JPH07118626B2 - Oscillator - Google Patents
OscillatorInfo
- Publication number
- JPH07118626B2 JPH07118626B2 JP1290758A JP29075889A JPH07118626B2 JP H07118626 B2 JPH07118626 B2 JP H07118626B2 JP 1290758 A JP1290758 A JP 1290758A JP 29075889 A JP29075889 A JP 29075889A JP H07118626 B2 JPH07118626 B2 JP H07118626B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- piezoelectric element
- vibrator
- piezoelectric elements
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007769 metal material Substances 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910000942 Elinvar Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
Landscapes
- Gyroscopes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） この発明は振動子に関し、特に恒弾性金属材料からなる
振動体に圧電素子が接着され、たとえば振動ジャイロな
どのように振動を利用した装置に用いられる、振動子に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator, and more particularly to a device using vibration such as a vibration gyro in which a piezoelectric element is bonded to a vibration body made of a constant elastic metal material. Used oscillator.
（従来技術） 第２図は従来の振動子の一例を示す斜視図である。この
振動子１は、エリンバなどの恒弾性金属材料からなる正
３角柱状の振動体２含み、振動体２の３つの側面の中央
には、短冊状の圧電素子3a,3bおよび3cが、それぞれ、
接着剤で接着されている。この場合、接着剤としてエポ
キシ系の接着剤が用いられ、その接着剤を約180〜200℃
の温度で硬化することによって、それぞれの圧電素子3a
〜3cが振動体２に接着される。(Prior Art) FIG. 2 is a perspective view showing an example of a conventional vibrator. This vibrator 1 includes a regular triangular prism vibrating body 2 made of a constant elastic metal material such as elinvar, and strip-shaped piezoelectric elements 3a, 3b and 3c are respectively provided at the centers of three side surfaces of the vibrating body 2. ,
It is glued together. In this case, an epoxy-based adhesive is used as the adhesive, and the adhesive is about 180-200 ° C.
By hardening at each temperature, each piezoelectric element 3a
~ 3c is bonded to the vibrating body 2.
（発明が解決しようとする課題） ところが、上述の振動子１では、恒弾性金属材料からな
る振動体２の熱膨張係数が約８〜10×10-6/℃であり、
圧電素子3a〜3cの熱膨張係数が約２〜４×10-6/℃であ
って、それらの熱膨張係数の違いから、振動体の加工精
度や圧電素子の形状の誤差，接着位置のずれなどによっ
て、圧電素子を接着し常温に戻した場合、振動体２の長
手方向の中央部分にそりやねじれなどの歪が生じてしま
う。この歪は、周囲の温度変化によって変化する。その
ため、この振動子は、温度変化によってドリフトなどの
特性が変化し不安定である。(Problems to be Solved by the Invention) However, in the vibrator 1 described above, the thermal expansion coefficient of the vibrating body 2 made of a constant elastic metal material is about 8 to 10 × 10 −6 / ° C.,
The coefficient of thermal expansion of the piezoelectric elements 3a to 3c is about 2 to 4 × 10 -6 / ° C. Due to the difference in the coefficient of thermal expansion, the processing accuracy of the vibrating body, the shape error of the piezoelectric element, and the displacement of the bonding position As a result, when the piezoelectric element is bonded and returned to room temperature, distortion such as warping or twisting occurs in the central portion of the vibrating body 2 in the longitudinal direction. This strain changes with changes in ambient temperature. Therefore, this oscillator is unstable because characteristics such as drift change due to temperature changes.
それゆえに、この発明の主たる目的は、温度変化に対し
て特性が安定である、振動子を提供することである。Therefore, a main object of the present invention is to provide a vibrator whose characteristics are stable against temperature changes.
（課題を解決するための手段） この発明は、甲男性金属材料からなる多角柱状の振動体
と、この振動体の少なくとも３つの側面に接着されるそ
れぞれの圧電素子とを含み、振動体の長手方向にみて、
１つの圧電素子と他の圧電素子との少なくとも一端をず
れた位置に形成した、振動子である。(Means for Solving the Problem) The present invention includes a vibrating body having a polygonal columnar shape made of an instep metal material, and piezoelectric elements adhered to at least three side surfaces of the vibrating body. Looking in the direction
It is a vibrator in which at least one end of one piezoelectric element and another piezoelectric element are formed at positions displaced from each other.
なお、振動体の画手方向にみて、１つの圧電素子と他の
圧電素子との少なくとも一端をずれた位置に形成するた
めには、その１つの圧電素子と他の圧電素子との振動体
の長手方向における長さを異ならせてもよいし、あるい
は、それらの圧電素子の長さを同じに形成し、かつ振動
体の長手方向において１つの圧電素子を他の圧電素子か
らずらして接着してもよい。In addition, in order to form at least one end of one piezoelectric element and another piezoelectric element at a position displaced from each other as viewed in the direction of the vibrator, in order to form one piezoelectric element and another piezoelectric element, The lengths in the longitudinal direction may be different, or the piezoelectric elements may be formed to have the same length, and one piezoelectric element may be displaced from the other piezoelectric element in the longitudinal direction of the vibrating body and bonded. Good.
（作用） この振動子では、温度変化によって、１つの圧電素子が
接着されている面と略直交する方向に、振動体が曲が
る。すなわち、振動体と圧電素子との熱膨張係数の違い
によって生じるそりやねじれなどの歪は、一方向に方向
付けられて、他の方向の歪が緩和される。(Operation) In this vibrator, the vibrating body bends in a direction substantially orthogonal to the surface to which one piezoelectric element is bonded due to temperature change. That is, the strain such as warpage or twist caused by the difference in thermal expansion coefficient between the vibrating body and the piezoelectric element is directed in one direction, and the strain in the other direction is relaxed.
（発明の効果） この発明によれば、温度変化によって生じる歪が一方向
が方向付けられて、他の方向の歪が緩和されるので、温
度変化によるドリフトなどの特性が改善される。(Effect of the Invention) According to the present invention, the strain caused by the temperature change is directed in one direction and the strain in the other direction is relaxed, so that the characteristics such as drift due to the temperature change are improved.
この発明の上述の目的，その他の目的，特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of the embodiments with reference to the drawings.
（実施例） 第1A図はこの発明の一実施例を示す平面図であり、第1B
図はその側面図であり、第1C図は第1B図の線IC−ICにお
ける断面図である。(Embodiment) FIG. 1A is a plan view showing an embodiment of the present invention.
The drawing is a side view thereof, and FIG. 1C is a sectional view taken along line IC-IC of FIG. 1B.
この振動子10は、たとえばエリンバなどの恒弾性金属材
料からなるたとえば正３角柱状の振動体12を含む。The vibrator 10 includes a vibrating body 12 made of, for example, a constant elastic metal material such as elinvar and having a regular triangular prism shape.
この振動体12の３つの側面の中央には、それぞれ、圧電
素子14a,14bおよび14cが、たとえばエポキシ樹脂系の接
着剤を約180〜200℃で硬化することによって、接着され
る。すなわち、圧電素子14a,14bおよび14cは、それぞ
れ、圧電層16a,16bおよび16cの両主面に電極18a,18bお
よび18cと電極20a,20bおよび20cとをそれぞれ形成した
ものであり、一方の電極18a〜18cが振動体12に接着され
る。Piezoelectric elements 14a, 14b and 14c are adhered to the centers of the three side surfaces of the vibrating body 12 by curing an epoxy resin adhesive at about 180 to 200 ° C., respectively. That is, the piezoelectric elements 14a, 14b and 14c are electrodes 18a, 18b and 18c and electrodes 20a, 20b and 20c respectively formed on both main surfaces of the piezoelectric layers 16a, 16b and 16c, respectively. 18a to 18c are bonded to the vibrating body 12.
また、この実施例では、特に、１つの圧電素子14aが、
他の２つの圧電素子14bおよび14cと比べて、振動体12の
長手方向における長さが短く形成されている。In addition, in this embodiment, in particular, one piezoelectric element 14a is
The vibrating body 12 is formed to have a shorter length in the longitudinal direction than the other two piezoelectric elements 14b and 14c.
したがって、この振動子10では、圧電素子14a〜14cを振
動体12に接着したあと常温に戻せば、特に第1B図の１点
鎖線で示す状態から実線で示す状態に曲がり、圧電素子
14aが接着されている面は内側に湾曲し、他の圧電素子1
4bおよび14cが接着されている面は略対称に変形する。
この変形の度合は周囲の温度変化によって変わるが、圧
電素子14aが接着されている面が特に大きく変形するた
め、圧電素子14bおよび14cが接着されている面は、常に
略対称に変形する。そのため、この振動子10では、たと
えば、圧電素子14aを帰還用あるいは駆動用として用
い、かつ他の圧電素子14bおよびら14cを駆動用あるいは
帰還用として用いれば、温度変化に対して振動の特性が
あまり変わらない。すなわち、この振動子10では、温度
変化に対してドリフトなどの特性がよい。Therefore, in this vibrator 10, when the piezoelectric elements 14a to 14c are bonded to the vibrating body 12 and then returned to room temperature, the piezoelectric element bends from the state shown by the one-dot chain line in FIG. 1B to the state shown by the solid line.
The surface to which 14a is bonded is curved inward, and the other piezoelectric element 1
The surfaces to which 4b and 14c are bonded are deformed substantially symmetrically.
Although the degree of this deformation changes depending on the ambient temperature change, the surface to which the piezoelectric element 14a is adhered is deformed to a large extent, so that the surface to which the piezoelectric elements 14b and 14c are adhered is always deformed substantially symmetrically. Therefore, in this vibrator 10, for example, if the piezoelectric element 14a is used for feedback or driving and the other piezoelectric elements 14b and 14c are used for driving or feedback, the vibration characteristic with respect to temperature change is obtained. It doesn't change much. That is, the oscillator 10 has good characteristics such as drift with respect to temperature changes.
なお、この振動子10を振動ジャイロに用いるためには、
駆動用あるいは帰還用として用いられる圧電素子14bお
よび14c間に生じる電圧を測定すればよい。なぜなら、
圧電素子14bおよび14c間に生じる電圧は、この振動子10
をその軸の中心として回転した場合、その回転角速度に
応じて変化するからである。In addition, in order to use this vibrator 10 in a vibration gyro,
The voltage generated between the piezoelectric elements 14b and 14c used for driving or returning may be measured. Because
The voltage generated between the piezoelectric elements 14b and 14c is
This is because when is rotated about the axis of the axis, it changes according to the angular velocity of rotation.
上述の実施例では、振動体の長手方向にみて、１つの圧
電素子を他の圧電素子より短く形成したが、逆に、１つ
の圧電素子の他の圧電素子より長く形成してもよい。こ
の場合、温度変化によって振動子の変形する方向は、上
述の実施例と逆になるだけである。あるいは、それらの
圧電素子を同じ大きさに形成し、振動体の長手方向にお
いて１つの圧電素子を他の圧電素子からずらして接着し
てもよい。In the above-described embodiment, one piezoelectric element is formed shorter than the other piezoelectric elements as viewed in the longitudinal direction of the vibrating body. However, conversely, one piezoelectric element may be formed longer than the other piezoelectric elements. In this case, the direction in which the vibrator deforms due to the temperature change is only opposite to that in the above-described embodiment. Alternatively, these piezoelectric elements may be formed to have the same size, and one piezoelectric element may be displaced from the other piezoelectric elements in the longitudinal direction of the vibrating body and bonded.
また、上述の実施例では、振動体が正３角柱状に形成さ
れているが、振動体は他の多角柱状に形成されてもよ
い。この場合、振動体の少なくとも３つの側面に圧電素
子を接着し、振動体の長手方向にみて１つの圧電素子と
他の圧電素子との少なくとも一端をずれた位置に形成す
ればよい。In addition, although the vibrating body is formed in a regular triangular prism shape in the above-described embodiments, the vibrating body may be formed in another polygonal prism shape. In this case, piezoelectric elements may be bonded to at least three side surfaces of the vibrating body, and at least one end of one piezoelectric element and the other piezoelectric element may be formed at positions displaced from each other when viewed in the longitudinal direction of the vibrating body.
第1A図はこの発明の一実施例を示す平面図であり、第1B
図はその側面図であり、第1C図は第1B図の線IC−ICにお
ける断面図である。 第２図は従来の振動子を示す斜視図である。 図において、10は振動子、12は振動体、14a,14bおよび1
4cは圧電素子を示す。FIG. 1A is a plan view showing an embodiment of the present invention, and FIG.
The drawing is a side view thereof, and FIG. 1C is a sectional view taken along line IC-IC of FIG. 1B. FIG. 2 is a perspective view showing a conventional vibrator. In the figure, 10 is a vibrator, 12 is a vibrating body, 14a, 14b and 1
Reference numeral 4c indicates a piezoelectric element.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 森下 好子 京都府長岡京市天神２丁目26番10号 株式 会社村田製作所内 (56)参考文献 特開 昭54−127259（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshiko Morishita 2-26-10 Tenjin Tenjin, Nagaokakyo-shi, Kyoto Inside Murata Manufacturing Co., Ltd. (56) Reference JP-A-54-127259 (JP, A)
Claims (1)
体、および 前記振動体の少なくとも３つの側面に接着されるそれぞ
れの圧電素子を含み、 前記振動体の長手方向にみて、１つの前記圧電素子と他
の前記圧電素子との少なくとも一端をずれた位置に形成
した、振動子。1. A polygonal prism vibrating body made of a constant elastic metal material, and piezoelectric elements bonded to at least three side surfaces of the vibrating body, wherein one of the piezoelectric elements is seen in a longitudinal direction of the vibrating body. A vibrator, wherein at least one end of the piezoelectric element and the other piezoelectric element are formed at positions displaced from each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1290758A JPH07118626B2 (en) | 1989-11-07 | 1989-11-07 | Oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1290758A JPH07118626B2 (en) | 1989-11-07 | 1989-11-07 | Oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03150915A JPH03150915A (en) | 1991-06-27 |
| JPH07118626B2 true JPH07118626B2 (en) | 1995-12-18 |
Family
ID=17760153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1290758A Expired - Lifetime JPH07118626B2 (en) | 1989-11-07 | 1989-11-07 | Oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07118626B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3386320B2 (en) * | 1996-10-01 | 2003-03-17 | 株式会社村田製作所 | Temperature characteristics adjustment method of vibrating gyroscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54127259A (en) * | 1978-03-27 | 1979-10-03 | Seiko Instr & Electronics Ltd | Mechanical filter |
-
1989
- 1989-11-07 JP JP1290758A patent/JPH07118626B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03150915A (en) | 1991-06-27 |
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