JPH0698583B2 - Micro mover for micro manipulator - Google Patents

Description

The present invention relates to a micro-moving device for a micromanipulator.

(Prior art) Conventionally, in biotechnology, artificial manipulation is applied to genes, cells, etc. to create new genetic information bodies,
There are fields that utilize or research this. There are various objects such as genes, cells, nuclei, fertilized embryos, tissues, or protozoa. Among them, micromanipulation is a method for applying physical / mechanical manipulation to what can be observed with an optical microscope. For example, in the case of injecting a foreign gene into animal and plant cells or the nucleus to analyze the gene expression mechanism, or dividing an early embryo or morula and transplanting it into a foster parent,
The micromanipulator is indispensable when producing monozygous plurals, or when transplanting another individual into the cytoplasm of a fertilized egg to produce a cloned organism.

On the other hand, a micro-moving device based on impact force using a piezoelectric element (or electrostrictive element) has already been proposed by the inventor of the present application and is disclosed as Japanese Patent Laid-Open No. 63-299785.

An outline of the configuration and operation of such a conventional micro-moving device will be described with reference to FIGS. 12 to 14.

As shown in these figures, the conventional micro-movement device is configured such that the moving body 2 and the inertial body 3 are coupled by a piezoelectric element 4, the moving body 2 is placed on the base 1 and held by the frictional force. Has been done.

Therefore, a voltage is applied to the piezoelectric element 4, the inertial body 3 is accelerated, and the reaction of the inertial body 3 is used to cause the moving body 2 to move, so that a fine movement of about 10 nm to 10 μm is possible even with a simple mechanism. I have to.

The movement principle is as follows.

That is, when moving the moving body 2 in the left (+) direction, first, as shown in FIG. 15 (a), the piezoelectric element 4 is contracted, and then, as shown in FIG. 15 (b), When the piezoelectric element 4 is suddenly extended, the moving body 2 and the inertial body 3 move in a direction away from each other. Next, as shown in FIG. 15 (c), the piezoelectric element 4 is slowly pulled back, and as shown in FIG. 15 (d), when the piezoelectric element 4 returns to its original length, it is suddenly stopped. The inertial body 3 collides with the moving body 2 and the moving body 2 moves leftward as shown in FIG. 15 (e).

Further, when moving the moving body 2 in the right (-) direction, first, as shown in FIG. 16 (a), from the state where the piezoelectric element 4 extends, as shown in FIG. 16 (b), When the piezoelectric element 4 is contracted abruptly, the moving body 2 and the inertial body 3 move in the directions approaching each other. Next, as shown in FIG. 16 (c), the piezoelectric element 4 is slowly extended, and as shown in FIG. 16 (d), when the piezoelectric element 4 returns to its original length, it is suddenly stopped. The inertial body 3 collides with the moving body 2, and the moving body 2 moves to the right as shown in FIG. 16 (e).

Furthermore, the inventor of the present application has applied this micromovement device to a micromanipulator, which is disclosed in Japanese Patent Application No. 1-87287.
It has already been proposed as an issue.

(Problems to be Solved by the Invention) However, in the above-described conventional minute moving device, the piezoelectric element 4 is bonded to the moving body 2, and the inertial body 3 is further attached to the piezoelectric element 4.
I'm trying to glue. That is, since the inertial body 3 is attached so as to project from the piezoelectric element 4, the piezoelectric element 4 constantly receives the force of being pushed down corresponding to the weight of the inertial body 3. Further, since the piezoelectric element 4 and the inertial body 3 are shaped so as to project from the moving body 2, there is a problem in that the protrusion thereof is conspicuous and the aesthetic appearance is spoiled.

An object of the present invention is to eliminate the above-mentioned problems, and to provide a micro-moving device of a micromanipulator which is compactly equipped and has excellent operation characteristics.

(Means for Solving the Problem) In order to achieve the above object, the present invention provides a micromanipulator micromoving device for driving a microdevice,
A movable body (12, 30) supported by a support body (10) via a friction surface (18) so as to be linearly movable, a microdevice (13) attached to the movable body (12), and the movable body ( Piezoelectric element (22,2) fixed to the rear end of
3, 33, 34) and a protrusion (21b, 32b) that fits into the void, and an inertial body (21, 23, 34) fixed to the rear end of the piezoelectric element (22, 23, 33, 34). 32) and are provided.

Here, the void of the piezoelectric element (22, 23, 33, 34) refers to a through hole (22a, 33a) or a recessed portion (23a, 34a) whose fixing surface to the moving body is closed.

Further, the movable body (30) is formed with a recess (31), and the piezoelectric element (33) and the inertial body (32) are fixed and built in the recess (31).

Furthermore, in a micro-moving device of a micromanipulator that drives a microdevice, a moving body (40, 50) supported by a supporting body so as to be linearly movable via a friction surface, and this moving body (40, 50).
50), a piezoelectric device (43, 53) fixed to the rear end of the moving body (40, 50), and a rear end of the piezoelectric device (43, 53) Recess (41,51) (42,5
It is fixed to 2).

(Operation) According to the present invention, since it is configured as described above, it is possible to make the device compact and improve the operating characteristics. Further, the width of protrusion from the moving body can be shortened. That is, it is possible to reduce the size of the entire minute moving device to the maximum moving body width. Furthermore, since the protrusion of the piezoelectric element and the inertial body assembled to the moving body can be reduced, the appearance can be improved.

(Example) Hereinafter, the Example of this invention is described in detail, referring drawings.

FIG. 1 is an overall perspective view of a micromanipulator showing a first embodiment of the present invention, FIG. 2 is a plan view of the micromanipulator, and FIG. 3 is a sectional view taken along the line CC of FIG.

In these figures, the support 10 is composed of two upper and lower plates and is elastically assembled by four bolts 15 having a coil spring 17 fixed at one end by a set screw 16. In this way, a square through hole is formed in the center of the assembled support body 10, and the square moving body is formed therein.
Twelve are supported. That is, the moving body 12 is the friction surface of the support body 10.
It is movably supported via 18. At the tip 11 of this moving body 12, a microdevice 13 for manipulation is fixed.
It is removably attached by 19.

On the other hand, a minute moving device 20 is provided at the rear end of the moving body 12. That is, the inertia body 21 is coupled to the rear end of the moving body 12 via the piezoelectric element 22.

Here, an electric field is applied to the piezoelectric element 22 of the minute moving device 20 to move it, and the moving body 12 is minutely driven by using this kinetic energy, the inertial action of the inertial body 21, and the reaction force acting on the moving body 12. As a result, the object is processed by the manipulation microdevice 13 fixed to the moving body 12.

Further, by controlling the amount of movement of the moving body 12 by changing the voltage value applied to the piezoelectric element 22, both a relatively rough movement for the purpose of movement and a fine movement for the purpose of manipulation, It can be performed by one micro-moving device 20. As a result, the structure of the conventional micromanipulator is downsized and simplified.

Next, the above-mentioned minute moving device will be described with reference to FIG. That is, FIG. 4 is an enlarged sectional view of a B portion in FIG.

As shown in the figure, the micro-moving device of the present invention includes a piezoelectric element 22 that is bonded and fixed to the rear end of the moving body 12 and has a through hole 22a, and a protrusion that fits into the through hole 22a. An inertial body 21 having a 21b and a base portion 21a and fixed in the through hole 22a of the piezoelectric element 22 is provided.

Further, by deforming the piezoelectric element 22, as shown in FIG.
The piezoelectric element 23 may have a recess 23a whose fixed surface to the moving body 12 is closed.

With this structure, the area for bonding and fixing to the moving body 12 can be made wider than that of the piezoelectric element 22 having the through hole 22a shown in FIG. 4, so that stable fixing can be performed.

FIG. 6 is a sectional view of a micro-moving device for a micromanipulator showing a second embodiment of the present invention.

As shown in this figure, at the rear end of the moving body 30, a recess 31 having a lower horizontal surface 31a, a vertical surface 31b and an upper horizontal surface 31c.
Then, the piezoelectric element 33 having the through hole 33a is bonded and fixed to the vertical surface 31b. Further, the inertial body 32 is provided at the rear end of the piezoelectric element 33. That is, the protrusion 32b is fitted into the through hole 33a, the base portion 32a is fixed to the rear end portion of the piezoelectric element 33,
A minute moving device composed of the piezoelectric element 33 and the inertial body 32,
Built in the recess 31.

As the structure of this minute moving device, the piezoelectric element is deformed as shown in FIG.
The piezoelectric element 34 may be formed to have a recess 34a whose fixing surface to b is closed.

FIG. 8 is a side view of a micro-moving device for a micromanipulator showing a third embodiment of the present invention, and FIG. 9 is a top view of the micro-moving device for a micromanipulator.

As shown in these figures, the piezoelectric element 43 is bonded and fixed to the rear end of the moving body 40. Further, an inertial body 41 having a recess 42 is provided at the rear end of the piezoelectric element 43. That is, the piezoelectric element 43 is bonded and fixed to the recess 42 of the inertial body 41.

Therefore, the length of the piezoelectric element 43 and the inertial body 41 attached to the moving body 40 can be shortened, and a compact micromanipulator micromoving device can be obtained.

FIG. 10 is a side view of a micro-moving device for a micromanipulator showing a fourth embodiment of the present invention, and FIG. 11 is a top view of the micro-moving device for a micromanipulator.

As shown in these figures, the piezoelectric element 53 is bonded and fixed to the rear end of the moving body 50. An inertial body 51 having a wide recess 52 is bonded and fixed to the rear end of the piezoelectric element 53. That is, the inertial body 51 includes the base portion 51a and both side pieces 51 extending from both ends thereof.
b, 51b, and the tips of both side pieces 51b, 51b are movable bodies.
It is formed so as to face the outer surface of the rear end of 50.

Therefore, the lengths of the piezoelectric element 53 and the inertial body 51 attached to the moving body 50 in the moving direction can be shortened, and a compact micromanipulator micromoving device can be obtained.

Further, in the above-mentioned embodiment, the pipette is shown as the microdevice, but it can be applied to a microneedle, a microelectrode or the like.

The present invention is not limited to the above embodiment,
Various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

(Effects of the Invention) As described in detail above, according to the present invention, the following effects can be achieved.

(1) The device can be made compact and
It is possible to improve operating characteristics.

(2) The protrusion width from the moving body can be shortened. That is, it is possible to reduce the size of the entire minute moving device to the maximum moving body width.

(3) Since the protrusions of the piezoelectric element and the inertial body mounted on the moving body can be reduced, the appearance can be improved.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a micromanipulator showing a first embodiment of the present invention, FIG. 2 is a plan view of the micromanipulator, FIG. 3 is a sectional view taken along the line CC of FIG. 2, and FIG.
FIG. 1 is a sectional view of a micro-moving device for a micromanipulator showing a first embodiment of the present invention (enlarged view of B part in FIG. 1), FIG. 5 is a modified sectional view of the micro-moving device, and FIG. FIG. 7 is a sectional view of a micro-moving device for a micromanipulator showing a second embodiment of the invention, FIG. 7 is a modified sectional view of the micro-moving device, and FIG. 8 is a micro-manipulator for a micromanipulator showing a third embodiment of the present invention. FIG. 9 is a side view of the moving device, FIG. 9 is a top view of the micro moving device of the micro manipulator, FIG. 10 is a side view of the micro moving device of the micro manipulator showing a fourth embodiment of the present invention, and FIG. FIG. 12 is a top view of a micro moving device of a micromanipulator, FIG. 12 is a side view of a conventional micro moving device, and FIG. 13 is a plan view of the micro moving device.
FIG. 14 is a cross-sectional view taken along the line AA of FIG. 13, and FIGS. 15 and 16 are explanatory views of the operating principle of the minute moving device. 10 …… Supporting body, 12,30,40,50 …… Mobile body, 11 …… Mobile body 1
Tip of 2、13 …… Microdevice for manipulation, 15
...... Bolt, 16 …… Set screw, 17 …… Coil spring, 18 …… Frictional surface, 19 …… Fixing tool, 20 …… Micro mover, 21,32,41,51 …… Inertia, 21a, 32a ...... Base part, 21
b, 32b …… projection, 22,23,33,34,43,53 …… piezoelectric element, 22a,
33a ... through hole, 23a, 31, 34a ... depression, 31a ... lower horizontal surface, 31b ... vertical surface, 31c ... upper horizontal surface, 42, 52 ...
Recess, 51a ... Base, 51b, 51b ... Both sides.

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Jun Mimatsu, 635 Nakamuhara, Tsuchiura City, Ibaraki Prefecture, Primaham Co., Ltd. JP-A-63-299785 (JP, A) JP-A-61-87110 (JP, A)

Claims (8)

[Claims] 1. A micro-moving device for a micro-manipulator for driving micro-devices, comprising: (a) a moving body which is supported by a supporting body so as to be linearly movable via a friction surface; and (b) a small body attached to the moving body. An instrument; (c) a piezoelectric element fixed to the rear end of the moving body and having a cavity formed therein; (d) a rear end of the piezoelectric element having a protrusion that fits in the cavity A micro-moving device for a micromanipulator, comprising: 2. A micro-moving device for a micromanipulator according to claim 1, wherein the cavity of the piezoelectric element is a through hole. 3. The micro-moving device for a micromanipulator according to claim 1, wherein the void of the piezoelectric element is a recess whose fixing surface to the moving body is closed. 4. A micromanipulator micromoving device for driving a microdevice, comprising: (a) a microdevice attached, a recess formed at a rear end thereof, and a linear movement on a support through a friction surface. A piezoelectric element fixed in the hollow portion of the moving body and having a cavity formed therein; and (c) a protrusion fitting in the cavity, An inertial body fixed to a rear end portion of the micromanipulator. (D) A micro-moving device for a micromanipulator in which the piezoelectric element and the inertial body are built in the void. 5. A micro-moving device for a micromanipulator according to claim 4, wherein the cavity of the piezoelectric element is a through hole. 6. The micro-moving device for a micromanipulator according to claim 4, wherein the void of the piezoelectric element is a recess whose fixing surface to the moving body is closed. 7. A micro-moving device for a micro-manipulator for driving micro-devices, comprising: (a) a moving body supported linearly by a supporting body via a friction surface; and (b) a small body attached to the moving body. An instrument, (c) a piezoelectric element fixed to the rear end of the moving body, and (d) a micro-moving device of a micromanipulator in which the rear end of the piezoelectric element is fixed to a recess of an inertial body. 8. A micro-moving device for a micromanipulator according to claim 7, wherein both end portions of said recess face the outer surface of the rear end portion of the moving body.