JPH0714085B2 - Method for removing carbon adhering to electrode surface of CO laser device - Google Patents
Method for removing carbon adhering to electrode surface of CO laser deviceInfo
- Publication number
- JPH0714085B2 JPH0714085B2 JP24305489A JP24305489A JPH0714085B2 JP H0714085 B2 JPH0714085 B2 JP H0714085B2 JP 24305489 A JP24305489 A JP 24305489A JP 24305489 A JP24305489 A JP 24305489A JP H0714085 B2 JPH0714085 B2 JP H0714085B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- discharge
- laser
- circulation path
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 26
- 229910052799 carbon Inorganic materials 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 4
- 239000007789 gas Substances 0.000 claims description 64
- 238000004140 cleaning Methods 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000007599 discharging Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 241000270281 Coluber constrictor Species 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- OQZCSNDVOWYALR-UHFFFAOYSA-N flurochloridone Chemical compound FC(F)(F)C1=CC=CC(N2C(C(Cl)C(CCl)C2)=O)=C1 OQZCSNDVOWYALR-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、ガス循環・放電励起型COレーザ装置の電極に
付着した炭素を除去する方法に関するものである。TECHNICAL FIELD The present invention relates to a method for removing carbon adhering to an electrode of a gas circulation / discharge excitation CO laser device.
［従来の技術］ ３軸直交型の大出力放電励起型COレーザ装置は、COガス
の流れ方向と放電方向とレーザ光進行方向とが互いに直
交しており、COを含むレーザガスは、放電部が形成され
たガス循環路内をガス循環機にて循環され、その放電部
に設けた電極間での放電で励起されてレーザ光を発振す
る。[Prior Art] In a three-axis orthogonal high-power discharge-excited CO laser device, a flow direction of CO gas, a discharge direction, and a laser light traveling direction are orthogonal to each other, and a laser gas containing CO has a discharge portion. It circulates in the formed gas circulation path by a gas circulation machine, and is excited by the discharge between the electrodes provided in the discharge part to oscillate a laser beam.
このCOレーザ装置では、CO,O2,He,N2,Xeなどの組成で構
成されているレーザガスを用い、このレーザガスをガス
循環路にて放電部を繰り返し循環させると共に放電で加
熱されたガスを冷却してレーザの連続発振運転を行って
いる。In this CO laser device, a laser gas composed of a composition such as CO, O 2 , He, N 2 and Xe is used, and this laser gas is repeatedly circulated in the discharge part in the gas circulation path and is heated by the discharge. The laser is oscillated and the continuous oscillation operation of the laser is performed.
この連続発振運転中、放電部ではCOガスが、放電により
（CO→Ｃ＋Ｏ）の反応にて発生した炭素が電極及び出力
ミラーなど装置内部に付着し、レーザ出力の低下や放電
の不安定、電極寿命の低下を招く。During this continuous oscillation operation, CO gas is generated in the discharge part, and carbon generated by the reaction of (CO → C + O) due to discharge adheres to the inside of the device such as the electrode and the output mirror, resulting in a decrease in laser output, unstable discharge, and electrode This will shorten the life.
このため従来は、炭素がある程度付着したならば、一旦
発振運転を中断して装置内の温度などの状態が運転前の
レベルに落ち着いてから、装置内のレーザガスを排気・
リークし、装置を開けて付着した炭素を拭きとって炭素
を除去し、再度、循環路内を真空にしたのち新しいレー
ザガスを供給すると共に温度などの状態が運転時のレベ
ルに達してから発振運転を再開していた。For this reason, in the past, if carbon adhered to some extent, the oscillation operation was interrupted once and the temperature and other conditions inside the device had settled to the level before operation, and then the laser gas inside the device was exhausted.
Leakage, open the device and wipe off the adhering carbon to remove the carbon, evacuate the circulation path again, supply new laser gas, and oscillate after the temperature and other conditions reach operating levels. Was restarting.
［発明が解決しようとする課題］ しかしながら、この従来の方法では、レーザ発振運転の
中断から再開までにはかなりの時間と手間を要し効率が
悪い問題がある。また、時間と手間がかかるため、炭素
の除去をマメに行うことが避けられがちであり、電極等
の装置の寿命を短くする結果につながっていた。[Problems to be Solved by the Invention] However, this conventional method has a problem that it takes a considerable amount of time and labor from the interruption to the restart of the laser oscillation operation, resulting in poor efficiency. Moreover, since it takes time and labor, it is apt to avoid removing carbon easily, which leads to shortening the life of the device such as an electrode.
本発明は上記事情を考慮してなされたもので、電極など
に付着した炭素の除去を簡単にできるCOレーザ装置の電
極表面付着炭素除去方法を提供することを目的とする。The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a method for removing carbon adhering to an electrode surface of a CO laser device, which can easily remove carbon adhering to an electrode or the like.
［課題を解決するための手段］ 本発明は、上記の目的を達成するために、ガス循環路に
COを含むレーザガスを封入すると共にこれを循環しなが
らガス循環路の放電部の電極間で放電を行ってレーザを
出力し、そのレーザ発振中上記電極に炭素が付着した
際、上記放電部での放電を中断し、ガス循環路中のレー
ザガスを排気したのち、そのガス循環路内に酸素を含む
クリーニングガスを充填すると共に上記放電部で放電を
行って付着酸素を除去するようにしたものである。[Means for Solving the Problems] In order to achieve the above object, the present invention provides a gas circulation path.
While enclosing a laser gas containing CO and circulating it, discharge is performed between the electrodes of the discharge part of the gas circulation path to output a laser, and when carbon adheres to the electrodes during the laser oscillation, After the discharge is interrupted and the laser gas in the gas circulation path is exhausted, a cleaning gas containing oxygen is filled in the gas circulation path, and discharge is performed in the discharge section to remove attached oxygen. .
［作用］ 上記の構成によれば、放電部の電極に付着した炭素は、
クリーニングガス中の酸素と反応してCOガスとなり電極
から除去される。[Operation] According to the above configuration, the carbon attached to the electrode of the discharge part is
It reacts with oxygen in the cleaning gas to become CO gas and is removed from the electrode.
［実施例］ 以下、本発明の好適実施例を添付図面に基づいて説明す
る。[Embodiment] A preferred embodiment of the present invention will be described below with reference to the accompanying drawings.
第１図において、１は、閉ループに形成されたレーザガ
スの循環路で、その循環路１に、放電電極2,2が配置さ
れた放電部３が設けられると共にレーザガスを図示の矢
印方向に循環すべくガス循環機４が設けられる。この放
電部２の入口側には、放電部３で昇温されたレーザガス
を、液体窒素などの低温冷媒により冷却する熱交換器５
が設けられる。In FIG. 1, reference numeral 1 denotes a laser gas circulation path formed in a closed loop. The circulation path 1 is provided with a discharge section 3 in which discharge electrodes 2 and 2 are arranged and circulates the laser gas in the direction of the arrow shown in the figure. Therefore, the gas circulator 4 is provided. At the inlet side of the discharge unit 2, a heat exchanger 5 for cooling the laser gas heated in the discharge unit 3 with a low temperature refrigerant such as liquid nitrogen.
Is provided.
ガス循環路１にはCOを含むレーザガス（組成比CO/N2／O
2/He＝4/16/0.2/79.8％）の供給装置６が接続される。
この供給装置６は、レーザガスの供給ボンベ７と、その
ボンベ７に接続されると共にガス循環路１に接続された
供給管８とからなり、その供給管８に、開閉弁９が接続
される。この供給管８に、クリーニングガス供給装置10
が接続される。このクリーニングガス供給装置10は、ク
リーニングガス供給ボンベ11と、接続管12と、その接続
管12に接続された開閉弁13とからなる。このクリーニン
グガスは、He,N2など放電部２での放電を維持し、かつ
炭素を発生しないガスにO2を加えたガスからなる。Laser gas containing CO (composition ratio CO / N 2 / O
2 / He = 4/16 / 0.2 / 79.8%) supply device 6 is connected.
This supply device 6 comprises a laser gas supply cylinder 7 and a supply pipe 8 connected to the cylinder 7 and to the gas circulation path 1, and an on-off valve 9 is connected to the supply pipe 8. The cleaning gas supply device 10 is connected to the supply pipe 8.
Are connected. The cleaning gas supply device 10 includes a cleaning gas supply cylinder 11, a connecting pipe 12, and an opening / closing valve 13 connected to the connecting pipe 12. This cleaning gas is composed of a gas such as He and N 2 which maintains discharge in the discharge part 2 and which does not generate carbon and O 2 is added.
以上において先ず循環路１内に、CO,O2，N2,Heなどの組
成のレーザガスが封入される。このレーザガスの組成
は、例えば、CO＝４％，O2＝0.2％，N2＝16％,He＝約80
％である。このレーザガスは、発振運転中、循環機４に
て図示の矢印方向に循環され、放電部３での放電により
昇温されるため、熱交換器５で、液体窒素等の低温冷媒
と間接熱交換により冷却される。この放電部３の電極2,
2間で放電が行われレーザが出力されている時、上述の
ようにレーザガス中のCOガスは、一部炭素が発生し、こ
れが電極2,2に付着する。この炭素の付着が生じたなら
ば、放電部３での放電を一旦中断し、循環路１内のレー
ザガスを排気し、クリーニングガス供給装置10よりクリ
ーニングガスを循環路１内に供給する。その後、放電部
３で放電を行うことで、クリーニングガスは、Ｃ＋O2→
CO＋Ｏ（またCO2ガスを用いれば、Ｃ＋CO2→2CO）の反
応によって電極2,2に付着した炭素が除去される。電極
2,2に付着した炭素が除去されたならば、放電を止め
て、循環路１内のクリーニングガスを排気し、再度供給
装置６よりレーザガスをガス循環路１に封入して運転を
再開する。In the above, first, the circulation path 1 is filled with a laser gas having a composition such as CO, O 2 , N 2 , and He. The composition of this laser gas is, for example, CO = 4%, O 2 = 0.2%, N 2 = 16%, He = about 80
%. During oscillating operation, this laser gas is circulated in the direction of the arrow in the drawing by the circulator 4 and is heated by the discharge in the discharge part 3, so that the heat exchanger 5 indirectly exchanges heat with a low-temperature refrigerant such as liquid nitrogen. Is cooled by. The electrodes 2 of this discharge part 3,
When the discharge is performed between the two and the laser is output, as described above, carbon is partly generated in the CO gas in the laser gas, and the carbon is attached to the electrodes 2 and 2. If the carbon adheres, the discharge in the discharge unit 3 is temporarily stopped, the laser gas in the circulation path 1 is exhausted, and the cleaning gas is supplied from the cleaning gas supply device 10 into the circulation path 1. After that, by performing discharge in the discharge unit 3, the cleaning gas becomes C + O 2 →
The carbon attached to the electrodes 2 and 2 is removed by the reaction of CO + O (or C + CO 2 → 2CO if CO 2 gas is used). electrode
When the carbon adhering to 2, 2 is removed, the discharge is stopped, the cleaning gas in the circulation path 1 is exhausted, the laser gas is again enclosed in the gas circulation path 1 by the supply device 6, and the operation is restarted.
次により具体的な実験例を説明する。A specific experimental example will be described below.
封じ切り運転中にO2濃度が0.1％以下の状態で、数十分
間放電を行ったところ、陽極表面に炭素が付着し、その
部分に輝点（無数に存在）が見られた。このとき、ガス
圧力40torr,温度180K,ガス組成CO/N2／O2/He＝4/16/0.2
/79.8（モル％）の条件では、放電電流が6Aを越える範
囲では断続的な放電不安定が生じ、これによりレーザ出
力は、1.2KW以下に制限された。そのため、レーザガス
を一度真空排気したのち、O2/He＝5/95（モル％）のク
リーニングガスを40torr封入し、8Aで約20分間放電する
ことにより、陽極表面の輝点は無くなった。その後再度
レーザガスを封入し、先ほどと同じガス条件で発振した
ところ、電流が8Aの場合も放電は安定であり、最大レー
サ出力は1.6KWまで回復した。When the O 2 concentration was 0.1% or less during the shut-off operation and discharging was performed for several tens of minutes, carbon adhered to the anode surface and bright spots (innumerable) were observed at that portion. At this time, gas pressure 40 torr, temperature 180 K, gas composition CO / N 2 / O 2 /He=4/16/0.2
Under the condition of /79.8 (mol%), intermittent discharge instability occurred in the range where the discharge current exceeded 6 A, which caused the laser output to be limited to 1.2 KW or less. Therefore, after the laser gas was evacuated once, a cleaning gas of O 2 / He = 5/95 (mol%) was sealed at 40 torr and discharged at 8 A for about 20 minutes, so that the bright spots on the anode surface disappeared. When the laser gas was filled again after that, and the laser was oscillated under the same gas conditions as before, the discharge was stable even when the current was 8 A, and the maximum racer output recovered to 1.6 KW.
［発明の効果］ 以上説明したことから明らかなように本発明によれば次
のごとき優れた効果を発揮する。[Effects of the Invention] As is clear from the above description, according to the present invention, the following excellent effects are exhibited.
（１）循環路内にクリーニングガスを封入し、放電を行
いながら電極に付着した炭素を除去することで、装置を
開閉することなく炭素の除去ができ、このため除去が手
軽にできるだけでなく大気中のゴミ・油・水分などによ
る装置内の汚染も避けることができる。(1) By enclosing a cleaning gas in the circulation path and removing the carbon adhering to the electrodes while discharging, it is possible to remove the carbon without opening and closing the device. It is also possible to avoid contamination inside the device due to dust, oil, water, etc. inside.
（２）炭素は放電部を中心に付着しており、放電による
反応でその炭素を除去するため、放電不安定を引き起こ
す炭素の集中付着部を良好に除去することができる。(2) Carbon adheres mainly to the discharge part, and the carbon is removed by the reaction due to the discharge. Therefore, the concentrated carbon adhered part causing the discharge instability can be satisfactorily removed.
第１図は本発明の一実施例を示す図である。 図中、１はガス循環路、３は放電部、４はガス循環機、
６はレーザガス供給装置、10はクリーニングガス供給装
置である。FIG. 1 is a diagram showing an embodiment of the present invention. In the figure, 1 is a gas circulation path, 3 is a discharge part, 4 is a gas circulator,
6 is a laser gas supply device, and 10 is a cleaning gas supply device.
Claims (1)
ると共にこれを循環しながらガス循環路の放電部の電極
間で放電を行ってレーザを出力し、そのレーザ発振中上
記電極に炭素が付着した際、上記放電部での放電を中断
し、ガス循環路中のレーザガスを排気したのち、そのガ
ス循環路内に酸素を含むクリーニングガスを充填すると
共に上記放電部で放電を行って付着酸素を除去すること
を特徴とするCOレーザ装置の電極表面付着炭素除去方
法。1. A gas circulation path is filled with a laser gas containing CO, and while circulating this gas, discharge is performed between electrodes of a discharge part of the gas circulation path to output a laser, and carbon is emitted to the electrode during the laser oscillation. When adhered, the discharge in the discharge part is interrupted, the laser gas in the gas circulation path is exhausted, and then a cleaning gas containing oxygen is filled in the gas circulation path, and discharge is performed in the discharge part to deposit oxygen. A method for removing carbon adhering to the electrode surface of a CO laser device, which comprises removing carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24305489A JPH0714085B2 (en) | 1989-09-19 | 1989-09-19 | Method for removing carbon adhering to electrode surface of CO laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24305489A JPH0714085B2 (en) | 1989-09-19 | 1989-09-19 | Method for removing carbon adhering to electrode surface of CO laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03104291A JPH03104291A (en) | 1991-05-01 |
| JPH0714085B2 true JPH0714085B2 (en) | 1995-02-15 |
Family
ID=17098123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24305489A Expired - Lifetime JPH0714085B2 (en) | 1989-09-19 | 1989-09-19 | Method for removing carbon adhering to electrode surface of CO laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0714085B2 (en) |
-
1989
- 1989-09-19 JP JP24305489A patent/JPH0714085B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03104291A (en) | 1991-05-01 |
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