JPH0728539B2 - Electrostatic attraction plate that has an effective attraction area on the entire surface - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an improvement of an electrostatic attraction plate, and in particular, an attraction having an effective attraction area where the attraction force can be exerted even at the end of the attraction surface. Regarding the board.

[Prior Art] An electrostatic attraction plate is formed by sandwiching positive and negative electric layers in a sandwich shape with an attraction layer and an insulating layer. And so that both layers do not peel off, especially at the end, that is, the edge,
A belt line is provided which is composed of a blank area without an electrode layer.

[Problems to be Solved by the Invention] However, because of this belt line, no suction force is generated in this belt-like region, and therefore the end of the adsorbed material such as tracing paper is peeled off and sways in the wind. There are problems such as a so-called butterfly phenomenon and a peeling accident in which the entire object to be adsorbed comes off.

Therefore, an object of the present invention is to prevent and improve the above-mentioned inconvenience.

[Means for Solving the Problems] In order to achieve this object, the present invention relates to an electrostatic attraction plate having positive and negative electrode layers between an attraction layer and an insulating layer, and an electrode layer that generates an attraction force. Is extended to the end of the electrostatic attraction plate, and at least the end of the electrode layer is provided with a part of the electrode layer missing so as to prevent the attraction layer from separating from the insulating layer. The feature is that a plurality of blank small areas are provided.

Embodiments of the Invention Embodiments of the present invention will be described below with reference to the drawings.

1 to 3 show a first embodiment of the present invention, 1 is an electrostatic holding device, 2 is an adsorption layer, 4 is an insulating layer, and an electrode layer 6 serves as a positive electrode 6+ and a negative electrode 6− between these layers. Are provided adjacent to each other and alternately.

The attraction force 10 of the electrostatic attraction plate 8 may be generated only near the upper surface of the electrode layer 6 as indicated by an arrow in FIG.
Discovered by the inventor of this application.

Further, when the attracted object 12 such as tracing paper is attracted and held on the electrostatic attraction plate 8, it is necessary to prevent the accidental peeling of the attracted object 12 during the necessary time.

Then, this peeling accident occurs from the end portion of the object to be adsorbed 12. Therefore, as the performance of the electrostatic attraction plate 8, it is required to secure a strong attraction force especially in the end region.

Therefore, when forming the electrode layer 6, the electrode layer 6 is first extended to the vicinity of the edge of the adsorption surface area 14, that is, to the end 16.

A large number of blank small areas 20 are formed in the electrode layer 6 by cutting out a part of the electrode layer 6 especially along the outer end portion 18.

This is to prevent the physical attraction force from being lowered due to the electrode layer 6 being interposed between the adsorption layer 2 and the insulating layer 4, but the outer end portion 18 protruding as a part of the electrode layer 6 is prevented. This is also because the suction force is generated even at this end by leaving.

In FIG. 1, reference numeral 21 is a power supply circuit, 22 is a power supply unit,
24 is a changeover switch.

Further, FIG. 4 shows a second embodiment of the present invention, in which the positive electrode 6+ and the negative electrode 6− of the electrode layer 6 are arranged so as to be oriented in a direction intersecting with each other, and the electrodes are arranged along the outer end portion 18. A large number of circular blank small areas 20 are formed by omitting a part of the layer 6.

FIG. 5 shows a third embodiment, in which the positive electrode 6+ and the negative electrode 6− of the electrode layer 6 are alternately arranged so as to be oriented in the same direction, and one of the electrode layers 6 is formed along the outer end portion 18. Part missing and end
A large number of blank small areas 20 opening to the 16 side are formed.

FIG. 6 shows a fourth embodiment, in which both side surfaces in the longitudinal direction of the positive electrode 6+ and the negative electrode 6− of the electrode layer 6 are formed in a concavo-convex shape and are oriented alternately in the same direction, Outer edge
A large number of concavo-convex blank small areas 20 are formed by cutting off a part of the electrode layer 6 along 18.

[Advantages of the Invention] Since the present invention is configured as described above, it is possible to generate a suction force on the entire suction surface, and in particular, there is no conventional suction force and a trigger that causes a peeling accident. It is possible to prevent the butterfly phenomenon, which is caused by the fluttering and the edges fluctuating in the wind, which lowers the work efficiency. In addition, the presence of the blank small area enables the adsorption layer and the insulating layer to be adhered to each other without inclusions, and thus has a remarkable effect that there is no inconvenience of causing a delamination accident between the layers.

[Brief description of drawings]

The drawings show an embodiment of the present invention, and FIG. 1 is a perspective view showing the structure of a suction plate. 2 and 3 show a first embodiment of the present invention, FIG. 2 is a partial plan view of the first embodiment, and FIG. 3 is a sectional side view. Figures 4, 5 and 6 show figures 2, 3 and 4, respectively.
It is a partial top view which shows an Example. (Explanation of reference numerals) In the drawing, 2 is an adsorption layer, 4 is an insulating layer, 6 is an electrode layer, and 6
+ Is a positive electrode, 6- is a negative electrode, 8 is an electrostatic attraction plate, 12 is an object to be attracted, 14 is an attraction surface area, 16 is an end portion, and 20 is a blank small area.

Claims (1)

[Claims] 1. An electrostatic chucking plate having positive and negative electrode layers between a chucking layer and an insulating layer, wherein the electrode layer generating a chucking force is extended to the end of the electrostatic chucking plate, and this electrode is also provided. At least at an end of the layer, a plurality of blank small areas are provided by cutting off a part of the electrode layer to prevent the electrode layer from intervening in order to prevent the adsorption layer and the insulating layer from being separated from each other. An adsorption plate that has an adsorption area on almost the entire surface.