JPH07110332B2 - Silent discharge generator for gas processing - Google Patents
Silent discharge generator for gas processingInfo
- Publication number
- JPH07110332B2 JPH07110332B2 JP62101067A JP10106787A JPH07110332B2 JP H07110332 B2 JPH07110332 B2 JP H07110332B2 JP 62101067 A JP62101067 A JP 62101067A JP 10106787 A JP10106787 A JP 10106787A JP H07110332 B2 JPH07110332 B2 JP H07110332B2
- Authority
- JP
- Japan
- Prior art keywords
- silent discharge
- voltage
- gas
- discharge
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、無声放電の発生スペースに空気等のガスを通
して一定のガス成分に所期の化学変化を起こさせるため
のガス処理用の無声放電発生装置に関する。TECHNICAL FIELD The present invention relates to a silent discharge for gas treatment for passing a gas such as air through a space where silent discharge is generated to cause a desired chemical change in a certain gas component. Regarding the generator.
（従来の技術） 従来のこのような無声放電発生装置として、例えば第５
図に示すように、交流電源１に接続された対の電極２間
に板ガラス等の絶縁体３をほぼ接する状態で挟んだもの
がある。この装置では、絶縁体３の介在により対の電極
２間にアーク放電を発生し得る空隙が存在しないため、
所定の交流電圧を印加したとき電極２と絶縁体３間で無
声放電が発生するようになっており、これによって例え
ば空気中にオゾンO3を生成するために利用されている。(Prior Art) As such a conventional silent discharge generating device, for example,
As shown in the figure, there is one in which an insulator 3 such as a plate glass is sandwiched between a pair of electrodes 2 connected to an AC power source 1 so as to be in almost contact with each other. In this device, since there is no gap between the pair of electrodes 2 that can generate an arc discharge due to the interposition of the insulator 3,
Silent discharge is generated between the electrode 2 and the insulator 3 when a predetermined AC voltage is applied, and is used to generate ozone O 3 in the air, for example.
（発明が解決しようとする問題点） しかし、上記の従来技術では無声放電発生スペースが極
めて狭いものとなるため、そのスペースに多量のガスを
通過させることができず、ガス処理能力が低いという問
題があった。(Problems to be Solved by the Invention) However, in the above-described conventional technology, since the silent discharge generation space is extremely narrow, a large amount of gas cannot be passed through the space, and the gas processing capacity is low. was there.
そこで本発明は、対の電極間に、ガスが通過可能で、か
つ安定な無声放電が発生しているスペースを大きく設定
し得るようにすることを、その解決すべき技術的課題と
する。Therefore, it is a technical problem to be solved in the present invention to make it possible to set a large space between the pair of electrodes in which gas can pass and stable silent discharge is generated.
（問題点を解決するための手段） 上記課題を解決するための技術的手段は、所定範囲の比
誘電率を示す誘電体から成る通気可能な小孔隙を多数形
成したガス透過用の構造体を構成し、この構造体の両側
には、前記誘導体の比誘電率と外部から前記誘電体に印
加される無声放電用電圧との二つの要因で定義された無
声放電安定領域において無声放電を発生させるための放
電用の交流電圧あるいはパルス電圧が印加される対の電
極をそれぞれ同構造体にほぼ接するように設けたことで
ある。(Means for Solving the Problems) A technical means for solving the above-mentioned problems is to provide a structure for gas permeation in which a large number of permeable small pores made of a dielectric material having a relative dielectric constant within a predetermined range are formed. Silent discharge is generated on both sides of the structure in a silent discharge stable region defined by two factors: the relative dielectric constant of the dielectric material and the voltage for silent discharge externally applied to the dielectric material. Therefore, a pair of electrodes to which a discharge AC voltage or a pulse voltage for discharge is applied is provided so as to be substantially in contact with the same structure.
（作 用） 対の電極間に設けたガス透過用の構造体が通気可能な多
数の小孔隙を有するので、十分な量のガスを通過させ得
る。(Operation) Since the structure for gas permeation provided between the pair of electrodes has a large number of small pores through which gas can pass, a sufficient amount of gas can pass through.
構造体は比誘電率の高い誘電体から成るので、所定の交
流電圧あるいはパルス電圧を印加すると、それぞれの小
孔隙において安定な無声放電が発生する。Since the structure is made of a dielectric having a high relative permittivity, stable silent discharge is generated in each small pore when a predetermined AC voltage or pulse voltage is applied.
（実施例） 次に本発明の第１実施例を第１図〜第３図に基づいて説
明する。(Embodiment) Next, a first embodiment of the present invention will be described with reference to FIGS.
無声放電発生装置４は有害な一酸化窒素NOを含む空気を
処理するためのものである。The silent discharge generator 4 is for treating air containing harmful nitric oxide NO.
筒状の装置ケース５は絶縁性の材料（例えば、適当な種
類の合成樹脂材料）から成り、図示省略の適当な送風手
段によって上流側６から下流側７へ空気が流通されるよ
うになっている。The cylindrical device case 5 is made of an insulating material (for example, a synthetic resin material of an appropriate type), and air is circulated from the upstream side 6 to the downstream side 7 by an appropriate blower not shown. There is.
装置ケース５の内部において、上流側には導体材料によ
り所定のメッシュの網状に形成された接地電極８が、ま
た下流側には導体材料により同じメッシュの網状に形成
された電界印加電極９が、それぞれ装置ケース５の内周
部全体を横断するように設けられている。Inside the device case 5, the ground electrode 8 formed of a conductive material in a mesh shape of a predetermined mesh is provided on the upstream side, and the electric field applying electrode 9 formed of a conductive material in the mesh shape of a conductive material is provided on the downstream side. Each is provided so as to traverse the entire inner peripheral portion of the device case 5.
次に、接地電極８と電界印加電極９との間にはガス透過
用の構造体10が構成されている。構造体10は、比誘電率
εｓが50程度、あるいはそれ以上である適当な種類の誘
電体材料（例えば、比誘電率εｓが約1500であるチタン
酸バリウム、又はこれを主成分とする組成物）から成る
多数の球状粒子11を両電極8,9間に充填することにより
構成されている。球状粒子11は網状の電極8,9を通過し
ない径を有している。Next, a structure 10 for gas permeation is formed between the ground electrode 8 and the electric field applying electrode 9. The structure 10 is made of an appropriate type of dielectric material having a relative permittivity εs of about 50 or more (for example, barium titanate having a relative permittivity εs of about 1500, or a composition containing this as a main component). ) Is filled with a large number of spherical particles 11 composed of (1) between both electrodes 8 and 9. The spherical particles 11 have a diameter that does not pass through the mesh electrodes 8 and 9.
なお、前記の接地電極８は導線12を介して接地されてお
り、また電界印加電極９は導線13を介して交流電源14に
接続されている。The ground electrode 8 is grounded via a conductor 12, and the electric field applying electrode 9 is connected to an AC power source 14 via a conductor 13.
また、装置ケース５の入口側６にはアンモニアNH3を定
量的に供給し得る装置（図示省略）が設けられている。Further, a device (not shown) capable of quantitatively supplying ammonia NH 3 is provided on the inlet side 6 of the device case 5.
本実施例のは以上のように構成されたものであり、次の
ように使用される。The present embodiment is constructed as described above and is used as follows.
まず電界印加電極９に電源14から交流電圧を加えると、
電界印加電極９と接地電極８との間における誘電体の球
状粒子11全体に外部電界が印加される。すると、個々の
球状粒子11が分極を起こし、その表面に正極性、及び負
極性の電荷が現われる。その電荷により、隣り合う球状
粒子11間の僅かな孔隙に電界が集中し、第２図の斜線で
示す孔隙部分15において無声放電が発生する。First, when an AC voltage is applied from the power source 14 to the electric field applying electrode 9,
An external electric field is applied to the entire spherical particles 11 of the dielectric material between the electric field applying electrode 9 and the ground electrode 8. Then, the individual spherical particles 11 cause polarization, and positive and negative charges appear on the surface thereof. Due to the electric charges, an electric field is concentrated in a small amount of pores between adjacent spherical particles 11, and a silent discharge is generated in the pore portion 15 shown by hatching in FIG.
このような無声放電において、第３図にグラフ化して示
すように、横軸の対数目盛で示す球状粒子11の比誘電率
εｓと縦軸の目盛で示す交流印加電圧V LAC（Kv）の２
つの要因で定義される無声放電安定領域16（第３図の斜
線部分）の存在することが知られている。従って、球状
粒子11の比誘電率εｓに対応して適正な範囲の交流電圧
を印加することにより、孔隙部分15において安定な無声
放電を発生させ得る。また、球状粒子11の比誘電率が高
いので、第３図より明らかなように相対的に低い交流電
圧の印加により安定した無声放電を発生させ得る。In such a silent discharge, as shown in the graph of FIG. 3, the relative permittivity εs of the spherical particles 11 shown on a logarithmic scale on the horizontal axis and the AC applied voltage V LAC (Kv) of 2 on the vertical axis are shown.
It is known that there is a silent discharge stable region 16 (hatched portion in FIG. 3) defined by two factors. Therefore, by applying an AC voltage in a proper range corresponding to the relative dielectric constant εs of the spherical particles 11, stable silent discharge can be generated in the pore portions 15. Further, since the relative permittivity of the spherical particles 11 is high, stable silent discharge can be generated by applying a relatively low AC voltage, as is clear from FIG.
このような状態において、一酸化窒素NOを含む被処理空
気を装置ケース５の上流側６より下流側７へ向って流
す。このとき、図示省略のアンモニア供給装置より一酸
化窒素NOと当量のアンモニアNH3を被処理空気に混入さ
せ、かつ適当な手段で空気中に水分（水蒸気）を含有さ
せる。In such a state, the air to be treated containing nitric oxide NO is made to flow from the upstream side 6 to the downstream side 7 of the device case 5. At this time, nitric oxide NO and an equivalent amount of ammonia NH 3 are mixed into the air to be treated from an ammonia supply device (not shown), and water (steam) is contained in the air by an appropriate means.
被処理空気は構造体10を透過するに際し、球状粒子11間
に形成された多数の小孔隙を分散透過するので、多量の
被処理空気を流すことができる。そして、被処理空気が
無声放電を発生している孔隙部分15を通過するとき、被
処理空気中の酸素ガスO2、水H2Oからラジカル状の酸素
原子Ｏあるいは水酸基OHが発生するため、主として以下
に示す反応式により二酸化窒素NO2あるいは硝酸HNO3を
生成する。When the air to be treated permeates the structure 10, it disperses and permeates a large number of small pores formed between the spherical particles 11, so that a large amount of air to be treated can flow. When the air to be treated passes through the pores 15 where the silent discharge is generated, oxygen gas O 2 and H 2 O in the air to be treated generate radical oxygen atoms O or hydroxyl groups OH. Nitrogen dioxide NO 2 or nitric acid HNO 3 is mainly produced by the following reaction formula.
NO＋Ｏ→NO2 NO2＋OH→HNO3 これらの二酸化窒素NO2や硝酸HNO3は一酸化窒素NOに比
し反応性が高く、前記した当量のアンモニアNH3と反応
して、水分の存在下に、硝酸アンモニウムNH4NO3のエア
ロゾルを生ずる。そしてこのエアロゾルは球状粒子11の
表面に付着することにより捕集される。上記の反応は球
状粒子11間の小孔隙内で行なわれ、かつ多数の球状粒子
11の総表面積が極めて大きいので、エアロゾルの捕集は
ほぼ完全に行なわれる。NO + O → NO 2 NO 2 + OH → HNO 3 These nitrogen dioxide NO 2 and nitric acid HNO 3 are more reactive than nitric oxide NO, and react with the equivalent amount of ammonia NH 3 described above in the presence of water. , Produces an ammonium nitrate NH 4 NO 3 aerosol. Then, this aerosol is collected by adhering to the surface of the spherical particles 11. The above reaction is carried out in the small pores between the spherical particles 11, and a large number of spherical particles
Due to the extremely large total surface area of 11, the collection of aerosol is almost complete.
なお、本実施例において、誘電体の粒子の形状は球状の
ものに限らない。また、電界印加電極にはパルス電圧を
印加しても良い。In addition, in the present embodiment, the shape of the dielectric particles is not limited to the spherical shape. A pulse voltage may be applied to the electric field applying electrode.
次に本発明の第２実施例を第４図に基づいて説明する。Next, a second embodiment of the present invention will be described with reference to FIG.
本実施例において、ガス透過用の構造体17は僅かな相互
間隙をもって並列状に複数配列された通気板18により構
成されてる。各通気板18は第１実施例と同様の誘電体材
料を用いた海綿状の多孔質板体であって、その多数の小
孔隙より空気を透過させ得る。そして、構造体17に所定
の電圧が印加されたとき、各構造体17間の僅かな間隙19
において安定な無声放電を発生するようになっている。
他の点の構成及び作用は第１実施例と同様である。In this embodiment, the gas permeation structure 17 is composed of a plurality of ventilation plates 18 arranged in parallel with a slight mutual gap. Each ventilation plate 18 is a sponge-like porous plate made of a dielectric material similar to that of the first embodiment, and allows air to permeate through a large number of small pores. Then, when a predetermined voltage is applied to the structures 17, a slight gap 19 between the structures 17 is generated.
The stable silent discharge is generated at.
The configuration and operation of other points are similar to those of the first embodiment.
上記の各実施例において、比誘電率εｓが10程度あるい
はそれ以下の誘電体も使用し得る。しかし、この場合に
は印加電圧を相当に高くする必要があることから、実施
し難い場合もある。In each of the above embodiments, a dielectric material having a relative dielectric constant εs of about 10 or less can also be used. However, in this case, it may be difficult to implement because the applied voltage needs to be considerably high.
なお、本発明の無声放電発生装置は上記のように一酸化
窒素NOを含む空気の処理用として用いられる他、無声放
電発生スペースに空気等のガスを通過した際に行なわれ
るガス成分の各種の化学変化を利用する他種の用途、例
えば空気中にオゾンO3を発生させるための装置として、
あるいは亜硫酸ガスSO2を無水硫酸SO3に変化させてアル
カリ等で吸着可能とする装置等としても利用可能であ
る。Incidentally, the silent discharge generator of the present invention is used for the treatment of air containing nitric oxide NO as described above, and various kinds of gas components carried out when a gas such as air is passed through the silent discharge generation space. Other uses of chemical changes, for example as a device for generating ozone O 3 in the air,
Alternatively, it can be used as an apparatus or the like in which sulfurous acid gas SO 2 is changed to anhydrous sulfuric acid SO 3 so that it can be adsorbed by an alkali or the like.
さらに出願人が昭和60年10月31日付の特許出願（特願昭
60−244963号）で開示したようなダスト荷電用のコロナ
放電極を上記各実施例の構成に加えることにより、空気
中のダストの電気的集塵をガス透過用構造体において合
せ行ない得るようにしても良い。Furthermore, the applicant applied for a patent on October 31, 1985 (Japanese Patent Application
No. 60-244963), by adding a corona discharge electrode for charging dust to the structure of each of the above-mentioned embodiments, it is possible to perform electric collection of dust in the air in the structure for gas permeation. May be.
（発明の効果） 本発明は、ガスが通過し得る安定な無声放電発生スペー
スを大きく設定できるため、無声放電発生装置を各種有
害ガス成分の捕集、無害化等のために利用する際におい
て、その処理能力を大幅に向上させることができる。(Effect of the invention) The present invention can set a large stable silent discharge generation space through which gas can pass, and therefore, when using the silent discharge generator for collecting various harmful gas components, detoxifying, etc., The processing capacity can be greatly improved.
第１図は本発明の第１実施例の断面図、第２図はその要
部拡大図、第３図は誘電体の比誘電率と無声放電用交流
電圧との要因で定義される無声放電安定領域を示すグラ
フ、第４図は本発明の第２実施例の断面図、第５図は従
来例を示す図である。 ４……無声放電発生装置 ５……装置ケース ８……接地電極 ９……電界印加電極 10……構造体 11……球状粒子FIG. 1 is a sectional view of a first embodiment of the present invention, FIG. 2 is an enlarged view of a main part thereof, and FIG. 3 is a silent discharge defined by factors of a dielectric constant of a dielectric material and an AC voltage for silent discharge. FIG. 4 is a graph showing a stable region, FIG. 4 is a sectional view of a second embodiment of the present invention, and FIG. 5 is a view showing a conventional example. 4 ... Silent discharge generator 5 ... Device case 8 ... Ground electrode 9 ... Electric field application electrode 10 ... Structure 11 ... Spherical particle
Claims (1)
通気可能な小孔隙を多数形成したガス透過用の構造体を
構成し、この構造体の両側には、前記誘導体の比誘電率
と外部から前記誘電体に印加される無声放電用電圧との
二つの要因で定義された無声放電安定領域において無声
放電を発生させるための放電用の交流電圧あるいはパル
ス電圧が印加される対の電極をそれぞれ同構造体にほぼ
接するように設けたことを特徴とするガス処理用の無声
放電発生装置。1. A structure for gas permeation in which a large number of small air-permeable pores made of a dielectric material having a relative dielectric constant within a predetermined range are formed, and the dielectric constant of the derivative is formed on both sides of the structure. And a pair of electrodes to which an AC voltage or a pulse voltage for discharge is applied to generate a silent discharge in a stable region of the silent discharge defined by two factors: a silent discharge voltage externally applied to the dielectric. A silent discharge generator for gas treatment, characterized in that each of them is provided so as to substantially contact with the same structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62101067A JPH07110332B2 (en) | 1987-04-23 | 1987-04-23 | Silent discharge generator for gas processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62101067A JPH07110332B2 (en) | 1987-04-23 | 1987-04-23 | Silent discharge generator for gas processing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63267419A JPS63267419A (en) | 1988-11-04 |
| JPH07110332B2 true JPH07110332B2 (en) | 1995-11-29 |
Family
ID=14290759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62101067A Expired - Fee Related JPH07110332B2 (en) | 1987-04-23 | 1987-04-23 | Silent discharge generator for gas processing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07110332B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01111423A (en) * | 1987-10-26 | 1989-04-28 | Akira Mizuno | Gas treatment equipment |
| GB9819540D0 (en) | 1998-09-09 | 1998-10-28 | Univ Manchester | Ozone generation |
| JP2000348896A (en) | 1999-03-26 | 2000-12-15 | Canon Inc | Plasma generating method, plasma generating apparatus, and gas processing method by plasma reaction |
| JP2002001116A (en) * | 2000-06-20 | 2002-01-08 | Kansai Research Institute | Method for treatment of gas or liquid containing malodorous harmful substance, catalyst device for oxidation-reduction reaction and catalyst for oxidation- reduction reaction |
| JP6917813B2 (en) * | 2017-07-13 | 2021-08-11 | 日本特殊陶業株式会社 | Plasma reactor, air purifier |
| CN111228977A (en) * | 2020-03-19 | 2020-06-05 | 浙江嘉福新材料科技有限公司 | Sulfuric acid tail gas treatment device and treatment process |
-
1987
- 1987-04-23 JP JP62101067A patent/JPH07110332B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63267419A (en) | 1988-11-04 |
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