JPH071460B2 - Displacement control mechanism using piezoelectric element - Google Patents
Displacement control mechanism using piezoelectric elementInfo
- Publication number
- JPH071460B2 JPH071460B2 JP62076789A JP7678987A JPH071460B2 JP H071460 B2 JPH071460 B2 JP H071460B2 JP 62076789 A JP62076789 A JP 62076789A JP 7678987 A JP7678987 A JP 7678987A JP H071460 B2 JPH071460 B2 JP H071460B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- bellows
- chamber
- displacement
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 32
- 238000005192 partition Methods 0.000 claims description 15
- 239000003921 oil Substances 0.000 description 4
- 230000008602 contraction Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000010720 hydraulic oil Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Control Of Position Or Direction (AREA)
Description
【発明の詳細な説明】 （イ）発明の目的 ［産業上の利用分野］ この発明は部材の微小な変位や位置決めを行う場合に使
用する変位制御機構に関するものである。DETAILED DESCRIPTION OF THE INVENTION (a) Object of the Invention [Industrial field of application] The present invention relates to a displacement control mechanism used when performing minute displacement or positioning of a member.
［従来の技術］ 例えば、スプール弁はスプールとよばれる段付円柱状の
棒を左右に動かして油路の切替を行い、油圧や流量の制
御を行うものであり、このスプール弁のスプールを電気
信号によって左右に駆動する必要があり、このために、
高速・高精度に変位または位置を制御し得る直動形変位
機構が必要である。[Prior Art] For example, in a spool valve, a stepped columnar rod called a spool is moved left and right to switch oil passages to control hydraulic pressure and flow rate. It has to be driven left and right by the signal, for this,
A direct-acting type displacement mechanism capable of controlling displacement or position at high speed and with high accuracy is required.
このような高速・高精度の直動形変位機構の一種として
従来、圧電素子の変形を利用したものが知られている。
この圧電素子を利用した従来の直動形変位機構は圧電素
子と油圧シリンダを使用し、圧電素子に電圧を印加した
場合の圧電素子の収縮と回復をピストンロッドに伝達し
て圧電素子の変形を油圧シリンダで拡大して出力するも
のである。As a kind of such a high-speed and high-accuracy linear movement type displacement mechanism, conventionally, one utilizing deformation of a piezoelectric element is known.
A conventional direct-acting displacement mechanism using this piezoelectric element uses a piezoelectric element and a hydraulic cylinder, and transmits the contraction and recovery of the piezoelectric element when a voltage is applied to the piezoelectric element to the piston rod to deform the piezoelectric element. The output is expanded with a hydraulic cylinder.
［発明が解決しようとする問題点］ しかるに、このような油圧シリンダを利用した直動形変
位機構では、構造が複雑であるばかりでなく、油圧シリ
ンダに油の漏洩の恐れがあって、経時的に信頼性の低下
の恐れがあった。[Problems to be Solved by the Invention] However, in such a direct-acting displacement mechanism using a hydraulic cylinder, not only is the structure complicated, but there is a risk of oil leaking into the hydraulic cylinder, which may lead to deterioration over time. There was a fear of a decrease in reliability.
更に、変位制御機構の特性を変更することが容易でな
く、また負荷との結合が容易でないという問題があり、
これらの点の解決が望まれている。Furthermore, there are problems that it is not easy to change the characteristics of the displacement control mechanism, and it is not easy to connect with a load.
The solution of these points is desired.
この発明は上記の如き事情に鑑みてなされたものであっ
て、構造が簡単で、特性を容易に変更でき、負荷との結
合が容易であり、更に油圧シリンダを用いた場合のよう
な油の漏洩の恐れがない直動形変位機構を提供すること
を目的とするものである。The present invention has been made in view of the above circumstances, and has a simple structure, its characteristics can be easily changed, it can be easily coupled with a load, and the oil used in a hydraulic cylinder can be improved. It is an object of the present invention to provide a direct-acting displacement mechanism that is free from leakage.
（ロ）発明の構成 ［問題を解決するための手段］ この目的に対応して、この発明の圧電素子を用いた変位
制御機構は、圧電素子と、前記圧電素子に電圧を印加し
得るオブザーバによる状態フィードバックを付加した駆
動回路と、及びベローズアクチュエータとを備え、前記
ベローズアクチュエータは貫通孔を有する固定隔壁と、
壁の一部分を第１のベローズで構成し前記固定隔壁の一
方の側に位置する容積可変の第１の室と、壁の一部分を
第２のベローズで構成し前記固定隔壁の他方の側に位置
する容積可変の第２の室とを備え、前記第１の室と前記
第２の室は前記固定隔壁の前記貫通孔を通して連通して
おり、前記圧電素子の変形によって前記第１の室の容積
を変えるように構成したことを特徴としている。(B) Configuration of the Invention [Means for Solving the Problem] To this end, a displacement control mechanism using a piezoelectric element of the present invention comprises a piezoelectric element and an observer capable of applying a voltage to the piezoelectric element. A drive circuit having state feedback added thereto; and a bellows actuator, wherein the bellows actuator has a fixed partition wall having a through hole,
A volume-variable first chamber having a part of a wall formed by a first bellows and located on one side of the fixed partition wall, and a part of the wall formed by a second bellows and located on the other side of the fixed partition wall. And a second chamber having a variable volume, wherein the first chamber and the second chamber communicate with each other through the through hole of the fixed partition wall, and the volume of the first chamber is changed by the deformation of the piezoelectric element. It is characterized by being configured to change.
以下、この発明の詳細を一実施例を示す図面について説
明する。Hereinafter, details of the present invention will be described with reference to the drawings illustrating an embodiment.
第１図において、１は直動形変位制御機構であり、被駆
動体の一例としてのスプール弁２の駆動に適用する場合
が示されている。In FIG. 1, reference numeral 1 denotes a direct-acting displacement control mechanism, which is applied to drive a spool valve 2 as an example of a driven body.
直動形変位制御機構１は圧電素子３、駆動回路４、ベロ
ーズアクチュエータ５を備えている。圧電素子３として
は例えばPZTの薄片を重ね合せた積層形圧電素子を利用
することができる。圧電素子３の一端を固定体７に取り
付け、他端をベローズアクチュエータ５の第１の移動壁
15に取付けている。このベローズアクチュエータ５は圧
電素子３の変位を拡大するためのものである。The direct-acting displacement control mechanism 1 includes a piezoelectric element 3, a drive circuit 4, and a bellows actuator 5. As the piezoelectric element 3, for example, a laminated piezoelectric element in which thin pieces of PZT are stacked can be used. One end of the piezoelectric element 3 is attached to the fixed body 7, and the other end is the first moving wall of the bellows actuator 5.
It is attached to 15. The bellows actuator 5 is for expanding the displacement of the piezoelectric element 3.
駆動回路４は圧電素子３に電圧を印加するためのもので
ある。ベローズアクチュエータ５は固定位置にある固定
隔壁８を有する。固定隔壁８は左右に貫通する貫通孔11
を有する。The drive circuit 4 is for applying a voltage to the piezoelectric element 3. The bellows actuator 5 has a fixed partition wall 8 in a fixed position. The fixed partition wall 8 has a through hole 11 penetrating left and right.
Have.
固定隔壁８の一方の側には第１の室12が設けられ、他方
の側には第２の室13が設けられる。第１の室12は容積可
変であって、第１のベローズ14と第１の移動壁15とで構
成されている。第１のベローズ14の一方の開口端には第
１の移動壁15が取付けられて閉じられており、第１のベ
ローズの他方の開口端は固定隔壁８に取付けられて閉じ
られている。第１の室12は第１のベローズ14の伸縮によ
って容積可変である。第１の移動壁15には圧電素子３の
他端が固定している。第２の室13は容積可変であって、
第２のベローズ16と第２の移動壁17とで構成されてい
る。第２のベローズ16の一方の開口端には第２の移動壁
17が取付けられて閉じられており、第２のベローズ16の
他方の開口端は固定隔壁８に取付けられて閉じられてい
る。第２の室13は第２のベローズ16の伸縮によって容積
可変である。A first chamber 12 is provided on one side of the fixed partition wall 8 and a second chamber 13 is provided on the other side. The first chamber 12 has a variable volume and is composed of a first bellows 14 and a first moving wall 15. A first moving wall 15 is attached and closed at one opening end of the first bellows 14, and the other opening end of the first bellows is attached and closed at the fixed partition wall 8. The volume of the first chamber 12 is variable by the expansion and contraction of the first bellows 14. The other end of the piezoelectric element 3 is fixed to the first moving wall 15. The second chamber 13 has a variable volume,
It is composed of a second bellows 16 and a second moving wall 17. A second moving wall is provided at one open end of the second bellows 16.
17 is attached and closed, and the other open end of the second bellows 16 is attached and closed to the fixed partition wall 8. The volume of the second chamber 13 can be changed by expanding and contracting the second bellows 16.
第２のベローズ16は第１のベローズ14よりも径が小さ
い。第１の室12と第２の室13とは固定隔壁８の貫通孔11
を通して連通しており、かつ内部に作動油20が充填され
ている。The diameter of the second bellows 16 is smaller than that of the first bellows 14. The first chamber 12 and the second chamber 13 have a through hole 11 in the fixed partition wall 8.
Through, and hydraulic oil 20 is filled inside.
第２の移動壁17にはスプール弁２のスプール18が連結す
る。第２図に示すように、駆動回路４は制御対象21とオ
ブザーバ22とからなっている。制御対象21は圧電素子３
のヒステリシスによる位置決め精度の劣化を補正するた
めに、第２の移動壁17の変位を変位検出器23で検出して
フィードバックをとっている。The spool 18 of the spool valve 2 is connected to the second moving wall 17. As shown in FIG. 2, the drive circuit 4 comprises a controlled object 21 and an observer 22. Control target 21 is piezoelectric element 3
In order to correct the deterioration of the positioning accuracy due to the hysteresis, the displacement of the second moving wall 17 is detected by the displacement detector 23 and is fed back.
また、変位の拡大に使用したベローズアクチュエータ５
は減衰の少ない質量・ダンパ・ばね系であるので、高性
能変位アクチュエータを実現するためには、その動特性
を改善する必要があり、オブザーバ22による状態フィー
ドバックを付加している。オブザーバ22はシステムの状
態変数を推定して制御対象21にフィードバックするもの
で、このようなオブザーバ自体は従来から知られている
手法である。Also, the bellows actuator 5 used to expand the displacement
Since is a mass-damper-spring system with little damping, it is necessary to improve its dynamic characteristics in order to realize a high-performance displacement actuator, and state feedback by an observer 22 is added. The observer 22 estimates the state variable of the system and feeds it back to the controlled object 21, and such an observer itself is a conventionally known method.
［作用］ このように構成された変位制御機構の動作は次の通りで
ある。[Operation] The operation of the displacement control mechanism configured as described above is as follows.
スプール弁２のスプール18を駆動する場合には、まず、
駆動回路４により電圧を圧電素子３に印加する。これに
より圧電素子３は収縮し、第１の移動壁15を引張り、第
１のベローズ14を伸長させ、その分だけ、第２の室13が
縮小されて圧力が平衡する。第２の室13の縮小によって
第２の移動壁17が後退し、この動きがスプール18を駆動
する。第２のベローズ16の径は第１のベローズ14の径よ
りも小さいので、第１のベローズ14の変位は第２のベロ
ーズ16では拡大される。When driving the spool 18 of the spool valve 2, first,
A voltage is applied to the piezoelectric element 3 by the drive circuit 4. As a result, the piezoelectric element 3 contracts, pulls the first moving wall 15 and extends the first bellows 14, and the second chamber 13 is reduced by that amount and the pressure is balanced. The contraction of the second chamber 13 causes the second moving wall 17 to retract and this movement drives the spool 18. Since the diameter of the second bellows 16 is smaller than that of the first bellows 14, the displacement of the first bellows 14 is enlarged by the second bellows 16.
［実施例］ 圧電素子をPZTの薄片を重ね合せた積層形圧電素子と
し、その大きさを５×５×18（単位mm）とする。[Embodiment] The piezoelectric element is a laminated piezoelectric element in which thin pieces of PZT are laminated, and the size thereof is 5 × 5 × 18 (unit: mm).
この場合の上記積層形圧電素子の素子先端の変位の静特
性は第３図に示す通りであって、定格電圧150Vで約16μ
ｍ程度の変位が得られる。これを面積比が20、すなわち
変位拡大率がほぼ20倍のベローズアクチュエータを介し
て拡大し、スプールを駆動した。その結果、スプールの
駆動に必要な300μｍ程度の変位が得られた。The static characteristics of the displacement of the element tip of the above-mentioned laminated piezoelectric element in this case are as shown in FIG.
A displacement of about m can be obtained. This was expanded through a bellows actuator with an area ratio of 20, that is, a displacement expansion ratio of about 20 times, and the spool was driven. As a result, the displacement of about 300 μm required for driving the spool was obtained.
（ハ）発明の効果 この発明の直動形変位制御機構では、変位源として圧電
素子を使用するので、高速・高精度の変位制御が可能と
なり、また構造が簡単で、更に、変位制御機構の特性を
任意に変更することが容易である。しかも、負荷との結
合が容易である。また、変位拡大機構としてベローズ機
構を使用するので、油の漏洩の恐れもない。(C) Effect of the Invention In the direct-acting displacement control mechanism of the present invention, since the piezoelectric element is used as the displacement source, high-speed and high-precision displacement control is possible, and the structure is simple. It is easy to change the characteristics arbitrarily. Moreover, the connection with the load is easy. Further, since the bellows mechanism is used as the displacement magnifying mechanism, there is no risk of oil leakage.
第１図はこの発明の一実施例に係わる直動形変位制御機
構を示す構成説明図、第２図は駆動回路の構成図、及び
第３図は積層形圧電素子の静特性を示すグラフである。 １……直動形変位制御機構、２……スプール弁、３……
圧電素子、４……駆動回路、５……ベローズアクチュエ
ータ、７……固定体、８……固定隔壁、11……貫通孔、
12……第１の室、13……第２の室、14……第１のベロー
ズ、15……第１の移動壁、16……第２のベローズ、17…
…第２の移動壁、18……スプール、20……作動油、21…
…制御対象、22……オブザーバ、23……変位検出器FIG. 1 is a structural explanatory view showing a direct-acting displacement control mechanism according to an embodiment of the present invention, FIG. 2 is a structural view of a drive circuit, and FIG. 3 is a graph showing static characteristics of a laminated piezoelectric element. is there. 1 ... Direct acting displacement control mechanism, 2 ... Spool valve, 3 ...
Piezoelectric element, 4 ... Driving circuit, 5 ... Bellows actuator, 7 ... Fixed body, 8 ... Fixed partition wall, 11 ... Through hole,
12 ... First chamber, 13 ... Second chamber, 14 ... First bellows, 15 ... First moving wall, 16 ... Second bellows, 17 ...
... second moving wall, 18 ... spool, 20 ... hydraulic oil, 21 ...
… Control object, 22 …… Observer, 23 …… Displacement detector
Claims (1)
得るオブザーバによる状態フィードバックを付加した駆
動回路と、及びベローズアクチュエータとを備え、前記
ベローズアクチュエータは貫通孔を有する固定隔壁と、
壁の一部分を第１のベローズで構成し前記固定隔壁の一
方の側に位置する容積可変の第１の室と、壁の一部分を
第２のベローズで構成し前記固定隔壁の他方の側に位置
する容積可変の第２の室とを備え、前記第１の室と前記
第２の室は前記固定隔壁の前記貫通孔を通して連通して
おり、前記圧電素子の変形によって前記第１の室の容積
を変えるように構成したことを特徴とする圧電素子を用
いた変位制御機構1. A piezoelectric element, a drive circuit to which state feedback is added by an observer capable of applying a voltage to the piezoelectric element, and a bellows actuator, wherein the bellows actuator includes a fixed partition wall having a through hole.
A volume-variable first chamber having a part of a wall formed by a first bellows and located on one side of the fixed partition wall, and a part of the wall formed by a second bellows and located on the other side of the fixed partition wall. And a second chamber having a variable volume, wherein the first chamber and the second chamber communicate with each other through the through hole of the fixed partition wall, and the volume of the first chamber is changed by the deformation of the piezoelectric element. Displacement control mechanism using a piezoelectric element characterized by being configured to change
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62076789A JPH071460B2 (en) | 1987-03-30 | 1987-03-30 | Displacement control mechanism using piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62076789A JPH071460B2 (en) | 1987-03-30 | 1987-03-30 | Displacement control mechanism using piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63244118A JPS63244118A (en) | 1988-10-11 |
| JPH071460B2 true JPH071460B2 (en) | 1995-01-11 |
Family
ID=13615386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62076789A Expired - Lifetime JPH071460B2 (en) | 1987-03-30 | 1987-03-30 | Displacement control mechanism using piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071460B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5126947B2 (en) * | 2007-04-12 | 2013-01-23 | 学校法人金沢工業大学 | Displacement conversion unit, processing machine |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5427116B2 (en) * | 1973-01-31 | 1979-09-07 | ||
| JPS588052A (en) * | 1981-07-07 | 1983-01-18 | Sumitomo Chem Co Ltd | Preparation of phenyl isocyanate compound |
| JPS6182108A (en) * | 1984-08-30 | 1986-04-25 | Ikegai Corp | Actuator for fine position detection |
-
1987
- 1987-03-30 JP JP62076789A patent/JPH071460B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63244118A (en) | 1988-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |