JPH0731260B2 - Horizontal movement device - Google Patents

Description

The present invention relates to the movement of a reticle used in a semiconductor device, an exposure apparatus for manufacturing a printed circuit board and the like, movement of a sample table in an optical microscope or a transmission electron microscope, and various other measuring machines. The present invention relates to a horizontal movement device for precision equipment such as movement of a.

[Prior Art] FIG. 3 is a diagram schematically showing a lens barrel portion for pattern projection in an exposure apparatus for manufacturing a printed circuit board. Also,
FIG. 4 (a) is a plan view showing details of a reticle horizontal moving device in the exposure apparatus for manufacturing the printed circuit board of FIG. 3, and FIG. 4 (b) is a side view of FIG. 4 (a).

In FIG. 4, reference numeral 1 is a base, on which a movable base 2 and a reticle 5 are mounted on the movable base 2,
If only the “self-weight” of the reticle 5 and the moving table 2 is used, the moving table 2 may jump upward with respect to the base 1 due to external vibration or vibration of the apparatus itself, and as a result, the moving table 2 may move upward. Due to the positional deviation, a problem such as "out of focus" occurs. Therefore, the leaf spring 6 holds down the movable table 2.

The drive mechanism 3 of the moving base 2 is composed of, for example, a bearing 7 and a drive screw 8, and the movement transmitting body 4 is, for example, a shaft portion 9 for sliding the bearing 7, a pressing portion 10, and a single-acting body 4b such as a ball or a roller. The drive mechanism 3 is provided in two directions, the X-axis direction and the Y-axis direction, and the roller 13 pressed by the spring 12 is provided as the cushion mechanism 11, so that the X-axis direction, the Y-axis direction, and the spring 12 are provided. Depending on the elasticity of, horizontal movement and positioning are performed. Incidentally, 14 is a spring holding member.

Further, FIG. 5 is an explanatory view of a main part of a horizontal sample moving device in a transmission electron microscope, and 21 is a base.
The upper movable table 22 is pressed against the base table 21 by a coil spring 23. A lubricant 24 made of, for example, a Teflon-based hard resin plate is provided between the base 21 and the movable table 22 to improve sliding. Incidentally, 25 is a sample cylinder.

[Problems to be Solved by the Invention] In the conventional horizontal moving device as described above, various springs are used to press the moving base. Therefore, for example, in the case of a leaf spring, the sliding friction force is large, and the coil spring In this case, the force due to the lateral deflection of the spring varies depending on the position, so that there is a problem that precise movement cannot be performed smoothly.

The present invention has been made to solve the above-mentioned conventional problems, and provides a horizontal movement device which can reduce the frictional resistance at the time of movement in a movement mechanism having a relatively small movement amount and can move with high accuracy. The purpose is to

[Means for Solving the Problems] In order to achieve the above object, the horizontal moving device of the present invention includes a base, a moving base that moves on the base, and a drive mechanism provided on the base. And a cushion mechanism, and a movement transmission body disposed between the drive mechanism and the moving base, and the moving base and the movement transmission body are directly or via a bush fixed to each side surface. At least one of a set having a configuration in which a driving force is transmitted by the arranged rolling element, and further comprising a movable base in contact with the rolling element, a drive mechanism, and each surface of an element selected from a pair of bushes. By tilting the opposing surfaces of the set parallel to each other and inclining to each other, when the drive mechanism pushes the movement transmitting body toward the moving base, the moving mechanism always works in the direction of gravity in cooperation with the cushioning action of the cushion mechanism. It is configured to apply a pressing force.

[Operation] With the above configuration, the frictional resistance at the time of movement becomes small, and the movement base does not jump upward even with respect to external or internal vibration, and horizontal movement can be performed with high accuracy.

[Embodiment] FIG. 1 is a view showing a main part of an embodiment of a horizontal moving device of the present invention. In FIG. 1, the horizontal moving mechanism includes a base 1, a moving base 2 sliding on the base 1, a driving mechanism 3 provided on the base 1, the moving base 2 and the driving mechanism 3.
And a movement transmission body 4 arranged between and. Then, the facing surfaces 2a and 4a of the moving table 2 and the movement transmitting body "are moved by the movement transmitting body 4 by a driving mechanism (not shown).
When is pushed in the direction of the movable table 2, in cooperation with the cushioning action of the cushion mechanism, the inclined surfaces are formed in parallel with each other so that a component force for constantly pressing the movable table 2 in the gravity direction (downward) is generated. The rolling element 4b is arranged between the facing surfaces 2a-4a. A more detailed description is as follows. The rolling element 4b is held by the rolling element holding rail 15, and contacts the bush 16 fixed to the moving base 2 and the bush 17 fixed to the side surface 4a of the movement transmitting body 4. The bushes 16 and 17 themselves are made of, for example, hard steel that does not lose the hardness of the balls of the rolling elements 4b, and the combination of the balls and the holding of the balls and the bushes 16 and 17 itself is also used as a conventional technique. However, as described above, the facing surfaces 2a, 4 are
Since a is slanted, the surfaces of the bushes 16 and 17 are also parallel to each other and slanted in the direction of gravity. When the ball is pushed in the horizontal direction, the bushes 16 and 17 are moved in the direction of gravity depending on the angle of inclination α °. A force of the size of is added. If both or one of the surfaces 2a and 4a is made of hard steel, the bush may be unnecessary.

Further, FIG. 2 is a view showing a main part of a horizontal moving device showing another embodiment of the present invention, and the same reference numerals as those in FIG. 1 indicate the same or corresponding parts.

In FIG. 2, the facing surfaces 2a, 4a are not parallel to the direction of gravity, but the facing surfaces 16a-17a of the bush are both parallel and inclined with respect to the direction of gravity. In this way, if the facing surfaces in contact with the rolling elements 4b are parallel and inclined with respect to the direction of gravity, the same effect as the device of FIG. 1 can be obtained. That is, as a combination of the facing surfaces which are in contact with the rolling element 4b, four sets of surfaces 2a and 4a, surfaces 2a and 17a, surfaces 16a and 4a, and surfaces 16a and 17a can be representatively exemplified.

In addition, in the apparatus shown in FIG.
When (see FIG. 4) is in the horizontal plane and the left and right steel properties are insufficient, it is preferable to use a linear movement element such as a cross roller guide instead of the shaft portion 9.

As described above, in the present invention, the rolling element 0 (ball or roller) inserted between the moving table and the movement transmitting body without using the leaf spring or the coil spring from above the pressing the moving table.
The contact surface to each of them is an inclined surface that generates a force that presses the moving body in the direction of gravity.

[Effects of the Invention] As described above, according to the present invention, the frictional resistance during movement is reduced, and further, even if external vibration or vibration of the device itself does not cause the moving table to jump upward, a highly accurate horizontal movement is achieved. It becomes a moving mechanism. Therefore, the amount of movement is relatively small,
It is possible to provide the one suitable for the horizontal movement mechanism for the above-mentioned application which requires high accuracy.

[Brief description of drawings]

FIG. 1 is a view showing a main part of an embodiment of a horizontal moving device of the present invention, FIG. 2 is a view showing a main part of a horizontal moving device of another embodiment of the present invention, and FIG. 3 is a print. FIG. 4 is a diagram showing an outline of a lens barrel portion for pattern projection in an exposure apparatus for manufacturing a substrate, and FIG. 4A is a plan view showing details of a horizontal moving device for a reticle in the exposure apparatus for manufacturing a printed circuit board shown in FIG. FIG. 5B is a side view of FIG.
The figure is an explanatory view of a main part of a horizontal moving device for a sample in a transmission electron microscope. In the figure. 1: Base, 2: Moving stand 3: Drive mechanism, 4: Movement transmission body 4b: Rolling body, 16, 17: Bush

Claims (1)

[Claims] 1. A base and a moving base that moves on the base.
A drive mechanism and a cushion mechanism provided on the base,
A rolling element comprising a movement transmitting body arranged between the drive mechanism and the moving base, and the moving base and the movement transmitting body are arranged directly or via a bush fixed to each side surface. And a structure in which the driving force is transmitted by means of, and further, a pair of facing surfaces, each of which is composed of a movable base in contact with the rolling element, a driving mechanism, and each surface of an element selected from a pair of bushes, are mutually opposed. By arranging them in parallel and tilting, when the drive mechanism pushes the movement transmitting body toward the moving base, the pushing force in the direction of gravity is always applied to the moving base in cooperation with the cushion action of the cushion mechanism. Horizontal movement device.