JPH0699075B2 - Film peeling method and apparatus for implementing the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique effectively applied to a film peeling technique for peeling a film attached to a panel and discharging the peeled film.

[0002]

2. Description of the Related Art A printed wiring board used in electronic equipment such as a computer is one in which a predetermined pattern of wiring such as copper is formed on both sides (or one side) of an insulating panel.

This type of printed wiring board can be manufactured by the following manufacturing process. First, a laminate consisting of a photosensitive resin (photoresist) layer and a translucent resin cover film (hereinafter referred to as a cover film) that protects the photosensitive resin (photoresist) layer on the conductive layer on the surface of the insulating panel is thermocompression-bonded and laminated. . Next, the wiring pattern films are stacked, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the cover film. Next, after peeling off the wiring pattern film and the cover film, the exposed photosensitive resin layer is developed to form an etching mask pattern. Thereafter, unnecessary portions of the conductive layer are removed by etching, and the remaining photosensitive resin layer is removed, whereby a printed wiring board having a predetermined wiring pattern is formed.

In the manufacturing process of the above-mentioned printed wiring board, a film peeling device for automatically peeling the cover film has been developed. This film peeling device peels a part of the film attached to the panel and peels the film from the peeled part to the entire surface of the panel, as described in, for example, Japanese Patent Application Laid-Open No. 1-271356. . Further, the film peeling device is a first film transport mechanism that grips the partially peeled film with a belt conveyor to peel the film from the panel, and transports the film in an upward direction on the front surface side of the panel while sandwiching the film. And a second film which is blown by the first film feeding mechanism to blow air to a peeling film accommodating portion.
And a film transport mechanism.

[0005]

However, in the peeling method of the film peeling device, in the step of loosening a part of the end portion of the film attached to the panel,
Since the transportation of the panel is temporarily stopped, there is a problem that the efficiency of the work for peeling the film is low.

The present invention has been made to solve the above problems, and a first object thereof is to convey a panel when the film attached to the panel is conveyed while being peeled and discharged. It is an object of the present invention to provide a technique capable of loosening the close contact with the panel at the end of the film without stopping, and improving the efficiency of the peeling operation of the film.

A second object of the present invention is to provide a technique capable of achieving the first object with a relatively simple structure.

A third object of the present invention is to provide a technique capable of transporting and discharging a film adhered to a panel while peeling it off at high speed without changing the transport speed of the panel. .

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0010]

In order to achieve the first object, a first method of the present invention is a method of peeling a film adhered to a panel, which comprises: Transport it to the position where the tip of the
By bringing the transport speed of the panel and the relative moving speed of the film loosening means close to each other, the leading end of the film is loosened from the panel without stopping the transport of the panel, and the gap between the panel and the loosened film leading end is provided. The main feature is to blow a fluid and discharge the loosened film while peeling it off.

In order to achieve the second object, the first apparatus of the present invention is, in a film peeling apparatus, a panel transfer means for transferring a panel to which a film is adhered, and a panel on the panel transfer means. A panel centering operation start position sensor for detecting that the vehicle has moved forward and reached a predetermined position before the film peeling position, and the operation is started by the output of the panel centering operation start position sensor,
A panel centering unit that moves the panel to the center line portion of the transporting unit, a panel deceleration unit that slows down the transporting speed of the panel at the end of the operation of the panel centering unit, and a film adhering to the panel at the film peeling position. A film edge detection sensor for detecting the front edge, a film loosening means for loosening the leading end of the film from the panel without stopping the transport of the panel by starting the operation by the output of the film edge detection sensor, and the film. Fluid spraying means for spraying fluid into the gap between the front end of the film and the panel loosened by the loosening means to flip the film, and detecting that the rolled-up film stands up on the film discharge path By the film peeling detection sensor and the output of the film peeling detection sensor Characterized by comprising means for returning to the speed the transport speed original panels slowed above, and a film clamping means for discharging while peeled from the panel by pinching the blind films.

Further, in order to achieve the third object, the second method of the present invention is a method of peeling off a film adhered to a panel, in which the front end of the film is attached to the panel to which the film is adhered. The film is transported to a position where it is peeled off, and the film adhesion loosening mechanism is moved for a predetermined time at a speed synchronized with the transportation speed of the panel, while the transportation speed of the panel is not substantially changed. The main feature is that the portion is loosened from the panel, a fluid is blown into the gap between the panel and the loosened film tip, and the loosened film is peeled off and discharged.

In order to achieve the third object, the second apparatus of the present invention is, in a film peeling apparatus, a panel carrying means including a panel carrying driving roller, a panel centering operation start position sensor, and a panel centering. A unit, a panel front end position detection sensor, a film loosening means, a fluid spraying means, a support frame in which the film loosening means and the fluid spraying means are arranged, and which is movable in the traveling direction of the panel, and a transport speed of the panel. Is provided with a means for moving the support frame for a certain period of time in synchronization with the rotation of the panel-conveying drive roller, a film peeling detection sensor, and a film discharging means so that the film does not substantially change during the film loosening. It is characterized by

[0014]

In the first method of the present invention, when the leading end of the film is loosened from the panel, the transport speed of the panel and the relative moving speed of the film loosening means are made close to each other.
It is possible to loosen the close contact between the edge of the film and the panel without stopping the transportation of the panel.

In particular, before loosening the leading end of the film from the panel, when the transport of the panel is temporarily stopped at a predetermined position on the panel transport means to correct the tilt of the panel and perform centering. , The position of the panel is accurately positioned, and the work of loosening the leading end of the film from the panel can be smoothly performed.

When the panel is conveyed to a predetermined position before the position where the leading edge of the film is peeled off, the feeding speed of the panel is slowed to loosen the leading edge of the film from the panel. In addition, the work can be smoothly performed with a relatively simple configuration.

Further, when the film is discharged while peeling off the film, if the slowed-down panel transfer speed is returned to the original speed, the panel transfer at the time of film discharge can be performed quickly. , Work efficiency can be improved.

Further, when it is detected that the leading end of the film has reached a predetermined position to be loosened from the panel, a means for spraying a fluid is set at a position diagonally facing the end of the film, and the fluid guide plate is placed on the panel. When the films are set at close positions, the film can be smoothly peeled off by spraying the fluid.

Further, when the height of the fluid guide plate from the panel surface is maintained within a predetermined range according to the height of the upper pinch roller, for example, regardless of the change of the panel plate thickness, the fluid The film can be reliably started up by spraying.

Further, the conical tip end of the film scratcher is vibrated in the axial direction while contacting the film surface, preferably from diagonally above in the panel advancing direction, and the vibrating energy is applied to the film to give the tip end portion of the film. When the panel is loosened from the panel, the above-mentioned work can be reliably performed without stopping the transportation of the panel.

Particularly, when the film scratcher is brought into contact with the film surface and is moved relative to the panel by a predetermined distance in the traveling direction of the panel, the work of loosening the leading end of the film from the panel is performed. It can be performed more reliably.

Further, when the panel is forcibly conveyed when loosening the leading end of the film from the panel, the panel can be securely operated without stopping regardless of the acting force of the film scratcher or the like. Can be transported to.

In particular, for example, when a gear having a large module ratio is used to forcibly rotate the upper pinch roller by the lower panel conveying drive roller, regardless of the change in the panel plate thickness, the panel Can be reliably transported.

Further, a fluid jet nozzle having a fluid jetting hole for directing the fluid to spray the film scratcher contact portion in the gap and a fluid jetting hole for directing the film end in the vicinity thereof is used. And, preferably, when the fluid discharge nozzle is arranged between the transporting path of the panel and the film scratcher in the vicinity of the film scratcher, the film is peeled off by spraying the fluid. It can be done reliably.

When the film peeled from the panel by spraying the fluid is attached to the fluid guide plate at the fluid pressure, the film formed by spraying the fluid is removed. Peeling and introduction into the discharge route can be performed smoothly.

Further, when the loosening operation of the film leading end is detected by detecting that the peeled leading end of the film adheres to the fluid guide plate, the loosening can be properly terminated. it can.

When the film is peeled off by spraying a fluid on the portion where the adhesion with the panel is loosened, the spraying of the fluid is stopped when the film is discharged while peeling the film. In such a case, the spraying of the fluid can be accurately finished.

Further, preferably, a fixed transport belt and a movable transport belt are used to hold the loosened film,
Moreover, when the film is discharged while being peeled off, the film can be peeled off quickly.

When a rod-shaped release film guide member and / or an ion generator made of a conductive material is used, static electricity of the film is removed through the release film discharge path to smoothly discharge the film. Can be done.

Further, in the first device of the present invention, the panel conveying means, the panel centering operation start position sensor,
Since a panel centering unit, a panel deceleration means, a film edge detection sensor, a film loosening means, a fluid spraying means, a film peeling detection sensor, a panel deceleration release means, and a film holding means are provided, The tip of the film is conveyed to a position where it is peeled off, and the front end of the film can be loosened from the panel without stopping the conveyance of the panel, and the panel and the loosened film can be discharged while being peeled off. Peeling can be performed automatically and efficiently.

Particularly, when a panel insertion detection sensor for detecting the insertion of a panel at the entrance of the panel transfer means and starting the transfer of the panel is provided, the transfer of the panel is automatically started. can do.

Further, in the case where a panel passing detection sensor for detecting the rear end of the panel completely passing the film peeling position and stopping the transportation of the panel or film is provided, the panel or film is detected. Transport can be stopped automatically.

Further, when the panel guide means for guiding the tip of the panel so as not to hang down is provided, the film can be peeled off smoothly even with a thin panel.

Further, for example, in the case where a release film guide member for guiding the release film that has passed through the film holding means composed of a film catch belt and a fluid duct for discharging the film guided by the release film guide member are provided, The release film can be discharged smoothly.

When the return detection sensor for detecting the end of operation of the panel centering unit is a magnetic sensor which reacts at the position of the actuator for driving the panel centering unit, the end of operation of the panel centering unit is not detected. It can be detected by touch.

Further, the film edge detection sensor is
In the case of a capacitance responsive sensor, the edge of the film can be accurately detected by utilizing the difference in capacitance.

Further, in the second method of the present invention, the panel to which the film is adhered is conveyed to a position where the leading end of the film is peeled off, and a film adhesion loosening mechanism is synchronized with the conveying speed of the panel. While moving, the film front end is loosened from the panel without substantially changing the transport speed of the panel, a fluid is sprayed between the panel and the loosened film front end, and the loosened film is peeled and discharged. Since this is done, the film peeling work efficiency can be further improved.

Further, in the second apparatus of the present invention, a panel carrying means including a panel carrying driving roller, a panel centering operation start position sensor, a panel centering unit, a panel leading end position detecting sensor, a film loosening means,
A fluid spraying unit, a support frame movable in the traveling direction of the panel on which the film loosening unit and the fluid spraying unit are arranged, and a panel for supporting the frame so that the transport speed of the panel does not substantially change during the film loosening. Since the means for moving for a fixed time in synchronization with the rotation of the transport drive roller, the film peeling detection sensor, and the film discharging means are provided, the panel is transported to a position where the leading end of the film is peeled, While moving the support frame at a speed that is synchronized with the transport speed of the film, loosen the leading edge of the film from the panel without substantially changing the transport speed of the panel, and spray a fluid between the panel and the loosened film leading edge. Further, the loosened film can be discharged while being peeled off, and the peeling efficiency of the film can be further improved.

In particular, the panel carrying means includes an upper pinch roller for pressing and carrying the panel, the upper pinch roller is driven by a signal from the panel tip position detection sensor to press the panel, and the pressing is performed for a predetermined time. When a mechanism for releasing the panel later is provided, the panel can be reliably conveyed in synchronization even during the loosening operation.

Further, when the support frame moving means includes a crank mechanism which is driven in synchronization with the rotation of the panel carrying driving roller, the support frame can be easily moved in the panel advancing direction.

The crank mechanism synchronizes the crank-shaped member having one end connected to the support frame, the movement of the crank-shaped member, and the rotation of the panel-conveying drive roller only during the loosening operation of the film. When the one-way clutch mechanism is included, the movement of the support frame does not interfere with the rotation of the panel transfer drive roller.

Further, in the case where a panel front end detection sensor is provided in the vicinity of the film edge detection sensor, even if the film is laminated on the entire surface of the panel,
The panel can be reliably detected.

[0043]

EXAMPLES Examples of applying the present invention to a method for peeling a cover film (protective film) of a printed wiring panel and an apparatus for implementing the same will be specifically described below with reference to the drawings.

In all the drawings for explaining the embodiments, those having the same function are designated by the same reference numerals, and the repeated description thereof will be omitted.

FIG. 1 is a perspective view showing a schematic structure of a film peeling apparatus for a printed wiring panel which is a first embodiment of the present invention, and FIG. 2A is a schematic mechanism of the film peeling apparatus around the air type film transport box shown in FIG. It is a figure which shows the detail of FIG.

As shown in FIG. 1, the film peeling apparatus of the first embodiment is used as a transport mechanism for a printed wiring panel.
The apparatus main body 100 is provided with a front conveyor 101 composed of a panel transfer drive roller and a rear conveyor 102 composed of a panel transfer drive roller in the front and rear of the panel traveling direction A, respectively. An air duct mounting base 103 is provided above the front conveyor 101, and one end of the air duct mounting base 103 is fixed to the apparatus main body 100.

On the air duct mounting table 103,
An air duct 104 made of a transparent material is placed. An upper end opening of the release film discharge duct 105 having a plurality of pressure reducing holes 105A is connected to the left side surface of the air duct 104 when viewed from the panel traveling direction A. Further, a plurality of vent holes 104D are provided on the right side surface in the panel traveling direction A.

In the structure of the air duct 104, the lid 104A in which the upper surface portion and the front side surface portion are integrally formed is the hinge 104.
It is attached to the main body 104C by B so as to be freely opened and closed.

As shown in FIG. 2A, the air duct 1
Inside the right end of 04, an ion generator (removal device) 110 for removing the electrostatic charge of the peeling film, blowing fans 109A and 109B, and a film feeding air nozzle (not shown) are installed.

As shown in FIG. 1, the discharge port of the release film discharge duct 105 is guided to a release film container 106 for storing a release film. The release film container 106 is a container table member 10 having a plurality of pressure reducing holes.
6A, a net member 106B and casters 106C. An operation panel 107 is provided on the side of the apparatus body 100, and a warning light 108 is attached to the uppermost end of the apparatus body 100.

As shown in FIG. 2A, the panel transfer mechanism includes a film floating member 3 of a film floating device (for example, an air oscillating pen type film scratcher) on a panel transfer path AA, and an air blowing device of a fluid spraying device. Nozzle 4, air guide plate (fluid guide plate) 5, and film transport device
(Film discharging device) 6 is provided.

The printed wiring panel 1 is an insulating panel having conductive layers such as copper formed on both sides (or one side). On the conductive layer of the printed wiring panel 1, a laminate composed of a photosensitive resin layer (photoresist) and a cover film (protective film) is thermocompression bonded. The photosensitive resin layer is in a state after a predetermined wiring pattern film is overlaid and exposed. The printed wiring panel 1 includes a front conveyor 101 in the direction of arrow A shown in FIG.
The rear conveyer 102 is configured to be conveyed by the respective panel conveying drive rollers 2.

Panel pressing / conveying roller (upper pinch roller)
2A is a printed wiring panel (hereinafter referred to as a panel)
The panel 1 is provided so as not to be displaced from the centered state in the process of passing the film 1 and peeling the film. This upper pinch roller 2A is shown in FIG.
As shown in detail (partially exploded view showing the vicinity of the upper pinch roller in FIG. 2A), the roller pressing plate 317 presses the panel surface from above and the upper pinch roller 2A rotates to reliably feed the panel. Is configured. The roller pressing portion 31 at the lower end of the roller pressing plate 317
7A has an inverted U-shape that allows the upper pinch roller 2A to move downward.

In FIG. 2B, a roller pressing plate support lever 318 is a lever for supporting the roller pressing plate 317. The roller pressing plate support lever 318 has a U-shaped connecting member receiving portion 318A. This connecting member receiving portion 3
A connecting member 319 fixed to the tip of the rod of the air cylinder 321 for raising and lowering the pressure roller is engaged with 18A.

Therefore, when the rod of the air cylinder 321 is expanded or contracted, the roller pressing plate support lever 318 is rotated about its fulcrum 318B, and the roller pressing plate 317 is moved up and down. Since the roller guide plate 317 is provided with the air guide plate 5, the air guide plate 5 is adjusted in accordance with the vertical position change of the upper pinch roller 2A (that is, the roller press plate 317) according to the change of the panel plate thickness. The vertical position of changes. Therefore, even if the thickness of the panel changes, the gap between the air guide plate 5 and the panel surface can be set within a predetermined range (for example, 0.5 to 1.5 m) that can ensure the flow of air suitable for starting the film.
m) can be maintained automatically. The vertical position of the air guide plate 5 may be manually adjustable according to the plate thickness.

As shown in detail in FIG. 2C (the drawing showing the upper pinch roller driving gear in FIG. 2A), the upper pinch roller 2A is located on the same side of the lower panel conveying drive roller 2 and the upper pinch roller 2A. Are forcibly driven by gears 401 and 402, which are fixed to the ends of the gears and have a large module ratio, which mesh with each other. Here, the reason why a gear with a large module ratio is used is that when the plate thickness of the panel 1 changes, the upper pinch roller 2A and the lower panel conveying drive roller 2 are used.
This is because the interval between and changes. By using a gear with a large module ratio and long teeth in this way, even if the gap between the gears is wide, the allowable range of meshing between the gears is wide, so it is possible to respond to changes in the gap between gears due to changes in panel thickness. Therefore, the upper pinch roller 2A can be driven reliably. In this embodiment,
When the upper pinch roller 2A comes into contact, the pitch circles of the two gears are made to coincide with each other, and the panel plate thickness is approximately 0 to 4
It can correspond to mm.

In this way, the upper pinch roller 2A is forcibly rotationally driven in synchronization with the rotation of the lower panel conveying drive roller 2, so that the panel 1 is surely conveyed even during scratching. The scratcher and panel can be moved relative to each other. Therefore, the film does not move due to being pulled by the scratcher during scratching, and the film can be surely loosened.

FIG. 3A is a view of the film loosening mechanism portion viewed from the rear in the panel advancing direction, and FIG. 3B is an arrow L shown in FIG. 3A.
3D is a side view seen from the direction, FIG. 3C is a perspective view of FIG. 3B, and FIG.
Is a perspective view of a fluid spraying device, FIG. 3E is a plan view of FIG. 3E, and FIG. 3F is a perspective view of a film edge detection mechanism.

The film floating device is shown in FIGS.
As shown in A, FIG. 3B and FIG. 3C, at least one floating member support member 10 is fixed to each of the floating member support rotary shafts 9 provided above and below the panel carrying surface. This floating member support member 10 includes a sliding block 13
Is installed. Further, the slide block 13 is provided with a guide rail 14 which can be freely moved up and down. A floating member holding block 16 is fixed to the guide rail 14, and the film floating member 3 is provided on the floating member holding block 16 in a state of being inclined with respect to the panel conveying surface.

A through hole is provided on the upper surface of the floating member support member 10. A long screw 15 slightly thinner than the through hole penetrates the through hole. A spring 17 is provided at the other end of the long screw 15, and the other end is fixed to the floating member holding block 16.

Tip of the film floating member 3 (pen tip)
Is formed in a conical shape and has a structure that vibrates by a pneumatic vibration device. The pneumatic vibration device is configured to give a vibration of 2000 to 3000 strokes to the pen tip of the film floating member 3 for one minute, for example.

The leading end of the film floating member 3 is configured so as to vibrate and press (that is, apply energy) the end of the laminate film composed of the photosensitive resin layer and the cover film. The cover film floats (peels) from the photosensitive resin layer at the edge of the laminate to which energy is applied.
It is supposed to do. Only the cover film is peeled off at the end portion of the laminate to which energy is applied, because the cover film is extensible as compared with the photosensitive resin layer, and the photosensitive resin layer on the panel 1 and the conductive layer are electrically conductive. It is presumed that this is because the adhesive force with the layer is stronger than the adhesive force between the photosensitive resin layer and the cover film.

As shown in FIGS. 3B and 3C, the fluid spraying device has one end of an air blowing nozzle mounting plate 18 fixed to each of fixed support members 7 provided above and below the panel carrying surface. The air blowing nozzle member 4 is attached to the air blowing nozzle member 4.
A fluid to which pressure is applied from, for example, air, a gas such as an inert gas, or a liquid such as water is blown out. In this embodiment, air is used as the fluid.

The air-blowing nozzle member 4 is located in the vicinity of the tip of the film floating member 3, and the tip of the nozzle is directed toward the tip of the resist film attached to the panel. The film floating member 3 is configured to directly blow a fluid into a gap between the cover film and the photosensitive resin layer which are floated from the photosensitive resin layer.

As shown in FIGS. 3D and 3E, the tip of the air blowing nozzle member 4 has a plurality of air injection holes 4
Each of A and B has one of them (4A) so as to aim at the tip of the film floating member 3 (that is, the above-mentioned gap).
(4B) is oriented so as to aim at the film edges near the left and right. Here, the reason for providing a plurality of injection holes in the air blowing nozzle member 4 is to ensure the film peeling operation. The air blowing nozzle member 4 is configured such that the fluid is supplied from one fluid supply pipe.

The center of the film floating device is shown in FIG.
As shown in FIGS. 3A and 3F, a film end detection member mounting block 22 that is movable back and forth is provided on the fixed members 21 mounted on the upper and lower fixed support members 7, respectively, and a film end detection member position adjustment knob 23 is provided. The front and rear position can be adjusted by. One end of the film end detection member 8 is pivotally supported at the tip of each film end detection member mounting block 22, and a film end detection member vertical movement member 24 is pivotally supported at the center thereof. There is. One end of the film edge detection member vertical movement member 24 is
It is fixed to the film edge detection member mounting block 22 via a small air cylinder.

The film end detecting member mounting block 2
In the vicinity of 2, one end of the sensor fixing member 25 is attached to each of the upper and lower fixing support members 7. At the other end of the sensor fixing member 25, a film peeling detection sensor 204 is fixed on the upper side of the panel conveying surface and a film peeling detection sensor 205 is fixed on the lower side.

For the description of the operation of floating and peeling off the end portion of the laminate of the panel 1, see JP-A-1-
Since the principle of operation is almost the same as that described in Japanese Patent No. 271356, it is omitted here.

The peeling film (cover film) on the front side in the panel conveying direction, which is peeled off by the air jetted from the air blowing nozzle member 4 of the fluid spraying device, is guided by the fluid pressure from the air blowing nozzle member 4. It is pressed against the plate 5 and adheres thereto.

The thin panel guide wheel 11 is
When the cover film of a thin panel is peeled off, since the film floating member 3 and the air blowing nozzle member 4 are installed in the film floating device portion, the panel conveying drive roller cannot be incorporated, so that the tip of the thin panel hangs down. It is meant to guide you not to. Particularly, the thin panel guide member works effectively for a wide one.

As shown in FIG. 2A, the film transport device 6 is mainly composed of an upper film transport device provided on the upper side of the transport path AA of the panel 1 and a lower film transport device provided on the lower side. It is configured. The upper film transporting device is composed of a first film transporting device having a film sandwiching means composed of a fixed transporting belt 6A and a movable transporting belt 6B, a peeling film guide member 6C and a second film transporting device 6D.

The peeling film is guided in the direction of arrow M shown in FIG. 2A by the first film conveying device and the peeling film guide member 6C, and is conveyed to the second film conveying device 6D.

The peeling film guide member 6C is configured to change the conveying direction of the peeling film from the vertical direction to the horizontal direction (parallel to the conveying path AA and changing to the opposite direction to the panel conveying direction A). The peeling film guide member 6C is constituted by a rod-shaped member so that the contact area with the peeling film can be made as small as possible.
A plurality of them are provided in a direction intersecting the transport path A-A. The release film guide member 6C is made of a conductive material such as stainless steel wire. The peeling film guide member 6C is configured to be able to discharge static electricity generated in the peeling film during peeling or transportation.

The peeling film guide member 6C is the first
When the peeling film is conveyed from the film conveying device to the second film conveying device 6D, the peeling film is prevented from being caught by the roller 6Aa of the fixed conveying belt 6A and the roller 6Bb of the movable conveying belt 6B. .

In the vicinity of the peeling film guide member 6C, a fluid ejecting device 12 and an ion generating device (static elimination device) 1 are provided.
50 are provided. The fluid ejection device 12 is configured to eject the fluid in the direction of arrow N shown in FIG. 2A. In addition, the ion generator 150 prevents the release film from clinging to the release film guide member 6C due to static electricity on the release film when the release film is transported from the first film transport device to the second film transport device 6D. Remove static electricity to prevent.

The lower film transport device comprises a first film transport device (fixed transport belt 6A, movable transport belt 6B) and a peeling film guide member 6C.

In FIG. 2A, reference numeral 2B is a panel pressing roller, and this panel pressing roller 2B is placed on the panel conveying drive roller 2 and has a function of pressing the panel 1 by its own weight, and has a mechanism for removing it upward. Has become. Also, 2C
Is a suspension plate for operating the upper air guide plate 5 so as to approach (fall) or separate (raise) the panel 1 (both ends are connected to an air cylinder for operating this). ), And both ends thereof are connected to the pressing member 317 of the rotating shaft of the upper pinch roller 2A.

Further, 7 is a fixed supporting member, 8 is a film edge detecting sensor, and 9 is a film floating member supporting rotary shaft, which is connected to the crank mechanism at both ends thereof. 6Ba ', 6Ab, 6Bb, 6Bc are
Each is a roller.

The fixed transfer belt 6A and the movable transfer belt 6B which constitute the first film transfer device are composed of toothed rubber belts, and rollers 6Aa, 6A other than 6Bc are used.
This is because each of b, 6Ba, 6Ba ′, and 6Bb is formed of a toothed pulley to ensure the running of the belt.

The second film transport device 6D is placed on the air duct mounting table 103. The second film transport device 6D, as shown in FIGS. 1 and 2A,
The air duct 104 is disposed on the air duct mounting table 103, and as described above, the air duct 10
4, a cover film discharge duct 105 is connected.

The air duct 104 is composed of a lid portion 104A in which an upper surface portion and one side surface portion are integrally formed.
It is attached to the main body 104C at 04B so as to be openable and closable.

Further, a ventilation hole 104D is provided at a predetermined position of the lid portion 104A. Vent hole 1 in the main body 104C
Blower fan 1 for ion insertion at a position facing 04D
09A and 109B are provided, respectively.

FIG. 4 is a schematic structural explanatory view for explaining the film peeling method of the first embodiment and the control means of the apparatus for carrying out the same, and FIG. 5A is a view showing the structure of the panel centering portion.
5B is a sectional view taken along line XX shown in FIG. 5A, and FIG. 5C.
FIG. 5B is a diagram showing an operating part of the panel centering of FIG. 5A.

In FIGS. 4, 5A and 5C, mainly,
Explaining the configuration position of each sensor, the panel insertion detection sensor (BLS) 201 is installed at the entrance position of the panel transfer path AA for transferring the panel 1 in the front conveyor 101. The panel centering (width adjustment) unit 202 includes a centering pin 202A with which both edges in the traveling direction of the panel 1 come into contact with each other.
02A holding centering mounting member 202B, left and right centering mounting members 202B interlocking rack 219, pinion 220 and each interlocking rack 2
A backup roller 221 for guiding the movement of the centering pin 19 and the left and right centering pin mounting members 202.
C is provided, and a centering drive air cylinder 218 is installed as a power source for width-shifting. The return detection sensor (W) of the panel centering device is provided on the rod entrance / exit side of the main body of the centering drive air silling 218.
ARS) 213 is attached. Further, the left side edge detection sensor (WALS-
1) 210 and right side panel sensor (WALS-
2) 211 is fixed. The panel centering operation start position sensor (WAPS) 203 is used for the front conveyor 10.
1 is attached to the front part.

In order to confirm that the film has been completely peeled from the panel 1 above and below the panel conveying path AA, the upper film peeling detection sensor (PFS-
1) 204 and lower film peeling detection sensor (PF
S-2) 205 is provided. A panel passage detection sensor (BES) 206 is attached near the exit of the film peeling device in order to confirm that the film is peeled from the panel 1 and is on the film transport path. A panel check sensor (BCS) 2 for confirming that there is a defective film peeling panel on the rear conveyor 102.
08 is provided.

In the figure, 8 is a film edge detection sensor (FES-1), and 212 is a panel stopper.

The front conveyor 101 is composed of a plurality of panel-conveying driving rollers 2. Each of the panel-conveying driving rollers 2 has a driving toothed pulley 217 at the right end in the panel advancing direction A (see FIG. 5A). Is provided. The group of the driving toothed pulleys 217 includes a conveyor roller driving belt.
(Not shown) is hung. A front conveyor drive motor 214 is attached to the lower part of the front conveyor 101,
The conveyor roller drive belt is hung on the gear at the shaft end of the front conveyor drive motor 214. A release film discharge guide 209 is provided below the front conveyor drive motor 214.

The rear conveyer 102 is composed of a plurality of panel-conveying driving rollers 2. Each panel-conveying driving roller 2 has a driving toothed pulley (not shown) at the left end in the panel advancing direction A. It is provided. A conveyor roller driving belt (see FIG. 4) is wound around the group of driving toothed pulleys. A rear conveyer drive motor 216 is attached to the lower portion of the rear conveyer 102, and the conveyor roller drive belt is hung on the gear at the shaft end of the rear conveyer drive motor 216. Then, a plurality of backup rollers 2 are provided to hold down the conveyor roller driving belt.
07 is provided. Further, a film transport belt drive motor 215 for driving the release film discharge belt.
Is the rear conveyor 102 immediately behind the film peeling unit.
Is installed below the entrance of the. Below the section entrance of the rear conveyor 102, a peeling failure panel sorting and accommodating device 212 is provided.
A is provided. Regarding the defective peeling panel sorting and conveying device (plate-like substance conveying and sorting accommodating device), see Japanese Patent Laid-Open No. 63-
It is described in Japanese Patent No. 154577.

Table 1 is a list of input terminals of the sequencer of the first embodiment, and Table 2 is a list of output terminals of the sequencer.

FIGS. 6, 7, 8A, 8B, 9, and 1
0A to 10C and 11 are programs for the programmable controller (or sequencer) of the film peeling apparatus of the first embodiment.

In the program of the first embodiment, Y XX is the internal bit shared output number of the sequencer, Y XX is the output number to the external device of the sequencer, and R XX is the internal bit word of the sequencer. An output number, XOO is an input terminal number from an external device of the sequencer, TDOO is a delay timer inside the sequencer, and CUOO is a counter inside the sequencer.

The numbers in the brackets <> in the right column of the figure are the circuit numbers, and the numbers below the brackets <> are the set values of the timer or counter. In the case of a timer, ".1S5" is 0.
1sec x 5 = 0.5sec, and in the case of a counter, it represents the maximum count-up number.

Then, the circuit number <0018> shown in FIG.
7 to <0023> are control progress processes from panel insertion to film edge detection, and circuit numbers <0024> to <0029> shown in FIG. 7 are control progress processes from film peeling to panel delivery.

Circuit number <004 shown in FIGS. 8A and 8B
4> to <0080> are various timers for control steps,
It is the setting of the counter.

Circuit numbers <0098> to <01 shown in FIG.
19> is a progress error control process, which is shown in FIG.
Circuit numbers <0122> shown in FIGS. 10B and 10C
<0132>, <0136> to <0139> and <01
41> to <0151> are mainly output terminal control processes of the sequencer.

Circuit numbers <0184> to <0 shown in FIG.
202> is the operating time control of the imaginary sensor (Im
aginary Senser Control) process.

FIG. 12 is a time chart for explaining the film peeling method of the first embodiment and the control operation of the apparatus for carrying it out.

In FIG. 12, the mark ● indicates the power supply (ON) state in the case of the motor, the state when there is a reaction (ON) in the case of the sensor, and the forward movement starts in the case of the air cylinder. It indicates that

In addition, the mark ◯ indicates the state when there is no power supply (OFF) in the case of a motor, the state when the reaction has disappeared (OFF) in the case of a sensor, and the reverse direction in the case of an air cylinder. Indicates that the operation has started.

Next, the film peeling method of the first embodiment and the control operation of the apparatus for carrying it out will be described.

When the "Start" switch on the operation panel 107 is pressed to turn it "ON", the apparatus enters a waiting state for automatic operation. Sequencer (P rogrammable L ogic C
The internal output relays R1 and R15 of the ontroller (PLC) are both "ON". However, the entire device has not started yet.

When the panel 1 is inserted into the entrance of the front conveyor 101 from the previous step, the panel insertion detection sensor (photoelectric sensor- "BLS") 201 at the entrance reacts and the "O"
N ”, and the panel stopper 212 at the back in the traveling direction of the front conveyor 101 rises.

After 0.1 second (TD20), the front conveyor drive motor 214 is started.

When the panel 1 on the front conveyor 101 moves forward and the panel centering operation start position sensor (photoelectric sensor “WAPS”) 203 responds to “ON”,
The panel centering unit 202 of the panel 1 starts operating, and the panel 1 is placed at the center of the front conveyor 101 in the width direction.
Align the centers of the (air cylinder 21 that moves the unit
8 opens the solenoid valve that sends compressed air).

The panel 1 is traveling on the front conveyor 101 and hits the standing panel stopper 212,
If the tip of the panel 1 is tilted, it is corrected so as to be perpendicular to the traveling direction.

When the panel centering unit 202 operates to sandwich the panel 1 from both sides, the panel left end detection sensor (photoelectric sensor "WALS-1") 210 provided on the push rod (centering attachment member) 202B and the panel. Right edge detection sensor (photoelectric sensor "WALS-
2 ”) 211 reacts together (it reacts because the optical axis of the sensor is blocked by both side edges of panel 1), and the operation of the panel centering unit is reversed and the panel pushing rod (centering mounting member) 202B moves back to both sides of the conveyor.

When the panel stopper 212 falls down, the panel 1 is carried forward again. The front conveyor drive motor 214 has been continuously moving since it was started.

Panel centering to confirm that the panel centering unit 202 has returned to both sides of the conveyor
(Width adjustment) Unit return detection sensor ("WARS":
Air cylinder 218 that drives the centering unit
When the proximity sensor 213 that reacts at the position of the piston of) responds, the operation control program proceeds one after another. When the return detection sensor 213 is a magnetic sensor that reacts at the position of an actuator (driving motor) that drives the panel centering unit, the end of operation of the panel centering unit can be detected without contact.

Panel 1 previously processed on the rear conveyor 102
Check whether there is a delay or if the previously processed release film is left unloaded on the film conveyor, and if everything is ok, the steps of the control program go further.

Since the step of the control program becomes Y3112, the delay timer "TD
Start the 29 ".

When the set value of the TD29 timer (usually set to, for example, 1.6 to 2.0 seconds) is reached, the front conveyor drive motor 214 switches to low speed operation.

Further, at the same timing, a film edge detection sensor 8 (capacitive response type sensor “F” which detects the leading edge of the resist film attached to the panel 1)
The ES ") stylus is lowered toward the panel conveyance path AA of the panel 1 (the stylus provided on the lower surface side of the panel 1 is pulled up).

Panel 1 on the conveyor operating at low speed
When the copper foil surface of the panel 1 touches the stylus of the film edge detecting sensor 8 which is closed from above and below, the film edge detecting sensor 8 responds to the "ON" state.

Further, when the panel 1 advances, the tip of the stylus of the film edge detection sensor 8 touches the surface of the resist film attached to the copper foil surface, and the film edge detection sensor 8 responds to the "OFF" state. . That is, by using a capacitance responsive sensor as the film edge detection sensor 8, when a conductor is touched, the capacitance of the panel 1 is sensed and reacted, and when touching an insulator or air, electrostatic It uses the fact that the reaction disappears because it cannot sense the capacity.

The steps of the control program proceed to generation Y3200.

The air blowing nozzle 4 is set at a position diagonally facing the end of the film, and the air guide plate 5 is set at a position close to the panel 1.

(Start of the operation of the first item 0.1 seconds after the start of the operation of the previous item) Then, the film scratcher head
Pneumatic vibration of the tip portion of (the head of the film floating member 3) is started and pressed against the film surfaces of the upper and lower surfaces of the panel 1, and at the same time, the stylus of the film edge detection sensor 8 is separated from the panel 1.

Subsequently, the film scratcher head is moved toward the leading end of the film (the same direction as the traveling direction of the panel 1).
Since the air cylinder that can be moved back by a predetermined distance to the panel 1 is moved at a speed higher than the traveling speed of the panel 1, the adhesion of the edge of the film is loosened.

(Beginning the operation of this section with a delay of 0.1 seconds after the start of the operation in the previous section) Subsequently, compressed air is blown out for a certain period of time from the air blowing nozzle member 4 facing the edge of the film whose adhesion is loosened. , Let the film soar from panel 1.

(The operation of this section starts 0.1 seconds after the operation of the previous section is started) The film blown up by the air blown from the air blowing nozzle 4 clings to the air guide plate 5, and the gloss flat surface of the film causes A film peeling detection sensor (a photoelectric sensor- "PFS-1" that emits light perpendicularly to the air guiding plate 5) 204 and a film peeling detection sensor (a photoelectric sensor- "PFS-2") 20
The light emitted from 5 is reflected, and the film peeling detection sensors 204 and 205 respond to “ON”. By this reaction, it is determined that the resist cover films on the upper and lower surfaces of the panel 1 have risen to the position along the air guide plate 5.

After that, the film scratcher head
The (head of the film floating member 3) moves in the direction away from the panel 1, the pneumatic vibration of the tip portion thereof stops, and is further pulled back in the direction opposite to the direction in which the panel 1 advances.

0.1 seconds from the time when the film rises
After (TD36), one of the film sandwiching belts 6B moves toward the other belt 6A, and the two belts soar up and sandwich the resist cover film struck by the air guide plate 5.

Then, the air guide plate 5 and the air blowing nozzle 4 are separated from the surface of the panel 1 and returned to a predetermined position.

The front conveyor drive motor 214 returns to high speed again.

The film transport belt drive motor 215 is started.

The post-conveyor drive motor 216 is started, and film guiding air for sending the release film out of the system is blown from the fluid jetting device 12 all at once.

At this time, the front conveyor 101 and the rear conveyor 1
02, rotation of each of the front conveyor drive motor 214, the film conveyor belt drive motor 215, and the rear conveyor conveyance drive motor 216 so that the speeds of the fixed belt 6A and the movable conveyor belt 6B of the first film transport device become substantially the same. The speed is regulated.

The panel 1 is moved from the front conveyor 101 to the rear conveyor 10 while the resist cover film is being turned off.
2, the rear end of the panel 1 is the rear conveyor 102.
When the sensor passes the position of the panel passage detection sensor 206 (photoelectric sensor- “BES”) provided above the first portion of the sheet and the sensor responds to “OFF”, the front conveyor drive motor 214 stops operating. .

Further, the film transport belt drive motor 215
Stops its operation 0.6 seconds (TD41) after the panel passage detection sensor 206 responds to "OFF".

Furthermore, the rear conveyor drive motor 216 stops its operation 25 seconds after the panel passage detection sensor 206 responds to "OFF".

However, when the next panel 1 is inserted into the front conveyor 101 and the panel insertion detection sensor 201 responds to "ON", the operation of these operation stop timers is canceled and the front conveyor drive motor 214, Each of the rear conveyor drive motors 216 continues to operate.

In this way, the control program proceeds by returning to the first step.

As can be seen from the above description, according to the first embodiment, the panel 1 to which the film is attached is conveyed to the position where the leading end of the film is peeled off, and the conveying speed of the panel 1 is reduced. The front end of the film is loosened from the panel 1, the fluid is blown between the panel 1 and the loosened film front end without peeling, and the loosened film is peeled and automatically discharged. Therefore, the peeling efficiency of the film can be improved with a relatively simple structure.

When the panel 1 is conveyed to a predetermined position before the position where the leading end of the film is peeled off,
Since the front end of the film is loosened from the panel 1 by slowing down the transport speed of the panel 1, the front end of the film is moved to the panel 1.
It can be loosened with high accuracy and position.

When the fluid is blown to the film portion loosened from the panel 1 and the means for ejecting the film while peeling the film from the step of peeling the film is reached, the blowing of the fluid is stopped. So panel 1
As compared with the case where the entire film is peeled off only by blowing compressed air, the consumption of blowing compressed air is smaller and the operating cost of the apparatus can be reduced.

Further, since the control of the film peeling method is automatically performed by the sequence control, the peeling efficiency of the film can be further improved.

Further, since the panel 1 is forcibly conveyed when the leading edge of the film is detected and the film is loosened from the panel 1, the leading edge of the film can be loosened from the panel 1 more accurately and surely. .

[0138] Further, a means for conveying the panel 1 to which the film is attached, a means for loosening the leading end of the film from the panel 1 without stopping the conveyance of the panel 1, and a film loosened with the panel 1. In a film peeling device equipped with a means for spraying a fluid between the tip portion and a means for discharging the peeled film while peeling the loosened film, a panel insertion detection sensor 201, a panel centering operation start position sensor 203, The film peeling detection sensors 204, 205, the panel passage detection sensor 206, the film edge detection sensor 8, the panel check sensor 208, and the return detection sensor 213 of the panel centering unit are provided, and the sequence control means operated by the output signal of each sensor is provided. Peeled off the film It can be carried out automatically efficiently.

Next, the second embodiment of the present invention in which the deceleration of the panel is unnecessary by moving the scratcher will be described in detail.

The basic structure of the second embodiment is almost the same as that of FIGS. 1 to 5C of the first embodiment except that the panel stopper is omitted and the panel front end detection sensor 19 is added. Therefore, those having the direct function are designated by the same reference numerals, and the repeated description thereof will be omitted.

FIG. 13A is a side view of a portion for holding a film contact loosening mechanism that operates in synchronization with the panel conveying speed of the film peeling device for a printed wiring panel according to the second embodiment of the present invention, and FIG. 13B is a drawing. 13A is a view as seen from the direction of the arrow Y, and FIG. 14 is a perspective view in which a part of FIGS. 13A and 13B is cut away, and the film loosening mechanism in the central portion is omitted.

As shown in FIGS. 13A, 13B and 14, guide rails 303 are fixed above the left and right body frames 300 of the film peeling apparatus body 100. Sliding block 304 on the guide rail 303
Is attached slidably, and one end of a holding member 305 is fixed to the sliding block 304.
The other end of 05 is fixed to the sliding portion side plate 306. The upper and lower penetrating vertical holes 306A are provided on the left and right sliding part side plates 306, respectively.
Both ends of the levitation member support rotary shaft 9 penetrate through A and are attached so as to be vertically movable within the range of the through vertical elongated hole 306A. Further, a coupling member 313 is fixed to the sliding portion side plate 306, and the coupling rod 31 is provided below the coupling member 313.
A fixing plate 312 that axially supports a connecting member 311 to which one end of 0 is attached is fixed. At the other end of the connecting rod 310,
The connecting member 309 is attached, and the crank member 307 is attached to the connecting member 309. The crank-shaped member 307, via the one-way bearing 308,
It is attached to the shaft 2D of the panel-conveying drive roller 2 which penetrates the front conveyor frame 301. An electromagnetic clutch may be used instead of the one-way bearing 308.

In FIG. 14, the front conveyor frame 30
An air cylinder mounting plate 320 is fixed to the upper surface of 1. An elevating air cylinder 321 for elevating and lowering both the air guide plate 5 and the upper pinch roller 2A is attached to one end of the air cylinder attachment plate 320, and both the hanging plate 2C and the roller pressing plate 317 are supported at the other end. The lower portion of the support lever 318 is pivotally supported and is configured to be rotatable around the pivotal support portion. The rod of the lifting air cylinder 321 and one end of the support lever 318 are connected to a connecting member 319. Both ends of the air guide plate suspension plate 2C and the roller pressing plate 317 are the support lever 318.
It is fixed at the end of. The shaft of the upper pinch roller 2A is rotatably attached to the inverted U-shaped roller pressing portion 317A provided under the roller pressing plate 317.

On the left and right sliding part side plates 306, a connecting angle 314 in which both ends of the fixed supporting member 7 are vertically fixed.
Is attached.

An air cylinder attachment plate 315 is fixed to the upper surface of the rear conveyor frame 302, and an air cylinder 316 for moving the floating portion is attached. The rod of the air cylinder 316 for moving the floating portion is connected to the connecting member 313. It is fixed at one end.

At both ends of the levitation member supporting rotary shaft 9 (outside the left and right body frames 300), the upper and lower levitation member supporting rotary shafts 9 are synchronized in order to approach or move away from the panel carrying surface. A moving arm member 322 is provided, and the moving arm member 322 is connected by a rotating arm member 323. A through hole is provided at the center of the rotary arm member 323, and the shaft 337 fixed to the central portion of the sliding portion side plate 306 is rotatably supported by the through hole. (In FIG. 14, the separated state is shown).

The connecting arm member 326 and the floating member rotating arm member are provided at the further end of the floating member supporting rotating shaft 9 where the moving arm member 322 is provided (the end of the floating member supporting rotating shaft 9). 327 is provided.

A through hole is provided above and below the central portion of the main body frame 300, and a shaft 338 is rotatably provided in the through hole for allowing the film transporting device for discharging the release film to perform the film clamping operation. There is. One end of an arm member 336 is fixed to the upper shaft 338. The central end of the arm member 334 is fixed to the lower shaft 338. One end of the arm member 334 and the other end of the arm member 336 are connected by a connecting member 335. The other end of the arm member 334 and the connecting member 323 attached to the rod of the peeling film sandwiching operation air cylinder 331 are connected via the connecting member 333. The peeling film sandwiching operation air cylinder 331 is attached to the air cylinder mounting plate 330, and the air cylinder mounting plate 330 is fixed to the lower portion of the side surface of the main body frame 300 (in FIG. 14, the separated state is shown).

Further, as shown in FIG. 3C, the fixed support member 7
One end of a sensor fixing plate 20 is attached to the vicinity of the air blowing nozzle attachment plate 18 which is fixed,
A panel slope edge detection sensor 19 is fixed to the other end.

Next, the operation of the film peeling apparatus will be briefly described with reference to FIG. 15, which is a time chart simply showing the operation of the second embodiment.

The film peeling apparatus is provided with the operation panel 10
When the start switch of No. 7 is turned "ON", it goes into a standby state for automatic operation. When the panel 1 is conveyed from the previous process to the entrance of the front conveyor 101 and is inserted, the panel insertion detection sensor (BLS) 201 installed at the entrance is moved to the panel 1
Is detected, the timer 1 inside the sequencer operates, and when the timer 1 reaches the set value, the front conveyor drive motor 214 (M2) is started, and the panel transfer drive roller 2 of the front conveyor 101 starts rotating, The panel 1 is conveyed on the panel conveying drive roller 2 of the front conveyor 101. When the front end of the conveyed panel 1 is detected by the panel centering operation start position sensor 203 (WAPS), the centering drive air cylinder 218 operates, and the centering unit 202 performs centering (width adjustment) of the conveyed panel 1. To start. When the centering of the panel 1 is performed and the left and right ends of the panel 1 with respect to the traveling direction of the panel 1 are respectively detected by the panel left edge detection sensor 210 (WALS-1) and the panel right edge detection sensor 211 (WALS-2), the centering operation is performed. Stop. In this state, the center of the panel 1 in the traveling direction is the centering pins 202 on the left and right.
When A sandwiches the left and right ends of the panel 1 and stops, the position A coincides with the center of the traveling direction on the front conveyor 101.

Panel left edge detection sensor (WALS-1)
210 and sensor on the right side of the panel (WALS-2) 2
The centering operation is reversed by the detection signal 11 and the centering (width adjustment) unit 202 returns to the position before the centering (origin position). At the origin position, a panel centering device return detection sensor (WARS) 213 attached to the centering drive air cylinder 218,
This position is stopped by detecting the piston position of the centering drive air cylinder 218.

Even during the centering operation of the centering unit 202 and the returning operation to the origin position, the panel 1 is being conveyed, and the timer 2 inside the sequencer is activated by the detection signal of the panel centering operation start position sensor 203, and the timer is activated. When 2 reaches the set value, the piston rods of the upper and lower film end detection member vertical movement members 24 move in the panel transfer path AA direction by sending the compressed air to the air cylinder (FIG. 3F). The upper and lower film edge detection members are pushed by the vertical movement member 24 for the film edge detection members, and the upper and lower film edge detection members (film edge detection sensor:
FES-1 and FES-2) 8: The stylus at the tip of the F8 operates in the direction A-A of the panel transport path, and the stylus intersects.
(The upper and lower stylus do not touch). When the timer 2 reaches the set value, the air guiding plate 5 and the pinch roller driving air cylinder 321 operate, the upper pinch roller 2A presses the panel 1, and the upper air guiding plate 5 descends. Approach panel 1.

When the copper anchor surfaces of the panel 1 touch the stylus at the tips of the upper and lower film edge detecting members 8, the film edge detecting sensor 8 responds to the "ON" state. Furthermore, when the panel 1 advances, the stylus at the tip of the film edge detection sensor 8 touches the surface of the resist film attached to the copper foil surface, and the film edge detection sensor 8 responds to the "OFF" state. In this way, the film edge can be detected where the sensor changes from "ON" to "OFF". If the copper foil surface of the panel 1 is fully laminated with the resist film, the film edge detection sensor 8 does not respond to ON. Therefore, in the second embodiment, the panel front end detection sensor (BED
S) 19 is provided adjacent to the tip of the film edge detection sensor 8 with the position slightly shifted after the tip position of the stylus. When the film edge detection sensor 8 senses "ON" while the panel is being conveyed, the signal of the panel edge detection sensor 19 detecting the panel edge is canceled and the film edge detection sensor 8 turns "ON".
When the panel front end detection sensor 19 detects the front end of the panel before sensing, the control is performed so that the detection signal is used. When the edge of the resist film attached to the panel 1 or the tip of the panel is detected, the sequencer internal timer 3 is activated by the detection signal, and the timer 3 reaches the set value (for example, 0 to 0.1 seconds). At this time, the film edge detection sensor 8 is separated from the panel conveyance path AA and returns to the original position. Further, pneumatic vibration of the leading end of the film floating member (film scratcher) 3 is started, and the floating member up-and-down driving air cylinder 325 operates, so that the leading end of the film floating member 3 vibrates. 1 is pressed against the film surfaces of the upper and lower surfaces. The pressing time is set by the internal timer 4 and the internal timer 7 of the sequencer. At this time, the air cylinder 316 for moving the floating portion works, and the entire film floating device held by the sliding block 304 starts moving in the panel advancing direction. The entire film floating device
Since it is connected to the drive shaft of the panel conveying drive roller 2 of the front conveyor 101 via the connecting rod 310, the connecting members 309 and 311, the crank member 307, and the one-way bearing 308, when moving in the same direction as the progress of the panel. The one-way bearing 308 is latched and moves in synchronization with the transport speed of the panel 1. When movement of this device is stopped or in the opposite direction, the one-way bearing 3
Since 08 is not latched, the speed of the front conveyor 101 does not change.

When the film levitation device starts to move in synchronism with the panel conveying speed, the internal timer 4 of the sequencer operates, and when the set value is reached, the air cylinder 329 for driving the levitation member swing drives to operate the film. The tip of the levitation member 3 vibrates and swings in the panel advancing direction to loosen the adhesion of the film edge. At the same time, compressed air is blown from the air blowing nozzle member 4 facing the edge of the film whose adhesion has been loosened, for a certain period of time (the time set by the internal timer 8 of the sequencer), so that the film rises. When the film blown up by the air ejected from the air blowing nozzle 4 clings to the air guide plate 5 due to the flow of air, the upper film peeling detection sensor (PFS-1) 204 and the lower film peeling detection sensor (PFS) are detected. -2) 205 detects that the film has risen to a position along the air guide plate 5 by the glossy plane of the film. The film floating member 3 moves in a direction away from the panel 1, the pneumatic vibration of the tip end thereof is stopped, and the entire film floating device is pushed back in the direction opposite to the traveling direction of the panel 1 to the initial position. Return.

The film transport belt drive motor 215 starts operating when the upper and lower film peeling detection sensors 204 and 205 react to each other, and the internal timer 5 of the sequencer starts when the film further rises.
Is activated, and when the set value is reached, the movable transport belt 6B of the first film transport device moves toward the fixed transport belt 6A and soars by the two belts and is struck by the air guide plate 5. The resist cover film is sandwiched and conveyed.

Air guide plate 5 and upper pinch roller 2A
Moves away from the surface of the panel 1 and returns to the original position before the operation. The post-conveyor drive motor 216 is started, and film guiding air for sending the release film out of the system is blown out all at once from the fluid ejection device 12.

The panel 1 from which the resist cover film has been turned off is changed from the front conveyor 101 to the rear conveyor 102.
The rear end of the panel 1 passes the position of the panel passage detection sensor (BES) 206, and the sensor 2
When 06 responds to "OFF", the internal timer 6 of the sequencer operates, and when the timer 6 reaches the set value, the front conveyor drive motor 214 stops operating.

Further, the rear conveyor drive motor 216 is
After the panel passage detection sensor 206 responds to “OFF”, the operation is stopped after a predetermined time. However, when the next panel 1 is inserted into the front conveyor 102 and the panel insertion detection sensor 201 responds to “ON”, the operation of these operation stop timers is canceled and the motor 21 is stopped.
Each of 4, 216 continues to operate.

In this way, the control program proceeds by returning to the first step.

In the second embodiment, the crank-shaped member 307 is used as the mechanism for moving the film floating device in the same direction as the progress of the panel, but a rack gear and pinion gear mechanism may be used.

As can be seen from the above description, according to the second embodiment, the panel 1 to which the film is attached is conveyed to the position where the leading end of the film is peeled off, and is synchronized with the conveying speed of the panel 1. At the speed, the leading end of the film is loosened from the panel 1 and the fluid is blown between the panel 1 and the loosened film leading end without substantially changing the transport speed of the panel, and the loosened film is removed. Since it is automatically discharged while peeling, the peeling efficiency of the film can be further improved.

Further, the panel insertion detection sensor 201, the panel centering operation start position sensor 203, the film peeling detection sensors 204, 205, the panel passage detection sensor 206, the film edge detection sensor 8, the panel front end detection sensor 19, the panel left end detection. A sensor 210, a panel right edge detection sensor 211, a panel check sensor 208, and a panel centering unit return detection sensor 213 are provided, and a sequence control unit that operates according to an output signal of each sensor is provided. Transport it to the position where it will be peeled off,
The leading end of the film is loosened from the panel 1 at a speed synchronized with the carrying speed of the panel 1 without substantially changing the carrying speed of the panel 1, and a fluid is provided between the panel 1 and the loosened leading end of the film. Is blown and the loosened film is discharged while being peeled off, so that the film can be peeled off automatically and its efficiency can be improved.

Although the present invention has been specifically described based on the embodiments, it is needless to say that the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. .

For example, it can be used to peel off only the film on one side of the panel.

[0166]

[Table 1]

[0167]

[Table 2]

[0168]

According to the first method of the present invention, the panel to which the film is adhered is conveyed to a position where the front end of the film is peeled off, and the front end of the film is stopped without stopping the conveyance of the panel. The part can be loosened from the panel, the fluid can be blown into the gap between the panel and the loosened film tip, and the loosened film can be discharged while peeling it, thus improving the peeling work efficiency of the film. You can

Further, according to the first apparatus of the present invention, the panel conveying means, the panel centering operation start position sensor, the panel centering unit, the panel decelerating means, the film edge detecting sensor, the film loosening means, the fluid blowing means, the film peeling. Provided with a detection sensor and a film holding means, the panel to which the film is adhered is transported to a position where the leading end of the film is peeled off, and the leading end of the film is loosened from the panel without stopping the transport of the panel, Since the panel and the loosened film can be discharged while being peeled off, the film can be peeled off automatically and efficiently.

According to the second method of the present invention, the panel to which the film is adhered is conveyed to a position where the leading end portion of the film is peeled off, and the film contact loosening mechanism is synchronized with the conveying speed of the panel. While moving the, while substantially not changing the transport speed of the panel, loosen the leading edge of the film from the panel, spray a fluid between the panel and the loosened film leading edge, peel off the loosened film. However, since it can be discharged, the work efficiency of peeling the film can be further improved.

Further, according to the second apparatus of the present invention, the panel conveying means including the panel conveying driving roller, the panel centering operation start position sensor, the panel centering unit, the panel leading end position detecting sensor, the film loosening means,
Fluid spraying means, film loosening means, a support frame that is movable in the traveling direction of the panel in which the fluid spraying means is provided, and the support frame so that the transport speed of the panel does not substantially change during the film loosening. Is provided with a means for moving for a fixed time in synchronization with the rotation of the drive roller for transporting the panel, a film peeling detection sensor, and a film discharging means, and the panel is transported to a position where the leading end of the film is peeled off While moving the support frame at a speed that is synchronized with the speed, loosen the leading edge of the film from the panel and spray fluid between the panel and the loosened leading edge of the film without substantially changing the transport speed of the panel. , Because it can be discharged while peeling off the loosened film,
The peeling efficiency of the film can be further improved.

[Brief description of drawings]

FIG. 1 is a perspective view showing a schematic configuration of a film peeling device for a printed wiring panel that is a first embodiment of the present invention.

FIG. 2A is a diagram showing details of a film peeling mechanism around the air type film transport box shown in FIG. 1;

FIG. 2B is a partially exploded view showing the vicinity of the upper pinch roller of FIG. 2A in an enlarged manner.

FIG. 2C is a diagram showing an upper pinch roller driving gear of FIG. 2A.

FIG. 3A is a view of a film loosening mechanism portion viewed from the rear in the panel advancing direction.

3B is a side view seen from the direction of arrow L shown in FIG. 3A.

FIG. 3C is a perspective view of FIG. 3B.

FIG. 3D is a perspective view of the fluid spraying device.

FIG. 3E is a plan view of FIG. 3D.

FIG. 3F is a perspective view of a film edge detection mechanism.

FIG. 4 is a schematic configuration explanatory view for explaining a film peeling method and a control means therefor according to the first embodiment.

FIG. 5A is a diagram showing a structure of a panel centering portion.

5B is a cross-sectional view taken along line XX shown in FIG. 5A.

FIG. 5C is a diagram showing an operating part of the panel centering shown in FIG. 5A.

FIG. 6 is a program for a programmable controller of the film peeling apparatus of the first embodiment.

FIG. 7 is a program for a programmable controller of the film peeling apparatus of the first embodiment.

FIG. 8A is a program for a programmable controller of the film peeling apparatus of the first embodiment.

FIG. 8B is a program for the programmable controller of the film peeling apparatus of the first embodiment.

FIG. 9 is a program for a programmable controller of the film peeling apparatus of the first embodiment.

FIG. 10A is a program for a programmable controller of the film peeling apparatus of the first embodiment.

FIG. 10B is a program for the programmable controller of the film peeling apparatus of the first embodiment.

FIG. 10C is a program for the programmable controller of the film peeling apparatus of the first embodiment.

FIG. 11 is a program for the programmable controller of the film peeling apparatus of the first embodiment.

FIG. 12 is a time chart for explaining the control of the first embodiment.

FIG. 13A is a side view of a portion that holds a film contact loosening mechanism that operates in synchronization with the panel conveying speed of a film peeling device for a printed wiring panel that is a second embodiment of the present invention.

13B is a view seen from the direction of the arrow Y shown in FIG. 13A.

FIG. 14 is a perspective view showing a part of FIGS. 13A and 13B separated from each other and omitting a film loosening mechanism at a central portion.

FIG. 15 is a time chart simply showing the operation of the second embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Panel, 2 ... Conveyance drive roller, 2A ... Upper pinch roller, 3 ... Film floating member, 4 ... Air blowing nozzle, 4A, 4B ... Air injection hole, 5 ... Air guide plate, 6
... film transport device, 6A ... fixed transport belt, 6B ... movable transport belt, 6C ... peeling film guide member, 8 ... film edge detection sensor, 11 ... thin panel guide wheel, 12 ... fluid ejecting device, 150, 110 ... Ion generator, 100 ... Film peeling device main body, 101 ... Front conveyor, 102 ... Rear conveyor, 104 ... Air duct, 105 ... Peeling film discharge duct, 106 ... Peeling film container, 201 ... Panel insertion detection sensor, 20
2 ... Panel centering unit, 203 ... Panel centering operation start position sensor, 204, 205 ... Film peeling detection sensor, 206 ... Panel passing detection sensor, 208 ... Panel check sensor, 210 ... Panel left end detection sensor, 211 ... Panel right end Detection sensor, 213 ... Panel centering unit return detection sensor, 304 ... Sliding block, 307 ... Crank-shaped member, 308 ... One-way bearing, 309, 31
1 ... Connection member, 310 ... Connection rod, 401, 402 ... Gear.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuo Fukuda 4-11-12 Ginza, Chuo-ku, Tokyo Somer Co., Ltd. (56) Reference JP-A 1-271356 (JP, A) JP-A 63 -9122 (JP, A) Actually open Sho 61-191353 (JP, U)

Claims (38)

[Claims] 1. A method for peeling a film adhered to a panel, comprising the step of conveying the panel having the film adhered to a position where the leading end of the film is peeled off, the conveying speed of the panel and the film. A step of loosening the leading end of the film from the panel without stopping the transport of the panel by approximating the relative movement speed with the loosening means, and spraying a fluid into the gap between the panel and the loosened leading end of the film. A film peeling method comprising: a step of discharging the loosened film while peeling it off. 2. The tilt correction of the panel according to claim 1, further comprising temporarily stopping the transportation of the panel at a predetermined position on the panel transportation means before the step of loosening the leading end of the film from the panel. And a centering step. 3. The film according to claim 1, wherein when the panel is conveyed to a predetermined position before the position where the leading end of the film is peeled off, the conveying speed of the panel is reduced to move the leading end of the film from the panel. A film peeling method characterized by loosening. 4. The film peeling method according to claim 3, wherein when the film is discharged while peeling the film, the transport speed of the slowed panel is returned to the original speed. 5. The device according to claim 1, further comprising detecting that the leading end of the film has reached a predetermined position to be loosened from the panel, and setting a means for spraying a fluid at a position diagonally facing the end of the film, A film peeling method comprising the step of setting a fluid guide plate at a position close to a panel. 6. The film peeling method according to claim 5, wherein the height of the fluid guide plate from the panel surface is maintained within a predetermined range. 7. The film peeling method according to claim 6, wherein the height of the fluid guide plate is changed in association with the height of the upper pinch roller. 8. The vibrating energy is applied to the film in the step of loosening the leading end of the film from the panel by vibrating the conical tip of the film scratcher in the axial direction while abutting the conical tip of the film scratcher on the film surface. A method for peeling a film, comprising: 9. The film peeling method according to claim 8, wherein the film scratcher is brought into contact with the film surface and is moved relative to the panel by a predetermined distance in the traveling direction of the panel. 10. The film peeling method according to claim 1, wherein the panel is forcibly conveyed when the front end portion of the film is loosened from the panel. 11. The film peeling method according to claim 10, wherein the panel is forcibly conveyed by using an upper pinch roller which is rotationally driven in synchronization with the rotation of the lower panel conveying drive roller. . 12. The film peeling method according to claim 11, wherein the upper pinch roller is rotationally driven by a lower panel transport drive roller using a gear having a large module ratio. 13. The film peeling method according to claim 1, wherein the step of spraying the fluid is performed at the same time as the step of loosening the leading end of the film from the panel. 14. The fluid jetting according to claim 1, wherein the fluid is sprayed by using a fluid ejection nozzle disposed between the transporting means of the panel and the film front end loosening means in proximity to the film front end loosening means. A method for peeling a film, comprising: 15. The fluid ejecting hole according to claim 8, wherein the fluid is sprayed with a fluid ejecting hole directed to a film scratcher contact portion in the gap, and a fluid ejecting hole directed to a film end in the vicinity thereof. A method for peeling a film, which is performed using a fluid blowing nozzle. 16. The method according to claim 1, further comprising the step of adhering the film on the front end side in the panel transport direction separated from the panel by spraying the fluid to the fluid guide plate with the fluid pressure. Film peeling method. 17. The method according to claim 16, further comprising the step of detecting that the peeled leading end of the film adheres to the fluid guide plate and stopping the loosening operation of the film leading end. Film peeling method. 18. The method according to claim 1, wherein the step of spraying a fluid to a portion where the adhesion to the panel is loosened to peel off the film reaches the step of discharging the film while peeling off the film. A film peeling method characterized by stopping spraying. 19. The film peeling method according to claim 1, wherein the loosened film is clamped and discharged while peeling. 20. The film peeling method according to claim 1, wherein static electricity of the film is removed through a discharge path of the peeling film. 21. A panel carrying means for carrying a panel to which a film is adhered, and a panel centering operation for detecting that the panel has advanced on the panel carrying means and has reached a predetermined position before the film peeling position. A position sensor and a panel centering unit that starts the operation by the output of the position sensor for starting the panel centering and moves the panel to the center line part of the conveying means, and a conveying speed of the panel after the operation of the panel centering unit is completed. Panel deceleration means for slowing down the film, a film edge detection sensor for detecting the leading edge of the film adhered to the panel at the film peeling position, and the operation of starting the operation by the output of the film edge detection sensor to convey the panel. Without stopping the film, loosen the leading edge of the film from the panel. Means, a fluid spraying means for spraying a fluid onto the gap between the front end of the film and the panel loosened by the film loosening means to flip the film, and the rolled film on the film discharge path. A film peeling detection sensor that detects that it has risen, a means for returning the transport speed of the slowed panel to the original speed by the output of the film peeling detection sensor, and while peeling from the panel by pinching the rolled film. A film peeling device comprising: a film holding means for discharging. 22. The film according to claim 21, further comprising a panel insertion detection sensor for detecting the insertion of a panel into the entrance of the panel transfer means and starting the transfer of the panel. Peeling device. 23. The method according to claim 21, further comprising a panel passage detection sensor for detecting that the rear end of the panel has completely passed the film peeling position, and stopping the transportation of the panel or the film. Characteristic film peeling device. 24. The film peeling apparatus according to claim 21, further comprising panel guide means for guiding the front end of the panel so as not to hang down. 25. The release film guide member according to claim 21, further comprising a release film guide member for guiding the film that has passed through the film holding means, and a fluid duct for discharging the film guided by the release film guide member. Film peeling device. 26. The film peeling device according to claim 21, wherein the film holding means is composed of a fixed conveyance belt and a movable conveyance belt. 27. The film peeling apparatus according to claim 25, wherein the peeling film guide member is made of a rod-shaped conductive material. 28. The peeling film according to claim 25, further comprising an ion generating device for removing static electricity of the peeling film, which is provided near at least one of the peeling film guide member and the fluid duct. apparatus. 29. The device according to claim 21, further comprising a return detection sensor for detecting the end of operation of the panel centering unit, the sensor being a magnetic sensor that reacts at the position of an actuator that drives the panel centering unit. Characteristic film peeling device. 30. The film peeling device according to claim 21, wherein the film edge detection sensor is a capacitance reaction type sensor. 31. A method of peeling a film adhered to a panel, comprising the steps of transporting the panel to which the film is adhered to a position near a position where the leading end of the film is peeled off, moving the panel and loosening the film. Synchronizing the movement of the means, loosening the film leading edge from the panel without substantially changing the transport speed of the panel, and spraying a fluid into the gap between the panel and the loosened film leading edge. And a step of discharging the loosened film while peeling it off, and a film peeling method. 32. The film peeling method according to claim 31, wherein the moving speed of the film loosening means is about half or more of the moving speed of the panel. 33. The film peeling method according to claim 31, wherein the panel is forcibly conveyed when the front end portion of the film is loosened from the panel. 34. A panel carrying means including a panel carrying drive roller for carrying a panel to which a film is adhered, and a panel on the panel carrying means has advanced to reach a predetermined position before the film peeling position. A panel centering operation start position sensor, a panel centering unit that starts operation by the output of the panel centering operation start position sensor, and moves the panel to the center line portion of the transport means, and a panel at the film peeling position. Panel front end position detection sensor for detecting the front end position of the film, the film loosening means for starting the operation by the output of the panel front end position detection sensor and loosening the front end portion of the film from the panel, and the film loosening means for loosening the adhesion. Spray the fluid into the gap between the edge of the film and the panel A turning fluid spraying means, a supporting frame movable in the traveling direction of the panel in which the film loosening means and the fluid spraying means are arranged, and the transport speed of the panel do not substantially change during the loosening of the film,
Means for moving the support frame in synchronization with the rotation of the panel-conveying drive roller for a certain period of time, a film peeling detection sensor for detecting that the rolled-up film has risen on the film discharge path, and the flipping And a film ejecting means for ejecting the film while peeling it from the panel. 35. The panel transfer means according to claim 34, further comprising an upper pinch roller for pressing and transferring the panel, wherein the upper pinch roller is driven by a signal from the panel tip position detection sensor to press the panel. The film peeling apparatus is provided with a mechanism for releasing the pressing after a predetermined time. 36. The film peeling apparatus according to claim 34, wherein the support frame moving means includes a crank mechanism that is driven in synchronization with the rotation of the panel carrying driving roller. 37. The crank mechanism according to claim 36, wherein one end of the crank mechanism is connected to the support frame, the movement of the crank member and the rotation of the panel-conveying drive roller are performed to loosen the film. A film peeling device including a one-way clutch mechanism for synchronizing only. 38. The film peeling device according to claim 34, wherein a panel front end detection sensor is provided in parallel near the film edge detection sensor.