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JPH0718997B2 - Method for manufacturing ferroelectric liquid crystal device - Google Patents
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JPH0718997B2 - Method for manufacturing ferroelectric liquid crystal device - Google Patents

Method for manufacturing ferroelectric liquid crystal device

Info

Publication number
JPH0718997B2
JPH0718997B2 JP62336034A JP33603487A JPH0718997B2 JP H0718997 B2 JPH0718997 B2 JP H0718997B2 JP 62336034 A JP62336034 A JP 62336034A JP 33603487 A JP33603487 A JP 33603487A JP H0718997 B2 JPH0718997 B2 JP H0718997B2
Authority
JP
Japan
Prior art keywords
liquid crystal
ferroelectric liquid
substrate
film
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62336034A
Other languages
Japanese (ja)
Other versions
JPH01178922A (en
Inventor
成嘉 鈴木
秀男 一ノ瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62336034A priority Critical patent/JPH0718997B2/en
Publication of JPH01178922A publication Critical patent/JPH01178922A/en
Publication of JPH0718997B2 publication Critical patent/JPH0718997B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、強誘電性液晶を用いた結晶素子、特に強誘電
性液晶の配向処理方法に関する。
TECHNICAL FIELD The present invention relates to a crystal element using a ferroelectric liquid crystal, and more particularly to a method for aligning a ferroelectric liquid crystal.

(従来の技術) 液晶素子は直視型の表示素子として精力的に研究開発が
行われ、現在では広く用いられている。従来の液晶素子
に用いられている液晶材料はネマティック液晶であるTN
液晶、STN液晶である。しかしTN液晶等は、応答時間が
長く、応用範囲に限界があった。
(Prior Art) Liquid crystal elements have been extensively researched and developed as direct-view display elements, and are now widely used. The liquid crystal material used in conventional liquid crystal elements is nematic liquid crystal TN
Liquid crystal, STN liquid crystal. However, the response time of TN liquid crystal and the like was long and the application range was limited.

近年、応答時間の短い液晶として強誘電性液晶が開発さ
れ、高速化が図られている。ここで強誘電性液晶の動作
について説明する。強誘電性液晶の高速応答動作は、ノ
ーエル・エー・クラーク(Noel A.Clark)とスベン・テ
ー・ラガバル(Sven T.Lagerwall)によって確認された
(アプライド・フィジクス・レターズ(Appl.Phys.Let
t.36(1980)899))。すなわち、強誘電性を示すカイ
ラルスメクティック液晶は第2図に示すように自発分極
21を持った液晶分子22が層構造をとると共に螺旋構造を
形成している。このままでは自発分極21は螺旋軸23の回
りに均一に分布して打ち消しあっているが、このような
液晶を、その螺旋軸23と平行な2枚の配向処理を行った
基板31、32ではさみ、かつその間隔、すなわち液晶の厚
さを少なくとも螺旋構造のピッチ長以下に薄くすると、
液晶分子22は自発分極23が基板に対して垂直となるよう
な二つの配向状態のいずれかに強制的に配向させられ
る。第3図はその様子を示す図であり領域Aは自発分極
21が下側の基板に向いた状態、領域Bは自発分極21が上
側の基板に向いた状態である。第4図は、基板の上面か
らみた図であり、領域Aと領域Bでは41、42で示すよう
に液晶分子が異なる配向状態をとっている。例えば、こ
のような状態を2枚の互いに偏光方向が直行する偏光板
ではさみ、かつ1枚の偏光板の偏光方向43を液晶分子の
方向に一致させて観測すると、領域Aは暗く見え、領域
Bは明るく見える。このように、強誘電性を示すカイラ
ルスメクティック液晶を間隔の狭い2枚の基板で挟む
と、液晶分子は光学的に識別される二つの配向状態のい
ずれかをとるようになる。しかも、強誘電性液晶はその
自発分極が外部電界に直接的に応答して配向する。従っ
て外部から基板と直行する方向の直流電界を印加して、
その向きを反転すると、それに応じて自発分極の向きが
反転する。すなわち、第4図の領域Aと領域Bとが電気
的にスイッチングされるわけで、これは2枚の基板の内
側に透明電極の類を形成しておくことによって容易に実
現できる。さらに、この電気的スイッチング現象が自発
分極と外部電界との直接的な応答によるものであるため
に、きわめて高速であり、前述の論文によるとマイクロ
秒台の応答時間が確認されている。
In recent years, a ferroelectric liquid crystal has been developed as a liquid crystal having a short response time, and its speed has been increased. Here, the operation of the ferroelectric liquid crystal will be described. The fast response behavior of ferroelectric liquid crystals was confirmed by Noel A. Clark and Sven T. Lagerwall (Appl. Phys.Let
t.36 (1980) 899)). That is, a chiral smectic liquid crystal exhibiting ferroelectricity has spontaneous polarization as shown in FIG.
The liquid crystal molecule 22 having 21 has a layered structure and a spiral structure. In this state, the spontaneous polarization 21 is evenly distributed around the spiral axis 23 to cancel each other out. However, such a liquid crystal is sandwiched between the substrates 31 and 32 that have been subjected to two alignment treatments parallel to the spiral axis 23. And, if the distance, that is, the thickness of the liquid crystal is reduced to at least the pitch length of the spiral structure or less,
The liquid crystal molecules 22 are forcibly aligned in one of two alignment states in which the spontaneous polarization 23 is perpendicular to the substrate. FIG. 3 is a diagram showing the situation, and the region A is the spontaneous polarization.
The region 21 is in a state in which it faces the lower substrate, and the region B is in a state in which the spontaneous polarization 21 faces in the upper substrate. FIG. 4 is a view as seen from the upper surface of the substrate, in which the liquid crystal molecules in the regions A and B have different alignment states as indicated by 41 and 42. For example, when such a state is sandwiched between two polarizing plates whose polarization directions are orthogonal to each other and the polarization direction 43 of one polarizing plate is aligned with the direction of liquid crystal molecules, the region A looks dark and the region B looks bright. In this way, when a chiral smectic liquid crystal exhibiting ferroelectricity is sandwiched between two substrates having a narrow interval, the liquid crystal molecules come to one of two optically distinguishable alignment states. Moreover, the spontaneous polarization of the ferroelectric liquid crystal is oriented in direct response to the external electric field. Therefore, by applying a DC electric field in the direction perpendicular to the substrate from the outside,
When the direction is reversed, the direction of spontaneous polarization is reversed accordingly. That is, the area A and the area B in FIG. 4 are electrically switched, and this can be easily realized by forming transparent electrodes or the like inside the two substrates. Furthermore, since this electrical switching phenomenon is due to a direct response between spontaneous polarization and an external electric field, it is extremely fast, and the above-mentioned paper confirms a response time in the microsecond range.

また、電圧を除去した後も、電圧印加時の配向状態が、
保持されるという特性が、強誘電性液晶にはある。これ
は通常双安定性と呼ばれる。
Further, even after the voltage is removed, the alignment state when the voltage is applied is
Ferroelectric liquid crystals have the property of being retained. This is commonly called bistability.

強誘電性液晶の配向処理方法としては、TN液晶で用いら
れているラビング法、斜方蒸着法等が提案されている。
As a method for aligning ferroelectric liquid crystals, a rubbing method and an oblique evaporation method used in TN liquid crystals have been proposed.

(発明が解決しようとする問題点) 配向処理として前述のラビング法を用いた液晶素子で
は、配向膜表面に一様な溝を形成するのが困難で、さら
に膜のはがれや、膜厚の不均一により、液晶素子全体に
わたって十分な光学応答特性、特に双安定性動作が得ら
れていない。また、斜方蒸着では大面積で均一な液晶素
子を作成するのは大規模な装置を用いなければならず、
さらには量産性にも問題がある。
(Problems to be Solved by the Invention) In a liquid crystal element using the above-mentioned rubbing method as an alignment treatment, it is difficult to form uniform grooves on the surface of the alignment film. Due to the homogeneity, sufficient optical response characteristics, especially bistability, cannot be obtained over the entire liquid crystal element. Also, in oblique vapor deposition, it is necessary to use a large-scale device to create a large-area and uniform liquid crystal element,
Furthermore, there is a problem in mass productivity.

本発明の目的は、上記の欠点を除去して、均一性のよい
膜を基板上に積層し、一様な凹凸を形成することによ
り、強誘電性液晶の特徴である高速応答、双安定動作を
大面積の素子で実現できる強誘電性液晶素子の製造方法
を提供することにある。
The object of the present invention is to eliminate the above-mentioned drawbacks, stack a film with good uniformity on the substrate, and form uniform unevenness, thereby providing a high-speed response and bistable operation characteristic of a ferroelectric liquid crystal. It is an object of the present invention to provide a method for manufacturing a ferroelectric liquid crystal device, which can realize the device with a large area.

(問題点を解決するための手段) 本発明は、電極が形成されている二枚の電極付き基板で
強誘電性液晶を狭持する構造の強誘電性液晶素子の製造
方法であって、前記基板上に水面上に展開した感光性を
有する有機物質を少なくとも一層積層し、その後に、露
光・現像することで、前記有機物質を一部除去し前記基
板表面上に凹凸を形成し、その凹凸の上に強誘電性液晶
を積層させ点に特徴がある。
(Means for Solving the Problems) The present invention relates to a method for manufacturing a ferroelectric liquid crystal device having a structure in which a ferroelectric liquid crystal is sandwiched between two substrates with electrodes on which electrodes are formed. At least one layer of a photosensitive organic substance developed on the water surface is laminated on the substrate, and then exposed and developed to partially remove the organic substance to form irregularities on the substrate surface. It is characterized in that a ferroelectric liquid crystal is laminated on top of it.

(作用) 強誘電性液晶の配向機構に関しては、また明確にはなっ
ていない。しかし、いままである程度の効果が得られて
いるラビング法、斜方蒸着法について考案してみると、
強誘電性液晶が配向する理由について、多少は推定する
ことができる。ラビング法は基板上にポリイミドなどの
高分子膜を塗布した後に綿布等で表面を一方向に擦る方
法である。また、斜方蒸着法はSiOなどの蒸着源に対し
て基板を傾けて蒸着を行う方法である。どちらの場合も
基板表面に何等かの物理形状を一軸性を持たせて形成す
ることによって強誘電性液晶を配向させているというよ
うに推察することができる。
(Function) The alignment mechanism of the ferroelectric liquid crystal has not been clarified yet. However, when we devise the rubbing method and the oblique deposition method, which have been able to achieve some effect,
The reason why the ferroelectric liquid crystal is aligned can be estimated to some extent. The rubbing method is a method in which a polymer film such as polyimide is coated on a substrate and then the surface is unidirectionally rubbed with a cotton cloth or the like. Further, the oblique vapor deposition method is a method in which the substrate is inclined with respect to a vapor deposition source such as SiO 2 to perform vapor deposition. In either case, it can be inferred that the ferroelectric liquid crystal is aligned by forming some physical shape on the substrate surface with uniaxiality.

ところで、水面上に有機物質を展開しその有機膜を基板
上に付着させることにより、均質の有機薄膜を基板上に
形成させることができる。この方法で形成した膜は、通
常LB(Langmuir-Brodget)膜と呼ばれている。このLB膜
は何層も積層することができ、基板上の膜の厚みを自由
に変えることができる。特に感光性の官能基を含む有機
物質のLB膜を使用することにより、上記の特徴を保った
まま、マスクを介して露光・現像するだけで、所望の凹
凸が形成できる。
By the way, a homogeneous organic thin film can be formed on a substrate by spreading an organic substance on the water surface and attaching the organic film to the substrate. The film formed by this method is usually called an LB (Langmuir-Brodget) film. This LB film can be laminated in any number of layers, and the thickness of the film on the substrate can be freely changed. In particular, by using an LB film made of an organic substance containing a photosensitive functional group, desired unevenness can be formed simply by exposing and developing through a mask while maintaining the above characteristics.

上述の基板上のLB膜に例えばストライプ状にパターンを
形成することにより基板表面上に一軸性を持った凹凸が
形成できる。この基板を用いて液晶素子を作成し、強誘
電性液晶を注入することにより強誘電性液晶素子がえら
れる。この素子は基板表面上に均一な凹凸が形成されて
いるので、強誘電性液晶分子が配向する。さらに、素子
を偏光板で挟むことにより強誘電性液晶をスイッチング
させ光変調液晶素子として用いることができる。
By forming a pattern, for example, in a stripe pattern on the LB film on the substrate described above, unevenness having uniaxiality can be formed on the substrate surface. A ferroelectric liquid crystal element is obtained by forming a liquid crystal element using this substrate and injecting a ferroelectric liquid crystal. In this device, since uniform irregularities are formed on the surface of the substrate, the ferroelectric liquid crystal molecules are aligned. Further, by sandwiching the element between polarizing plates, the ferroelectric liquid crystal can be switched to be used as a light modulation liquid crystal element.

(実施例) 以下、本発明の実施例を挙げて詳細に説明する。(Examples) Hereinafter, examples of the present invention will be described in detail.

第1図に示すように強誘電性液晶素子を以下に示すよう
な方法で作成した。無水ピロメリト酸とジアミノジフェ
ニルエーテルから合成したポリアミド酸と4−(17−オ
クタデセニル)ピリジン混合物(1:2)をベンゼン、ジ
メチルアセトアミド混合溶液(1:1)に溶解し、それぞ
れ1.7mM、3.3mMの濃度の試料溶液を作った。次ぎに、表
面に透明電極1としてITO(酸化インジウム、スズ)を
パターニングし、ガラス基板2の上に作成した。表面圧
を一定に保つフィードバック機構のついている水槽の水
面上に試料溶液を展開して、フィードバック機構により
表面圧を25mN/mに保ちながら、このガラス基板2を水面
を横切って上下させることにより、ガラス基板2上にポ
リアミド酸と4−(17−オクタデセニル)ピリジン混合
物(1:2)から成るLB膜すなわちポリイミド膜3を10層
積層させた。その後、ラインアンドスペース0.5μmの
ストライプ状のマスクを用いてDeepUV露光を行い、ベン
ゼンとジメチルアセトアミドの1:1の混合液で5分間現
像をしてLB膜のパターニングを行った。この基板を用い
て、ギャップ2μmとなるように液晶素子を作成し、強
誘電性液晶4であるCS-1015(チッソ製)を注入して配
向状態を偏光顕微鏡を用いて観測したところ均一配向し
ていることが確認された。さらに液晶素子の光学応答特
性としてコントラスト比を測定したところ30が得られ
た。また良好な双安定性動作も確認できた。
A ferroelectric liquid crystal element as shown in FIG. 1 was produced by the method as described below. Polyamic acid synthesized from pyromellitic anhydride and diaminodiphenyl ether and 4- (17-octadecenyl) pyridine mixture (1: 2) were dissolved in benzene and dimethylacetamide mixed solution (1: 1) to give 1.7 mM and 3.3 mM concentrations, respectively. A sample solution was prepared. Next, ITO (indium oxide, tin) was patterned on the surface as the transparent electrode 1 to form it on the glass substrate 2. By deploying the sample solution on the water surface of a water tank with a feedback mechanism for keeping the surface pressure constant, and keeping the surface pressure at 25 mN / m by the feedback mechanism, moving the glass substrate 2 up and down across the water surface, On the glass substrate 2, 10 layers of LB film, that is, polyimide film 3 composed of a mixture of polyamic acid and 4- (17-octadecenyl) pyridine (1: 2) were laminated. Then, Deep UV exposure was performed using a line-and-space 0.5 μm stripe-shaped mask, and development was performed for 5 minutes with a 1: 1 mixture of benzene and dimethylacetamide to pattern the LB film. Using this substrate, a liquid crystal element was created to have a gap of 2 μm, CS-1015 (manufactured by Chisso), which was a ferroelectric liquid crystal 4, was injected, and the alignment state was observed using a polarization microscope. Was confirmed. When the contrast ratio was measured as the optical response characteristic of the liquid crystal element, 30 was obtained. Also, good bistability behavior was confirmed.

上記実施例においては強誘電性液晶としてCS-1015を用
いたが、他の種々の液晶例えばZLI-3489(メルク製)や
CS-1011(チッソ製)などに応用できる。
Although CS-1015 was used as the ferroelectric liquid crystal in the above embodiments, various other liquid crystals such as ZLI-3489 (manufactured by Merck) and
It can be applied to CS-1011 (made by Chisso).

本方式ではラビング法に比較して使用する液晶材料が違
い、分子構造や液晶の自発分極等の物性定数が異なり、
配向条件が違う場合にも、積層する膜の種類や積層数を
変えたり、凹凸のピッチを変えることが容易にできるの
で使用液晶材料の配向条件にあった表面状態を容易に実
現することができる。さらに均一な膜が形成されるの
で、液晶素子内での配向不良が生じない。また斜方蒸着
に比較すると大面積対応も容易である。
In this method, the liquid crystal material used is different compared to the rubbing method, and the physical constants such as the molecular structure and the spontaneous polarization of the liquid crystal are different.
Even if the alignment conditions are different, it is easy to change the type of film to be laminated, the number of layers to be laminated, and the pitch of the concavities and convexities, so that it is possible to easily realize a surface state that matches the alignment condition of the liquid crystal material used. . Further, since a uniform film is formed, no alignment failure occurs in the liquid crystal element. Moreover, it is easy to deal with a large area as compared with the oblique deposition.

(発明の効果) 以上述べたように本発明の製造方法によれば、配向性の
良い液晶素子が得られるため、光学応答特性に優れ、大
面積対応も容易になる。
(Effects of the Invention) As described above, according to the manufacturing method of the present invention, since a liquid crystal element having a good orientation can be obtained, the optical response characteristics are excellent and it is easy to deal with a large area.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例を示す強誘電性液晶素子の断
面図、第2図は強誘電性液晶分子の螺旋配列状態を示す
模式図、第3図及び第4図は基板間の強誘電性液晶分子
の配向状態を模式的に示す側面図及び平面図である。 1…透明電極、2…ガラス基板 3…LB膜、4…強誘電性液晶 21…自発分極、22,41,42…液晶分子 23…螺旋軸、31,32…基板 43…偏光軸
FIG. 1 is a cross-sectional view of a ferroelectric liquid crystal device showing an embodiment of the present invention, FIG. 2 is a schematic view showing a state of spiral alignment of ferroelectric liquid crystal molecules, and FIGS. 3 and 4 are between substrates. FIG. 3 is a side view and a plan view schematically showing an alignment state of ferroelectric liquid crystal molecules. 1 ... Transparent electrode, 2 ... Glass substrate 3 ... LB film, 4 ... Ferroelectric liquid crystal 21 ... Spontaneous polarization, 22, 41, 42 ... Liquid crystal molecule 23 ... Spiral axis, 31, 32 ... Substrate 43 ... Polarization axis

フロントページの続き (56)参考文献 特開 昭62−291620(JP,A) 特開 昭57−81234(JP,A) 特開 昭60−21026(JP,A) 特開 昭60−60624(JP,A) 特開 昭61−109025(JP,A) 特開 昭61−249046(JP,A)Continuation of the front page (56) Reference JP 62-291620 (JP, A) JP 57-81234 (JP, A) JP 60-21026 (JP, A) JP 60-60624 (JP , A) JP-A-61-109025 (JP, A) JP-A-61-249046 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】電極が形成されている二枚の電極付き基板
で強誘電性液晶を狭持する構造の強誘電性液晶素子の製
造方法において前記基板上に、ポリアミド酸と以下の構
造式で表される有機物質の混合物からなる有機単分子膜
を一層以上積層させる工程と、その後に前記有機物質を
一部を除去することにより前記基板表面上に凹凸を形成
させる工程と、次いで前記基板上に強誘電性液晶を積層
させる工程とを含むことを特徴とする強誘電性液晶素子
の製造方法。
1. In a method of manufacturing a ferroelectric liquid crystal device having a structure in which a ferroelectric liquid crystal is sandwiched between two substrates with electrodes formed with electrodes, polyamic acid and the following structural formula are provided on the substrate. A step of laminating one or more layers of organic monomolecular films made of a mixture of the organic substances shown, a step of forming irregularities on the surface of the substrate by removing a part of the organic substance thereafter, And a step of laminating a ferroelectric liquid crystal thereon.
JP62336034A 1987-12-29 1987-12-29 Method for manufacturing ferroelectric liquid crystal device Expired - Lifetime JPH0718997B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62336034A JPH0718997B2 (en) 1987-12-29 1987-12-29 Method for manufacturing ferroelectric liquid crystal device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62336034A JPH0718997B2 (en) 1987-12-29 1987-12-29 Method for manufacturing ferroelectric liquid crystal device

Publications (2)

Publication Number Publication Date
JPH01178922A JPH01178922A (en) 1989-07-17
JPH0718997B2 true JPH0718997B2 (en) 1995-03-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP62336034A Expired - Lifetime JPH0718997B2 (en) 1987-12-29 1987-12-29 Method for manufacturing ferroelectric liquid crystal device

Country Status (1)

Country Link
JP (1) JPH0718997B2 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781234A (en) * 1980-11-10 1982-05-21 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
JPS6021026A (en) * 1983-07-15 1985-02-02 Matsushita Electric Ind Co Ltd Method for manufacturing electrodes for liquid crystal display
JPS6060624A (en) * 1983-09-13 1985-04-08 Matsushita Electric Ind Co Ltd Liquid crystal display panel and its manufacturing method
JPS61109025A (en) * 1984-11-01 1986-05-27 Matsushita Electric Ind Co Ltd Manufacturing method of liquid crystal display device
JPS61249046A (en) * 1985-04-27 1986-11-06 Asahi Chem Ind Co Ltd Photosensitive composition
JPS62291620A (en) * 1986-06-11 1987-12-18 Canon Inc liquid crystal element

Also Published As

Publication number Publication date
JPH01178922A (en) 1989-07-17

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