JPH07112668B2 - Work holding device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a work holding device in a processing machine for processing a workpiece such as an optical element such as polishing.

[Prior Art] Conventionally, the invention disclosed in Japanese Utility Model Publication No. 54-17587 has been provided as a lens holder for a lens polishing machine used in an automatic polishing apparatus for automatically and continuously performing lens polishing operations. There is. Then, such a lens holder is shown in Fig. 20 a, b.
As shown in FIG. 3, in a polishing machine used in an automatic polishing apparatus that automatically transfers and polishes a lens to be processed by suction and discharge, a hole 23 that forms a passage for suction and discharge of the polishing machine.
A spherical bearing portion 241 having a plurality of pores 241a communicating with the hole 231a attached to the tip of a shaft 231 having 1a.
And the concave portion 2 so that it can rotate with respect to the spherical bearing portion 241.
A seat 242 having a plurality of pores 242c attached so as to communicate with the pores 241a while being attached via 42a.
And a recess 24 having a diameter substantially equal to the diameter of the lens L to be processed on the lower side.
6a, and provided with a lens holding portion 246 that has a hole in this recess 246a and the upper side is attached to the seat 242, and is provided in the seat 242 from the hole 231a of the shaft 231 of the polishing machine. The holes 242c are always communicated with each other, whereby the lens L to be processed is attached and detached by suction and discharge of the air, and at the time of polishing, the lens L to be processed freely swings and rotates while being securely held. It is a lens holder configured in.

Further, in the figure, 250 is a lens holder, 251 is a polishing machine upper shaft, 25
1a is the tip of the upper shaft 251, 232 is a bearing for vertical movement of the shaft 231, 233 and 234 are tubes for supplying and discharging air from the air cylinder 236, 235 is a tube for attaching and detaching the lens L to be processed in the lens holder 250, 243 Is a presser foot, 244 is a set screw of the presser foot 243, 245 elastic ring, 247 is a hole 247a in the center.
3A and 3B respectively show lens receivers having

[Problems to be Solved by the Invention] However, in the above-mentioned conventional lens holder,
As shown in FIG. B, one point on the outer periphery of the lens L to be processed is P, P
When the tangent line at the point is PN and the center of the spherical bearing portion 241 is Q, ∠QPN = θ is called the polishing angle, and since the center Q is the center of oscillation during polishing, the polishing angle θ is sufficient. If it is too small (in this case, the center Q and the polishing surface of the lens L to be processed are brought close to each other), the polishing operation can be performed without any inconvenience, but the polishing angle θ becomes large (in this case, the center Q And the polished surface of the lens L to be processed become far from each other)
And the lens L to be processed has a drawback that it cannot be processed because it does not slide on the polishing dish and falls down.

That is, a plane as a workpiece, a lens close to a plane,
When processing a convex lens or the like, the polishing angle θ becomes large, and proper work holding cannot be performed, and it is difficult to perform the required processing.

Therefore, the present invention has an object to provide a work holding device capable of appropriately holding a work having any curvature regardless of a convex surface, a concave surface, or a flat surface of a workpiece in view of the problems in the above-described conventional work holder. It is a thing.

[Means and Method for Solving Problems] FIG. 1 is a principle explanatory view of a work holding device of the present invention.

A stay 4 fixed to the upper shaft 3 of the polishing machine and the stay 4
U-shaped seesaw plate 6 that is swingably supported by a lower end of the shaft through a support shaft 5, and U-shapes that are swingably supported by support shafts 7 on both sides of the seesaw plate 6. There is a shaped upper arm 8 and a work supporting portion 10 supported on the upper arm 8 via a work supporting shaft 9, and a hollow hole is opened in the work supporting portion 10 so that the work supporting portion 10 can contract to the hollow hole. The tube 11 is connected. The tube 11 is connected to the upper shaft 3 and communicates with a vacuum suction device (not shown) through the hollow hole of the upper shaft 3 and the hose 12 connected to the upper shaft 3. The lens L is held on the work supporting portion 10 by operating the vacuum suction device. Further, in the above construction, when the rotation axis of the seesaw plate 6 is X, the rotation axis of the upper arm 8 is Y, and the rotation axis of the work support portion 10 is Z, the three axes are orthogonal to each other and intersect at one point (O point). . This O point is Q mentioned above
This corresponds to a point, that is, a fulcrum position of the swing of the workpiece when the surface to be processed of the workpiece and the polishing surface of the polishing dish contact each other and relatively move by the swing motion. The point O is an imaginary point constituted by the X, Y, and Z axes, so that it can be arbitrarily present inside the lens L or inside the polishing dish. Therefore, since the fulcrum position O point of the swing of the work can be brought close to the polishing surface of the lens to be processed, the line connecting the O point and one point on the outer periphery of the lens to be processed and the tangent line at this point. It is possible to sufficiently reduce the angle formed by the polishing angle θ.

[Embodiment] An embodiment of the work holding device of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 2 to 4 show a first embodiment of the work holding device of the present invention. FIG. 2 is a partially longitudinal front view, FIG. 3 is a side view of the same, and FIG. It is a bottom view.

Reference numeral 10 is an upper shaft body, and by connecting the upper shaft body 10 to a swing shaft (not shown) connected to the upper shaft body 10, it is configured to perform a reciprocating motion in the front-rear direction, a circular motion, a circular motion, or the like. There is.

Reference numeral 12 is a stay that connects a support cylinder 13 that constitutes an elevating means for vertically moving a holder of an object to be polished and the upper shaft body 10, and the stay 12 holds a support cylinder 13. 14 and
A guide portion 16 slidably connected in the longitudinal direction of the slide guide 15 provided upright on the upper shaft body 10 and a pinion gear (not shown) fixed to the guide portion 16 are provided on the upper shaft body 10 side. The vertical movement operation unit 17 of the stay 12 is constituted by a rack and pinion mechanism configured by meshing with a provided rack (not shown).

Further, an air cylinder 18 is attached to the upper part of the support cylinder 13 via a coupling 19 screwed to the upper end, and a hollow vent hole 23 is provided in the support cylinder 13 with slide bearings 20 and 21 interposed. An elevating shaft 22 is installed so as to be vertically movable in the length direction of the support cylinder 13, and the lower end of a ram 25 that moves back and forth in the air cylinder 18 is connected to the upper end of the elevating shaft 22 through a joint 24 and the support cylinder is also supported. A screw portion of a holding cylinder 26 of a holding body for holding a lens to be processed, which will be described below, is screwed onto the screw portion 27 at the lower end of the holding cylinder 26.
Is detachably attached.

28 is a protective cylinder that is installed inside the holding cylinder 26, and 29 is a connecting pipe for suction and discharge air that removably holds an object to be polished in the holding body described below. The lifting shaft 22 is attached so as to communicate with the ventilation hole 23.

Reference numeral 30 denotes a link mechanism that supports the object to be polished 40,
The link mechanism 30 includes support links 31 and 32, which are substantially U-shaped in a plane (or gate-shaped in a vertical plane) and have open ends 33 and 34.
Are axially attached to each other, the central portion 35 of one support link 32 is axially attached to the lower end of the stay 36, and the upper portion of a work shaft 38 having a hollow vent hole 37 is screwed to the central portion of the other support link 31. A rotary holder 41 is rotatably attached to the outer periphery of the lower portion of the work shaft 38 with a roller bearing 39 interposed.

Further, the ventilation hole 37 of the work shaft 38 communicates with the ventilation hole 23 of the elevating shaft 22 via a flexible connecting tube 42.

The upper end 36a of the stay 36 is fixed to the lower end of the protective cylinder 28 with the screw 44 of the connecting fitting 43 of the connecting tube 42.

Then, in the link mechanism 30, both support links 3
The axis a of the shaft attachment portion of 1, 32, the support link 32 and the stay 36
At the intersection with the axis b of the shaft attachment portion of
A holding body 40 is held by making the axis c of the lifting shaft 22 of 40 orthogonal to each other, and the center O of the rotary holder 41 is arranged at the intersection of the both.

Positioning pins 50 and 51 are provided on both the left and right link portions 31a and 31b of the support link 31, and at the left and right sides of the lower end of the holding cylinder 26, the ends are provided with Vs for engaging the positioning pins 50 and 51. A positioning stay 54 having upper engaging grooves 52, 53,
55 is attached, and the positioning pins 50 and 51 are engaged with the positioning stays 54 and 55 in the second and third illustrated states, that is, when the lifting shaft 22 is raised (the ram 25 of the air cylinder 18 reaches the top dead center). Ditch 5
The stays 54 and 55 are brought into an operating state by engaging with the members 2 and 53, respectively, so that the object-to-be-polished holder 40 supported by the support link 31 can be held and fixed vertically to the lifting shaft 22. On the contrary, as the elevating shaft 22 starts to descend from the second and third illustrated states (as the ram 25 of the air cylinder 18 reaches the bottom dead center), the positioning pins 50, 51 engage the positioning stays 54, 55. By disengaging the stays 54, 55 from the mating grooves 52, 53 and releasing the engagement, the stay links 54, 55 for supporting the holding body 40 are set in the working state of the stays 54, 55. It is configured so that it can be released from the holding and fixing state perpendicular to the elevating shaft 22 in FIG.

In addition, the fixing portion 5 of the positioning stays 54, 55 to the holding cylinder 26
As shown in FIG. 3, slide grooves 58 are provided on 6,57, and the engagement position with the positioning pins 50, 51 can be adjusted by loosening the mounting screw 59 and sliding the same vertically. It is configured so that it can be done.

In the figure, 47 is a slide groove of the connecting pipe 29 formed in the support cylinder 13,
48 is a screw for fixing the holding portion 14 of the stay 12, 49 is a bearing of the support link 32 and the stay 36, and 60 is a sensor of a tool (polishing tool) provided behind the support link 32, which operates the air cylinder 18. As the lifting shaft 22 is lowered along with the
Is a sensor as a means to confirm whether or not the tool has been properly positioned with respect to the tool.

Reference numeral 61 indicates a connection portion of the air cylinder 18 with an operating air source.

The air cylinder 18 may be replaced with a fluid cylinder such as a hydraulic cylinder.

In the case of polishing the lens 67 to be processed, which is the object to be polished, by the work holding device having the above-described structure, first, the lens 67 to be processed is attached to the rotary holder 41 of the holder 40.
While supplying the lens 67 to be processed from the automatic supply device, by performing a suction operation through the connecting pipe 29 of the elevating shaft 22 in accordance with the supply operation of this supply device, the vent hole 23,
The lens 67 to be processed can be adsorbed in the rotary holder 41 by suction air through the connecting tube 42 and the ventilation hole 37 of the work shaft 38. It should be noted that the presence or absence of suction can be confirmed by checking the suction pressure in the suction air source.

After adsorbing the lens 67 to be processed into the rotary holder 41, the rack pinion in the upper shaft body 10 is operated to
Lower 12 along slide guide 15
The workpiece lens 67 adsorbed to the rotary holder 41 of the holding section 40 is lowered near the tool arranged on the lower side of the holder 22, and the air cylinder 18 is operated in association with the lowering of the stay 12 to be workpiece. The polishing surface of the lens 67 is brought into contact with the tool.

That is, the lowering of the stay 12 by the operation of the rack and pinion performs the coarse movement operation, and the lowering by the air cylinder 18 performs the fine movement operation required for the abutting operation of the polishing surface of the lens 67 to be processed against the polishing dish. You can

In addition, a holding body for the above-mentioned processed lens 67 by an automatic supply device
When the lens 67 to be processed is supplied to the rotary holder 41 of 40, as shown in the second and third illustrations, the lifting shaft 22 has the ram 25 of the air cylinder 18 at the top dead center, and therefore the positioning pins 50 and 51 have the positioning stays 54. Since the support link 31 is held and fixed in the upright state with respect to the elevating shaft 22 by engaging with the engaging grooves 52, 53 of the 55, 55, it is possible to specify the supply operation of the automatic supply device. In addition, the positioning pins 50 and 51 are disengaged by the engaging grooves 52 and 53 of the positioning stays 54 and 55 as the lifting shaft 22 is lowered along with the operation of the air cylinder 18, and the lens 67 to be processed contacts the polishing dish. When they are brought into contact with each other and set to the work state to be polished, the support link 31 is released from the upright holding and fixing state, and is held in a state where it can freely swing.

The position of the contact state between the lens 67 to be processed and the polishing dish can be detected by checking the tool detected by the sensor 60, but as another method, the ram of the air cylinder 18 can be used. It can be carried out by detecting the descending movement amount of 25 or the like.

The holding and fixing of the support link 31 by the positioning stays 54, 55 is released, and the support link 31 is held in a free swinging motion state.
This means that the lens 67 to be processed, which is attracted to the rotary holder 41, is held in a state in which it can freely swing about a swing center point O shown in FIG. Since the work shaft 38 is connected by the connection tube 42 (flexible tube), there is no obstruction as in the case where the direct support link is connected to the lifting shaft.

Now, by starting the rotation of the tool by detecting the set state by the sensor 60, at the same time the upper shaft body 10,
The rocking motion is activated by moving the rocking part (reciprocating back and forth, arc,
Then, normal polishing work is started.

The polishing work is performed by selecting a tool according to the type of the lens 67 to be processed and replacing the rotary holder 41 with a rotary holder corresponding to the shape of the lens to be processed.

After performing the above polishing work for a predetermined time (for example, after the set time has elapsed), the operation of the tool and the upper shaft body 10 is stopped,
In connection with this stop, the fine movement of the air cylinder 18 and then the coarse movement by the rack and pinion of the upper shaft body 10 restores the state when the lens 67 to be processed is supplied, and is held and fixed in the upright state. Rotating holder for holder 40
The polished processed lens 67 adsorbed to 41 is removed by the automatic supply device (however, the suction action of the rotary holder 41 is released at this time), and a new processed lens is obtained.
67 is supplied to the rotary holder 41 of the holder 40, and the polishing work can be sequentially performed in the same manner.

(Second Embodiment) FIG. 5 shows a second embodiment of the work holding device of the present invention and is a partially longitudinal front view. That is, the first shown in the second and third figures
An elastic bellows hose 70 is used instead of the connecting tube 42 of the work holding device in the embodiment, and an upper and lower end of the bellows hose 70 is a lower end of the connecting fitting 43 and a lower end of the bellows hose 70 is an upper end of the work shaft 38. The hose 72 connected to the connection pipe 29 is connected to the three-way solenoid valve 71,
The opening and closing of the solenoid valve 71 is controlled by 74, and the air cylinder
A magnetic switch 75 is provided in the device 18, and the switch 75 is connected to the controller 74 to detect the vertical position of the cylinder.

Other configurations are the same as those of the work holding device of the first embodiment, and in FIG. 5, the same components are designated by the same reference numerals and the description thereof will be omitted.

Next, the operation will be described. Solenoid valve with signal from controller
71 is opened and negative pressure is applied, which causes the lens 67 to be processed.
Is adsorbed on the lower surface of the holding body 40, and by the air cylinder 18,
The link mechanism 30 descends and the lens 67 to be processed is set on a polishing dish (not shown). This is detected by the magnetic switch 75, the controller 74 closes the three-way solenoid valve 71, and the inside of the bellows hose 70 returns to the same atmospheric pressure as the outside air.

Next, the polishing process is started by rotating the polishing dish and swinging the upper shaft, and the swinging causes the support links 31, 32 to swing around their respective support shafts, and the polishing proceeds. At this time, the bellows hose 70 expands and contracts, and the inner diameter can be made large without hindering the swinging of the support links 31 and 32, so that the suction force at the time of loading the lens can be maintained large. After a predetermined time, the upper shaft is stopped from swinging and the polishing dish is stopped from rotating, and then the controller 74 opens the three-way solenoid valve 71 to adsorb the lens 67 to be processed. At this time, the bellows hose 70 contracts due to the negative pressure, and the support links 31, 32 are pulled vertically without raising the air cylinder 18, and the positioning pins 50, 51 and the engagement grooves 52, 53 are pulled.
Positioned by When fixed abrasive grains are used for the polishing dish, the lens 67 to be processed must be raised during rotation of the polishing dish in order to prevent the adhered matter from adhering to the polishing surface.

In this case, the support link 3 due to the contraction of the bellows hose 70 described above.
By positioning 1, 32, the lens 67 to be processed can be separated from the rotating polishing dish without wobbling. Therefore, the lens 67 to be processed is not scratched.

The magnetic switch 75 detects the lowered position of the ram 25, that is, detects that the object to be polished is set on the polishing dish, and sends a signal to the controller 75, which receives the signal and sends a signal to the solenoid valve 71. It sends out and releases the suction of air.
Therefore, the suction of air is interrupted during polishing.

(Third Embodiment) FIGS. 6 and 7 show a third embodiment of the work holding device of the present invention. FIG. 6 is a front view, and the right half is a cross section because it is symmetrical. There is. FIG. 7 is a side view of the line AA '.

Reference numeral 78 in FIGS. 6 and 7 indicates a support shaft (upper shaft).
The stay is fixed to the lower end of the stay 79. At the center of the lower end of the stay 78, a first support link 30 formed in a U shape is horizontally provided via a support pin 81 and a bearing 82. Is pivoted on. Reference numeral 83 indicates a spacer, reference numeral 84 indicates a fixing screw, and reference numeral 85 indicates a washer.

The first support link is provided on the opening side of the first support link 80.
The second support link 86 having a U-shape similar to 80 is the first
The support links 80 are arranged orthogonally to each other, and the open end portions of the support links 80 and 86 are rotatably connected to each other via a support pin 87. That is, the first support link 80
Is swingably supported on the stay 78 via the support pin 81, and the second support link 86 is swingable with respect to the first support link 80 via the support pin 87. Has become. 88 is a bearing, 89 is a fixing screw,
90 is a washer.

The center of the second support link 86 is equipped with a work holding portion 92 for holding the lens 67 to be processed, which is a work, and the work holding portion 92 is configured as follows.

That is, 93 is a joint having a screw shaft portion 95 that is screwed with a female screw 94 that is screwed in the central portion of the second support link 86,
A vent hole 96 is provided at the center of the shaft. A connecting shaft portion 98 for connecting to the elastic hose 97 is formed at the upper end portion of the joint 95, and the other end side of the elastic hose 97 is connected to the connecting shaft portion 100 of the connecting member 99 fixed to the stay 78 side. Has been done. The vent hole 96 has a support shaft 79 through the elastic hose 97 and the shaft center hole 101 of the connecting member 99.
Of air vents (which are in communication with an air source) 102.

A male screw 103 is threaded on the outer periphery of the lower portion of the joint 93, and a female screw 105 of a bottomed holding cylinder 104 is screwed onto the male screw 103. A bearing 106 is fitted on the inner peripheral surface of the holding outer cylinder 104, and the bearing 106 is connected to the inner bottom surface of the bottom portion 107 of the holding outer cylinder 104 and the joint 93.
It is held between the outer peripheral lower surface and the lower surface. A rotary shaft 108 is fitted in the shaft center of the bearing 106. A male screw 109 is formed on the upper part of the rotary shaft 108.
Is fixedly held by being screwed into a female screw 112 of a shaft holding portion 111 fixedly provided in the lower hollow portion 110 of the holding outer cylinder 104. A V ring 113 is interposed between the upper surface of the shaft holding portion 111 and the inner bottom surface of the hollow recess 110.

A ventilation shaft center hole 114 is provided in the shaft center of the rotary shaft 108, and a lower side of the shaft center hole 114 is formed in a fitting hole 115 having a larger diameter than the upper shaft center hole 114. Then, in this fitting hole 115,
The shaft portion 117 of the sticking plate 116 to which the lens 67 to be processed is stuck can be freely fitted.

The lower end of the rotating shaft 108 projects downward from the bottom 107 of the holding outer cylinder 104, and a flange 118 having the same diameter as that of the holding outer cylinder 104 is provided on this projection. An annular O-ring 119 is attached to the lower surface of the flange 118 to prevent vibration during the processing of the lens 67 to be processed. Reference numeral 120 indicates a polishing dish such as a grindstone, and 121 indicates a rotation axis of the polishing dish.

According to the work holding device 77 having the above configuration, the polishing dish 12
The lens 67 to be processed can be set on 0 and the lens 67 to be processed can be pressed and held via the work holding portion 92, the polishing dish 120 can be rotated, and the supporting shaft 79 can be swung by a mechanism (not shown). The lens 67 to be processed can be processed by swinging the lens 67 through.

In particular, according to the work holding device 77 having the above-mentioned configuration, the center of the bearing 106 of the sticking plate holding rotary shaft 108 and the lens 67 to be processed.
Since the distance L ₁ (see FIG. 6) between and can be made extremely small and the lens 67 to be processed can be held at a position close to the processing surface of the lens 67 to be processed, vibration during processing can be made extremely small. Moreover, even if some vibration is generated, it is absorbed by the O-ring 119, so that the chattering phenomenon during machining does not occur at all, and precise machining can be performed. Further, since the pasting dish 116 can be directly held in a large area, the durability of each part of the device can be improved, and the change in the processing conditions due to the uneven wear between the parts can be minimized to achieve stable surface accuracy. It is sustainable. Further, since the lens 67 to be processed can be sucked, it can be automatically loaded and unloaded, and the workability and working efficiency of working can be improved.

(Fourth Embodiment) FIGS. 8 to 10 show a fourth embodiment of the work holding device according to the present invention, wherein FIG. 8a is a partially longitudinal front view, and FIG. 8b is a side sectional view of the same part. , FIG. 9 is an exploded perspective view of the link mechanism, and FIG. 10 is an explanatory view of an operating process. In FIG. 8 a, a holding cylinder 132 is attached to an upper shaft main body 131 that interlocks with a swing motion mechanism (not shown), and a supporting cylinder 133 is supported inside the holding cylinder 132. Slide bearings 134 and 13
An elevating shaft 137 having a ventilation hole 136 in the center is supported via 5 via a vertical movement. An L-shaped stay 138 is fixed to the lower end of the lifting shaft 137 by a set screw 139. 14
0 is a stopper with which the stay 138 abuts, and a stopper 14
0 is screwed 141 to the support cylinder 133.

As shown in FIG. 9, the link mechanism 142 swingably connected to the swinging upper shaft body 131 is composed of a pair of U-shaped support links 143 and 144, and a pair of support links 143 and 1
44 are both open ends 143a and 143a so as to be orthogonal to each other.
144a and 144a are pivotally attached to each other by a pivot 145 (Fig. 8a). Central part 144b of one support link 144
Is pivotally attached to the stay 138 as shown in FIG. 8b.
A holder for an object to be polished, that is, a lens holder 147 is rotatably attached to the center portion of the other support link 143 via a roller bearing 148. In addition, as shown in FIGS. 8 and 9, this link mechanism includes both support links.
An axial center line a that crosses the pivotally connecting portions of both open ends 143a and 144a of 143 and 144, a rotational axis line b that is orthogonal to the axial center line a and that crosses the central portion 144b of the one support link 144, that is, the axial center line in the lifting operation, The center line of the lens holder 147 is located at a portion orthogonal to the axis line c of the elevating shaft 137, and can swing about the pivot shafts 145 and 146.

In the central portion of the support link 143, there is a ventilation hole 149 in the center,
A work shaft having a tapered hole 150 for positioning, that is, a rotating hollow shaft 151 of a holder 147 is fixed to the opening. A holder case 152 is rotatably attached to the lower end of the work shaft 151 via a bearing 148, and a lens seating portion 153 is attached to the case 152.

Reference numeral 154 is a positioning pin having a reverse taper 155 formed at the lower end with respect to the taper hole 150, and a ventilation hole 156 is provided in the axial direction. The positioning pin 15 is provided in the ventilation hole 136 at the lower end of the lifting shaft 137.
When the positioning pin 154 descends and the reverse taper 155 and the taper hole 150 on the work shaft side are fitted, the lens 67 is positioned horizontally. So that the positioning pin 154, work shaft 15
1, the central axis of the lens 67 to be processed coincides with the axis c.

In FIG. 8b, 160 is an air cylinder, and the stay 138
Is fixed in parallel to the axis of the positioning pin 154, and the connecting plate 162 is attached to the end of the shaft 161 of the air cylinder 160.
Are fixed by nuts 163 and 164, and the other end of the connecting plate 162 is fixed to the positioning pin 154 by a set screw 165. Reference numeral 166 is a three-way solenoid valve for controlling the operation of the air cylinder 160, which is connected to the controller 170, whose opening / closing is controlled, and which controls the vertical movement of the positioning pin 154.

In FIG. 8a, the ventilation holes of the three-way solenoid valve 171 and the lifting shaft 137.
The connecting pipe 172 leading to 136 is connected by a hose 173, and the controller 170 controls the opening and closing of the three-way solenoid valve 171.
Air is sucked into and exhausted from the lens holder 147 through the ventilation hole 136 of the lifting shaft 137. Air cylinder 174
Is fixed to the upper end of the support cylinder 133 via a coupling 175, and the ram 176 of the air cylinder 174 is fixed to the upper end of the lifting shaft 137 via a joint 177 to control the vertical movement of the lifting shaft 137. 178 and 133a are grooves when the connecting pipe 172 moves up and down together with the lifting shaft 137. When the elevating shaft 137 is moved up and down by the activation of the air cylinder 174, all the mechanisms such as the stay 138 and the link mechanism 142 attached thereto are moved up and down, and the lens holder 147 is moved up and down accordingly. A magnetic switch 179 detects the vertical position of the cylinder 174, and the controller 1
70 is sensing. 120 is a polishing dish, and the spherical center P of the R spherical surface is set so as to be on the axis c.

Next, the operation will be described. The schematic steps are shown in FIG. Initially, the reverse taper 155 of the positioning pin 154 is fitted into the taper portion 150 on the work shaft side and descends, and the elevating shaft 137 rises (origin)
It is in. A negative pressure is applied to the inside of the hose 173 by the operation of the three-way solenoid valve 171 according to a command from the controller 170, and the negative pressure is guided to the lens holder 147 through the connecting pipe 172 and the ventilation holes 136, 156, 149. Next, after the lens 67 to be processed is set in the lens holder 147 (not shown), the lifting shaft 137 is lowered from the air cylinder 174, the stay 138 and the link mechanism 142 are lowered, and the lens 67 to be processed is placed on the polishing dish 120. Set.
The magnetic sensor 179 detects this, and the controller 170 receives the detection signal to operate the three-way solenoid valve 171 to cut off the negative pressure and stop the air suction, and at the same time, operate the three-way solenoid valve 166 to operate the shaft of the air cylinder 160. 161 is raised and the positioning pin 154 is raised. This enables positioning pin 1
54 is separated from the link mechanism 142, and the link mechanism 142 and the lens holder 147 are in a free state. Then polishing plate 120
Is rotated by means such as a motor (not shown), and the upper shaft main body 131 starts to swing by a swing motion mechanism (not shown), and the lens to be processed is processed via the stay 138 and the link mechanism 142.
67 contacts the polishing dish 120, and polishing is performed in the contact state. After the lapse of a predetermined time, the upper shaft swing and the rotation of the polishing dish stop, and the three-way solenoid valve 166
Activates, the shaft 161 of the air cylinder 160 is lowered, the positioning pin 154 is lowered, and the taper 155 and the tapered hole
150 fits and stops. Suction starts in the same manner as described above, and the lens 67 to be processed is attracted to the lens holder 147, and then the elevating shaft 137 rises. By operating the three-way solenoid valve 171, the negative pressure is switched to the positive pressure, and at the same time air is exhausted,
The lens 67 to be processed is discharged by an appropriate means (not shown).

(Fifth Embodiment) FIGS. 11 to 15 show a fifth embodiment of the work holding device according to the present invention. FIG. 11 is a partially longitudinal front view, and FIG. 12 is a partial side view showing a part in section. FIG. 13 is a rear view of the line AA ′ in FIG.
FIG. 14 is a partial perspective view of the open / close crank, and FIG. 15 is an explanatory view showing an operating process. Further, in the configuration of the present embodiment, the components common to those in the fourth embodiment are designated by the same reference numerals, and the description thereof will be omitted, and only the peculiar portions will be described.

First, the lifting shaft 137 does not have the vent hole 136, so the connecting pipe 17
2. Without the hose 173, suction is performed by another route as described later. A ventilation hole 180 is provided inside the support link 143, and an opening portion appears on the side surface of the support link 143.
The opening has a tapered shape for positioning and has a tapered hole 18
It is 1. Further, the ventilation hole 180 is connected to the ventilation hole 149 of the work shaft 151.

A parallel chuck mechanism 190 that operates horizontally by means such as an air cylinder is provided on the rear surface of the stay 138.
As shown in FIGS. 12 and 13, the parallel chuck mechanism 190 includes a fixed pin 191, a crank plate 192, a support pin 193, slide rods 194 and 195, open / close cranks 196 and 197, and a slide receiver 198.
And 199, air cylinder 200, nut 201, fixture 202,
It consists of locating pins 204 and 205.

The fixed pin 191 is on the axis c, and the air cylinder 200 is opened and closed by opening and closing the three-way solenoid valve 166 under the control of the controller 170.
Is driven, the open / close cranks 196 and 197 are opened / closed in the horizontal direction about the axis c. As shown in FIGS. 11 and 14, the tip of the open / close cranks or the left and right chuck portions 196 and 197 is hollowly positioned so as to be located on the axis of the taper hole 181 and has an inverse taper 203 with respect to the taper. Pins 204 and 205 are fixed. Therefore, when the open / close cranks 196 and 197 are closed, the positioning pins 204 and 205 enter the ventilation hole opening 181 on the side surface of the support link 143, and the support links 143 are positioned perpendicularly to the axis c by the fitting of the tapers. Therefore, the lens 67 to be processed is held horizontally. The positioning pins 204 and 205 are provided with vent holes 206 and 207, respectively, and are connected to a three-way solenoid valve 171 via a hose 208, and the solenoid valve 171 is controlled by the controller 170. Positioning pin when the open / close cranks 196 and 197 are closed
Through 204 and 205 and through vents 149, 180, 206, 207, hose 20
Air is sucked and discharged through 8 and the processed lens 67
Desorption.

The operation is different from that of the fourth embodiment in that the parallel chuck mechanism 190 positions the support link 143 from the side surface and sucks and discharges air, and the operation flow is almost the same. It is shown in FIG.

(Sixth Embodiment) FIG. 16 is a sectional view of essential parts showing a sixth embodiment of the work holding device according to the present invention.

The work holding device of this embodiment is an application of the fourth embodiment. In FIG. 8 showing the work holding device of the fourth embodiment, a groove 155a is formed in the upper portion of the reverse taper 155 of the positioning pin 154.
And the O-ring 210 is mounted in the groove 155a. Other configurations are the same as those shown in FIGS. 8 and 9, and illustration and description of specific configurations are omitted.

Since the O-ring 210 in the above structure is an elastic body, the positioning pin 154 serves as a cushioning material when it is fitted into the taper hole 150 on the work shaft side, and has the effect of enhancing the sealing effect when sucking. You can

(Seventh Embodiment) FIG. 17 is a sectional view of a main part of a work holding device according to the seventh embodiment of the present invention.

In the sixth embodiment, the positioning pin 154 is formed with the reverse taper 155. However, as shown in FIG.
54a and the upper end 151a of the work shaft 151 are formed in a planar shape, a groove 154b is formed in the lower end 154a of the positioning pin 154, and an O-ring 210 is mounted in the groove 154b.

Therefore, the other structure is the same as that of the work holding device shown in FIG. 8, and its concrete illustration and description are omitted.

Therefore, the work holding device of this embodiment can obtain the same effect as the work holding device of the sixth embodiment, and has an advantage that the structure can be simplified as compared with the sixth embodiment. .

(Eighth Embodiment) Next, an eighth embodiment of the work holding device of the present invention will be described with reference to FIG.

FIG. 18 is a front view in which only a part of the work holding part is longitudinally cut, showing an embodiment in which the design of the work holding part of the work holding device of the FIG. 4 embodiment shown in FIGS. 8 to 10 is changed.

Thus, the basic structure of the work holding device is
10 The construction is such that the work holding apparatus of the fourth embodiment shown in the drawing is applied as it is, and the description thereof is omitted. Only the essential parts will be described below in terms of the construction and operation.

A work holding portion 214 is configured by opening a work holding hole 143a in the center of the support link 143 in the link mechanism 142 and mounting a bearing 211 in the holding hole 143a.

Further, the bearing 211 has a bearing retainer 213 and a screw 21.
It is mounted by being fixed to the support link 143 by means of 2.

Further, the lower end 154a of the positioning pin 154 is formed in a flat shape, and a groove 154b is formed in this lower end 154a to mount an O-ring 210, and the plate 215 for attaching the lens 67 to be processed is formed.
The upper end 215a is also formed in a plane shape corresponding to the lower end 154a of the positioning pin 154.

Therefore, when the lens 67 to be processed is held in the work holding part 214, the sticking plate 215 to which the lens 67 to be processed is stuck is attached.
The air cinder (not shown) is actuated in connection with charging and supplying the inner ring of the bearing 211 to lower the positioning pin 154 and attach the lower end 154a of the positioning pin 154 with the O-ring 210 attached. It contacts the upper end 215a of the plate 215 and holds the lens 67 to be processed by a vacuum suction action.

The description of other operations is the same as that of the work holding device of the fourth embodiment, and the description thereof is omitted.

(Ninth Embodiment) FIG. 19 shows a ninth embodiment of the work holding device according to the present invention, which is an embodiment in which the structure of the suction means in the work holding portion is configured to be rotatable.

Therefore, as for the work holding device of such an embodiment, as an embodiment applied to the work holding device of the fourth embodiment shown in FIGS. 8 to 10, below, positioning along with FIG. The structure of the suction portion of the pin 154 as the work holding portion will be specifically described.

FIG. 19 is a sectional view of the suction portion 220 of the positioning pin 154.

In the figure, a holding portion 217 of the pedestal 216 is formed at the lower end of the positioning pin 154, and a bearing 218 is interposed in the holding portion 217 to rotatably hold the pedestal 216. .

In the figure, 219 is a ventilation hole penetrating the pedestal 216, and 221 is the pedestal 2
The O-ring attached to the lower end 216a of 16 and 222 is the upper end of the pedestal 216
With the presser ring of the bearing 218 attached to 216b, presser ring 2
A seal 223 is attached to the outer periphery of 22. Such a seal 2
By means of 23, it is possible to prevent communication with the outside air during vacuum suction without disturbing the rotation of the pedestal 216.

Reference numeral 224 is a retaining ring of a bearing 218 screwed to a screw portion 225 provided in the opening of the holding portion 217 of the positioning pin 154.

Therefore, according to the work holding part of the work holding device having such a configuration, the lens to be processed (shown in the figure) is mounted on the pedestal 216 in the structure of the suction part 220 of the positioning pin 154 via the suction device connected to the lifting shaft. No) is vacuum-sucked and adsorbed and held.

Therefore, since the pedestal 216 is rotatably mounted on the suction portion 220 of the positioning pin 154 via the bearing 218, the pedestal 216 can be detached from the polishing dish (not shown) even when the lens to be processed is subordinately rotated. Therefore, it is possible to eliminate loss time after processing work, prevent polishing scratches, etc., and improve the appearance quality of processed products.

The structure of the suction part 220 of this embodiment can be applied not only to the fourth embodiment but also to the work holding devices of the other embodiments described above with appropriate design changes.

Further, according to the work holding devices of the above-mentioned fourth to ninth embodiments, since the positioning pin is fitted into the support link, the lens can be positioned and the air can be sucked and discharged, so that a mistake in lens attachment / detachment at the time of lens attachment / detachment. This has the effect of drastically reducing the stability of automatic loading. Further, since the lens holder is stable due to the positioning pin, there is an effect that the polishing plate surface is not damaged by the peripheral portion of the lens when the lens and the polishing plate are in contact with each other, and the Newton ring can be stably maintained. Further, since the positioning pin is separated from the support link during processing, there is no external force that adversely affects the swinging movement of the lens, and it is possible to obtain a highly accurate Newton ring.

Further, in each of the above examples, the case of lens polishing as the workpiece has been specifically described, but as the work holding device of the present invention, in addition to holding during polishing processing of a large number of pasted lenses, a flat surface is provided. Prism, aspherical lens,
It can be applied as a holding device in a processing machine such as a silicon wafer, an optical fiber, a spherical or aspherical mold.

[Effects of the Invention] According to the present invention, the axes of the first support shaft and the second support shaft are orthogonal to each other, and the axes orthogonal to these axes are intersected at a fictitious point O. Since it corresponds to the fulcrum position of the swing of the workpiece during polishing, this imaginary point can be set close to the polishing surface of the workpiece, and the so-called polishing angle θ can be made sufficiently small, so It is possible to accurately hold the close lens, convex lens, concave lens, and other work pieces to be processed without being influenced by the curvature of the work piece, and to greatly promote automation such as automatic polishing. Have the effect of.

[Brief description of drawings]

FIG. 1 is an explanatory view of the principle of the work holding device of the present invention, and FIGS. 2 to 4 show a first embodiment of the work holding device of the present invention.
2 is a partially longitudinal front view, FIG. 3 is a side view of the same, FIG. 4 is a bottom view of the same, and FIG. 5 is a partially longitudinal front view of a second embodiment of the work holding device of the present invention. FIGS. 7 and 8 show a third embodiment of the work holding device of the present invention, FIG. 6 is a partially sectional front view, FIG. 7 is a side view of FIG. 6A-A 'line, and FIGS. FIG. 10 shows a fourth embodiment of the work holding device of the present invention, FIG. 8a is a partially longitudinal front view, FIG. 8b is a side sectional view of the same part, and FIG. 9 is an exploded perspective view of a link mechanism. FIGS. 10 and 10 are explanatory views of the operating process, FIGS. 11 to 15 show a fifth embodiment of the work holding device of the present invention, FIG. 11 is a partially longitudinal front view, and FIG. 12 is a part thereof. A partial side view shown in section, FIG. 13 is FIG. 12A-
A'line rear view, Fig. 14 is a partial perspective view of the open / close crank,
FIG. 15 is an explanatory view of the operation process, FIGS. 16, 17, and 19 are cross-sectional views of main parts showing a sixth embodiment, a seventh embodiment and a ninth embodiment of the work holding device of the present invention, FIG. 18 is a front view of the essential part showing a part of the eighth embodiment of the work holding device of the present invention in section, and FIG. 20a is a sectional view showing a lens holder of a conventional lens polishing machine, FIG. b is an enlarged cross-sectional view of the main part. 3 …… Upper shaft 4 …… Stay 5 …… Spindle 6 …… Seesaw plate 7 …… Support shaft 8 …… Upper arm 9 …… Work support shaft 10 …… Work support part 11 …… Tube 12 …… Hose 30,142 ...... Link mechanism 190 …… Parallel chuck mechanism

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hisayuki Takei 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (72) Inventor Hiroshi Ito 2-43-2 Hatagaya, Shibuya-ku, Tokyo Within Olympus Optical Co., Ltd. (56) Reference JP-A-55-125958 (JP, A)

Claims (5)

[Claims] 1. A work holding device in a polishing machine, in which a work surface of a work and a polishing surface of a polishing dish contact each other and relatively move by a swinging motion to perform polishing work on the work. A stay fixed to the upper shaft of the polishing machine that presses against the polishing dish, and a seesaw plate supported by the stay so as to be swingable around the axis of the first support shaft via the first support shaft. An upper arm swingably supported around the axis of the second spindle via a second spindle having an axis orthogonal to the axis of the first spindle on the seesaw plate; A work holding part which is rotatably supported around the axis through a work supporting shaft having an axis orthogonal to each axis of the first and second support shafts, and a work is sucked by the work holding part. Vacuum suction means on the work support shaft so as to hold A communication pipe which is provided so as to communicate, the work holding device, characterized by being configured to include a. 2. The work holding device according to claim 1, wherein the communication pipe is constituted by either a flexible tube or a bellows hose. 3. The work holding device according to claim 1, wherein the communication pipe is constituted by a ventilation hole formed inside the upper arm. 4. The work holding device according to claim 1, wherein the communication pipe is constituted by a ventilation hole formed in a positioning pin that can be brought into contact with or separated from the work support shaft. . 5. A work holding device in a polishing machine, in which a work surface of a work and a polishing surface of a polishing dish contact each other and relatively move by rocking motion to polish the work, A stay fixed to the upper shaft of the polishing machine that presses against the polishing dish, and a seesaw plate supported by the stay so as to be swingable about the axis of the first support shaft via the first support shaft. An upper arm swingably supported around the axis of the second spindle via a second spindle having an axis orthogonal to the axis of the first spindle on the seesaw plate; A work holding unit that is rotatably supported around the axis via a work supporting shaft having an axis that is orthogonal to the axes of the first and second support shafts, and a work is sucked by the work holding unit. To the moving means fixed to the stay so as to hold Workpiece holding device, characterized by being configured comprising only the vacuum suction means has a.