JPH07117650B2 - microscope - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope capable of switching between bright field illumination and dark field illumination.

(Prior Art) Conventionally, there is known a bright-field illumination device having an electric field diaphragm member that controls opening and closing of a field diaphragm with an electric signal, and further, an optical system between the electric field diaphragm member and an object to be inspected. 2. Description of the Related Art A microscope illumination device is known in which a dark field illumination device can be configured by switching members.

An example of an epi-illumination microscope having such an illuminating device will be described with reference to FIGS. 3 and 4. As shown in FIG. 3, the light source 1, the condenser lens 2, the aperture stop member 3, the electric field stop member 4, The 1-relay lens 5, the second relay lens 6, the half mirror 7, and the bright-field illumination objective lens 8 constitute a bright-field illumination device, and the reflected light from the object 9 to be inspected illuminated by this illumination device is the objective lens. 8, it passes through the half mirror 7 and enters an eyepiece lens (not shown).

Now, in order to switch from the bright field illumination to the dark field illumination, the dark field illumination command key of the keyboard (not shown) is pressed and the generated illumination switching command signal is input to the control device (not shown). As a result, the control device causes the half mirror 7 and the second relay lens 6 arranged between the electric field diaphragm member 4 and the object 9 of the bright field illumination device in FIG. A ring-shaped reflection mirror 10 and a central shading plate 11 as shown in
The objective lens 8 may be switched to the dark-field illuminating objective lens 13 by rotating the electric revolver 12.

The electric field stop member 4 of the bright-field illumination device includes a field stop member 4a, a stop ring 4b, and a first motor for rotating the stop ring 4b.
4c, and a worm gear is supported at one end of the first motor 4c, and the worm gear meshes with a tooth pattern formed on a part of the outer peripheral surface of the aperture ring 4b. For that purpose first
When the motor 4c rotates, the diaphragm ring 4b rotates via the worm gear, and the field diaphragm member 4a is opened and closed. The electric revolver 12 has a revolver 12a and a second motor 12b, and a worm gear is supported at one end of the second motor 12b, and the worm gear is formed on the lower surface of the revolver 12a. It meshes with. Therefore, when the second motor 12b rotates, the revolver 1 passes through the worm gear.
2a rotates and the objective lens is switched.

(Problems to be Solved by the Present Invention) In this type of microscope, when the dark field illumination device is formed as described above, the dark field illumination objective lens 13 is replaced with a dark field illumination objective lens of another magnification. When switching to, the ring-shaped dark-field illumination light beam 14 is reflected upward by the metal object or the like of the objective lens 13 being switched, and this reflected light beam enters the observer's eye through an eyepiece lens (not shown). However, there is a drawback in that it is extremely uncomfortable for an observer who is performing dark-field observation.

The same applies to the case of transmitted illumination. In the case of transmitted illumination, the illumination light beam directly passes through the observer's eye because the objective lens in the middle of switching changes the region of the illumination light beam that has passed through the object to be examined. May be incident on.

Therefore, an object of the present invention is to solve the above drawbacks and to obtain a microscope in which the illumination light beam does not directly enter the eye even when the objective lens is switched during dark field illumination.

(Means for Solving the Problems) In order to achieve the above object, the present invention provides an electric field diaphragm member (4) whose diaphragm aperture is electrically controlled.
a, 4b, 4c) optical members (6, 7, between the field stop member (4) and the object to be inspected (9) of the bright field illumination device.
A microscope for observing an object (9) to be inspected through an objective lens (13) attached to a motorized objective lens switching member (12a, 12b) while forming a dark field illumination device by switching 8). Commanding means (1) that has an operating member (15a, 15b) and outputs an objective lens switching signal by operating the member (15a, 15b).
5) and; when the dark field illumination device is formed, in response to the output of the objective lens switching signal from the command means (15), electric power is supplied until the dark field illumination luminous flux (14) is cut off. A control signal for narrowing down the visual field stop members (4a, 4b, 4c) is output to the electric field stop members (4a, 4b, 4c), and a control signal for switching the objective lens (13) after the narrowing down is electrically driven. Output to the objective lens switching member (12a, 12b), and further after the objective lens (13) is switched, a control signal for fully opening the electric field diaphragm member (4a, 4b, 4c) is used. It is a technical requirement that control means (16) for outputting to the diaphragm members (4a, 4b, 4c) and; are provided.

(Operation) As described above, the control signal for narrowing down the electric field diaphragm members (4a, 4b, 4c) is applied to the electric field diaphragm member (4a) until the control means (16) blocks the dark field illumination luminous flux (14). , 4b, 4
The control signal for switching the objective lens (13) is output to the electric objective lens switching member (12a, 12b) after being narrowed down, so that the illumination luminous flux is changed even when the objective lens (13) is switched. It is possible to obtain the effect that does not enter the observer's eye.

(Example) An example of the present invention will be described with reference to FIG.

In FIG. 1, members having the same reference numerals as the members in FIG. 3 indicate the same members.

In FIG. 1, the electric revolver 12 is used as a kind of electric objective lens switching member. The electric field stop member 4 is fully opened when the dark field illumination device is configured. The keyboard 15 has operating members, that is, keys 15a to 15d, and is used as command means for outputting signals by pressing the keys 15a to 15d. Here, the key 15a is for specifying the right rotation of the electric revolver 12, and the key 15b is for specifying the left rotation of the electric revolver 12, both of which are used to generate an objective lens switching signal. The key 15c is for bright field illumination command, and the key 15d is for dark field illumination command. In order to input each signal output by pressing each key 15a to 15d to the control device 16, the keyboard 15
Is electrically connected to the control device 16. The control device 16 outputs a control signal for switching the objective lens to the second motor 12b of the electric revolver 12, and a control signal for the diaphragm opening of the electric field stop member 4 to the first field of the electric field stop member 4. Output to motor 4b. However, among the keys 15a to 15d of the keyboard 15, the objective lens switching signal generation key 15
When an objective lens switching signal is input to the control device 16 by pressing a or 15b, the control device 16 sends a control signal for narrowing down the field stop member 4a until the dark field illumination luminous flux 14 is cut off. 4 to the first motor 4b to output a control signal for switching the objective lens 13 after the aperture has been narrowed down to the second motor 12b of the electric revolver 12, and after switching the objective lens, the field stop member 4a is fully opened. The control signal for turning on the first field of the electric field stop member 4.
It is designed to output to the motor 4c.

Next, the operation of the embodiment shown in FIG. 1 will be described. By pressing the objective lens switching signal generating key 15a (or the key 15b) of the keyboard 15, an objective lens switching signal is generated, and the signal is input to the control device 16. As a result, the control device 16 inputs the control signal for narrowing down the field stop member 4a to the first motor 4b of the electric field stop member 4 until the dark field illumination light beam 14 is blocked. The first motor 4c rotates the diaphragm ring 4b to narrow down the field diaphragm member 4a in response to the input of the diaphragm control signal. Here, the control device 16 is the first motor
4c is a dark-field illumination luminous flux after outputting the aperture control signal.
The time until the field diaphragm member 4a is narrowed down to the extent that 14 is blocked is set in advance. Therefore, when a predetermined time has elapsed after the control means 16 outputs the aperture control signal to the first motor 4c, the aperture member 4a causes the dark field illumination light flux 14
Is narrowed down so that the
The control device 16 outputs a control signal for switching the objective lens 13 to the second motor 12b of the electric revolver 12. The second motor 12b rotates the revolver 12a in response to the input of the control signal. At this time, when the key 15a is pressed, it is rotated clockwise, and when the key 15b is pressed, it is rotated counterclockwise. Therefore, the objective lens 13 is switched to another objective lens in the optical path and another objective lens is arranged in the optical path. After that, the control device 16 outputs a diaphragm full-open signal for fully opening the diaphragm opening of the field diaphragm member 4a to the first motor 4c. When the first motor 4c receives the diaphragm full-open signal, the diaphragm ring 4b is reversely rotated to fully open the field diaphragm member 4a.

A microcomputer can be used as the control device 16 in FIG. 1, and a flow chart in that case is shown in FIG. 2, and each step 101 to 105 will be described below.

Step 101 When the objective lens switching signal is input from the keyboard 15, the process proceeds to the next step 102. If no input has been made, the process returns to the start.

Step 102 The control signal for narrowing down the field stop member 4a is output to the first motor 4c of the electric field stop member 4.

Step 103 Wait until the field stop member 4a is closed.

Step 104 The control signal for switching the objective lens 13 is output to the second motor 12b of the electric revolver 12.

Step 105 The control signal for fully opening the field diaphragm member 4a of the electric field diaphragm member 4 is output to the first motor 4c. After that, return to the drawing.

According to the above-described embodiments, the electric revolver is used as the electric objective lens switching member. However, the present invention is not limited to this, and the slide movable objective lens switching member and the second motor are different electric revolvers. The second motor may be configured to slide the objective lens switching member of the slide movement type according to the objective lens switching signal.

Further, although the case of the epi-illumination is described in the above-mentioned embodiment, the illumination light flux to the object to be inspected can be blocked by the diaphragm of the electric field diaphragm member in response to the diaphragm control signal of the control device even in the case of transmitted illumination. Needless to say.

(Effects of the Invention) According to the present invention described above, the control signal for narrowing down the electric field stop member is output to the electric field stop member until the control unit blocks the dark field illumination light flux, thereby controlling the electric field stop member. Since it is fully closed, the dark-field illumination luminous flux is blocked by this, and even after switching the objective lens by outputting the control signal for switching the objective lens after narrowing down and switching the objective lens, the dark-field illumination luminous flux is observed. It is possible to obtain a microscope that does not enter the human eye.

[Brief description of drawings]

FIG. 1 is a schematic front view of a microscope according to an embodiment of the present invention. FIG. 2 is a flow chart when the control device 16 in FIG. 1 is constituted by a microcomputer. FIG. 3 is a schematic front view when a bright field illumination device is formed in a conventional microscope. FIG. 4 is a schematic front view when a dark field illumination device is formed in a conventional microscope. [Explanation of symbols of main parts] 4 …… Electric field stop member 10 …… Ring-shaped reflecting mirror 11 …… Central light shielding plate 12 …… Motorized objective lens switching member 13 …… Dark field illumination objective lens 14 …… Dark field illumination luminous flux 15 …… keyboard 16 …… control device

Claims (1)

[Claims] 1. A dark field illuminator by switching an optical member between the electric field iris member and an object to be inspected in a bright field illuminator having an electric field iris member whose aperture opening is electrically controlled. And a microscope for observing an object to be inspected through an objective lens attached to an electric objective lens switching member, which has an operating member and outputs an objective lens switching signal in accordance with the operation of the member. Commanding means; a control signal for narrowing down the field stop member until the dark field illumination luminous flux is blocked in response to an objective lens switching signal output from the commanding means when the dark field illumination device is formed. Is output to the electric field stop member, a control signal for switching the objective lens is output to the electric objective lens switching member after the aperture is narrowed down, and the objective lens is switched. The field stop control means for outputting said electric field stop member a control signal for the member is fully opened and after; a microscope characterized by comprising.