JPH07112667B2 - Work support device for optical element polishing machine - Google Patents

Description

TECHNICAL FIELD The present invention relates to a work supporting device for an optical element polishing machine.

[Conventional Technology] The conventional technology is the “Optical element processing technology '85 I-2 grinding / polishing” (September 10, 1985, published by Japan Optical Industry Technology Association) No. 11
An explanation will be given based on the contents described on pages 3 to 116.

Generally, a work supporting device of an optical element polishing machine is configured as shown in FIG. 8 exemplifying processing (concave polishing) of an optical lens. In FIG. 8, 101 is a polishing dish having a convex upper surface, which is rotatably provided about an axis. Above the polishing dish 101, a hairpin 102 is provided so as to be capable of swinging movement such as a circle, arc, ellipse, or straight line. Kanzashi
A hairpin 102a is formed at the lower end of the 102, and a sticking plate 103 is attached to the hairball 102a so that it can swivel. In addition, the lens 1
04 is attached with the surface to be polished facing down.

According to the device having the above structure, the hairpin 102 of the hairpin 102
The surface of the lens 104 to be polished is polished by pressing the lens 104 against the polishing dish 101 with the spherical center Q of a as a support point, swinging the pinion 102, and rotating the polishing dish 101. Is.

Here, when one point on the outer periphery of the lens 104 is P and a tangent line at the point P is PN, ∠QPN = θ ₁ is called a polishing angle,
If the polishing angle θ ₁ is sufficiently small, stable polishing can be performed and high surface accuracy can be obtained.

However, as shown in FIG. 9, when the curvature of the lens 104 becomes large and the surface to be polished becomes close to a flat surface, the polishing angle θ ₂ inevitably becomes large. In this case, at the moment of force with the Q point as the fulcrum, the horizontal force (oscillating force = polishing resistance) from the hairpin 102 is F, the load is W, the height from the surface to be polished to the Q point is h, If the radius of the lens 104 is r, then Fh> Wr, and the lens 104 falls down on the polishing dish 101 without slipping and processing becomes impossible.

Therefore, conventionally, as shown in FIG.
By sticking 104 (a large number of burrs) on the sticking plate 101, the polishing angle θ ₃ is substantially reduced.

On the other hand, in the case of the convex polishing, as shown in FIG. 11, the polishing angle θ ₄ becomes large and it becomes impossible to process.

Therefore, conventionally, a plurality of burrs, or as shown in FIG. 12, the positions of the polishing dish 101 and the sticking dish 103 and the lens 104 are reversed, and the polishing dish 101 is attached to the hairpin 102 so that it can swivel freely. The sticker plate 103 was provided on the lower side and was rotatable. According to this, the polishing angle θ ₅ becomes sufficiently small,
Processing can be performed.

[Problems to be Solved by the Invention] However, in order to perform a large number of burrs in order to reduce the polishing angle, a plurality of lenses 104 are required even when polishing one lens 104, and the material cost is low. However, the work efficiency was poor because the setup was troublesome.

Further, in the case of convex polishing, in the case shown in FIG. 12, unless the diameter of the polishing dish 101 is made smaller than the diameter of the polishing dish 101 shown in FIG. I can't. However, if the diameter of the polishing dish 101 is reduced, the spherical surface of the polishing dish 101 changes rapidly, and it becomes difficult to stabilize the curvature when processing many lenses 104. Further, in the case shown in FIG. 12, since the shaft lower end portion of the sticking plate 103 is connected to the rotary drive device by screwing or taper fitting, the work of replacing the sticking plate 103 for each lens is complicated,
In particular, in the case of taper fitting, it was sometimes caught.

That is, conventionally, when the lenses 104 were polished one by one, it was not possible to stably process all the lenses with the polishing dish 101 arranged below the lenses 104. The present invention has been made by paying attention to such a conventional problem, and can be applied to a work (lens or the like) having any radius of curvature regardless of whether it is a concave spherical surface, a flat surface, or a convex spherical surface. To provide a work supporting device for an optical element polishing machine capable of performing stable polishing and obtaining high surface accuracy.

[Means for Solving Problems] In order to solve the conventional problems, the present invention configures a work supporting device as follows.

FIG. 1 is a conceptual diagram of the present invention, in which a stay 1 is fixedly mounted on the upper shaft (not shown) of the polishing machine. A U-shaped first swinging member 2 is rotatably attached to the lower end of the stay 1 so as to swing about the central axis of the stay 1. Further, both tip ends of a U-shaped second rocking member 3 are rotatably attached to both tip ends of the first rocking member 2, so that the second rocking member 3 makes the first rocking motion. The member 2 can be swung about an axis connecting the tip ends of the member 2 as a swing center. Further, at the center of the second swinging member 3, there is provided a work support shaft 5 for supporting the work 4 to be polished at the tip of the shaft so that the axis of the work supporting shaft 5 coincides with the center axis of the second swinging member 3. It is rotatably supported.

Here, the axis line X that is the swing center of the first swing member 2, the axis line Y that is the swing center of the second swing member 3, and the axis line Z that is the rotation center of the workpiece support shaft 5 are respectively They intersect and intersect at one point ((O point), and the O point is located below the work 4. This O point corresponds to the ball center Q point of the hairpin 102a in FIGS. Is.

In the embodiment shown in FIG. 1, the axes X, Y, Z are provided so as to intersect at one point O. However, in the present invention, the axis X of the first swing member 2 is the axis Z of the work support shaft 5. If the axis line Y of the second swing member 3 intersects the axis line Z, the axes X, Y, and Z do not necessarily intersect at one point.

[Operation] According to the work supporting device of the optical element polishing machine having such a configuration, the polishing angle can be set arbitrarily, and the polishing angle can be made sufficiently small. As shown in FIG.
Each axis of the swing member 2, the second swing member 3, and the work support shaft 5
If X, Y, Z intersect at one point, the polishing angle is 0
It becomes degree.

That is, in the conventional swinging of the hairpin, the position of the ball center of the hairpin is physically limited, and the polishing angle cannot be arbitrarily set, whereas in the work supporting device of the present invention, Since the point corresponding to the ball center of the conventional hairpin sphere is an imaginary point, there is no physical limitation, and the imaginary point can be present inside the work or the polishing dish, for example. Is.

The polishing angle is preferably set within 30 degrees.

[Examples] Hereinafter, the present invention will be described in detail based on examples shown in the drawings.

(First Embodiment) FIGS. 2 and 3 are an exploded perspective view and a half-vertical longitudinal sectional front view, respectively, showing an embodiment of the present invention. In the figure,
6 is a stay fixed to an upper shaft (not shown).
A hole 6a is formed at the lower end of the. And stay 6
A substantially U-shaped first swinging member 7 is rotatably attached to the through hole 6a so that it can swing about its central axis.

That is, the bearing hole is formed at the center of the first swing member 7.
7a are bored, and a pair of bearings 9 with flanges are provided in the bearing hole 7a so as to sandwich the collar 8.
9 is inserted. A shaft 10 having a male screw 10 threaded at its tip is inserted into the bearings 9, 9. This axis 10
Is a nut screwed with a male screw 10a to a female screw 11a of a receiver 11 fitted in a hole 6a of the stay 6 and to the stay 6 from the opposite side of the first swing member 7 to the male screw 10a. It is fastened by 12,12 and attached to the stay 6.

Moreover, both tip portions 13a, 13a of the substantially U-shaped second rocking member 13 are rotatably attached to both tip portions 7b, 7b of the first rocking member 7.

That is, each tip portion 7b, 7b of the first swinging member 7 is formed in a bifurcated shape, and the tip end portions 7a, 13b of the second swinging member 13 are fitted into the tip portions 7b, 7b. . And
The respective tip portions 7b, 7b, 13 of the first swing member 7 and the second swing member 13
Pin holes 7c, 7c, 13b, 13b are formed in a and 13a, respectively. The second swinging member 13 is rotatably attached to the first swinging member 7 by pins 14 and 14 inserted into the pin holes 7c, 7c, 13b and 13b. 15 and 15 are the respective tip portions 7 of the first swinging member 7.
It is fixed to the first swinging member 7 by screws 16 and 16 which are screwed onto the b and 7b and penetrate the holes 15a and 15a and are screwed into the screw holes 7d and 7d of the first swinging member 7. The pins 14 and 14 are prevented from being pulled out.

On the other hand, a bearing hole 13c is formed in the center of the second swing member 13.
And a bearing 17 is inserted in the bearing hole 13c. The pressers 18, 18 are engaged with the lower portion of the bearing 17, and the holes 18, 18a of the pressers 18, 18 are
The pressers 18, 18 are fixed to the second swinging member 13 by screws 19, 19 penetrating through and screwing into the screw holes 13d, 13d of the second swinging member 13.

A guard 20 is attached to the stay 6 by screws 21 and 21 which penetrate the holes 20a and 20a and are screwed into the screw holes 6b and 6b of the stay 6, so as to cover the bearings 9 and 9 and the shaft 10. It is provided. The guard 20 protects the bearings 9, 9 and the like from scattering of the polishing liquid during processing and prevents the first swinging member 7 from being reversed.

Further, as shown in FIG. 3, a work support shaft (sticking plate) 23 having a convex lens 22 attached to the shaft tip is inserted into the bearing 17 attached to the second swing member 13 from below.
The work support shaft 23 is supported from below by a polishing dish (not shown) via a convex lens 22, and is rotatably provided on the second swing member 13 via a bearing 17.

Here, the axis line X ₁ which is the swing center of the first swing member 7, the axis line Y ₁ which is the swing center of the second swing member 13, and the work support shaft
The axis Z _1, which is the center of rotation of 23, intersects with each other
O ₁ intersect. The O ₁ point is set so as to be located on the tangent line P ₁ N ₁ at a point P ₁ on the outer periphery of the convex lens 22. That is, the polishing angle is 0 degree.

In the work supporting device having such a structure, the work supporting shaft 23 and the convex lens 22 are rocked by rocking the first rocking member 7 and the second rocking member 13, and a polishing dish (not shown) is used. By rotating the lens,
22 plates to be ground are polished. In this embodiment, since the polishing angle is set to 0 degree, stable polishing can be performed and high surface accuracy can be obtained.

(Second Embodiment) FIG. 4 is a half-vertical longitudinal sectional front view showing a second embodiment of the present invention. Since it is almost the same as the first embodiment, the same parts are designated by the same reference numerals as those in FIG. Is omitted.

A feature of this embodiment is that a work support shaft 25 having a concave lens 24 attached to the tip of the shaft is used. Also, the first
The axis X ₂ which is the center of swing of the swing member 7 and the second swing member 13
The axis line Y ₂ which is the swing center of the workpiece and the axis line Z ₂ which is the rotation center of the work support shaft 25 intersect and intersect at a point O ₂ . The shape and dimension of the work supporting shaft 25 are set so that the tangent P ₂ N ₂ at a point P ₂ on the outer periphery of the concave lens 24 passes through the O ₂ point, and the polishing angle is 0 degree. There is.

That is, according to the work supporting device similar to that of the first embodiment, by changing only the shape and size of the work supporting shaft 25, it is possible to stabilize a lens having a different shape (unevenness, etc.) or size (curvature, diameter, etc.). It can be polished.

(Third Embodiment) FIG. 5 is a half-vertical longitudinal sectional view showing a third embodiment of the present invention.
Since it is almost the same as that of the first embodiment, the same parts are designated by the same reference numerals as those in FIG. 3 and their explanations are omitted.

The works supporting shaft 26 in this embodiment is fixed to the bearing 17 by the screw 27 screwed to the upper end portion, and is rotatably supported by the second swinging member 13. Also, the workpiece support shaft
A recess 26a is formed at the lower end of 26, and a buffer member 28 is fixed in the recess 26a. A part of the convex lens 29 is inserted into the concave portion 26a, and is held from below by a polishing dish (not shown). Also in this embodiment, the axis X ₃ which is the swing center of the first swing member 7, the axis Y ₃ which is the swing center of the second swing member 13, and the axis which is the rotation center of the work support shaft 26. It intersects with Z ₃ at one point O ₃ , and the point O ₃ is set so as to be located on the tangent line P3N3 at one point P ₃ on the outer periphery of the convex lens 29, and the polishing angle is 0 degree. There is.

In this embodiment, since the convex lens 29 is not fixed to the buffer member 28, the lens can be easily replaced.

(Fourth Embodiment) FIG. 6 is a schematic perspective view showing a fourth embodiment of the present invention. The same parts as those in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted.

In this embodiment, the stay 30 is formed in a U-shape, and the square-shaped first swinging member 31 is rotatably attached to both tip ends of the stay 30. Further, the axis line X ₄ which is the swing center of the first swing member 31, the axis line Y ₄ which is the swing center of the second swing member 3, and the axis line Z ₄ which is the rotation center of the work support shaft 5 are , And they intersect each other at a single point O ₄ , so that the polishing angle can be arbitrarily set.

According to the present embodiment, since the first swinging member 31 is so-called both-supported by the stay 30, the strength of the work supporting device is improved.

(Fifth Embodiment) FIG. 7a is a schematic perspective view showing a fifth embodiment of the present invention.
The same parts as those in FIG. 1 are indicated by the same reference numerals as those in FIG. 1 and their explanations are omitted.

The present embodiment is characterized in that both end portions of the first swing member 32 are bent upward. As a result, the axis line X _5, which is the swing center of the first swing member 32, is aligned with the workpiece support shaft 5.
The O ₅ point intersecting the axis Z ₅ is a rotation center, O ₆ that is the axis Y ₅ is a swing center of the second pivoting member 3 intersects the axis Z ₅ which is the rotation center of the workpiece support shaft 5 And do not match.

FIG. 7b shows the relationship between the workpiece (convex lens) 4 and the points O ₅ and O ₆
FIG. 7c is a view as seen from the _5- axis direction, and FIG. 7c is a view as seen from the X _5- axis direction as to the relationship between the work 4 and the points O ₅ and O ₆ . In FIG. 7b, the angle formed by the tangent line P ₅ N ₅ at one point P ₅ on the outer periphery of the work 4 and the line segment P ₅ O ₅ is the polishing angle θ ₅₀ , and in FIG. The angle formed by the tangent line P ₆ N ₆ at one point P ₆ on the outer periphery of the and the line segment P ₆ N ₆ is the polishing angle θ ₆₀ .

In this case, the polishing angles θ ₅₀ and θ ₆₀ are sufficiently small (for example, 30
If it is set (within degrees), stable polishing can be performed.

In the above first to fifth embodiments, an example in which a single lens is polished has been described, but the present invention is not limited to such an embodiment, and for example, a flat prism, a silicon wafer, a spherical mold, Of course, it can be used as a work support device for polishing a work such as a spherical lens or an aspherical mold. In addition, it is possible to perform multiple flashes in the device of the present invention.

[Advantages of the Invention] As described above, according to the work supporting device of the optical element polishing machine of the present invention, the work supporting device is configured by the work supporting shaft, the first swinging member, and the second swinging member. Since the point corresponding to the center of the ball can be made to exist at any position as a fictitious point, the polishing angle can be made sufficiently small and workpieces of all shapes and sizes can be stably polished, which is high. Surface accuracy can be obtained.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing the concept of the present invention, FIGS. 2 and 3 are exploded perspective views showing a first embodiment of the present invention and a partially omitted front view of a semi-vertical section, and FIG. Second invention
FIG. 5 is a partially omitted semi-vertical longitudinal front view showing an embodiment, and FIG. 5 is a partially omitted semi-vertical longitudinal front view showing the third embodiment of the present invention.
FIG. 7 is a schematic perspective view showing a fourth embodiment of the present invention, FIG. 7a is a schematic perspective view showing a fifth embodiment of the present invention, and FIGS.
Is a side view for explaining a polishing angle in the apparatus shown in FIG. 7a, and FIGS. 8 to 12 are front views showing a conventional work supporting apparatus. 2,7,31,32 …… First swing member 3,13 …… Second swing member 4,22,24,29 …… Workpiece (lens) 5,23,25,26 …… Workpiece support axis X , Y, Z, X _{1 to} X ₅ , Y _{1 to} Y ₅ , Z _{1 to} Z ₅ ...... Axis line

Claims (1)

[Claims] 1. A work supporting shaft for supporting a work, which is two objects to be polished, at a tip of the shaft, and a work supporting shaft capable of swinging about an axis intersecting with the axis of the work supporting shaft as a swing center. A swinging member and a second swinging member that swingably supports the work supporting shaft around an axis line that intersects the axis line of the work supporting shaft and that intersects with the swinging center of the first swinging member. A work supporting device for an optical element polishing machine, comprising: