JPH0697285B2 - Optical coupling device - Google Patents
Optical coupling deviceInfo
- Publication number
- JPH0697285B2 JPH0697285B2 JP59271607A JP27160784A JPH0697285B2 JP H0697285 B2 JPH0697285 B2 JP H0697285B2 JP 59271607 A JP59271607 A JP 59271607A JP 27160784 A JP27160784 A JP 27160784A JP H0697285 B2 JPH0697285 B2 JP H0697285B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- optical
- substrate
- light
- circuit board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Description
【発明の詳細な説明】 発明の背景 この発明は、2つの基板間で光を授受するための光結合
装置に関する。Description: BACKGROUND OF THE INVENTION The present invention relates to an optical coupling device for transmitting and receiving light between two substrates.
近年、多くの光処理機能を一基板上に集積化して作成す
る技術の研究が盛んに行なわれている。基板上の所望の
場所に光を導くために基板に光導波路が形成される。多
くの光機能素子を一基板上に集積化した場合には、光を
縦横に伝播させなければならないから、光を伝播させる
ための光導波路が互いに交差してしまうことがあるのは
避けられない。光導波路の交差部では一方の光導波路を
伝播してきた光が交差する他方の光導波路に漏れてしま
うので、クロス・トーク量の増加やS/N比の低下を招く
という問題がある。このような点から、一基板上に集積
化できる光機能素子の数は自ずと限られたものとなって
しまう。2. Description of the Related Art In recent years, a lot of researches have been made on a technique for integrating many optical processing functions on one substrate to create them. Optical waveguides are formed in the substrate to guide the light to the desired locations on the substrate. When many optical functional elements are integrated on one substrate, light must be propagated vertically and horizontally, so it is inevitable that the optical waveguides for propagating light will cross each other. . At the intersection of the optical waveguides, the light propagating through one optical waveguide leaks to the other optical waveguide that intersects, so there is a problem that the amount of cross talk increases and the S / N ratio decreases. From such a point, the number of optical functional elements that can be integrated on one substrate is naturally limited.
そこで、多くの光機能をコンパクトに実現するための一
方策して、複数の基板を立体的に配置することが考えら
れる。複数の基板を立体的に配置した場合には、基板間
で光の授受を行なう必要がある。Therefore, it is conceivable to arrange a plurality of substrates three-dimensionally as one measure for realizing many optical functions compactly. When a plurality of substrates are arranged three-dimensionally, it is necessary to transfer light between the substrates.
発明の概要 この発明は、2つの基板間での光の授受を比較的簡単な
構造で可能とし、コンパクトな集積型光回路の実現のた
めの一手段を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide one means for realizing a compact integrated optical circuit by allowing light transmission and reception between two substrates with a relatively simple structure.
この発明による光結合装置は、第1の基板に対して第2
の基板がほぼ垂直に配置され、上記第1の基板には、そ
の表面に第1の光導波路が形成され、上記第2の基板に
は、その表面に第2の光導波路が形成されるとともに、
上記表面とほぼ垂直な側面にこの側面に沿った方向に光
を伝播させる上記表面の光導波路と光学的に連結した側
面光導波路が形成され、上記第1の光導波路と上記側面
光導波路とが、5層光導波路構造を形成するようにほぼ
平行にかつ小さな空気間隙(真空または他の気体間隙を
含む)をあけて配置されていることを特徴とする。The optical coupling device according to the present invention has a second substrate with respect to the first substrate.
Substrate is arranged substantially vertically, a first optical waveguide is formed on the surface of the first substrate, and a second optical waveguide is formed on the surface of the second substrate. ,
A side surface optical waveguide is formed on a side surface substantially perpendicular to the surface and is optically connected to an optical waveguide on the surface for propagating light in a direction along the side surface, and the first optical waveguide and the side surface optical waveguide are formed. It is characterized in that it is arranged substantially in parallel with a small air gap (including vacuum or other gas gap) so as to form a five-layer optical waveguide structure.
この発明による光結合装置は、双方向性をもつから第1
の基板から第2の基板に光を導くことができるばかりで
なく、第2の基板から第1の基板に光を伝達することも
可能となる。The optical coupling device according to the present invention is bidirectional, so
Not only can the light be guided from the first substrate to the second substrate, but also the light can be transmitted from the second substrate to the first substrate.
この発明によると、2つの基板間で自在に光を授受する
ことができる。また、第1の基板の第1の光導波路と第
2の基板の側面光導波路との結合長を調整することによ
り、結合効率を所望の値に設定することができる。構成
も簡素で調整も容易である。According to the present invention, light can be freely transmitted and received between the two substrates. Further, the coupling efficiency can be set to a desired value by adjusting the coupling length between the first optical waveguide of the first substrate and the side optical waveguide of the second substrate. The structure is simple and the adjustment is easy.
さらに、この発明によると2つの基板を互いに垂直に配
置して光結合を行うことが可能となるから、一基板の面
積を増大させることなく2つの基板を立体的に配置して
集積度を高めることもできる。基板の平面的な広がりを
抑えることができるから、全体的にコンパクト集積型光
回路の実現に役立つ。Further, according to the present invention, it is possible to arrange the two substrates perpendicularly to each other to perform optical coupling. Therefore, the two substrates are three-dimensionally arranged to increase the degree of integration without increasing the area of one substrate. You can also Since the planar spread of the substrate can be suppressed, it is useful for realizing a compact integrated optical circuit as a whole.
実施例の説明 以下、この発明を立体光回路装置に適用した実施例につ
いて詳述する。Description of Embodiments Embodiments in which the present invention is applied to a three-dimensional optical circuit device will be described in detail below.
(1)立体光回路装置 第1図は立体光回路装置の概要を示している。母基板
(10)および複数の回路基板(20)(30)(40)が支持
体(1)に固定支持されている。各回路基板(20)〜
(40)は母基板(10)に対して直角に接している。母基
板(10)および回路基板(20)〜(40)には所望の光回
路を構成する光導波路および光機能素子が集積化してつ
くられている。母基板(10)上に形成された光導波路の
一例が(11)(15)で示されている。光導波路(11)か
ら導かれた光を受光する受光素子(16)および光導波路
(15)に光を送出するための発光素子(12)が母基板
(10)の端面に固定されている。回路基板(20)上に形
成された光導波路の一例が(21)(25)で示されてお
り、これらの光導波路(21)(25)の途上に設けられた
光機能素子または光処理部の例が(23)(27)で示され
ている。光導波路(21)および光処理部(23)は回路基
板(20)の上面に、光導波路(25)および光処理部(2
7)は基板(20)の下面に形成されている。光導波路(2
1)には発光素子(22)からの光が導かれ、光導波路(2
5)を伝播してきた光は受光素子(26)に受光される。
これらの素子(22)(26)は回路基板(20)の端面に固
定されている。光導波路はよく知られているように、基
板に所定の物質を拡散させることにより形成される。回
路基板(30)にも、同じように、光導波路(31)(3
5)、光処理部(33)(37)、発光素子(32)、受光素
子(36)等が設けられている。図示は省略されている
が、必要に応じて他の光導波路、光機能素子または光処
理部、発、受光素子等が母基板(10)、回路基板(20)
〜(40)に設けられる。(1) Three-dimensional optical circuit device FIG. 1 shows an outline of the three-dimensional optical circuit device. A mother board (10) and a plurality of circuit boards (20) (30) (40) are fixedly supported by a support (1). Each circuit board (20) ~
(40) is in contact with the mother substrate (10) at a right angle. The mother substrate (10) and the circuit boards (20) to (40) are integrated with optical waveguides and optical functional elements that form a desired optical circuit. Examples of optical waveguides formed on the mother substrate (10) are shown by (11) and (15). A light receiving element (16) for receiving the light guided from the optical waveguide (11) and a light emitting element (12) for transmitting the light to the optical waveguide (15) are fixed to the end surface of the mother substrate (10). An example of an optical waveguide formed on a circuit board (20) is shown by (21) (25), and an optical functional element or an optical processing unit provided on the way of these optical waveguides (21) (25). Examples of are shown in (23) (27). The optical waveguide (21) and the optical processing unit (23) are provided on the upper surface of the circuit board (20) on the optical waveguide (25) and the optical processing unit (2).
7) is formed on the lower surface of the substrate (20). Optical waveguide (2
The light from the light emitting element (22) is guided to the (1) and the optical waveguide (2
The light propagating through 5) is received by the light receiving element (26).
These elements (22) (26) are fixed to the end surface of the circuit board (20). As is well known, the optical waveguide is formed by diffusing a predetermined substance into the substrate. Similarly, for the circuit board (30), the optical waveguides (31) (3
5), a light processing section (33) (37), a light emitting element (32), a light receiving element (36) and the like are provided. Although not shown, other optical waveguides, optical functional elements or optical processing units, light emitting elements, light receiving elements, etc. may be provided on the mother board (10) and the circuit board (20) as necessary.
~ (40).
(2)回路基板と光結合装置 回路基板(20)〜(40)上の光導波路、およびこれらの
回路基板(20)〜(40)と母基板(10)との間の光結合
装置はすべて同じ構成であるから、回路基板(20)およ
びその光導波路(21)を例にとって説明する。(2) Circuit board and optical coupling device All the optical waveguides on the circuit boards (20) to (40) and the optical coupling device between these circuit boards (20) to (40) and the mother board (10) are Since they have the same configuration, the circuit board (20) and its optical waveguide (21) will be described as an example.
第2図および第4図において、回路基板(20)に形成さ
れた光導波路(21)は基板(20)の母基板(10)と接す
る端面(20a)にまでのびている。端面上の光導波路が
結合用光導波路であり、これを(21a)で示す。そうし
て、回路基板(20)の表面と端面(20a)との稜が45゜
の角度で切欠かれ斜面(24)となっている。この斜面
(24)が全反射面となる。光導波路(21)を伝播する光
は斜面(24)で全反射して光導波路(21a)に向う。光
導波路(21a)を伝播する光があれば、この光は斜面(2
4)で全反射して光導波路(21)に向うのはいうまでも
ない。2 and 4, the optical waveguide (21) formed on the circuit board (20) extends to the end face (20a) of the board (20) which is in contact with the mother board (10). The optical waveguide on the end face is the coupling optical waveguide, which is shown by (21a). Then, the ridge between the surface of the circuit board (20) and the end face (20a) is cut away at an angle of 45 ° to form a slope (24). This slope (24) becomes the total reflection surface. The light propagating through the optical waveguide (21) is totally reflected by the slope (24) and travels toward the optical waveguide (21a). If there is light that propagates through the optical waveguide (21a), this light will
It goes without saying that the light is totally reflected at 4) and goes to the optical waveguide (21).
光導波路(21)の屈折率をn1、空気の屈折率をn2=1と
し、斜面(24)への入射光が斜面(24)に立てた法線と
なす角をθとすると、入射光が斜面(24)で全反射する
条件はsinθ>n2/n1で与えられる。基板(20)がLiNbO3
の場合にはその屈折率は約2.2、ガラスの場合は約1.5で
ある。これらの屈折率をn1として採用したとすると、上
記の全反射条件はそれぞれθ>27゜、θ>42゜となる。
通常、基板(20)の表面と端面とのなす角は直角である
から斜面(24)は45゜の傾きをもつ。したがって、第4
図に示されるθは45゜であるから、斜面(24)は全反射
の条件を満足する。When the refractive index of the optical waveguide (21) is n1, the refractive index of air is n2 = 1, and the angle between the incident light on the slope (24) and the normal line to the slope (24) is θ, the incident light is The condition for total reflection on the slope (24) is given by sin θ> n2 / n1. Substrate (20) is LiNbO 3
The refractive index is about 2.2 in the case of, and about 1.5 in the case of glass. If these refractive indices are adopted as n1, the above-mentioned total reflection conditions are θ> 27 ° and θ> 42 °, respectively.
Normally, the angle between the surface of the substrate (20) and the end face is a right angle, and therefore the slope (24) has an inclination of 45 °. Therefore, the fourth
Since θ shown in the figure is 45 °, the slope (24) satisfies the condition of total reflection.
第2図において、母基板(10)の表面上の光導波路(1
1)と回路基板(20)の端面(20a)上の光導波路(21
a)とは対面している。また母基板(10)の表面と回路
基板(20)の端面(20a)とは密着して接しているが、
両面の間には実際にはわずかの間隙(波長オーダ)があ
る。したがって、母基板(10)、その光導波路(11)、
上記両面間の間隙、光導波路(21a)および回路基板(2
0)は5層2次元光導波路構造と考えることできる。こ
のような5層2次元光導波路構造では、光導波路(21
a)を伝播する光は、光の伝播にともない次第に光導波
路(11)に移行し、ある長さ(完全結合長)で光導波路
(11)にその全パワーが移行する。光導波路(21a)か
ら光導波路(11)に移行する光のパワーは、両光導波路
(21a)(11)の重なっている部分の長さ(結合長)に
依存する。完全結合長の場合に全光パワーが光導波路
(21a)から光導波路(11)に移る。したがって、光導
波路(21)を伝播する光は、斜面(24)で全反射して光
導波路(21a)に進み、さらに結合長に応じた割合で光
導波路(11)に移行し、光導波路(11)を伝播してい
く。In FIG. 2, the optical waveguide (1
1) and the optical waveguide (21) on the end face (20a) of the circuit board (20).
Faced with a). The surface of the mother board (10) and the end surface (20a) of the circuit board (20) are in close contact with each other,
There is actually a small gap (wavelength order) between the two sides. Therefore, the mother substrate (10), its optical waveguide (11),
The gap between the two surfaces, the optical waveguide (21a) and the circuit board (2
0) can be considered as a five-layer two-dimensional optical waveguide structure. In such a five-layer two-dimensional optical waveguide structure, the optical waveguide (21
The light propagating in a) gradually moves to the optical waveguide (11) as the light propagates, and its total power moves to the optical waveguide (11) at a certain length (complete coupling length). The power of light transferred from the optical waveguide (21a) to the optical waveguide (11) depends on the length (coupling length) of the overlapping portions of the both optical waveguides (21a) (11). In the case of the complete coupling length, the total optical power is transferred from the optical waveguide (21a) to the optical waveguide (11). Therefore, the light propagating through the optical waveguide (21) is totally reflected on the slope (24) and proceeds to the optical waveguide (21a), and further migrates to the optical waveguide (11) at a rate according to the coupling length. 11) Propagate.
光導波路(11)を伝播する光があればこの光は光導波路
(21a)に移行し、さらに光導波路(21)に進むのはい
うまでもない。It goes without saying that if there is light propagating through the optical waveguide (11), this light moves to the optical waveguide (21a) and further proceeds to the optical waveguide (21).
第3図は、回路基板(20)の上下(表裏)両面に光導波
路(21)(28)が形成され、これらの光導波路(21)
(28)が端面に形成された光導波路(21a)と全反射面
を経てつながっている例を示している。光導波路(21)
の光は光導波路(21a)から母基板(10)の光導波路(1
1)に移行する。また光導波路(11)の光は光導波路(2
1a)に移り光導波路(28)に進む。FIG. 3 shows that optical waveguides (21) and (28) are formed on both upper and lower surfaces (front and back) of a circuit board (20).
An example is shown in which (28) is connected to the optical waveguide (21a) formed on the end face via the total reflection surface. Optical waveguide (21)
Light from the optical waveguide (21a) to the optical waveguide (1) of the mother substrate (10).
Go to 1). In addition, the light of the optical waveguide (11)
Go to 1a) and proceed to the optical waveguide (28).
第5図は、第2図、第3図に示すような光導波路を作成
するための方法を示している。槽(60)内に、たとえば
KNO3溶液が入っている。基板材料、たとえばLiNbO3基板
(70)および電極(61)がこの溶液内に浸されている。
基板(70)の稜には斜面(全反射面)があらかじめ形成
されかつ光学研磨されている。基板(70)は直流電源
(62)の負極に、電極(61)はスイッチ(63)を介して
正極にそれぞれ接続されている。スイッチ(63)がオン
とされると、KNO3溶液中のK+イオンが基板(70)に引き
寄せられかつ基板(70)内部に拡散していく。この結
果、基板(70)にはK+が拡散された光導波路が形成され
る。これはイオン交換法と呼ばれる方法である。基板
(70)の光導波路を形成すべき部分以外の表面をマスク
しておけば、所望パターンの光導波路をつくることがで
き、マスクを施さない場合には基板(70)の表裏、端、
側面および斜面に光導波層(路)が形成される。FIG. 5 shows a method for producing an optical waveguide as shown in FIGS. 2 and 3. In the tank (60), for example
Contains KNO 3 solution. A substrate material, for example a LiNbO 3 substrate (70) and an electrode (61) is immersed in this solution.
A sloping surface (total reflection surface) is previously formed on the ridge of the substrate (70) and is optically polished. The substrate (70) is connected to the negative electrode of the DC power source (62), and the electrode (61) is connected to the positive electrode via the switch (63). When the switch (63) is turned on, K + ions in the KNO 3 solution are attracted to the substrate (70) and diffuse inside the substrate (70). As a result, an optical waveguide in which K + is diffused is formed on the substrate (70). This is a method called the ion exchange method. If the surface of the substrate (70) other than the portion where the optical waveguide is to be formed is masked, the optical waveguide having a desired pattern can be formed.
Optical waveguide layers (roads) are formed on the side surfaces and the slopes.
(3)立体光回路装置の作用 第1図に戻って、発光素子(12)から出力された光は母
基板(10)上の光導波路(15)を伝播し、上述の光結合
装置により回路基板(20)(30)の下面に形成された光
導波路(25)(35)に適当な割合で移行しこれらの光導
波路(25)(35)をそれぞれ伝播していく。そして、光
処理部(27)(37)で所定の加工がそれぞれ施されたの
ち、各受光素子(26)(36)に受光される。このように
して、母基板(10)から光を複数の回路基板(20)(3
0)等に供給することが可能となる。(3) Operation of the three-dimensional optical circuit device Returning to FIG. 1, the light output from the light emitting element (12) propagates through the optical waveguide (15) on the mother substrate (10), and the circuit is generated by the above optical coupling device. It moves to the optical waveguides (25) (35) formed on the lower surface of the substrates (20) (30) at an appropriate ratio and propagates through these optical waveguides (25) (35) respectively. Then, after being subjected to predetermined processing by the light processing units (27) and (37), the light is received by the light receiving elements (26) and (36). In this way, light is emitted from the mother board (10) into the plurality of circuit boards (20) (3
0) etc. can be supplied.
発光素子(22)から出力された光は回路基板(20)の上
面に形成された光導波路(21)に導かれ、光処理部(2
3)で適当な処理が施されたのち、さらに光導波路(2
1)を進み、上述の光結合装置を介して母基板(10)上
の光導波路(11)に移行する。そして、光導波路(11)
を伝播し、受光素子(16)によって受光される。回路基
板(30)上の発光素子(32)から出力され光導波路(3
1)を伝播する光もまた同じように、母基板(10)上の
光導波路(11)から取出される。このように、複数の回
路基板(20)(30)等上を伝播する光を母基板(10)か
ら取出すことができる。The light output from the light emitting element (22) is guided to the optical waveguide (21) formed on the upper surface of the circuit board (20), and the light processing unit (2
After the appropriate treatment in 3), the optical waveguide (2
Proceeding to 1), the light is transferred to the optical waveguide (11) on the mother substrate (10) through the above-mentioned optical coupling device. And optical waveguide (11)
And is received by the light receiving element (16). The light is output from the light emitting element (32) on the circuit board (30) and the optical waveguide (3
The light propagating in 1) is also similarly extracted from the optical waveguide (11) on the mother substrate (10). In this way, the light propagating on the plurality of circuit boards (20) (30) and the like can be extracted from the mother board (10).
上述の光の導入、取出しは同時に行なってもよいし、時
間的タイミングを変えて(たとえば時分割に)行なって
もよい。母基板(10)上の光導波路と回路基板(20)
(30)等上の光導波路との結合効率を所望の値に設定す
ることにより、任意の光量の光の導入、取出しが可能と
なる。The above-described introduction and extraction of light may be performed at the same time, or may be performed at different timings (for example, in time division). Optical waveguide and circuit board (20) on mother board (10)
By setting the coupling efficiency with the optical waveguide on (30) and the like to a desired value, it is possible to introduce and extract light of an arbitrary amount of light.
たとえば、回路基板(20)から回路基板(30)へという
風に、複数の回路基板上の光導波路間の光の送受も母基
板(10)を介して行なうことができる。For example, transmission and reception of light between optical waveguides on a plurality of circuit boards can be performed via the mother board (10) in the manner of moving from the circuit board (20) to the circuit board (30).
上記実施例では、各基板上に3次元的な光導波路が形成
されているが、各基板表(裏、端、側)面全体に高屈折
率層を形成し、これを光導波路(層)としてもよい。も
ちろん、発、受光素子等との光結合のために、光導波路
(層)上に導波型レンズを形成することもできる。In the above embodiment, the three-dimensional optical waveguide is formed on each substrate, but a high refractive index layer is formed on the entire front (back, end, side) surface of each substrate, and this is used as an optical waveguide (layer). May be Of course, a waveguide lens may be formed on the optical waveguide (layer) for optical coupling with the light emitting / receiving element.
2つの回路基板を結合用導波路が形成されたそれらの端
面同志を突きあわせることにより、平面的に光結合させ
ることも可能である。It is also possible to optically couple two circuit boards in a plane by abutting the end surfaces of the two circuit boards on which the coupling waveguide is formed.
第1図は立体光回路装置の例を示す斜視図、第2図およ
び第3図は光結合装置の例をそれぞれ示す断面図、第4
図は回路基板の角部を拡大して示す断面図、第5図は回
路基板の作成方法の例を説明するための構成図である。 (10)……母基板、(11)(15)……母基板の光導波
路、(20)(30)(40)……回路基板、(21)(25)
(31)(35)……回路基板の光導波路、(21a)……結
合用光導波路、(24)……全反射面。FIG. 1 is a perspective view showing an example of a three-dimensional optical circuit device, FIGS. 2 and 3 are sectional views showing examples of an optical coupling device, respectively.
FIG. 5 is an enlarged cross-sectional view showing a corner portion of the circuit board, and FIG. 5 is a configuration diagram for explaining an example of a method for producing the circuit board. (10) …… Mother board, (11) (15) …… Optical waveguide of mother board, (20) (30) (40) …… Circuit board, (21) (25)
(31) (35) ...... Circuit board optical waveguide, (21a) ...... Coupling optical waveguide, (24) ...... Total reflection surface.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 俣野 正治 京都府京都市右京区花園土堂町10番地 立 石電機株式会社内 (72)発明者 山下 牧 京都府京都市右京区花園土堂町10番地 立 石電機株式会社内 (56)参考文献 特開 昭56−42202(JP,A) 特開 昭56−42203(JP,A) 実公 昭54−23903(JP,Y2) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Masaharu Matano, Inventor Shoji Matano, No. 10 Hanazono Todo-cho, Ukyo-ku, Kyoto City, Kyoto Tateishi Electric Co., Ltd. (72) Maki Yamashita No. 10 Hanazono Todo-cho, Kyoto, Kyoto Within Ishi Denki Co., Ltd. (56) Reference JP-A-56-42202 (JP, A) JP-A-56-42203 (JP, A) Jitsuko-Sho 54-23903 (JP, Y2)
Claims (1)
に配置され、 上記第1の基板には、その表面に第1の光導波路が形成
され、 上記第2の基板には、その表面に第2の光導波路が形成
されるとともに、上記表面とほぼ垂直な側面にこの側面
に沿った方向に光を伝播させる上記表面の光導波路と光
学的に連結した側面光導波路が形成され、 上記第1の光導波路と上記側面光導波路とが、5層光導
波路構造を形成するようにほぼ平行にかつ小さな空気間
隙をあけて配置されている、 光結合装置。1. A second substrate is arranged substantially perpendicular to a first substrate, a first optical waveguide is formed on the surface of the first substrate, and a second optical substrate is formed on the second substrate. , A second optical waveguide is formed on the surface thereof, and a side surface optical waveguide optically connected to the optical waveguide of the surface for propagating light in a direction along the side surface is formed on a side surface substantially perpendicular to the surface. And an optical coupling device in which the first optical waveguide and the side optical waveguide are arranged substantially parallel to each other with a small air gap so as to form a five-layer optical waveguide structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59271607A JPH0697285B2 (en) | 1984-12-21 | 1984-12-21 | Optical coupling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59271607A JPH0697285B2 (en) | 1984-12-21 | 1984-12-21 | Optical coupling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61148406A JPS61148406A (en) | 1986-07-07 |
| JPH0697285B2 true JPH0697285B2 (en) | 1994-11-30 |
Family
ID=17502429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59271607A Expired - Lifetime JPH0697285B2 (en) | 1984-12-21 | 1984-12-21 | Optical coupling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0697285B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6944377B2 (en) | 2002-03-15 | 2005-09-13 | Hitachi Maxell, Ltd. | Optical communication device and laminated optical communication module |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423903U (en) * | 1977-07-21 | 1979-02-16 |
-
1984
- 1984-12-21 JP JP59271607A patent/JPH0697285B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61148406A (en) | 1986-07-07 |
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