JPH0717447B2 - PLZT manufacturing method - Google Patents
PLZT manufacturing methodInfo
- Publication number
- JPH0717447B2 JPH0717447B2 JP61298906A JP29890686A JPH0717447B2 JP H0717447 B2 JPH0717447 B2 JP H0717447B2 JP 61298906 A JP61298906 A JP 61298906A JP 29890686 A JP29890686 A JP 29890686A JP H0717447 B2 JPH0717447 B2 JP H0717447B2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- plzt
- zirconium
- calcined
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000843 powder Substances 0.000 claims description 57
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 13
- 229910052726 zirconium Inorganic materials 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 10
- 239000000470 constituent Substances 0.000 claims description 10
- 238000001354 calcination Methods 0.000 claims description 9
- 238000006460 hydrolysis reaction Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 238000005245 sintering Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 description 18
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 17
- 239000010936 titanium Substances 0.000 description 15
- 239000002994 raw material Substances 0.000 description 12
- 239000007864 aqueous solution Substances 0.000 description 11
- 239000000243 solution Substances 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 5
- CMOAHYOGLLEOGO-UHFFFAOYSA-N oxozirconium;dihydrochloride Chemical compound Cl.Cl.[Zr]=O CMOAHYOGLLEOGO-UHFFFAOYSA-N 0.000 description 5
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000007731 hot pressing Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 3
- 238000005054 agglomeration Methods 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 229910052746 lanthanum Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- FYDKNKUEBJQCCN-UHFFFAOYSA-N lanthanum(3+);trinitrate Chemical compound [La+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O FYDKNKUEBJQCCN-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OERNJTNJEZOPIA-UHFFFAOYSA-N zirconium nitrate Chemical compound [Zr+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O OERNJTNJEZOPIA-UHFFFAOYSA-N 0.000 description 2
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- UJVRJBAUJYZFIX-UHFFFAOYSA-N nitric acid;oxozirconium Chemical compound [Zr]=O.O[N+]([O-])=O.O[N+]([O-])=O UJVRJBAUJYZFIX-UHFFFAOYSA-N 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- ATYZRBBOXUWECY-UHFFFAOYSA-N zirconium;hydrate Chemical compound O.[Zr] ATYZRBBOXUWECY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は一般式が (Pb1-xLax)(Zr1-yTiy)1-x/4O3 (O<X0.3 Oy1.0) で示されるPLZTの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention has a general formula of (Pb 1-x La x ) (Zr 1-y Ti y ) 1-x / 4 O 3 (O <X 0.3 Oy 1 .0) for manufacturing PLZT.
PLZTは偏光素子、光シャッタ、画像記憶素子などのオプ
トセラミックスとして広範囲の応用が期待されている。PLZT is expected to have a wide range of applications as optoceramics such as polarizing elements, optical shutters, and image storage elements.
PLZTの構成成分の原料粉末の中で、ジルコニヤ原料粉末
は極めて凝集し易い。この様なジルコニヤ原料粉末を使
用して乾式法でPLZT原料粉末を作成しても平均粒径は1
〜2μm以上のものとなる。この程度の粒度のPLZT原料
粉末を使用しても、高密度且つ透光性が高く光学的に均
一なPLZTを得ることは難しい。また高密度の焼結体を製
作するためにホットプレスあるいはHIPなどの成型法が
採用されるが上記原料粉末にホットプレス等を適用して
も高密度のPLZTを得ることは難しい。Among the raw material powders of the constituents of PLZT, the zirconia raw material powder is extremely likely to aggregate. Even if a PLZT raw material powder is prepared by a dry method using such a zirconia raw material powder, the average particle size is 1
˜2 μm or more. Even if PLZT raw material powder having such a particle size is used, it is difficult to obtain PLZT having high density, high light transmittance, and optical uniformity. Further, in order to produce a high-density sintered body, a hot pressing method or a molding method such as HIP is adopted, but it is difficult to obtain a high density PLZT even if the hot pressing is applied to the raw material powder.
本発明は前記のPLZTの乾式法による合成における欠点を
解消すべくなされたもので、その目的は、分散性の良い
サブミクロン級の変成ジルコニヤ原料粉末を作成し、該
粉末を用いて単なる乾式法によって易焼結性且つ高嵩密
度のPLZT粉末を合成し、更にこの粉末を焼結して高密度
且つ透光性が高く光学的に均一なPLZTを製造する方法を
提供することにある。The present invention has been made to solve the above-mentioned drawbacks in the synthesis of PLZT by a dry method, and an object thereof is to prepare a modified zirconia raw material powder of a submicron class having good dispersibility, and use the powder to perform a simple dry method. The object of the present invention is to provide a method of synthesizing a PLZT powder having a high sinterability and a high bulk density, and further sintering the powder to produce a PLZT having a high density and a high light-transmitting property and being optically uniform.
本発明者らは前記目的を達成すべく鋭意研究の結果、 一般式 (Pb1-xLax)(Zr1-yTiy)1-x/4O3 (O<X0.3,Oy1.0) で示されるPLZTの乾式法による製造過程のおいて、ジル
コニウム以外の少なくとも一金属成分の適量とジルコニ
ウムとを含有する溶液を作り、加水分解反応を行わせる
ことによってゾルを生成すると系の不均一のためのZr含
有粒子の凝集が起こりにくくなりその後乾燥を行ない70
0〜1300℃で仮焼すると、凝集の極めて少ないサブミク
ロン級の粉末(変成ジルコニヤ粉末)と成し得ることが
分った。これを原料とし、目的とするPLZT組成の残りの
構成部分の化合物を乾式法によって混合すれば、サブミ
クロン級の粉末特性の優れた原料粉末が容易に得られ、
これを成型して焼結すると、ホットプレスやHIP(熱間
ガス圧焼結)などの操作を省略しても極めて高密度且つ
透光性が高く光学的に均一なPLZTが容易に得られること
を究明し得た。この知見に基いて本発明を完成した。As a result of earnest research to achieve the above object, the present inventors have found that the general formula (Pb 1-x La x ) (Zr 1-y Ti y ) 1-x / 4 O 3 (O <X 0.3, Oy 1. In the manufacturing process of PLZT by the dry method shown in (1), a solution containing an appropriate amount of at least one metal component other than zirconium and zirconium is prepared, and a hydrolysis reaction is performed to form a sol. Aggregation of Zr-containing particles is less likely to occur for uniformity, and then dried 70
It has been found that calcination at 0 to 1300 ° C can form a submicron grade powder (modified zirconia powder) with extremely few agglomerates. By using this as a raw material and mixing the compounds of the remaining constituent parts of the desired PLZT composition by a dry method, a raw material powder having excellent submicron grade powder characteristics can be easily obtained,
If this is molded and sintered, it is possible to easily obtain an optically uniform PLZT with extremely high density and high light-transmitting property even if operations such as hot pressing and HIP (hot gas pressure sintering) are omitted. Could be determined. The present invention has been completed based on this finding.
本発明の要旨は次の三つの工程の組み合わせにある。The gist of the present invention is a combination of the following three steps.
(1)PLZTを構成するジルコニウム以外の少なくとも一
金属成分の適量と、ジルコニウムとを含有する溶液を作
り、加水分解反応を行って、ゾルを生成し、該ゾル体を
乾燥後700〜1300℃て仮焼する工程;この工程ではその
凝集が避けられPZT,ZT等にも使用することができる変成
ジルコニアが製造される。(1) A solution containing zirconium and an appropriate amount of at least one metal component other than zirconium constituting PLZT is prepared, and a hydrolysis reaction is performed to produce a sol, and the sol is dried at 700 to 1300 ° C. Calcination step: In this step, agglomeration is avoided and modified zirconia that can be used for PZT, ZT, etc. is produced.
(2)(1)の工程で得られた仮焼物と、目的とするPL
ZT組成の残りの構成成分の化合物を混合して500〜1000
℃で仮焼する工程;この工程では残りの構成成分の添加
によって所望の化合物組成が得られる。(2) The calcined product obtained in the process of (1) and the target PL
Mix the remaining constituent compounds of the ZT composition to 500-1000
Step of calcination at ° C; In this step, the desired compound composition is obtained by adding the remaining constituents.
(3)得られた仮焼粉末を成型して1000〜1300℃で焼結
する工程、 とから成ることを特徴とするPLZTの製造方法にある。(3) A step of molding the obtained calcined powder and sintering at 1000 to 1300 ° C., and a method for producing PLZT.
ジルコニウム溶液(水溶液又はアルコール溶液)を作成
するための化合物としては、オキシ塩化ジルコニウム、
オキシ硝酸ジルコニウム、塩化ジルコニウム、硝酸ジル
コニウム、及び、金属ジルコニウム等が挙げられる。As a compound for preparing a zirconium solution (aqueous solution or alcohol solution), zirconium oxychloride,
Examples thereof include zirconium oxynitrate, zirconium chloride, zirconium nitrate, and metallic zirconium.
ジルコニウム溶液の溶媒としては上記化合物を溶解させ
る水またはアルコールを用いる。上記化合物はすべて水
に可溶であり、オキシ塩化ジルコニウム、塩化ジルコニ
ウムおよび四塩化チタンはエタノールに可溶である。さ
らに、ジルコニウム溶液を作製するために、金属ジルコ
ニウムを王水、HFで溶解して用いることもできる。As a solvent for the zirconium solution, water or alcohol that dissolves the above compound is used. All the above compounds are soluble in water, zirconium oxychloride, zirconium chloride and titanium tetrachloride are soluble in ethanol. Furthermore, in order to prepare a zirconium solution, metallic zirconium can be dissolved in aqua regia or HF and used.
ジルコニウム以外の少なくとも一成分の溶液を作製する
ための化合物としては、鉛はPb(NO3)2,ランタンはLa(N
O3)3,LaCl3,La2(SO4)3,チタンはTi(NO3)4,TiCl4及
びTi(SO4)2等が挙げられる。この溶液の溶媒としては水
またはアルコールを用いる。ジルコニウム溶液とジルコ
ニウム以外の溶液は別々に調整してもよく、また同一の
溶媒に各化合物を溶解させて調整してもよい。加水分解
反応は、加熱状態(100℃前後)で行なわせ、ゾルは濾
過及び洗浄により回収する。As a compound for preparing a solution of at least one component other than zirconium, lead is Pb (NO 3 ) 2 and lanthanum is La (N
O 3 ) 3 , LaCl 3 , La 2 (SO 4 ) 3 and titanium include Ti (NO 3 ) 4 , TiCl 4 and Ti (SO 4 ) 2 . Water or alcohol is used as the solvent of this solution. The zirconium solution and the solution other than zirconium may be prepared separately, or may be prepared by dissolving each compound in the same solvent. The hydrolysis reaction is performed in a heated state (around 100 ° C), and the sol is collected by filtration and washing.
ジルコニウム溶液に溶解するPLZTの構成成分の種類とそ
の量は、構成成分の添加によって最終的に得られるジル
コニヤ粉末の凝集を有効に抑制し得られるものが好まし
い。The type and amount of the constituent components of PLZT dissolved in the zirconium solution are preferably those that can effectively suppress the agglomeration of the zirconia powder finally obtained by adding the constituent components.
仮焼温度は、700〜1300℃である。700℃より低いと凝集
が顕著に起り、1300℃を超えると粒子が粗大化する傾向
がある。この様にして得られたものに、ジルコニウム以
外の構成成分の不足分を加えて混合する。勿論、ジルコ
ニヤに添加した成分の不足分も補充する必要がある。こ
の場合、いずれの化合物粉末(主として酸化物)の粒度
もサブミクロン級のものを使用する。ただし、酸化鉛粉
末は粗大粒径のものを使用しても、得られるPLZT粉末の
特性に殆んど影響を与えない。The calcination temperature is 700 to 1300 ° C. If the temperature is lower than 700 ° C, agglomeration will occur remarkably, and if it exceeds 1300 ° C, the particles tend to become coarse. A shortage of constituents other than zirconium is added to the thus obtained material and mixed. Of course, it is necessary to replenish the deficiency of the components added to zirconia. In this case, the particle size of any compound powder (mainly oxide) is submicron grade. However, even if the lead oxide powder having a coarse particle size is used, it has almost no effect on the properties of the obtained PLZT powder.
これら混合物の仮焼温度は、Tiを含む場合、Laを含む場
合、TiとLaを含む場合とで、500〜1000℃の範囲で大幅
に変化する。要は固相反応がほぼまたは完全に完了する
最低温度以上で、顕著な粒子成長が生じない最高温度範
囲内であることが必要である。The calcination temperature of these mixtures significantly changes in the range of 500 to 1000 ° C. depending on whether Ti is contained, La is contained, or Ti and La are contained. In short, it is necessary to be above the minimum temperature at which the solid-phase reaction is almost or completely completed and within the maximum temperature range where significant particle growth does not occur.
この様にして得られた粉末を成型する。焼結温度は前記
の混合物の仮焼温度と同様にその構成成分の種類によっ
て異なるが、一般に1000〜1300℃の範囲である。1000℃
より低いと焼結が不十分で高密度が得られず、1300℃を
超えると粒子が粗大化したり、あるいはPbの揮発が促進
される。The powder thus obtained is molded. The sintering temperature varies depending on the kind of the constituents as in the case of the calcination temperature of the mixture, but is generally in the range of 1000 to 1300 ° C. 1000 ° C
If it is lower than this, sintering will be insufficient and a high density will not be obtained, and if it exceeds 1300 ° C, the particles will become coarse or Pb will be volatilized.
〔実施例1〕 四塩化チタン水溶液(1.250/mol濃度) 40.0ccとオキシ塩化ジルコニウム水溶液(1.250/mol
濃度)160.0ccを混合した。この混合水溶液を100℃で10
0時間保持することによって加水分解反応を行い、Ti4+
とZr4+を含むゾルを得た。これを洗浄、乾燥した後1100
℃で仮焼して(Zr0.8Ti0.2)O2粉末を作成した。Example 1 Titanium tetrachloride aqueous solution (1.250 / mol concentration) 40.0cc and zirconium oxychloride aqueous solution (1.250 / mol concentration)
(Concentration) 160.0 cc was mixed. This mixed aqueous solution is heated at 100 ° C for 10
Hydrolysis reaction is carried out by holding for 0 hours, and Ti 4+
And a sol containing Zr 4+ was obtained. After washing and drying this, 1100
It was calcined at ℃ to prepare (Zr 0.8 Ti 0.2 ) O 2 powder.
この粉末の平均粒径は0.32μmであった。The average particle size of this powder was 0.32 μm.
該粉末9.102grと市販のTiO2微粉末1.465gr、PbO粉末
(平均粒径15μm)20.311gr、La2O3微粉末1.466grと
を、ボールミルで一昼夜混合した後、850℃で2時間仮
焼して(Pb0.91La0.09)(Zr0.65Ti0.35)0.978O3粉末を得
た。その平均粒径は0.32μmであった。該粉末を1tor/
cm2で成型したタブレットを、鉛蒸気、酸素ガス共存雰
囲気下、1200℃で10時間焼結した。得られたものの密度
は7.84に達し、透光率は波長600nmを用いたサンプル厚
み2.5mmの場合約45%であった。The powder 9.102gr, commercially available TiO 2 fine powder 1.465gr, PbO powder (average particle size 15 μm) 20.311gr, and La 2 O 3 fine powder 1.466gr were mixed in a ball mill for one day and then calcined at 850 ° C. for 2 hours. Then, (Pb 0.91 La 0.09 ) (Zr 0.65 Ti 0.35 ) 0.978 O 3 powder was obtained. The average particle size was 0.32 μm. 1 tor of the powder
A tablet molded in cm 2 was sintered at 1200 ° C. for 10 hours in an atmosphere containing lead vapor and oxygen gas. The density of the obtained product reached 7.84, and the light transmittance was about 45% at a sample thickness of 2.5 mm using a wavelength of 600 nm.
〔実施例2〕 四塩化チタン水溶液(1.250/mol濃度) 40.00cc、硝酸ランタン水溶液(1.250/mol濃度)10.0
ccとオキシ塩化ジルコニウム水溶液(1.250/mol濃
度)160ccを混合した。この混合水溶液を100℃で100時
間保持することによって加水分解反応を行いLa3+とTi4+
とZr4+を含むゾルを得た。これを洗浄、乾燥した後1100
℃で仮焼してLa0.05(Zr0.8Ti0.2)O2.075粉末を作成し
た。Example 2 Titanium tetrachloride aqueous solution (1.250 / mol concentration) 40.00cc, lanthanum nitrate aqueous solution (1.250 / mol concentration) 10.0
cc and 160 cc of zirconium oxychloride aqueous solution (1.250 / mol concentration) were mixed. By holding this mixed aqueous solution at 100 ° C for 100 hours, a hydrolysis reaction occurs and La 3+ and Ti 4+
And a sol containing Zr 4+ was obtained. After washing and drying this, 1100
It was calcined at ℃ to prepare La 0.05 (Zr 0.8 Ti 0.2 ) O 2.075 powder.
この粉末の平均粒径は0.32μmであった。該粉末9.750g
rと市販のTiO2微粉末1.465grとPbO粉末(平均粒径15μ
m)20.311grとLa2O3微粉末8.189gとをボールミルで一
昼夜混合した後、850℃で2時間仮焼して(Pb0.91L
a0.09)(Zr0.65Ti0.35)0.978O3粉末を得た。その平均粒
径は0.32μmであった。該粉末を1tor/cm2で成型した
タブレットを、鉛蒸気、酸素ガス共存雰囲気下、1200℃
で10時間焼結した。得られたものの密度は7.81に達し、
透光率は波長600nmを用いたサンプル厚み2.5mmの場合約
40%であった。The average particle size of this powder was 0.32 μm. 9.750 g of the powder
r Commercially available TiO 2 fine powder 1.465gr and PbO powder (average particle size 15μ
m) 20.311 gr and 8.189 g of La 2 O 3 fine powder were mixed in a ball mill for one day and then calcined at 850 ° C. for 2 hours (Pb 0.91 L
a 0.09 ) (Zr 0.65 Ti 0.35 ) 0.978 O 3 powder was obtained. The average particle size was 0.32 μm. A tablet formed by molding the powder at 1 tor / cm 2 is heated to 1200 ° C in an atmosphere containing lead vapor and oxygen gas.
Sintered for 10 hours. The density of the obtained one reaches 7.81,
The light transmittance is about 2.5 mm for a sample thickness of 2.5 mm using a wavelength of 600 nm.
It was 40%.
〔実施例3〕 硝酸ランタン水溶液(1.250/mol濃度)22.652ccとオ
キシ塩化ジルコニウム水溶液(1.250/mol濃度)160cc
を混合した。この混合水溶液を100℃で100時間保持する
ことによって加水分解反応を行い、La3+とZr4+を含むゾ
ルを得た。これを洗浄、乾燥した後1100℃で仮焼してLa
0.09Zr0.6357O1.406粉末を得た。[Example 3] Lanthanum nitrate aqueous solution (1.250 / mol concentration) 22.652cc and zirconium oxychloride aqueous solution (1.250 / mol concentration) 160cc
Were mixed. By holding this mixed aqueous solution at 100 ° C. for 100 hours, a hydrolysis reaction was performed to obtain a sol containing La 3+ and Zr 4+ . This is washed and dried, then calcined at 1100 ° C and La
0.09 Zr 0.6357 O 1.406 powder was obtained.
この粉末の平均粒径は0.32μmであった。The average particle size of this powder was 0.32 μm.
該粉末18.723grと市販のTiO2微粉末5.507grとPbO粉末
(平均粒径15μm)40.895grとをボールミルで一昼夜混
合した後、850℃で2時間仮焼して(Pb0.91La0.09)(Zr
0265Ti0.35)0.978O3粉末を得た。その平均粒径は0.41μ
mであった。該粉末を1tor/cm2で成型したタブレット
を、鉛蒸気、酸素ガス共存雰囲気下、1200℃で10時間焼
結した。得られたものの密度は7.80に達し、透光率は波
長600nmを用いサンプル厚み2.5mmの場合約36%であっ
た。The powder (18.723 gr), commercially available TiO 2 fine powder (5.507 gr) and PbO powder (average particle size 15 μm) (40.895 gr) were mixed with a ball mill all day and night, and then calcined at 850 ° C. for 2 hours (Pb 0.91 La 0.09 ) (Zr
0265 Ti 0.35 ) 0.978 O 3 powder was obtained. The average particle size is 0.41μ
It was m. A tablet obtained by molding the powder at 1 tor / cm 2 was sintered at 1200 ° C. for 10 hours in an atmosphere containing lead vapor and oxygen gas. The density of the obtained product reached 7.80, and the light transmittance was about 36% when the wavelength was 600 nm and the sample thickness was 2.5 mm.
市販PbO,TiO2,ZrO2,La2O3粉末を(Pb0.91La0.09)(Zr
0.65Ti0.35)0.978O3の組成になるように配合し、ボール
ミルで1昼夜混合した後900℃で2時間仮焼した。この
粉末を1t/cm2で成型し、実施例1,2,3と同じ条件下で焼
結した。Commercially available PbO, TiO 2 , ZrO 2 , and La 2 O 3 powders were added (Pb 0.91 La 0.09 ) (Zr
0.65 Ti 0.35 ) 0.978 O 3 was added and mixed in a ball mill for one day and then calcined at 900 ° C. for 2 hours. This powder was molded at 1 t / cm 2 and sintered under the same conditions as in Examples 1, 2 and 3.
得られたPLZTの密度は7.6程度であったが、透明な焼結
体にならなかった。なお仮焼時の粉末の平均粒径は2.8
μmであった。The density of the obtained PLZT was about 7.6, but it did not become a transparent sintered body. The average particle size of the powder during calcination is 2.8.
was μm.
本発明の方法によると、第1工程によりPLZTの構成成分
の一種以上を含むジルコニヤ粉末(変成ジルコニヤ粉
末)は、二次粒子の極めて少ないサブミクロン粒子とな
し得、これを使用することによって、以後単なる乾式法
によって、容易にサブミクロン級のPLZT原料粉末が得ら
れ、更にこれを原料として透光性が良く高密度のPLZTが
得られる、という優れた効果を奏し得られる。そのほか
次のような効果も奏し得られる。According to the method of the present invention, the zirconia powder (modified zirconia powder) containing at least one of the constituents of PLZT in the first step can be made into submicron particles having extremely few secondary particles. It is possible to obtain an excellent effect that a submicron-class PLZT raw material powder can be easily obtained by a simple dry method, and PLZT having good translucency and high density can be obtained from the raw material powder. In addition, the following effects can be obtained.
1)仮焼によって得られる変成ジルコニヤ粉末が充分分
散されたものが得られるため、仮焼物の粉砕工程を特に
必要としないで、原料粉末として供給し得られる。1) Since the modified zirconia powder obtained by calcination is sufficiently dispersed, the calcinated product can be supplied as a raw material powder without requiring a crushing step.
2)該仮焼変成ジルコニヤ粉末から乾式法で得られるPL
ZT粉末も単分散状態で得られ、従って粉砕工程を除いて
も十分易焼結性且つ高密度の特性を有する。2) PL obtained from the calcined modified zirconia powder by a dry method
The ZT powder is also obtained in a monodisperse state, and therefore has a property of being easily sinterable and having a high density even if the crushing step is omitted.
3)極めて高密度且つ光学的高均一性を要求されるオプ
トエレクトロニクス用PLZTをホットプレスやHIP(熱間
ガス圧焼結)などの操作を省略して単なる固相焼結によ
って、理論密度に極めて近い高密度で得ることができ
る。3) PLZT for optoelectronics, which requires extremely high density and high optical homogeneity, can be made to have theoretical density extremely high by omitting operations such as hot pressing and HIP (hot gas pressure sintering). It can be obtained with high density.
4)優れた粉末特性を有する変成ジルコニヤ粉末を大量
生産することによって、任意の組成のPLZTを極めて安価
に供給し得る。4) By mass-producing the modified zirconia powder having excellent powder characteristics, PLZT having an arbitrary composition can be supplied at extremely low cost.
Claims (3)
も一金属成分の適量と、ジルコニウムとを含有する溶液
を作り、加水分解反応を行って、ゾルを生成し、該ゾル
体を乾燥後700〜1300℃で仮焼する工程、1. A PLZT represented by the general formula (Pb 1-x La x ) (Zr 1-y Ti y ) 1-x / 4 O 3 (O <X0.3 Oy1.0) is constituted. An appropriate amount of at least one metal component other than zirconium, and a solution containing zirconium is prepared, a hydrolysis reaction is carried out to produce a sol, and the sol is dried and calcined at 700 to 1300 ° C.,
するPLZT組成の残りの構成成分の化合物を混合して500
〜1000℃で仮焼する工程、2. The calcined product obtained in the step (1) and the compound of the remaining constituents of the intended PLZT composition are mixed to obtain 500.
Calcination process at ~ 1000 ° C,
で焼結する工程からなることを特徴とするPLZTの製造方
法。3. The obtained calcined powder is molded to 1000 to 1300 ° C.
A method of manufacturing PLZT, which comprises a step of sintering at.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61298906A JPH0717447B2 (en) | 1986-12-17 | 1986-12-17 | PLZT manufacturing method |
| US07/135,971 US4832893A (en) | 1986-12-17 | 1987-12-16 | Method for producing a PLZT compound |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61298906A JPH0717447B2 (en) | 1986-12-17 | 1986-12-17 | PLZT manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63151675A JPS63151675A (en) | 1988-06-24 |
| JPH0717447B2 true JPH0717447B2 (en) | 1995-03-01 |
Family
ID=17865694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61298906A Expired - Lifetime JPH0717447B2 (en) | 1986-12-17 | 1986-12-17 | PLZT manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0717447B2 (en) |
-
1986
- 1986-12-17 JP JP61298906A patent/JPH0717447B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63151675A (en) | 1988-06-24 |
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