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JPH0719957B2 - Copper surface treatment method - Google Patents
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JPH0719957B2 - Copper surface treatment method - Google Patents

Copper surface treatment method

Info

Publication number
JPH0719957B2
JPH0719957B2 JP14198688A JP14198688A JPH0719957B2 JP H0719957 B2 JPH0719957 B2 JP H0719957B2 JP 14198688 A JP14198688 A JP 14198688A JP 14198688 A JP14198688 A JP 14198688A JP H0719957 B2 JPH0719957 B2 JP H0719957B2
Authority
JP
Japan
Prior art keywords
copper
copper surface
aqueous solution
treatment
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14198688A
Other languages
Japanese (ja)
Other versions
JPH01310595A (en
Inventor
昭士 中祖
智子 渡辺
陽一 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP14198688A priority Critical patent/JPH0719957B2/en
Publication of JPH01310595A publication Critical patent/JPH01310595A/en
Publication of JPH0719957B2 publication Critical patent/JPH0719957B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemical Treatment Of Metals (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は,多層プリント配線板を製造する際に,内層回
路板とプリプレグとを積層一体化する工程において内層
回路板上の銅とプリプレグとの接着に適した銅表面の処
理方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a method for manufacturing a multilayer printed wiring board, in which the inner layer circuit board and the prepreg are laminated and integrated with each other. The present invention relates to a method for treating a copper surface, which is suitable for adhesion of copper.

(従来の技術) 従来,多層プリント配線板は,銅張積層板の銅箔の不要
な部分をエッチング等によって除去して内層回路を形成
し,内層回路の銅表面を化学液で粗化し,粗化した表面
を酸化処理し,プリプレグ及び外層回路となる銅箔をそ
の上に重ねて積層一体化し,外層回路及び内層回路の接
続を必要とする箇所に穴をあけ,その穴内面に付着した
樹脂やガラスの片を化学液で除去した後に無電解めっき
等を用いて銅等の金属層を形成し,外層回路をエッチン
グ等によって形成することによって,製造されていた。
このとき,穴内面に露出した銅表面の酸化処理層が,そ
の後の酸性の化学処理液に侵され,穴の周囲の内層銅箔
とプリプレグの接着が維持されない部分(ハローイング
という)ができ,はんだ付け等の熱衝撃によって剥離す
るという問題があった。この問題を解決するものとして
は,本出願人が先に出願した発明に示す以下の多層プリ
ント配線板の内層回路の銅表面の処理方法がある。
(Prior Art) Conventionally, in a multilayer printed wiring board, an unnecessary portion of the copper foil of the copper clad laminate is removed by etching or the like to form an inner layer circuit, and the copper surface of the inner layer circuit is roughened with a chemical solution to roughen The oxidized surface is oxidised, and the prepreg and the copper foil to be the outer layer circuit are laminated on top of it and laminated and integrated, and holes are made at the locations where the outer layer circuit and the inner layer circuit need to be connected, and the resin that adheres to the inner surface of the hole It was manufactured by removing a piece of glass or glass with a chemical solution, forming a metal layer such as copper using electroless plating, etc., and then forming an outer layer circuit by etching or the like.
At this time, the oxidation treatment layer of the copper surface exposed on the inner surface of the hole is attacked by the acidic chemical treatment solution after that, and there is a part (called haloing) where the adhesion between the inner layer copper foil and the prepreg is not maintained around the hole, There is a problem of peeling due to thermal shock such as soldering. As a solution to this problem, there is the following method of treating the copper surface of the inner layer circuit of the multilayer printed wiring board, which is shown in the invention previously filed by the applicant.

すなわち, a.銅表面に酸化剤を含む水溶液と接触させて,銅表面に
酸化銅を形成する工程。
That is, a. A step of forming copper oxide on the copper surface by contacting the copper surface with an aqueous solution containing an oxidizing agent.

b.酸化処理した銅表面を水酸化ホウ素アルカリを含む水
溶液と接触させることによって,酸化処理した銅表面の
電位をAg-AgCl電極に対して−1000mV以上で−400mV以下
の範囲内に変化させる工程。
b. A step of changing the potential of the oxidized copper surface within a range of −1000 mV or more to −400 mV or less with respect to the Ag-AgCl electrode by contacting the oxidized copper surface with an aqueous solution containing alkali boron hydroxide. .

c.ホルムアルデヒドを含む水溶液と接触させることによ
って,酸化処理した銅表面の電位をAg-AgCl電極に対し
て−1000mVよりも卑な電位に変化させる工程。
c. A step of changing the potential of the oxidized copper surface to a base potential lower than −1000 mV with respect to the Ag-AgCl electrode by contacting it with an aqueous solution containing formaldehyde.

の3つの工程に順に含む処理工程によって銅表面に形成
した酸化銅を金属銅に還元することを特徴とする銅の表
面処理法である。
The copper surface treatment method is characterized in that the copper oxide formed on the copper surface is reduced to metallic copper by a treatment step including the above three steps in sequence.

(発明が解決しようとする課題) 水酸化ホウ素アルカリと接触させることによって,酸化
処理した銅表面の電位をAg-AgCl電極にたいして−1000m
V以上で−400mV以下の範囲内に変化させた後,ホルムア
ルデヒドを含む水溶液と接触させて酸化銅を金属銅に還
元するまでの時間は他の工程より長く,この工程でプリ
ント配線板の製造時間が制限され,さらに工程を自動化
する際にも大きな障害となる。
(Problems to be Solved by the Invention) The potential of the copper surface oxidized by contacting with an alkali boron hydroxide is -1000 m with respect to the Ag-AgCl electrode.
The time required to reduce the copper oxide to metallic copper by contacting it with an aqueous solution containing formaldehyde after changing it within the range of V to −400 mV or less is longer than other steps. Is limited, which is a major obstacle in automating the process.

本発明は,このような問題を解決し,充分な接着を維持
するとともに,さらに処理速度の大きい酸化処理した銅
表面の処理方法を提供することができるものである。
The present invention is capable of solving such problems and providing a method for treating an oxidized copper surface which has a high treatment rate while maintaining sufficient adhesion.

(課題を解決するための手段) 本発明は,酸化銅を金属銅に還元するために水素化ホウ
素アルカリを含む水溶液と接触させ次にホルムアルデヒ
ドを含む水溶液と接触させる方法において,ホルムアル
デヒドを含む水溶液に塩類の少なくとも1種を含ませる
ことにより還元の速度を大きくできるという知見に基づ
いてなされたものであり,以下の工程を以下の順に含む
処理工程によって銅表面に形成した酸化銅を金属銅に還
元することを特徴とする銅の表面処理法である。
(Means for Solving the Problem) The present invention provides a method of contacting an aqueous solution containing alkali borohydride and then an aqueous solution containing formaldehyde in order to reduce copper oxide to metallic copper. It was made based on the finding that the rate of reduction can be increased by including at least one salt, and the copper oxide formed on the copper surface is reduced to metallic copper by the treatment steps including the following steps in the following order: The surface treatment method for copper is characterized by

a.銅表面を酸化剤を含む水溶液と接触させて,銅表面に
酸化銅を形成する工程。
a. A step of forming copper oxide on the copper surface by contacting the copper surface with an aqueous solution containing an oxidizing agent.

b.酸化処理した銅表面を水素化ホウ素アルカリを含む水
溶液と接触させることによって,酸化処理した銅表面の
電位をAg-AgCl電極に対して−1000mV以上で−400mV以下
の範囲内に変化させる工程。
b. A step of changing the potential of the oxidized copper surface within a range of −1000 mV or more to −400 mV or less with respect to the Ag-AgCl electrode by contacting the oxidized copper surface with an aqueous solution containing alkali borohydride. .

c.塩のうち少なくとも1種以上とホルムアルデヒドとを
含む水溶液と接触させることによって,酸化処理した銅
表面の電位をAg-AgCl電極に対して−1000mVよりも卑な
電位に変化させる工程。
c. A step of changing the potential of the oxidized copper surface to a base potential lower than −1000 mV with respect to the Ag—AgCl electrode by contacting with an aqueous solution containing at least one of salts and formaldehyde.

本発明において,工程aの銅表面に酸化銅を形成する方
法は,一般に知られている亜塩素酸ナトリウム,過硫酸
アルカリ,塩素酸カリウム,過塩素酸カリウム,又はペ
ルオキソ硫酸アルカリのアルカリ性水溶液等の酸化剤を
含む処理液に浸漬又はその処理液を吹き付けて行う。こ
の銅の酸化処理液組成の一例は, NaClO2;30〜150g/l Na3PO4・12H2O;10〜60g/l NaOH;5〜30g/l である。また,その処理条件は,液温が55〜95℃であ
る。さらに,酸化銅を形成するための銅表面の前処理と
して,脱脂を行い,過硫酸アンモニウム水溶液又は塩化
第二銅と塩酸とを含む水溶液等に接触させて銅表面を粗
化することが好ましい。
In the present invention, the method of forming copper oxide on the copper surface in the step a is performed by using a generally known alkaline aqueous solution of sodium chlorite, alkali persulfate, potassium chlorate, potassium perchlorate, or alkali peroxosulfate. It is performed by dipping in or spraying the treatment liquid containing the oxidizing agent. An example of the composition of this copper oxidation treatment solution is NaClO 2 ; 30 to 150 g / l Na 3 PO 4 12H 2 O; 10 to 60 g / l NaOH; 5 to 30 g / l. The processing conditions are that the liquid temperature is 55 to 95 ° C. Further, as a pretreatment of the copper surface for forming copper oxide, it is preferable to perform degreasing and contact with an aqueous solution of ammonium persulfate or an aqueous solution containing cupric chloride and hydrochloric acid to roughen the copper surface.

工程bで使用する還元剤である水素化ホウ素アルカリと
は,水酸化ホウ素ナトリウムや水素化ホウ素カリウム等
である。この水素化ホウ素アルカリの濃度は,酸化処理
した銅表面の電位の変化する速度と,還元後の外観の均
一性とに影響する。その濃度は,0.1g/l以上,好ましく
は0.2〜5g/lで用いる。
The alkali borohydride which is the reducing agent used in the step b is sodium borohydride, potassium borohydride or the like. The concentration of the alkali borohydride affects the rate of change of the potential of the oxidized copper surface and the uniformity of the appearance after reduction. The concentration is 0.1 g / l or more, preferably 0.2 to 5 g / l.

また,水素化ホウ素アルカリは自然分解し易いので,抑
制するために,酢酸鉛,塩化鉛,硫酸鉛又はチオグリコ
ール酸を添加することが好ましく,また,pHを10〜13.5
に維持することによっても可能である。
In addition, since alkali borohydride easily decomposes spontaneously, it is preferable to add lead acetate, lead chloride, lead sulfate or thioglycolic acid in order to suppress it.
It is also possible to keep it at.

酸化処理した銅表面と水素化ホウ素アルカリの接触時間
は極めて重要である。酸化処理した銅表面を水素化ホウ
素アルカリに接触させると,酸化銅が還元され始め,酸
化処理した銅表面の電位が卑の方へ変化していく。この
とき,電位が−1000mVより卑になるまで接触脂環を長く
すると,外観的に不均一を発生し,接着強度が大きくな
らないこともある。このような問題の発生しない範囲
が,−1000mV以上で−400mV以下である。実際には,常
に電位の監視をする必要はなく,水素化ホウ素アルカリ
を含む水溶液の組成と温度によって,望ましい接触時間
が決定できる。一例として,水素ホウ素ナトリウの場
合,濃度;1g/l,pH;12.5,温度;40°のときの望ましい接
触時間は3〜180秒である。
The contact time between the oxidized copper surface and alkali borohydride is extremely important. When the oxidized copper surface is brought into contact with alkali borohydride, the copper oxide begins to be reduced and the potential of the oxidized copper surface changes to the base. At this time, if the contact alicyclic ring is lengthened until the electric potential becomes less than −1000 mV, uneven appearance may occur and the adhesive strength may not increase. The range where such problems do not occur is -1000 mV or more and -400 mV or less. In practice, it is not necessary to constantly monitor the potential, and the desired contact time can be determined by the composition and temperature of the aqueous solution containing alkali borohydride. As an example, in the case of sodium hydrogen boron, the desired contact time at a concentration of 1 g / l, pH of 12.5, temperature of 40 ° is 3 to 180 seconds.

工程cで用いるホルムアルデヒドの水溶液の濃度は,36
%ホルマリンを使用した場合,0.5ml/l以上で,2〜15ml/l
が好ましい範囲である。また,このホルムアルデヒドの
水溶液のpHは9以上,好ましくは10.5以上である。この
pHを調整するには,水酸化アルカリ等を用いる。このホ
ルムアルデヒドの水溶液に添加する塩類としては,Na2S
O4,K2SO4,HCOONa,NaCl,等の溶解度の高いものが使用で
き,これらを組み合わせて用いることもできる。また,
その添加量は0.01モル/l以上,好ましくは0.1モル/l以
上である。
The concentration of the aqueous formaldehyde solution used in step c is 36
% When using formalin, 0.5 ml / l or more, 2-15 ml / l
Is a preferable range. The pH of the aqueous formaldehyde solution is 9 or more, preferably 10.5 or more. this
To adjust the pH, use alkali hydroxide or the like. The salts added to this formaldehyde solution are Na 2 S
O 4 , K 2 SO 4 , HCOONa, NaCl, etc. having high solubility can be used, and these can be used in combination. Also,
The amount added is 0.01 mol / l or more, preferably 0.1 mol / l or more.

このホルムアルデヒドと塩類とを含む水溶液に,酸化処
理をし工程bの処理をした銅表面を接触させると,初期
の銅の電位は−1000mV〜−400mVの範囲にあり,接触を
継続すると金属銅の電位である−1000mVより卑に変化す
る。この接触を継続する時間は,少なくとも金属銅の電
位に変化するまでの時間が必要である。
When the copper surface subjected to the oxidation treatment and the treatment of step b is brought into contact with this aqueous solution containing formaldehyde and salts, the initial copper potential is in the range of -1000 mV to -400 mV, and if the contact is continued, the metallic copper It changes from -1000 mV which is the electric potential to base. The time for which this contact is continued requires at least the time until it changes to the potential of metallic copper.

工程bの処理を行った銅表面は,そのまま工程cの処理
をすることもでき,水洗して工程cの処理をしてもよ
い。
The copper surface that has been subjected to the treatment of step b may be subjected to the treatment of step c as it is, or may be washed with water to perform the treatment of step c.

また、本発明は,多層プリント配線板の内層回路表面の
処理のみでなく,プリント配線板の外層回路の表面処
理,銅箔と絶縁材との貼り合わせ等にも用いることがで
きる。
Further, the present invention can be used not only for the surface treatment of the inner layer circuit of the multilayer printed wiring board, but also for the surface treatment of the outer layer circuit of the printed wiring board and the bonding of the copper foil and the insulating material.

(作用) ホルムアルデヒドのアルカリ水溶液に塩類を添加すれ
ば,塩類を添加しないときに比べ,金属銅に還元する時
間を短縮できる。
(Function) When salts are added to the alkaline aqueous solution of formaldehyde, the time required for reduction to metallic copper can be shortened as compared with the case where no salts are added.

実施例1 あらかじめ,内層回路を形成した内層回路板の過硫酸ア
ンモニウム水溶液で粗化した後,以下の組成,条件で処
理して,内層回路の銅表面に酸化銅を形成した。
Example 1 After preliminarily roughening an inner layer circuit board on which an inner layer circuit was formed with an aqueous solution of ammonium persulfate, it was treated with the following composition and conditions to form copper oxide on the copper surface of the inner layer circuit.

組成 水酸化ナトリウム;15g/l リン酸三ナトリウム;30g/l (Na3PO4・12H2O) 亜塩素酸ナトリウム;90g/l 水;以上の組成物と合わせて1となる量 条件 液温;85℃ 処理時間;90秒 次に,水洗した後以下の組成,条件で処理した。Composition Sodium hydroxide; 15g / l Trisodium phosphate; 30g / l (Na 3 PO 4 · 12H 2 O) Sodium chlorite; 90g / l Water; Combined with the above composition to be 1 Condition Liquid temperature 85 ° C Treatment time; 90 seconds Next, after washing with water, treatment was performed with the following composition and conditions.

組成 水素化ホウ素ナトリウム;1g/l 水;組成物と合わせて1となる量 条件 pH;12.5 液温;40℃ 処理時間;40秒 次に,水洗した後以下の組成,条件で処理した。Composition Sodium borohydride; 1 g / l water; amount to be 1 together with the composition Condition pH; 12.5 Liquid temperature; 40 ° C Treatment time; 40 seconds Next, after washing with water, treatment was performed with the following composition and conditions.

組成 36%ホルマリン;4ml/l Na2SO4;0.5モル/l 条件 pH;12.5 液温;40℃ 処理時間;内層回路板上の銅の表面の電位がAg-AgCl電
極に対して−1200mVとなるまでの時間 以上のように処理した内層回路板を,水洗し,80℃で30
分乾燥した後,この両側にエポキシ変性ポリイミド樹脂
プリプレグであるI-67(日立化成工業株式会社,商品
名)で挟みさらにその両外側を35μmの銅箔で挟んで積
み重ね,圧力50kg/cm2,温度170℃,時間90分の条件で
加熱加温して積層一体化した試験片を作成した。
Composition 36% formalin; 4ml / l Na 2 SO 4 ; 0.5 mol / l Conditions pH: 12.5 liquid temperature; 40 ° C. processing time; potential on the surface of copper on the inner layer circuit board and -1200mV against Ag-AgCl electrode It takes 30 minutes at 80 ℃ to wash the inner layer circuit board treated as above.
After drying for a minute, sandwich both sides with I-67 (Hitachi Chemical Co., Ltd., trade name) which is an epoxy-modified polyimide resin prepreg, and stack both sides with a copper foil of 35 μm, pressure 50 kg / cm 2 , A test piece was prepared by heating and heating at a temperature of 170 ° C for 90 minutes, and by laminating and integrating.

実施例2 実施例1においてNa2SO4を1モル/lとした以外は,全て
同じ条件として試験片を作成した。
Example 2 A test piece was prepared under the same conditions as in Example 1 except that Na 2 SO 4 was changed to 1 mol / l.

実施例3 実施例1においてNa2SO4を2モル/lとした以外は,全て
同じ条件として試験片を作成した。
Example 3 A test piece was prepared under the same conditions as in Example 1, except that Na 2 SO 4 was changed to 2 mol / l.

実施例4 実施例1においてNa2SO4の替わりにNaClとした以外は,
全て同じ条件として試験片を作成した。
Example 4 Example 4 was repeated except that Na 2 SO 4 was replaced with NaCl.
Test pieces were prepared under the same conditions.

実施例5 実施例4においてNaClを1モル/lとした以外は,全て同
じ条件として試験片を作成した。
Example 5 A test piece was prepared under the same conditions except that NaCl was 1 mol / l in Example 4.

実施例6 実施例4においてNaClを2モル/lとした以外は,全て同
じ条件として試験片を作成した。
Example 6 A test piece was prepared under the same conditions as in Example 4 except that NaCl was changed to 2 mol / l.

比較例1 実施例1においてNa2SO4を添加しないこと以外は,全て
同じ条件として試験片を作成した。
Comparative Example 1 Test pieces were prepared under the same conditions as in Example 1 except that Na 2 SO 4 was not added.

以上のようにして作成した各々の試験片の酸化処理した
後の銅の表面が金属銅に還元されるまでの時間と,以下
の試験を行った。その結果を第1表に示す。
The time required until the copper surface after the oxidation treatment of each test piece prepared as described above was reduced to metallic copper, and the following tests were performed. The results are shown in Table 1.

(1) 内層銅箔引き剥がし試験 試験法;JIS-C6481 (2) 耐塩酸試験 試験法; 130mm×130mmの大きさに切断加工 表面銅箔を除去 直径1mmの穴を30箇所にあける 19%塩酸に浸漬 塩酸が内層に浸み込む時間の測定 (3) 耐無電解めっき液試験 試験法; 130mm×130mmの大きさに切断加工 表面銅箔を除去 直径1mmの穴を30箇所あける 以下の無電解めっき液に浸漬 組成 CuSO4・5H2O:10g/l EDTA・2Na:30g/l 36%ホルマリン:5ml/l 純水:組成物と合わせて1となる量 条件 温度:70℃ pH:12.5 無電解めっき液が内層に浸み込む時間の測定 (発明の効果) 以上に説明したように,本発明によって,耐塩酸性,耐
無電解めっき液性および樹脂の接着力を維持し,さらに
処理時間が短く量産の優れた銅の表面処理法を提供する
ことができる。
(1) Inner layer copper foil peeling test test method; JIS-C6481 (2) Hydrochloric acid resistance test method; cut into a size of 130 mm × 130 mm Surface copper foil removed 19% hydrochloric acid with 30 mm 1 mm diameter holes Immersion in hydrochloric acid Measurement of time when hydrochloric acid soaks into the inner layer (3) Electroless plating solution test Test method: Cutting to a size of 130 mm x 130 mm Surface copper foil is removed 30 holes with a diameter of 1 mm are drilled Immersion in plating solution Composition CuSO 4 , 5H 2 O: 10g / l EDTA ・ 2Na: 30g / l 36% Formalin: 5ml / l Pure water: Amount that becomes 1 together with the composition Conditions Temperature: 70 ℃ pH: 12.5 No Measurement of time for electrolytic plating solution to soak into the inner layer (Effects of the Invention) As described above, the present invention provides a surface treatment method for copper that maintains hydrochloric acid resistance, electroless plating solution resistance, and resin adhesive strength, and that has a short processing time and is mass-produced. can do.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】以下の工程を以下の順に含む処理工程によ
って銅表面に形成した酸化銅を金属銅に還元することを
特徴とする銅の表面処理法。 a.銅表面を酸化剤を含む水溶液と接触させて, 銅表面に酸化銅を形成する工程。 b.酸化処理した銅表面を水素化ホウ素アルカリを含む水
溶液と接触させることによって,酸化処理した銅表面の
電位をAg-AgCl電極に対して−1000mV以上で−400mV以下
の範囲内に変化させる工程。 c.塩のうち少なくとも1種以上とホルムアルデヒドとを
含む水溶液と接触させることによって,酸化処理した銅
表面の電位をAg-AgCl電極に対して−1000mVよりも卑な
電位に変化させる工程。
1. A method for surface treatment of copper, which comprises reducing the copper oxide formed on the copper surface to metallic copper by a treatment step including the following steps in the following order: a. Forming copper oxide on the copper surface by contacting the copper surface with an aqueous solution containing an oxidizing agent. b. A step of changing the potential of the oxidized copper surface within a range of −1000 mV or more to −400 mV or less with respect to the Ag-AgCl electrode by contacting the oxidized copper surface with an aqueous solution containing alkali borohydride. . c. A step of changing the potential of the oxidized copper surface to a base potential lower than −1000 mV with respect to the Ag—AgCl electrode by contacting with an aqueous solution containing at least one of salts and formaldehyde.
JP14198688A 1988-06-09 1988-06-09 Copper surface treatment method Expired - Lifetime JPH0719957B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14198688A JPH0719957B2 (en) 1988-06-09 1988-06-09 Copper surface treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14198688A JPH0719957B2 (en) 1988-06-09 1988-06-09 Copper surface treatment method

Publications (2)

Publication Number Publication Date
JPH01310595A JPH01310595A (en) 1989-12-14
JPH0719957B2 true JPH0719957B2 (en) 1995-03-06

Family

ID=15304737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14198688A Expired - Lifetime JPH0719957B2 (en) 1988-06-09 1988-06-09 Copper surface treatment method

Country Status (1)

Country Link
JP (1) JPH0719957B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4618466B2 (en) * 2000-10-11 2011-01-26 日立化成工業株式会社 Copper surface treatment
JP5109400B2 (en) * 2006-09-08 2012-12-26 日立化成工業株式会社 Copper surface treatment liquid set, copper surface treatment method using the same, copper, wiring board, and semiconductor package

Also Published As

Publication number Publication date
JPH01310595A (en) 1989-12-14

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