JPH0725563B2 - Method for manufacturing base material for optical fiber - Google Patents
Method for manufacturing base material for optical fiberInfo
- Publication number
- JPH0725563B2 JPH0725563B2 JP61166233A JP16623386A JPH0725563B2 JP H0725563 B2 JPH0725563 B2 JP H0725563B2 JP 61166233 A JP61166233 A JP 61166233A JP 16623386 A JP16623386 A JP 16623386A JP H0725563 B2 JPH0725563 B2 JP H0725563B2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- combustion
- glass
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013307 optical fiber Substances 0.000 title claims description 15
- 239000000463 material Substances 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title claims description 12
- 239000007789 gas Substances 0.000 claims description 95
- 239000002994 raw material Substances 0.000 claims description 85
- 238000002485 combustion reaction Methods 0.000 claims description 28
- 239000011521 glass Substances 0.000 claims description 27
- 239000000567 combustion gas Substances 0.000 claims description 19
- 239000005373 porous glass Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000006460 hydrolysis reaction Methods 0.000 claims description 3
- 230000007062 hydrolysis Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 238000002716 delivery method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光フアイバ用母材の製造方法に関し、とくにVA
D法（気相軸付法）やOVPO法（外付気相酸化法）などの
スート生成法により光フアイバ用多孔質ガラス母材を製
造する方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a method for producing a base material for optical fibers, and in particular, VA
The present invention relates to a method for producing a porous glass preform for optical fibers by a soot forming method such as a D method (method with a vapor phase axis) or an OVPO method (external vapor phase oxidation method).
光フアイバ用多孔質ガラス母材を製造する一方法とし
て、燃焼バーナから燃焼ガスおよびガラス原料を混合噴
出し、火炎中での加水分解反応または酸化反応によりガ
ラス微粒子を生成し、このガラス微粒子を回転する出発
部材の先端に堆積させ、多孔質ガラス母材の成長に合わ
せて出発部材をバーナと相対的に移動することにより多
孔質ガラス母材を製造するVAD法がある。As a method of manufacturing a porous glass preform for optical fibers, a combustion gas and a glass raw material are mixed and ejected from a combustion burner, glass particles are generated by a hydrolysis reaction or an oxidation reaction in a flame, and the glass particles are rotated. There is a VAD method in which a porous glass base material is manufactured by depositing it on the tip of the starting material and moving the starting material relative to the burner as the porous glass base material grows.
また出発部材の外周部に、燃焼バーナにより形成される
火炎中で酸化反応により生成したガラス微粒子を堆積さ
せ、出発部材または燃焼バーナを１回以上トラバースす
ることにより多孔質ガラス母材を製造するOVPO法（たと
えば特開昭48-73522号公報）もある。OVPO that manufactures a porous glass preform by depositing glass particles produced by an oxidation reaction in a flame formed by a combustion burner on the outer periphery of the starting member and traversing the starting member or the combustion burner one or more times. There is also a method (for example, JP-A-48-73522).
従来VAD法では、燃焼バーナとして第３図a,bに示すよう
な同心円状多重管バーナが使用されており、中心ポート
から外周の数層のポートにわたつて原料ガスが流され
る。たとえば第２図ａに示す４重管バーナの場合には、
中心およびその外周の第２ポートから原料ガスを噴出さ
せる。原料は常温で液体となるものが用いられ、たとえ
ば第４図ａに示すような原料供給装置を用いて不活性ガ
スに飽和させて供給される。41はバーナ、42はキヤリア
ガス、43は液体原料容器、44は液体原料、45は原料加熱
装置を示す。また第４図ｂは他の原料供給装置の例で、
原料ガス自体の蒸気圧により、ガス状で燃焼バーナに原
料ガスが送られる。第４図ａと同じ符号は同じ部分を示
す。原料ガスは常温で液体であるため、原料供給装置か
ら燃焼バーナまでの配管は、原料ガスの飽和温度または
沸点温度以上に保温されるのが一般的である。この原料
ガス配管には、途中燃焼ガスとして、たとえばH2が混入
されることもあるが、この混合ガスの保温は行つていな
い。また、燃焼バーナの原料ガス噴出ポートの周囲に流
される燃焼ガスについても同様に加熱・保温を行つてい
ない。このため、原料ガスに混入されるガスまたは原料
ガス噴出ポートの周囲のポートに流される燃焼用のガス
により原料ガスの熱は奪われ、原料ガスの温度は低下す
る。したがつて従来は、原料ガスから奪われる熱量に相
当して低下した原料ガスの温度を、原料ガス供給時の温
度まで上げ原料ガスの供給温度を保持するため、配管保
温について配慮している。In the conventional VAD method, a concentric multi-tube burner as shown in FIGS. 3A and 3B is used as the combustion burner, and the raw material gas is flowed from the central port to several ports on the outer circumference. For example, in the case of the quadruple burner shown in Fig. 2a,
A source gas is ejected from the center and the second port on the outer periphery thereof. As the raw material, one that becomes liquid at room temperature is used, and is supplied after being saturated with an inert gas using a raw material supply device as shown in FIG. 4a, for example. 41 is a burner, 42 is carrier gas, 43 is a liquid raw material container, 44 is a liquid raw material, and 45 is a raw material heating device. Fig. 4b is an example of another raw material supply device,
Due to the vapor pressure of the raw material gas itself, the raw material gas is sent to the combustion burner in a gaseous state. The same symbols as in FIG. 4a indicate the same parts. Since the raw material gas is liquid at room temperature, the piping from the raw material supply device to the combustion burner is generally kept at the saturation temperature or the boiling point temperature of the raw material gas or higher. For example, H 2 may be mixed in the raw material gas pipe as an intermediate combustion gas, but the temperature of the mixed gas is not kept. Similarly, the combustion gas flowing around the raw material gas ejection port of the combustion burner is not heated or kept warm. For this reason, the heat of the raw material gas is taken by the gas mixed with the raw material gas or the combustion gas flowing in the port around the raw material gas ejection port, and the temperature of the raw material gas is lowered. Therefore, conventionally, in order to maintain the feed temperature of the raw material gas by raising the temperature of the raw material gas, which has dropped corresponding to the amount of heat taken from the raw material gas, to the temperature at the time of feeding the raw material gas, consideration is given to heat insulation of the pipes.
光フアイバ用母材の製造速度が高速化するに伴い、バー
ナに供給する原料ガスおよびその他の燃焼ガスなどの流
量が増加し、このため、原料ガスから奪われる熱量も増
加し、これに伴つて原料ガス配管の保温温度を上げる必
要がある。この原料ガス配管の保温温度を上げることに
より、配管を全体的に均一な温度に保温維持を制御する
ことは難かしくなり、設備上の障害が発生するようにな
つた。たとえば巻付け式のテープヒータなど使用した場
合には、ヒータの断線が発生し易くなる。また第３図ｂ
に例示したポート層の多い多重バーナにおいては、バー
ナ表面を加熱しても、この熱量は中心ポート部を流れる
原料ガスまで伝達されず、保温効果が小さく、原料ガス
が外周ポートから流れる混合ガスや燃焼ガスなどに奪わ
れる熱量のためにバーナ中で液化してしまうという問題
が発生した。原料ガスが液化すると、原料ガスが定常に
流れなくなり、光フアイバ用母材の成長が不安定とな
り、高品質な母材を製造することが困難となる。このた
め原料ガスを保温する有効な方法が必要となる。As the production speed of the base material for optical fibers increases, the flow rate of the raw material gas and other combustion gas supplied to the burner also increases, and the amount of heat taken from the raw material gas also increases. It is necessary to raise the heat retention temperature of the source gas pipe. By raising the heat retention temperature of the raw material gas pipe, it becomes difficult to control the heat retention and maintenance of the pipe to a uniform temperature as a whole, and a trouble occurs in the equipment. For example, when a winding type tape heater or the like is used, the breakage of the heater is likely to occur. Also, FIG. 3b
In the multi-burner with many port layers illustrated in Fig. 4, even if the burner surface is heated, this heat quantity is not transferred to the raw material gas flowing through the central port portion, the heat retention effect is small, and the mixed gas flowing from the outer peripheral port There was a problem of liquefaction in the burner due to the amount of heat taken by the combustion gas. When the source gas is liquefied, the source gas does not flow steadily, the growth of the optical fiber preform becomes unstable, and it becomes difficult to manufacture a high-quality preform. Therefore, an effective method for keeping the raw material gas warm is necessary.
本発明は従来の問題点を解決するため、ガラス原料の気
体を噴出するガラス原料噴出ポートおよびその外周に配
置された燃焼ガス噴出ポートを備えた燃焼バーナにおけ
る、前記ガラス原料噴出ポートから、気体のガラス原料
と場合によって燃焼ガスを噴出させ、その外周から燃焼
ガスを噴出し、ガラス原料を火炎加水分解することによ
り生成する粒状ガラスを、回転する出発部材または、心
棒の周囲に堆積させ、回転軸方向に成長させて、多孔質
ガラス母材を製造する光フアイバ用母材の製造方法にお
いて、気体のガラス原料と混合する燃焼ガスおよびその
外周に供給噴出する燃焼ガスのうち少くとも１つ以上の
ガスを加熱して流し、とくに加熱して流すガスの温度を
ガラス原料の飽和温度以上に設定することを特徴とす
る。The present invention, in order to solve the conventional problems, in a combustion burner provided with a glass raw material jet port for jetting a glass raw material gas and a combustion gas jet port arranged on the outer periphery thereof, from the glass raw material jet port, When the glass raw material and the combustion gas are ejected in some cases, and the combustion gas is ejected from the outer periphery of the glass raw material, the granular glass produced by flame hydrolysis of the glass raw material is deposited around the rotating starting member or the mandrel, and the rotating shaft In the method for producing a base material for optical fibers, which is made to grow in a direction to produce a porous glass base material, at least one of combustion gas mixed with a gaseous glass raw material and combustion gas supplied and jetted to the outer periphery thereof is It is characterized in that the gas is heated and flowed, and in particular, the temperature of the gas heated and flown is set to be equal to or higher than the saturation temperature of the glass raw material.
本発明は、ガラス原料噴出ポートから噴出するガラス原
料に混合するガスまたは外周に供給噴出する燃焼ガスの
温度を、ガラス原料の飽和温度以上に設定することによ
り、原料ガスの配管の温度を過大に設定する必要なく原
料ガスのバーナ内での液化を防止できる。以下図面にも
とづき実施例について説明する。The present invention sets the temperature of the gas mixed with the glass raw material jetted from the glass raw material jetting port or the temperature of the combustion gas supplied and jetted to the outer periphery to be equal to or higher than the saturation temperature of the glass raw material, thereby making the temperature of the raw material gas pipe excessive. Liquefaction of the source gas in the burner can be prevented without setting. Embodiments will be described below with reference to the drawings.
第１図は本発明の構成を説明する図で、燃焼バーナ１に
供給される原料ガス６は、原料供給装置４から保温され
た配管５を通つて燃焼バーナ１に供給される。一方、原
料ガス６と燃焼バーナ１の手前で混合される混合ガス７
および原料ガス噴出ポートの外周層に供給されるバーナ
原料ポートの周囲流入ガス（以下周囲流入ガスとい
う。）８は、ガス供給装置９からガス加熱装置10を通過
し、配管５中に存在する原料ガス６の飽和温度以上に加
熱され燃焼バーナ１に供給される。２は燃焼バーナ１に
より形成される火炎、３は製造される光フアイバ用母材
である。FIG. 1 is a diagram for explaining the configuration of the present invention. The raw material gas 6 supplied to the combustion burner 1 is supplied from the raw material supply device 4 to the combustion burner 1 through a pipe 5 kept warm. On the other hand, the raw gas 6 and the mixed gas 7 mixed before the combustion burner 1
And the ambient inflow gas (hereinafter referred to as the ambient inflow gas) 8 of the burner raw material port supplied to the outer peripheral layer of the raw material gas ejection port passes through the gas heating device 10 from the gas supply device 9 and the raw material existing in the pipe 5 is present. The gas 6 is heated to the saturation temperature or higher and supplied to the combustion burner 1. Reference numeral 2 is a flame formed by the combustion burner 1, and 3 is a base material for an optical fiber to be manufactured.
第２図は、本発明を説明する多重管の燃焼バーナの中心
部を模式的に示したもので、11は中心ポート、12は第２
ポート、13は第３ポートを示す。中心ポート11には原料
ガスにH2を混合したガスを、第２ポート12にはH2ガス
を、また第３ポート13にはArガスが周囲流入ガス８とし
て供給されている。原料ガスは飽和温度以上の温度T0に
保温して送られ、燃焼バーナの手前で温度T1（T1＜T0）
のH2ガスと混合することにより熱量を奪われ、温度はT2
（T1＜T2＜T0）まで下がる。さらに原料ガスは、中心ポ
ート11中を流れる間に、外周の第２ポート12を流れる温
度T3（T3＜T2）のH2ガスに熱を奪われることにより、温
度T4（T1＜T4＜T2＜T0）まで下がることになる。ここで
温度T4が原料ガスの飽和温度以下になる場合には、原料
ガスは中心ポート11内で液化してしまう。FIG. 2 schematically shows the central portion of a multi-tube combustion burner for explaining the present invention, where 11 is a central port and 12 is a second port.
Port 13 indicates the third port. A gas obtained by mixing the raw material gas with H 2 is supplied to the center port 11, H 2 gas is supplied to the second port 12, and Ar gas is supplied to the third port 13 as the ambient inflow gas 8. The source gas is sent while being kept at a temperature T 0 which is higher than the saturation temperature, and the temperature T 1 (T 1 <T 0 ) before the combustion burner.
Deprived of heat by mixing with the H 2 gas, the temperature T 2
It goes down to (T 1 <T 2 <T 0 ). Further, the source gas is deprived of heat by the H 2 gas having the temperature T 3 (T 3 <T 2 ) flowing through the second port 12 on the outer periphery while flowing through the central port 11, so that the temperature T 4 (T 1 It will decrease to <T 4 <T 2 <T 0 ). Here, when the temperature T 4 is equal to or lower than the saturation temperature of the raw material gas, the raw material gas is liquefied in the center port 11.
本発明の構成では、原料ガスと混合するガスの温度T1お
よび原料ガスを流す中心ポートの外周のポートを流れる
ガスの温度T3を、原料ガスの飽和温度以上に加熱保温す
るものである。すなわち、T1＜T4，T3＜T4の関係から、
原料ガスは常に飽和温度以上に保たれることになり、原
料ガスが燃焼バーナ内で液化するのを防止できる。また
本発明の構成により、原料ガスの配管の温度T0は原料ガ
スの飽和温度に保てば良いことになる。ここで第４図ｂ
に示すような原料ガス単体でバーナに送る場合には、原
料ガスの飽和温度は沸点ということになる。以下に本発
明の具体的実施例について、従来の比較例とともに述べ
る。In the configuration of the present invention, the temperature T 1 of the gas mixed with the raw material gas and the temperature T 3 of the gas flowing through the outer peripheral port of the raw material gas are kept at a temperature equal to or higher than the saturation temperature of the raw material gas. That is, from the relationship of T 1 <T 4 and T 3 <T 4 ,
Since the raw material gas is always kept at the saturation temperature or higher, it is possible to prevent the raw material gas from liquefying in the combustion burner. Further, with the configuration of the present invention, the temperature T 0 of the raw material gas pipe may be kept at the saturation temperature of the raw material gas. Fig. 4b
When the raw material gas alone is sent to the burner as shown in, the saturation temperature of the raw material gas is the boiling point. Specific examples of the present invention will be described below together with conventional comparative examples.
比較例： 第３図ｂに示す同心円状８重管バーナを使用し、原料ガ
スとしてSiCl4を用い、第４図ｂに示す直送方式にて原
料ガスの供給を行つた。原料ガスは燃焼バーナの中心ポ
ートのみに供給し、中心ポートの周囲に燃焼ガスとして
H2、助燃ガスとしてO2、燃焼調整用ガスとしてArガスを
流した。流量は、SiCl43.0/min,H446/min,O248/m
in,Ar14l/minとした。バーナまでのそれぞれのガス配管
の保温については、原料ガスは70℃に加熱し、その他の
ガスは室温のままとした。燃焼バーナの外側にはテープ
状ヒータを巻き、60℃に保温した。この結果、原料ガス
供給後、数10分で燃焼バーナにより形成された火炎に断
続的にゆらぎが生じ、さらに燃焼を続けたところ、その
後５〜６分後に原料が液状で燃焼バーナ出口から噴出し
出し、多孔質ガラス母材の製造を続けることはできなか
つた。なお原料のSiCl4の沸点は約57℃である。Comparative Example: Using the concentric octuple burner shown in FIG. 3b and using SiCl 4 as a raw material gas, the raw material gas was supplied by the direct delivery method shown in FIG. 4b. The raw material gas is supplied only to the center port of the combustion burner, and is used as combustion gas around the center port.
H 2 , O 2 as a combustion supporting gas, and Ar gas as a combustion adjusting gas were flown. Flow rate is SiCl 4 3.0 / min, H 4 46 / min, O 2 48 / m
in, Ar 14 l / min. Regarding the heat insulation of each gas pipe up to the burner, the source gas was heated to 70 ° C and the other gases were kept at room temperature. A tape-shaped heater was wound around the outside of the combustion burner to keep the temperature at 60 ° C. As a result, the flame formed by the combustion burner fluctuates intermittently within a few tens of minutes after the supply of the raw material gas, and when combustion continues, the raw material is liquefied 5 to 6 minutes later from the combustion burner outlet. However, it was impossible to continue the production of the porous glass preform. The boiling point of the raw material SiCl 4 is about 57 ° C.
実施例： 比較例と同様の構成において、H2,O2,Arガスのすべての
温度を60℃に保温し、光フアイバ用ガラス母材の製造を
行つた。この結果、原料のSiCl4の液化は見られず、き
わめて安定した火炎を実現することができた。この場
合、燃焼バーナ近くの原料配管の温度を60℃まで下げた
が、原料の液化は見られなかつた。この結果、良好な光
フアイバ用ガラス母材の製造を行うことができた。なお
本実施例においては、同心円状８重管バーナの例につい
て行つたが、バーナ構造はこれに限ることなく、原料を
ガス状態で送る場合にはすべてに適用することができ
る。また加熱するガスについても、本実施例では、すべ
てのガスについて加熱・保温を行つたが、必ずしもすべ
てのガスでなく、たとえば原料ガスへの混合ガス、また
は原料ガス外周の燃焼ガスのいずれかを加熱し、原料ガ
スを飽和温度以上に保持すればよく、この態様も本発明
に含まれる。Example: In the same configuration as the comparative example, all the temperatures of H 2 , O 2 and Ar gas were kept at 60 ° C., and a glass preform for optical fiber was manufactured. As a result, liquefaction of the raw material SiCl 4 was not observed, and an extremely stable flame could be realized. In this case, the temperature of the raw material pipe near the combustion burner was lowered to 60 ° C, but no liquefaction of the raw material was observed. As a result, a good glass preform for optical fibers could be manufactured. In the present embodiment, the example of the concentric circular double-tube burner has been described, but the burner structure is not limited to this, and can be applied to all cases in which the raw material is sent in a gas state. Also, for the gas to be heated, in the present embodiment, heating and heat retention were performed for all gases, but not all gases, for example, a mixed gas to the raw material gas, or a combustion gas around the raw material gas It suffices that the raw material gas is heated and maintained at the saturation temperature or higher, and this aspect is also included in the present invention.
以上述べたように、本発明によれば、原料ガスに混入す
るガスおよび原料ガスポートの外周に流す燃焼ガスのう
ち少くとも一つのガスを、原料ガスの飽和温度以上に加
熱・保温することにより原料ガスの液化を防ぎ、安定に
良好な光フアイバ用母材の製造を行うことができる。As described above, according to the present invention, at least one of the gases mixed in the raw material gas and the combustion gas flowing around the outer circumference of the raw material gas port is heated and kept at a temperature equal to or higher than the saturation temperature of the raw material gas. It is possible to prevent liquefaction of the raw material gas and stably produce a good preform for optical fibers.
第１図は本発明の構成を説明する図、 第２図は本発明を説明する模式図、 第３図a,bはVAD法を用いる燃焼バーナの例、 第４図a,bは従来の原料供給装置の例である。 １……燃焼バーナ ２……火炎 ３……光フアイバ用母材 ４……原料供給装置 ５……配管 ６……原料ガス ７……混合ガス ８……バーナ原料ポートの周囲流入ガス ９……ガス供給装置 10……ガス加熱装置 11……中心ポート 12……第２ポート 13……第３ポート 41……バーナ 42……キヤリアガス 43……液体原料容器 44……液体原料 45……原料加熱装置 FIG. 1 is a diagram for explaining the configuration of the present invention, FIG. 2 is a schematic diagram for explaining the present invention, FIGS. 3 a and b are examples of combustion burners using the VAD method, and FIGS. 4 a and b are conventional examples. It is an example of a raw material supply device. 1 ... Combustion burner 2 ... Flame 3 ... Optical fiber base material 4 ... Raw material supply device 5 ... Piping 6 ... Raw material gas 7 ... Mixed gas 8 ... Burner raw material port inflow gas 9 ... Gas supply device 10 …… Gas heating device 11 …… Center port 12 …… Second port 13 …… Third port 41 …… Burner 42 …… Carrier gas 43 …… Liquid material container 44 …… Liquid material 45 …… Material heating apparatus
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−260437（ＪＰ，Ａ) 特開 昭60−221334（ＪＰ，Ａ) 特開 昭61−151032（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-60-260437 (JP, A) JP-A-60-221334 (JP, A) JP-A-61-151032 (JP, A)
Claims (2)
出ポートおよびその外周に配置された燃焼ガス噴出ポー
トを備えた燃焼バーナにおける、前記ガラス原料噴出ポ
ートから、気体のガラス原料と場合によって燃焼ガスを
噴出させ、その外周から燃焼ガスを噴出し、ガラス原料
を火炎加水分解することにより生成する粒状ガラスを、
回転する出発部材または心棒の周囲に堆積させ、回転軸
方向に成長させて、多孔質ガラス母材を製造する光フア
イバ用母材の製造方法において、 気体のガラス原料と混合する燃焼ガスおよびその外周に
供給噴出する燃焼ガスのうち少くとも１つ以上のガスを
加熱して流す ことを特徴とする光フアイバ用母材の製造方法。1. A combustion burner having a glass raw material jetting port for jetting a glass raw material gas and a combustion gas jetting port arranged on the outer periphery of the glass raw material jetting port. To eject a combustion gas from the outer periphery of the glass, and to generate granular glass by flame hydrolysis of the glass raw material,
In a method of manufacturing a base material for optical fibers, which is deposited around a rotating starting member or a mandrel and is grown in a rotation axis direction to manufacture a porous glass base material, a combustion gas mixed with a gaseous glass raw material and its outer periphery. A method for producing a base material for an optical fiber, which comprises heating and flowing at least one of the combustion gases supplied and jetted to the substrate.
バーナのガラス原料噴出ポート内に存在するガラス原料
の飽和温度以上に設定することを特徴とする特許請求の
範囲第１項記載の光フアイバ用母材の製造方法。2. The temperature of the gas to be heated and flown is set to be equal to or higher than the saturation temperature of the glass raw material existing in the glass raw material ejection port of the combustion burner. Method for manufacturing base material for optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61166233A JPH0725563B2 (en) | 1986-07-15 | 1986-07-15 | Method for manufacturing base material for optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61166233A JPH0725563B2 (en) | 1986-07-15 | 1986-07-15 | Method for manufacturing base material for optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6321233A JPS6321233A (en) | 1988-01-28 |
| JPH0725563B2 true JPH0725563B2 (en) | 1995-03-22 |
Family
ID=15827578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61166233A Expired - Lifetime JPH0725563B2 (en) | 1986-07-15 | 1986-07-15 | Method for manufacturing base material for optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725563B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2944557B2 (en) * | 1997-02-27 | 1999-09-06 | 日本電気ソフトウェア株式会社 | Stripe pattern matching device |
| JP3241028B2 (en) | 1999-12-22 | 2001-12-25 | 日本電気株式会社 | Image capturing apparatus and image capturing method thereof |
| JP6236866B2 (en) * | 2013-05-15 | 2017-11-29 | 住友電気工業株式会社 | Method for producing glass fine particle deposit and burner for producing glass fine particle deposit |
| JP2017036172A (en) * | 2015-08-07 | 2017-02-16 | 株式会社フジクラ | Manufacturing method for optical fiber preform |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60260437A (en) * | 1984-06-08 | 1985-12-23 | Sumitomo Electric Ind Ltd | Manufacture of glass base material for optical fiber |
-
1986
- 1986-07-15 JP JP61166233A patent/JPH0725563B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6321233A (en) | 1988-01-28 |
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