JPH07101506B2 - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH07101506B2 JPH07101506B2 JP60284821A JP28482185A JPH07101506B2 JP H07101506 B2 JPH07101506 B2 JP H07101506B2 JP 60284821 A JP60284821 A JP 60284821A JP 28482185 A JP28482185 A JP 28482185A JP H07101506 B2 JPH07101506 B2 JP H07101506B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- magnetic recording
- recording medium
- thin film
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、情報産業分野等で利用される高記録密度の磁
気記録媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high recording density magnetic recording medium used in the information industry field and the like.
従来の技術 従来の塗布型磁気記録媒体に代わって、メッキ法、スパ
ッタリング法、真空蒸着法、イオンプレーティング法等
の方法によって強磁性金属薄膜を非磁性基板上に設けた
磁気記録媒体は高記録密度用磁気記録媒体として研究さ
れている。2. Description of the Related Art A magnetic recording medium in which a ferromagnetic metal thin film is provided on a non-magnetic substrate by a plating method, a sputtering method, a vacuum deposition method, an ion plating method or the like instead of the conventional coating type magnetic recording medium has high recording performance. It is being studied as a magnetic recording medium for density.
しかしながら上述した方法で作られた強磁性金属薄膜を
用いた磁気記録媒体は、その耐摩耗性及び走行性に問題
がある。However, the magnetic recording medium using the ferromagnetic metal thin film produced by the above-mentioned method has problems in its wear resistance and running property.
磁気記録媒体は磁気信号の記録、再生の過程において、
磁気ヘッドとの高速相対運動におかれる。この時磁気記
録媒体の走行が円滑でかつ安定で行われなければならな
い。また磁気ヘッドとの接触による摩耗や破損が起きて
はならない。A magnetic recording medium is used for recording and reproducing magnetic signals.
Placed in high-speed relative motion with the magnetic head. At this time, the running of the magnetic recording medium must be smooth and stable. Also, no wear or damage due to contact with the magnetic head should occur.
しかしながら上述したごとき方法で作られた強磁性金属
薄膜は磁気記録、再生の過程の苛酷な条件に耐えること
ができず、磁気ヘッド等の摩擦によって走行が不安定に
なったり、長時間走行させた場合には摩耗したり、破損
したり、摩耗粉の発生によって著しく出力が低下するこ
とがあった。そのため、強磁性金属薄膜上に保護膜とし
てガラス薄膜層を形成し、そのガラス薄膜層を酸処理し
てガラス薄膜層に微細な孔構造を形成した後、さらにそ
のガラス薄膜に潤滑剤を塗布して表面に潤滑面を形成す
ることが提案されている。(特開昭59−210538号公報) 発明が解決しようとする問題点 しかしながら、この場合初期の潤滑性は若干改善が見ら
れるが、滑性耐久性がない。これは、潤滑剤とガラス薄
膜との結合が物理吸着程度の弱いものであるため、走行
中にしゅう動する磁気ヘッド等により、潤滑剤が削り取
られるからである。However, the ferromagnetic metal thin film formed by the above method cannot withstand the harsh conditions of the magnetic recording and reproducing processes, and the friction of the magnetic head or the like makes the traveling unstable, or the traveling for a long time. In some cases, the output may be significantly reduced due to abrasion, damage, or generation of abrasion powder. Therefore, a glass thin film layer is formed as a protective film on the ferromagnetic metal thin film, the glass thin film layer is acid-treated to form a fine pore structure in the glass thin film layer, and then a lubricant is further applied to the glass thin film. It has been proposed to form a lubricated surface on the surface. (Japanese Patent Laid-Open No. 59-210538) Problems to be Solved by the Invention However, in this case, although the initial lubricity is slightly improved, the lubricity is not durable. This is because the bond between the lubricant and the glass thin film is weak to the extent of physical adsorption, and the lubricant is scraped off by a magnetic head or the like that slides during running.
本発明はかかる点に鑑みてなされたもので、滑性耐久性
のすぐれた磁気記録媒体を提供することを目的としてい
る。The present invention has been made in view of the above points, and an object thereof is to provide a magnetic recording medium having excellent sliding durability.
問題点を解決するための手段 非磁性基板上に設けた強磁性金属薄膜上に、フッ化物ガ
ラス層を形成する。Means for Solving Problems A fluoride glass layer is formed on a ferromagnetic metal thin film provided on a non-magnetic substrate.
作用 本発明のフッ化物ガラス層は固体潤滑剤として優れた、
フッ化物がガラス中に分散されたガラスである。そのた
め、フッ化物ガラス層を形成した磁気記録媒体では、磁
気ヘッド等で摩擦しても潤滑剤であるフッ化物がガラス
表面からなくなることがない。その結果、滑性耐久性の
すぐれた磁気記録媒体が得られるのである。The fluoride glass layer of the present invention is excellent as a solid lubricant,
A glass in which a fluoride is dispersed in glass. Therefore, in the magnetic recording medium having the fluoride glass layer formed, the fluoride as the lubricant does not disappear from the glass surface even if the friction is caused by the magnetic head or the like. As a result, a magnetic recording medium having excellent lubricity and durability can be obtained.
実 施 例 図は、本発明の磁気記録媒体の断面図である。図におい
て、1は非磁性基板、2は強磁性金属薄膜、3はフッ化
物ガラス層である。Example FIG. Is a sectional view of the magnetic recording medium of the present invention. In the figure, 1 is a non-magnetic substrate, 2 is a ferromagnetic metal thin film, and 3 is a fluoride glass layer.
本発明による磁気記録媒体に使用しうる非磁性基板1と
しては、ポリ塩化ビニル、酢酸セルロース、ポリエチレ
ンテレフタレート、ポリエチレン、ポリプロピレン、ポ
リカーボネート、ポリイミド、ポリアミド等の高分子材
料、非磁性金属材料、ガラス、磁器等のセラミック材料
等周知の材料からなるフィルム、板等がある。Examples of the non-magnetic substrate 1 that can be used in the magnetic recording medium according to the present invention include polymeric materials such as polyvinyl chloride, cellulose acetate, polyethylene terephthalate, polyethylene, polypropylene, polycarbonate, polyimide and polyamide, non-magnetic metal materials, glass and porcelain. There are films and plates made of known materials such as ceramic materials.
また、本発明の磁気記録媒体に使用しうる強磁性金属薄
膜2を形成しうる強磁性材料としては、周知の任意の材
料を使用でき、例えば鉄、コバルト、ニッケルの1種以
上の合金またはこれらと、他の金属例えばマンガン、ク
ロム、チタン、リン、イットリウム、サマリウム、ビス
マス等とを組合わせた合金があり、また上記金属の酸化
物等がある。As the ferromagnetic material that can be used to form the ferromagnetic metal thin film 2 that can be used in the magnetic recording medium of the present invention, any known material can be used. For example, one or more alloys of iron, cobalt, nickel, or these materials can be used. And other metals such as manganese, chromium, titanium, phosphorus, yttrium, samarium, bismuth, and the like, and oxides of the above metals.
非磁性基板1上に強磁性金属薄膜2を形成させるにあた
っては真空蒸着法、スパッタリング法、イオンプレーテ
ィング法、メッキ法等任意の周知の方法で形成させるこ
とができる。The ferromagnetic metal thin film 2 can be formed on the non-magnetic substrate 1 by any known method such as a vacuum deposition method, a sputtering method, an ion plating method, and a plating method.
本発明においては、上述したごとき強磁性金属薄膜2の
上にフッ化物ガラス層3を設けることが要点である。In the present invention, the point is to provide the fluoride glass layer 3 on the ferromagnetic metal thin film 2 as described above.
本発明で使用しうるフッ化物ガラスは、フッ化物とガラ
スの混合物である。The fluoride glass that can be used in the present invention is a mixture of fluoride and glass.
フッ化物としては、例えばCaF2,PbF2,AlF2,BeF2,NaF,Mg
F2,SrF2,BaF2,ZrF4,ThF4等が例としてあげられる。これ
らが単独あるいは複合して用いられる。As the fluoride, for example, CaF 2 , PbF 2 , AlF 2 , BeF 2 , NaF, Mg
Examples are F 2 , SrF 2 , BaF 2 , ZrF 4 , ThF 4 and the like. These are used alone or in combination.
ガラスとしては酸化物ガラス、元素ガラス、水素結合ガ
ラス、塩化物ガラス、硫化物ガラス、炭酸塩ガラス、硝
酸塩ガラス、硫酸塩ガラス等が例としてあげられる。こ
のなかでも酸化物ガラスが耐摩耗性の点で優れている。Examples of the glass include oxide glass, elemental glass, hydrogen-bonded glass, chloride glass, sulfide glass, carbonate glass, nitrate glass, and sulfate glass. Among these, oxide glass is excellent in wear resistance.
酸化物ガラスの例としては、Al2O3,SiO2,B2O3,P2O3,GeO
2,As2O5,Sb2O3,Bi2O3,P2O3,V2O5,Sb2O5,As2O3,ZrO2,Na2
O−SiO2,Na2O−CaO−SiO2,K2O−CaO−SiO2,BaO−SiO2−
B2O3,Na2O−B2O3−SiO2,Al(PO3)3,Fe2O3−P2O3,Na2O
−Al2O3−SiO2,Al−Si−O−N等が例としてあげられ
る。Examples of oxide glasses include Al 2 O 3 , SiO 2 , B 2 O 3 , P 2 O 3 and GeO.
2 , As 2 O 5 , Sb 2 O 3 , Bi 2 O 3 , P 2 O 3 , V 2 O 5 , Sb 2 O 5 , As 2 O 3 , ZrO 2 , Na 2
O-SiO 2, Na 2 O -CaO-SiO 2, K 2 O-CaO-SiO 2, BaO-SiO 2 -
B 2 O 3, Na 2 O -B 2 O 3 -SiO 2, Al (PO 3) 3, Fe 2 O 3 -P 2 O 3, Na 2 O
-Al 2 O 3 -SiO 2, Al -Si-O-N and the like as an example.
本発明により強磁性金属薄膜2上に、フッ化物ガラス層
3を形成するに当たっては、スパッタリング法で形成さ
せることができる。According to the present invention, the fluoride glass layer 3 can be formed on the ferromagnetic metal thin film 2 by a sputtering method.
本発明により強磁性金属薄膜2上に、フッ化物ガラス層
3を形成する場合、その膜厚は5〜50nmが好適である。When the fluoride glass layer 3 is formed on the ferromagnetic metal thin film 2 according to the present invention, its thickness is preferably 5 to 50 nm.
上記膜厚が50nmより大となると、信号の再生時にスペー
シングロスにより出力が低下した。また5nmより小さく
なると、ピンホールが生じやすくなって、潤滑性が期待
できなかった。When the film thickness was more than 50 nm, the output decreased due to spacing loss during signal reproduction. On the other hand, if the thickness is less than 5 nm, pinholes are likely to occur, and lubricity cannot be expected.
厚さ20μmのポリイミドフィルム基板上に、真空蒸着法
によりコバルト(90%)−クロム(10%)からなる膜厚
150nmの強磁性金属薄膜を作った。この強磁性金属薄膜
を形成した基板から直径75mmの大きさの片を切りとり、
上記強磁性金属薄膜の上に、アルゴンガスを導入して高
周波スパッタ法により10nmのフッ化物ガラス層を形成し
た。アルゴンガス圧は2×10-4Torrとし、ターゲットに
は下記の組成を持つ各フッ化物ガラスを用いた。Film thickness consisting of cobalt (90%)-chromium (10%) on a 20 μm thick polyimide film substrate by vacuum deposition.
A ferromagnetic metal thin film of 150 nm was made. Cut a piece with a diameter of 75 mm from the substrate on which this ferromagnetic metal thin film is formed,
Argon gas was introduced onto the ferromagnetic metal thin film to form a 10 nm fluoride glass layer by a high frequency sputtering method. The argon gas pressure was 2 × 10 −4 Torr, and each fluoride glass having the following composition was used as a target.
試料2 Al2O3−CaF2層(85:15モル比) 試料3 SiO2−MgF2層(75:25モル比) 試料4 Na2O−B2O3−SiO2−PbF2層(15:10:60:15モル
比) 試料5 Al(PO3)3−AlF3−NaF−MgF2−CaF2−SrF2−
BaF2層(フツリン酸)(5:32:12:8:27:8:8モル比) 〔比較例〕 前記実施例において、強磁性金属薄膜の上に、フッ化物
ガラス層の代わりにSiO2−B2O3−Na2O(65:15:20)層を
10nmスパッタ法により形成した。次に、5%の硝酸水溶
液で処理し、フッ素系滑剤(クライトックス,丸和物産
(株)製)をスピンコートした。Sample 2 Al 2 O 3 —CaF 2 layer (85:15 molar ratio) Sample 3 SiO 2 —MgF 2 layer (75:25 molar ratio) Sample 4 Na 2 O—B 2 O 3 —SiO 2 —PbF 2 layer ( 15: 10: 60: 15 molar ratio) sample 5 Al (PO 3) 3 -AlF 3 -NaF-MgF 2 -CaF 2 -SrF 2 -
BaF 2 layer (fluoric acid) (5: 32: 12: 8: 27: 8: 8 molar ratio) [Comparative Example] In the above-mentioned Examples, SiO 2 was used instead of the fluoride glass layer on the ferromagnetic metal thin film. -B 2 O 3 -Na 2 O (65:15:20) layer
It was formed by a 10 nm sputtering method. Next, it was treated with a 5% aqueous nitric acid solution and spin-coated with a fluorine-based lubricant (Crytox, manufactured by Maruwa Bussan Co., Ltd.).
実施例の試料1〜5、および比較例の試料の動摩擦係数
を動摩擦係数計(DFPM型、協和科学製)で測定した。The dynamic friction coefficients of the samples 1 to 5 of the examples and the samples of the comparative examples were measured with a dynamic friction coefficient meter (DFPM type, manufactured by Kyowa Kagaku).
用いたヘッドは直径12mmの鋼球で、ヘッド荷重100g、ヘ
ッドの走行速度1.0mm/sで測定した。その結果を下記に
示す。The head used was a steel ball with a diameter of 12 mm, and the head load was 100 g and the running speed of the head was 1.0 mm / s. The results are shown below.
表のデータから、本発明による実施例の磁気記録媒体は
初期動摩擦係数は勿論、200回往復後においても動摩擦
係数が低く、滑性耐久性において、比較例より優れてい
ることがわかる。 From the data in the table, it is understood that the magnetic recording media of the examples according to the present invention have not only the initial dynamic friction coefficient but also the low dynamic friction coefficient after 200 reciprocations, and are superior to the comparative example in the sliding durability.
またこれらの磁気記録媒体を市販のフロッピーディスク
と同等の機能を有する試験機で走行させたところ、実施
例の磁気記録媒体はいずれも、100時間後も走行が安定
し、摩耗傷は見られなかった。それに対し比較例の磁気
記録媒体は走行が不安定になり、磁性面に摩耗傷が見ら
れた。Further, when these magnetic recording media were run on a testing machine having a function equivalent to that of a commercially available floppy disk, all of the magnetic recording media of Examples were stable in running even after 100 hours, and no abrasion scratch was observed. It was On the other hand, the magnetic recording medium of the comparative example became unstable in running, and abrasion scratches were found on the magnetic surface.
なお以上の実施例では磁気ディスクについて示したが、
本発明の磁気記録媒体は、磁気テープ、磁気カード等に
も適用できることは明らかである。Although the magnetic disk is shown in the above embodiment,
The magnetic recording medium of the present invention is obviously applicable to magnetic tapes, magnetic cards and the like.
発明の効果 本発明の磁気記録媒体は滑性耐久性にすぐれ、それを長
期間維持することができる。EFFECTS OF THE INVENTION The magnetic recording medium of the present invention has excellent sliding durability and can maintain it for a long period of time.
図は本発明の一実施例における磁気記録媒体の断面図で
ある。 1……非磁性基板、2……強磁性金属薄膜、3……フッ
化物ガラス層。FIG. 1 is a sectional view of a magnetic recording medium according to an embodiment of the present invention. 1 ... Non-magnetic substrate, 2 ... Ferromagnetic metal thin film, 3 ... Fluoride glass layer.
Claims (2)
に、フッ化物とガラスとの混合物からなるフッ化物ガラ
ス層を形成した磁気記録媒体。1. A magnetic recording medium in which a fluoride glass layer made of a mixture of fluoride and glass is formed on a ferromagnetic metal thin film provided on a non-magnetic substrate.
囲第1項記載の磁気記録媒体。2. The magnetic recording medium according to claim 1, wherein the glass is an oxide glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60284821A JPH07101506B2 (en) | 1985-12-18 | 1985-12-18 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60284821A JPH07101506B2 (en) | 1985-12-18 | 1985-12-18 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62143225A JPS62143225A (en) | 1987-06-26 |
| JPH07101506B2 true JPH07101506B2 (en) | 1995-11-01 |
Family
ID=17683442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60284821A Expired - Lifetime JPH07101506B2 (en) | 1985-12-18 | 1985-12-18 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07101506B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50146303A (en) * | 1974-03-15 | 1975-11-25 |
-
1985
- 1985-12-18 JP JP60284821A patent/JPH07101506B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62143225A (en) | 1987-06-26 |
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