JPH07101039B2 - Compound vacuum pump - Google Patents
Compound vacuum pumpInfo
- Publication number
- JPH07101039B2 JPH07101039B2 JP62099683A JP9968387A JPH07101039B2 JP H07101039 B2 JPH07101039 B2 JP H07101039B2 JP 62099683 A JP62099683 A JP 62099683A JP 9968387 A JP9968387 A JP 9968387A JP H07101039 B2 JPH07101039 B2 JP H07101039B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- gas
- turbo molecular
- vacuum pump
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 150000001875 compounds Chemical class 0.000 title 1
- 239000007789 gas Substances 0.000 description 25
- 239000002131 composite material Substances 0.000 description 14
- 239000003921 oil Substances 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 10
- 230000006835 compression Effects 0.000 description 9
- 238000007906 compression Methods 0.000 description 9
- 230000007423 decrease Effects 0.000 description 6
- 239000010687 lubricating oil Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000030279 gene silencing Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
【発明の詳細な説明】 （１）産業上の利用分野 本発明は半導体製造用真空装置その他において有害なガ
スを排気し清浄な超高真空を得るのに好適な複合真空ポ
ンプに関する。DETAILED DESCRIPTION OF THE INVENTION (1) Field of Industrial Application The present invention relates to a composite vacuum pump suitable for obtaining a clean ultra-high vacuum by exhausting harmful gas in a semiconductor manufacturing vacuum device and the like.
（２）従来の技術 従来この種の複合合金ポンプとして、第４図の如く吸入
口（ａ）と排気口（ｂ）とを有するポンプハウジング
（ｃ）内に、該吸入口（ａ）側からターボ分子ポンプ部
（ｄ）及びねじ溝ポンプ部（ｅ）を順次配設したものが
知られている。なお、（ｆ）はこれらターボ分子ポンプ
部（ｄ）及びねじ溝ポンプ部（ｅ）のロータ（ｇ）の回
転軸、（ｈ）は該軸（ｆ）を回転させるモータを示す。(2) Conventional Technology As a conventional composite alloy pump of this type, as shown in FIG. 4, a pump housing (c) having an intake port (a) and an exhaust port (b) is inserted from the intake port (a) side. It is known that a turbo molecular pump portion (d) and a thread groove pump portion (e) are sequentially arranged. In addition, (f) shows the rotating shaft of the rotor (g) of these turbo molecular pump part (d) and screw groove pump part (e), and (h) shows the motor which rotates this shaft (f).
（３）発明が解決しようとする問題点 半導体製造装置その他の真空プロセス工業において、真
空ポンプ油の逆拡散で汚染されない清浄な高真空が必要
とされる。この必要性に鑑みて開発された多数使用され
ている前記複合真空ポンプは、背圧が300Pa（2.3トル）
以上でも圧縮性能が低下せず排気速度も吸入圧10Pa（0.
075トル）以上でも余り低下しない性能を有するが、大
気圧まで多量の気体を圧縮できない。かくて大気圧まで
大量の気体を圧縮するために前記複合真空ポンプに補助
真空ポンプを接続する必要があり、該補助真空ポンプと
しては油回転真空ポンプが主として用いられるが、該ポ
ンプは油封式であって、吸気口が略13Pa（0.1トル）以
下になるまで排気を続けると、ポンプ油の蒸気が吸気管
の上流に逆拡散して汚染を生じ、またポンプ油と反応し
て油を劣化させ、更に腐食性物質を生じてポンプ材質を
腐食させるようなプロセスガスを吸入する場合にポンプ
の寿命が著しく短くなり保守に非常な工数と費用がかか
る問題点がある。そこでポンプ油を油回転ポンプ外に取
り出して浄化再生し、自動的にポンプに戻す方式が実用
されているが、この場合もポンプ油の寿命が幾らかのび
るだけで装置の設備費及び保守費用がかなりかかる問題
点がある。(3) Problems to be Solved by the Invention In semiconductor manufacturing equipment and other vacuum process industries, a clean high vacuum that is not contaminated by back diffusion of vacuum pump oil is required. The multiple vacuum pumps that have been developed in consideration of this need have a back pressure of 300 Pa (2.3 torr).
Even with the above, the compression performance does not decrease and the exhaust speed is 10 Pa (0.
(075 Torr) or more, it has a performance that does not decrease so much, but cannot compress a large amount of gas up to atmospheric pressure. Thus, in order to compress a large amount of gas to atmospheric pressure, it is necessary to connect an auxiliary vacuum pump to the composite vacuum pump, and an oil rotary vacuum pump is mainly used as the auxiliary vacuum pump, but the pump is an oil seal type. If you continue to exhaust the air until the intake port falls below approximately 13 Pa (0.1 torr), the pump oil vapor will back-diffuse upstream of the intake pipe, causing pollution, and reacting with the pump oil to deteriorate the oil. Further, when a process gas that produces a corrosive substance and corrodes the material of the pump is sucked in, the life of the pump is significantly shortened, and there is a problem that a great number of man-hours and costs are required for maintenance. Therefore, a method has been put into practical use in which pump oil is taken out of the oil rotary pump, purified and regenerated, and then automatically returned to the pump. There is a considerable problem.
そして補助真空ポンプを接続することは真空ポンプ系に
２台以上の真空ポンプが含まれ、これに応じて中間のバ
ルブや配管や配置スペースを必要とし、更には始動及び
停止動作、吸入気体量の変動に対応する操作等の制御が
複雑になる問題点もある。And connecting an auxiliary vacuum pump requires two or more vacuum pumps in the vacuum pump system, and accordingly requires intermediate valves, pipes, and arrangement space, and further, starts and stops operations, intake gas amount There is also a problem that the control of the operation corresponding to the fluctuation becomes complicated.
本発明はこれらの問題点を解消し１台のポンプにより多
量の気体を大気圧から超高真空まで排出時間を短縮して
排気可能にした複合真空ポンプを提供することを目的と
する。SUMMARY OF THE INVENTION It is an object of the present invention to solve these problems and to provide a composite vacuum pump capable of discharging a large amount of gas from atmospheric pressure to ultra-high vacuum with a single pump by shortening the discharge time.
（４）問題点を解決するための手段 この目的を達成すべく本発明は吸気口と排気口とを有す
るポンプハウジング内に、該吸気口側からターボ分子ポ
ンプ部、ねじ溝ポンプ部及び渦流ポンプを順次配設した
ものにおいて、該ターボ分子ポンプ部と該渦流ポンプ部
との間にバイパス路を設け、該バイパス路内に、スプリ
ングの弾発力により前記ターボ分子ポンプ部に連通する
開口を閉じる弁体を設けたことを特徴とする。(4) Means for Solving the Problems To achieve this object, the present invention provides a turbo molecular pump unit, a thread groove pump unit, and a vortex pump in a pump housing having an intake port and an exhaust port from the intake port side. In which the turbo molecular pump unit and the vortex flow pump unit are provided with a bypass passage, and an opening communicating with the turbo molecular pump unit is closed in the bypass passage by elastic force of a spring. It is characterized in that a valve body is provided.
（５）作用 運転初期状態において初期吸入気体は渦流ポンプ部のみ
で排気されて大きな流量を持ちねじ溝ポンプ部に大きな
圧力差が生じこの大きな圧力差によりバルブは開状態と
なりバイパス路を経由して多量の気体を排出して排出時
間を短縮し、その後前記圧力差が減少するとバルブが閉
状態となり、吸入気体は層流状態になって第１段階とし
てねじ溝ポンプ部において排気圧縮されて吸入気体が減
圧され、吸入気体が分子状態になってくると第２段階と
してターボ分子ポンプ部において排気圧縮されて超高真
空となり、これらの排気が多量に効率的に行われる。(5) Action In the initial state of operation, the initial intake gas is exhausted only by the vortex pump section and has a large flow rate, which causes a large pressure difference in the thread groove pump section. This large pressure difference causes the valve to open and the bypass path. When a large amount of gas is discharged to shorten the discharge time and then the pressure difference is reduced, the valve is closed, and the suction gas is in a laminar flow state, and the first step is exhaust compression in the thread groove pump section and suction gas. When the gas is decompressed and the inhaled gas becomes a molecular state, as a second step, the turbo molecular pump section exhausts and compresses to an ultrahigh vacuum, and a large amount of these exhausts are efficiently performed.
（６）実施例 本発明の複合真空ポンプの１実施例を第１図に従って説
明する。(6) Example One example of the composite vacuum pump of the present invention will be described with reference to FIG.
（１）はポンプハウジングを示し、該ハウジング（１）
内にはその上部にターボ分子ポンプ部（２）とその下方
にねじ溝ポンプ部（３）と更にその下方に渦流ポンプ部
（４）が設けられており、前記ターボ分子ポンプ部
（２）はロータ（５）の外周面に突設した多数の動翼
（2a）と前記ハウジング（１）の内周面に突設した多数
の静翼（2b）とからなり、又前記ねじ溝ポンプ部（３）
は前記ロータ（５）の外周面に形成され下流になるに従
って深さが浅くなるねじ溝（3a）と該ねじ溝（3a）の山
部に微小な間隙で対向する内周面を有する円筒状のステ
ータ（3b）とからなり、又前記渦流ポンプ部（４）は前
記ロータ（４）の外周面に突設し放射状の凹部（4d）を
有する多数のラジアルブレード（4a）とこれらにそれぞ
れ対向する吸込流路（4b）を有するステータ（4c）とか
らなり、これらポンプ部（２）（３）（４）のロータ
（５）の軸（5a）は、前記ポンプハウジング（１）の下
方部のモータハウジング（1a）から上方に突出する内筒
（1c）の上方部に設けた上部軸受（6a）及び該モータハ
ウジング（1a）の底板（1d）に設けた下部軸受（6b）に
よって支持し、又前記軸（5a）の下方部には前記モータ
ハウジング（1a）内に設けたインダクションモータ、ヒ
ステリシスモータ等からなる高周波モータ（７）のロー
タ（7a）が固定されていると共に該軸（5a）の下端部が
前記底板（1d）の下方に設けた潤滑油槽（８）内の潤滑
油中に没入しており、前記高周波モータ（７）の駆動に
よる前記軸（5a）の高速回転によれば潤滑油が遠心力に
よって該軸（5a）の中心孔（９）及びその枝孔（9a）
（9b）を経て前記軸受（6a）（6b）に供給されるように
した。ここで前記ポンプ部（２）〜（４）のロータは一
体化されたロータ（５）により構成しているので高速回
転によっても振動が小さく騒音が殆ど発生しない。(1) shows a pump housing, and the housing (1)
Inside thereof, a turbo molecular pump section (2) is provided, a thread groove pump section (3) is provided below the turbo molecular pump section (3), and a vortex flow pump section (4) is further provided below the turbo molecular pump section (2). The rotor (5) comprises a large number of moving blades (2a) projecting on the outer peripheral surface and a plurality of stationary blades (2b) projecting on the inner peripheral surface of the housing (1), and the screw groove pump section ( 3)
Is a cylindrical shape having a thread groove (3a) formed on the outer peripheral surface of the rotor (5) and becoming shallower in depth toward the downstream side, and an inner peripheral surface facing a mountain portion of the thread groove (3a) with a minute gap. And a plurality of radial blades (4a) each having a radial recess (4d) projecting from the outer peripheral surface of the rotor (4) and facing each of them. Shaft (5a) of the rotor (5) of the pump parts (2), (3) and (4) is located below the pump housing (1). Supported by an upper bearing (6a) provided on an upper portion of an inner cylinder (1c) protruding upward from the motor housing (1a) and a lower bearing (6b) provided on a bottom plate (1d) of the motor housing (1a). Further, the lower part of the shaft (5a) is installed in the motor housing (1a). A rotor (7a) of a high-frequency motor (7) composed of a induction motor, a hysteresis motor, etc. is fixed, and the lower end of the shaft (5a) is located inside a lubricating oil tank (8) provided below the bottom plate (1d). Due to the high speed rotation of the shaft (5a) driven by the high frequency motor (7), the lubricating oil is centrifugally applied to the center of the shaft (5a) and its branch hole. (9a)
It was made to be supplied to the bearings (6a) and (6b) via (9b). Here, since the rotors of the pump parts (2) to (4) are constituted by the integrated rotor (5), the vibration is small and the noise is hardly generated even at the high speed rotation.
（10）はバイパス路を示し、該バイパス路（10）は前記
ターボ分子ポンプ部（２）と前記渦流ポンプ部（４）と
の間を連通するように前記ステータ（3b）中に形成され
ており、該バイパス路（10）中にはスプリング（11a）
の上方への弾発力により上方の開口（11c）を閉塞する
弁体（11b）とからなるバルブ（11）が設けられてい
る。Reference numeral (10) denotes a bypass passage, and the bypass passage (10) is formed in the stator (3b) so as to communicate between the turbo molecular pump portion (2) and the vortex flow pump portion (4). And a spring (11a) in the bypass (10)
Is provided with a valve body (11b) that closes the upper opening (11c) by the upward elastic force of the valve (11).
（12）は前記モータハウジング（1a）の内周に形成され
た油流下溝を示し、該油流下溝（12）は前記上部軸受
（6a）から流出した潤滑油が前記モータハウジング（1
a）の内面を流下した後前記ステータ（7b）を冷却しな
がら前記潤滑油槽（８）に戻す作用をする。Reference numeral (12) denotes an oil flow-down groove formed on the inner circumference of the motor housing (1a), and the oil flow-down groove (12) is formed by lubricating oil flowing out from the upper bearing (6a).
After flowing down on the inner surface of a), the stator (7b) is cooled and returned to the lubricating oil tank (8).
尚、（13）は吸気口、（14）は排気口、（15a）（15b）
は水冷ジャケットを示す。In addition, (13) is an intake port, (14) is an exhaust port, (15a) (15b)
Indicates a water cooling jacket.
次に上記実施例の複合真空ポンプの作動を説明する。高
周波モータ（７）の駆動によりロータ（５）が高速で回
転すると、その初期状態において吸気口（13）に流入し
た大気圧の気体は乱流となって1KPaまで主として渦流ポ
ンプ部（４）で圧縮排気される。このとき吸入気体はタ
ーボ分子ポンプ部（２）及びねじ溝ポンプ部（３）を通
るが、ねじ溝（3a）の深さは下流端で非常に浅くなって
いると共に山部（3c）とステータ（3b）の内面との間隙
は極めて小さく、この間を通る初期の吸入気体の風速50
m/s以上に達し、その結果ねじ溝ポンプ部（３）に大き
な圧力差を生ずると共に実効排気速度が低下するが、こ
の圧力差によってスプリング（11a）の弾発に抗して弁
体（11b）を降下してバルブ（11）を開状態にし、バイ
パス流路（10）を経由して多量の気体を排出し、排出時
間を短縮する。Next, the operation of the composite vacuum pump of the above embodiment will be described. When the rotor (5) is rotated at high speed by driving the high frequency motor (7), the atmospheric pressure gas flowing into the intake port (13) in its initial state becomes a turbulent flow, and mainly up to 1 KPa in the vortex pump section (4). Compressed exhaust. At this time, the suction gas passes through the turbo molecular pump section (2) and the thread groove pump section (3), but the depth of the thread groove (3a) is extremely shallow at the downstream end, and the peak portion (3c) and the stator The gap between the inner surface of (3b) and the inner surface is extremely small.
m / s or more, resulting in a large pressure difference in the thread groove pump section (3) and a decrease in the effective pumping speed. This pressure difference resists the spring of the spring (11a) and the valve body (11b). ) To open the valve (11) and discharge a large amount of gas via the bypass flow path (10) to shorten the discharge time.
その後前記圧力差が減少するとスプリング（11a）の弾
発により弁体（11b）が開口（11c）を閉じてバルブ（1
1）を閉状態にし、吸入気体は層流状態になって主とし
てねじ溝ポンプ部（３）において排気されて吸入気体が
減圧され、その結果該吸入気体が分子状態になってくる
と今度は主としてターボ分子ポンプ部（２）において排
気されて超高真空となる。After that, when the pressure difference decreases, the spring (11a) is repelled, so that the valve body (11b) closes the opening (11c) to close the valve (1
When 1) is closed, the intake gas becomes a laminar flow state and is mainly exhausted in the screw groove pump section (3) to reduce the pressure of the intake gas. As a result, when the intake gas becomes a molecular state, this time mainly The turbo molecular pump unit (2) is evacuated to an ultrahigh vacuum.
尚、排気口（14）の内面にスポンジその他の多孔性の材
料からなる筒状の消音手段（16）を設けることにより運
転中の騒音を防止することも可能である。ここで、発明
者の実験によれば、前述した従来の複合真空ポンプにお
いて窒素ガス（N2）に対する排気速度−吸気圧力曲線は
第５図のグラフの如くなると共に窒素ガス（N2）、ヘリ
ウムガス（He）及び水素ガス（H2）に対する圧縮比−排
気口圧力曲線は第６図のグラフの如くなる。従って窒素
ガスについてみると第６図のグラフより排気口圧力が70
0Pa（5.2トル）以下であれば十分な圧縮比をもち、かく
て排気速度が低下しないことがわかる。そしてこの排気
速度の最大状態は第５図のグラフより吸気口圧力が10-6
Pa（10-8トール）の超高真空にまで延びている。そこで
従来の複合真空ポンプによれば吸気口圧力を超高真空に
するためには排気口圧力が700Pa（5.2トル）以下でなけ
ればならない。ところが前述した実施例の複合真空ポン
プは従来の複合真空ポンプのねじ溝ポンプ部の下段に渦
流ポンプ部（４）を設けて構成しており、該渦流ポンプ
部（４）の１段のラジアルブレード（4a）により得られ
る圧縮比は1.45〜2.0であり、該ラジアルブレード（4
a）を10前後の多数段重ねることにより約170の圧縮比が
得られ、かくてこの圧縮比により大気圧から700Pa（5.2
トル）以下に減圧でき、従って実施例の複合真空ポンプ
によれば大気圧から超高真空にまで高い排気速度で排気
可能となる。It is also possible to prevent noise during operation by providing a cylindrical silencing means (16) made of a sponge or other porous material on the inner surface of the exhaust port (14). According to an experiment conducted by the inventor, the exhaust speed-intake pressure curve for nitrogen gas (N 2 ) in the above-described conventional composite vacuum pump is as shown in the graph of FIG. 5, and the nitrogen gas (N 2 ) and helium are The compression ratio-exhaust port pressure curve for gas (He) and hydrogen gas (H 2 ) is shown in the graph of FIG. Therefore, looking at nitrogen gas, the exhaust port pressure is 70 from the graph in Fig. 6.
It can be seen that if the pressure is 0 Pa (5.2 torr) or less, the compression ratio is sufficient, and thus the exhaust speed does not decrease. And, in the maximum state of this exhaust speed, the intake port pressure is 10 -6 from the graph of FIG.
It extends to an ultra-high vacuum of Pa (10 -8 torr). Therefore, according to the conventional composite vacuum pump, the outlet pressure must be 700 Pa (5.2 torr) or less in order to make the inlet pressure ultra high vacuum. However, the composite vacuum pump of the above-described embodiment is configured by providing the vortex flow pump section (4) in the lower stage of the thread groove pump section of the conventional composite vacuum pump, and the one-stage radial blade of the vortex flow pump section (4). The compression ratio obtained by (4a) is 1.45 to 2.0, and the radial blade (4
A compression ratio of about 170 is obtained by stacking a) around 10 in multiple stages, and this compression ratio allows the compression ratio from atmospheric pressure to 700 Pa (5.2
The pressure can be reduced to less than a torr), and therefore, the composite vacuum pump of the embodiment can perform evacuation at a high evacuation speed from atmospheric pressure to ultrahigh vacuum.
次に実施例の複合真空ポンプにおいて、例えばターボ分
子ポンプ部（２）の動翼回転体の外径を200mmとした場
合に、ねじ溝ポンプ部（３）のロータの外径を150mm及
び渦流ポンプ部（４）のロータ外径を130mmとしたもの
を用意して、吸気口圧力−排気速度曲線を求めたところ
第３図のグラフが得られ、このグラフの曲線は従来の複
合真空ポンプに補助真空ポンプを接続した場合と略同一
曲線であり、このことにより実施例のポンプは補助真空
ポンプが不必要で１台の真空ポンプにより大気圧から超
高真空まで排気できることがわかる。Next, in the composite vacuum pump of the embodiment, for example, when the outer diameter of the rotor blade rotating body of the turbo molecular pump unit (2) is 200 mm, the outer diameter of the rotor of the thread groove pump unit (3) is 150 mm and the vortex pump. Part (4) with a rotor outer diameter of 130 mm was prepared, and the intake port pressure-exhaust velocity curve was obtained. The graph in Fig. 3 was obtained. The curve is almost the same as when a vacuum pump is connected, which means that the pump of the embodiment does not require an auxiliary vacuum pump and can exhaust from atmospheric pressure to ultra-high vacuum with one vacuum pump.
尚、前記実施例ではねじ溝（3a）をロータ（５）の外周
面に形成した場合を示したが、該ねじ溝をステータの内
周面に形成した場合又は該ねじ溝をロータの外周面とス
テータの内周面のいずれに形成した場合にも本発明が適
用可能となる。In the above embodiment, the case where the screw groove (3a) is formed on the outer peripheral surface of the rotor (5) is shown. However, when the screw groove is formed on the inner peripheral surface of the stator or the screw groove is formed on the outer peripheral surface of the rotor. The present invention can be applied to any of the inner peripheral surface of the stator and the inner peripheral surface of the stator.
（７）発明の効果 このように本発明によると吸気口と排気口とを有するポ
ンプハウジング内に、吸気口からターボ分子ポンプ部と
ねじ溝ポンプ部を順次配設したものにおいて更に該ねじ
溝ポンプ部の次に渦流ポンプ部を配設し、運転初期状態
において初期吸入気体は渦流ポンプ部のみで排気されて
大きな流量を持ちねじ溝ポンプ部に大きな圧力差が生じ
この大きな圧力差によりバルブは開状態となりバイパス
路を経由して多量の気体を排出して排出時間を短縮し、
その後前記圧力差が減少するとバルブが閉状態となり、
吸入気体は層流状態になって第１段階としてねじ溝ポン
プ部において排気圧縮されて吸入気体が減圧され、吸入
気体が分子状態になってくると第２段階としてターボ分
子ポンプ部において排気圧縮されるようにしたので、１
台のポンプによって多量の気体を大気圧から超高真空ま
で短時間に排気でき、かくて従来の如く補助の油回転ポ
ンプが不必要となり、ポンプ油の逆拡散による汚染等が
防止できると共に設備が簡単となって設備費や保守費用
低減ができ、更に運転操作が簡単になる等の効果を有す
る。(7) Effect of the Invention As described above, according to the present invention, in the pump housing having the intake port and the exhaust port, the turbo molecular pump section and the thread groove pump section are sequentially arranged from the air inlet, and the thread groove pump is further provided. The vortex pump section is installed next to the section, and in the initial state of operation, the initial intake gas is exhausted only by the vortex pump section and has a large flow rate, causing a large pressure difference in the thread groove pump section, and the valve opens due to this large pressure difference. It becomes a state and discharges a large amount of gas via the bypass path to shorten the discharge time,
After that, when the pressure difference decreases, the valve closes,
The intake gas becomes a laminar flow state and is exhaust-compressed in the thread groove pump section as the first step to decompress the intake gas. When the intake gas becomes a molecular state, it is exhaust-compressed in the turbo molecular pump section as the second step. I did so, so 1
A large amount of gas can be exhausted from atmospheric pressure to ultra-high vacuum in a short time by the pump on the stand, thus eliminating the need for an auxiliary oil rotary pump as in the past, and preventing contamination and the like due to back diffusion of pump oil. This has the effect of simplifying equipment and maintenance costs and further simplifying operation.
第１図は本発明の複合真空ポンプの１実施例の断面図、
第２図はその渦流ポンプ部のラジアルブレードの平面
図、第３図は吸気口圧力−排気速度曲線のグラフ、第４
図の従来の複合真空ポンプの断面図、第５図はその吸気
口圧力−排気速度曲線のグラフ、第６図は排気口圧力−
圧縮比曲線のグラフを示す。 （１）……ポンプハウジング （２）……ターボ分子ポンプ部 （３）……ねじ溝ポンプ部 （４）……渦流ポンプ部 （13）……吸気口、（14）……排気口FIG. 1 is a sectional view of one embodiment of the composite vacuum pump of the present invention,
FIG. 2 is a plan view of a radial blade of the vortex pump section, FIG. 3 is a graph of an inlet pressure-exhaust velocity curve, and FIG.
Fig. 5 is a cross-sectional view of the conventional composite vacuum pump in Fig. 5, Fig. 5 is a graph of its inlet pressure-exhaust velocity curve, and Fig. 6 is its outlet pressure-
The graph of a compression ratio curve is shown. (1) …… Pump housing (2) …… Turbo molecular pump section (3) …… Screw groove pump section (4) …… Vortex flow pump section (13) …… Intake port, (14) …… Exhaust port
Claims (1)
グ内に、該吸気口側からターボ分子ポンプ部、ねじ溝ポ
ンプ部及び渦流ポンプ部を順次配設したものにおいて、
該ターボ分子ポンプ部と該渦流ポンプ部との間にバイパ
ス路を設け、該バイパス路内に、スプリングの弾発力に
より前記ターボ分子ポンプ部に連通する開口を閉じる弁
体を設けたことを特徴とする複合真空ポンプ。1. A pump housing having an intake port and an exhaust port, wherein a turbo molecular pump section, a thread groove pump section and a vortex flow pump section are sequentially arranged from the intake port side.
A bypass passage is provided between the turbo molecular pump portion and the vortex flow pump portion, and a valve body for closing an opening communicating with the turbo molecular pump portion by elastic force of a spring is provided in the bypass passage. Combined vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62099683A JPH07101039B2 (en) | 1987-04-24 | 1987-04-24 | Compound vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62099683A JPH07101039B2 (en) | 1987-04-24 | 1987-04-24 | Compound vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63266188A JPS63266188A (en) | 1988-11-02 |
| JPH07101039B2 true JPH07101039B2 (en) | 1995-11-01 |
Family
ID=14253834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62099683A Expired - Fee Related JPH07101039B2 (en) | 1987-04-24 | 1987-04-24 | Compound vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07101039B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
| JP4519185B2 (en) * | 2008-07-22 | 2010-08-04 | 株式会社大阪真空機器製作所 | Turbo molecular pump |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (en) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | Vacuum pump |
| JPS60125795A (en) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
| JPS6385287A (en) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | Vacuum pump |
-
1987
- 1987-04-24 JP JP62099683A patent/JPH07101039B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63266188A (en) | 1988-11-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5074747A (en) | Vacuum pump | |
| CN1133813C (en) | vacuum pump | |
| US5219269A (en) | Vacuum pump | |
| JPH037039B2 (en) | ||
| US7156922B2 (en) | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor | |
| JP4584420B2 (en) | Vacuum pump | |
| JPS60125795A (en) | Composite vacuum pump | |
| JP2005307978A (en) | Multi-stage vacuum pump and pump equipment with that kind of pump | |
| JPH07101039B2 (en) | Compound vacuum pump | |
| JPS60204997A (en) | Composite vacuum pump | |
| JPS60247075A (en) | vacuum pump equipment | |
| JP2002168192A (en) | Vacuum pump | |
| Hablanian | The emerging technologies of oil‐free vacuum pumps | |
| US5217346A (en) | Vacuum pump | |
| US5803713A (en) | Multi-stage liquid ring vacuum pump-compressor | |
| JPH02264196A (en) | Turbine vacuum pump | |
| USRE33129E (en) | Vacuum pump | |
| JP2002070776A (en) | Composite vacuum pump | |
| JPH06249187A (en) | Vacuum pump and driving method therefor | |
| JPH05141389A (en) | Vacuum pump | |
| JP4249946B2 (en) | Improved vacuum pump | |
| JPH0311193A (en) | Vacuum pump | |
| JP2628351B2 (en) | Compound molecular pump | |
| JP2002285987A (en) | Small-size vacuum pump | |
| JP2897424B2 (en) | Vacuum pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |