JPH0712468B2 - Substrate cleaning equipment - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a substrate cleaning apparatus for performing pretreatment of a photomask substrate, a glass substrate and the like, and a substrate cleaning apparatus for cleaning the entire front and back surfaces of the substrate. .

(Prior Art) Conventionally, in cleaning a substrate, a roll-shaped cleaning brush is used to rotate the cleaning brush while contacting the surface of the substrate, and to relatively clean the substrate and the brush. Conventionally, in this case, since the cleaning brush moves in one direction with respect to the substrate, uneven cleaning brush pressure, uneven brush pressure due to abrasion of the brush, flow of cleaning liquid used in combination with the cleaning brush, etc. One direction (movement direction of brush)
Uneven cleaning and easy to generate cleaning marks. Further, as a countermeasure against such a case, a method of swinging the cleaning brush in a direction perpendicular to the brush moving direction (direction perpendicular to the moving direction of the substrate) with a constant width is conceivable. Similar cleaning unevenness, brush cleaning marks, etc. occur diagonally. Further, the rocking causes a large amount of friction between the cleaning brush and the end surface of the substrate, resulting in large abrasion of the brush, which easily causes damage.

Further, in the case of a horizontally rotating disc-shaped cleaning brush attached to a vertical rotation shaft, since the disc-shaped cleaning brush rotates while the substrate surface and the brush surface are in contact with each other in parallel, cleaning unevenness and cleaning marks are not generated. Although it is unlikely to occur, in order to uniformly clean the entire surface of the substrate, it is necessary to make the cleaning brush have a diameter larger than that of the substrate, or move the cleaning brush so as to uniformly contact the entire surface of the substrate.

Further, conventionally, in the case of both the roll-shaped cleaning brush and the disc-shaped cleaning brush, the setting of the substrate to be cleaned with respect to the cleaning brush is inefficient because the substrate is manually set for each one. Met.

(Object of the Invention) The present invention relates to a substrate cleaning apparatus that is performed as a pretreatment process such as a photomask manufacturing process for a glass substrate or a color filter manufacturing process, and is an apparatus for eliminating uneven cleaning and generation of cleaning marks. The cleaning direction of the cleaning means relative to the substrate to be cleaned can be relatively changed,
It is an object of the present invention to automatically take out a substrate to be cleaned from a substrate storage cassette case and automatically position it on a cleaning means.

(Structure of the Invention) According to the present invention, a cassette case transporting means 2 for linearly transporting a substrate storing cassette case 1, and a cassette case moving transport path by the cassette case transporting means 2 protruding and retracting from one side of the transport path to the other side of the transport path. One side reciprocating means 3 that operates, another side reciprocating means 4 that faces the one side reciprocating means 3 and sandwiches the substrate a in the substrate storage cassette case 1, and sequentially in a direction orthogonal to the cassette case transport path. A substrate reversing unit 5 having holding units 9 and 10 capable of holding the substrate and a cleaning unit 6 such as a cleaning brush are provided, and the substrate reversing unit 5 and the cleaning unit 6 are relatively arranged with respect to the cassette case transporting unit 2. The substrate cleaning apparatus is characterized in that it is provided so as to be movable.

(Advantageous Effects of the Invention) The apparatus of the present invention linearly conveys the substrate storage cassette case, and the cassette case conveying means projects and retracts from one side of the cassette case conveying path to the other side of the conveying path. Since one side reciprocating means and the other side reciprocating means facing the one side reciprocating means and sandwiching the substrate in the substrate storing cassette case are provided, the one side reciprocating means and the other reciprocating means in the cassette case. The substrate to be cleaned in the cassette case can be sandwiched from the opposite sides by the reciprocating means on both sides, and after the sandwiching, the elevating means on both sides in the same direction at the same speed at the cassette. By moving to one side of the case, it is possible to automatically pull out the sandwiched substrates to be cleaned one by one outside the cassette case. Wear. The apparatus of the present invention is provided with substrate reversing means and cleaning means such as a cleaning brush which are sequentially arranged on one side of the conveying means in a direction orthogonal to the substrate storage cassette case conveying direction. Since the substrate reversing means and the cleaning means are provided so as to be movable relative to each other, the substrate to be cleaned which is sandwiched by the both-side reciprocating means and pulled out from the cassette case is installed at that position. The reversing means or the substrate holding part of the reversing means which is moved relative to the position and is positioned at the position can be temporarily transferred and held. While the substrate is being transferred to and held by the substrate holder, the double-sided reciprocating means can release the substrate to be cleaned from the clamping operation and retract it to the outside of the transport path of the cassette case. Therefore, in the meantime, after the substrate storage cassette case is moved by the transporting means and is moved away from the reciprocating means on both sides, the reciprocating means on both sides can again sandwich the substrate transferred to and held by the reversing means. it can.

Then, the reversing means is moved relative to the both-sided reciprocating means to move away from it, and the cleaning means such as a cleaning brush is positioned so as to face the substrate to be cleaned sandwiched by the both-sided reciprocating means. Then, the cleaning member (brush, sponge, nonwoven fabric, etc.) attached to the cleaning means is made to face the front and back of the substrate, and the substrate is reciprocated in one direction while being sandwiched by the both-side reciprocating means. A washing operation can be performed along the direction.

In addition, the substrate after the one-way cleaning operation is again transferred to the substrate supporting portion of the reversing means, rotated by 90 ° or an appropriate angle, and again sandwiched by the both-side reciprocating means, in the orthogonal direction or the appropriate direction. The substrate can be washed and blown. In addition, the substrate that has been washed in two directions such as the orthogonal direction is sandwiched by the reversing means, moved to the substrate storage cassette case and the both-side reciprocating means position, and positioned and passed to the both-side reciprocating means. Can be stored in.

(Embodiment) An embodiment of the device of the present invention will be described in detail with reference to the side view of FIG. 1 and the plan view of FIG.

The device of the present invention is configured such that the substrate a in FIG.
A cassette case conveying means 2 for linearly conveying a storage cassette case 1 capable of accommodating a plurality of sheets in the lateral direction, and a cassette case conveying path by the cassette case conveying means 2 from one side (upper side) to the other side (lower side) of the conveying path. One side reciprocating means 3 (upper side reciprocating means in the embodiment drawings) that protrudes and retracts to the other side, and the other side reciprocating means that faces the one side reciprocating means 3 and that sandwiches the substrate a in the substrate storage cassette case 1. 4 (lower reciprocating means in the embodiment drawings). FIG. 3 is a diagram for explaining the operation of the device of the present invention, and FIG. 3 (a) fits the one side (upper side of the drawing) reciprocating means 3 and the other side (lower side of the drawing) reciprocating means 4 in the cassette case 1. Insert the cassette case 1 by the reciprocating means 3 and 4 on both sides.
One of the to-be-cleaned substrates a is sandwiched between the opposite sides thereof.
After sandwiching, the reciprocating means 3, 4 on both sides of FIG.
Is moved to one side (upper side in the drawing) of the cassette case 1 at the same speed in the same direction (all above), so that the substrate to be cleaned a sandwiched is moved to one side of the cassette case 1 ( (Upper side of the cassette case 1)
It can be automatically pulled out one by one.

The transport means 2 for transporting the substrate storage cassette case 1 is provided with a movable clamp base 2b which is movable along the rail 2a by clamping both sides of the cassette case 1 in the transport direction by the clamp protrusions 2c. Is. The clamp base 2b is designed to be moved by a predetermined distance by a belt driven by a servo motor or a multi-stage air cylinder. Alternatively, the rack gear provided on the rail 2a and the drive pinion gear provided on the clamp base 2b may be meshed to carry and move.

In addition, the apparatus of the present invention includes a substrate reversing means 5 and a roller-shaped brush in the direction orthogonal to the carrying direction of the substrate storage cassette case 1 on one side of the carrying means 2 in FIG.
A wiping means 7 (7a including a cleaning means 6 including 6b and the like (6a is an arm that pivotally supports the rotating shaft of the cleaning brush) and, if necessary, a roller-shaped wiping member 7b such as a nonwoven fabric, sponge, or cloth. And an arm supporting a spindle of the wiping member) and guides the substrate reversing means 5, the cleaning means 6 and the wiping means 7 to a fixed position where the cassette case transporting means 2 is arranged. It is provided so as to be relatively movable along the rail 8. The reversing means 5, the cleaning means 6, and the wiping means 7 which move and position along the rail 8 are provided with drive pinion gears 5c, 6c, 7c driven by servo motors, step motors, etc. provided on each means on the upper surface of the rail 8. It can be moved and positioned by engaging with the rack gear 8a. Then, as shown in FIG. 3 (b), with respect to the substrate to be cleaned a which is sandwiched by the both-sides reciprocating means 3 and 4 and pulled out to one side (upper side of the cassette case 1 in the drawing) from the cassette case 1. One of the desired one of the reversing means 5, the cleaning means 6, or the wiping means 7 installed as necessary can be positioned at a position facing directly. For example, the third
As shown in FIG. 3C, from the reversing means 5 positioned so as to face the drawn-out substrate a, or the rotation center of the reversing means 5 positioned at the facing position by relatively moving. The substrate a is sandwiched from both sides by the substrate holding portions 10 and 10 (chuck mechanism) provided so as to face the ends of the reversing arm 9 that linearly extends on both sides, and can be temporarily held by the reversing arm 9. While the substrate a is being transferred to and held by the substrate holders 10, 10, as shown in FIG. 3 (d), the double-sided reciprocating means 3, 4 are used to sandwich the substrate a to be cleaned. Is released from the cassette case 1, and the cassette case 1 can be withdrawn to the outside of the transport path. Therefore, during that time, the substrate storage cassette case 1 is once moved by the transfer means 2 and is moved away from the reciprocating means 3 and 4 on both sides, and then the reversing means 3 and 4 on both sides of FIG. Means 5
It is possible to sandwich and hold the substrate a transferred and held by the substrate. Then, the reversing means 5 is moved relatively away from the both-side reciprocating means 3 and 4, while the reversing means 5 is moved away from the reversing means 5, and the cleaning brush 6b and the like are driven to rotate relative to the sandwiched substrate a to be cleaned. The roller-like cleaning means 6 made of a member (brush, sponge, non-woven fabric, etc.)
To face the front and back of the substrate a,
A cleaning operation is performed along one direction while the substrate a is vertically swung while sandwiched by the both-side reciprocating means 3 and 4, while the cleaning solution is ejected from the cleaning solution nozzle 6d and the cleaning brush 6b is driven and rotated. can do. The cleaning by the cleaning means 6 can be performed on only one side. When the cleaning liquid remaining on the surface of the substrate a after the cleaning operation is wiped off as needed, the cleaning means 6 is moved away from the position directly facing the substrate a, while the wiping means 7 (first cloth, sponge, cloth, etc.) is used. (FIG. 2, FIG. 2) are brought into relative contact from the front and back of the substrate a, and the substrate a is swung up and down by the reciprocating means 3 and 4 to wipe off the residual cleaning liquid on the surface of the substrate a.

After the unidirectional cleaning operation of the substrate a in this manner, the cleaning means 6 is moved from the position directly facing the substrate a to the both side reciprocating means 3,
3 (f), the reversing means 5 is moved relative to the substrate a held by the double-sided reciprocating means 3 and 4 so as to face it. ,
The substrate a after cleaning, which is sandwiched by 4, is
The board a is sandwiched and held by the reversing means 5 and held by the board holding means 10, and both side reciprocating means 3 and 4 in FIG. 3 (g) release the board a to release the board a. The substrate a held by is turned over by 90 °. Then, the third
As shown in FIG. 3H, the substrate a is reciprocally moved to the both side reciprocating means 3,
It is sandwiched again by 4, and the reversing means 5 is reciprocating means on both sides.
After being relatively separated from the positions 3 and 4, the cleaning means 6 is again positioned to face the position of the substrate a sandwiched between the both side reciprocating means 3 and 4, and then the both side reciprocating means 3 and 4 are moved in one direction. The cleaning liquid is ejected from the cleaning liquid supply nozzle while reciprocally swinging to and from the substrate a in a direction orthogonal to the one direction.
Perform the washing operation of.

In this way, the cleaning means 6 is relatively moved from the facing position of the substrate a for which the cleaning in the orthogonal direction has been completed, and then the cleaning means 6 is separated from the position of the substrate a as shown in FIG. 3 (i). The reversing means 5 is relatively moved so as to directly face the substrate a.
The reversing means 5 is positioned to face the reversing means 5, and the substrate a sandwiched between the both-side reciprocating means 3 and 4 is transferred to the substrate holding portions 10 and 10 of the reversing means 5. Subsequently, the double-sided reciprocating means 3 and 4 in FIG. 3 (j) release the pinching operation of the substrate a, and the one-sided reciprocating means 3 is moved to one side and the other-side reciprocating means 4 is moved.
Are separated from each other on the other side, and then the storage cassette case 1 is moved by the conveying means 2 in FIG. 3 (k) to be re-entered in the space where the one-side reciprocating means 3 and the other-side reciprocating means 4 face each other. 3 (l), the other side reciprocating means 4 (lower reciprocating means in the embodiment drawings) moves to one side (lower side in the embodiment drawings) to position the substrate a to be cleaned. The substrate after the orthogonal cleaning held in the storage cassette case 1 held by the reversing means 5 is sandwiched by the one side reciprocating means and the other side reciprocating means, and the substrate is removed from the reversing means. It is delivered to both-sides reciprocating means. And FIG. 3 (m)
The both-sides reciprocating means 3 and 4 move in the direction of the substrate storing cassette case 1 while sandwiching the substrate a, and store the substrate a after orthogonal cleaning in the cassette case 1. The two-sided reciprocating means 3 and 4 (the upper reciprocating means 3 and the lower reciprocating means 4) after accommodating the substrate a are moved upward and downward respectively in FIG. The cassette case 1 is evacuated to the outside of the case transport path of the transport means 2, and then the cassette case 1 is moved by the transport means 2 to relatively move the substrate a stored therein to the both side reciprocating means 3 and 4. The cycle operation is ended. The above operation is repeated as one cycle operation to wash a plurality of substrates in the substrate cassette case, and the substrates to be cleaned in the substrate storage cassette case are sequentially taken out,
Then, the orthogonal cleaning operation is performed, and then the substrate after the orthogonal cleaning can be stored again in the substrate storage cassette case.

FIG. 4 is a partially enlarged side view of the reversing means 5 in the device of the present invention, showing an example of a mechanism for rotating the reversing arm 9 provided in the reversing means 5 and moving back and forth to the substrate a. A support base 12 is provided which can reciprocate along the rail 8 toward the front side of the drawing, and a bracket 13 is provided above the support base 12. The bracket 13 has a rotary air cylinder 14
Is mounted so that the direction of the rotary shaft 14a is parallel to the sliding direction. In the rotary shaft 14a, the shaft 1
A rod 15a of a linear air cylinder 15 that fits only in the inner periphery of 4a by a spline is loaded, and the linear air cylinder 15 is attached to a bracket 13 at the end of the rod 15a.
It is attached integrally to. Reference numeral 13a is a bearing portion of the rotary shaft 14a, and 13b is a bearing portion of the linear air cylinder rod 15a. The reversing arm 9 is attached to the tip of the rod 15a at the center of rotation thereof. At both ends of the reversing arm 9, there are holding portions 10, 1 slidable in the direction toward the center of rotation.
Install 0. The holding portions 10 and 10 can be slid by microphone air cylinders 9a and 9a installed in the reversing arm 9. As shown in FIG. 3 (c), the holding portions 10 and 10 are provided with cutout portions 10a and 10a which fit with the corner portions of the substrate a. The reversing means 5 operates the rotary air cylinder 14 to operate the rotary shaft.
By rotating the shaft 14a, the linear air cylinder rod 15a fitted in the spline can be rotated together with the rotation of the shaft 14a, and the reversing arm 9 attached to the tip of the rod 15a can be rotated. In addition, by operating the linear air cylinder 15 to reciprocate the cylinder rod 15a, the reversing arm 9 attached to the tip of the rod 15a is moved in the direction orthogonal to the moving direction of the support base 12 (the horizontal direction in the drawing). It can be put in and out, intersects with both side reciprocating means 3, 4,
It can be restored.

In the present invention, in addition to the reversing means 5, the cleaning brush 6a of the cleaning means 6 and the wiping member 7a of the wiping means 7 need to come into contact with and separate from the substrate a, but the same mechanism as above. Can be adopted.

FIG. 5 is a perspective view showing an example of the shape of the wiping member 7b of the wiping means 7, which has a cylindrical shape around the cylindrical shaft portion 7d so that the diameter is sufficiently larger than the diameter of the shaft portion. Or a porous member 7f such as a sponge in which the sheet is made into a cylindrical shape is arranged, and a plurality of holding plates 7e are arranged at equal intervals from the outer periphery of the nonwoven fabric 7f.
Is arranged and the non-woven fabric 7f is pressed against the shaft portion 7d, and is fixed by a screw 7g or the like. The porous member 7f other than the portion pressed by the holding plate 7g can wash the substrate a by the protruding portion and wipe the residual cleaning liquid on the surface of the substrate a afterwards.

(Advantages of the Invention) The present invention can automatically clean the front surface or both front and back surfaces of a substrate to be cleaned housed in a substrate housing cassette case, and can be used not only in one direction of the substrate but also in an orthogonal direction, Alternatively, the cleaning operation can be performed in an appropriate angle direction other than the orthogonal direction by appropriately setting the inversion angle by the inversion means, and the substrate after the cleaning operation is again
It can be automatically stored in the original storage cassette case and has a remarkable effect in improving the efficiency of the substrate material cleaning operation.

[Brief description of drawings]

FIG. 1 is a side view of an embodiment of the apparatus of the present invention, FIG. 2 is a plan view of an embodiment of the apparatus of the present invention, FIG. 3 is a diagram for explaining a cleaning operation by the apparatus of the present invention, and FIG. 4 is an apparatus of the present invention. FIG. 5 is a side view of an embodiment of the inverting means in FIG. 5, and FIG. 5 is a perspective view of an embodiment of the wiping member used in the wiping means of the device of the present invention. 1 ... Substrate storage cassette case, 2 ... Case transfer means, 3 ... One side reciprocating means, 4 ... Other side reciprocating means, 5
…… Inversion means, 6 …… Cleaning means, 7 …… Wipe means, 8 ・ ・ ・
… Guide rails, 9 …… Reversing arms, 10 …… Holding part (chuck) 11 …… Cassette top cover, 12 …… Supporting base, 13
…… Bracket, 14 …… Rotary air cylinder,
15: Linear air cylinder, a: Substrate

Claims (1)

[Claims] 1. A cassette case transporting means 2 for linearly transporting a substrate storing cassette case 1, and a cassette case moving means 2 for projecting and retracting from one side of the cassette case moving transport path to the other side of the transport path. The side reciprocating means 3, the other side reciprocating means 4 facing the one side reciprocating means 3 and sandwiching the substrate a accommodated in the substrate accommodating cassette case 1, in a direction orthogonal to the cassette case transport path. A substrate reversing means 5 including holding portions 9 and 10 capable of holding substrates arranged in sequence and a cleaning means 6 such as a cleaning brush are provided, and the substrate reversing means 5 and the cleaning means 6 are opposed to the cassette case carrying means 2. A substrate cleaning apparatus characterized in that it is provided so as to be movable.