JPH07117307B2 - Cryogenic cooling device - Google Patents
Cryogenic cooling deviceInfo
- Publication number
- JPH07117307B2 JPH07117307B2 JP30753487A JP30753487A JPH07117307B2 JP H07117307 B2 JPH07117307 B2 JP H07117307B2 JP 30753487 A JP30753487 A JP 30753487A JP 30753487 A JP30753487 A JP 30753487A JP H07117307 B2 JPH07117307 B2 JP H07117307B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- cryogenic
- tank
- refrigerant
- liquefied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、極低温冷却装置に係り、特に極低温冷凍機で
生成した極低温液化冷媒を液化ガス槽を介して被冷却体
へ供給する極低温冷却装置に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryogenic cooling device, and in particular, a cryogenic liquefied refrigerant generated in a cryogenic refrigerator is supplied to an object to be cooled via a liquefied gas tank. The present invention relates to a cryogenic cooling device.
以下、極低温液化冷媒として液体ヘリウムの場合を例に
とり説明する。Hereinafter, the case of liquid helium as the cryogenic liquefied refrigerant will be described as an example.
第2図は従来の極低温冷却装置の構成を示すブロック図
である。この第2図において、1は圧縮機、2はヘリウ
ム冷凍機、3は高圧ヘリウムライン、4は低圧ヘリウム
ライン、5は中圧タンク、6は高圧ヘリウムライン圧力
調節弁、7は低圧ヘリウムライン圧力調節弁、8は液体
ヘリウム槽、9は第1の液体ヘリウム供給管、10は第1
のガスヘリウム戻管、11はクライオスタット、12は超電
導マグネット等の被冷却体、13は第2の液体ヘリウム供
給管、14は第2のガスヘリウム戻管、15は液体ヘリウム
供給弁、20はヒータ、21は超電導液面計、22は液面制御
演算器を示す。FIG. 2 is a block diagram showing the configuration of a conventional cryogenic cooling device. In FIG. 2, 1 is a compressor, 2 is a helium refrigerator, 3 is a high pressure helium line, 4 is a low pressure helium line, 5 is a medium pressure tank, 6 is a high pressure helium line pressure control valve, and 7 is a low pressure helium line pressure. Control valve, 8 liquid helium tank, 9 first liquid helium supply pipe, 10 first
Gas helium return pipe, 11 cryostat, 12 cooled object such as superconducting magnet, 13 second liquid helium supply pipe, 14 second gas helium return pipe, 15 liquid helium supply valve, 20 heater , 21 is a superconducting liquid level gauge, and 22 is a liquid level control calculator.
次に、上記のように構成された従来のヘリウム冷凍装置
の動作について述べる。圧縮機1で圧縮された高圧ヘリ
ウムは高圧ヘリウムライン3を通りヘリウム冷凍機2に
供給され一部が液体ヘリウムとなり第1の液体ヘリウム
供給管9を通り液体ヘリウム槽8に送られる。液体ヘリ
ウム槽8内の液体ヘリウムは第2の液体ヘリウム供給管
13を通り、クライオスタット11に送られ被冷却体12を冷
却する。被冷却体を冷却することで蒸発したガスは第2
のガスヘリウム戻管14を通りヘリウム冷凍機2に戻り寒
冷回収された後、低圧ヘリウムライン4を通り圧縮機1
に戻る。クライオスタット11に必要な液体ヘリウムは液
体ヘリウム供給弁15によって調節される。液体ヘリウム
槽8内の液体ヘリウムは超電導液面計21で検知され、液
面制御演算器22で制御出力をヒータ20に出力する。高圧
ヘリウムライン3と低圧ヘリウムライン4の圧力は中圧
タンク5を介して、高圧ヘリウムライン圧力調節弁6と
低圧ヘリウムライン圧力調節弁7によって一定に保持さ
れる。Next, the operation of the conventional helium refrigeration system configured as described above will be described. The high-pressure helium compressed by the compressor 1 is supplied to the helium refrigerator 2 through the high-pressure helium line 3 and part of it becomes liquid helium and is sent to the liquid helium tank 8 through the first liquid helium supply pipe 9. The liquid helium in the liquid helium tank 8 is the second liquid helium supply pipe.
It passes through 13 and is sent to the cryostat 11 to cool the cooled object 12. The gas evaporated by cooling the cooled object is the second
After returning to the helium refrigerator 2 through the gas helium return pipe 14 of FIG.
Return to. The liquid helium required for the cryostat 11 is adjusted by the liquid helium supply valve 15. Liquid helium in the liquid helium tank 8 is detected by the superconducting liquid level gauge 21, and the liquid level control calculator 22 outputs a control output to the heater 20. The pressures of the high-pressure helium line 3 and the low-pressure helium line 4 are kept constant via the medium-pressure tank 5 by the high-pressure helium line pressure control valve 6 and the low-pressure helium line pressure control valve 7.
なお、この種の装置として関連するものには例えば特開
昭57-108557号等がある。A related device of this type is, for example, JP-A-57-108557.
以上のような構成および動作の従来の極低温冷却装置で
は、ヒータ20の制御を液体ヘリウム槽8の液面のみで行
っていたために、クライオスタット11で保持する液体ヘ
リウム量が増大すると中圧タンク5の圧力が異常に低下
し、低圧ヘリウムライン4の圧力調節が不可能となって
極低温冷却装置の運転を停止せざるを得ないことがあ
る。In the conventional cryogenic cooling device having the above-described configuration and operation, since the heater 20 is controlled only by the liquid level of the liquid helium tank 8, if the amount of liquid helium held in the cryostat 11 increases, the medium pressure tank 5 There is a case where the pressure of is abnormally reduced, the pressure of the low-pressure helium line 4 cannot be adjusted, and the operation of the cryogenic cooling device must be stopped.
本発明の目的は、極低温冷凍機から圧縮機に戻される低
圧冷媒ガスの圧力制御に支障のない圧力に中圧タンク内
の常温冷媒ガスの圧力を保持するようにすることで、運
転操作を円滑、容易に行うことができる極低温冷却装置
を提供することにある。An object of the present invention is to maintain the pressure of the room temperature refrigerant gas in the intermediate pressure tank at a pressure that does not hinder the pressure control of the low pressure refrigerant gas returned from the cryogenic refrigerator to the compressor, thereby performing the operation operation. It is to provide a cryogenic cooling device that can be smoothly and easily operated.
上記目的は、極低温液化冷媒を生成する極低温冷凍機
と、該極低温冷凍機に冷媒ガスを循環供給する圧縮機
と、常温冷媒ガス保持用の中圧タンクと、前記極低温冷
凍機で生成した極低温液化冷媒を保持する液化ガス槽
と、該液化ガス槽からの極低温液化冷媒で冷却される被
冷却体と、前記液化ガス槽内の極低温液化ガスを加熱蒸
発させる液化ガス加熱装置と、前記液化ガス槽内での極
低温液化冷媒の保持量を一定量に制御する方向の演算を
行う制御演算器と、前記中圧タンク内の常温冷媒ガスの
圧力を一定圧力に制御する方向の演算を行う他の制御演
算器と、該他の制御演算器からの演算出力値と前記制御
演算器からの演算出力値とを比較演算して前記液化ガス
加熱装置に選択出力する比較演算器とを具備することに
より、達成される。The above-mentioned object is a cryogenic refrigerator that produces a cryogenic liquefied refrigerant, a compressor that circulates a refrigerant gas to the cryogenic refrigerator, a medium pressure tank for holding a refrigerant gas at room temperature, and the cryogenic refrigerator. A liquefied gas tank holding the generated cryogenic liquefied refrigerant, an object to be cooled by the cryogenic liquefied refrigerant from the liquefied gas tank, and a liquefied gas heating for heating and evaporating the cryogenic liquefied gas in the liquefied gas tank A device, a control calculator for calculating a direction for controlling the amount of cryogenic liquefied refrigerant held in the liquefied gas tank to a constant amount, and a pressure of the room temperature refrigerant gas in the medium pressure tank to a constant pressure. A comparison calculation for performing a comparison calculation of another control calculation unit that performs calculation of the direction and a calculation output value from the other control calculation unit and a calculation output value from the control calculation unit, and selectively outputting to the liquefied gas heating device. It is achieved by including a container.
液化ガス槽内に極低温液化冷媒ガスが所定量入ってい
て、液化ガス槽内の保持量を制御する制御演算器の演算
出力値が液化ガス加熱装置を作動させる方向になってい
なくても、中圧タンク内の圧力が下がれば中圧タンク内
の圧力を一定圧力に制御する他の制御演算器からの演算
出力値が比較演算器に入って、この演算出力値が液化ガ
ス加熱装置に入って、液化ガス槽内の極低温液化冷媒ガ
スを蒸発させるので、極低温冷凍機から圧縮機に戻され
る低圧冷媒ガスの圧力制御に支障のない圧力に中圧タン
ク内の常温冷却ガスの圧力を保持できる。A predetermined amount of cryogenic liquefied refrigerant gas is contained in the liquefied gas tank, even if the operation output value of the control arithmetic unit for controlling the holding amount in the liquefied gas tank is not in the direction of operating the liquefied gas heating device, If the pressure in the medium pressure tank drops, the calculation output value from another control calculation unit that controls the pressure in the medium pressure tank to a constant pressure enters the comparison calculation unit, and this calculation output value enters the liquefied gas heating device. Since the cryogenic liquefied refrigerant gas in the liquefied gas tank is evaporated, the pressure of the room temperature cooling gas in the medium pressure tank is adjusted to a pressure that does not hinder the pressure control of the low pressure refrigerant gas returned from the cryogenic refrigerator to the compressor. Can hold
液化ガス槽内の極低温液化冷媒は被冷却体の予冷および
貯液時に主として消費する。したがって、被冷却体の予
冷開始時には液化ガス槽内に最大量の極低温液化冷媒を
保持する必要があるが、定常に達した後は、液化ガス槽
内の保持極低温液化冷媒が最大量である必要はないた
め、保持量制御、例えば、液面制御の設定値を変更する
ことは可能である。但し、装置内にホールドされる冷媒
ガス量が常に一定とは限らないため、変更設定すべき液
面制御設定値もまた一定とは限らない。中圧タンクの容
量を、液化ガス槽およびクライオスタットに最大の極低
温液化冷媒量を同時に保持しても問題ないように大きく
することも考えられるが、中圧タンクが非常に大きくな
る(冷媒ガスがヘリウムの場合、常温ガスヘリウムは液
体ヘリウムの約700倍の容積となる)こと、および装置
内のホールド冷媒ガス量が常に一定とは限らないことに
よって問題は解決されない。The cryogenic liquefied refrigerant in the liquefied gas tank is mainly consumed during precooling and liquid storage of the object to be cooled. Therefore, it is necessary to hold the maximum amount of cryogenic liquefied refrigerant in the liquefied gas tank at the start of precooling of the object to be cooled, but after reaching a steady state, the cryogenic liquefied refrigerant held in the liquefied gas tank is the maximum amount. Since it is not necessary to exist, it is possible to change the set value of the holding amount control, for example, the liquid level control. However, since the amount of refrigerant gas held in the device is not always constant, the liquid level control set value to be changed and set is not always constant. It is possible to increase the capacity of the medium-pressure tank so that there is no problem even if the maximum amount of cryogenic liquefied refrigerant is held in the liquefied gas tank and the cryostat at the same time. In the case of helium, room temperature gas helium has a volume of about 700 times that of liquid helium), and the amount of hold refrigerant gas in the device is not always constant, so the problem cannot be solved.
以上の問題を解決するためには、液面制御は液化ガス槽
の最大ホールド量を設定値とする制御演算を行うと共
に、中圧タンクの圧力は低圧ガスヘリウムラインを流通
する低圧冷媒ガスの圧力制御に支障の無い圧力に保持す
るように圧力制御演算(中圧タンク圧力低下時は、例え
ば、ヒータ入力を増大させる)を行い、上記の液面制御
演算と圧力制御演算の制御出力の比較を行い、例えば、
ヒータ入力を増大させる方向のものを選択することによ
って解決することができる。In order to solve the above problems, the liquid level control performs a control calculation with the maximum hold amount of the liquefied gas tank as the set value, and the pressure of the medium pressure tank is the pressure of the low pressure refrigerant gas flowing through the low pressure gas helium line. Perform pressure control calculation (for example, increase the heater input when the medium pressure tank pressure drops) so as to maintain the pressure at which control is not hindered, and compare the control output of the above liquid level control calculation and pressure control calculation. Do, for example,
It can be solved by selecting the one that increases the heater input.
以下、本発明の一実施例を第1図により説明する。An embodiment of the present invention will be described below with reference to FIG.
第1図で、22′は、液化ガス槽である液体ヘリウム槽8
内での極低温液化冷媒である液体ヘリウムの保持量を一
定量に制御する方向の演算を行う制御演算器である液面
制御演算器、30は、中圧タンク5内の常温冷媒ガスであ
る常温ヘリウムガスの圧力を一定圧力に制御する方向に
演算する他の制御演算器、31は、液面制御演算器22′か
らの演算出力値と圧力制御演算器30からの演算出力値と
を比較演算して液化ガス加熱装置であるヒータ20に選択
出力する比較演算器である。なお、第1図で、その他第
2図と同一装置等は同一符号で示し説明を省略する。In FIG. 1, 22 'is a liquid helium tank 8 which is a liquefied gas tank.
A liquid level control calculator, which is a control calculator for performing a calculation in a direction for controlling the amount of liquid helium, which is a cryogenic liquefied refrigerant, to be controlled to a constant amount, and 30 is a room temperature refrigerant gas in the intermediate pressure tank 5. Another control calculator that calculates the pressure of the room temperature helium gas in a direction to control it to a constant pressure, 31 compares the calculation output value from the liquid level control calculator 22 'with the calculation output value from the pressure control calculator 30. It is a comparison calculator that performs a calculation and selectively outputs it to the heater 20, which is a liquefied gas heating device. In FIG. 1, the same devices and the like as those in FIG. 2 are denoted by the same reference numerals and the description thereof will be omitted.
第1図で、更に具体的には、液面制御演算器22′は第2
図の従来の極低温冷却装置と同様に液体ヘリウム槽8内
の液体ヘリウム保持量が増大するとヒータ20の入力を増
大させる方向の制御演算を行う。一方、中圧タンク5の
圧力を低圧ヘリウムライン4の圧力制御に支障のない値
以上に保持するように、圧力制御演算器30は中圧タンク
5の圧力が減少した時ヒータ20の入力を増大させる方向
の演算を行う。以上の液面制御演算器22の制御出力と、
圧力制御演算器30の制御出力とが比較演算器31に入力さ
れ、比較演算器31は、ヒータ20の入力が増大する方を選
択し、ヒータ20に出力する。In FIG. 1, more specifically, the liquid level control calculator 22 'is
Similar to the conventional cryogenic cooling device shown in the figure, when the liquid helium holding amount in the liquid helium tank 8 increases, the control calculation in the direction of increasing the input of the heater 20 is performed. On the other hand, the pressure control calculator 30 increases the input of the heater 20 when the pressure of the intermediate pressure tank 5 is decreased so that the pressure of the intermediate pressure tank 5 is maintained at a value not hindering the pressure control of the low pressure helium line 4. The calculation of the direction to be performed is performed. With the control output of the above liquid level control calculator 22,
The control output of the pressure control computing unit 30 is input to the comparison computing unit 31, and the comparison computing unit 31 selects the one in which the input of the heater 20 increases and outputs it to the heater 20.
本実施例では、次のような効果を得ることができる。In this embodiment, the following effects can be obtained.
(1) ヘリウム冷凍機から圧縮機に戻される低圧ヘリ
ウムガスの圧力制御に支障のない圧力に中圧タンク内の
常温ヘリウムガスの圧力を保持できるため、運転操作を
円滑、容易に行うことができる。(1) Since the pressure of the room temperature helium gas in the medium pressure tank can be maintained at a pressure that does not hinder the pressure control of the low pressure helium gas returned from the helium refrigerator to the compressor, the operation can be smoothly and easily performed. .
(2) 液体ヘリウム槽内に最大量の液体ヘリウムが保
持されるまでヒータで無駄に液体ヘリウムを蒸発させる
必要がないため、圧縮機での消費動力等を節減でき運転
費を低減できる。(2) Since it is not necessary to uselessly evaporate the liquid helium by the heater until the maximum amount of liquid helium is held in the liquid helium tank, it is possible to reduce power consumption in the compressor and reduce operating costs.
(3) 液体ヘリウム槽内には、一定量以上の液体ヘリ
ウムは自動的に保持されないため、装置の構成機器を適
正な容量にできる。(3) Since a certain amount or more of liquid helium is not automatically held in the liquid helium tank, it is possible to make the components of the device have an appropriate capacity.
本発明は、以上説明したように、極低温冷凍機から圧縮
機に戻される低圧冷媒ガスの圧力制御に支障のない圧力
に中圧タンク内の常温冷媒ガスの圧力を保持できるの
で、運転操作を円滑、容易に行うことができるという効
果がある。As described above, the present invention can maintain the pressure of the room temperature refrigerant gas in the medium pressure tank at a pressure that does not hinder the pressure control of the low pressure refrigerant gas returned from the cryogenic refrigerator to the compressor, so that the operation can be performed. The effect is that it can be performed smoothly and easily.
第1図は、本発明による極低温冷却装置の一実施例を示
す構成ブロック図、第2図は、従来の極低温冷却装置の
構成ブロック図である。 1……圧縮機、2……ヘリウム冷凍機、5……中圧タン
ク、8……液体ヘリウム槽、12……被冷却体、20……ヒ
ータ、22′……液面制御演算器、30……圧力制御演算
器、31……比較演算器FIG. 1 is a structural block diagram showing an embodiment of a cryogenic cooling device according to the present invention, and FIG. 2 is a structural block diagram of a conventional cryogenic cooling device. 1 ... Compressor, 2 ... Helium refrigerator, 5 ... Medium pressure tank, 8 ... Liquid helium tank, 12 ... Cooled object, 20 ... Heater, 22 '... Liquid level control calculator, 30 ...... Pressure control calculator, 31 …… Comparison calculator
───────────────────────────────────────────────────── フロントページの続き (72)発明者 河村 成人 山口県下松市大字東豊井794番地 株式会 社日立製作所笠戸工場内 (56)参考文献 特開 昭57−108557(JP,A) 特開 平1−121660(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kawamura Adult 794 Higashi Toyoi, Kudamatsu City, Yamaguchi Prefecture Inside the Kasado Plant, Hitachi Ltd. (56) Reference JP-A-57-108557 (JP, A) JP Flat 1-121660 (JP, A)
Claims (1)
と、該極低温冷凍機に冷媒ガスを循環供給する圧縮機
と、常温冷媒ガス保持用の中空タンクと、前記極低温冷
凍機で生成した極低温液化冷媒を保持する液化ガス槽
と、該液化ガス槽からの極低温液化冷媒で冷却される被
冷却体と、前記液化ガス槽内の極低温液化ガスを加熱蒸
発させる液化ガス加熱装置と、前記液化ガス槽内での極
低温液化冷媒の保持量を一定量に制御する方向の演算を
行う制御演算器と、前記中圧タンク内の常温冷媒ガスの
圧力を一定圧力に制御する方向の演算を行う他の制御演
算器と、該他の制御演算器からの演算出力値と前記制御
演算器からの演算出力値とを比較演算して前記液化ガス
加熱装置に選択出力する比較演算器とを具備したことを
特徴とする極低温冷却装置。1. A cryogenic refrigerator for producing a cryogenic liquefied refrigerant, a compressor for circulating a refrigerant gas to the cryogenic refrigerator, a hollow tank for holding a refrigerant gas at room temperature, and the cryogenic refrigerator. A liquefied gas tank holding the generated cryogenic liquefied refrigerant, an object to be cooled by the cryogenic liquefied refrigerant from the liquefied gas tank, and a liquefied gas heating for heating and evaporating the cryogenic liquefied gas in the liquefied gas tank A device, a control calculator for calculating a direction for controlling the amount of cryogenic liquefied refrigerant held in the liquefied gas tank to a constant amount, and a pressure of the room temperature refrigerant gas in the medium pressure tank to a constant pressure. A comparison calculation for performing a comparison calculation of another control calculation unit that performs calculation of the direction and a calculation output value from the other control calculation unit and a calculation output value from the control calculation unit, and selectively outputting to the liquefied gas heating device. And a cryogenic cooling device characterized by comprising: .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30753487A JPH07117307B2 (en) | 1987-12-07 | 1987-12-07 | Cryogenic cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30753487A JPH07117307B2 (en) | 1987-12-07 | 1987-12-07 | Cryogenic cooling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01150756A JPH01150756A (en) | 1989-06-13 |
| JPH07117307B2 true JPH07117307B2 (en) | 1995-12-18 |
Family
ID=17970249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30753487A Expired - Lifetime JPH07117307B2 (en) | 1987-12-07 | 1987-12-07 | Cryogenic cooling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07117307B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5284134B2 (en) * | 2009-02-13 | 2013-09-11 | 株式会社神戸製鋼所 | Pressurized superfluid helium cryostat and control method thereof |
| FR2963090B1 (en) * | 2010-07-20 | 2012-08-17 | Commissariat Energie Atomique | METHOD FOR ESTIMATING THE THERMAL LOAD IMPOSED ON A CRYOGENIC REFRIGERATOR, ASSOCIATED PROGRAM PRODUCT AND METHOD FOR CONTROLLING THE REFRIGERATOR |
-
1987
- 1987-12-07 JP JP30753487A patent/JPH07117307B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01150756A (en) | 1989-06-13 |
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