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JPH0731830B2 - Magneto-optical recording medium - Google Patents
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JPH0731830B2 - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH0731830B2
JPH0731830B2 JP60178078A JP17807885A JPH0731830B2 JP H0731830 B2 JPH0731830 B2 JP H0731830B2 JP 60178078 A JP60178078 A JP 60178078A JP 17807885 A JP17807885 A JP 17807885A JP H0731830 B2 JPH0731830 B2 JP H0731830B2
Authority
JP
Japan
Prior art keywords
magneto
alloy
recording medium
magnetic material
optical recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60178078A
Other languages
Japanese (ja)
Other versions
JPS6238543A (en
Inventor
忠夫 徳島
真 白木
五月 長山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Corp
Original Assignee
Yamaha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Corp filed Critical Yamaha Corp
Priority to JP60178078A priority Critical patent/JPH0731830B2/en
Publication of JPS6238543A publication Critical patent/JPS6238543A/en
Publication of JPH0731830B2 publication Critical patent/JPH0731830B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 産業上の利用分野 この発明は高密度記録可能な光磁気記録媒体に関し、特
にアルミニウムもしくはアルミニウム合金基板の陽極酸
化皮膜の微細孔中に磁性材を充填した光磁気記録媒体に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium capable of high density recording, and more particularly to a magneto-optical recording medium in which a magnetic material is filled in fine pores of an anodized film of an aluminum or aluminum alloy substrate. It is about.

従来の技術 近年に至り、磁気的カー効果を利用した光磁気記録方式
が開発されるようになった。この光磁気記録方式は、記
録時にはレーザ光等の光を磁性体表面に局部的に照射し
てその部分を磁性体のキュリー温度以上の温度に加熱す
ることによって信号の書込みを行ない、信号再生時には
レーザ光などの特定の偏光角の光束を磁性体表面に照射
して、磁気的カー効果による反射光の偏向面の回転角度
(偏光角度)を検出することにより磁気記録を読出すも
のである。
2. Description of the Related Art In recent years, a magneto-optical recording method utilizing the magnetic Kerr effect has been developed. In this magneto-optical recording method, a signal such as a laser beam is locally irradiated onto the surface of the magnetic material at the time of recording and the portion is heated to a temperature higher than the Curie temperature of the magnetic material to write a signal. The magnetic recording is read by irradiating the surface of the magnetic material with a light flux having a specific polarization angle such as a laser beam and detecting the rotation angle (polarization angle) of the deflection surface of the reflected light due to the magnetic Kerr effect.

このような光磁気記録方式に使用される記録媒体として
は、特に高密度記録が可能なものとして、既に特開昭59
−72663号公報に記載の光磁気記録媒体が提案されてい
る。この提案の記録媒体は、第6図に示すようにアルミ
ニウムもしくはアルミニウム合金からなる基板1の表面
に多孔質陽極酸化皮膜2に形成し、その陽極酸化皮膜2
の各微細孔3中に純鉄等の磁性材4を電解析出により充
填した構造とされている。このような構造の記録媒体
は、もともと高密度磁気記録可能な垂直磁気記録媒体と
して開発されたものであるが、光磁気記録方式にも好適
に使用されるものであることが前記提案によって明らか
にされている。すなわちこのような構造の記録媒体を光
磁気記録方式に使用する際には、予め各微細孔3中の磁
性材4を膜面に垂直な方向に磁化させておくことになる
が、この場合微細孔3中に充填された磁性材4は膜面に
垂直な方向に異方性を有するため垂直方向に充分に磁化
され、しかもこの場合垂直方向に磁化された磁性材4の
端面に照射した光の反射光の磁気的カー効果による偏光
角度が大きくなるため、信号読出しも容易となるとされ
ている。
As a recording medium used in such a magneto-optical recording system, particularly one capable of high density recording has already been disclosed.
A magneto-optical recording medium described in Japanese Patent Publication No.-72663 has been proposed. The recording medium of this proposal has a porous anodic oxide film 2 formed on the surface of a substrate 1 made of aluminum or an aluminum alloy as shown in FIG.
The magnetic material 4 such as pure iron is filled in each of the micropores 3 by electrolytic deposition. Although the recording medium having such a structure was originally developed as a perpendicular magnetic recording medium capable of high-density magnetic recording, it is apparent from the above proposal that the recording medium is also suitable for use in a magneto-optical recording system. Has been done. That is, when the recording medium having such a structure is used in the magneto-optical recording method, the magnetic material 4 in each fine hole 3 is magnetized in the direction perpendicular to the film surface in advance. Since the magnetic material 4 filled in the holes 3 has anisotropy in the direction perpendicular to the film surface, it is sufficiently magnetized in the vertical direction, and in this case, the light radiated to the end surface of the magnetic material 4 magnetized in the vertical direction is irradiated. Since the polarization angle of the reflected light due to the magnetic Kerr effect becomes large, it is said that the signal reading becomes easy.

発明が解決すべき問題点 前述のように多孔質陽極酸化皮膜の微細孔に磁性材を充
填してなる光磁気記録媒体自体は既に提案されている
が、本発明者等の研究によれば、これを実際に適用した
場合、次のような問題があることが判明した。
Problems to be Solved by the Invention As described above, the magneto-optical recording medium itself in which the micropores of the porous anodic oxide film are filled with a magnetic material has already been proposed. When this was actually applied, the following problems were found.

すなわちこの種の光磁気記録媒体においては、信号の書
込み時には微細孔中に充填された磁性材にレーザ光を照
射してその磁性材のキュリー温度(Tc)以上の温度に加
熱しなければならない。しかるに前記提案において実施
例として記載されているCo(コバルト)のキュリー温度
は1120℃と著しく高く、またFe(鉄)のキュリー温度も
770℃と相当に高いが、汎用の書込み用光源として使用
されることが予想される簡単かつ安価な半導体レーザで
はパワー不足であって、上記各キュリー温度以上の高温
に昇温させることは困難であり、したがって特殊かつ高
価なレーザ光源を用いざるを得ない問題がある。また陽
極酸化皮膜は400℃程度以上の高温に加熱した場合、ク
ラックが生じてしまい、そのため光磁気記録媒体として
実用に供し得なくなる問題もある。なおNi(ニッケル)
のキュリー温度は358℃とかなり低いが、Niの場合は照
射光に対する磁気的カー効果による偏光角(以下これを
カー回転角と記す)θkが0.17゜に過ぎず、Feの場合の
θk=1.1゜や、Coの場合のθk=0.9゜と比較して著し
く小さく、そのためNi単独で使用することは困難であ
る。
That is, in this type of magneto-optical recording medium, when writing a signal, the magnetic material filled in the fine holes must be irradiated with laser light to be heated to a temperature above the Curie temperature (Tc) of the magnetic material. However, the Curie temperature of Co (cobalt) described as an example in the above proposal is extremely high at 1120 ° C, and the Curie temperature of Fe (iron) is also high.
Although it is considerably high at 770 ° C, the power is insufficient for a simple and inexpensive semiconductor laser that is expected to be used as a general-purpose writing light source, and it is difficult to raise it to a temperature higher than the above Curie temperature. Therefore, there is a problem that a special and expensive laser light source must be used. Further, when the anodic oxide film is heated to a high temperature of about 400 ° C. or higher, cracks are generated, which causes a problem that it cannot be put to practical use as a magneto-optical recording medium. Ni (nickel)
Has a Curie temperature of 358 ° C, which is quite low in the case of Ni, but the polarization angle (hereinafter referred to as Kerr rotation angle) θk due to the magnetic Kerr effect with respect to the irradiation light is only 0.17 °, and that of Fe is θk = 1.1. , Or θk = 0.9 ° in the case of Co, it is extremely small, and therefore it is difficult to use Ni alone.

この発明は以上の事情を背景としてなされたものであっ
て、半導体レーザの如き低出力のレーザ光源によっても
信号の書込みが可能となるように、しかも高温加熱より
陽極酸化皮膜にクラックが生じたりしないように、多孔
質陽極酸化皮膜の微細孔に充填された磁性材のキュリー
温度(Tc)を低下させること、具体的にはキュリー温度
を最高でも400℃以下、望ましくは200℃以下にまで低下
させた光磁気記録媒体を提供することを目的とするもの
である。なおここで微細孔中の磁性材の飽和磁束密度Bs
を低下させることは光磁気記録媒体として好ましくな
く、したがってBsを低下させずにキュリー温度を引下げ
ることが必要である。
The present invention has been made in view of the above circumstances, and it is possible to write a signal even with a low-power laser light source such as a semiconductor laser, and cracks do not occur in the anodized film due to high temperature heating. As described above, the Curie temperature (Tc) of the magnetic material filled in the micropores of the porous anodic oxide film is lowered, specifically, the Curie temperature is lowered to 400 ° C or lower, preferably 200 ° C or lower. Another object of the present invention is to provide a magneto-optical recording medium. Here, the saturation magnetic flux density Bs of the magnetic material in the micropores is
It is not preferable for the magneto-optical recording medium to lower the B.sub.2, and therefore it is necessary to lower the Curie temperature without lowering Bs.

問題点を解決するための手段 本発明者等は、前述のようにアルミニウムもしくはアル
ミニウム合金の多孔質陽極酸化皮膜の微細孔中に磁性材
を充填した型式の光磁気記録媒体において飽和磁束密度
Bsを低下させることなくキュリー温度Tcを下げる手法に
ついて種々検討を重ねた結果、先ず基本的には微細孔中
の磁性材の体積(寸法)を小さくするべく、微細孔の孔
径を小さくすること、特に18nm以下とすることがキュリ
ー温度の低下に有効であることを見出した。また第2に
は、微細孔中に充填する磁性材として、Feを主成分とし
それにNi、Cr、Mn、Cu、Be、As、Re、Ru、Osのうちから
選ばれた1種または2種以上を添加した合金を用いるこ
とも、キュリー温度の低下に有効であることを見出し
た。
Means for Solving the Problems The present inventors have found that the saturation magnetic flux density in a magneto-optical recording medium of the type in which a magnetic material is filled in the fine pores of a porous anodic oxide coating of aluminum or aluminum alloy as described above.
As a result of various studies on a method of lowering the Curie temperature Tc without lowering Bs, basically, to reduce the volume (dimension) of the magnetic material in the micropores, the pore diameter of the micropores should be reduced. In particular, it has been found that the thickness of 18 nm or less is effective for lowering the Curie temperature. Secondly, as a magnetic material to be filled in the micropores, Fe is a main component and one or two selected from Ni, Cr, Mn, Cu, Be, As, Re, Ru, and Os. It was also found that the use of an alloy containing the above is also effective in lowering the Curie temperature.

したがってこの発明は、基本的には、アルミニウムもし
くはアルミニウム合金からなる基板の表面に多孔質陽極
酸化皮膜が形成され、かつその多孔質陽極酸化皮膜の微
細孔中に磁性材が充填されてなる光磁気記録媒体におい
て、前記微細孔の直径が18〜6nmとされていることを特
徴とするものである。
Therefore, the present invention is basically a magneto-optical method in which a porous anodic oxide film is formed on the surface of a substrate made of aluminum or an aluminum alloy, and the magnetic material is filled in the fine pores of the porous anodic oxide film. In the recording medium, the diameter of the fine holes is 18 to 6 nm.

またこの発明の光磁気記録媒体は、前記微細孔中に充填
される磁性材として、Ni(ニッケル)、Cr(クロム)、
Mn(マンガン)、Cu(銅)、Be(ベリリウム)、As(ヒ
素)、Re(レニウム、)、Ru(ルテニウム)、Os(オス
ミウム)のうちから選ばれた1種または2種以上を50原
子%以下含有し、残部が実質的にFe(鉄)からなる合金
を用いたものである。
Further, the magneto-optical recording medium of the present invention, Ni (nickel), Cr (chromium), as a magnetic material filled in the fine pores,
50 atoms of one or more selected from Mn (manganese), Cu (copper), Be (beryllium), As (arsenic), Re (rhenium), Ru (ruthenium), Os (osmium) % Or less, with the balance being substantially Fe (iron).

作用 この発明の光磁気記録媒体においては、アルミニウムも
しくはアルミニウム合金からなる基板の表面の多孔質陽
極酸化皮膜の孔径(ポア径)を18〜6nmとする。通常の
多孔質陽極酸化皮膜のポア径は100〜200nm程度であって
小さくてもせいぜい数十nm程度であるから、この発明の
場合は一般的な多孔質陽極酸化皮膜のポア径よりも著し
く小さくする。このようにポア径を小さくすることによ
ってその微細孔中に充填される磁性材の寸法も著しく小
さくなる。すなわち磁性材が著しく微粒子化されたと同
じ効果がもたらされ、これによって磁性材は超常磁性
(スーパーパラ)に近い状態となり、そのため常磁性的
な挙動を示し、保磁力Hcが減少するとともにキュリー温
度Tcが低下する。このようにキュリー温度が低下するこ
とは、信号書込み時においてレーザー光照射により到達
させるべき温度が低下することを意味し、したがって書
込みのためのレーザ光源として汎用の半導体レーザの如
き低出力のものを使用することが可能となる。また書込
み時のレーザによる加熱温度が低くなるため、陽極酸化
皮膜にクラックが生じるおそれもなくなる。
Function In the magneto-optical recording medium of the present invention, the pore diameter (pore diameter) of the porous anodic oxide film on the surface of the substrate made of aluminum or aluminum alloy is set to 18 to 6 nm. The pore diameter of a normal porous anodic oxide film is about 100 to 200 nm, and even if it is small, it is about several tens of nm at most, so in the case of this invention, it is significantly smaller than the pore diameter of a general porous anodic oxide film. To do. By reducing the pore diameter in this way, the size of the magnetic material filled in the fine pores is significantly reduced. That is, the same effect as when the magnetic material is remarkably pulverized is brought about, whereby the magnetic material becomes in a state close to superparamagnetism (super para), so that it exhibits paramagnetic behavior, the coercive force Hc decreases, and the Curie temperature decreases. Tc decreases. Such a decrease in Curie temperature means a decrease in temperature to be reached by laser light irradiation during signal writing, and therefore, a low output laser light source such as a general-purpose semiconductor laser is used as a laser light source for writing. Can be used. In addition, since the heating temperature by the laser at the time of writing becomes low, there is no possibility of cracks in the anodized film.

例えば本発明者等が多孔質陽極酸化皮膜の微細孔に充填
する磁性材としてFe、Niを用いてその微細孔の孔径を種
々変化させた場合の孔径(ポア径)とキュリー温度Tc、
保磁力Hcとの関係を調べたところ、第1図、第2図に示
す結果が得られた。第1図から明らかなように、特にFe
の場合ポア径を18nm以下とすることによって400℃程度
までキュリー温度Tcが低下することが判る。なおここで
Niもポア径18nm以下でキュリー温度Tcが低下し、しかも
全体としてFeの場合よりキュリー温度が低いが、既に述
べたようにNiはカー回転角θkが小さく、したがってNi
を単独で使用することは好ましくない。なおまた、ポア
径が6nm未満では、キュリー温度が低下し過ぎて室温で
も記録が消失してしまうおそれがあるから、ポア径の下
限は6nmとした。
For example, the present inventors have used Fe, Ni as the magnetic material to fill the micropores of the porous anodic oxide film, and the pore diameter (pore diameter) and Curie temperature Tc when variously changing the pore diameter of the micropores.
When the relationship with the coercive force Hc was investigated, the results shown in FIGS. 1 and 2 were obtained. As is clear from FIG. 1, especially Fe
In the case of, the Curie temperature Tc decreases to about 400 ° C by setting the pore diameter to 18 nm or less. Here
Ni also has a lower Curie temperature Tc when the pore diameter is 18 nm or less, and the Curie temperature is lower than that of Fe as a whole. However, Ni has a small Kerr rotation angle θk, as described above,
It is not preferred to use alone. If the pore diameter is less than 6 nm, the Curie temperature may be excessively lowered and the recording may be lost even at room temperature. Therefore, the lower limit of the pore diameter was set to 6 nm.

さらにこの発明の光磁気記録媒体においては、前述のよ
うにポア径を18nm以下、6nm以上にするに加えて、微細
孔に充填する磁性材として、Feを主成分としこれにNi、
Cr、Mn、Cu、Be、As、Re、Ru、Osのうちから選ばれた1
種または2種以上を添加した合金を用いれば、より一層
キュリー温度Tcを低下させることができる。すなわち、
Ni以下の添加元素はFeよりも磁性が弱いかまたは非磁性
の金属元素であるが、これらを強磁性材であるFeに添加
して希釈することにより、キュリー温度をFe単体の場合
よりも格段に低下させることができるのである。
Further, in the magneto-optical recording medium of the present invention, in addition to the pore diameter of 18 nm or less, 6 nm or more as described above, as a magnetic material to fill the micropores, Fe as a main component and Ni,
1 selected from Cr, Mn, Cu, Be, As, Re, Ru, Os
The Curie temperature Tc can be further reduced by using one kind or an alloy containing two or more kinds. That is,
The additive elements below Ni are metallic elements that are weaker in magnetism or non-magnetic than Fe, but by adding these to Fe, which is a ferromagnetic material, and diluting them, the Curie temperature is much higher than in the case of Fe alone. Can be reduced to.

このような現象は次のように説明される。すなわちキュ
リー温度は、磁性体金属の磁性を定める電子スピンを保
持し得る限界温度を意味するものであるが、他の非磁性
金属元素や磁性の弱い金属元素の外殻電子が混じれば、
スピンを持つ限界温度が低下し、かつその非磁性金属元
素や磁性の弱い金属元素の混じる割合が大きくなれば、
磁性をもたらすスピンを保ち得る限界温度が一層低下す
るのである。
Such a phenomenon is explained as follows. That is, the Curie temperature means a limit temperature at which an electron spin that determines the magnetism of a magnetic metal can be held, but if other non-magnetic metal elements or outer-shell electrons of a weakly magnetic metal element are mixed,
If the critical temperature for having a spin decreases and the mixing ratio of the non-magnetic metal element or the metal element with weak magnetism increases,
The limit temperature at which the spin that brings about magnetism can be maintained is further lowered.

前述のようにFeを主体とし、これに他の希釈材としての
Ni等の元素を添加した磁性材を使用する場合、そのFeと
他の希釈材元素との配合比は、原子%でFeを50%以上、
他のNi等の希釈材元素を合計で50%以下とすることが適
当である。すなわち希釈材元素の割合が高くなれば通常
はキュリー温度Tcが一層低下するが、カー回転角θkも
小さくなる。光磁気記録媒体として実用可能なカー回転
角θkは少なくとも0.2゜以上、好ましくは0.3゜以上で
あるが、Feが50原子%より少なくなれば充分なカー回転
角を確保することが困難となるから、Feは50原子%以
上、他の希釈材元素を50原子%以下とした。
As mentioned above, Fe is the main constituent, and other diluents
When using a magnetic material to which an element such as Ni is added, the compounding ratio of Fe and other diluent elements is 50% or more of Fe in atomic%,
It is appropriate that the total content of other diluent elements such as Ni is 50% or less. That is, when the proportion of the diluent element is high, the Curie temperature Tc is usually further lowered, but the Kerr rotation angle θk is also small. The Kerr rotation angle θk that can be practically used as a magneto-optical recording medium is at least 0.2 ° or more, preferably 0.3 ° or more, but it becomes difficult to secure a sufficient Kerr rotation angle if Fe is less than 50 atom%. , Fe was 50 atomic% or more, and other diluent elements were 50 atomic% or less.

なおNi等の希釈材元素は、いずれか1種のみを単独に添
加しても、2種以上を複合添加しても良いが、1種のみ
を単独添加する場合は前記各元素のうちNiもしくはCrを
使用することが望ましく、その他のMn、Cu、Be、As、R
e、Ru、OsはNiおよび/またはCrと併せて添加すること
が望ましい。またここでMn、Cu、Be、As、Re、Ru、Osの
いずれか1種または2種以上を添加する場合、これらは
いずれもキュリー温度の低下には効果が大きいものの、
カー回転角θkの低下や飽和磁束密度Bsの低下にも大き
く作用してしまうから、これらは合計で10原子%以下と
することが望ましい。
It should be noted that any one of the diluent elements such as Ni may be added alone, or two or more kinds may be added in combination. It is desirable to use Cr and other Mn, Cu, Be, As, R
It is desirable to add e, Ru, and Os together with Ni and / or Cr. Further, when any one or more of Mn, Cu, Be, As, Re, Ru, and Os is added here, although all of them are effective in lowering the Curie temperature,
Since it also has a large effect on the decrease of the Kerr rotation angle θk and the decrease of the saturation magnetic flux density Bs, it is desirable that the total amount of these is 10 atomic% or less.

なおまた、Feに添加するNi等の希釈材元素は若干でも添
加すればキュリー温度を低下させる効果が得られるから
その下限は特に定めないが、通常は合計で少なくとも5
原子%以上は添加することが好ましい。
The lower limit is not specified because the effect of lowering the Curie temperature can be obtained by adding even a small amount of the diluent element such as Ni added to Fe.
It is preferable to add at least atomic%.

なお前述のように多孔質陽極酸化処理皮膜の微細孔の孔
径を18nm〜6nmとすることは、陽極酸化処理時における
電圧を適切に調整することによって達成できる。すなわ
ち、一般に陽極酸化処理時の電圧を低くするほど微細孔
の孔径が小さくなることが知られており、この発明の場
合も陽極酸化処理電圧を小さくすることにより孔径6〜
18nmの微細孔を有する陽極酸化皮膜を生成させることが
可能である。なお孔径を18nm以下とするための具体的な
陽極酸化処理電圧は、処理液(電解液)の成分によって
も若干異なるが、本発明者等の実験によれば、後述する
実施例4〜7に示すように、陽極酸化処理電圧を直流10
V以下とすることによって孔径18nm以下の微細孔を有す
る陽極酸化皮膜が生成されることが知見されている。
In addition, as described above, the pore size of the fine pores of the porous anodizing film can be set to 18 nm to 6 nm by appropriately adjusting the voltage during the anodizing process. That is, it is generally known that the lower the voltage during the anodizing treatment, the smaller the pore diameter of the fine pores. In the case of the present invention, the pore diameter of 6 to 6 can be obtained by reducing the anodizing treatment voltage.
It is possible to form an anodized film with 18 nm micropores. The specific anodizing treatment voltage for making the pore diameter 18 nm or less is slightly different depending on the components of the treatment liquid (electrolyte), but according to the experiments conducted by the present inventors, the following Examples 4 to 7 were performed. As shown, the anodizing voltage is DC 10
It has been found that when the content is V or less, an anodic oxide film having fine pores with a diameter of 18 nm or less is formed.

実施例 [実施例1] 純度99.99%のAlを用いて溶製して4%Mg−Al合金から
なる圧延板の表面を研磨してAl基板とし、そのAl基板の
方面に、3%シュウ酸水溶液を電解液として用いて種々
の異なる電解電圧で陽極酸化処理を施し、種々の異なる
ポア径の陽極酸化皮膜を生成させた。
Example [Example 1] The surface of a rolled plate made of a 4% Mg-Al alloy was melted by using Al having a purity of 99.99%, and the surface of the rolled plate was used as an Al substrate. The surface of the Al substrate was 3% oxalic acid. Anodizing treatment was performed at various electrolytic voltages using an aqueous solution as an electrolytic solution to form anodized films with various different pore sizes.

次いで種々のポア径の陽極酸化皮膜に対し、硫酸鉄10g/
l、硫酸ニッケル40g/l、ホウ酸30g/l、グリセリン2g/l
を含有する電解液にて交流電解により電解析出処理を行
ない、陽極酸化皮膜の微細孔にFe50原子%−Ni50原子%
の組成の合金(Fe50Ni50合金)を充填した。また前記同
様の種々のポア径の陽極酸化皮膜に対し、硫酸鉄10g/
l、硫酸ニッケル40g/l、硫酸マンガン5g/l、ホウ酸30g/
l、グリセリン2g/lを含有する電解液にて交流電解析出
処理を行ない、陽極酸化皮膜の微細孔中にFe50原子%−
Ni45原子%−Mn5原子%の組成の合金(Fe50Ni45Mn5
金)を充填した。
Then, iron sulphate 10g /
l, nickel sulfate 40g / l, boric acid 30g / l, glycerin 2g / l
Performed electrolytic deposition treatment by alternating current electrolysis in an electrolyte solution containing Fe50 atomic% -Ni50 atomic% in the fine pores of the anodic oxide film.
The alloy (Fe 50 Ni 50 alloy) having the composition of was filled. In addition, for anodized films with various pore diameters similar to the above, iron sulfate 10 g /
l, nickel sulfate 40g / l, manganese sulfate 5g / l, boric acid 30g /
AC electrolytic deposition treatment was performed with an electrolytic solution containing l and glycerin 2 g / l, and Fe50 atom%-
An alloy (Fe 50 Ni 45 Mn 5 alloy) having a composition of Ni 45 atom% -Mn 5 atom% was filled.

以上のようにFe50Ni50およびFe50Ni45Mn5合金を充填し
た種々のポア径の陽極酸化皮膜に充填した場合のポア径
(Dp)とキュリー温度(Tc)との関係について調べた結
果を第3図に示す。なお第3図には、Fe単体を充填した
結果(第1図と同じ)についても比較のため併せて示
す。
The results of examining the relationship between the pore diameter (Dp) and the Curie temperature (Tc) when filling the anodic oxide coatings with various pore diameters filled with Fe 50 Ni 50 and Fe 50 Ni 45 Mn 5 alloys as described above Is shown in FIG. Note that FIG. 3 also shows the results of filling Fe alone (the same as in FIG. 1) for comparison.

第3図から明らかなように、Fe50Ni50合金を用いた場合
およびFe50Ni45Mn5合金を用いた場合はいずれもFe単体
を用いた場合と比較して格段にキュリー温度が低く、し
かもポア径が18nm以下でキュリー温度が著しく低下して
いることが判る。そして特にFe50Ni45Mn5合金を用いた
場合はFe50Ni50合金を用いた場合よりもキュリー温度が
低くなっている。なお残留磁束密度BsはFe50Ni50合金で
0.32T、Fe50Ni45Mn5合金で0.31Tであり、またカー回転
角θkは前者で0.46゜後者で0.45゜であり、いずれも光
磁気記録媒体として実用可能な程度である。
As is clear from FIG. 3, the Curie temperature is significantly lower in both the case of using the Fe 50 Ni 50 alloy and the case of using the Fe 50 Ni 45 Mn 5 alloy, as compared with the case of using Fe alone. Moreover, it can be seen that the Curie temperature is remarkably lowered when the pore diameter is 18 nm or less. And in particular, when the Fe 50 Ni 45 Mn 5 alloy is used, the Curie temperature is lower than when the Fe 50 Ni 50 alloy is used. Note that the residual magnetic flux density Bs is based on the Fe 50 Ni 50 alloy.
0.32T, 0.31T for Fe 50 Ni 45 Mn 5 alloy, and Kerr rotation angle θk is 0.46 ° for the former and 0.45 ° for the latter, both of which are practically applicable as a magneto-optical recording medium.

[実施例2] 実施例1の場合と同様にして種々のポア径の陽極酸化皮
膜を形成し、その陽極酸化皮膜の微細孔にFe70原子%−
Cr30原子%の合金(Fe70Cr30合金)、Fe70原子%−Cr25
原子%−Cu5原子%の合金(Fe70Cr25Cu5合金)、Fe70原
子%−Cr25原子%−Os5原子%の合金(Fe70Cr25Os5
金)をそれぞれ交流電解により析出させる電解析出処理
を行なった。なお電解析出のために使用した電解液は、
Fe70Cr30合金の場合はFeSO410g/l、CrSO420g/l、ホウ酸
30g/l、グリセリン2g/lを含有するものであり、またFe
70Cr25Cu5合金の場合はFeSO410g/l、CrSO415g/l、CuSO4
1g/l、ホウ酸30g/l、グリセリン2g/l、Fe70Cr25Os5合金
の場合はFeSO410g/l、CrSO415g/l、H2OSO41g/l、ホウ酸
30g/l、グリセリン2g/lである。
[Example 2] An anodic oxide coating having various pore diameters was formed in the same manner as in Example 1, and Fe70 atom%-was formed in the fine pores of the anodic oxide coating.
Cr30 atomic% of the alloy (Fe 70 Cr 30 alloy), Fe70 atomic% -Cr25
Electrodeposition that deposits an alloy of atomic% -Cu5 atomic% (Fe 70 Cr 25 Cu 5 alloy) and an alloy of Fe 70 atomic% -Cr 25 atomic% -Os 5 atomic% (Fe 70 Cr 25 Os 5 alloy) by AC electrolysis. Processed. The electrolytic solution used for electrolytic deposition is
For Fe 70 Cr 30 alloy, FeSO 4 10g / l, CrSO 4 20g / l, boric acid
It contains 30 g / l and glycerin 2 g / l.
For 70 Cr 25 Cu 5 alloy, FeSO 4 10 g / l, CrSO 4 15 g / l, CuSO 4
1g / l, boric acid 30g / l, glycerin 2g / l, FeSO 4 10g / l, CrSO 4 15g / l, H 2 OSO 4 1g / l, boric acid for Fe 70 Cr 25 Os 5 alloy
It is 30 g / l and glycerin 2 g / l.

これらの場合について、ポア径(Dp)とキュリー温度
(Tc)との関係について調べた結果を第4図に示す。ま
たそれぞれの場合の飽和磁束密度Bsおよびカー回転角に
ついて調べた結果を第1表に示す。
The results of examining the relationship between the pore diameter (Dp) and the Curie temperature (Tc) in these cases are shown in FIG. In addition, Table 1 shows the results of examining the saturation magnetic flux density Bs and the Kerr rotation angle in each case.

第4図から明らかなようにFe−Cr系の場合も第3図に示
すFe−Ni系の場合と同様な効果が得られることが判る。
また第1表から、飽和磁束密度Bsおよびカー回転角θk
も光磁気記録媒体として実用可能な程度であることが明
らかである。
As is clear from FIG. 4, it can be seen that the same effect as in the case of Fe—Ni system shown in FIG. 3 can be obtained in the case of Fe—Cr system.
Further, from Table 1, the saturation magnetic flux density Bs and the Kerr rotation angle θk
It is clear that the above is practically applicable as a magneto-optical recording medium.

[実施例3] 実施例1の場合と同様にして種々のポア径の陽極酸化皮
膜を形成し、その陽極酸化皮膜の微細孔に対する電解析
出処理を施すに当って、実施例1で用いたFe−Ni合金析
出用の電解液の硫酸ニッケル濃度を種々変化させ、種々
の成分比のFe−Ni合金を析出させた。また実施例2で用
いたFe−Cr合金析出用の電解液の硫酸クロム濃度を種々
変化させ、種々の成分比のFe−Cr合金を析出させた。そ
して各Fe−Ni合金、各Fe−Cr合金を充填した種々のポア
径の陽極酸化皮膜についてポア径(Dp)とキュリー温度
(Tc)との関係を調べた結果を第5図に示す。また有孔
率20%(ポア径約15nm)の陽極酸化皮膜に充填した各合
金の飽和磁束密度Bsおよびカー回転角θkを調べた結果
を第2表に示す。
Example 3 Used in Example 1 in forming anodized films with various pore diameters in the same manner as in Example 1 and performing electrolytic deposition treatment on the fine pores of the anodized film. The concentration of nickel sulfate in the electrolytic solution for depositing the Fe-Ni alloy was changed variously to deposit the Fe-Ni alloy with various component ratios. Further, the concentration of chromium sulfate in the electrolytic solution for depositing the Fe-Cr alloy used in Example 2 was changed variously to deposit the Fe-Cr alloy with various component ratios. FIG. 5 shows the results of investigating the relationship between the pore diameter (Dp) and the Curie temperature (Tc) of the anodic oxide coatings having various pore diameters filled with each Fe-Ni alloy and each Fe-Cr alloy. Table 2 shows the results of examining the saturation magnetic flux density Bs and the Kerr rotation angle θk of each alloy filled in the anodized film having a porosity of 20% (pore diameter: about 15 nm).

第5図から明らかなように、Fe−Ni合金、Fe−Cr合金で
はいずれもFe単体の場合よりもキュリー温度(Tc)が低
くなっている。但し、第2表から明らかなように、Fe量
が50原子%未満(x>50原子%)の場合、Bs、θkが小
さく、光磁気記録媒体として適当でないことが判る。
As is clear from FIG. 5, the Curie temperature (Tc) is lower in both Fe—Ni alloy and Fe—Cr alloy than in the case of Fe alone. However, as is clear from Table 2, when the Fe content is less than 50 atomic% (x> 50 atomic%), Bs and θk are small and it is not suitable as a magneto-optical recording medium.

[実施例4] 実施例1で用いたものと同様なAl基板に対して、3%シ
ュウ酸水溶液を用いて直流10V、浴温20℃で陽極酸化処
理を施し、ポア径18nmの陽極酸化皮膜を生成させた。
Example 4 An Al substrate similar to that used in Example 1 was subjected to anodization treatment using a 3% aqueous solution of oxalic acid at a direct current of 10 V and a bath temperature of 20 ° C. to form an anodized film having a pore diameter of 18 nm. Was generated.

次いで、硫酸鉄10g/、硫酸ニッケル40g/、硫酸マン
ガン5g/、ホウ酸30g/、グリセリン2g/を含有する
電解液により交流電解析出処理を行ない、陽極酸化皮膜
の微細孔中にFe50原子%−Ni45原子%−Mn5原子%の組
成の合金(Fe50Ni45Mn5合金)からなる磁性材を充填し
た。このようにして微細孔に充填された磁性材のキュリ
ー温度を調べたところ、220℃であることが判明した。
Next, iron sulfate 10 g /, nickel sulfate 40 g /, manganese sulfate 5 g /, boric acid 30 g /, AC electrolytic deposition treatment was performed with an electrolytic solution containing glycerin 2 g /, and Fe50 atom% -in the fine pores of the anodic oxide film. A magnetic material made of an alloy (Fe 50 Ni 45 Mn 5 alloy) having a composition of Ni 45 atomic% -Mn 5 atomic% was filled. When the Curie temperature of the magnetic material filled in the fine holes in this way was examined, it was found to be 220 ° C.

[実施例5] 実施例1で用いたものと同様なAl基板に対して、実施例
4と同じく、3%シュウ酸水溶液を用い、直流5V、浴温
20℃で陽極酸化処理を施し、ポア径15nmの陽極酸化皮膜
を生成させた。
[Example 5] For an Al substrate similar to that used in Example 1, a 3% oxalic acid aqueous solution was used, as in Example 4, using a DC voltage of 5 V and a bath temperature.
Anodizing treatment was performed at 20 ° C to form an anodized film with a pore diameter of 15 nm.

次いで、硫酸鉄10g/、硫酸クロム15g/、硫酸銅1g/
、ホウ酸30g/、グリセリン2g/を含有する電解液
により交流電解析出処理を行ない、陽極酸化膜の微細孔
中にFe70Cr25Cu5合金からなる磁性材を充填した。この
ようにして微細孔に充填された磁性材のキュリー温度を
調べたところ、230℃であることが判明した。
Next, iron sulfate 10 g /, chromium sulfate 15 g /, copper sulfate 1 g /
AC electrolytic deposition treatment was performed with an electrolytic solution containing boric acid, 30 g /, and glycerin, 2 g /, and the magnetic material of Fe 70 Cr 25 Cu 5 alloy was filled in the micropores of the anodic oxide film. When the Curie temperature of the magnetic material filled in the fine holes in this way was examined, it was found to be 230 ° C.

[実施例6] 実施例1で用いたものと同様なAl基板に対して、80ml/
の濃度のH2SO4水溶液を用いて直流10V、浴温20℃で陽
極酸化処理を施し、ポア径15nmの陽極酸化皮膜を生成さ
せた。
Example 6 For an Al substrate similar to that used in Example 1, 80 ml /
Using an aqueous solution of H 2 SO 4 having a concentration of 10 V and anodizing treatment at a bath temperature of 20 ° C., an anodic oxide film having a pore diameter of 15 nm was formed.

次いで、硫酸鉄10g/、硫酸クロム20g/、ホウ酸30g/
、グリセリン2g/を含有する電解液により交流電解
析出処理を行ない、陽極酸化皮膜の微細孔中にFe70Cr30
合金からなる磁性材を充填した。このようにして微細孔
に充填された磁性材のキュリー温度を調べたところ、35
0℃であることが判明した。
Next, iron sulfate 10 g /, chromium sulfate 20 g /, boric acid 30 g /
AC electrolytic deposition treatment was performed with an electrolytic solution containing 2 g / of glycerin, and Fe 70 Cr 30 was formed in the fine pores of the anodic oxide film.
A magnetic material made of an alloy was filled. When the Curie temperature of the magnetic material filled in the fine holes in this way was examined, it was found to be 35
It was found to be 0 ° C.

[実施例7] 実施例1で用いたものと同様なAl基板に対して、実施例
6と同じ80ml/濃度のH2SO4水溶液を用いて直流5V、浴
温20℃で陽極酸化処理を施し、ポア径8nmの陽極酸化皮
膜を生成させた。
[Example 7] An Al substrate similar to that used in Example 1 was subjected to anodizing treatment using the same 80 ml / concentration H 2 SO 4 aqueous solution as in Example 6 at a DC voltage of 5 V and a bath temperature of 20 ° C. Then, an anodic oxide film having a pore diameter of 8 nm was formed.

次いで、実施例6で用いたものと同じ成分の電解液によ
り交流電解析出処理を行ない、陽極酸化皮膜の微細孔中
にFe70Cr30合金からなる磁性材を充填した。このように
して微細孔に充填された磁性材のキュリー温度を調べた
ところ、190℃であることが判明した。
Next, an AC electrolytic deposition treatment was carried out with an electrolytic solution having the same components as those used in Example 6 to fill the micropores of the anodized film with a magnetic material made of Fe 70 Cr 30 alloy. When the Curie temperature of the magnetic material filled in the fine holes in this way was examined, it was found to be 190 ° C.

[比較例] 実施例1で用いたものと同様なAl基板に対して、実施例
6と同じ800ml/濃度のH2SO4水溶液を用いて直流15V、
浴温20℃で陽極酸化処理を施し、ポア径21nmの陽極酸化
皮膜を生成させた。
[Comparative Example] For an Al substrate similar to that used in Example 1, the same 800 ml / concentration H 2 SO 4 aqueous solution as in Example 6 was used and a direct current of 15 V,
Anodizing treatment was performed at a bath temperature of 20 ° C to form an anodized film with a pore diameter of 21 nm.

次いで、硫酸鉄10g/、硫酸ニッケル40g/、ホウ酸30
g/、グリセリン2g/を含有する電解液により交流電
解析出処理を行ない、陽極酸化皮膜の微細孔中にFe50Ni
50合金からなる磁性材を充填した。このようにして微細
孔に充填された磁性材のキュリー温度を調べたところ、
410℃であることが判明した。
Next, iron sulfate 10g /, nickel sulfate 40g /, boric acid 30
AC electrolytic deposition treatment was performed with an electrolytic solution containing g / and glycerin 2 g /, and Fe 50 Ni was formed in the fine pores of the anodic oxide film.
A magnetic material made of 50 alloy was filled. When the Curie temperature of the magnetic material filled in the fine holes in this way was examined,
It was found to be 410 ° C.

以上の実施例4〜7に示すように陽極酸化処理電圧が直
流10V以下ではポア径が18nm以下の微細孔を有する陽極
酸化皮膜を生成することができ、この場合はその微細孔
に充填した磁性体のキュリー温度が400℃以下となっ
た。
As shown in Examples 4 to 7 above, when the anodizing voltage is DC of 10 V or less, it is possible to form an anodized film having fine pores having a pore diameter of 18 nm or less. The Curie temperature of the body fell below 400 ° C.

これに対し陽極酸化処理電圧が直流10Vを越えた比較例
(電圧15V)では、ポア径が18nmを越える21nmの大きな
微細孔が形成され、この場合にはキュリー温度が400℃
を越えてしまった。この場合には、信号の書き込み時に
は400℃を越える高温に加熱しなければならず、そのた
め陽極酸化皮膜にクラックが発生するおそれがある。
On the other hand, in the comparative example (voltage 15V) in which the anodizing voltage exceeded DC 10V, large pores of 21nm with pore diameter exceeding 18nm were formed. In this case, the Curie temperature was 400 ° C.
I have crossed over. In this case, when writing a signal, it must be heated to a high temperature exceeding 400 ° C., which may cause cracks in the anodized film.

発明の効果 この発明の光磁気記録媒体は、磁性材が充填される多孔
質陽極酸化皮膜の微細孔の孔径(ポア径)を18nm以下と
することによって、その微細孔中の磁性材のキュリー温
度を低くすることができ、そのため汎用の半導体レーザ
の如き低出力レーザ光源を用いて信号の書込みを行なう
ことが可能となり、また書込み時の加熱により陽極酸化
皮膜にクラックが生じることも防止できるようになっ
た。そして微細孔に充填される磁性材として、Feを主成
分としこれをNi、Cr、Mn、Cu、Be、As、Re、Ru、Osのう
ちの1種または2種以上で希釈した合金を用いることに
よって、キュリー温度をより一層低下させ、低出力レー
ザ光源の使用をより一層容易化することができる。
EFFECTS OF THE INVENTION The magneto-optical recording medium of the present invention is such that by setting the pore diameter (pore diameter) of the micropores of the porous anodic oxide film filled with the magnetic material to 18 nm or less, the Curie temperature of the magnetic material in the micropores is reduced. Therefore, it becomes possible to write a signal using a low-power laser light source such as a general-purpose semiconductor laser, and it is possible to prevent cracks from occurring in the anodized film due to heating during writing. became. Then, as the magnetic material to be filled in the micropores, an alloy containing Fe as a main component and diluting it with one or more of Ni, Cr, Mn, Cu, Be, As, Re, Ru and Os is used. As a result, the Curie temperature can be further lowered and the use of the low power laser light source can be further facilitated.

【図面の簡単な説明】[Brief description of drawings]

第1図は磁性材としてFe、Niを用いた場合の陽極酸化皮
膜のポア径(Dp)とキュリー温度(Tc)との関係を示す
グラフ、 第2図は同じく磁性材としてFe、Niを用いた場合の陽極
酸化皮膜のポア径(Dp)と保磁力(Hc)との関係を示す
グラフ、 第3図は実施例1における陽極酸化皮膜のポア径(Dp)
とキュリー温度(Tc)との関係を示すグラフ、 第4図は実施例2における陽極酸化皮膜のポア径(Dp)
とキュリー温度(Tc)との関係を示すグラフ、 第5図は実施例3における陽極酸化皮膜のポア径(Dp)
とキュリー温度(Tc)との関係を示すグラフ、 第6図は先行技術の光磁気記録媒体の一例を模式的に示
す縦断面図である。 1……基板、2……多孔質陽極酸化皮膜、 3……微細孔、4……磁性材。
Fig. 1 is a graph showing the relationship between the pore diameter (Dp) and the Curie temperature (Tc) of the anodized film when Fe and Ni are used as magnetic materials. Fig. 2 uses Fe and Ni as magnetic materials. Fig. 3 is a graph showing the relationship between the pore diameter (Dp) of the anodic oxide film and the coercive force (Hc) when it is present. Fig. 3 is the pore diameter (Dp) of the anodic oxide film in Example 1.
Is a graph showing the relationship between Curie temperature (Tc) and Fig. 4 is the pore diameter (Dp) of the anodized film in Example 2.
Is a graph showing the relationship between the Curie temperature (Tc) and Fig. 5 is the pore diameter (Dp) of the anodized film in Example 3.
And a Curie temperature (Tc). FIG. 6 is a longitudinal sectional view schematically showing an example of a magneto-optical recording medium of the prior art. 1 ... Substrate, 2 ... Porous anodized film, 3 ... Micropores, 4 ... Magnetic material.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】アルミニウムもしくはアルミニウム合金か
らなる基板の表面に多孔質陽極酸化皮膜が形成され、か
つその多孔質陽極酸化被膜の各微細孔中に磁性材が充填
されてなる光磁気記録媒体において、 前記多孔質陽極酸化皮膜の微細孔の直径が6〜18nmの範
囲内である光磁気記録媒体。
1. A magneto-optical recording medium in which a porous anodic oxide film is formed on the surface of a substrate made of aluminum or an aluminum alloy, and a magnetic material is filled in each micropore of the porous anodic oxide film. A magneto-optical recording medium in which the diameter of the fine pores of the porous anodized film is in the range of 6 to 18 nm.
【請求項2】特許請求の範囲第1項記載の光磁気記録媒
体において、前記磁性材として、Ni、Cr、Mn、Cu、Be、
As、Re、Ru、Osのうちから選ばれた1種または2種以上
を合計で50原子%以下含有し、残部が実質的にFeからな
る合金を用いている光磁気記録媒体。
2. The magneto-optical recording medium according to claim 1, wherein the magnetic material is Ni, Cr, Mn, Cu, Be,
A magneto-optical recording medium comprising an alloy containing one or more selected from As, Re, Ru and Os in a total amount of 50 atomic% or less, and the balance being substantially Fe.
JP60178078A 1985-08-13 1985-08-13 Magneto-optical recording medium Expired - Lifetime JPH0731830B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60178078A JPH0731830B2 (en) 1985-08-13 1985-08-13 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60178078A JPH0731830B2 (en) 1985-08-13 1985-08-13 Magneto-optical recording medium

Publications (2)

Publication Number Publication Date
JPS6238543A JPS6238543A (en) 1987-02-19
JPH0731830B2 true JPH0731830B2 (en) 1995-04-10

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62103861A (en) * 1985-10-31 1987-05-14 Nippon Gakki Seizo Kk Optical magnetic recording medium
JPS62212949A (en) * 1986-03-12 1987-09-18 Matsushita Electric Ind Co Ltd Magneto-optical recording medium
US5209837A (en) * 1987-09-30 1993-05-11 Noboru Tsuya Process for preparing magnetic disk
JPH0191319A (en) * 1987-09-30 1989-04-11 Noboru Tsuya Substrate for magnetic disk and production thereof
JPH02126441A (en) * 1988-11-07 1990-05-15 Hitachi Maxell Ltd Magneto-optical recording medium and production thereof
JP4825995B2 (en) * 2004-11-29 2011-11-30 有限会社三恭興産 Lightweight magnetic material and manufacturing method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972633A (en) * 1982-10-18 1984-04-24 Toshiba Corp Sub-code signal generator

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Publication number Publication date
JPS6238543A (en) 1987-02-19

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