JPH07120613B2 - Method for manufacturing solid electrolytic capacitor - Google Patents
Method for manufacturing solid electrolytic capacitorInfo
- Publication number
- JPH07120613B2 JPH07120613B2 JP14098987A JP14098987A JPH07120613B2 JP H07120613 B2 JPH07120613 B2 JP H07120613B2 JP 14098987 A JP14098987 A JP 14098987A JP 14098987 A JP14098987 A JP 14098987A JP H07120613 B2 JPH07120613 B2 JP H07120613B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- lead
- electrolytic capacitor
- solid electrolytic
- lead dioxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003990 capacitor Substances 0.000 title claims description 14
- 239000007787 solid Substances 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 title description 13
- YADSGOSSYOOKMP-UHFFFAOYSA-N dioxolead Chemical compound O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 claims description 54
- 239000000126 substance Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000007784 solid electrolyte Substances 0.000 description 15
- 239000011888 foil Substances 0.000 description 12
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000002848 electrochemical method Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229940046892 lead acetate Drugs 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 2
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 2
- MIVBAHRSNUNMPP-UHFFFAOYSA-N manganese(2+);dinitrate Chemical compound [Mn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MIVBAHRSNUNMPP-UHFFFAOYSA-N 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- ZASWJUOMEGBQCQ-UHFFFAOYSA-L dibromolead Chemical compound Br[Pb]Br ZASWJUOMEGBQCQ-UHFFFAOYSA-L 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- -1 lead borofluoride Chemical class 0.000 description 1
- RVPVRDXYQKGNMQ-UHFFFAOYSA-N lead(2+) Chemical compound [Pb+2] RVPVRDXYQKGNMQ-UHFFFAOYSA-N 0.000 description 1
- HWSZZLVAJGOAAY-UHFFFAOYSA-L lead(II) chloride Chemical compound Cl[Pb]Cl HWSZZLVAJGOAAY-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/022—Electrolytes; Absorbents
- H01G9/025—Solid electrolytes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electric Double-Layer Capacitors Or The Like (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
この発明は二酸化鉛を電界質に用いた固体電解コンデン
サの改良に関する。The present invention relates to an improvement of a solid electrolytic capacitor using lead dioxide as an electrolyte.
固体電解コンデンサは、アルミニウム、タンタル、ニオ
ブなどの表面に絶縁性の酸化皮膜が形成されるいわゆる
弁金属を陽極に用い、前記酸化皮膜を誘電体層とし、こ
の上面に金属酸化物半導体や有機導電体を固体電解質層
として形成し、さらにその外面に陰極引出しのための導
電層を設けて構成されている。 固体電解質に用いられる金属酸化物には、硝酸マンガン
を加熱変成させた二酸化マンガンがよく知られている。 固体電解質としての二酸化鉛は、例えば特公昭49−2937
4号公報にあるように、二酸化マンガンに比べて電導度
が高い。また固体電解質形成過程でも二酸化マンガンの
ごとく、硝酸マンガンを加熱して二酸化マンガンに変成
するなどの加熱処理が不要で、常温または析出反応促進
のために精々100℃以下の加熱をおこなえばよい。この
ために、誘電体酸化皮膜の劣化が少なく、低損失で信頼
度の高い固体電解コンデンサを得ることができる。 二酸化鉛を固体電解質として、誘電体酸化皮膜上に形成
する手段には、前出の特公昭49−29374号公報に記載さ
れているように、酢酸鉛、塩化鉛、臭化鉛、硝酸鉛、ほ
う弗化鉛など鉛イオンを含む化合物を水もしくは他溶媒
中に溶解させた鉛イオンを含む溶液と、過硫酸アンモニ
ウム、過酸化水素、過マンガン酸カリウム、ジメチルス
ルホキシド、キノンなどの酸化剤を水もしくは他の溶媒
へ溶解した溶液との混合溶液中に陽極体を浸漬し、化学
的な酸化反応によって二酸化鉛を析出する方法がある。 また特公昭39−285号公報のように、硝酸鉛溶液などの
鉛イオン溶液中に陽極を浸漬して、電解酸化する電気化
学的方法によるものが一般に知られている。Solid electrolytic capacitors use a so-called valve metal, such as aluminum, tantalum, and niobium, on the surface of which an insulating oxide film is formed, as the anode. The body is formed as a solid electrolyte layer, and a conductive layer for drawing out a cathode is further provided on the outer surface of the body. As a metal oxide used for the solid electrolyte, manganese dioxide obtained by heating and modifying manganese nitrate is well known. Lead dioxide as a solid electrolyte is disclosed, for example, in Japanese Examined Patent Publication No.
As described in Japanese Patent Publication No. 4, the electric conductivity is higher than that of manganese dioxide. Also in the solid electrolyte formation process, there is no need for heat treatment such as manganese nitrate heating to convert manganese dioxide to manganese dioxide, and the heating may be performed at room temperature or at most 100 ° C. or lower in order to accelerate the precipitation reaction. Therefore, it is possible to obtain a highly reliable solid electrolytic capacitor with low loss of the dielectric oxide film, low loss. As means for forming lead dioxide as a solid electrolyte on a dielectric oxide film, as described in JP-B-49-29374, lead acetate, lead chloride, lead bromide, lead nitrate, A solution containing lead ions, such as lead borofluoride, dissolved in water or another solvent, and an oxidizing agent such as ammonium persulfate, hydrogen peroxide, potassium permanganate, dimethyl sulfoxide, or quinone in water or There is a method of immersing the anode body in a mixed solution with a solution dissolved in another solvent and precipitating lead dioxide by a chemical oxidation reaction. Further, as in Japanese Patent Publication No. 39-285, there is generally known an electrochemical method in which an anode is immersed in a lead ion solution such as a lead nitrate solution and electrolytically oxidized.
二酸化鉛の析出を化学的方法によりおこなうと、一度あ
るいは比較的少ない回数で所定の厚さの二酸化鉛層が形
成できる。しかしこの化学的方法によって形成した固体
電解質層は、その表面が粗面で、その外面に形成される
コロイダルカーボン層や導電ペーストなどの陰極引出し
層との接合が不完全となることが多い。また長時間使用
すると接合面で局所的に剥離をおこし、損失や内部抵抗
値が上昇する欠点もあった。 また電気化学的手段によって形成された二酸化鉛層は、
化学的手段によるものに比べ緻密な層が形成でき、陰極
引出し層との接合状態も良好で、長時間の使用において
も剥離等の不都合が生じにくい。しかし、二酸化鉛の形
成速度が化学的方法に比べて遅く、十分な厚さの固体電
解質層を得るには、長時間を要する欠点がある。 この発明は、上記の欠点を改良し、化学的方法ならびに
電気化学的方法双方の長所を生かし、特性劣化がなく、
かつ製造容易な固体電解コンデンサを提供することを目
的としたものである。When lead dioxide is deposited by a chemical method, a lead dioxide layer having a predetermined thickness can be formed once or relatively few times. However, the surface of the solid electrolyte layer formed by this chemical method is rough, and the bonding with the cathode extraction layer such as the colloidal carbon layer or the conductive paste formed on the outer surface is often incomplete. In addition, when used for a long time, there is a drawback that the peeling occurs locally at the joint surface, resulting in an increase in loss and internal resistance. Also, the lead dioxide layer formed by electrochemical means is
A denser layer can be formed as compared with the case of using a chemical means, the state of joining with the cathode extraction layer is good, and inconveniences such as peeling hardly occur even after long-term use. However, the formation rate of lead dioxide is slower than that of the chemical method, and it takes a long time to obtain a solid electrolyte layer having a sufficient thickness. The present invention improves the above-mentioned drawbacks, takes advantage of both the chemical method and the electrochemical method, and does not deteriorate the characteristics.
The object of the present invention is to provide a solid electrolytic capacitor that is easy to manufacture.
この発明は、固体電解コンデンサの製造方法として、表
面に誘電体酸化皮膜層が形成された弁金属陽極の該誘電
体酸化皮膜層の上面に、化学的手段によって第1の二酸
化鉛層を形成するとともに、この第1の二酸化鉛層の上
面に電気化学的手段によって第2の二酸化鉛層を形成す
ることを特徴としている。 すなわちこの発明は、二酸化鉛からなる固体電解質層
を、化学的手段ならびに電気化学的手段の双方の手段を
順次用いて形成したものである。 図は、この発明により製造された固体電解コンデンサの
電極ならびに固体電解質層の構造を模式的にあらわした
もので、アルミニウム、タンタルなどの弁金属陽極1の
表面に、陽極酸化反応等の処理によって形成された誘電
体酸化皮膜層2が形成されている。この上面に、まず化
学的な手段による第1の二酸化鉛層3が形成され、その
上に電気化学的手段により、第2の二酸化鉛層4が形成
されている。そして、陰極引出しのための導電カーボン
層5および銀ペースト層6などの導電層からなる陰極引
出し手段が前記第2の二酸化鉛層に接して設けられてい
る。 なお弁金属陽極1および銀ペースト層6には、各々外部
引出しのためのリード線7、8が取り付けられ、外部と
の電気的接続が得られるようになっている。As a method for manufacturing a solid electrolytic capacitor, the present invention forms a first lead dioxide layer by chemical means on the upper surface of a dielectric oxide film layer of a valve metal anode having a dielectric oxide film layer formed on the surface thereof. At the same time, a second lead dioxide layer is formed on the upper surface of the first lead dioxide layer by electrochemical means. That is, according to the present invention, a solid electrolyte layer made of lead dioxide is formed by sequentially using both chemical means and electrochemical means. The figure schematically shows the structure of the electrode and the solid electrolyte layer of the solid electrolytic capacitor manufactured according to the present invention. The formed dielectric oxide film layer 2 is formed. A first lead dioxide layer 3 is first formed on this upper surface by chemical means, and a second lead dioxide layer 4 is formed on it by electrochemical means. Then, a cathode lead-out means composed of conductive layers such as a conductive carbon layer 5 and a silver paste layer 6 for drawing out the cathode is provided in contact with the second lead dioxide layer. It should be noted that the valve metal anode 1 and the silver paste layer 6 are respectively provided with lead wires 7 and 8 for leading out to the outside so that electrical connection with the outside can be obtained.
この発明によれば、二酸化鉛の固体電解質形成を、まず
第1の段階で化学的方法により形成するので、1度ある
いは、比較的少ない回数で所望の厚さの固体電解質を形
成する。次いで第2の段階として、電気化学的方法によ
って緻密な第2の二酸化鉛層を形成するので、その後の
コロイダルカーボン層や導電ペースト層と固体電解質層
との接合性が向上する。また長時間の使用による接合面
での剥離現象の発生が減少する。According to the present invention, the solid electrolyte of lead dioxide is first formed by the chemical method in the first step, so that the solid electrolyte having a desired thickness is formed once or in a relatively small number of times. Next, as a second step, since a dense second lead dioxide layer is formed by an electrochemical method, the subsequent bondability between the colloidal carbon layer or the conductive paste layer and the solid electrolyte layer is improved. Further, the occurrence of peeling phenomenon on the joint surface due to long-term use is reduced.
次にこの発明の方法により固体電解コンデンサを作成
し、従来の方法によるものとの特性の比較をおこなった
結果を示す。 まず陽極箔として、厚さ80μmの高純度のアルミニウム
箔を用意した。このアルミニウム箔はあらかじめエッチ
ング処理を施し表面積を拡大してしてある。この箔を70
Vの電圧で硼酸浴中で陽極酸化し、表面に誘電体絶縁酸
化皮膜を形成した。次にこの箔を1cm2の大きさに切断し
たものに、陽極引出しリード線を超音波溶接によって接
続した。 二酸化鉛層の形成は、まずこの箔を酢酸鉛50gを水40gに
溶解した溶液と、過硫酸アンモニウム60gを100gの水に
溶解した溶液との混合溶液中に、70℃で20分間浸漬して
二酸化鉛を化学的に析出させた。次にこの箔を水洗した
後、今度は酢酸鉛1Mol/lの濃度の溶液中に前記の箔を浸
漬し、銀/塩化銀基準電極比+2Vの定電圧で、温度20℃
で20分間電気化学的に二酸化鉛の析出をおこなった。そ
して箔を水洗し、100℃で2時間乾燥させ、箔表面に銀
ペーストを塗布し、陰極引出しリード線を接続してこの
発明の固体電解コンデンサを完成させた。 また比較例1として、この発明の実施例と同じ箔を用
い、二酸化鉛の形成を第1段階の化学的方法のみによっ
たものと、比較例2として、同様に同じ箔を用い、第2
段階の電気化学的方法のみを適用して二酸化鉛層を形成
したものを作成した。これらの比較例についても銀ペー
ストを塗布し、陰極引出しリード線を接続して固体電解
コンデンサとした。 これらの固体電解コンデンサの特性を測定したところ以
下の表に示す結果が得られた。なお、測定は静電容量、
損失(Tanδ)、100KHzにおける等価直列抵抗値(ESR)
の3項目である。 この結果からわかるように、比較例1の化学的方法のみ
によるものは、静電容量は大差がないが、Tanδ、ESRの
いずれも本発明例のものに比べ劣っている。また、比較
例2の電気化学的方法のみによるものは、Tanδについ
ては本発明例のものと大差がないが、誘電体酸化皮膜層
と二酸化鉛層との接触部分が少なく、静電容量が極めて
低い値となっている。またESRについても本発明例に比
べて劣る結果となった。Next, the results of making a solid electrolytic capacitor by the method of the present invention and comparing the characteristics with those of the conventional method will be shown. First, as the anode foil, a high-purity aluminum foil having a thickness of 80 μm was prepared. This aluminum foil has been subjected to an etching treatment in advance to expand its surface area. 70 this foil
It was anodized in a boric acid bath at a voltage of V to form a dielectric insulating oxide film on the surface. Next, this foil was cut to a size of 1 cm 2 , and an anode lead wire was connected by ultrasonic welding. To form the lead dioxide layer, first dip this foil in a mixed solution of 50 g of lead acetate in 40 g of water and 60 g of ammonium persulfate in 100 g of water at 70 ° C for 20 minutes. Lead was chemically deposited. Next, after washing this foil with water, this foil was immersed in a solution with a concentration of 1Mol / l lead acetate, and the silver / silver chloride reference electrode ratio was + 2V at a constant voltage and a temperature of 20 ° C.
The lead dioxide was electrochemically deposited for 20 minutes. Then, the foil was washed with water and dried at 100 ° C. for 2 hours, a silver paste was applied to the foil surface, and a cathode lead wire was connected to complete the solid electrolytic capacitor of the present invention. Further, as Comparative Example 1, the same foil as that of the embodiment of the present invention was used, and the formation of lead dioxide was performed only by the first-step chemical method. As Comparative Example 2, the same foil was similarly used.
A lead dioxide layer was formed by applying only the stepwise electrochemical method. Also in these comparative examples, a silver paste was applied and a cathode lead wire was connected to obtain a solid electrolytic capacitor. When the characteristics of these solid electrolytic capacitors were measured, the results shown in the following table were obtained. The measurement is the capacitance,
Loss (Tanδ), Equivalent series resistance value (ESR) at 100KHz
There are three items. As can be seen from these results, the capacitance of the chemical method of Comparative Example 1 alone is not so different, but both Tan δ and ESR are inferior to those of the present invention. In addition, Tan δ of Comparative Example 2 only by the electrochemical method is not so different from that of the present invention, but the contact portion between the dielectric oxide film layer and the lead dioxide layer is small and the capacitance is extremely high. It is a low value. Also, the ESR was inferior to that of the examples of the present invention.
以上述べたように、この発明は、固体電解コンデンサの
製造方法において固体電解質である二酸化鉛層と、陰極
引出し層との接合が良好におこなわれ、損失、ESRなど
の電気特性に優れる。また長時間の使用において、固体
電解質層と陰極引出し層間の剥離が生じにくいため、長
時間にわたって安定した特性が維持でき、信頼性を高め
ることができる。 また固体電解質層の形成が短時間ででき、製造工程の簡
略化、効率化が図れる。As described above, according to the present invention, in the method for manufacturing a solid electrolytic capacitor, the lead dioxide layer, which is a solid electrolyte, is bonded well to the cathode extraction layer, and the electrical characteristics such as loss and ESR are excellent. In addition, since peeling between the solid electrolyte layer and the cathode extraction layer is unlikely to occur during long-term use, stable characteristics can be maintained for a long time and reliability can be improved. Further, the solid electrolyte layer can be formed in a short time, and the manufacturing process can be simplified and made more efficient.
図は、この発明により製造された固体電解コンデンサの
各層の構造を模式的にあらわした説明図である。 1……弁金属陽極 2……誘電体酸化皮膜層 3……第1の二酸化鉛層 4……第2の二酸化鉛層 5……導電カーボン層 6……銀ペースト層 7,8……リード線The drawings are explanatory views schematically showing the structure of each layer of the solid electrolytic capacitor manufactured by the present invention. 1 ... Valve metal anode 2 ... Dielectric oxide film layer 3 ... First lead dioxide layer 4 ... Second lead dioxide layer 5 ... Conductive carbon layer 6 ... Silver paste layer 7,8 ... Lead line
Claims (1)
属陽極の該誘電体酸化皮膜層の上面に、化学的手段によ
って第1の二酸化鉛層を形成するとともに、この第1の
二酸化鉛層の上面に電気化学的手段によって第2の二酸
化鉛層を形成する固体電解コンデンサの製造方法。1. A first lead dioxide layer is formed by a chemical means on the upper surface of the dielectric oxide film layer of a valve metal anode having a dielectric oxide film layer formed on the surface thereof, and the first dioxide film is formed. A method of manufacturing a solid electrolytic capacitor, wherein a second lead dioxide layer is formed on the upper surface of a lead layer by electrochemical means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14098987A JPH07120613B2 (en) | 1987-06-05 | 1987-06-05 | Method for manufacturing solid electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14098987A JPH07120613B2 (en) | 1987-06-05 | 1987-06-05 | Method for manufacturing solid electrolytic capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63305509A JPS63305509A (en) | 1988-12-13 |
| JPH07120613B2 true JPH07120613B2 (en) | 1995-12-20 |
Family
ID=15281554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14098987A Expired - Lifetime JPH07120613B2 (en) | 1987-06-05 | 1987-06-05 | Method for manufacturing solid electrolytic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07120613B2 (en) |
-
1987
- 1987-06-05 JP JP14098987A patent/JPH07120613B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63305509A (en) | 1988-12-13 |
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