JPH0718832B2 - Moisture sensitive element - Google Patents
Moisture sensitive elementInfo
- Publication number
- JPH0718832B2 JPH0718832B2 JP61091143A JP9114386A JPH0718832B2 JP H0718832 B2 JPH0718832 B2 JP H0718832B2 JP 61091143 A JP61091143 A JP 61091143A JP 9114386 A JP9114386 A JP 9114386A JP H0718832 B2 JPH0718832 B2 JP H0718832B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- moisture
- insulating substrate
- quaternary ammonium
- sensitive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 125000001453 quaternary ammonium group Chemical group 0.000 claims description 15
- 229920001296 polysiloxane Polymers 0.000 claims description 14
- 125000003700 epoxy group Chemical group 0.000 claims description 7
- 125000000524 functional group Chemical group 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- 125000003277 amino group Chemical group 0.000 claims description 4
- 125000004076 pyridyl group Chemical group 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000009833 condensation Methods 0.000 claims description 3
- 230000005494 condensation Effects 0.000 claims description 3
- 238000004132 cross linking Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000005703 Trimethylamine hydrochloride Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- -1 polysiloxane Polymers 0.000 description 2
- 125000005372 silanol group Chemical group 0.000 description 2
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 2
- SZYJELPVAFJOGJ-UHFFFAOYSA-N trimethylamine hydrochloride Chemical compound Cl.CN(C)C SZYJELPVAFJOGJ-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 229920001600 hydrophobic polymer Polymers 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Paints Or Removers (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、各種電子機器において湿度センサーとして使
用される感湿素子に関するものである。TECHNICAL FIELD The present invention relates to a humidity sensitive element used as a humidity sensor in various electronic devices.
〈従来技術〉 従来の感湿素子は、塩化リチウム或はその他無機電解質
を含む有機高分子物質か又は親水性基を有する高分子と
疎水性高分子との共重合物等からなるものや、又はシラ
ノール基を有するポリシロキサンを感湿材としたものが
ある。<Prior Art> A conventional moisture-sensitive element is composed of an organic polymer substance containing lithium chloride or other inorganic electrolyte, or a copolymer of a polymer having a hydrophilic group and a hydrophobic polymer, or There is a moisture sensitive material made of polysiloxane having a silanol group.
〈発明が解決しようとする問題点〉 しかし、上記従来例において、前２者即ち有機高分子物
質又は共重合物等は耐水性、耐熱性や有機溶剤に対する
耐性が悪く、その結果用途に応じて選択しなければなら
ず、後者のシラノール基を有するポリシロキサンでは長
期使用における安定が悪く、信頼性が低下する欠点があ
った。<Problems to be Solved by the Invention> However, in the above-mentioned conventional example, the former two, that is, the organic polymer substance or the copolymer is poor in water resistance, heat resistance and resistance to an organic solvent, and as a result, depending on the application. It has to be selected, and the latter polysiloxane having a silanol group has a drawback that stability in long-term use is poor and reliability is lowered.
そこで、本発明は上記従来品の欠点に対処し、長期間高
信頼性を保ち、耐水性、耐熱性及び有機溶剤に対する耐
性等の高い製品の提供を図るものである。Therefore, the present invention addresses the drawbacks of the conventional products described above, and aims to provide a product that maintains high reliability for a long period of time and has high water resistance, heat resistance, and resistance to organic solvents.
〈問題点を解決する為の手段〉 本発明の感湿素子は、絶縁基板上に一対の対向電極が設
けられており、それらの対向電極に跨がって感湿膜が塗
布形成された感湿素子であって、前記絶縁基板は、アル
コキシシランと十分に反応し得るOH基を有しており、前
記感湿膜は、四級アンモニウム基を有するアルコキシシ
ランの水溶液を加熱することにより架橋縮合して生成さ
れて前記絶縁基板と化学結合されたオルガノポリシロキ
サン、又は四級アンモニウム基に変換され得るエポキシ
基、ピリジル基、アミノ基等の官能基を有するアルコキ
シシランの水溶液を加熱して架橋縮合して生成されて前
記絶縁基板と化学結合されるとともに、前記官能基が四
級アンモニウム基に変換されたオルガノポリシロキサン
であることを特徴とするものであり、そのことにより上
記目的が達成される。<Means for Solving Problems> The moisture-sensitive element of the present invention is provided with a pair of counter electrodes on an insulating substrate, and a moisture-sensitive film formed by coating across the counter electrodes. In a wet element, the insulating substrate has an OH group capable of sufficiently reacting with alkoxysilane, and the moisture-sensitive film is crosslinked and condensed by heating an aqueous solution of alkoxysilane having a quaternary ammonium group. Cross-linking condensation by heating an aqueous solution of an organopolysiloxane produced by the above-mentioned method and chemically bound to the insulating substrate, or an alkoxysilane having a functional group such as an epoxy group, a pyridyl group or an amino group, which can be converted into a quaternary ammonium group. And is chemically bonded to the insulating substrate, and the functional group is an organopolysiloxane converted to a quaternary ammonium group. The above-mentioned object can be achieved by the.
〈作用〉 本発明の感湿素子では、絶縁基板が、四級アンモニウム
基等の親水基を有するアルコキシシランと反応するのに
十分なOH基を有しており、この絶縁基板上に設けられた
オルガノポリシロキサンの感湿膜は、アルコキシシラン
と絶縁基板のOH基との反応によって強固に化学結合した
状態になる。<Operation> In the moisture-sensitive element of the present invention, the insulating substrate has an OH group sufficient to react with an alkoxysilane having a hydrophilic group such as a quaternary ammonium group, and is provided on the insulating substrate. The moisture-sensitive film of organopolysiloxane is in a state of being strongly chemically bonded by the reaction between the alkoxysilane and the OH group of the insulating substrate.
〈実施例〉 以下、本発明について実施例により詳細に説明する。<Examples> Hereinafter, the present invention will be described in detail with reference to Examples.
実施例１ の水溶液を、アルミナ基板上に焼付けて対設した金電極
間を覆って塗布し、該プロピルトリメトキシシランを、
該アルミナ基板Ｂと共に50℃乃至20℃の温度で加熱する
ことにより式のように反応する。Example 1 Is applied onto the alumina substrate so as to cover the space between the gold electrodes opposite to each other by baking, and the propyltrimethoxysilane is applied.
By heating at a temperature of 50 ° C. to 20 ° C. together with the alumina substrate B, the reaction as shown in the formula.
そして、アルミナ基板上には式に示すように重合反応
が進行して架橋構造をもったオルガノポリシロキサン膜
Ａが形成される。 Then, as shown in the formula, the polymerization reaction proceeds on the alumina substrate to form the organopolysiloxane film A having a crosslinked structure.
次に、該オルガノポリシロキサン膜Ａにトリメチルアミ
ン塩酸塩Ｃを作用させることにより該オルガノポリシロ
キサン膜Ａ中のエポキシ基と該トリメチルアミン塩酸塩
Ｃとが反応して四級アンモニウム基を有するオルガノポ
リシロキサン膜Ｄが式のようにアルミナ基板Ｂ上に生
成される。 Next, by causing trimethylamine hydrochloride C to act on the organopolysiloxane film A, the epoxy groups in the organopolysiloxane film A and the trimethylamine hydrochloride C react to cause an organopolysiloxane film having a quaternary ammonium group. D is generated on the alumina substrate B as in the formula.
このようにして得られた感湿膜を有する感湿素子の相対
湿度対インピーダンス特性について第１図に示す。これ
より明らかなように湿度変化に対し大きい変化率を以て
良く対応しており、又第２図には同上感湿素子の浸漬時
間対インピーダンス特性即ち耐水特性を示すもので、素
子を60分間水中に浸漬した後これを取り出して風乾した
ものを、相対湿度0,20,40,60,80,90％の夫々におけるイ
ンピーダンスを測定したものである。 FIG. 1 shows the relative humidity vs. impedance characteristic of the moisture sensitive element having the moisture sensitive film thus obtained. As is clear from this, it responds well to the humidity change with a large rate of change, and Fig. 2 shows the same as above with the immersion time vs. impedance characteristic of the humidity sensitive element, that is, the water resistance characteristic. Impedances were taken out, air-dried, and impedances were measured at relative humidity of 0, 20, 40, 60, 80, and 90%, respectively.
そして、上記第２図の特性図からも分かるように感湿膜
が水分を充分に吸収した後においても、その水分が除去
された場合は機能が回復し、感湿特性が損なわれないこ
とを示している。As can be seen from the characteristic diagram of FIG. 2 above, even after the moisture-sensitive film has sufficiently absorbed water, the function is restored when the moisture is removed, and the moisture-sensitive property is not impaired. Shows.
実施例２ 次に四級アンモニウム基を有するトリメトキシシラン＝
C6H5CH2N+H2C2H4NHC3H6Si(OCH3)3-Cl-を水、メタノール
の溶液にて溶解し、アルミナ基板上に対設した金対向電
極を覆って塗布し、該基板と共に120℃の温度で10分間
加熱することにより該基板上に感湿膜を形成する。Example 2 Next, trimethoxysilane having a quaternary ammonium group =
C 6 H 5 CH 2 N + H 2 C 2 H 4 NHC 3 H 6 Si (OCH 3 ) 3 -Cl - was dissolved in a solution of water and methanol to cover the gold counter electrode facing the alumina substrate. By coating and heating the substrate together with the substrate at a temperature of 120 ° C. for 10 minutes to form a moisture-sensitive film on the substrate.
そして、該感湿膜を有する感湿素子の相対湿度対インピ
ーダンス特性について調べた結果を第３図に示し、これ
を見ることによっても明らかなように感湿特性が極めて
良好であると共に、耐水試験の結果についても（図示し
ない）、30分間浸漬した感湿素子の感湿特性が全く低下
しないことが試みられている。Fig. 3 shows the results of an examination of the relative humidity vs. impedance characteristics of the humidity sensitive element having the moisture sensitive film, and it is clear from the results that the moisture sensitivity characteristics are extremely good and the water resistance test is performed. As for the result (not shown), it has been attempted that the humidity-sensitive property of the humidity-sensitive element immersed for 30 minutes does not deteriorate at all.
上述したようにエポキシ基を有するγ−グリシドプロピ
ルトリメトキシシラン或は四級アンモニウム基を有する
トリメトキシシランによって感湿膜を形成することによ
り感湿性能の高い素子が得られる。As described above, by forming a moisture-sensitive film from [gamma] -glycidpropyltrimethoxysilane having an epoxy group or trimethoxysilane having a quaternary ammonium group, a device having high moisture-sensing performance can be obtained.
なお、オルガノポリシロキサンの感湿膜は、四級アンモ
ニウム基に限らず、極性基としての親水性基を有してい
ればよい。このような親水性基は、実施例２に示すよう
に、アルコキシシランが当初から有していてもよく、ま
た、実施例１に示すように、当初は、四級アンモニウム
基に変換可能なエポキシ基を有するアルコキシシランを
架橋縮合した後に、エポキシ基を四級アンモニウム基に
変換するようにしてもよい。エポキシ基以外にも、ピリ
ジル基、アミノ基等の官能基も四級アンモニウム基に変
換可能である。The moisture-sensitive film of organopolysiloxane is not limited to the quaternary ammonium group and may have a hydrophilic group as a polar group. Such a hydrophilic group may be present in the alkoxysilane from the beginning as shown in Example 2, or as shown in Example 1, an epoxy which is initially convertible into a quaternary ammonium group. The epoxy group may be converted into a quaternary ammonium group after the cross-linking condensation of the alkoxysilane having a group. In addition to epoxy groups, functional groups such as pyridyl groups and amino groups can be converted into quaternary ammonium groups.
〈発明の効果〉 本発明は、四級アンモニウム基或はエポキシ基、ピリジ
ル基、アミノ基等を有するアルコキシシランを加熱反応
させて得た架橋オルガノポリシロキサンを感湿膜とし、
しかも、絶縁基板のOH基とアルコキシシランとの反応に
よってオルガノポリシロキサンの感湿膜と絶縁基板とが
化学結合されている為に、耐水性が著しく向上すること
と、耐熱性、耐溶剤性に優れていると共に、感湿特性が
良好であり、汚染に対しても充分に耐えられることか
ら、適用分野が著しく広く、利用価値の高い感湿素子を
提供することができる優れた発明である。<Effects of the Invention> The present invention uses, as a moisture-sensitive film, a crosslinked organopolysiloxane obtained by heating and reacting an alkoxysilane having a quaternary ammonium group or an epoxy group, a pyridyl group, an amino group, or the like.
Moreover, since the moisture sensitive film of the organopolysiloxane and the insulating substrate are chemically bonded by the reaction of the OH group of the insulating substrate and the alkoxysilane, the water resistance is remarkably improved, and the heat resistance and the solvent resistance are improved. It is an excellent invention which can provide a moisture-sensitive element having a wide range of application fields and a high utility value because it has excellent moisture-sensitive characteristics and can sufficiently withstand contamination.
第１図は、本発明感湿素子の相対湿度対インピーダンス
特性図、 第２図は、同上感湿素子の耐水特性図、 第３図は、同上他の実施例の相対湿度対インピーダンス
特性図である。FIG. 1 is a relative humidity vs. impedance characteristic diagram of the moisture sensitive element of the present invention, FIG. 2 is a water resistance characteristic diagram of the moisture sensitive element of the above, and FIG. 3 is a relative humidity versus impedance characteristic diagram of the other example of the above. is there.
Claims (1)
おり、それらの対向電極に跨がって感湿膜が塗布形成さ
れた感湿素子であって、前記絶縁基板は、アルコキシシ
ランと十分に反応し得るOH基を有しており、前記感湿膜
は、四級アンモニウム基を有するアルコキシシランの水
溶液を加熱することにより架橋縮合して生成されて前記
絶縁基板と化学結合されたオルガノポリシロキサン、又
は四級アンモニウム基に変換され得るエポキシ基、ピリ
ジル基、アミノ基等の官能基を有するアルコキシシラン
の水溶液を加熱して架橋縮合して生成されて前記絶縁基
板と化学結合されるとともに、前記官能基が四級アンモ
ニウム基に変換されたオルガノポリシロキサンであるこ
とを特徴とする感湿素子。1. A humidity-sensitive element comprising a pair of counter electrodes provided on an insulating substrate, and a moisture-sensitive film formed by coating across the counter electrodes, wherein the insulating substrate is an alkoxysilane. It has an OH group capable of sufficiently reacting with, and the moisture-sensitive film is formed by cross-linking condensation by heating an aqueous solution of an alkoxysilane having a quaternary ammonium group and is chemically bonded to the insulating substrate. Organopolysiloxane or an alkoxysilane solution having a functional group such as an epoxy group, a pyridyl group, or an amino group that can be converted into a quaternary ammonium group is heated to crosslink and condense to form the chemical bond with the insulating substrate. In addition, the moisture-sensitive element is characterized in that the functional group is an organopolysiloxane in which the functional group is converted into a quaternary ammonium group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61091143A JPH0718832B2 (en) | 1986-04-19 | 1986-04-19 | Moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61091143A JPH0718832B2 (en) | 1986-04-19 | 1986-04-19 | Moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62247239A JPS62247239A (en) | 1987-10-28 |
| JPH0718832B2 true JPH0718832B2 (en) | 1995-03-06 |
Family
ID=14018301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61091143A Expired - Lifetime JPH0718832B2 (en) | 1986-04-19 | 1986-04-19 | Moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0718832B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2513894B2 (en) * | 1990-03-27 | 1996-07-03 | 神栄株式会社 | Moisture sensitive element |
| TW507073B (en) * | 2000-03-31 | 2002-10-21 | Tdk Corp | Humidity sensor and method for making |
| KR100539392B1 (en) | 2003-08-12 | 2005-12-27 | (주)해은켐텍 | The Polyelectrolyte composition for humidity sensor, Polyelectrolyte ink and preparation method of Polyelectrolyte membrane for humidity sensor by inkjet printing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5255579A (en) * | 1975-10-31 | 1977-05-07 | Asahi Glass Co Ltd | Moisture sensor |
-
1986
- 1986-04-19 JP JP61091143A patent/JPH0718832B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62247239A (en) | 1987-10-28 |
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