JPH0727882B2 - Transport tray for cleaning equipment - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrying tray for a precision cleaning device for removing dust from small objects to be cleaned.

[Background of the Invention]

Conventionally, a conveying device for a disk-shaped constant shape such as a wafer is known from Japanese Patent Publication No. 56-49451, and as shown in FIG.
It is directly conveyed or processed by a conveyor or a chuck in a flat state. It is difficult to directly use an object having a shape other than a disk, such as a square plate, which is smaller than the wafer.

The transportation in the cleaning device is also the same, and the cleaning device for the wafer cannot be used for the precision cleaning and cleaning of the magnetic signal recording component, the crystal oscillator, and the like.

[Object of the Invention] The present invention has been made in order to solve the above-mentioned problems, and provides a transporting tray for a cleaning device, which can firmly and well clean the small object to be cleaned, and can drain the water sufficiently. .

[Outline of Invention]

The present invention provides a tray on which small items to be cleaned are placed, a brush scrubber process for flushing the placed items to be cleaned, a jet scrubber process for spraying water on the items to be cleaned, and a item to be cleaned. And a spin drying step of rotating the tray as it is placed, in the tray, a vacuum drawing hole penetrating vertically is formed in a portion where the object to be cleaned is placed, and a vacuum corresponding to a lower side of the tray is formed. Suction is applied to the draw hole side to suck and fix the object to be cleaned on the tray, and a positioning pin for the object to be cleaned is provided on the upper side of the tray so as to stand around the vacuum drawing hole. The liquid drainage holes are located near the (inner / outer) circumference of the tray, and a groove connecting the liquid drainage holes to each other is formed on the upper surface of the tray.

Example of Invention

FIG. 1 is a perspective view showing an embodiment of a cleaning device carrying tray 12 according to the present invention, in which a vacuum drawing hole 12a, a drain hole 12b, a positioning pin 12c are formed on a flat surface of a stainless disk. The cleaning target 9 is placed on the flat surface of the tray 12 in two radial rows at equal intervals. In the figure, two sets of four objects 9 to be cleaned are arranged on the radius, and two of them are shown in cross section, but other objects 9 to be cleaned are not shown. .

An embodiment in which a large number of objects to be cleaned 9 are continuously cleaned by using the tray 12 by means of a wet cleaning device composed of various cleaning devices and an electromagnetic wave irradiation type cleaning device.
It will be described with reference to the drawings.

FIG. 2 is a schematic plan view of the entire cleaning device using the cleaning device transport tray according to the present invention, a cleaning path for an object to be cleaned, and a cleaning air flow path, and FIG. 3 is shown in FIG. It is a plane layout drawing showing the composition inside a cleaning device.

This cleaning device 1 is a series of cleaning devices in which a loader 2, a wet ultrasonic cleaning device 3, a showering device 4, a scrubber device 5, an electromagnetic wave irradiation cleaning device 6, an inspection unit 7, an unloader 8 and the like are sequentially arranged in parallel. It is what you have done. The object to be cleaned 9 is the cleaning device 1
Processing is performed in a state in which the apparatus is always placed on the tray 12 according to the present invention while being cleaned through the above-mentioned respective devices 2, 3, 4, 5, 6, 7, 8 constituting the above. The cleaning object 9 on the tray 12 is sequentially transferred by the transfer device in the direction of arrow P in FIG. The clean air A flows in the direction of arrow Q, which is opposite to the moving direction of the object to be cleaned 9. In addition, clean air A is
Each of the devices 8,7,5,4 is made to sequentially flow by branching downward from vertically upward to the object 9 to be cleaned on the tray 12 in 7,5,4,3,2. Care has been taken to prevent dust generated from the cleaners 3, 3 and 2 from adhering to the object to be cleaned 9. Therefore, for example, dust generated in the showering device 4 is not brought into the scrubber device 5 in the next process. Further, the clean air A is gradually contaminated as it passes through the cleaning device 1, but as described above, the clean air A flows in the direction opposite to the moving direction of the cleaning object 9 on the tray 12, so that the cleaning object on the tray 12 is cleaned. However, on the side of each of the devices 2, 3, 4, 5, 7, 8 in the cleaning device 1, it comes into contact with fresh air, and the clean air A is used as a cleaning process route of the object to be cleaned 9. It is designed to be less susceptible to contamination than flowing in the same direction. The clean air A is not divided into the electromagnetic wave irradiation cleaning device 6, and the electromagnetic wave irradiation cleaning device 6 is separately provided.
The clean air B is sent exclusively to the tray.
The carbon dioxide gas and water vapor generated as a result of the oxidative decomposition of the dust of the organic matter attached to the object 9 to be cleaned on 12 by ozone and oxygen radicals are immediately discharged to the outside of the electromagnetic wave irradiation / cleaning device 6, and the dust is sent to the next step. It is designed not to be done.
Instead of the clean air B, oxygen gas may be sent to the electromagnetic wave irradiation type cleaning device 6, which has the function of promoting generation of ozone in the device 6.

Since each device 2,3,4,5,6,7,8 in the cleaning device 1 is arranged in a U shape as shown in FIG. 2, it is considered in comparison with the case where they are arranged in a straight line. If it is
Can be reduced to 2. Further, since the drive device and the piping portion of each of the devices 2, 3, 4, 5, 6, 7, 8 can be installed in the central portion R of the U-shape, the cleaning object 1 on the tray 12 can be cleaned. There is no fear of being disturbed by the drive unit and the piping section when monitoring or inspecting from the outer peripheral side of the vehicle, or when dealing with an accident.

Further, a space required for the auxiliary chambers 6a and 6h can be secured in the middle of the turning range of the turning arm 11.

As shown in FIG. 1, the object to be cleaned 9 is fed into the cleaning device 1 while being placed on a disc-shaped tray 12 made of stainless steel. As shown in FIG. 4, the trays 12 on which the objects to be cleaned 9 are placed are stacked in multiple stages on the rack 13 to be loaded into the loader 2
Sent to. Items 9 to be cleaned on the tray 12 are sequentially placed on the conveyor 2b via the lifting table 2a of the loader 2,
It is sent to the wet ultrasonic cleaning device 3.

The cleaning object 9 on the tray 12 is immersed in the water in the wet ultrasonic cleaning tank 3b by the pallet 3a from the transfer conveyor 2b. The position of the pallet 3a shown in FIG. 4 is the position in which the object 9 to be cleaned on the tray 12 is not immersed in the water in the wet ultrasonic cleaning tank 3b. A vibrator 3c is provided at the bottom of the cleaning tank 3b, and by vibrating the vibrator 3c to give ultrasonic vibration to the water 3d in the cleaning tank 3b,
Vibration energy is applied to dust on the surface of the object to be cleaned 9. The larger the dust is, the larger the vibration energy is applied, so that the larger dust is gradually released from the surface of the object to be cleaned.
Since large dust generally contains many inorganic substances, the wet ultrasonic cleaning device 3 can mainly remove the inorganic dust. By removing the dust of the inorganic substance, the dust of the organic substance covered with the inorganic substance can be exposed on the surface of the object to be cleaned 9.

The water 3d in the cleaning tank 3b is led to the tank 14 by overflowing, and is filtered from the tank 14 by the pump 15.
It is circulated so as to be supplied again to the cleaning tank 3b via 16.
The dust released in the water is filtered and removed by the filter 16.

When the cleaning in the cleaning tank 3b is completed, the pellet 3a is pulled up, and the tray 12 on which the object to be cleaned is placed is placed on the showering conveyor 4a in order to be sent to the showering device 4.

When the object 9 to be cleaned on the tray 12 moves on the showering conveyor 4a, it is sprayed by the spray nozzles 4b arranged above the showering conveyor 4a, so that the dust adhered in the cleaning tank 3b is removed. Removed if present.

In FIGS. 5 and 6, the tray on which the object to be cleaned is placed
12 is sent to the scrubber device by the showering conveyor 4a and the slider 4c.

The scrubber device 5 has a table 5a at the center thereof, and at the same time the pure water is sprayed from the rinse nozzle 5d to the object to be cleaned on the tray 12 placed on the table 5a, the brush scrubber 5b causes the object to be cleaned to be cleaned. Rubbing to remove organic and inorganic dust adhering to the surface. A comparison of the large dust adhered to the object 9 to be cleaned on the tray 12 by the wet ultrasonic cleaning device 3 shown in FIG. 4 has been already removed and adhered to the surface of the object 9 to be cleaned which has not been removed yet. The small inorganic dust particles are easily separated after passing through the showering device shown in FIG.
The effect of brushing by the brush scrubber 5 is enhanced.
Subsequently, water is jetted by the jet scrubber 5c arranged above 5a to remove the separated dusts of organic substances and inorganic substances from the surface of the object to be cleaned 9. Further, pure water is sprayed from the rinse nozzle 5d, the table 5a is rotated at high speed, and N ₂ gas is sprayed from the blow nozzle to dry the cleaning target 9 and the tray 12. The table 5a is provided with a vacuum drawing hole 12a for the transfer tray 12, and the object 9 to be cleaned is transferred to the tray 12 by depressurizing the vacuum drawing hole 12a.
At the same time, it is fixed to the table 5a by suction.

After the cleaning in the scrubber device 5 is completed, the suction is released by returning the depressurized state to the normal pressure, and the tray 12 on which the object 9 to be cleaned is placed is transferred to the next conveyor 17 by the slider 4c.

In FIG. 6 and FIG. 7, the cleaning object 9 on the tray 12 is transferred by the conveyor 17 and reaches the position of the rotating arm 11 and then is placed on the rotating arm 11 and then the rotating arm 11. The object to be cleaned 9 on the tray 12 due to the rotation of 11
Is sent to the front chamber 6a of the electromagnetic wave irradiation type cleaning device 6. Shutters 6b and 6c are provided at the entrance and the exit of the front chamber 6a, and the shutter 6 is provided only when the tray 12 on which the cleaning target 9 is placed passes.
b and 6c are designed to open. In the front chamber 6a, ozone and oxygen radicals generated in the main chamber 6d are absorbed by the scrubber device 5
It is provided to prevent inflow.

The rotating arm is further rotated, and the cleaning object 9 on the tray 12 is
Is placed on the table 6e in the main room 6d. Above the table 6e are several mercury lamps 6f and two infrared lamps 6g.
And are provided. When the mercury lamp 6f is energized, the air in the main chamber 6d is decomposed into ozone and oxygen radicals by the action of the ultraviolet rays emitted from the mercury lamp, and the organic substances adhered to the surface of the object to be cleaned 9 on the tray 12 in a thin film form. And decomposes organic matter into carbon dioxide and water vapor. As described above, since the inorganic dust is removed by the wet ultrasonic cleaning device 3, the showering device 4, and the scrubber device 5,
Since the organic dust covered with the inorganic dust is exposed, it is possible to effectively carry out this oxidative decomposition action. The wavelength of ultraviolet rays emitted from the mercury lamp 6f is 184.
Around 9 nm or 253.7 nm is effective. Also mercury lamp
By energizing the infrared lamp 6g as well as energizing 6f, it has the effect of promoting the oxidative decomposition of the organic matter on the surface of the article 9 to be cleaned on the tray 12 and evaporating the moisture remaining on the surface. The wash item 9 and the tray 12 can be dried. The cleaning object 9 on the tray 12 is sent from the main room 6d to the rear room 6h by the rotation of the rotating arm 18 after the dust of the organic matter is removed. The table 6e is provided so as to be movable up and down and rotatable.
It has a convenient structure for selecting the optimum position for the transportation by 18 and 18 and the ultraviolet irradiation by the mercury lamp 6f.

Shutters 6i and 6j are provided at the entrance and the exit of the rear chamber 6h, and the shutters 6i and 6j are designed to be opened only when the tray 12 on which the article to be cleaned 9 is placed passes. The rear chamber 6h is provided so that ozone and oxygen radicals generated in the main chamber 6d do not flow out to the inspection unit 7.

In FIG. 7 and FIG. 8, when the rotating arm 18 further rotates, the cleaning object 9 on the tray 12 is transferred onto the conveyor 7a in the inspection unit 7, and further the conveyor 7a.
Sent to table 7b. A microscope 7c and a camera 7d are provided above the table 7b, and the condition of the surface of the article 9 to be cleaned on the tray 12 placed on the table 7b is monitored by the camera 7d.
It is possible to take a picture with the display, display the result of the picture on the display 7e, and automatically evaluate the display result and feed it back to each device 2, 3, 4, 5, 6 in the previous process. There is. The table 7b is configured to be movable up and down and rotatable, so that the photographing position of the camera 7b is adjusted.

From the inspection unit 7, the transfer conveyor 7f sends the tray 12 on which the cleaning object 9 is placed to the unloader 8, and the rack 13
To load.

The clean air A is diverted from the vertically upper part to the lower part 9 of the cleaning object 9 on the tray 12, so that the dust generated from the cleaning devices 2, 3, 4, 5, 7, and 8 is generated. Is designed so as not to contaminate the object to be cleaned 9 on the tray 12, and flows through the entire cleaning device 1 more efficiently than the system in which the clean air A is individually sent to each device 2, 3, 4, 5, 7, 8. Is configured.

In this embodiment, as shown in FIG. 8, a fan 19 for feeding is provided on the unloader 8 side of the cleaning apparatus 1, and a fan 20 for discharging is provided on the loader 2 side as shown in FIG. is there.

Note that the tray 12 may be made of stainless steel, plastic, comb, or ceramic depending on the treatment process and conditions, and as shown in FIG. Groove 1 between the drain holes 12b
There is another embodiment in which 2d is connected.

〔The invention's effect〕

As described above, the present invention includes a tray on which small items to be cleaned are placed, a brush scrubber process for flushing the placed items to be cleaned, a jet scrubber process for injecting water on the items to be cleaned, A spin drying step of rotating the tray while the object to be cleaned is placed, wherein the tray is provided with a vacuum drawing hole penetrating in a vertical direction at a position where the object to be cleaned is mounted, Suction is applied to the vacuum suction hole side, which is the lower side, to suck and fix the object to be cleaned on the tray, and a positioning pin for the object to be cleaned is provided on the upper side of the tray so as to stand around the vacuum suction hole. Characterized in that a plurality of drain holes penetrating in the direction are arranged near the (inner / outer) circumference of the tray, and a groove for connecting the drain holes to each other is formed on the upper surface of the tray. Located on the carrier tray for the cleaning device.

This configuration has the following advantages.

(1). Since the object to be cleaned can be firmly fixed to the tray by the evacuation and positioning pins, the brush scrubber and the shet scrubber can be sufficiently cleaned and the position of the object to be cleaned does not shift.

(2). Similarly, it can be firmly fixed to the tray, so that high-speed spin drying can sufficiently remove water.

(3). Since the drain holes are connected so as to communicate with each other by the groove formed on the upper surface of the tray, draining is more frequently performed.

By carrying out the present invention, it becomes possible to continuously perform precision cleaning with the cleaning device similar to the cleaning device for the wafer while the small object 9 to be cleaned is placed on the tray 12.

[Brief description of drawings]

FIG. 1 is a perspective view of a cleaning device transport tray according to the present invention.
-A is a perspective view of another embodiment of the transport tray for the cleaning device,
FIG. 2 is a plan view showing an outline of the entire cleaning apparatus using the carrier tray for a cleaning apparatus according to the present invention and a view showing a cleaning route of an object to be cleaned and a flow path of cleaning air, and FIG. 3 is shown in FIG. The plane layout view of each device in the cleaning device shown in FIGS. 4 to 8 is a cross-sectional view of each device constituting the cleaning device shown in FIG. 2, and FIG. 9 is a perspective view of the transport unit in the conventional example. Is. 1 ... cleaning device, 2 ... loader, 3 ... wet ultrasonic cleaning device, 4 ... showering device, 5 ... scrubber device,
6 ... Electromagnetic wave irradiation type cleaning device, 7 ... Inspection unit, 8
…… Unloader, 9 …… Cleaning object, 12 …… Tray, 12a
...... Vacuum draw hole, 12b ...... Drain hole, 12c ...... Positioning pin,
12d …… Groove.

Claims (1)

[Claims] 1. A tray on which small objects to be cleaned are placed, a brush scrubber process for flushing the objects to be cleaned placed, a jet scrubber process for spraying water on the objects to be cleaned, and an object to be cleaned. A spin-drying step in which the tray is rotated while being placed, in the tray, a vacuum drawing hole penetrating in the vertical direction is formed in a portion where the object to be cleaned is placed, and the tray corresponds to the lower side of the tray. Suction is applied to the vacuum suction hole side to suction and fix the object to be cleaned to the tray, and a positioning pin for the object to be cleaned is provided on the upper side of the tray so as to stand around the vacuum suction hole and penetrate vertically. Conveyance for cleaning equipment characterized in that a plurality of drain holes are arranged near the (inner / outer) circumference of the tray, and a groove connecting the drain holes to each other is formed on the upper side surface of the tray. tray.