JPH07111899B2 - Heater element manufacturing method - Google Patents
Heater element manufacturing methodInfo
- Publication number
- JPH07111899B2 JPH07111899B2 JP61052904A JP5290486A JPH07111899B2 JP H07111899 B2 JPH07111899 B2 JP H07111899B2 JP 61052904 A JP61052904 A JP 61052904A JP 5290486 A JP5290486 A JP 5290486A JP H07111899 B2 JPH07111899 B2 JP H07111899B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- green sheet
- heater element
- ceramic
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000004020 conductor Substances 0.000 claims description 18
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 11
- 239000012298 atmosphere Substances 0.000 claims description 11
- 238000010304 firing Methods 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 239000010953 base metal Substances 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910000428 cobalt oxide Inorganic materials 0.000 claims description 2
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000006112 glass ceramic composition Substances 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 239000011572 manganese Substances 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 239000011812 mixed powder Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 2
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 229960004643 cupric oxide Drugs 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 8
- 239000011230 binding agent Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000001293 FEMA 3089 Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000003049 inorganic solvent Substances 0.000 description 1
- 229910001867 inorganic solvent Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、セラミック基板内に抵抗発熱体が内臓された
ヒータ素子の製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a heater element in which a resistance heating element is incorporated in a ceramic substrate.
従来の技術 ヒータ素子は家庭用電熱器具をはじめ広く使われてきて
いる。これらのヒータ素子は、高純度アルミナのセラミ
ック基板内に、タングステン（Ｗ）やモリブデンイン
（Mo）などの高融点金属を発熱体として一体化したもの
であり、高品質で高効率なヒータ素子として知られてい
る。2. Description of the Related Art Heater elements have been widely used in household electric appliances. These heater elements are high-purity alumina ceramic substrates in which a refractory metal such as tungsten (W) or molybdenum in (Mo) is integrated as a heating element. Are known.
しかし、従来のこのヒータ素子は、アルミナを完全に焼
結するには、1500℃以上の高温で、しかも途中でのＷや
Moの酸化を防ぐための水素を含む還元性の雰囲気ガス中
で焼成する必要がある。このため、ヒータ素子をつくる
のに大型の電気炉が必要となり容易につくる事はできな
かった。さらに、アルミナのセラミック基板の焼結時
に、セラミックスシート内に含まれる有機樹脂バインダ
を還元雰囲気中で完全に除去するのは難しく、どうして
も炭化されたカーボンによって緻密であるべき基板内に
大きなポアーやふくれを生じてしまう。このポアーによ
って基板の発熱体部が使用時に酸化したり腐食したりし
て寿命が著しく低下する場合があった。However, in the conventional heater element, in order to completely sinter the alumina, at a high temperature of 1500 ° C. or higher, and W or
It is necessary to perform firing in a reducing atmosphere gas containing hydrogen to prevent Mo oxidation. For this reason, a large electric furnace was required to make the heater element, and it could not be easily made. Furthermore, when sintering a ceramic substrate of alumina, it is difficult to completely remove the organic resin binder contained in the ceramic sheet in a reducing atmosphere, and it is unavoidable that carbonized carbon will cause large pores and blisters in the substrate that should be dense. Will occur. The pores may oxidize or corrode the heat generating portion of the substrate during use, resulting in a marked decrease in life.
発明が解決しようとする問題点 上述した様に従来のヒータ素子及びその製造方法におい
ては、W,Mo,等の高融点金属しか導体材料として用いら
れない。又そのために必要な設備が大型化することによ
るコストアップ、さらには、焼成において導体材料（Ｗ
やMo）が酸化されずに有機バインダ等の有機成分を完全
に焼成除去する雰囲気をコントロールするのが困難で、
ひいては、緻密な基板が得られず発熱体部の酸化や腐食
を生ずるという問題を有していた。Problems to be Solved by the Invention As described above, in the conventional heater element and the manufacturing method thereof, only high melting point metals such as W, Mo, etc. are used as the conductor material. In addition, the cost increases due to the increase in equipment required for that purpose, and further, the conductor material (W
It is difficult to control the atmosphere in which organic components such as organic binders are completely baked and removed without being oxidized.
Consequently, there is a problem that a dense substrate cannot be obtained and the heating element part is oxidized or corroded.
本発明は上記問題点に鑑み、低コストで、焼成時の雰囲
気制御が極めて容易で、かつ発熱体部の酸化や腐食の起
こりにくいヒータ素子の製造方法を提供するのである。In view of the above problems, the present invention provides a method for manufacturing a heater element that is low in cost, has an extremely easy atmosphere control during firing, and is unlikely to cause oxidation or corrosion of the heating element.
問題点を解決するための手段 上記問題点を解決するために、本発明のヒータ素子の製
造方法は、Cu,Ni,Co,Mn,Fe,Tiまたはこれらの合金の融
点より低い温度で焼結するガラスまたセラミックもしく
はガラス−セラミック組成物に、有機ビヒクルを加えた
グリーンシート上に、酸化銅、酸化ニッケル、酸化コバ
ルト、酸化マンガン、酸化鉄、酸化チタンより選ばれる
一種以上の卑金属酸化物ないしこれらの混合粉に有機ビ
ヒクルを加えた導体ペーストを用いて印刷、乾燥をおこ
ない配線を形成した後、前記グリーンシートとは別のグ
リーンシートを加熱、圧力によりラミネートし積層する
か、もしくは、前記グリーンシートの無機組成物と同一
の組成の絶縁ペーストを印刷し、多層化した後、このよ
うにして作製した未焼結体を炭素に対して充分な酸化雰
囲気中で脱バインダし、さらに還元雰囲気中で導体層材
料の卑金属酸化物を金属に還元し、最後に窒素雰囲気中
で焼成し基板を焼結させるというものである。Means for Solving the Problems In order to solve the above problems, the method for manufacturing a heater element of the present invention comprises Cu, Ni, Co, Mn, Fe, Ti or sintering at a temperature lower than the melting point of these alloys. One or more base metal oxides selected from copper oxide, nickel oxide, cobalt oxide, manganese oxide, iron oxide, and titanium oxide on a green sheet obtained by adding an organic vehicle to a glass or ceramic or a glass-ceramic composition. After printing and drying using a conductor paste obtained by adding an organic vehicle to the mixed powder of, a green sheet different from the green sheet is laminated by heating and pressure, or the green sheet is laminated. After printing an insulating paste having the same composition as the inorganic composition of 1 above to form multiple layers, the green body produced in this way is treated with an acid And binder removal atmosphere, is that further base metal oxide conductive layer material in a reducing atmosphere is reduced to metal, is finally calcined in a nitrogen atmosphere sintering the substrate.
作用 本発明は、上記した様に、導体配線の出発原料として卑
金属の酸化物を用いるため、脱バインダ工程を炭素に対
して充分な酸化雰囲気で行なえるため、グリーンシート
や導体ペースト、絶縁ペースト中の有機成分を完全に除
去する事ができ、還元、焼成の両工程における雰囲気制
御が極めて容易となる。そして、得られるヒータ素子は
非常に緻密で、導体配線の酸化や腐食の心配のないヒー
タ素子が得られる。Action The present invention, as described above, uses a base metal oxide as a starting material for a conductor wiring, and therefore can perform the binder removal step in a sufficient oxidizing atmosphere for carbon. It is possible to completely remove the organic component, and it becomes extremely easy to control the atmosphere in both the steps of reduction and firing. Then, the obtained heater element is very dense, and a heater element without fear of oxidation or corrosion of the conductor wiring can be obtained.
実施例 実施例１ 以下に本発明の実施例を示す。Examples Example 1 Examples of the present invention will be shown below.
まず導体ペーストの無機成分としては、CuOおよびCuOと
NiOを重量比で１対１に混合したものの２種類を用い
た。これらの無機粉体に、有機バインダーであるエチル
セルロースをテレピン油に溶かした有機ビヒクルを加え
たものを三段ロールにより適度な粘度に混練して作製し
たものを導体ペーストとした。一方、グリーンシート
は、ホウケイ酸ガラスにアルミナを、重量比で１対１に
混合した無機成分に、有機バインダーであるポリビニル
ブチラールをトルエンに溶かした有機溶剤に、可塑剤で
あるヂーブチルフタレートを加え、ボールミルで混合
し、これを脱泡後ドクターブレード法で造膜、乾燥し、
約1.2mm厚となるようにした。そしてその後、所定のサ
イズに切断した。この様にして作製したグリーンシート
上に、前記の導体ペーストを200メッシュのスクリーン
で印刷し、乾燥（120℃で10分間）させ、導体層を形成
した。その後、その上にさらに導体ペーストの印刷され
ていない前記のグリーンシート（12）を重ね、70℃,200
kg/cm2の圧力でラミネートし、積層化した。この様にし
て作製した未焼結体の斜視図を第１図に示す。次に第１
図の30の示す部分に、CuOペーストをぬり端子部分とし
た。乾燥（120℃で10分間）の後、未焼結体を第３図の
（ａ）に示す温度プロファイルで、空気中で脱バインダ
し、その後第３図（ｂ）に示す温度プロファイルで、N2
＋H2中（H2/N2＝20/80:流量２/min）で還元し、最後
に第４図（ａ）に示す温度プロファイルで、N2中で焼成
した。この様にして作製したヒータ素子の断面図を第２
図に示す。また、導体ペーストとして、CuOペーストを
用いた場合も、（CuO＋NiO）ペーストを用いた場合も、
その断面をSEM観察した結果、極めて緻密な構造を有し
ている事が明らかとなった。さらに、それぞれのヒータ
素子をTH試験（85℃85％）にかけた後の抵抗率変化を測
定した結果、500時間後においても10％以下という、従
来のＷやMoを配線材料とした場合に比べて極めて良好な
結果が得られた。First, as the inorganic components of the conductor paste, CuO and CuO
Two kinds of NiO mixed at a weight ratio of 1: 1 were used. A conductor paste was prepared by kneading these inorganic powders with an organic vehicle in which ethyl cellulose as an organic binder was dissolved in turpentine oil to a proper viscosity with a three-stage roll. On the other hand, the green sheet is made by adding dibutyl phthalate, which is a plasticizer, to an inorganic solvent, which is a mixture of borosilicate glass and alumina in a weight ratio of 1: 1 to an organic solvent in which polyvinyl butyral, which is an organic binder, is dissolved in toluene. , Mix with a ball mill, defoam this, form a film by doctor blade method, dry,
The thickness is about 1.2 mm. After that, it was cut into a predetermined size. On the green sheet thus produced, the conductor paste was printed with a 200-mesh screen and dried (120 ° C. for 10 minutes) to form a conductor layer. After that, the green sheet (12) on which no conductor paste is printed is further laid on it, and the temperature is kept at 70 ° C,
It was laminated by laminating at a pressure of kg / cm 2 . A perspective view of the green body produced in this manner is shown in FIG. Then the first
CuO paste was used as the wet terminal portion at the portion indicated by 30 in the figure. After drying (120 ° C. for 10 minutes), the unsintered body was debindered in air with the temperature profile shown in FIG. 3 (a), and then with the temperature profile shown in FIG. 3 (b), N 2
Reduction was performed in + H 2 (H 2 / N 2 = 20/80: flow rate 2 / min), and finally, firing was performed in N 2 according to the temperature profile shown in FIG. 4 (a). A cross-sectional view of the heater element manufactured in this way is shown in FIG.
Shown in the figure. In addition, whether the CuO paste or the (CuO + NiO) paste is used as the conductor paste,
As a result of SEM observation of the cross section, it was revealed that the cross section had an extremely dense structure. Furthermore, as a result of measuring the change in resistivity after subjecting each heater element to the TH test (85 ° C 85%), it was 10% or less even after 500 hours, compared with the conventional W or Mo wiring material. Very good results were obtained.
また、上記と同様の実験を導体ペーストの出発原料とし
てNiO,CoO,Fe2O3,MnO2,TiO2を用いた場合につても行な
った。なお、これらの酸化物の場合は、焼成条件を第４
図ｂに示す様な温度プロファイルで行なった。その結
果、これらの酸化物を用いた導体ペーストの場合におい
ても、CuOペースト、（CuO＋NiO）ペーストの場合と同
様に極めて良好な結果が得られた。Also, the same experiment as above was performed when NiO, CoO, Fe 2 O 3 , MnO 2 and TiO 2 were used as starting materials for the conductor paste. In the case of these oxides, the firing condition is
The temperature profile was as shown in FIG. As a result, even in the case of the conductor paste using these oxides, very good results were obtained as in the case of the CuO paste and the (CuO + NiO) paste.
実施例２ 実施例１に示したと同様のグリーンシート上に、実施例
１で示したと同様の各種導体ペーストを印刷、乾燥した
後、グリーンシートのかわりに、絶縁ペーストを、200
メッシュのスクリーンを用い印刷し、その後乾燥させ、
さらに端子部分にCuOペーストをぬり、乾燥させ未焼結
体を作製した。なお、絶縁ペーストは、ホウケイ酸ガラ
スにアルミナを、重量比で１対１に混合した無機成分に
導体ペーストの作製の際に用いたと同様の有機ビヒクル
を加え三段ロールで適度な粘度に混練して作製した。Example 2 After printing various conductor pastes similar to those shown in Example 1 on the same green sheet as shown in Example 1 and drying the same, an insulating paste was used instead of the green sheet.
Print using a mesh screen, then dry,
Further, CuO paste was applied to the terminals and dried to prepare a non-sintered body. The insulating paste was prepared by adding alumina to borosilicate glass and an inorganic vehicle mixed in a weight ratio of 1: 1 with the same organic vehicle as used in the production of the conductor paste, and kneading the mixture with a three-stage roll to an appropriate viscosity. It was made.
上記の様にして作製した未焼結体を、実施例１と同様な
条件で、脱バインダ、還元、焼成しヒータ素子を作製し
た。この方法において作製したヒータ素子も、実施例１
の場合と同様、極めて緻密な構造を有し、抵抗値変化も
TH試験500時間後においても20％以下と良好な結果を示
した。The unsintered body produced as described above was debindered, reduced and fired under the same conditions as in Example 1 to produce a heater element. The heater element produced by this method is also the same as in Example 1.
Similar to the case of, it has an extremely fine structure and changes in resistance value.
Even after 500 hours of the TH test, a good result of 20% or less was shown.
発明の効果 以上述べた様に、本発明のヒータ素子の製造方法は、安
価な卑金属酸化物を導体層の出発原料として用いるため
材料コストを下げる事が出来、さらに焼成雰囲気の制御
が極めて容易となり、非常に緻密で、従来品に比べ、そ
の寿命が数段向上したヒータ素子を作製可能にするもの
であり、工業上極めて効果的な発明である。As described above, the heater element manufacturing method of the present invention uses an inexpensive base metal oxide as a starting material for the conductor layer, so that the material cost can be reduced, and the control of the firing atmosphere becomes extremely easy. It is possible to manufacture a heater element that is extremely precise and has a life that is several times longer than that of a conventional product, and is an extremely effective invention in industry.
第１図は、本発明のセラミックヒータ素子の未焼結体を
示す斜視図、第２図は焼結済のセラミックヒータ素子の
断面図、第３図は、実施例（１）に示す製造方法の工程
における温度特性図、第４図は、実施例に示す焼成工程
の温度特性図である。 10……絶縁基板、20……導体配線、30……端子。FIG. 1 is a perspective view showing an unsintered body of a ceramic heater element of the present invention, FIG. 2 is a sectional view of a sintered ceramic heater element, and FIG. 3 is a manufacturing method shown in Example (1). FIG. 4 is a temperature characteristic diagram in the process of FIG. 4, and FIG. 4 is a temperature characteristic diagram of the firing process shown in the example. 10 ... Insulating substrate, 20 ... Conductor wiring, 30 ... Terminal.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 祐伯 聖 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 渡辺 寛敏 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (56)参考文献 特開 昭58−83124（ＪＰ，Ａ) 特開 昭57−11488（ＪＰ，Ａ) 特開 昭54−109536（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yuhiki St., 1006 Kadoma, Kadoma City, Osaka Prefecture, Matsushita Electric Industrial Co., Ltd. (72) Hirotoshi Watanabe, 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd. (56) References JP-A-58-83124 (JP, A) JP-A-57-11488 (JP, A) JP-A-54-109536 (JP, A)
Claims (1)
の融点より低い温度で焼結する、ガラスまたはセラミッ
クもしくはガラス−セラミック組成物に、有機ビヒクル
を加えたグリーンシート上に、酸化第二銅、酸化ニッケ
ル、酸化コバルト、酸化マンガン、酸化鉄、酸化チタン
より選ばれる一種以上の卑金属酸化物ないしはこれらの
混合粉に、有機ビヒクルを加えた導体ペーストを用いて
印刷し、配線を形成する工程と、乾燥の後、前記グリー
ンシートとは別のグリーンシートを加熱、圧力によりラ
ミネートし、積層化するか、もしくは前記グリーンシー
トの無機組成物と同一の組成の絶縁ペーストを印刷し、
多層化する工程と、上記のようにして作製した未焼結体
を炭素に対して充分な酸化雰囲気中で脱バインダする工
程と、その後、還元雰囲気中で熱処理する工程と、さら
に窒素雰囲気中で焼成し、焼結させる工程を有すること
を特徴とするヒータ素子の製造方法。1. A green sheet obtained by adding an organic vehicle to a glass or a ceramic or a glass-ceramic composition, which is sintered at a temperature lower than the melting point of Cu, Ni, Co, Mn, Fe, Ti or their alloys. In addition, cupric oxide, nickel oxide, cobalt oxide, manganese oxide, iron oxide, one or more base metal oxides selected from titanium oxide or a mixed powder thereof, printed using a conductor paste containing an organic vehicle, After forming the wiring and drying, a green sheet different from the green sheet is laminated by heating and pressure and laminated, or an insulating paste having the same composition as the inorganic composition of the green sheet is printed. Then
A step of multilayering, a step of debindering the green body produced as described above in a sufficient oxidizing atmosphere for carbon, a step of subsequently performing heat treatment in a reducing atmosphere, and further in a nitrogen atmosphere A method of manufacturing a heater element, comprising the steps of firing and sintering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61052904A JPH07111899B2 (en) | 1986-03-11 | 1986-03-11 | Heater element manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61052904A JPH07111899B2 (en) | 1986-03-11 | 1986-03-11 | Heater element manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62211890A JPS62211890A (en) | 1987-09-17 |
| JPH07111899B2 true JPH07111899B2 (en) | 1995-11-29 |
Family
ID=12927828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61052904A Expired - Lifetime JPH07111899B2 (en) | 1986-03-11 | 1986-03-11 | Heater element manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07111899B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2821749B2 (en) * | 1988-09-30 | 1998-11-05 | 京セラ株式会社 | Ceramic heater with radiation fins |
| FR2877677B1 (en) * | 2004-11-05 | 2006-12-15 | Stephanois Rech Mec | USE OF AN ALLOY BASED ON TITANIUM-COPPER-NICKEL |
| JP6566677B2 (en) * | 2015-03-26 | 2019-08-28 | 日本碍子株式会社 | DRYING METHOD, CERAMIC COMPONENT MANUFACTURING METHOD, AND DRYING SYSTEM |
| JP6983199B2 (en) * | 2015-03-26 | 2021-12-17 | 日本碍子株式会社 | Drying method, manufacturing method of ceramic parts, and drying system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5883124A (en) * | 1981-11-13 | 1983-05-18 | Hitachi Ltd | Heating resistance unit for glow plug |
-
1986
- 1986-03-11 JP JP61052904A patent/JPH07111899B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62211890A (en) | 1987-09-17 |
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