JPH0724093B2 - Magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention is a MIG (Metal) that enables high-density magnetic recording and reproduction.
in Gap) type magnetic head.

[Conventional technology]

Conventionally, it has both the advantages of oxide magnetic materials such as ferrite materials, which have high magnetic permeability and excellent wear resistance, and the advantages of alloy magnetic materials, which have high magnetic permeability and high saturation magnetic flux density.
A MIG type magnetic head is known. In this magnetic head, an oxide magnetic material is used for the core body and an alloy magnetic material is formed in the vicinity of the gap.

In the method of manufacturing such a magnetic head, as shown in FIG. 3 (a), the outer winding groove 13, the glass filling groove 14 and the inner winding groove are formed in one block 11 of the oxide magnetic material to be the core. A groove 15 for wire is formed, and a groove 13 for external winding and a groove 14 for glass filling are also formed in the other block 12 of the oxide magnetic material which also serves as a core, as shown in FIG. . Then, after the gap facing surface 16 and the tape sliding surface 17 of each of the blocks 11 and 12 are mirror-polished, in order to obtain a predetermined gap track width, as shown in FIGS. Forming grooves (track grooves) 18 ...
Next, after the work-affected layer near the surface layer of the gap facing surface 16 is removed by etching, as shown in (e), (f) and (g) of FIG. An alloy magnetic material thin film 19 having a magnetic permeability and a high saturation magnetic flux density is formed by a sputtering method or the like. Next, a non-magnetic material such as SiO _{2 is} used as a gap material at a gap formation site on the alloy magnetic material thin film 19 to a thickness of about 0.3
After being formed to a thickness of μm, the above-mentioned blocks 11 and 12 are formed on the respective gap facing surfaces 16 and 16 as shown in FIG.
Are abutted on each other and bonded together, and the glass 20 is placed in the cavity portions respectively formed by the glass filling groove 14 and the internal winding groove 15 and heat-welded. Then, on the tape sliding surface 17 of the magnetic head block thus obtained,
After forming the curved surface, as shown in FIG.
By cutting along the line, the magnetic head 22 (at the stage where the winding is not yet applied) is obtained as shown in FIG.

[Problems to be Solved by the Invention]

However, in the above-mentioned conventional magnetic head, the boundary surface between the gap facing surface 16 of each of the blocks 11 and 12 made of an oxide magnetic material and the alloy magnetic material thin film 19 is parallel to the gap, so that it is shown in FIG. As described above, the swell that occurs in the reproduction output-frequency characteristic becomes about 3 dB. This is because the difference in the magnetic properties between the oxide magnetic material and the alloy magnetic material, the reaction layer due to the diffusion of oxygen or the like formed at the boundary surface, the incompletely removed portion of the altered layer, or the like acts as a pseudo gap. This is considered to be due to the so-called shape effect (contour effect). In FIG. 4, the relative velocity between the magnetic recording medium and the magnetic head is 5.8 m / sec., And the magnetic recording medium having a coercive force of 900 oersted is used.

As a solution to this problem, a magnetic head has been proposed in which chromium is interposed between an oxide magnetic material and an alloy magnetic material. This magnetic head is shown in FIG.
As shown in (b), (c) and (d), the magnetic head described above is used.
After the manufacturing process similar to 22 (after removing the work-affected layer), a chromium (Cr) film 23 of 10 Å to 200 Å is formed by a sputtering method as shown in FIGS. It is formed on the gap facing surface 16 with a thickness. After that, the alloy magnetic material thin film 19 is formed to a film thickness of 2 to 6 μm by a sputtering method or the like.
m in parallel with the gap on the chromium film 23. Then, a non-magnetic material such as SiO _{2 is applied} as a gap material to the gap forming portion of the alloy magnetic material thin film 19.
It is formed with a thickness of 0.3 μm. In subsequent manufacturing steps, as shown in (h), (i) and (j) of the same drawing, the same processing as in the manufacturing of the magnetic head described above is performed.

However, even in the magnetic head in which the chromium film 23 is interposed between the blocks 11 and 12 which are oxide magnetic materials and the alloy magnetic material thin film 19 as described above, as shown in FIG.
The reproduction output-frequency characteristic still has a swell of about 1 dB, which is not sufficient performance, and further improvement is desired. The conditions in FIG. 6 are set in the same manner as the conditions in FIG.

[Means for Solving the Problems]

In order to solve the above-mentioned problems, a magnetic head according to the present invention has an alloy magnetic material thin film having a high magnetic permeability and a high saturation magnetic flux density, and a gap is formed on the gap facing surface side of an oxide magnetic material core having a high magnetic permeability. In the magnetic head formed in parallel with, the chromium nitride is formed between the alloy magnetic material thin film and the gap facing surface of the oxide magnetic material core.

[Work]

According to the above configuration, mutual diffusion of oxygen or the like between the alloy magnetic material thin film and the oxide magnetic material core can be suppressed, and the oxide magnetic material near the boundary surface between the oxide magnetic material core and the alloy magnetic material thin film can be suppressed. For example, it is possible to prevent deterioration of the soft magnetic characteristics of the material core and the alloy magnetic material thin film, so that it is possible to suppress the so-called shape effect and reduce the undulation in the reproduction output-frequency characteristics.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

In the magnetic head according to the present invention, as shown in FIG. 1 (j), each of the gap facing surfaces 3 and 3 of the oxide magnetic material cores 1 and 2 having high magnetic permeability has a predetermined width and Protrusions 3a having a surface parallel to the gap are formed. A chromium nitride film 4 having a thickness of 10Å to 200Å is formed on the gap facing surface 3/3 including the protruding portions 3a, 3a, and the gap facing surface 3 is 2 μm thick via the chromium nitride film 4. An alloy magnetic material thin film 5 having a high magnetic permeability and a high saturation magnetic flux density is formed with a thickness of ˜6 μm. Then, the oxide magnetic material cores 1 and 2 on which the chromium nitride film 4 and the alloy magnetic material thin film 5 are formed have a thickness as a gap material between the protrusions 3a and 3a.
The gap facing surfaces 3 and 3 are butted against each other with a non-magnetic material such as SiO _{2 having a} thickness of 0.3 μm interposed therebetween and fixed by a molten glass 6.

In order to manufacture the above magnetic head, as shown in FIG. 1A, one block 1'of the oxide magnetic material to be the core is provided in the outer winding groove 1'a, the glass filling groove 1'b and the inner portion. While forming the winding groove 1'c, as shown in FIG. 2B, the outer winding groove 2'a and the glass filling groove are formed in the other block 2'of the oxide magnetic material which also serves as the core. The groove 2'b is formed. Then, after the gap facing surface 3 and the tape sliding surface 7 of the blocks 1'and 2'are mirror-polished, a predetermined gap track width is obtained as shown in FIGS. Groove (track groove) 8 for ...
To form. Next, after the work-affected layer near the surface layer of the gap facing surface 3 is removed by etching, FIG.
As shown in (f) and (g), the chromium nitride film 4 is formed on the gap facing surface 3 to a thickness of 10Å to 200Å by a reactive sputtering method using a mixed gas of nitrogen gas and argon gas. Here, the thickness of the chromium nitride film 4 is 10Å
If the thickness is less than 200 Å, the chromium nitride film 4 does not exhibit the function of suppressing the shape effect because the chromium nitride film 4 becomes discontinuous and is formed in an island shape. Therefore, as described above, the thickness of the chromium nitride film 4 is preferably about 10Å to 200Å. It should be noted that the thinner the chromium nitride film 4 is in the range of 10Å to 200Å, the more remarkable the function of suppressing the shape effect becomes.

After forming the chromium nitride film 4, the alloy magnetic material thin film 5 is formed on the chromium nitride film 4 by a sputtering method or the like to have a thickness of 2 to 6 μm. Then, a nonmagnetic material such as SiO ₂ is formed with a thickness of about 0.3 μm as a gap material at the gap forming portion on the alloy magnetic material thin film 5. Next, as shown in FIG. 6 (h), the blocks 1'and 2'are attached to each other by abutting the gap-opposing surfaces 3 and 3 to each other, and the glass-filling grooves 1'b and 2'b and the inner portion. Molten glass 6 is placed in the cavity portions respectively formed by the winding grooves 1'c and heated and welded. Then, after forming a curved surface on the tape sliding surface 7 of the magnetic head block thus obtained, as shown in FIG. 6I, by cutting along the virtual line a ... As shown in (j), a magnetic head (or a stage where no winding is applied) is obtained. Therefore, the magnetic head can be obtained by a manufacturing process substantially similar to the conventional manufacturing process, mass productivity of the magnetic head and uniformity of quality can be maintained as they are, and the cost of the magnetic head can be reduced.

According to the above configuration, mutual diffusion of oxygen and the like between the alloy magnetic material thin film 5 and the oxide magnetic material cores 1 and 2 can be suppressed, and the oxide magnetic material cores 1 and 2 and the alloy magnetic material thin film 5 can be suppressed.
It is possible to prevent deterioration of the soft magnetic characteristics of the oxide magnetic material cores 1 and 2 and the alloy magnetic material thin film 5 in the vicinity of the boundary surface, and so-called shape effect is suppressed to reproduce output.
It is possible to reduce the waviness in the frequency characteristic. FIG. 2 shows a sendust alloy thin film with a thickness of 4 μm as an alloy magnetic material thin film 5 after forming a chromium nitride film 4 with a thickness of 50Å by a reactive sputtering method using a mixed gas of nitrogen gas 20% and argon gas 80%. It is a reproduction output-frequency characteristic view in the magnetic head obtained by forming. In this characteristic test, the relative speed between the magnetic head and the recording medium was 5.
8 m / sec., A recording medium with a coercive force of 900 oersted is used. As is clear from this figure, the playback output −
The swell in frequency characteristics is reduced to the range of 0.3 dB,
The quality of the reproduced signal could be significantly improved.

〔The invention's effect〕

As described above, in the magnetic head according to the present invention, the alloy magnetic material thin film having high magnetic permeability and high saturation magnetic flux density is parallel to the gap on the gap facing surface side of the oxide magnetic material core having high magnetic permeability. In the formed magnetic head, chromium nitride is formed between the gap facing surface of the oxide magnetic material core and the alloy magnetic material thin film.

As a result, it is possible to suppress the so-called shape effect, reduce the undulation in the reproduction output-frequency characteristic, and significantly improve the quality of the reproduction signal.

[Brief description of drawings]

FIGS. 1 and 2 show an embodiment of the present invention, and FIGS. 1 (a) to (f) and (h) to (j) respectively show respective steps of a magnetic head manufacturing process. FIG. 3G is a perspective view, FIG. 2G is a cross-sectional view of the main part in FIG. 1F, FIG. 2 is a graph of reproduction output-frequency characteristics in the magnetic head, and FIGS. 3 (a) to 3 (f) and 3 (h) to 3 (j) are perspective views showing respective steps of the manufacturing process of the magnetic head, and FIG. 3 (g) is a main view in FIG. 3 (f). 4 is a cross-sectional view of a portion, FIG. 4 is a graph of reproduction output-frequency characteristics in the magnetic head, and FIGS. 5 and 6 show other conventional examples. FIGS. 5 (a) to 5 (f) and (H) to (j) are perspective views showing respective steps of the manufacturing process of the magnetic head, and (g) is the same. Cross-sectional view of the essential part in (f), Figure 6 is reproduced output of the magnetic head - is a graph of the frequency characteristics. 1 and 2 are oxide magnetic material cores, 1'and 2'are oxide magnetic material blocks, 3 is a gap facing surface, 4 is a chromium nitride film, 5 is an alloy magnetic material thin film, and 6 is molten glass.

Claims (1)

[Claims] 1. A magnetic head in which an alloy magnetic material thin film having a high magnetic permeability and a high saturation magnetic flux density is formed parallel to a gap on the gap facing surface side of an oxide magnetic material core having a high magnetic permeability. A magnetic head, wherein chromium nitride is formed between the surface of the oxide magnetic material core facing the gap and the alloy magnetic material thin film.