JPH0697239B2 - Method for manufacturing coaxial needle for probe - Google Patents

Description

The present invention relates to a semiconductor device completed on a semiconductor wafer, and
The present invention relates to a method for manufacturing a coaxial needle that is used by being attached to a probe card, which is one of the methods for obtaining an electrical connection for inspection and measurement.

2. Description of the Related Art Conventionally, a coaxial needle of this type is typically shown in the second drawing of the accompanying drawings.
The process was performed as shown in the figure. That is, 1) A core wire 1 having a predetermined outer diameter, which is a raw material, is cut into a desired length (a in the figure). 2) One end of the core wire 1 is sharply ground by machining to form a taper 2. Create (b in the figure) 3) To further sharpen the tapered portion 2 formed at one end of the core wire 1 and ground to an acute angle, the tapered portion 2 is finished by an etching method and processed into a needle 3. 4) The outer peripheral surface of the linear portion of the needle 3 is coated with the cylindrical insulating material 4 (d). 5) The needle 3 coated with the insulating material 4 serves as an outer conductor tube 5 And the adhesive 6 is poured into the space (50 to 100 μm) between the outer peripheral surface of the insulating material 4 and the inner peripheral surface of the tube 5 (e in the same figure).

Problems to be Solved by the Invention However, such a typical process has the following problems. That is, 1) it is difficult to make the thickness of the insulating material 4 uniform in the step 4 (the same figure d) 2) in step 5 (the same figure e), between the insulating material 4 and the pipe 5 The spacing varies between 50 and 100 μm 3) Due to the above reasons, the center line of the core wire 1 and the tube 5
It is difficult to accurately match the center line of the center line with the adhesive 6 and to bond them with the adhesive 6, and a large eccentricity occurs between the center lines. The characteristic impedance, which is one of the characteristics, varies depending on the position even within one coaxial needle, and also varies depending on the individual). Therefore, the present invention solves the above problems in the coaxial needle manufactured by the conventional typical manufacturing method. 1) In the coaxial needle as a product, in the portion covered by the outer conductor in the longitudinal direction, The characteristic impedance is the same everywhere. 2) The purpose is to obtain a method for manufacturing a coaxial needle that can satisfy the fact that there is no difference in the characteristic impedance of each product and they are the same. .

Means for Solving the Problems In order to achieve this object, the present invention provides: 1) Insulation on the outer peripheral surface of a single core wire having a required outer diameter and a length several times as long as the required length. Coating the material to a substantially uniform thickness 2) Inserting the core wire coated with this insulating material into a tube having the required length and dimensions 3) Introducing the core wire coated with this insulating material into the tube Insertion into the wire to make a long and narrow cable by wire drawing 4) Cutting this cable to the required length 5) Exposing the core wire to both ends of each cut cable 6) This The core wire exposed at one end of the cable is machined at an acute angle to form a taper portion. 7) The taper portion of the core wire is finished by etching. Is.

After the above step 5), after welding a contact material having high electric conductivity and high hardness to the exposed end portion of the core wire,
It is also within the gist of the present invention to perform the steps after step 6).

EXAMPLES Hereinafter, the method of the present invention will be described in detail with reference to FIG. 1 of the accompanying drawings showing the steps thereof.

That is, as shown in FIG. 1, 1) a core wire 10 made of tungsten, rhodium, beryllium copper, phosphor bronze or the like having a required outer diameter and a length several times as long as the required length is attached to polytetrafluoroethylene. (Trade name "Teflon"), immersed in a molten insulating material containing synthetic resin such as silicon, epoxy, polyethylene, extruded through a die and molded to cover the insulating material 11 of uniform length. (Fig. A).

2) Insert the core wire 10 coated with this insulating material 11 into a tube 12 made of copper, brass, beryllium copper, nickel, stainless steel or the like having a required length and required dimensions, and cool it in several steps. Thinning is performed until the outer peripheral surface of the insulating material 11 and the inner peripheral surface of the pipe 12 come into close contact with each other, and then the molded product is lengthened to form a coaxial cable 13 (FIG. 8B).

3) The coaxial cable 13 is cut to a required length to make a large number of probe needle materials 14 having the required length (FIG. 6c and its enlarged view, FIG. D).

4) The core wires 10 at both ends of each material 14 of the probe needle are exposed to create the core wire exposed material 15 (e in the figure).

5) An end portion of one exposed core wire 10 of the core wire exposed material 15 is machined to an acute angle to create a material 17 having a tapered tip portion 16 (f in the figure).

6) Furthermore, this tapered tip 16 is a machined material
The tapered tip portion 17 of 17 is etched and finished to form an etching finished portion 18 to obtain a finished product 19 (g in the figure).

The coaxial needle according to the method of the present invention is manufactured through the steps as described above, but among these steps, steps e), f) and g).
As a modification of the above, the following steps 4 '), 5') and 6 ') as shown by e'), f ') and g') in FIG. 1 can be performed.

4 ′) Through the step 3), the contact material 20 such as osmium, which is a material having high electrical conductivity and hardness, is provided at one end of the core wire 10 of the material 15 in which the core wire 10 is exposed at both ends of the material 14. A blank 15 'is welded to create a material 15' (e 'in the figure).

5 ') The core wire 10 of the material 15' including the contact material 20 is machined at an acute angle to form a material 17 'having tapered tip portions 16', 20 '(f' in the same figure). .

6 ') Finally, the tapered tip portion 16', 2 of this material 17 '
Etching finish processing of 0 ', etching finish part 2
The finished product 19 'is formed by forming 0 "and 16"(g' in the figure). In this way, the contact material 20 ″ is provided on one exposed portion of the exposed core wire 10.
A product 19 'with is obtained.

According to the method of the present invention, the coaxial needles 19 or 19 'are obtained through the above steps. Here, the coaxial needle manufactured by the method of the present invention and the conventional manufacturing method described with reference to FIG. The result of the comparison test in terms of quality and accuracy with the coaxial needle manufactured by will be described as follows. In the comparative test, as an example of design values, the diameter of the core wire is 0.16 mm and the inner diameter of the pipe (outer conductor) is 0.53.
mm, dielectric constant ε is 2.1, characteristic impedance Z
_The table below shows the worst values of the eccentricity, the characteristic impedance, and the dispersion of the characteristic impedance in both manufacturing methods when a coaxial needle with ₀ = 49.5Ω was manufactured.

As can be seen from the table, according to the method of the present invention, the accuracy of characteristic impedance variation is 13% to 0.
It has been dramatically improved to 4%, but it has been confirmed that this effect is greater as the outer diameter of the insulating material and the outer diameter of the core wire are smaller.

Further, when measuring the semiconductor device on the radius wafer using a probe card, by using the coaxial needle manufactured by the method of the present invention, it is possible to accurately measure a high frequency signal, Similarly confirmed.

EFFECTS OF THE INVENTION According to the present invention, since the coaxial needle is manufactured through the above steps, the concentricity between the core wire and the insulating material is improved, and the eccentricity between them is limited to the minimum. In addition, the surface roughness of the insulating material and the uniformity of its thickness are improved, and as a result of cold drawing, the adhesion between the outer pipe and the insulating material is also good, so that The dimensional accuracy between the coaxial needles is improved, and the variation in characteristics among the individual coaxial needles is also reduced. Furthermore, since the method of the present invention can exert the effect of mass production, it is possible to reduce the product price.

[Brief description of drawings]

FIG. 1 is a process drawing showing a manufacturing process of a coaxial needle by the method of the present invention, and FIG. 2 is a process drawing showing a manufacturing process of a coaxial needle by a conventional manufacturing method. 10 …… Core wire, 11 …… Insulation material, 12 …… Metal tube, 14 …… Coaxial needle material, 16,16 ′ …… Tapered tip, 18 …… Etched finish, 19 …… Product, 20… … Contact material, 20 ′ …… Tapered tip of contact material, 20 ″ …… Tapered tip of contact material that is also etched.

Claims (6)

[Claims] 1. A method for manufacturing a coaxial needle for a probe 1) An insulating material having a substantially uniform thickness on an outer peripheral surface of a single core wire having a required outer diameter and a length several times as long as the required length. Covering 2) Inserting the core wire coated with this insulating material into a pipe having a required length and dimensions 3) Cold drawing in a state where the core wire coated with this insulating material is inserted into the pipe Forming a long and narrow cable by applying 4) Cutting this cable to the required length dimension 5) Exposing the core wire to both ends of each cut cable 6) Exposing one end of this cable The core wire is machined into a tapered shape at an acute angle to form a tapered end portion. 7) The step of finishing the tapered end portion of the cable core wire by an etching method. Coaxial for probe The method of production. 2. The manufacturing method according to claim 1, wherein after the contact material is fixed to the end of the core wire of the one end exposed in step 5), the steps after step 6) are performed. Method. 3. The manufacturing method according to claim 2, wherein the contact material is a material having high electric conductivity and high hardness. 4. The manufacturing method according to claim 3, wherein the contact material is osmium or the like. 5. The manufacturing method according to claim 1, wherein the core wire is made of tungsten, rhodium, beryllium copper, phosphor bronze or the like. 6. The manufacturing method according to claim 1, wherein the insulating material is made of a synthetic resin such as polytetrafluoroethylene, silicon, epoxy, or polyethylene.