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JPH07116576B2 - Stress corrosion cracking sealing alloy and its manufacturing method - Google Patents
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JPH07116576B2 - Stress corrosion cracking sealing alloy and its manufacturing method - Google Patents

Stress corrosion cracking sealing alloy and its manufacturing method

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Publication number
JPH07116576B2
JPH07116576B2 JP61074126A JP7412686A JPH07116576B2 JP H07116576 B2 JPH07116576 B2 JP H07116576B2 JP 61074126 A JP61074126 A JP 61074126A JP 7412686 A JP7412686 A JP 7412686A JP H07116576 B2 JPH07116576 B2 JP H07116576B2
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JP
Japan
Prior art keywords
weight
less
alloy
stress corrosion
corrosion cracking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61074126A
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Japanese (ja)
Other versions
JPS62202067A (en
Inventor
マ・ジユシエン
タン・シアンユン
チエン・ナンピン
Original Assignee
チンフア・ダ−シユエ
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Application filed by チンフア・ダ−シユエ filed Critical チンフア・ダ−シユエ
Publication of JPS62202067A publication Critical patent/JPS62202067A/en
Publication of JPH07116576B2 publication Critical patent/JPH07116576B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Heat Treatment Of Steel (AREA)
  • Secondary Cells (AREA)
  • Sealing Material Composition (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は硬質ガラス又はセラミック等に対して優れた封
着結合性を有する封着合金に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a sealing alloy having excellent sealing bondability to hard glass or ceramics.

〔従来の技術〕[Conventional technology]

従来、この種の封着合金としてFe−Ni−Co系(Ni29−Co
18−残部Fe或はNi33−Co14−残部Fe及びNi35−Co9−残
部Fe)およびFe−Ni−Co−Cu系(Ni36−Co5−Cu3−残部
Fe)という封着合金がある。米国、日本国、西独などで
は該合金の性能を改善する研究を行っています。
Conventionally, as a sealing alloy of this kind, Fe-Ni-Co system (Ni 29 -Co
18 -balance Fe or Ni 33 -Co 14 -balance Fe and Ni 35 -Co 9 -balance Fe) and Fe-Ni-Co-Cu system (Ni 36 -Co 5- Cu 3 -balance)
There is a sealing alloy called Fe). In the United States, Japan, West Germany, etc., we are conducting research to improve the performance of this alloy.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

上記の従来の封着合金は高温焼鈍後、その結晶粒が粗大
化するため、耐応力腐食性がわるい。この合金では、絞
り加工された部品の表面に皺状の欠陥が発生しやすく、
あるいは銀ろう付けするとき、銀ろうの粒界に浸透現象
が発生しやすく、耐水素脆化性と耐応力腐食性が劣化す
る。しかし実際には高温における結晶粒粗大化を防止す
るために、やむを得ず焼鈍温度を低くしなければならな
い。しかしながらそうしたら電子部品の寿命が短かくな
って、この結果、長寿命、高出力を有する電子管などの
部品を作ることができません。
Since the crystal grains of the above conventional sealing alloy are coarsened after high temperature annealing, the stress corrosion resistance is poor. In this alloy, wrinkled defects are likely to occur on the surface of drawn parts,
Alternatively, when brazing with silver, the phenomenon of permeation easily occurs at the grain boundaries of the silver braze, and the hydrogen embrittlement resistance and stress corrosion resistance deteriorate. However, in practice, the annealing temperature must be lowered in order to prevent the coarsening of the crystal grains at high temperatures. However, if so, the life of electronic components will be shortened, and as a result, it will not be possible to make components such as electron tubes that have long life and high output.

日本の久世孝等はFe−Ni合金及びNi29−Co18−Fe合金に
0.005〜1.5%(重量%)希土類金属を添加して、結晶粒
の微細化し、このことにより、銀ろうの粒界浸透現象を
も抑えることを提案している(特公昭46−57974)その
ほかに純鉄及び炭素鋼にZr金属を添加して(特公昭48−
18408)又はNi−Cr−Fe合金にTi金属を添加して(特公
昭50−57916)、結晶粒間腐食と亀裂を抑えることが提
案されている。しかしこれらのものは効果があまり顕著
ではなく、本発明の合金と比較して、全くちがうと認め
られる。
To Kuze Koto of Japan is Fe-Ni alloy and Ni 29 -Co 18 -Fe alloy
It has been proposed that 0.005 to 1.5% (wt%) rare earth metal is added to make the crystal grains finer, thereby suppressing the grain boundary permeation phenomenon of silver solder (Japanese Patent Publication No. 46-57974). Zr metal added to pure iron and carbon steel (Japanese Patent Publication No.
18408) or a Ni-Cr-Fe alloy with Ti metal (Japanese Patent Publication No. 50-57916) to suppress inter-grain corrosion and cracks. However, the effects of these are not so remarkable, and it is recognized that they are completely different from the alloy of the present invention.

そこで本発明の目的は、高温による結晶粒の粗大化を制
御し、加工性と耐銀ろうの粒界浸透性と耐応力腐食割れ
性などを改善し製品の品質と寿命を向上させるのであ
る。
Therefore, an object of the present invention is to control the coarsening of crystal grains due to high temperature, improve the workability, the grain boundary penetration of silver braze resistance, the stress corrosion cracking resistance, etc., and improve the quality and life of the product.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の封着合金は、Ni25重量%以上40重量%以下、好
ましくはNi30重量%以上40重量%以下Co3重量%以上10
重量%未満、Cu6重量%以下、Zr0.02重量%以上0.8重量
%以下、好ましくはZr0.05重量%以上0.06重量%以下O2
0.001%以下、残部Fe及び不可避的不純物からなること
を特徴とする耐応力腐食割れ封着合金で、とくにアルゴ
ン溶接が行われる真空管の封着合金であって、N20.002
%、O20.001%を含有し、Zrの含有量が0.16重量%より
少ない耐応力腐食割れ封着合金ある。
The sealing alloy of the present invention is Ni 25 wt% or more and 40 wt% or less, preferably Ni 30 wt% or more and 40 wt% or less Co3 wt% or more 10
Less than 6% by weight, Cu 6% by weight or less, Zr 0.02% by weight or more and 0.8% by weight or less, preferably Zr 0.05% by weight or more and 0.06% by weight or less O 2
0.001% or less, in stress corrosion cracking sealing alloy and the balance Fe and unavoidable impurities, a particular sealing alloy tube argon welding is performed, N 2 0.002
%, O 2 0.001%, and a Zr content of less than 0.16 wt% is a stress corrosion cracking resistant sealing alloy.

本発明の封着合金の製造方法は、Ni25重量%以上40重量
%以下、好ましくはNi30重量%以上40重量%以下、Co3
重量%以上10重量%未満、Cu6重量%以下、Zr0.02重量
%以上0.8重量%以下、好ましくはZr0.05重量%以上0.0
6重量%以下O20.001%以下、残部Fe及び不可避的不純物
からなる合金を、1100℃〜1200℃に加熱して熱間圧延し
た後950℃以上で水焼き入れを行うことを特徴とする結
晶粒の微細化と耐応力腐食割れ特性に優れた封着合金の
製造方法である。
The method for producing a sealing alloy according to the present invention is Ni 25 wt% or more and 40 wt% or less, preferably Ni 30 wt% or more and 40 wt% or less, Co3
% By weight or more and less than 10% by weight, Cu 6% by weight or less, Zr 0.02% by weight or more and 0.8% by weight or less, preferably Zr 0.05% by weight or more 0.0
6% by weight or less O 2 0.001% or less, an alloy consisting of the balance Fe and inevitable impurities, a crystal characterized by heating to 1100 ° C to 1200 ° C and hot rolling, and then water quenching at 950 ° C or more This is a method for producing a sealing alloy having excellent grain refinement and stress corrosion cracking resistance.

換言するとこの発明は、公知のFe−Ni−Co系又はFe−Ni
−Co−Cu系封着合金にZr0.02〜0.8%添加し、この合金
を1100〜1200℃に加熱して熱間圧延した後950℃以上で
水焼き入れを行う方法である。Ni,Co,Cuを添加する理由
及び添加範囲を限定した理由は、公知の封着合金と同じ
であり、ここでは説明を省略する。Zrを添加する理由
は、耐応力腐食性を向上するためである。
In other words, the present invention is based on the known Fe-Ni-Co system or Fe-Ni.
This is a method in which 0.02 to 0.8% of Zr is added to a —Co—Cu based sealing alloy, the alloy is heated to 1100 to 1200 ° C., hot rolled, and then water quenched at 950 ° C. or higher. The reason for adding Ni, Co, and Cu and the reason for limiting the range of addition are the same as those for known sealing alloys, and the description thereof is omitted here. The reason for adding Zr is to improve the stress corrosion resistance.

即ち添加されたZrは合金でのN2と反応して結晶粒を微細
化し、及び均一に分散したZrNを形成することできる。Z
rN粒子の寸法は数百Åから1μmまでである。焼鈍加熱
するときZrNが、まず歪が生じている粒界に析出するた
め、高温焼鈍するとき粒界の移動を阻止できる。結晶粒
の粗大化を抑え合金の耐応力腐食性を向上せしめる効果
を有する。Zrの添加範囲を限定した理由は、0.02%未満
ではその効果が発揮されず、又0.8%を越えると、合金
の性質が逆に劣化するためである。この合金は、膨脹特
性を維持できるとともに、硬質ガラス又はセラミック等
との封着性を向上させることができる。なお本発明合金
は、溶融した鉄に各種添加元素を単体又は母合金の形で
添加する通常の方法によって得られる。
That is, the added Zr can react with N 2 in the alloy to refine the crystal grains and form uniformly dispersed ZrN. Z
The size of rN particles is from several hundred Å to 1 μm. When annealing is performed, ZrN first precipitates at the grain boundaries where strain is occurring, so movement of the grain boundaries can be prevented during high temperature annealing. It has the effect of suppressing the coarsening of crystal grains and improving the stress corrosion resistance of the alloy. The reason why the addition range of Zr is limited is that the effect is not exhibited when the content is less than 0.02%, and the property of the alloy deteriorates when the content exceeds 0.8%. This alloy can maintain the expansion characteristics and improve the sealing property with hard glass or ceramics. The alloy of the present invention can be obtained by a usual method of adding various additive elements to molten iron in the form of a simple substance or a mother alloy.

〔実施例〕〔Example〕

Fe−Ni−Co系或はFe−Ni−Co−Cu系合金にZrを0.02〜0.
8%(重量%)を添加して、添加量を上記の如く限定し
た理由は次の通りである。Zrの結晶粒の微細化効果が溶
解方法、合金でのN2,O2の含有量の影響を受けるので、Z
rの含有量はZrNの当量比に候するとき最良の効果があ
る。例えば真空で溶解するときZrの最良の含有量は0.05
〜0.06%(重量%)、真空管の封着がアルゴン溶接で行
うとき合金でのN20.002%、O20.001%を含有して、Zrの
含有量が0.16%(重量%)より少なくなる方が良い。11
00℃〜1200℃で加熱して熱間圧延して、その終点温度95
0℃〜1050℃、圧延後950℃以上で遅滞なく水焼入れし、
しかる後冷間圧延と中間焼戻を行う。
Fe-Ni-Co-based or Fe-Ni-Co-Cu-based alloy with Zr 0.02 to 0.
The reason for adding 8% (wt%) and limiting the addition amount as described above is as follows. Since the grain refining effect of Zr is influenced by the melting method and the contents of N 2 and O 2 in the alloy, Z
The content of r has the best effect when observing the equivalence ratio of ZrN. For example, the best Zr content when melting in vacuum is 0.05
~ 0.06% (wt%), when N 2 0.002% and O 2 0.001% are contained in the alloy when vacuum tube sealing is performed by argon welding, the Zr content is less than 0.16% (wt%) Is good. 11
It is heated at 00 ℃ -1200 ℃ and hot-rolled.
0 ℃ ~ 1050 ℃, after rolling, water quenching at 950 ℃ or more without delay,
After that, cold rolling and intermediate tempering are performed.

なお、本発明は上述した実施例に限定されるものではな
い。たとえば、Ni29−Co18−残部Feという合金にZr0.08
%(重量%)添加して、1200℃で加熱して熱間圧延を行
う圧延終了温度は1050℃で、950℃〜1000℃で噴水で水
焼入れし、次いで冷間圧延し、中間焼戻す。このように
してつくられた板材はその熱膨脹特性等がNi29−Co18
部Fe合金と同じです。結晶粒の微細化、耐銀ろうの粒界
ペネトレーション性、耐応力腐食性、耐水素脆化性の合
金の加工性等を顕著的に改善できる。
The present invention is not limited to the above embodiment. For example, in an alloy called Ni 29 -Co 18 -balance Fe, Zr0.08
% (% By weight) is added and heated at 1200 ° C. to perform hot rolling. The rolling end temperature is 1050 ° C., water quenching is performed with a fountain at 950 ° C. to 1000 ° C., then cold rolling is performed, and intermediate tempering is performed. The sheet material made in this way has the same thermal expansion characteristics as the Ni 29 -Co 18 balance Fe alloy. It is possible to remarkably improve the refinement of crystal grains, the grain boundary penetration resistance of silver braze resistance, the stress corrosion resistance, and the workability of alloys resistant to hydrogen embrittlement.

この実施例によれば、次のような効果を有する。This embodiment has the following effects.

(1) 結晶粒を微細化させる。この合金を1050℃で30
分焼鈍した後、結晶粒度は粒度番号5以下の細かい粒子
になる。Zrのない比較合金と比べて同じ条件において粒
度番号1.5を増加していた。(比較合金は粒度番号3.5で
す) (2) 耐銀ろう浸透特性を向上させる。この合金を10
50℃30分焼鈍した後、銀ろう浸透はほとんどない。Zrの
ない比較合金には同じ条件において浸透の深さは15μm
くらいである(Ag72−Cu28を鑞として)。
(1) Refining crystal grains. This alloy at 30 ° C at 30
After the partial annealing, the crystal grain size becomes fine particles having a grain size number of 5 or less. The grain size number increased at 1.5 under the same conditions compared to the comparative alloy without Zr. (Comparative alloy has a grain size number of 3.5) (2) Improves silver brazing resistance. This alloy 10
After annealing at 50 ° C for 30 minutes, there is almost no silver braze penetration. The penetration depth is 15 μm for the Zr-free comparative alloy under the same conditions.
It is about the same (using Ag 72 -Cu 28 as a solder).

(3) 耐応力腐食性を向上させる。3.5%NaCl水溶液
中では三点曲げ試験という実験して同じ荷重をかけると
150時間でこの合金には亀裂がない。しかしZrのない比
較合金のほうには亀裂が多く出ている。
(3) Improve the stress corrosion resistance. When the same load is applied in an experiment called a three-point bending test in a 3.5% NaCl aqueous solution
After 150 hours, this alloy is crack free. However, the comparative alloy without Zr has more cracks.

(4) 耐水素脆亀裂性を向上させる。(4) Improving hydrogen brittle crack resistance.

水素を加入する場合には(電流密度=1MA/cm2)、耐久
実験を行った。本発明合金は、100時間後、切断すると
き応力はZrのない比較合金より30%〜50%増えた。
When hydrogen was added (current density = 1 MA / cm 2 ), a durability test was conducted. The alloys of the present invention, after cutting for 100 hours, had a stress increase of 30% -50% over the comparative alloy without Zr.

(5) 合金の熱加工性を改善させる。この合金の熱加
工の成功率はZrのない比較合金よ20〜30%を増えた。
(5) To improve the heat workability of the alloy. The success rate of thermal processing of this alloy increased by 20-30% over the comparative alloy without Zr.

〔発明の効果〕〔The invention's effect〕

本発明によって作られた封着合金は次のような効果を奏
することができる。
The sealing alloy produced by the present invention can exert the following effects.

(1) 結晶粒が微細化になる、1050℃で30分焼鈍した
後、結晶粒度が粒度番号5以下の細いものになる。耐銀
ろうの粒界浸透性が著しく向上される。
(1) Crystal grains become finer, and after annealing at 1050 ° C for 30 minutes, the grain size becomes fine with grain size number 5 or less. The grain boundary permeability of the silver braze resistant is significantly improved.

(2) 耐応力腐食割れ性を著しく向上させる。例えば
3.5%NaCl水溶液中で150時間漬けた後、合金の亀裂がな
し。
(2) Remarkably improve stress corrosion cracking resistance. For example
After soaking in 3.5% NaCl aqueous solution for 150 hours, the alloy did not crack.

(3) 耐水素脆化性を上げさせる。耐化学腐食性がZr
を添加せずより約2倍向上させる。
(3) To increase hydrogen embrittlement resistance. Chemical corrosion resistance is Zr
About 2 times better than without adding.

(4) 熱間加工性を改善し、合金の歩留を25〜100%
向上させる。それで本発明の合金で封着された電子管等
には寿命が長いし、値段が安いし依頼性も優れている。
従って電子産業において電真空器体、半導体器体、集積
回路のリードフレーム等に広く賞用できる。
(4) Improves hot workability and improves alloy yield by 25-100%
Improve. Therefore, the electron tube and the like sealed with the alloy of the present invention have a long life, are inexpensive, and have excellent requestability.
Therefore, it can be widely applied to electric vacuum containers, semiconductor devices, lead frames of integrated circuits, etc. in the electronic industry.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 チエン・ナンピン 中華人民共和国,ベイジン,ハイデイア ン・デイストリクト,チンフアユアン(番 地無し) (56)参考文献 特開 昭56−5950(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Qian Nanping, People's Republic of China, Beijing, Haidian District, Chinhuayuan (no address) (56) Reference JP-A-56-5950 (JP, A)

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】Ni25重量%以上40重量%以下、Co3重量%
以上10重量%未満、Cu6重量%以下、Zr0.02重量%以上
0.8重量%以下、O20.001%以下、残部Fe及び不可避的不
純物からなることを特徴とする耐応力腐食割れ封着合
金。
1. Ni 25 wt% or more and 40 wt% or less, Co 3 wt%
Above 10% by weight, Cu6% by weight or less, Zr0.02% by weight or more
A stress corrosion cracking-resistant sealing alloy, which comprises 0.8 wt% or less, O 2 0.001% or less, and the balance Fe and inevitable impurities.
【請求項2】Ni30重量%以上40重量%以下である請求項
1に記載の耐応力腐食割れ封着合金。
2. The stress corrosion cracking resistant sealing alloy according to claim 1, wherein the content of Ni is 30% by weight or more and 40% by weight or less.
【請求項3】Zr0.05重量%以上0.06重量%以下である請
求項1又は2に記載の耐応力腐食割れ封着合金。
3. The stress corrosion cracking resistant sealing alloy according to claim 1, wherein Zr is 0.05% by weight or more and 0.06% by weight or less.
【請求項4】アルゴン溶接が行われる真空管の封着合金
であって、N20.002%、O20.001%を含有し、Zrの含有量
が0.16重量%より少ない請求項1乃至3のいずれか記載
の耐応力腐食割れ封着合金。
4. A sealing alloy tube argon welding is performed, N 2 0.002%, containing O 2 0.001%, any one of claims 1 to 3 content is less than 0.16 wt% Zr A stress corrosion cracking sealing alloy as described.
【請求項5】Ni25重量%以上40重量%以下、Co3重量%
以上10重量%未満、Cu6重量%以下、Zr0.02重量%以上
0.8重量%以下、O20.001%以下、残部Fe及び不可避的不
純物からなる合金を、1100℃〜1200℃に加熱して熱間圧
延した後950℃以上で水焼き入れを行うことを特徴とす
る結晶粒の微細化と耐応力腐食割れ特性に優れた封着合
金の製造方法。
5. Ni 25% by weight or more and 40% by weight or less, Co 3% by weight
Above 10% by weight, Cu6% by weight or less, Zr0.02% by weight or more
An alloy consisting of 0.8 wt% or less, O 2 0.001% or less, the balance Fe and unavoidable impurities is heated to 1100 ° C to 1200 ° C, hot-rolled, and then water-quenched at 950 ° C or more. A method for producing a sealing alloy having excellent grain refinement and stress corrosion cracking resistance.
【請求項6】Ni30重量%以上40重量%以下である請求項
5に記載の耐応力腐食割れ封着合金の製造方法。
6. The method for producing a stress corrosion cracking resistant sealing alloy according to claim 5, wherein the content of Ni is 30% by weight or more and 40% by weight or less.
【請求項7】Zr0.05重量%以上0.06重量%以下である請
求項5又は6に記載の耐応力腐食割れ封着合金の製造方
法。
7. The method for producing a stress corrosion cracking resistant sealing alloy according to claim 5, wherein Zr is 0.05% by weight or more and 0.06% by weight or less.
JP61074126A 1985-04-01 1986-03-31 Stress corrosion cracking sealing alloy and its manufacturing method Expired - Lifetime JPH07116576B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN85100141 1985-04-01
CN85100141A CN85100141B (en) 1985-04-01 1985-04-01 Stress corrosion resistant sealing alloy

Publications (2)

Publication Number Publication Date
JPS62202067A JPS62202067A (en) 1987-09-05
JPH07116576B2 true JPH07116576B2 (en) 1995-12-13

Family

ID=4790920

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Country Link
JP (1) JPH07116576B2 (en)
CN (1) CN85100141B (en)

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