JPH072032B2 - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPH072032B2 JPH072032B2 JP1240193A JP24019389A JPH072032B2 JP H072032 B2 JPH072032 B2 JP H072032B2 JP 1240193 A JP1240193 A JP 1240193A JP 24019389 A JP24019389 A JP 24019389A JP H072032 B2 JPH072032 B2 JP H072032B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- friction
- vibrator
- torsional
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000033001 locomotion Effects 0.000 claims description 19
- 229910000906 Bronze Inorganic materials 0.000 claims description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 239000010974 bronze Substances 0.000 claims description 6
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000002783 friction material Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、圧電セラミックス等の圧電素子による超音波
振動を利用してロータを回転駆動する超音波モータに関
する。Description: TECHNICAL FIELD The present invention relates to an ultrasonic motor that rotationally drives a rotor using ultrasonic vibration generated by a piezoelectric element such as piezoelectric ceramics.
［従来の技術］ 圧電セラミックスに高周波の交流電圧をかけて振動さ
せ、その超音波振動を駆動エネルギ源として使用するこ
の種の超音波モータは、従来の電磁モータと異なり、そ
の動作原理上、低速で高トルクが得られる、小型軽量化
が容易、構造が簡単、保持トルクが大きい、応答性が速
い、非磁性材料で構成できる、減速機構などの動力伝達
機構が不要など、多くの特徴を有することから、現在各
種の超音波モータが提案されている。第４図は捻じり振
動子と縦振動子をロータにその両側から加圧接触させ
た、所謂ロータ・サンドウィッチ型超音波モータの従来
例を示すもので、これを同図において概略説明すると、
１は捻じり振動子、２は縦振動子で、これらは一端面を
対向させて同軸配置され、且つボルト３によって一体的
に結合されている。捻じり振動子１は円筒状に形成され
て、前記ボルト３が貫通する中空ボルト４により締結固
定ており、中央部には周方向に分極されて且つ対極配置
され捻じり振動子１に円周方向に屈曲振動を起こさせる
捻じり振動発生用駆動素子としての圧電素子５と、駆動
用の電極板６が設けられている。一方、縦振動素子２の
中央部には厚み方向に伸びたり縮んだりして縦振動子２
に縦振動を起こさせる縦振動発生用駆動素子としての圧
電素子７と、駆動用電極板８が設けられている。[Prior Art] This type of ultrasonic motor, which uses a high-frequency alternating voltage to vibrate the piezoelectric ceramics to vibrate and uses the ultrasonic vibration as a drive energy source, is different from the conventional electromagnetic motor in that it operates at low speed. It has many features such as high torque can be obtained, it is easy to be small and lightweight, the structure is simple, the holding torque is large, the response is fast, it can be made of non-magnetic material, and a power transmission mechanism such as a reduction mechanism is unnecessary. Therefore, various ultrasonic motors are currently proposed. FIG. 4 shows a conventional example of a so-called rotor-sandwich type ultrasonic motor in which a torsional oscillator and a longitudinal oscillator are brought into pressure contact with the rotor from both sides thereof.
Reference numeral 1 is a torsional vibrator, and 2 is a vertical vibrator, which are coaxially arranged with one end faces facing each other and are integrally coupled by a bolt 3. The torsional vibrator 1 is formed in a cylindrical shape and is fastened and fixed by a hollow bolt 4 through which the bolt 3 penetrates. The central part of the torsional vibrator 1 is polarized in the circumferential direction and is arranged with a counter electrode. A piezoelectric element 5 as a driving element for generating torsional vibration that causes bending vibration in a direction and an electrode plate 6 for driving are provided. On the other hand, in the central portion of the vertical vibration element 2, the vertical vibrator 2 is expanded or contracted in the thickness direction.
A piezoelectric element 7 as a drive element for generating vertical vibration that causes vertical vibration and a drive electrode plate 8 are provided.
10は前記捻じり振動素子１と縦振動素子２の互いに対向
する対面、すなわち運動伝達面1a、2a間に位置して前記
ボルト３に回転自在に配設されたロータで、このロータ
10はアルミ合金、ステンレス鋼等によって均一な板厚を
有する円板状に形成されている。運動伝達面1aにはロー
タ10との間の摩擦力を大きくするための低摩擦高摩擦ゴ
ム等による摩擦材11が貼着され、これとは反対に運動伝
達面2aにはロータ10との滑りをよくするためフッ素樹脂
等の低摩擦性樹脂材料12がコーティングされたり、フッ
素樹脂テープが貼着されている。Reference numeral 10 denotes a rotor disposed between the torsional vibration element 1 and the longitudinal vibration element 2 facing each other, that is, between the motion transmission surfaces 1a and 2a, and rotatably arranged on the bolt 3.
Reference numeral 10 is formed of aluminum alloy, stainless steel, or the like into a disc shape having a uniform plate thickness. A friction material 11 made of low friction high friction rubber or the like is attached to the motion transmitting surface 1a to increase the frictional force between the rotor 10 and the rotor 10. In order to improve the heat resistance, a low friction resin material 12 such as a fluororesin is coated or a fluororesin tape is attached.
ボルト３の一端部は捻じり振動素子１を貫通して縦振動
素子２の運動伝達面2aに形成されたねじ孔にねじ込ま
れ、他端部には縦振動子２を捻じり振動子方向に付勢す
る圧縮コイルばね13が装着されており、このばね力によ
って前記捻じり振動子１と縦振動子２をロータ10に所定
圧にて加圧接触させている。なお、中空ボルト４の外端
部にはナット14が螺合されている。15はばね圧調整用ナ
ット、16はワッシャである。One end of the bolt 3 penetrates the torsional vibration element 1 and is screwed into a screw hole formed in the motion transmitting surface 2a of the vertical vibration element 2, and the other end of the bolt 3 twists the vertical vibrator 2 in the direction of the vibrator. A compression coil spring 13 for urging is attached, and the torsional vibrator 1 and the vertical vibrator 2 are brought into pressure contact with the rotor 10 at a predetermined pressure by this spring force. A nut 14 is screwed onto the outer end of the hollow bolt 4. Reference numeral 15 is a spring pressure adjusting nut, and 16 is a washer.
このような構成において、各駆動用電極板６、８に各振
動子１、２の固有振動数と一致し相互に時間的位相差が
０°である高周波電圧Φ1、Φ2を印加すると、捻じり振
動子１と縦振動子２にそれぞれ捻じり振動と縦振動が発
生し、これらが互いに干渉を起こして合成されると、円
周方向の進行波となり、捻じり振動子１と縦振動子１の
運動伝達面1a、2aのある任意の質点P1、P2に着目すると
これらの質点P1、P2は進行波の進行方向と逆向きに楕円
または円運動を行っており、この楕円又は円運動と、こ
れに対向して設けたロータ10との摩擦力によってロータ
10を回転駆動する。各圧電素子５、７に印加する高周波
電圧の位相差を±180°にすると、合成進行波の進む方
向が反対方向となり、ロータ10を逆転させることができ
る。In such a configuration, when high frequency voltages Φ 1 and Φ 2 that match the natural frequencies of the vibrators 1 and 2 and have a mutual temporal phase difference of 0 ° are applied to the drive electrode plates 6 and 8, Torsional vibration and longitudinal vibration are generated in the torsional vibrator 1 and the longitudinal vibrator 2, respectively, and when these are caused to interfere with each other and are combined, a traveling wave in the circumferential direction is generated, and the torsional vibrator 1 and the longitudinal vibration are generated. Focusing on the arbitrary mass points P 1 and P 2 on the motion transmission surfaces 1a and 2a of the child 1, these mass points P 1 and P 2 make an elliptical or circular motion in the direction opposite to the traveling direction of the traveling wave. The rotor is rotated by an elliptical or circular movement and the frictional force between the rotor 10 and the rotor 10.
Rotate 10 When the phase difference between the high frequency voltages applied to the piezoelectric elements 5 and 7 is ± 180 °, the traveling directions of the composite traveling waves are opposite to each other, and the rotor 10 can be rotated in the reverse direction.
［発明が解決しようとする課題］ しかしながら、従来のこのような超音波モータにおいて
はロータ材質として上述したようにアルミ合金やステン
レス鋼等を使用し、運動伝達面1aに摩擦材11を貼着して
いたが、捻じり振動子１との摩擦相性が悪く、十分な回
転トルクが得られないという問題があった。また、ロー
タ10の厚みが大であったため、縦振動振幅が減衰され、
質点P1、P2上にうまく楕円または円運動が形成されない
ことがあり、さらには縦振動素子２の運動伝達面2aとの
摩擦相性も悪く、結果としてロータ10が回転しなかった
り、回転ムラが生じ、安定且つ良好な回転特性が得られ
なかった。[Problems to be Solved by the Invention] However, in such a conventional ultrasonic motor, aluminum alloy, stainless steel, or the like is used as the rotor material as described above, and the friction material 11 is attached to the motion transmitting surface 1a. However, there is a problem that the friction compatibility with the torsional vibrator 1 is poor and a sufficient rotation torque cannot be obtained. Also, since the thickness of the rotor 10 was large, the longitudinal vibration amplitude was attenuated,
Elliptic or circular motion may not be formed well on the mass points P 1 and P 2 , and the friction compatibility with the motion transmitting surface 2a of the longitudinal vibration element 2 may be poor, resulting in the rotor 10 not rotating or uneven rotation. Occurred, and stable and good rotation characteristics could not be obtained.
したがって、本発明は上記したような従来の問題点に鑑
みてなされたもので、その目的とするところは、ロータ
と運動伝達面との摩擦特性を改善し、安定且つ良好な回
転特性を得ることができるようにした超音波モータを提
供することにある。Therefore, the present invention has been made in view of the above-mentioned conventional problems, and an object thereof is to improve the frictional characteristics between the rotor and the motion transmitting surface to obtain stable and good rotational characteristics. It is to provide an ultrasonic motor capable of performing the above.
［課題を解決するための手段］ 本発明は上記目的を達成するために、捻じり振動子と、
縦振動子とを互いに対向させて同軸上に配設し、これら
両振動子間に回転可能なロータを介在させたロータ・サ
ンドウィッチ型の超音波モータにおいて、前記捻じり振
動子の運動伝達面の摩擦係数を縦振動子の運動伝達面の
摩擦係数より大きく設定し、前記ロータはリン青銅によ
って薄肉円板状に形成されて、前記縦振動子が加圧接触
する面には接触面積を減じる環状突起部が設けられてい
るものである。[Means for Solving the Problems] In order to achieve the above object, the present invention comprises a torsional vibrator,
In a rotor sandwich type ultrasonic motor in which a longitudinal oscillator and a longitudinal oscillator are arranged coaxially with each other and a rotatable rotor is interposed between these oscillators, the motion transmitting surface of the torsion oscillator is The friction coefficient is set to be larger than the friction coefficient of the motion transmitting surface of the vertical vibrator, the rotor is formed of phosphor bronze in a thin disk shape, and the contact area of the rotor is reduced by a ring shape. A protrusion is provided.
［作用］ 本発明においてリン青銅製ロータは捻じり振動素子、縦
振動素子の両運動伝達面との摩擦相性が良好で、十分な
回転トルクを受け、安定且つ確実に回転する。ロータの
環状突起部は縦振動素子との接触面積を減じ、摩擦を軽
減する。また、この突起部によりロータ肉厚が減少する
と、縦振動振幅の減衰が少なく、良好な合成振動が得ら
れる。[Operation] In the present invention, the phosphor bronze rotor has a good friction compatibility with both the motion transmitting surfaces of the torsional vibration element and the longitudinal vibration element, receives a sufficient rotational torque, and rotates stably and reliably. The annular protrusion of the rotor reduces the contact area with the longitudinal vibration element and reduces friction. Further, if the thickness of the rotor is reduced by this protrusion, the longitudinal vibration amplitude is less attenuated, and good combined vibration can be obtained.
［実施例］ 以下、本発明を図面に示す実施例に基づいて詳細に説明
する。[Examples] Hereinafter, the present invention will be described in detail based on Examples shown in the drawings.
第１図は本発明に係る超音波モータの一実施例を示す断
面図、第２図はロータの拡大断面図である。なお、図中
第４図と同一部品、部分のものについては同一符号を以
て示し、その説明を省略する。これらの図において、本
実施例は捻じり振動子１と縦振動子２との間に介在さ
れ、これらが加圧接触するロータ10をリン青銅によって
円板状に形成すると共に、ロータ10の縦振動子２が加圧
接触する面の中央部に環状突起部20を一体に突設して構
成したものである。ロータ10の板厚は、環状突起部20が
設けられている中央部分のみが従来のロータと略同一
で、それより外周側が環状突起部20の突出寸法だけ薄く
形成され、これによってロータ10の薄肉、軽量化を図っ
ている。また、環状突起部20は縦振動子２の運動伝達面
2aとの接触面積を減少させ、摩擦軽減を図っている。な
お、21はロータ10の中心に開設された中心孔で、この中
心孔21の周囲に前記環状突起部20が突設され、またボル
ト３が貫通している。FIG. 1 is a sectional view showing an embodiment of an ultrasonic motor according to the present invention, and FIG. 2 is an enlarged sectional view of a rotor. The same parts and portions as those in FIG. 4 are designated by the same reference numerals and the description thereof will be omitted. In these figures, in this embodiment, the rotor 10 interposed between the torsional vibrator 1 and the vertical vibrator 2 is press-contacted with each other, and the rotor 10 is formed into a disk shape by phosphor bronze. The vibrator 2 is formed by integrally projecting an annular projection 20 at the center of the surface that comes into pressure contact. The plate thickness of the rotor 10 is substantially the same as that of the conventional rotor only in the central portion where the annular protrusion 20 is provided, and the outer peripheral side is formed thinner by the protruding size of the annular protrusion 20. , We are trying to reduce the weight. Further, the annular protrusion 20 is a motion transmission surface of the vertical oscillator 2.
The contact area with 2a is reduced to reduce friction. Reference numeral 21 is a center hole opened in the center of the rotor 10, the annular projection 20 is provided around the center hole 21, and the bolt 3 is penetrated therethrough.
その他の構成は第４図に示した従来モータと同様であ
る。Other configurations are the same as those of the conventional motor shown in FIG.
このような構成からなる超音波モータにおいて、ロータ
材質をリン青銅にすると、従来のアルミ合金やステンレ
ス鋼製のロータと比較して、捻じり振動子１との摩擦特
性を著しく改善することができ、捻じり振動により発生
する回転トルクをロータ10に効率よく伝達することが確
認された。また、環状突起部20によってロータ10を薄形
化すると、振動し易くなるので、縦振動振幅を効率よく
（減衰を小さく）伝搬でき、合成振動による楕円または
円運動をロータ面上に効率よく形成させることができ
る。さらに、環状突起部20によって縦振動子２との摩擦
を軽減させているので、ロータ10が止まったりせず、良
好な回転特性を得ることができる。In the ultrasonic motor having such a configuration, when the rotor material is phosphor bronze, the friction characteristics with the torsional vibrator 1 can be significantly improved as compared with the conventional rotor made of aluminum alloy or stainless steel. It was confirmed that the rotational torque generated by the torsional vibration is efficiently transmitted to the rotor 10. Further, if the rotor 10 is made thin by the annular protrusion 20, it becomes easy to vibrate, so that the longitudinal vibration amplitude can be efficiently propagated (the damping is small), and the elliptical or circular motion due to the synthetic vibration is efficiently formed on the rotor surface. Can be made. Further, since the friction with the vertical vibrator 2 is reduced by the annular protrusion 20, the rotor 10 does not stop and good rotation characteristics can be obtained.
なお、環状突起部20の突設位置としては第３図に示すよ
うに半径を大きくし、ロータ外周寄りに突設されるもの
であってもよい。但し、中心から遠くなるためにしたが
って摩擦モーメントが大きくなるため、性能的には上記
実施例と比較して若干劣る。したがって、その場合は摩
擦軽減対策として縦振動子２と環境突起部20との接触面
に潤滑油等を塗布するとよい。The protruding position of the annular protrusion 20 may be such that it has a large radius as shown in FIG. 3 and is protruded toward the outer circumference of the rotor. However, since the friction moment increases as the distance from the center increases, the performance is slightly inferior to that of the above embodiment. Therefore, in that case, it is advisable to apply a lubricating oil or the like to the contact surface between the vertical vibrator 2 and the environmental protrusion 20 as a friction reducing measure.
また、上記実施例はいずれも環状突起部20の縦振動子２
との接触面を平端面に形成したが、円弧状の曲面であっ
てもよい。Further, in each of the above-described embodiments, the vertical vibrator 2 having the annular protrusion 20 is used.
Although the contact surface with is formed as a flat end surface, it may be an arcuate curved surface.
［発明の効果］ 以上説明したように本発明に係る超音波モータによれ
ば、捻じり振動子と縦振動子が両側より加圧接触するロ
ータをリン青銅によって薄肉円板状に形成し、縦振動子
と接触する面に環状突起部を一体に突設して構成したの
で、縦振動子との摩擦による損失を軽減でき、また捻じ
り振動および縦振動を効果的に伝搬でき、入力電圧に対
して損失が少なく、さらに良好な回転特性が得られ、高
効率、高性能モータを提供することができる。[Advantages of the Invention] As described above, according to the ultrasonic motor of the present invention, the rotor in which the torsional vibrator and the vertical vibrator are in pressure contact from both sides is formed of phosphor bronze into a thin disk shape, Since the ring-shaped protrusion is integrally formed on the surface that contacts the vibrator, the loss due to friction with the vertical vibrator can be reduced, and the torsional vibration and the vertical vibration can be effectively propagated to reduce the input voltage. On the other hand, it is possible to provide a high-efficiency and high-performance motor with less loss and more favorable rotation characteristics.
第１図は本発明に係る超音波モータの一実施例を示す断
面図、第２図はロータの拡大断面図、第３図はロータの
他の一実施例を示す拡大断面図、第４図はロータ・サン
ドウィッチ型超音波モータの従来例を示す断面図であ
る。 １……捻じり振動子、1a……運動伝達面、２……縦振動
子、2a……運動伝達面、３……ボルト、４……中空ボル
ト、５、７……圧電素子、６、８……駆動用電極板、10
……ロータ、13……圧縮コイルばね、20……環状突起
部。1 is a sectional view showing an embodiment of an ultrasonic motor according to the present invention, FIG. 2 is an enlarged sectional view of a rotor, FIG. 3 is an enlarged sectional view showing another embodiment of a rotor, and FIG. FIG. 7 is a sectional view showing a conventional example of a rotor / sandwich ultrasonic motor. 1 ... torsional oscillator, 1a ... motion transmission surface, 2 ... longitudinal oscillator, 2a ... motion transmission surface, 3 ... bolt, 4 ... hollow bolt, 5,7 ... piezoelectric element, 6, 8: Driving electrode plate, 10
...... Rotor, 13 ...... Compression coil spring, 20 ...... annular protrusion.
Claims (1)
させて同軸上に配設し、これら両振動子間に回転可能な
ロータを介在させたロータ・サンドウィッチ型の超音波
モータにおいて、前記捻じり振動子の運動伝達面の摩擦
係数を縦振動子の運動伝達面の摩擦係数より大きく設定
し、前記ロータはリン青銅によって薄肉円板状に形成さ
れて、前記縦振動子が加圧接触する面には接触面積を減
じる環状突起部が設けられていることを特徴とする超音
波モータ。1. A rotor-sandwich ultrasonic motor in which a torsional oscillator and a longitudinal oscillator are arranged coaxially with each other so as to face each other, and a rotatable rotor is interposed between the two oscillators. In, the coefficient of friction of the motion transmitting surface of the torsional oscillator is set to be larger than the coefficient of friction of the motion transmitting surface of the vertical oscillator, the rotor is formed of phosphor bronze into a thin disk shape, and the vertical oscillator is An ultrasonic motor characterized in that an annular protrusion that reduces the contact area is provided on the surface that comes into pressure contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1240193A JPH072032B2 (en) | 1989-09-18 | 1989-09-18 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1240193A JPH072032B2 (en) | 1989-09-18 | 1989-09-18 | Ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03103083A JPH03103083A (en) | 1991-04-30 |
| JPH072032B2 true JPH072032B2 (en) | 1995-01-11 |
Family
ID=17055846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1240193A Expired - Fee Related JPH072032B2 (en) | 1989-09-18 | 1989-09-18 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH072032B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3382811B2 (en) * | 1997-02-24 | 2003-03-04 | ブラザー工業株式会社 | Pocket setter folding machine |
-
1989
- 1989-09-18 JP JP1240193A patent/JPH072032B2/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| 日本音響学会講演論文集、平成元年１０月、Ｐ．９３３〜９３４ |
| 日本音響学会講演論文集、昭和６２年３月、Ｐ．６６９〜６７０（表２） |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03103083A (en) | 1991-04-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR0129769B1 (en) | Vibration driven motor | |
| US6121717A (en) | Driving device for at least two rotation elements, which device comprises at least one piezoelectric driving element | |
| JPH08103089A (en) | Vibration motor | |
| US4723085A (en) | Vibration wave motor | |
| JP3015090B2 (en) | Vibration wave drive | |
| JPH0284079A (en) | vibration wave motor | |
| JPH072032B2 (en) | Ultrasonic motor | |
| JPS62114478A (en) | Ultrasonic vibrator and control method for drive thereof | |
| US4399385A (en) | Rotative motor using a triangular piezoelectric element | |
| JPS62126874A (en) | Ultrasonic vibrator and drive controlling method thereof | |
| JPH0724416A (en) | Ultrasonic vibrator | |
| JP2950537B2 (en) | Ultrasonic motor | |
| JPS62135279A (en) | Ultrasonic motor | |
| JP2004229422A (en) | Ultrasonic motor | |
| JP3902955B2 (en) | Vibration body and vibration wave drive device | |
| JPH0150196B2 (en) | ||
| JPS63124785A (en) | Ultrasonic motor | |
| JPH062478Y2 (en) | Ultrasonic motor | |
| JP3299670B2 (en) | Vibration wave drive | |
| JP2632156B2 (en) | Ultrasonic motor | |
| JP2615953B2 (en) | Ultrasonic motor and its driving method | |
| JP2639845B2 (en) | Ultrasonic actuator | |
| JPH0628952Y2 (en) | Ultrasonic motor | |
| JPS60210177A (en) | vibration wave motor | |
| JPH04133676A (en) | Driving method for actuator and ultrasonic actuator realizing this driving method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090111 Year of fee payment: 14 |
|
| LAPS | Cancellation because of no payment of annual fees |