２、４３と第
２の板状部分４４、４５との軸線は互いにオフセットし
てあり、この結果、第２の板状部分は第１の板状部分の
外方に位置している。DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, reference numerals 40 and 41 are metal plates according to the present invention, for example, Fe-Co-N having a thickness of 0.5 mm.
It is made of a metal made of i alloy. The metal plates 40 and 41 are configured to have a pair of flat and rectangular first plate-like portions 42 and 43 and a pair of second plate-like portions 44 and 45, respectively. The side surfaces of the end portions of the first plate-shaped portions 42 and 43 and the side surfaces of the end portions of the second plate-shaped portions 44 and 45 are arranged in an orthogonal relationship with each other so as to be L-shaped, The metal plates 40 and 41 can be bent to form such an arrangement relationship. Also, the axes of the first plate-shaped portions 42, 43 and the second plate-shaped portions 44, 45 are offset from each other, and as a result, the second plate-shaped portion is located outside the first plate-shaped portion. Is located in.
【０００９】５０、５１は上記第１の板状部分４２、４
３の互いに反対方向の表面に接着により形成された駆動
用圧電体、５２、５３は上記第２の板状部分４４、４５
の表面に接着により形成された検知用圧電体であり、こ
れら圧電体５０〜５３は例えば０．２ｍｍ厚さのＰＺＴ
セラミックからなる。上記駆動用圧電体５０、５１の分
極方向は図１の矢印方向としてある。Reference numerals 50 and 51 denote the first plate-shaped portions 42 and 4 respectively.
Piezoelectric elements for driving 52, 53 formed by adhesion on the surfaces of the sheet 3 in the opposite directions to each other are the second plate-like portions 44, 45.
Is a piezoelectric body for detection formed by adhesion on the surface of the PZT, and these piezoelectric bodies 50 to 53 are, for example, PZT having a thickness of 0.2 mm.
Made of ceramic. The polarization directions of the driving piezoelectric bodies 50 and 51 are the directions of arrows in FIG.
【００１０】６０は金属端子部で、該金属端子部６０は
第１の板状部分４２、４３側にて溶接、半田付等で固定
されている。７０、７１、および７２はそれぞれ端子部
である。端子部７０は上記検知部としての圧電体５０、
５１に電気的に接続したリード線８０、８１を有し、ま
た端子部７１は駆動部としての圧電体５０、５１に電気
的に接続したリード線８２、８３を有している。Reference numeral 60 denotes a metal terminal portion, and the metal terminal portion 60 is fixed to the first plate-shaped portions 42 and 43 by welding, soldering or the like. Reference numerals 70, 71, and 72 are terminal portions. The terminal portion 70 is the piezoelectric body 50 as the detection portion,
51 has lead wires 80 and 81 electrically connected thereto, and the terminal portion 71 has lead wires 82 and 83 electrically connected to the piezoelectric bodies 50 and 51 as the driving portion.
【００１１】リード線８０、８１は第１の板状部分４
２、４３の側面縁に沿わせて配置されている。端子部７
２は第１の板状部分４２、４３および上記リード線８０
〜８３を介して各圧電体５０、５１に交流電圧を印加す
るために共通端子部として機能する上記端子部６０に電
気的に接続されている。The lead wires 80 and 81 are the first plate-shaped portion 4
It is arranged along the side edges of 2, 43. Terminal part 7
2 is the first plate-shaped portions 42 and 43 and the lead wire 80.
Through 83, it is electrically connected to the above-mentioned terminal portion 60 which functions as a common terminal portion for applying an AC voltage to each piezoelectric body 50, 51.
【００１２】上記構成において、次に作動を説明する。
図示しない交流電圧印加源から交流電圧を端子部７１お
よび端子部７２を介して駆動用圧電体５０、５１に印加
する。これにより、駆動用圧電体５０、５１は伸縮作用
を行い、それが第１の板状部分４２、４３に作用して該
板状部分４２、４３が図１のごとく１８０°の位相ずれ
をもって中心軸Ａに対して互いに逆方向に対称的に駆
動、振動する。Next, the operation of the above structure will be described.
An AC voltage is applied from an AC voltage application source (not shown) to the driving piezoelectric bodies 50 and 51 via the terminal portions 71 and 72. As a result, the driving piezoelectric bodies 50, 51 expand and contract, which acts on the first plate-like portions 42, 43 so that the plate-like portions 42, 43 are centered with a phase shift of 180 ° as shown in FIG. They are driven and vibrate symmetrically in opposite directions with respect to the axis A.
【００１３】かかる振動状態において、中心軸Ａの回り
に角速度が生じると、周知のコリオリの力によって検知
部の第２の板状部分４４、４５が図１の矢印のように屈
曲する。この結果、検知部の圧電体５２、５３が伸縮作
用を受け、その伸縮に応じた電気信号が端子部７０、７
２を介して図示しない検知回路に入力され、ここで上記
角速度を電気的に検知する。なお、駆動用圧電体５０、
５１、検知用圧電体５２、５３を第１の板状部分４２、
４３、第２の板状部分４４、４５の片側に形成したが、
両側に形成しても勿論よい。In this vibrating state, when an angular velocity is generated around the central axis A, the second plate-like portions 44 and 45 of the detecting portion are bent as shown by arrows in FIG. 1 due to the well-known Coriolis force. As a result, the piezoelectric bodies 52 and 53 of the detection unit are subjected to the expansion and contraction action, and the electric signals corresponding to the expansion and contraction are output to the terminal units 70 and 7.
It is input to a detection circuit (not shown) via 2, and the angular velocity is electrically detected here. The driving piezoelectric body 50,
51, the piezoelectric body for detection 52, 53 to the first plate-shaped portion 42,
43 and the second plate-shaped portions 44 and 45 are formed on one side,
Of course, it may be formed on both sides.
【００１４】また、第１の板状部分に検知部を、第２の
板状部分に駆動部を形成することも可能である。It is also possible to form the detecting portion on the first plate-shaped portion and the drive portion on the second plate-shaped portion.
【図１】一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment.
【図２】従来技術を示す斜視図である。FIG. 2 is a perspective view showing a conventional technique.
４０ 基板 ４１ 基板 ４２ 第１の板状部分 ４３ 第１の板状部分 ４４ 第２の板状部分 ４５ 第２の板状部分 ５０ 駆動用圧電体 ５１ 駆動用圧電体 ５２ 検知用圧電体 ５３ 検知用圧電体 40 substrate 41 substrate 42 first plate-shaped portion 43 first plate-shaped portion 44 second plate-shaped portion 45 second plate-shaped portion 50 driving piezoelectric body 51 driving piezoelectric body 52 detection piezoelectric body 53 detection Piezoelectric body
Claims (1)
第１の板状部分に圧電体により構成された駆動部を、前
記第２の板状部分に圧電体により構成された検知部をそ
れぞれ形成した構成の角速度センサであって、前記第１
の板状部分の端部の側面と前記第２の板状部分の端部の
側面とが直交関係に配置されるよう、前記両板状部分を
金属部材により一体に構成したことを特徴とする角速度
センサ。A drive unit having a first plate-shaped portion and a second plate-shaped portion and having a piezoelectric body on the first plate-shaped portion, and a piezoelectric body on the second plate-shaped portion The angular velocity sensor having a structure in which each of the detection units is formed.
The plate-shaped portions are integrally formed of a metal member so that the side surfaces of the end portions of the plate-shaped portion and the side surfaces of the end portions of the second plate-shaped portion are arranged in an orthogonal relationship. Angular velocity sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3172825A JPH0695022B2 (en) | 1991-07-12 | 1991-07-12 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3172825A JPH0695022B2 (en) | 1991-07-12 | 1991-07-12 | Angular velocity sensor |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58176027A Division JPS6067815A (en) | 1983-09-23 | 1983-09-23 | Angular velocity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04339210A JPH04339210A (en) | 1992-11-26 |
| JPH0695022B2 true JPH0695022B2 (en) | 1994-11-24 |
Family
ID=15949063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3172825A Expired - Lifetime JPH0695022B2 (en) | 1991-07-12 | 1991-07-12 | Angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0695022B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003004450A (en) | 2001-06-25 | 2003-01-08 | Matsushita Electric Ind Co Ltd | Composite sensor for angular velocity and acceleration detection |
-
1991
- 1991-07-12 JP JP3172825A patent/JPH0695022B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04339210A (en) | 1992-11-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19950704 |