JPH07110789B2 - Method for manufacturing composite ceramics sintered body - Google Patents
Method for manufacturing composite ceramics sintered bodyInfo
- Publication number
- JPH07110789B2 JPH07110789B2 JP1175736A JP17573689A JPH07110789B2 JP H07110789 B2 JPH07110789 B2 JP H07110789B2 JP 1175736 A JP1175736 A JP 1175736A JP 17573689 A JP17573689 A JP 17573689A JP H07110789 B2 JPH07110789 B2 JP H07110789B2
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- powder
- sintered body
- mixture
- composite
- composite ceramics
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、複合セラミックス焼結体の新しい製造法に関
し、テルミット反応を加圧状態の下で簡便に進行させ、
短時間に得られる大量の反応熱を利用して複合セラミッ
クスの相組成、各種構成相の構造及び分布と結晶粒子径
を十分制御した極めて良質かつ新規なセラミックス材料
を制御する方法を提供するものである。特に、本発明の
複合セラミックス焼結体の製造法は、最終複合相の構成
について従来手法において製造不可能な十分制御された
微細組織を得るため、上記テルミット熱の活用と共に、
被焼結セラミックス粉体の調整とその選択に工夫をこら
したものであり、得られる新規な焼結体は、従来のセラ
ミックス利用分野はもとより、より苛酷な環境下での使
用、より高性能が求められる各種産業分野における極め
て有用なセラミックス複合材料を提供する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a new method for producing a composite ceramics sintered body, in which the Thermite reaction is simply allowed to proceed under pressure,
It is intended to provide a method for controlling a very good and novel ceramic material in which the phase composition of composite ceramics, the structure and distribution of various constituent phases and the crystal grain size are sufficiently controlled by utilizing a large amount of reaction heat obtained in a short time. is there. In particular, the method for producing the composite ceramics sintered body of the present invention, in order to obtain a sufficiently controlled fine structure that cannot be produced by the conventional method for the composition of the final composite phase, along with the utilization of the thermite heat,
The new sintered body obtained by devising the adjustment and selection of the ceramic powder to be sintered is not only used in the conventional field of ceramics, but also used in more severe environments and with higher performance. An extremely useful ceramic composite material in various required industrial fields is provided.
複合セラミックス焼結体の製造には、長時間加熱により
焼結緻密化する手法が従来用いられてきた。従来の製造
法における最大の課題は、緻密で、微細な結晶粒から成
り、焼結体中の各種セラミックス相構成を目的に応じて
十分制御した多相セラミックス焼結体が得られないこと
である。緻密化の促進には、ホットプレス(HP)や熱間
静水圧プレス(HIP)等加圧焼結法があり、さらに高い
圧力下で加熱する高圧焼結法も有効である。一方、真空
焼結、常圧焼結法では、緻密化促進のために各種助剤等
を使用し、一種の多元複合化により緻密化を図ってい
る。前述したように時間を要する緻密化焼結における問
題は次の点にある。For the production of the composite ceramics sintered body, a method of heating and densifying by sintering for a long time has been conventionally used. The biggest problem in the conventional manufacturing method is that it is not possible to obtain a multi-phase ceramics sintered body that is dense and has fine crystal grains, and various ceramics phase constitution in the sintered body is sufficiently controlled according to the purpose. . To promote the densification, there are pressure sintering methods such as hot pressing (HP) and hot isostatic pressing (HIP), and the high pressure sintering method of heating under higher pressure is also effective. On the other hand, in the vacuum sintering and atmospheric pressure sintering methods, various auxiliaries and the like are used to promote densification, and densification is achieved by a kind of multi-component composite. As described above, the problems in the time-consuming densification sintering are as follows.
(イ)緻密化中に結晶粒が粗大化し、気穴(pore)が残
存しやすい。また、この結晶粒の粗大化は、特に異方性
の強いセラミックスについて、焼結体中に熱応力を発生
し、破壊の原因となりやすい。(A) Crystal grains become coarse during densification, and pores are likely to remain. Further, the coarsening of the crystal grains tends to cause thermal stress in the sintered body, especially ceramics having strong anisotropy, and cause destruction.
(ロ)緻密化焼結中の結晶粒粗大化を防ぐため、粒成長
抑制剤等の助剤添加が不可欠であり、これら助剤が焼結
体特性を低下させることが多い。また、焼結原料を十分
改質して微細粉体とし、低温焼結により粒成長を防ぐ場
合でも、緻密化に時間を要すると共に焼結温度、時間、
雰囲気管理が極めて困難である。(B) In order to prevent crystal grain coarsening during densification sintering, it is essential to add an auxiliary agent such as a grain growth inhibitor, and these auxiliary agents often deteriorate the characteristics of the sintered body. Even when the sintering raw material is sufficiently modified into a fine powder and grain growth is prevented by low temperature sintering, it takes time to densify and the sintering temperature, time,
Atmosphere control is extremely difficult.
(ハ)前記(ロ)の方策により、焼結体の結晶粒粗大化
は抑制できるが、セラミックス各相の自形は不明瞭とな
ったり、目的とする複合相構成の実現は著しく制約され
る。(C) By the measure of (b) above, the crystal grain coarsening of the sintered body can be suppressed, but the automorphism of each phase of the ceramic becomes unclear, and the realization of the intended composite phase structure is significantly restricted. .
これらの問題点を解決する試みとして、緻密化に要する
時間を短縮するため、たとえばサーメット、導電性複合
セラミックスの製造法として通常ホットプレス焼結法
(粉体および粉末治金、Vol.32,No.6,215〜218頁)が用
いられている。As an attempt to solve these problems, in order to reduce the time required for densification, for example, a hot press sintering method (powder and powder metallurgy, Vol. 32, No. .6, 215-218) is used.
また、最近、セラミックスの加圧自己燃焼焼結法(High
−Pressure,Self−Combustion Sintering for Ceramic
s)という名のセラミックスの合成同時焼結法が、1967
年以来ソビエトにおいて研究されてきたいわゆるSHS法
(Self−Propagating High Temperature Synthesis)を
用いて、高圧下で実証された(特開昭60−246270号公報
及びComm.Am.Ceram.Soc.,c−224−5,1984年11月)。SHS
法とは、テルミット組成のような燃焼する発熱反応混合
物によって自己加熱する手法であり、たとえばセラミッ
クス材料は、本手法を用いれば、セラミックス材料の構
成元素混合物から各元素間の化合物発熱生成反応を用い
て外部加熱なしに合成焼結である。合成同時焼結法の試
みは、SHS法によって合成するセラミックス材料中の穴
を圧力によって除去し、数秒間で緻密な焼結体を製造す
る点にあり、Ti(チタン)とB(ホウ素)のプレスした
混合物を電気的な着火のみによって圧力3GPa下でTiB2焼
結体を製造したとの報告がなされている。これら焼結体
の相対密度、硬さはそれぞれ95%、2000kg/mm2であっ
た。Recently, ceramics pressure self-combustion sintering method (High
−Pressure, Self−Combustion Sintering for Ceramic
1967 is a synthetic simultaneous sintering method of ceramics named s).
Using the so-called SHS method (Self-Propagating High Temperature Synthesis), which has been studied in Soviet countries since 2010, it was demonstrated under high pressure (Japanese Patent Laid-Open No. 60-246270 and Comm. Am. Ceram. Soc., C- 224-5, November 1984). SHS
The method is a method of self-heating by a burning exothermic reaction mixture such as thermite composition. For example, in the case of a ceramic material, when this method is used, a compound exothermic reaction is generated from a mixture of constituent elements of the ceramic material. Synthetic sintering without external heating. The attempt of the synthetic co-sintering method is to remove the holes in the ceramic material synthesized by the SHS method by pressure to produce a dense sintered body in a few seconds, and the Ti (titanium) and B (boron) It is reported that a TiB 2 sintered body was produced under a pressure of 3 GPa only by electric ignition of the pressed mixture. The relative density and hardness of these sintered bodies were 95% and 2000 kg / mm 2 , respectively.
圧力付加の別様の手法としては、衝撃圧力固化法(Expl
osive shock compaction)に上記SHS法を組み合わせ、
セラミックス材料を緻密固化する方法が提案されている
(米国特許No.4,655,830)。本手法は、μsecレベルの
短時間に数十GPa程度の高い衝撃圧力下でセラミックス
合成同時焼結を実施するもので、たとえば、TiO2、炭
素、アルミニウムの粉末混合物を出発原料として、45GP
aの衝撃圧付加によりTiC−Al2O3複合セラミックスを合
成したとの報告がある。得られた焼結体の微小硬さは50
0〜700kg/mm2であり、比較的粒子間結合も弱く、微小亀
裂が所々に観察されている。Another method of applying pressure is the impact pressure solidification method (Expl
osive shock compaction) combined with the above SHS method,
A method for densely solidifying a ceramic material has been proposed (US Pat. No. 4,655,830). In this method, ceramics synthesis co-sintering is carried out under a high impact pressure of several tens GPa for a short time of μsec level.For example, using a powder mixture of TiO 2 , carbon, and aluminum as a starting material, 45 GPa is used.
It has been reported that TiC-Al 2 O 3 composite ceramics were synthesized by applying impact pressure of a. The microhardness of the obtained sintered body is 50.
It is 0 to 700 kg / mm 2 , the interparticle bond is relatively weak, and microcracks are observed in some places.
前述した問題点を解決するべく試みられた最近の各種技
術を総括すると、たとえば (i)通電焼結法は、導電性のあるセラミックス又はサ
ーメットには有効であるが、絶縁、半導性セラミックス
には適用できない。また、結晶粒径、セラミック構成相
の十分な制御と緻密化を同時に達成することは極めて困
難である。To summarize the various recent technologies that have been attempted to solve the above-mentioned problems, for example, (i) the electric current sintering method is effective for conductive ceramics or cermets, but for insulating or semiconductive ceramics. Is not applicable. Further, it is extremely difficult to achieve sufficient control of the crystal grain size and ceramic constituent phases and densification at the same time.
(ii)合成同時焼結法(High Pressure,Self−Combusti
on Sintering)では、外部加熱なしに自己の化合物発熱
反応のみによって合成、加圧焼結が進行するため、合成
焼結中に極めて高温が発生し、各元素等よりの脱ガスが
促進されて、焼結体は圧力の低下と共に一般に多孔質
(porous)となりやすい。この多孔度(porosity)低減
のため、サーメット(セラミック相+金属相)焼結体の
製造が最近試みられている(粉体粉末治金協会、昭和61
年度秋期大会講演概要集、42〜43頁)。(Ii) Synthetic simultaneous sintering method (High Pressure, Self-Combusti
in Sintering), since the synthesis and pressure sintering proceed only by the exothermic reaction of the compound itself without external heating, an extremely high temperature is generated during the synthetic sintering, and degassing from each element is promoted. Sintered bodies generally tend to become porous as the pressure decreases. In order to reduce this porosity, a cermet (ceramic phase + metal phase) sintered body has recently been attempted to be manufactured (Powder Powder Metallurgical Association, Showa 61).
Autumn Proceedings of the Annual Conference, 42-43).
また、生成反応熱の極めて大きな化合物の元素間混合を
主体として合成焼結を行ういわゆる自己燃焼モードのた
め、合成反応速度が一般に極めて早く、たとえば複合セ
ラミックス相製造における他の複合相の安定さは、セラ
ミック相の熱力学的安定性をも考慮しても、目的に応じ
て構成相を制御することがむずかしい。In addition, because of the so-called self-combustion mode in which synthetic sintering is carried out mainly by mixing elements with extremely large heat of reaction for formation, the synthetic reaction rate is generally very fast, and the stability of other complex phases in the production of complex ceramic phases is Even if the thermodynamic stability of the ceramic phase is taken into consideration, it is difficult to control the constituent phases according to the purpose.
(iii)衝撃圧力下でSHS法を用いた複合セラミックス製
造法では、SHS反応が自己支持性(self−sustaining)
でない反応でも、衝撃波による十分な高圧と粒子間に発
生する高温により燃焼合成焼結は可能であるが、圧力付
加時間がμsecと極めて短時間であり、高温発生も主に
粒子表面に局在するため、SHS反応が未完了となった
り、また焼結体も急速な徐圧(μsec)中にクラック発
生により破壊しやすい欠点が残されている。(Iii) In the composite ceramics manufacturing method using the SHS method under impact pressure, the SHS reaction is self-sustaining.
Even in a non-reaction, combustion synthesis sintering is possible due to the sufficiently high pressure generated by shock waves and the high temperature generated between particles, but the pressure application time is extremely short (μsec) and the high temperature generation is mainly localized on the particle surface. Therefore, the SHS reaction is not completed, and the sintered body is liable to be broken due to cracking during rapid pressure reduction (μsec).
本発明は、前述の事情に鑑みなされたもので、その目的
は、従来技術では克服できなかった緻密化、組織の微細
化、構成相の制御の3つの課題を十分達成できる、テル
ミット反応の発熱を利用した新しい複合セラミックス焼
結体の製造法を提供することにある。The present invention has been made in view of the above-mentioned circumstances, and the object thereof is to achieve sufficient heat generation of the thermite reaction, which can achieve three problems that cannot be overcome by the conventional techniques, that is, densification, fine structure, and control of constituent phases. It is to provide a method for manufacturing a new composite ceramics sintered body using the above.
本発明の他の目的は、活用するテルミット反応の種類を
拡大することにより発熱による投入熱量を十分制御し、
短時間加熱することによって、焼結体中のセラミックス
構成相を十分制御した優れた複合セラミックス焼結体の
製造法を提供することにある。Another object of the present invention is to sufficiently control the amount of heat input due to heat generation by expanding the types of thermite reaction to be utilized,
An object of the present invention is to provide a method for producing an excellent composite ceramics sintered body in which the ceramic constituent phases in the sintered body are sufficiently controlled by heating for a short time.
さらに本発明の目的は、テルミット反応の発熱を利用し
た複合セラミックス焼結体の製造工程にひき続き、焼結
体の微細組織、相構成又は構造等を変化させることな
く、極く微小な気穴の低減を通して性能、信頼性の向上
を図ることができる複合セラミックス焼結体の製造法を
提供することにある。Further, the object of the present invention is to continue the manufacturing process of the composite ceramics sintered body utilizing the heat generation of the thermite reaction, and to obtain extremely fine pores without changing the microstructure, phase structure or structure of the sintered body. It is an object of the present invention to provide a method for producing a composite ceramics sintered body which can improve performance and reliability by reducing
前記目的を達成するため、本発明の第一態様によれば、 (A)少くとも1種以上のセラミックス粉末と、 (B)炭素、ホウ素及びケイ素から選ばれた少くとも1
種以上の非金属粉末と、 (C)金属粉末及び/又は上記(B)と異なる非金属粉
末 との混合物を加圧状態でテルミット反応の発熱によって
加熱焼結することを特徴とする複合セラミックス焼結体
の製造方法が提供される。To achieve the above object, according to the first aspect of the present invention, (A) at least one ceramic powder and (B) at least one selected from carbon, boron and silicon
A composite ceramic calcination, characterized in that a mixture of one or more kinds of non-metal powder and (C) metal powder and / or a non-metal powder different from (B) above is heated and sintered under heat of thermite reaction under pressure. A method of making a conjugate is provided.
本発明の第二態様によれば、前記方法において、前記被
焼結粉末混合物を加熱するテルミット組成物は、酸化銅
粉末とアルミニウム粉末の混合物、またはこの混合物に
酸化鉄粉末とSi粉末の混合物を組み合わせたものよりな
ることを特徴とする複合セラミックス焼結体の製造方法
が提供される。According to the second aspect of the present invention, in the method, the thermite composition for heating the powder mixture to be sintered is a mixture of copper oxide powder and aluminum powder, or a mixture of iron oxide powder and Si powder in this mixture. There is provided a method for producing a composite ceramics sintered body, which is characterized by comprising a combination thereof.
本発明の第三態様によれば、前記方法によるテルミット
反応の発熱を利用した複合セラミックス焼結体の製造工
程にひきつづき、得られた複合焼結体の微細組織、相組
成、構造等を変化させることなく気穴率の低減、信頼
性、性能の向上を図るため、500〜1700℃の温度、200〜
2000気圧の圧力範囲において熱間静水圧プレス又はホッ
トプレス処理を5〜60分施すことを特徴とする複合セラ
ミックス焼結体の製造方法が提供される。According to the third aspect of the present invention, the microstructure, phase composition, structure, etc. of the obtained composite sintered body are changed following the manufacturing process of the composite ceramics sintered body utilizing the heat generation of the thermite reaction by the above method. To reduce porosity, improve reliability, and improve performance without increasing the temperature from 500 to 1700 ℃, 200 to
Provided is a method for producing a composite ceramics sintered body, which comprises performing hot isostatic pressing or hot pressing for 5 to 60 minutes in a pressure range of 2000 atm.
本発明の複合セラミックス焼結体の製造法においては、
(A)セラミックス粉末と(B)炭素、ホウ素及びケイ
素から選ばれた非金属元素粉末及び(C)金属粉末及び
/又は上記(B)と異なる非金属元素粉末との混合物を
短時間に高温加熱が間接的に達成できる化学反応、いわ
ゆるテルミット組成物で加熱する。テルミット反応の発
熱を熱源として用いた。セラミック粉末や金属粉末、ま
たはセラミック粉末と金属粉末の混合物の焼結方法は特
開昭61−186404号及び米国特許出願No.928,220に開示さ
れているが、被焼結混合粉体中に存在する非金属元素粉
末と金属粉末及び/又は前者と異なり非金属元素粉末
が、テルミット反応熱によって新たなセラミックス相を
生成し、得られるセラミックス複合体はセラミックス粉
末と非金属元素粉末、金属粉末又は前者と異なる非金属
元素粉末の適切な混合により、目的に応じた相構成及び
微細組織を十分制御して緻密化できる高度に制御された
複合セラミックス製造技術はいまだ開発されていない。In the method for manufacturing the composite ceramics sintered body of the present invention,
A mixture of (A) ceramic powder and (B) non-metal element powder selected from carbon, boron and silicon and (C) metal powder and / or non-metal element powder different from (B) above is heated at high temperature for a short time. The heating is performed by a so-called thermite composition, which is a chemical reaction that can be indirectly achieved. The exotherm of the Thermit reaction was used as the heat source. Although a method for sintering ceramic powder or metal powder, or a mixture of ceramic powder and metal powder is disclosed in JP-A-61-186404 and U.S. Patent Application No. 928,220, it exists in the powder mixture to be sintered. Unlike the non-metal element powder and the metal powder and / or the former, the non-metal element powder generates a new ceramic phase by thermite reaction heat, and the obtained ceramic composite has the ceramic powder and the non-metal element powder, the metal powder or the former. A highly controlled composite ceramics manufacturing technique capable of sufficiently controlling the phase structure and the fine structure according to the purpose and densifying by appropriately mixing different non-metal element powders has not been developed yet.
本発明の方法のように、複合セラミックス製造における
テルミット加熱の利点は、短時間に大量の熱を被焼結粉
末混合物に投入することにより、非金属元素粉末と金属
粉末及び/又は前者と異なる非金属元素粉末の瞬時的結
合による新しいセラミックス相の生成を促進する点にあ
る。たとえば、通常法のセラミック相合成では拡散現象
に支配される生成相の変化も初期混合粉末組成を適切に
選択すれば、最終構成相をかなり自在に制御して複合セ
ラミックス焼結体が製造できる。本テルミット加熱を用
いた複合セラミックス焼結体の製造法では、出発セラミ
ックス粉の優れた特徴、たとえば、粒径を維持しつつ、
中間生産物量の制御、相組成の安定を図って目的とする
新しいセラミックス相を生成しつつ緻密で従来にない複
合セラミックス焼結体の製造が可能となる。Like the method of the present invention, the advantage of thermite heating in the production of composite ceramics is that the non-metal element powder and the metal powder and / or the non-metal element powder and / or the former are different from each other by introducing a large amount of heat into the powder mixture to be sintered in a short time. The point is to promote the generation of a new ceramic phase by the instantaneous binding of the metal element powder. For example, in the usual method of synthesizing a ceramic phase, a composite ceramic sintered body can be manufactured by appropriately controlling the final constituent phase by appropriately selecting the composition of the initial mixed powder even in the change of the generated phase governed by the diffusion phenomenon. In the method for producing a composite ceramics sintered body using the present thermite heating, excellent characteristics of the starting ceramics powder, for example, while maintaining the particle size,
It becomes possible to manufacture a compact and unprecedented composite ceramic sintered body while controlling the amount of intermediate products and stabilizing the phase composition to generate the desired new ceramic phase.
本発明の最良の態様に関して以下に説明する。The best mode of the present invention will be described below.
短時間に高温加熱を達成しうる化学発熱反応となる、い
わゆるテルミット反応を利用した焼結法は、特開昭61−
186404号に開示されている。前記焼結法で開示されたテ
ルミット組成物は、酸化物として酸化鉄、還元性金属粉
末としてAl,Si,Ti,Mg,Caなどの使用が効果的であること
か明らかにされている。これらの反応の一例は、たとえ
ば次式で示される。A sintering method utilizing a so-called thermite reaction, which is a chemically exothermic reaction capable of attaining high temperature heating in a short time, is disclosed in Japanese Patent Laid-Open No. 61-
No. 186404. It has been clarified that the thermite composition disclosed by the above-mentioned sintering method is effective in using iron oxide as an oxide and Al, Si, Ti, Mg, Ca, etc. as a reducing metal powder. An example of these reactions is shown by the following formula, for example.
Fe2O3+2Al→Al2O3+2Fe+204kcal …(1) これに対し、本発明で用いられる好適なテルミット組成
物は、主化学反応熱源として 3CuO+2Al→Al2O3+3Cu+289kcal …(2) なる反応を利用し、(1)式に示す化学反応のAlテルミ
ット組成物に比較してAl1モル当り有効に取り出せる反
応熱は約40%増加する利点がある。本テルミット組成物
の着火にあたっては、Siテルミット組成物(1モルのSi
粉末と2/3モルの酸化鉄の混合物)と併用することによ
り着火エネルギーを削減でき、たとえばヒータによる通
電加熱着火電力も低減できる。本複合セラミックス焼結
体の製造方法においては、テルミット組成物は、上記酸
化銅粉末とアルミニウム粉末の混合物に限定されるもの
ではなく、特開昭61−186404号に開示された各種テルミ
ット組成物混合体を焼結用熱源として利用できることは
もちろんであるが、テルミット組成物の充填量当り有効
に取り出せる化学反応熱が多い点で酸化銅粉末とアルミ
ニウム粉末の混合物からなるテルミット組成物が最も好
適である。Fe 2 O 3 + 2Al → Al 2 O 3 + 2Fe + 204kcal (1) On the other hand, the preferred thermite composition used in the present invention has a reaction of 3CuO + 2Al → Al 2 O 3 + 3Cu + 289kcal (2) as the main chemical reaction heat source. As compared with the Al thermite composition of the chemical reaction represented by the formula (1), the heat of reaction that can be effectively taken out per 1 mol of Al is advantageously increased by about 40%. In igniting the thermite composition, the Si thermite composition (1 mol of Si
Ignition energy can be reduced by using it together with the powder and a mixture of 2/3 mol of iron oxide), and for example, the electric heating and ignition power by the heater can also be reduced. In the manufacturing method of the present composite ceramics sintered body, the thermite composition is not limited to the mixture of the copper oxide powder and the aluminum powder, various thermite composition mixture disclosed in JP-A-61-186404. Of course, the body can be used as a heat source for sintering, but the thermite composition comprising a mixture of copper oxide powder and aluminum powder is the most preferable because the amount of chemical reaction heat that can be effectively taken out per filling amount of the thermite composition is large. .
以下、上記テルミット反応を利用した本発明による複合
セラミックス焼結体の製造方法を、下記の実施例に従っ
て、更に詳細に説明する。Hereinafter, the method for producing a composite ceramics sintered body according to the present invention utilizing the above-mentioned thermite reaction will be described in more detail according to the following examples.
実施例1 平均粒径1μmのTiB2粉末3.2g(Hermann C.Starck社
製)、平均粒径0.05μmのNi粉末約2.9g(真空治金製)
及び平均粒径約0.5μmのホウ素粉末(セラック社製)
0.64gを秤量し、十分混合法、複合セラミックス製造混
合原料とした。Example 1 3.2 g of TiB 2 powder having an average particle size of 1 μm (manufactured by Hermann C. Starck) and about 2.9 g of Ni powder having an average particle size of 0.05 μm (manufactured by vacuum metallurgy)
And boron powder with an average particle size of about 0.5 μm (made by Shellac)
0.64 g was weighed and used as a mixed raw material for producing a composite ceramics by a thorough mixing method.
本混合粉末より1.85gを採取し、直径12.8mmの円板状に
冷間静水圧成型し、被焼結混合塊を作成した。テルミッ
ト組成物としては、酸化銅粉末とAl粉末をモル比で3対
2に混合したテルミット組成物22.9gを2分割し、直径3
0mmに冷間成型し、7.5gの同組成物は外径30mm、内径22m
mの円筒状に冷間成型して六方晶窒化ホウ素から成る薄
層を介して配置させた。テルミット組成物直径30mmの円
板成型体に隣接して6gのSiテルミット組成物(1モルの
Si粉末と2/3モルの酸化鉄粉末の混合物、以下の実施例
でも同じ)を配置し、この組立物をベルト型の高圧発生
装置の中に充填した。第1図は、高圧発生装置への配置
状態を示したものである。引用符号1,2はそれぞれシリ
ンタおよびアンビルで高圧発生容器を形成する。3はパ
イロフィラント製ガスケットで圧力を封止する。4はパ
イロフィラント製断熱材である。5,6,7はそれぞれ鋼
板、鋼リング、モリブデン板、8はセラミック製断熱材
であり、これらによりカーボン製通電ワイア9に電気を
供給する組立物を構成する。10はパイロフィライト製断
熱材、11a,11bはそれぞれ六方晶窒化ホウ素及びカーボ
ンブラック製の円筒と薄層で、12の酸化銅とアルミニウ
ム粉末からなるテルミット組成物及び13のSiテルミット
組成物とヒータおよび被焼結粉末(TiB2とNiとB粉末の
混合物)14との反応防止および電気的絶縁の働きをす
る。対向するアンビルに荷重を加え、試料室に2万気圧
の圧力を発生させたのち対向したアンビルからヒータに
通電し、試料室を加熱する。本実施例では、1kw前後の
電力投入によるテルミット組成物の局所的加熱により、
テルミット組成物はSiテルミット組成物、Alテルミット
組成物(酸化銅+Al粉末混合物)の順に自発的に着火し
て大量の反応熱を解決することが明らかとなった。本実
施例におけるテルミット発熱量は33.8kcalであった。テ
ルミット反応熱による被焼結粉末の加熱焼結はアンビル
間距離の変化が停止した時点をもって完了とし、試料部
を冷却した後、圧力を除去してTiB2系複合セラミックス
焼結体を回収した。1.85 g of this mixed powder was sampled and cold isostatically molded into a disk shape having a diameter of 12.8 mm to prepare a mixed mass to be sintered. As the thermit composition, 22.9 g of the thermit composition, which is a mixture of copper oxide powder and Al powder in a molar ratio of 3: 2, is divided into two and the diameter is 3
Cold-molded to 0 mm, 7.5 g of the same composition has an outer diameter of 30 mm and an inner diameter of 22 m
It was cold-molded into a cylinder of m and placed through a thin layer of hexagonal boron nitride. Thermite composition 6 g of Si thermite composition (1 mol
A mixture of Si powder and 2/3 mole iron oxide powder, the same in the examples below) was placed and the assembly was filled into a belt-type high pressure generator. FIG. 1 shows the state of arrangement in the high pressure generator. Reference numerals 1 and 2 respectively form a high-pressure generating container with a cylinder and anvil. 3 is a pyrophilant gasket for sealing the pressure. Reference numeral 4 is a pyrophyllant heat insulating material. 5, 6 and 7 are a steel plate, a steel ring and a molybdenum plate respectively, and 8 is a ceramic heat insulating material, which constitutes an assembly for supplying electricity to the carbon energizing wire 9. 10 is a pyrophyllite heat insulating material, 11a and 11b are cylinders and thin layers made of hexagonal boron nitride and carbon black, respectively, 12 thermite composition consisting of copper oxide and aluminum powder, and 13 Si thermite composition and heater It also serves to prevent reaction with the powder to be sintered (a mixture of TiB 2 and Ni and B powder) 14 and to electrically insulate. A load is applied to the facing anvil to generate a pressure of 20,000 atm in the sample chamber, and then the heater is energized from the facing anvil to heat the sample chamber. In this example, by locally heating the thermite composition by applying an electric power of about 1 kw,
It was revealed that the thermite composition spontaneously ignites in the order of the Si thermite composition and the Al thermite composition (copper oxide + Al powder mixture) to solve a large amount of reaction heat. The thermite calorific value in this example was 33.8 kcal. The heating and sintering of the powder to be sintered by thermite reaction heat was completed when the change of the distance between the anvils was stopped, and after cooling the sample part, the pressure was removed to recover the TiB 2 -based composite ceramics sintered body.
本実施例に示す複合被焼結粉末は、緻密な焼結体となっ
ており、かさ密度は5.02g/cm3であった。粉末X線回折
により得られた焼結体の構成される複合相を同定した結
果、TiB2、NiBの純2相複合焼結体であることが確認で
きた。The composite powder to be sintered shown in this example was a dense sintered body and had a bulk density of 5.02 g / cm 3 . As a result of identifying the composite phase constituting the sintered body obtained by powder X-ray diffraction, it was confirmed to be a pure two-phase composite sintered body of TiB 2 and NiB.
第3図(B)に、本実施例にて得られた複合セラミック
ス焼結体の電子顕微鏡による微細組織観察結果を示す。
TiB2セラミック粒子の異常粒成長は全く起っておらず、
平均粒径1μmをたもったままNiBセラミックスにより
極めて良好に結合されている様子がわかる。尚、従来Ti
B2−Ni−B系の複合セラミックス焼結体において、この
ように微細組織と相構成を十分制御した緻密焼結体は得
られていない。FIG. 3 (B) shows the result of observing the fine structure of the composite ceramics sintered body obtained in this example by an electron microscope.
Abnormal grain growth of TiB 2 ceramic particles has not occurred at all,
It can be seen that the NiB ceramics are bonded very well while having an average particle size of 1 μm. Conventional Ti
In the B 2 —Ni—B system composite ceramics sintered body, a dense sintered body in which the fine structure and the phase structure are sufficiently controlled as described above has not been obtained.
第3図(A)は、比較例として通常の高圧焼結法によっ
て得られた同一出発原料による焼結体微細組織を示すも
のである。焼結圧力は同様に2万気圧である。高圧焼結
法は、被焼結粉体のゆるやかな加熱過程を通じてその圧
力により被焼結粉体の穴を強制的に除去して緻密化を促
進できるが、本焼結体の製造においては、その焼結温度
が1550℃を越え、緻密化が進行するにつれてTiB2粒子の
粒成長が著しく加速され、出発原料であるTiB2粒子径
は、焼結中に数倍〜10倍近く成長してしまう。TiB2結晶
は、特にその結晶学的異方性が強いセラミックスとして
知られており、異常粒成長によってTiB2/TiB2コンタク
ト部が増大し、かつ、同時に複合化されるNi系ホウ化物
との間に著しい熱応力を発生する結果となり、破壊感受
性も高くなる。他方、このような時間律速の焼結過程で
は、Ni系ホウ化物の相を一義的に安定して制御すること
は困難にもなる。As a comparative example, FIG. 3 (A) shows a microstructure of a sintered body obtained by the normal high-pressure sintering method using the same starting material. The sintering pressure is likewise 20,000 atm. The high-pressure sintering method can forcibly remove the holes of the powder to be sintered by the pressure through the gentle heating process of the powder to be sintered to promote densification. Grain growth of TiB 2 particles was significantly accelerated as the sintering temperature exceeded 1550 ° C and the densification progressed, and the TiB 2 particle diameter of the starting material grew several times to 10 times during sintering. I will end up. TiB 2 crystal is known to be a ceramic with a particularly strong crystallographic anisotropy, and the TiB 2 / TiB 2 contact area increases due to abnormal grain growth, and at the same time it forms a composite with a Ni-based boride. As a result, significant thermal stress is generated in the interim, and the susceptibility to fracture is also increased. On the other hand, in such a time-controlled sintering process, it becomes difficult to uniquely and stably control the phase of the Ni-based boride.
第3図(A)に示す高圧焼結法で作成したTiB2−Ni−B
系焼結体は、TiB2粒子の異常粒成長を抑制するため1450
℃にて10分、2万気体の圧力下で焼結したものである
が、TiB2粒子の均一分散は不十分であり、TiB2粒子と同
程度の多数の気穴(pore)が観察された。また、粉末X
線回折により複合焼結体の相構成を検討した結果、Ti
B2,NiB,Ni4B3の3相から成り、各種焼結条件(時間、温
度)等の適正化をはかっても第3図(B)に示すような
純2相のTiB2−NiB微細組織の製造は極めて困難であっ
た。TiB 2 -Ni-B prepared by the high pressure sintering method shown in FIG.
The system sintered body is 1450 because it suppresses the abnormal grain growth of TiB 2 particles.
Although it was sintered at ℃ for 10 minutes under the pressure of 20,000 gas, the TiB 2 particles were not uniformly dispersed, and many pores (pores) similar to those of TiB 2 particles were observed. It was Also, powder X
As a result of examining the phase composition of the composite sintered body by line diffraction,
It consists of three phases of B 2 , NiB, and Ni 4 B 3 , and even if the various sintering conditions (time, temperature) are optimized, pure 2-phase TiB 2 -NiB as shown in Fig. 3 (B). The manufacture of microstructures has been extremely difficult.
なお、第3図(B)の微細組織を示すTiB2−NiB焼結体
の体積分率比はほぼ6:4である。得られたその他の特性
としては、微小マイクロビッカース硬度14.5GPa、800℃
までの平均熱膨張係数は7.7×10-6/℃、800℃における
熱伝導度は0.39W/cm℃であった。The volume fraction ratio of the TiB 2 —NiB sintered body showing the fine structure in FIG. 3 (B) is approximately 6: 4. Other properties obtained were micro-Vickers hardness of 14.5 GPa and 800 ° C.
Average thermal expansion coefficient was 7.7 × 10 -6 / ℃ and thermal conductivity at 800 ℃ was 0.39 W / cm ℃.
実施例2 平均粒径2μmのCrB粉末(日本新金属社製に付加的粉
砕を加えたもの)、平均粒径2μmのNi粉末及び平均粒
径0.5μmのホウ素粉末をそれぞれ3.43g、2.81g、0.62g
を実施例1と同様に混合し、2.1gを採取して実施例1と
同様な被焼結混合塊を作成した。Example 2 CrB powder having an average particle diameter of 2 μm (manufactured by Nippon Shinkin Co., Ltd. with additional pulverization), Ni powder having an average particle diameter of 2 μm and boron powder having an average particle diameter of 0.5 μm were 3.43 g and 2.81 g, respectively. 0.62g
Was mixed in the same manner as in Example 1 and 2.1 g was collected to prepare a mixed mass to be sintered similar to that in Example 1.
本被焼結混合塊を第2図に示すピストン−シリンダタイ
プのプレス装置にSiテルミット組成物及びAl粉末と酸化
銅粉末よりなるAlテルミット組成物(全熱量33.8kcal)
と共に充填し、2000気圧に加圧後、通電ワイヤ25に通電
することによりテルミット組成物を着火し、複合焼結体
を製造した。第2図において、21はシリンダ、22は加圧
パンチ、23はプレート、24は円筒、25は通電ワイヤ、26
はSiテルミット組成物、27は上記Alテルミット組成物で
ある。28はテルミット組成物の溶銅による被焼結体の侵
食を防止する介在層であり、29は被焼結混合粉体サンプ
ルである。This sintered mixed mass was applied to a piston-cylinder type press as shown in Fig. 2 and a Si thermite composition and an Al thermite composition consisting of Al powder and copper oxide powder (total calorific value 33.8 kcal).
The thermite composition was ignited by energizing the current-carrying wire 25 after filling the same with 2000 atmospheres and pressurizing the current-carrying wire 25 to manufacture a composite sintered body. In FIG. 2, 21 is a cylinder, 22 is a pressure punch, 23 is a plate, 24 is a cylinder, 25 is a conducting wire, 26
Is a Si thermite composition, and 27 is the above Al thermite composition. Reference numeral 28 is an intervening layer that prevents the sintered body from being corroded by molten copper of the thermite composition, and 29 is a mixed powder sample to be sintered.
得られた焼結体の微細組織を第4図(C)に示す。The microstructure of the obtained sintered body is shown in FIG. 4 (C).
X線回折結果によれば、本焼結体はCrB、(Cr,Ni)
3B4、(Ni,Cr)4B3、(Ni,Cr)B相より構成されてお
り、その破壊靭性値は約6MNm−3/2であった。焼結体中
に10μm以下の気泡と思われる穴が点在していることを
除けば、かなり良質な焼結体といえる。本焼結体を800
℃にて大気中加熱処理した結果、かなり良好な耐酸化性
を示した。According to the X-ray diffraction results, this sintered body is CrB, (Cr, Ni)
3 B 4, (Ni, Cr ) 4 B 3, which is composed of (Ni, Cr) B phase, the fracture toughness was about 6MNm -3/2. It can be said that the sintered body is of quite good quality, except that the sintered body has pores of 10 μm or less that are thought to be bubbles. This sintered body is 800
As a result of heat treatment in the atmosphere at ℃, it showed quite good oxidation resistance.
第4図(A)及び(B)に示す焼結体微細組織は、それ
ぞれ真空焼結法及び自己支持性(Self−sustaining)で
ないSHS反応を2000気体下で同上のテルミット反応によ
り加熱焼結した場合のCr−Ni−B系複合焼結体の微細組
織である。The microstructures of the sintered bodies shown in FIGS. 4 (A) and 4 (B) were respectively sintered by vacuum sintering and SHS reaction which is not self-sustaining under 2000 gas by thermite reaction as above. It is a fine structure of the Cr-Ni-B system composite sintered body in the case.
1500℃で真空焼結した同一Cr/Ni/B比の焼結体(原料は
2μmCrBと1μmNiBの混合体)では、第4図(A)に示
す如く、1時間の加熱焼結にて特に(Cr,Ni)3B4相が異
常成長し、焼結体は極めて脆い(KIC<2MNm−3/2)もの
となる。一方、Cr,Ni,B各元素粉をCr:5.1g、Ni:1.56g、
B:1.35gの割合で実施例1と同様に混合し、1.8gを採取
して被焼結混合塊を作成し、実施例2と同様の条件で複
合焼結体を製造した。この焼結法の特徴は、自己支持性
(Self−sustaining)でないすべて元素粉体から進行す
るSHS反応にテルミット反応加熱を用いて焼結した点に
あるが、第4図(B)に示す如く、10μm程度の極めて
多量の気泡が生成し、緻密焼結体とは言いがたい。これ
らの各種手法による焼結体微細組織比較の結果は、本実
施例2の焼結体(第4図(C))製造法が極めて優れた
複合セラミックス焼結体の製造法であることを示してい
る。In the case of a sintered body of the same Cr / Ni / B ratio (a raw material is a mixture of 2 μm CrB and 1 μm NiB) that was vacuum-sintered at 1500 ° C., as shown in FIG. cr, Ni) 3 B 4 phase is abnormal growth, the sintered body becomes extremely brittle (K IC <2MNm -3/2). On the other hand, Cr, Ni, B each element powder Cr: 5.1g, Ni: 1.56g,
B: 1.35 g was mixed in the same manner as in Example 1, 1.8 g was sampled to form a mixed lump to be sintered, and a composite sintered body was manufactured under the same conditions as in Example 2. The characteristic of this sintering method is that it is sintered by using thermite reaction heating for the SHS reaction which proceeds from all elemental powders that are not self-sustaining, but as shown in FIG. 4 (B). , A very large amount of bubbles of about 10 μm are generated, and it is hard to say that it is a dense sintered body. The results of comparison of the microstructures of the sintered compacts by these various methods show that the sintered compact (FIG. 4 (C)) manufacturing method of the present Example 2 is an extremely excellent method for manufacturing a composite ceramics sintered compact. ing.
実施例3 金属粉として平均粒径3μmのTi粉、非金属元素粉とし
て0.5μmのホウ素粉、セラミック粉として平均粒径1
μmのTiB2粉を用いて、TiB2セララック粉に対するTi粉
とホウ素粉の混合物(Tiとホウ素の原子比が1/1になる
よう調整してある)の体積比が20%となるよう実施例1
に示した混合法を用いて被焼結混合粉体を作成し、2gを
採取して直径12.8mmの円板状に冷間静水圧成型し、被焼
結混合塊を作成した。テルミット組成物としては、Siテ
ルミット組成物及びAl粉末と酸化鉄の混合物からなるテ
ルミット組成物を用い(全熱量43.8kcal)、第2図に示
すピストン−シリンダタイプのプレス装置に充填し、20
00気圧にて実施例2と同様に複合焼結体を製造した。Example 3 Ti powder having an average particle size of 3 μm as a metal powder, 0.5 μm boron powder as a non-metal element powder, and an average particle size of 1 as a ceramic powder.
Using TiB 2 powder of μm, the volume ratio of the mixture of Ti powder and boron powder (adjusted to have an atomic ratio of Ti and boron of 1/1) to 20% with respect to TiB 2 ceralac powder was performed. Example 1
A mixed powder to be sintered was prepared by using the mixing method shown in, and 2 g of the powder was sampled and cold isostatically pressed into a disk having a diameter of 12.8 mm to prepare a mixed mass to be sintered. As the thermite composition, a thermite composition composed of a Si thermite composition and a mixture of Al powder and iron oxide (total heat amount of 43.8 kcal) was used, and the thermite composition was filled in a piston-cylinder type press machine shown in FIG.
A composite sintered body was manufactured in the same manner as in Example 2 at 00 atm.
TiB2セラミックは、高融点難焼結性セラミックスとして
知られており、通常の焼結法では緻密さと微細組織、相
構成を十分制御して焼結することは極めて困難である
が、本手法を用いれば、たとえば次のような複合セラミ
ックス焼結体が緻密で微細組織を十分制御して入手でき
る。TiB 2 ceramic is known as a high-melting-point difficult-to-sinter ceramics, and it is extremely difficult to sinter by controlling the denseness, the microstructure, and the phase structure by the ordinary sintering method. If it is used, for example, the following composite ceramics sintered body can be obtained with a dense and finely controlled microstructure.
本焼結体の相構成を粉末X線回折により調べたところ、
TiB2相とTiB相の2相複合焼結体であることが明らかと
なった。前記X線回折の結果及びXPSによる光電子分光
結果双方の手段にて調べた結果、未反応Ti及びBの存在
は確認できなかった。また、TiB2粒子は1μm程度でほ
とんど粒成長は認められなかった。When the phase constitution of the sintered body was examined by powder X-ray diffraction,
It was clarified that it was a two-phase composite sintered body of TiB 2 phase and TiB phase. As a result of examination by both means of the X-ray diffraction result and the photoelectron spectroscopy result by XPS, the presence of unreacted Ti and B could not be confirmed. The TiB 2 particles were about 1 μm, and almost no grain growth was observed.
実施例4 セラミックス粉として平均粒径0.8μmのB4C(デンキ化
学社製)を使用した以外は、実施例3と同様に金属粉と
してTi、非金属元素粉としてホウ素をB4Cセラミック粉
に対し混合物(TiとBの原子比が1/2となるよう調整し
てある)の体積比で30%となるよう混合し、1.5gを採取
して、直径12.8mmの円板状被焼結混合塊を作成した。こ
れらの被焼結混合塊を実施例1に示す高圧発生装置中に
充填し、2万気圧に加圧後、同様なSiテルミット組成
物、酸化銅粉末とAl粉末混合物の組み合せによるテルミ
ット発熱反応により焼結処理をほどこした。Example 4 Similar to Example 3, except that B 4 C (manufactured by Denki Kagaku Co., Ltd.) having an average particle size of 0.8 μm was used as the ceramic powder, Ti as the metal powder and boron as the non-metal element powder were B 4 C ceramic powder. , The mixture (the atomic ratio of Ti and B is adjusted to 1/2) is mixed so that the volume ratio is 30%, 1.5 g is sampled, and a disk-shaped plate with a diameter of 12.8 mm is fired. A mixed lump was prepared. These sintered mixed lumps were filled in the high-pressure generator shown in Example 1, pressurized to 20,000 atm, and then subjected to a thermite exothermic reaction by the same combination of the Si thermite composition, the copper oxide powder and the Al powder mixture. Sintered.
本実施例で得られた焼結体は、粉末X線回折結果によれ
ば、B4CとTiB2の純2相からなっており、他の未反応出
発原料等の存在は認められなかった。得られた複合焼結
体は、緻密でB4C,TiB2の各結晶粒とも〜1μm程度であ
り、B4Cの分散も均一であった。焼結体のマイクロビッ
カース硬度は3200kg/mm2であった。According to the powder X-ray diffraction results, the sintered body obtained in this example is composed of two pure phases of B 4 C and TiB 2 , and the presence of other unreacted starting materials and the like was not recognized. . The obtained composite sintered body was dense, each crystal grain of B 4 C and TiB 2 was about 1 μm, and the dispersion of B 4 C was uniform. The micro Vickers hardness of the sintered body was 3200 kg / mm 2 .
実施例5 セラミックス粉として平均粒径2μmのMoSi2(日本新
金属製)を使用し、非金属元素粉として平均粒径0.01μ
mのカーボンブラック(カボット社製)及び0.1μmの
アモルファスシリコン(小松電子金属社製)を用い、Mo
Si2粉に対するシリコンとカーボンブラック混合物の体
積率を30%とし、混合体より2.5gを採取して直径12.8mm
の円板状に成型し、被焼結混合塊とした。本被焼結混合
塊を実施例1に示す高圧装置中に充填し、実施例4に示
すと同様のテルミット発熱反応条件で圧力2万気圧下で
複合セラミックス焼結体を製造した。Example 5 MoSi 2 (made by Nippon Shinkin Co., Ltd.) having an average particle size of 2 μm was used as the ceramic powder, and 0.01 μ as the non-metallic element powder.
m carbon black (manufactured by Cabot) and 0.1 μm amorphous silicon (manufactured by Komatsu Electronics Metals)
The volume ratio of the mixture of silicon and carbon black to Si 2 powder is 30%, 2.5g is sampled from the mixture and the diameter is 12.8mm.
Was molded into a disk shape to obtain a mixed mass to be sintered. This sintered mixed mass was filled in the high-pressure apparatus shown in Example 1, and a composite ceramics sintered body was produced under the pressure of 20,000 atmospheric pressure under the same thermite exothermic reaction conditions as shown in Example 4.
得られた焼結体は、緻密で、MoSi2粒子の粒成長もほと
んど観察されなかった。粉末X線回折の結果は、MoSi2,
SiC(β)相のほかにわずかのMo2C相が確認できた。本
焼結体の製造にあたっては、カーボンブラックはSi/C比
1/1より10%程度過剰に混合しており、フリーSiの存在
は認められない。本焼結体は、耐熱性、耐酸化性にすぐ
れた良好な焼結体であることが大気中1000℃の加熱実験
にて確認できた。The obtained sintered body was dense and almost no grain growth of MoSi 2 particles was observed. The result of the powder X-ray diffraction is MoSi 2 ,
In addition to the SiC (β) phase, a small amount of Mo 2 C phase was confirmed. When manufacturing this sintered body, carbon black is the Si / C ratio.
Excessive mixing of about 10% from 1/1 does not show the presence of free Si. It was confirmed by a heating experiment at 1000 ° C. in air that this sintered body was a good sintered body having excellent heat resistance and oxidation resistance.
実施例6 セラミックス粉として平均粒径3μmのAl2O3粉(昭和
電工社製材料に粉砕処理し粒径を調整した。)を、非金
属元素粉として実施例5に用いたカーボンブラック、金
属元素粉として平均粒径3μmのTi粉を用い、Al2O3粉
に対するカーボンブラックとTi粉末混合物の体積率を40
%とした(焼結重量1.5g)以外は、実施例5と同一条件
にて複合セラミックス焼結体を製造した。Example 6 Al 2 O 3 powder having an average particle size of 3 μm (ceramic powder was pulverized into a material manufactured by Showa Denko KK and its particle size was adjusted) was used as the non-metal element powder in carbon black and metal. Ti powder having an average particle size of 3 μm was used as the element powder, and the volume ratio of the carbon black and Ti powder mixture to the Al 2 O 3 powder was 40%.
A composite ceramics sintered body was manufactured under the same conditions as in Example 5, except that the percentage was changed to (sintered weight of 1.5 g).
得られた焼結体は極めて緻密で、X線回折によりAl2O3,
TiC2相複合焼結体であることが確認できた。それぞれの
相の結晶粒径はそれぞれ3μm、1〜3μmであり、極
めて良好な粒子間結合が達成されていることが確認でき
た。得られた焼結体のマイクロビッカース硬度は、荷重
200gにて1700〜1800kg/mm2であった。The obtained sintered body was extremely dense and X-ray diffraction revealed that Al 2 O 3 ,
It was confirmed to be a TiC two-phase composite sintered body. The crystal grain sizes of the respective phases were 3 μm and 1 to 3 μm, respectively, and it was confirmed that extremely good interparticle bonding was achieved. The micro Vickers hardness of the obtained sintered body is
It was 1700 to 1800 kg / mm 2 at 200 g.
実施例7 セラミックス粉として平均粒径0.02μmのZrO2粉(1.94
モル%Y2O3で安定化した正方晶粉末)を、非金属元素粉
として平均粒径0.5μmのホウ素、金属粉として3μm
のTi粉を用い、ZrO2粉に対するホウ素粉とTi粉混合物の
体積率を30%とした(焼結重量1.8g)以外は実施例5と
同一条件にて複合セラミックスを製造した。Example 7 ZrO 2 powder (1.94 μm) having an average particle diameter of 0.02 μm was used as ceramic powder.
Tetragonal powder stabilized with mol% Y 2 O 3 ) as non-metallic elemental powder of boron having an average particle size of 0.5 μm, and metallic powder of 3 μm
A composite ceramic was produced under the same conditions as in Example 5, except that the Ti powder of No. 3 was used and the volume ratio of the boron powder and the Ti powder mixture to ZrO 2 powder was 30% (sintering weight 1.8 g).
得られた焼結体は、実施例6と同様に緻密で微細な結晶
粒からなり、得られた焼結体の破壊靭性値KICは8MNm
−3/2であった。The obtained sintered body was composed of dense and fine crystal grains as in Example 6, and the fracture toughness value K IC of the obtained sintered body was 8 MNm.
It was -3/2 .
実施例8 セラミックス粉として平均粒径0.65μm、α相%1%の
β−Si3N4粉(ヘルマンシィーシュタルク社製)を、非
金属元素粉として実施例5で使用したカーボンブラック
及びアモルファスシリコン粉を用い、β−Si3N4粉に対
するシリコンとカーボンブラック混合物の体積率を40%
として被焼結混合粉を得た。この混合粉より1.6gを採取
し、直径12.8mmの円板状被焼結混合物塊を得た。本被焼
結塊を実施例に示す高圧装置中に装入し、Si−テルミッ
ト組成物及び酸化鉄とAl粉混合物からなるテルミット組
成物の発熱量を33.8kcalとした以外は、実施例1と同一
条件にて複合セラミックス焼結体を製造した。Example 8 Carbon black and amorphous silicon used as a non-metallic element powder in Example 5 were β-Si 3 N 4 powder having an average particle size of 0.65 μm and an α phase% of 1% (produced by Hermannsee Stark) as the ceramic powder. 40% volume ratio of silicon and carbon black mixture to β-Si 3 N 4 powder
As a result, a mixed powder to be sintered was obtained. From this mixed powder, 1.6 g was sampled to obtain a disc-shaped mixture to be sintered having a diameter of 12.8 mm. Example 1 except that the calcined amount of the present sintered mass was charged into the high-pressure apparatus shown in the example, and the calorific value of the thermite composition and the thermite composition composed of the iron oxide and Al powder mixture was 33.8 kcal. A composite ceramics sintered body was manufactured under the same conditions.
得られた複合焼結体は微細なβ−Si3N4とβ−SiCの混合
物からなり、粒子間結合もしっかりしていた。焼結体の
マイクロビッカース硬度(200g荷重)を測定したところ
2100kg/mm2となる値が得られた。X線回折の結果は、シ
リコン、カーボンの未反応物は確認されていない。The obtained composite sintered body was composed of a fine mixture of β-Si 3 N 4 and β-SiC, and the interparticle bond was firm. When the micro Vickers hardness (200g load) of the sintered body was measured
A value of 2100 kg / mm 2 was obtained. As a result of X-ray diffraction, unreacted substances of silicon and carbon were not confirmed.
実施例9 実施例1にて得られたTiB2−NiB2相複合焼結体の気穴率
の低減及び特性の向上をはかるため、Ar雰囲気下で2000
気圧のHIP処理をほどこした。HIP温度は800℃とし、加
圧時間は30分とした。HIP処理後のカサ密度は約10%程
度上昇した。800℃における熱伝導率は0.50w/cm℃まで
上昇した。同様な処理の効果は、ホットプレス処理にお
いても確認された。本ホットプレス処理においては、90
0℃、20分、真空中で200気圧の加圧によりカサ密度は数
%上昇し、熱伝導性度の改善も10%程度みとめられた。Example 9 In order to reduce the porosity and improve the properties of the TiB 2 —NiB 2 phase composite sintered body obtained in Example 1, 2000 in an Ar atmosphere.
Atmospheric pressure HIP treatment was applied. The HIP temperature was 800 ° C. and the pressurization time was 30 minutes. The bulk density after HIP treatment increased by about 10%. The thermal conductivity at 800 ℃ increased to 0.50w / cm ℃. The effect of the similar treatment was also confirmed in the hot press treatment. In this hot press process, 90
The bulk density was increased by a few percent and the thermal conductivity was also improved by about 10% by pressurizing at 200 atm for 20 minutes at 0 ℃.
実施例3に示したTiB2−TiB焼結体についても、Ar雰囲
気中2000気圧、1700℃で15分HIP処理をほどこすことに
より、焼結体破壊靭性値KICも約3から5MNm−3/2へ上昇
し、破壊のモードも粒内破壊モードから粒界破壊モード
への破壊様式の変化が求められた。ただし、HIP温度が1
700℃をこえるか、HIP時間が60分をこえる本処理は、焼
結体の微細組織を著しく変化させたり、経済性に乏しい
ため好ましくない。本実施例に示すごとく、前記本複合
焼結体の製造にひきつづき、複合焼結体の微細組織、相
構成等を変化させることなく焼結体の気穴率の低減、信
頼性、性能の向上をはかるHP、HIP処理は、高性能な複
合セラミックスの製造に極めて有効な手段である。The TiB 2 —TiB sintered body shown in Example 3 was also subjected to HIP treatment in an Ar atmosphere at 2000 atm and 1700 ° C. for 15 minutes, whereby the fracture toughness value K IC of the sintered body was also about 3 to 5 MNm −3. As a result , the fracture mode was also changed from the intragranular fracture mode to the intergranular fracture mode. However, the HIP temperature is 1
This treatment, which exceeds 700 ° C or the HIP time exceeds 60 minutes, is not preferable because it significantly changes the fine structure of the sintered body and is poor in economic efficiency. As shown in this Example, following the production of the present composite sintered body, reduction of the porosity of the sintered body, improvement of reliability and performance without changing the microstructure of the composite sintered body, phase composition, etc. HP and HIP treatments are extremely effective means for producing high-performance composite ceramics.
以上の如く、本発明の複合セラミックス焼結体の製造方
法によれば、通常の焼結法にては製造が極めて困難な、
複合セラミックス焼結体の微細組織、相構成、あるい
は、構造及び相分布等の十分制御した極めて良質かつ新
規なセラミックス材料を製造することができる。As described above, according to the method for producing a composite ceramics sintered body of the present invention, it is extremely difficult to produce by a normal sintering method.
It is possible to manufacture an extremely good quality and novel ceramic material in which the fine structure, phase constitution, structure, phase distribution, etc. of the composite ceramic sintered body are sufficiently controlled.
また、このような効果を達成するために、前記テルミッ
ト反応熱を有効に活用した極短時間焼結法と被焼結粉体
の工夫をこらした調整法の併用は極めて有効な手段とな
り、各種の新しい複合セラミックス焼結体の製造も可能
とする。この結果、工業的に極めて有用な材料を製造す
ることができる。たとえば、実施例に示したTiB2−NiB
焼結体は、従来法では、微細組織を制御して純2相複合
焼結体としては得られなかったもので、良好な耐熱性、
耐ガラス性を利用し、高温ガラス成型部品などに適用で
きる。一方、B4C−TiB2焼結体は、その優れた高硬度及
び耐酸化性や耐アルミ性の故に、切削工具、アルミ溶湯
部品等への適用が可能である。加えて、Si3N4−SiC複合
焼結体も優れた微細組織均一性の故に高温構造部品とし
て使用できる。Further, in order to achieve such an effect, the combined use of the extremely short-time sintering method that effectively utilizes the thermite reaction heat and the adjustment method that devises the powder to be sintered is an extremely effective means. It is also possible to manufacture the new composite ceramics sintered body. As a result, industrially very useful materials can be manufactured. For example, TiB 2 -NiB shown in the examples
The sintered body was obtained by controlling the fine structure by a conventional method and could not be obtained as a pure two-phase composite sintered body.
Utilizing glass resistance, it can be applied to high temperature glass molding parts. On the other hand, B 4 C-TiB 2 sintered body, because of its excellent high hardness and oxidation resistance and aluminum resistance, cutting tools, it can be applied to molten aluminum parts. In addition, the Si 3 N 4 —SiC composite sintered body can also be used as a high temperature structural component due to its excellent fine structure uniformity.
本発明の複合セラミックス焼結体の製造方法によれば、
下記の著しい効果をうることができる。According to the method for producing a composite ceramics sintered body of the present invention,
The following remarkable effects can be obtained.
圧力下で急速加熱が可能であり、被焼結粉体の一部が
温度、圧力、時間が管理された中でセラミックス相を生
成するため、セラミックス相の組成、相構造、各相の分
布等を十分制御可能である。Rapid heating under pressure is possible, and part of the powder to be sintered forms a ceramic phase under controlled temperature, pressure, and time, so the composition of the ceramic phase, phase structure, distribution of each phase, etc. Is fully controllable.
加熱が短時間であり、粒成長等が抑制される。The heating time is short and grain growth is suppressed.
焼結のための投入加熱電力が著しく低減できる。The input heating power for sintering can be significantly reduced.
第1図は、本発明の複合セラミックス焼結体の製造方法
を実施するための超高圧装置の要部概略縦断面図、第2
図は本発明の複合セラミックス焼結体の製造方法を実施
するための他のピストン−シリンダタイプの圧力装置の
要部概略縦断面図、第3図及び第4図は実施例及び比較
例によって得られた複合セラミックス焼結体の結晶構造
の電子顕微鏡写真であり、第3図(A)は高圧焼結法に
て得られたTiB2−Ni−B系焼結体の微細組織、第3図
(B)は本発明の複合セラミックス焼結体の製造法によ
って得られたTiB2−NiB複合セラミックス焼結体の微細
組織、第4図(A)は真空焼結法によって得られたCr−
Ni−B系複合焼結体の微細組織、第4図(B)は自己支
持性(self−sustaining)でないSHS反応を2千気圧下
でテルミット反応により加熱焼結した同組成の複合焼結
体微細組織、第4図(C)は本発明の複合セラミックス
焼結体の製造法(2千気圧下)によって得られた複合セ
ラミックス焼結体の微細組織を示す。FIG. 1 is a schematic vertical cross-sectional view of an essential part of an ultrahigh pressure apparatus for carrying out the method for producing a composite ceramics sintered body of the present invention.
The figure is a schematic vertical cross-sectional view of a main part of another piston-cylinder type pressure device for carrying out the method for producing a composite ceramics sintered body of the present invention, and FIGS. 3 and 4 are obtained by examples and comparative examples. 3A is an electron micrograph of a crystal structure of the obtained composite ceramics sintered body, and FIG. 3A is a microstructure of a TiB 2 —Ni—B system sintered body obtained by a high pressure sintering method, FIG. (B) is a microstructure of a TiB 2 —NiB composite ceramics sintered body obtained by the method for producing a composite ceramics sintered body of the present invention, and FIG. 4 (A) is Cr— obtained by a vacuum sintering method.
Microstructure of Ni-B composite sintered body, Fig. 4 (B) is a composite sintered body of the same composition obtained by heating and sintering the SHS reaction which is not self-sustaining by thermite reaction at 2,000 atm. Microstructure, FIG. 4 (C) shows the microstructure of the composite ceramics sintered body obtained by the method for producing a composite ceramics sintered body of the present invention (under 2000 atmospheres).
Claims (3)
末と、(B)炭素、ホウ素及びケイ素から選ばれた少く
とも1種以上の非金属粉末と、 (C)金属粉末及び/又は上記(B)と異なる非金属粉
末 との混合物を加圧状態でテルミット反応の発熱によって
加熱焼結することを特徴とする複合セラミックス焼結体
の製造方法。1. (A) at least one or more ceramic powders; (B) at least one or more non-metal powders selected from carbon, boron and silicon; (C) metal powders and / or the above. A method for producing a composite ceramics sintered body, which comprises heat-sintering a mixture of a non-metallic powder different from (B) with heat generated by a thermite reaction under pressure.
ト組成物は、酸化銅粉末とアルミニウム粉末の混合物、
またはこの混合物に酸化鉄粉末とSi粉末の混合物を組み
合わせたものよりなることを特徴とする請求項1記載の
複合セラミックス焼結体の製造方法。2. The thermite composition for heating the powder mixture to be sintered is a mixture of copper oxide powder and aluminum powder,
2. The method for producing a composite ceramics sintered body according to claim 1, wherein the mixture is a mixture of iron oxide powder and Si powder.
ルミット反応の発熱を利用した複合セラミックス焼結体
の製造工程にひきつづき、得られた複合焼結体の微細組
織、相組成、構造等を変化させることなく気穴率の低
減、信頼性、性能の向上を図るため、500〜1700℃の温
度、200〜2000気圧の圧力範囲において熱間静水圧プレ
ス又はホットプレス処理を5〜60分施すことを特徴とす
る複合セラミックス焼結体の製造方法。3. A microstructure, phase composition, and structure of the obtained composite sintered body, following the manufacturing process of the composite ceramics sintered body utilizing the heat generation of the thermite reaction according to claim 1 or 2. In order to reduce porosity, improve reliability, and improve performance without changing the temperature, etc., hot isostatic pressing or hot pressing is performed at 5 to 60 at a temperature of 500 to 1700 ° C and a pressure range of 200 to 2000 atm. A method for producing a composite ceramics sintered body, characterized by performing the division.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1175736A JPH07110789B2 (en) | 1989-07-10 | 1989-07-10 | Method for manufacturing composite ceramics sintered body |
| EP90908651A EP0429665B1 (en) | 1989-06-12 | 1990-06-12 | Method of producing sintered ceramic materials |
| US07/655,413 US5139720A (en) | 1989-06-12 | 1990-06-12 | Method of producing sintered ceramic material |
| PCT/JP1990/000766 WO1990015785A1 (en) | 1989-06-12 | 1990-06-12 | Method of producing ceramic sinter |
| DE69032117T DE69032117T2 (en) | 1989-06-12 | 1990-06-12 | METHOD FOR PRODUCING SINTERED CERAMIC MATERIALS |
| KR1019910700159A KR920700172A (en) | 1989-06-12 | 1991-02-11 | Manufacturing method of ceramic sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1175736A JPH07110789B2 (en) | 1989-07-10 | 1989-07-10 | Method for manufacturing composite ceramics sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0340971A JPH0340971A (en) | 1991-02-21 |
| JPH07110789B2 true JPH07110789B2 (en) | 1995-11-29 |
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ID=16001349
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|---|---|---|---|
| JP1175736A Expired - Lifetime JPH07110789B2 (en) | 1989-06-12 | 1989-07-10 | Method for manufacturing composite ceramics sintered body |
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| Country | Link |
|---|---|
| JP (1) | JPH07110789B2 (en) |
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|---|---|---|---|---|
| CN114409412A (en) * | 2020-10-28 | 2022-04-29 | 中国科学院理化技术研究所 | A kind of chemical furnace synthesis method of SiB6 |
| CN119638452B (en) * | 2024-12-12 | 2025-10-24 | 中冶武汉冶金建筑研究院有限公司 | A kind of thermal reaction sintered alumina hollow ball heat-insulating refractory material and preparation method thereof |
-
1989
- 1989-07-10 JP JP1175736A patent/JPH07110789B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0340971A (en) | 1991-02-21 |
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