JPH07118073B2 - Magnetic disk drive with thin-film magnetic head - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slider material of a magnetic head for a magnetic disk storage device, and more particularly to a thin film magnetic head provided on the slider for its slidability with respect to the magnetic disk. The present invention relates to a mounted magnetic disk device.

[Conventional technology]

In the field of magnetic disk storage devices, in order to meet the ever-increasing demand for higher recording density, the gap between the magnetic head and the magnetic disk (flying height) is becoming narrower, and thin film magnetic heads and thin film magnetic disks are being adopted. Attention has been paid.

As the flying height decreases (0.1 to 0.3 μm), the chances of the magnetic head slider and the magnetic disk making contact and sliding further increase. Further, when the thin film magnetic disk is used, since the magnetic layer of the disk is as thin as 0.05 to 0.1 .mu.m, the allowable damage caused by contact and sliding becomes extremely small. Therefore, in order to minimize damage to the magnetic disk and to perform stable reading and writing of recording over a long period of time, it is becoming increasingly important for the magnetic head slider to have good slidability with the magnetic disk. There is.

As a conventional thin film magnetic head slider material, Al ₂ O ₃ / Ti disclosed in Japanese Patent Publication No. 58-5470 is representative.
There is a C composite sintered body. Although this slider material is an excellent material for forming a thin film element, it is not always satisfactory in terms of slidability with a magnetic disk. Therefore, in order to improve the slidability with respect to the magnetic disk, for example, a SiC / WSi ₂ / Si composite sintered body disclosed in Japanese Patent Application Laid-Open No. 58-41467 has been proposed. This material has improved slidability with a magnetic disk due to the addition of a small amount of WSi ₂ and Si. However, since SiC is the main material, the coefficient of thermal expansion is small, and there are the following problems when it is used as a current thin film element forming material. That is, since the thin film element is obtained by laminating the Al ₂ O ₃ protective film and the thin film magnetic circuit at high temperature, the coefficient of thermal expansion is Al.
_A slider material such as SiC which is considerably smaller than ₂ O ₃ has a problem that the thin film element portion and the slider portion are separated from each other. In addition, magnetic materials such as permalloy that are commonly used in thin film magnetic circuits generally have a coefficient of thermal expansion greater than that of Al ₂ O ₃ .
When the slider material having a small coefficient of thermal expansion is used, there is a problem that the magnetic characteristics of the magnetic material are impaired due to thermal strain.

[Problems to be solved by the invention]

An object of the present invention is to solve the above problems and to provide a thin film magnetic head slider material which has good slidability with a magnetic disk and is suitable for forming a thin film magnetic head, thereby providing a highly reliable magnetic film. To provide a disk device.

[Means for solving problems]

The present invention relates to a magnetic disk for recording information, a rotating means for rotating the magnetic disk, a thin film magnetic head provided on a slider for writing and reading information, and a magnetic disk for supporting the thin film magnetic head. in a magnetic disk apparatus and a means for changing the position relative to the disk, the slider is _{MoSi 2, WSi 2, TaSi 2} , NbSi 2, consisting of one or more selected from the group of ZrSi ₂ metal silicide sintered A magnetic disk device equipped with a thin-film magnetic head characterized by comprising a body.

[Action]

Since metal silicides generally have a lubricating effect themselves,
A sintered body made of a metal silicide has good slidability with a magnetic disk and is unlikely to damage the magnetic disk. Further, in order to further reduce the damage given to the magnetic disk, it is better that the hardness of the sintered body is smaller, and preferably the Vickers hardness is
1500Hv or less is good. Further, since the sintered body is suitable for forming thin film elements, the coefficient of thermal expansion must be close to Al ₂ O ₃ . In order that the formed thin film element portion does not peel off, the thermal expansion coefficient of the sintered body must be 6 × 10 ⁻⁶ ° C. ⁻¹ or more and 10 × 10 ⁻⁶ ° C. ⁻¹ or less.

A single or mixed metal silicide sintered body having a coefficient of thermal expansion of 6 × 10 ^-6 ℃ ^-1 or more and 10 × 10 ^-6 ℃ ^-1 or less and preferably a hardness of 1500 Hv or less is slidable with a magnetic disk. Is excellent for forming thin film elements, but among metal silicides, MoSi ₂ , WSi ₂ , TaSi ₂ , N
bSi ₂ , ZrSi _2, etc. themselves satisfy the above conditions of thermal expansion coefficient and hardness. Therefore, MoSi ₂ , WSi ₂ , TaSi ₂ , NbSi ₂ , Z
A sintered body composed of one kind or a mixture of two or more kinds of rSi _{2 and the} like is preferable as a slider material because it can achieve microscopic uniformity of characteristics.

〔Example〕

 Examples of the present invention will be described below.

Example 1 Powders of MoSi ₂ , WSi ₂ , TaSi ₂ , NbSi ₂ , ZrSi ₂ and TiSi were ball-milled for 50 hours to obtain a powder particle size of 1 μm or less. The obtained powder was pressed and molded in a mold at a pressure of 1000 kg / cm ² , and then hot-press fired for 1 hour in a vacuum atmosphere at a pressing pressure of 500 kg / cm ² . The firing temperature is WSi ₂ , TaSi ₂ , MoSi ₂
1800 ℃, 1500 ℃ for NbSi ₂ , 1300 for ZrSi ₂ and TiSi
℃ was made.

The coefficient of thermal expansion of the obtained sintered body was measured from room temperature to 450 ° C. In addition, Vickers hardness was measured with a load of 300 g. Table 1 shows the measurement results. Any coefficient of thermal expansion is 6 × 10 ^-6
The temperature was ℃ ^-1 or more and 1010 ^-6 ℃ ^-1 or less. Hardness is 1500 Hv or less in all cases except TiSi, which is a preferable value.

Also, a plate material with a surface dimension of 50 x 50 mm and a thickness of 4 mm is cut out from the obtained sintered body, the surface is lap-polished, and then an Al ₂ O ₃ sputtering film with a thickness of about 30 μm is formed on the surface at 450 ° C I just did
No peeling occurred in either case. From this, it is understood that the present sintered body is suitable for forming a thin film element.

Using the sintered body obtained above, the slider shown in FIG. 1 was processed. The slidability between the slider and the magnetic disk was evaluated by the following method.

First, the slider was held by a gimbal spring and held on the magnetic disk surface. Rotate the magnetic disk at a rotational speed that makes the peripheral speed at the slider position 40 m / s, and move the slider to about 0.3
μm was levitated. Next, 54 Hz vibration was applied to the gimbal spring to forcibly connect and contact the slider and magnetic disk,
The time until the magnetic layer of the magnetic disk was abraded by the contact and the bare metal was exposed was measured. Magnetic disk is magnetic powder
A coating type disk was used in which an organic resin in which an Al ₂ O ₃ powder filler was kneaded was coated as a magnetic layer on the surface of an Al base metal.
As a comparative example, a slider test made of an Al ₂ O ₃ / TiC composite sintered body was also tested.

Table 2 shows the measurement results. Therefore, the products of the present invention are at least 4 times more excellent in slidability with a magnetic disk than the conventional Al ₂ O ₃ / TiC composite sintered body sliders, and particularly MoSi ₂ , WSi having a hardness of 1500 Hv or less. _It can be seen that the slider made of ₂ , TaSi ₂ , NbSi ₂ , ZrSi ₂ sintered body is more than 6 times superior.

Therefore, the slider provided with the thin film magnetic head according to the present invention can provide a long-life magnetic disk device.

[Advantages of the Invention] According to the present invention, it is possible to obtain a slider excellent in slidability with a magnetic disk and suitable for forming a thin film magnetic head, and thus to obtain a magnetic disk recording device having a long life and a high recording density. You can

[Brief description of drawings]

FIG. 1 is a perspective view of a slider according to an embodiment of the present invention. 1 ... Slider, 2 ... Thin film element formation surface, 3 ... Magnetic disk sliding surface.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor San-Kichi ▼ Tadahiko 4026 Kuji Town, Hitachi City, Ibaraki Prefecture Hitachi Research Laboratory, Hitachi Ltd. (72) Masaki Oura 2880, Kozu, Odawara City, Kanagawa Stock Company Hitachi, Ltd. Odawara Factory (72) Inventor, Kanike Kanunori 2880, Kozu, Odawara City, Kanagawa Stock Company, Hitachi Ltd. Odawara Factory (56) Reference JP-A-58-41467 (JP, A)

Claims (1)

[Claims] 1. A magnetic disk for recording information, rotating means for rotating the magnetic disk, and a thin film magnetic head provided on a slider for writing and reading information.
Supporting the thin film magnetic head, the magnetic disk drive and a means for changing the position relative to the magnetic disk, the slider is selected from _{MoSi 2, WSi 2, TaSi 2} , NbSi 2, the group of ZrSi ₂ A magnetic disk device equipped with a thin-film magnetic head, characterized in that it is made of one or more metal silicide sintered bodies.