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JPH073388B2 - Film thickness change measuring device - Google Patents
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JPH073388B2 - Film thickness change measuring device - Google Patents

Film thickness change measuring device

Info

Publication number
JPH073388B2
JPH073388B2 JP62198016A JP19801687A JPH073388B2 JP H073388 B2 JPH073388 B2 JP H073388B2 JP 62198016 A JP62198016 A JP 62198016A JP 19801687 A JP19801687 A JP 19801687A JP H073388 B2 JPH073388 B2 JP H073388B2
Authority
JP
Japan
Prior art keywords
light
flat plate
optical fiber
measured
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62198016A
Other languages
Japanese (ja)
Other versions
JPS6441836A (en
Inventor
義行 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP62198016A priority Critical patent/JPH073388B2/en
Publication of JPS6441836A publication Critical patent/JPS6441836A/en
Publication of JPH073388B2 publication Critical patent/JPH073388B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/4738Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474Details of optical heads therefor, e.g. using optical fibres

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、膜厚変化を測定する装置に関する。さらに詳
細には、平板上に抗原又は抗体を固定しておき、この平
板を被検液に接触させ抗原−抗体反応を利用して検疫中
の抗体や抗原を検出する際に有用な、干渉色を利用した
膜厚変化測定装置に関する。
TECHNICAL FIELD The present invention relates to an apparatus for measuring a change in film thickness. More specifically, an antigen or an antibody is immobilized on a plate, and the plate is brought into contact with a test solution, and an interference color useful when detecting an antibody or an antigen in quarantine using an antigen-antibody reaction is used. The present invention relates to a film thickness change measuring device using the.

[従来技術] 近年、医療診断の分野において、平板等の担体上に抗原
又は抗体を固定しておき、この担体を被検液に接触させ
ることにより、抗原が担持されている場合は抗体を、抗
体が担持されている場合は抗原を反応させて、被検液中
の抗体や抗原の有無又はその濃度を測定することが試み
られている。
[Prior Art] In recent years, in the field of medical diagnosis, an antigen or an antibody is immobilized on a carrier such as a plate, and the carrier is brought into contact with a test solution, so that the antibody is carried when the antigen is carried, When the antibody is carried, it is attempted to react the antigen and measure the presence or absence of the antibody or the antigen in the test liquid or the concentration thereof.

これらの中で、担体を光反射性平板とし、その上に抗体
(又は抗原)を担持し、それに対する抗原(又は抗体)
の反応を該平板上の膜厚の変化として測定する方法が簡
便な方法として提案されている。この平板に光線を当て
ると、入射した光線は表面で反射される部分と、光反射
性平板で反射される部分とに分解され、そして膜厚に対
応する光路差により反射光に干渉が生じて干渉色が現わ
れる。従って膜厚の変化は干渉色の変化として検出する
ことが可能とする。(例えば、特開昭59−160763号公
報、同51−148015号公報、同58−195142号公報等参
照)。
Among these, the carrier is a light-reflecting flat plate, and the antibody (or antigen) is carried thereon, and the antigen (or antibody) against it.
A method of measuring the above reaction as a change in film thickness on the flat plate has been proposed as a simple method. When a light beam is applied to this flat plate, the incident light beam is decomposed into a part that is reflected by the surface and a part that is reflected by the light reflective flat plate, and the optical path difference corresponding to the film thickness causes interference in the reflected light. Interference color appears. Therefore, the change in the film thickness can be detected as the change in the interference color. (For example, refer to JP-A-59-160763, JP-A-51-148015, JP-A-58-195142, etc.).

ところで、この干渉色の変化を測定するのに、従来公知
の色彩・色差計(例えば、色彩色差計CR−200、ミノル
タ(株)製)を用いることも一応可能であるが、従来の
色彩色差計は、被測定面から垂直に反射される光線を受
光し、これを前記表色系で換算しているため、上記の如
き目的には不都合である。何故なら、上記の如き干渉色
の色変化が最も鋭敏に感知されるのは、被測定面の垂線
からかなりの角度をもった入射光・反射光の場合である
からである。
By the way, it is also possible to use a conventionally known color / color difference meter (for example, a color color difference meter CR-200, manufactured by Minolta Co., Ltd.) to measure the change in the interference color. The meter receives the light ray reflected vertically from the surface to be measured and converts it by the color system, which is inconvenient for the above purpose. This is because the above-described color change of the interference color is most sensitively sensed in the case of incident light / reflected light having a considerable angle from the perpendicular of the surface to be measured.

また、光源の光フィルタを通して試料に投光する投光部
と試料からの反射光又は透過光を受光する受光部とから
なり、投光部及び受光部がそれぞれ独立に垂直に設けら
れた試料載置台の周囲を回動し得るように構成し、光沢
測定を測色とを同時に行い得るようにした装置も知られ
ている(特開昭58−122448号公報)。しかし、この装置
も試料載置台が垂直なため上述の測定には不向きであ
る。
In addition, the sample mounting unit includes a light projecting unit that projects light through the optical filter of the light source onto the sample and a light receiving unit that receives reflected light or transmitted light from the sample. The light projecting unit and the light receiving unit are provided vertically independently of each other. There is also known a device which is configured to be rotatable around a table so that gloss measurement and color measurement can be performed at the same time (JP-A-58-122448). However, this apparatus is also unsuitable for the above-mentioned measurement because the sample mounting table is vertical.

[発明が解決しようとする課題] そこで、本発明者は、従来公知の色彩・色差計を上記目
的に合致すべく改良することを検討し、水平な平板
(ホ)の表面に担持した被測定物の平面(ハ)に対し
て、先端から20°以上の入射角(θ)で平行光線を照
射しうる光照射用光ファイバー(イ)及び先端で該入射
角(θ)と略同一角度の反射角(θ)で反射光を受
光しうる受光用光ファイバー(ロ)とを対向して備え、
該光照射用光ファイバー(イ)の他端には照明手段が接
続されており、該受光用光ファイバー(ロ)の他端は、
光センサーに接続され、該光センサーで色彩色差を測定
するようにした反射色測定装置を発明した。
[Problems to be Solved by the Invention] Therefore, the present inventor studied to improve a conventionally known color / color difference meter so as to meet the above-mentioned purpose, and carried out measurement on a surface of a horizontal flat plate (e). An optical fiber for light irradiation (a) capable of irradiating parallel rays at an incident angle (θ 1 ) of 20 ° or more from the tip to the plane (c) of the object, and the same angle as the incident angle (θ 1 ) at the tip A light receiving optical fiber (b) capable of receiving reflected light at a reflection angle (θ 2 ) of
Illumination means is connected to the other end of the light irradiation optical fiber (a), and the other end of the light receiving optical fiber (b) is
The invention has invented a reflection color measuring device which is connected to an optical sensor and measures the color difference with the optical sensor.

しかしながら、この装置は平板形式の検査用試料とし
て、同一平板内に位置をかえて種々の光源や抗体を固定
しておき、これを被検液と接触させて同時に種々の抗体
や抗原の存否やその量を検出しようとするとき、未だ不
便であり、膜厚変化の測定装置としては実用的ではな
い。
However, this device, as a test sample in the form of a flat plate, fixes various light sources and antibodies in the same flat plate at different positions, and contacts these with a test liquid to simultaneously detect the presence or absence of various antibodies and antigens. It is still inconvenient when trying to detect the amount, and it is not practical as an apparatus for measuring the change in film thickness.

本発明は詳述の問題も解決した、複数の被測定物につい
て測定可能な実用性にすぐれた膜厚変化測定装置を提供
することを目的とするものである。
It is an object of the present invention to provide a film thickness change measuring apparatus which solves the problem described in detail and is excellent in practicability and capable of measuring a plurality of objects to be measured.

[課題を解決するための手段] 本発明は、その先端から被測定物を担持した水平な平板
(ホ)の平面(ハ)に対して20°以上の入射角(θ
で実質的な平行光線を照射しうるところの、他端に照明
手段が接続された光照射用光ファイバー(イ)、その先
端で当該平面(ハ)から入射角(θ)と略同一角度の
反射角(θ)で反射された反射光を受光し、受光した
光線を光センサーに送達する受光用光ファイバー
(ロ)、該被測定物を担持した平板(ホ)をセットで
き、しかも該平板(ホ)を変位させてその所望範囲に光
照射させうる平板セット治具(ヘ)、及び、該変位の大
きさを測定し、その変位の大きさと当該位置での反射光
の測定値とを対応させて表示する表示手段(ト)を有す
るとともに、上記光ファイバー(イ)と上記光ファイバ
ー(ロ)とがθ≒θの関係を維持して連動するよう
にしたことを特徴とする膜厚変化測定装置である。
[Means for Solving the Problem] The present invention has an incident angle (θ 1 ) of 20 ° or more with respect to a plane (c) of a horizontal flat plate (e) carrying an object to be measured from its tip.
Where a substantially parallel light beam can be emitted at the other end, a light irradiation optical fiber (a) having an illuminating means connected to the other end, and at the tip thereof, the angle of incidence (θ 1 ) is substantially the same as the incident angle (θ 1 ) from the plane (c). A light receiving optical fiber (b) for receiving the reflected light reflected at the reflection angle (θ 2 ) and delivering the received light to the optical sensor, and a flat plate (e) carrying the object to be measured can be set, and the flat plate (E) A flat plate setting jig (f) capable of displacing and irradiating the desired range with light, and the magnitude of the displacement are measured, and the magnitude of the displacement and the measured value of the reflected light at the position are measured. A film thickness characterized by having a display means (g) for displaying in correspondence with each other and making the optical fiber (a) and the optical fiber (b) interlock while maintaining the relationship of θ 1 ≈θ 2. It is a change measuring device.

かくして、水平にセットした平板(ホ)に位置をかえて
種々の抗原や抗体を固定しておき、これを被検液と接触
させて該平板上にて抗原−抗体反応を生ぜしめた被測定
物について、膜厚の変化を精度よくかつ効率的に測定で
き、抗体や抗原の存否や濃度を検出することができる。
Thus, various antigens and antibodies were fixed on the plate (e) set horizontally and fixed, and this was brought into contact with the test liquid to cause an antigen-antibody reaction on the plate to be measured. With respect to an object, it is possible to accurately and efficiently measure a change in film thickness, and to detect the presence or absence and concentration of an antibody or an antigen.

[実施例] 以下、図面の例に従って本発明の装置を具体的に説明す
る。
[Embodiment] Hereinafter, the device of the present invention will be specifically described with reference to the examples of the drawings.

図1は本発明の測定装置の検知端を示す概念図、図2は
装置全体を表わす概念図である。図中、(イ)は光照射
用光ファイバー(照明用光ファイバー)であり、これに
より平行光線が被測定物を担持した水平な平板(ホ)上
の平面(ハ)に対して入射角θで照射される。この入
射角θは測定の容易さ正確さの点から20°以上に設定
される。本図にあっては光照射用光ファイバー(イ)
は、その先端は平面(ハ)に向いており、その他端は照
明手段としてのランプを内蔵する拡散室に接続されてい
る。すなわち、照明手段としてのランプは拡散室内に設
けられており、ランプから放射された光線が最も有効に
光ファイバー(イ)に伝って照射に利用されるようにな
っている。この光照射用光ファイバー(イ)の対向して
受光用光ファイバー(測定用光ファイバー)(ロ)が設
けられており、これらは、入射角θで照射された光線
がそれと略同じ角度θで反射してくる反射光を受光す
るように対照的に設置されている。
FIG. 1 is a conceptual diagram showing a detection end of a measuring device of the present invention, and FIG. 2 is a conceptual diagram showing the entire device. In the figure, (a) is an optical fiber for irradiating light (optical fiber for illumination), whereby parallel rays are incident at an incident angle θ 1 with respect to a plane (c) on a horizontal flat plate (e) carrying an object to be measured. Is irradiated. The incident angle θ 1 is set to 20 ° or more from the viewpoint of ease of measurement and accuracy. In this figure, the optical fiber for light irradiation (a)
Has its tip facing the plane (C) and the other end connected to a diffusion chamber containing a lamp as a lighting means. That is, the lamp as the illumination means is provided in the diffusion chamber, and the light beam emitted from the lamp is transmitted to the optical fiber (a) most effectively and used for irradiation. A light receiving optical fiber (measuring optical fiber) (b) is provided opposite to the light irradiating optical fiber (a), and these light beams are radiated at an incident angle θ 1 and are reflected at an angle θ 2 approximately the same. In contrast, it is installed to receive the reflected light.

そして、受光用光ファイバー(ロ)の他端は光センサー
(図示せず)に接続されており、受光した光線を該光セ
ンサーに送達するようになっている。
The other end of the light receiving optical fiber (b) is connected to an optical sensor (not shown), and the received light beam is delivered to the optical sensor.

測定に際し、平面(ハ)において入射光線方向と反射光
線方向との交わる中心点(A点)で、被測定物を担持し
た平板(ホ)上の光干渉が生じるが、この平板(ホ)は
平板セット治具(ヘ)を移動させることにより位置を変
化させることができ複数の測定のポイントでの測定が可
能である。図1の例においては、平板セット治具(ヘ)
は水平に前後方向(紙面に垂直方向)に移動できるよう
になっており、これにより、被測定平板(ホ)上の前後
方向(紙面に垂直な方向)での各位置での干渉光を測定
できる。
At the time of measurement, optical interference occurs on the flat plate (e) carrying the object to be measured at the center point (point A) where the incident ray direction and the reflected ray direction intersect on the plane (c). The position can be changed by moving the flat plate setting jig (f), and measurement at a plurality of measurement points is possible. In the example of FIG. 1, a flat plate setting jig (f)
Can move horizontally in the front-back direction (perpendicular to the plane of the paper), which allows you to measure the interference light at each position in the front-back direction (direction perpendicular to the plane of the paper) on the flat plate (e) to be measured. it can.

この際、平板用セット治具(ヘ)の変位は、公知の変位
測定手段で検知され、この変位量と反応光の測定値とが
対応して表示手段(ト)に表示される。この表示手段
(ト)は、画面上に表示されるものであってもよいが、
好ましくは変位量と測定値とが対応してプリントアウト
されるものである。
At this time, the displacement of the flat plate setting jig (f) is detected by a known displacement measuring means, and the displacement amount and the measurement value of the reaction light are displayed in correspondence on the display means (g). This display means (g) may be displayed on the screen,
Preferably, the displacement amount and the measured value are printed out in correspondence with each other.

このように、平板(ホ)を動かしながら測定することに
よって、効率的に種々の抗体や抗原の存否やその量を検
出することが可能となる。
As described above, by measuring while moving the flat plate (e), it is possible to efficiently detect the presence or absence of various antibodies or antigens and their amounts.

図2は本発明の装置の一例を示しているが、図中(チ)
は、平板セット治具(ヘ)の入口である。ここから平板
(ホ)が載置されてセットされた治具(ヘ)を装置内へ
挿入し、該治具(ヘ)を手動又は自動により水平面内で
変位させることにより、被測定物が複数でも容易に測定
可能となる。
FIG. 2 shows an example of the device of the present invention.
Is the entrance of the flat plate setting jig (f). From here, a flat plate (e) is placed and set on the jig (f), and the jig (f) is manually or automatically displaced in the horizontal plane to obtain a plurality of objects to be measured. But it can be easily measured.

本発明にあっては光照射部と受光部とがそれぞれ光ファ
イバー(イ)(ロ)で構成されうるため、照明用ランプ
とは分離して光ファイバー先端を前記入口(チ)近傍の
操作上好ましい場所に設置できる。
In the present invention, since the light irradiator and the light receiver can be configured by the optical fibers (a) and (b) respectively, the tip of the optical fiber is separated from the illumination lamp and the preferred location for operation near the entrance (h). Can be installed in

図中(リ)は受光用光ファイバー(ロ)から送達された
反射光を測定値として換算するマイクロコンピユーター
部であり、(ト)の表示手段は、その換算結果を平板
(ホ)の変位と反応させてプリントアウトなどによって
表示する部分である。
In the figure, (i) is a micro-computer part for converting the reflected light transmitted from the light-receiving optical fiber (ii) as a measured value, and the display means of (i) shows the conversion result in response to the displacement of the flat plate (e). It is the part that is displayed by printing.

本発明にあっては、光照射用光ファイバー(イ)と受光
用光ファイバー(ロ)とはその先端を被測定物平面
(ハ)の中心Aに向けたまま上下動することにより、容
易にθ≒θの関係を維持させたまま入射角(θ
と反射角(θ)とを連動して変化させることができ
る。従って、被測定物に最も適した入射角(θ)と反
射角(θ)とで干渉色を測定することができるので、
測定の感度も著しく高いものとなる。
In the present invention, the optical fiber for light irradiation (a) and the optical fiber for light reception (b) can be moved up and down with the tips thereof facing the center A of the plane (c) of the object to be measured, thereby facilitating θ 1 Incident angle (θ 1 ) while maintaining the relationship of ≈ θ 2
And the reflection angle (θ 2 ) can be changed in conjunction with each other. Therefore, the interference color can be measured with the incident angle (θ 1 ) and the reflection angle (θ 2 ) most suitable for the object to be measured.
The sensitivity of the measurement is also extremely high.

このようにして、受光された光線は従来公知の方法によ
り適当な表色系で表現される。例えばCIEで均等知覚色
空間として推奨されているL* a* b*表色系を用いると
すると、 ΔE*ab=[(ΔL*)2+(Δa*)2+(Δb*)2]1/2 で色差が表わされ、UCS表色系を用いると ΔU1V1=[(ΔU1)2+(ΔV1)2]1/2 で色差が表わされることになる。
In this way, the received light beam is represented by an appropriate color system by a conventionally known method. For example, if the L * a * b * color system recommended by the CIE as a uniform perceptual color space is used, ΔE * ab = [(ΔL * ) 2 + (Δa * ) 2 + (Δb * ) 2 ] 1 The color difference is represented by / 2 , and using the UCS color system, the color difference is represented by ΔU 1 V 1 = [(ΔU 1 ) 2 + (ΔV 1 ) 2 ] 1/2 .

しかし、反射光は必ずしも色差で測定する必要はなく、
単色光の明度の差で測定してもよい。
However, the reflected light does not necessarily have to be measured by color difference,
You may measure by the difference of the brightness of monochromatic light.

[発明の効果] 以上の如き本発明の測定装置によれば、水平な平板上に
担持された複数の被測定物について、その膜厚の変化を
測定することによって抗原あるい抗体の有無や濃度を高
感度でかつ効率的に測定することが出来るので、きわめ
て実用性が大である。
[Effects of the Invention] According to the measuring device of the present invention as described above, the presence or absence and the concentration of an antigen or an antibody are measured by measuring the change in film thickness of a plurality of objects to be measured supported on a horizontal flat plate. Can be measured with high sensitivity and efficiency, which is extremely practical.

【図面の簡単な説明】[Brief description of drawings]

図1は本発明の反射光測定装置の検知端、図2は装置全
体を表わす概念図である。 図中、(イ)は光照射用光ファイバー、(ロ)は受光用
光ファイバー、(ハ)は被測定物平面、(ホ)は被測定
物を担持する水平な平板、(ヘ)は平板用セット治具、
(ト)は表示手段、(チ)は平板用セット治具入口、
(リ)はマイクロコンピューター部を表わす。また、図
1におけるAは被測定物平面の中心を表わし、θは光
線の入射角、θは光線の反射角であり、θ≒θ
20°である。
FIG. 1 is a detection end of a reflected light measuring device of the present invention, and FIG. 2 is a conceptual diagram showing the entire device. In the figure, (a) is an optical fiber for light irradiation, (b) is an optical fiber for receiving light, (c) is a flat surface of the object to be measured, (e) is a horizontal flat plate carrying the object to be measured, and (f) is a flat plate set. jig,
(G) is a display means, (H) is a flat plate setting jig entrance,
(I) represents the microcomputer part. Further, A in FIG. 1 represents the center of the plane of the object to be measured, θ 1 is the incident angle of the light beam, θ 2 is the reflection angle of the light beam, and θ 1 ≈θ 2
It is 20 °.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】その先端から被測定物を担持した水平な平
板(ホ)の平面(ハ)に対して20°以上の入射角
(θ)で実質的な平行光線を照射しうるところの、他
端に照明手段が接続された光照射用光ファイバー
(イ)、その先端で当該平面(ハ)から入射角(θ
と略同一角度の反射角(θ)で反射された反射光を受
光し、受光した光線を光センサーに送達する受光用光フ
ァイバー(ロ)、該被測定物を担持した平板(ホ)をセ
ットでき、しかも該平板(ホ)を変位させてその所望範
囲に光照射させうる平板セット治具(ヘ)、及び、該平
板(ホ)の変位の大きさを測定し、その変位の大きさと
当該位置での反射光の測定値とを対応させて表示する表
示手段(ト)を有するものとともに、上記光ファイバー
(イ)と上記光ファイバー(ロ)とがθ≒θの関係
を維持して連動するようにしたことを特徴とする膜厚変
化測定装置。
1. A device capable of irradiating a substantially parallel light beam from its tip with respect to a plane (c) of a horizontal flat plate (e) carrying an object to be measured at an incident angle (θ 1 ) of 20 ° or more. , An optical fiber for light irradiation (a) having illumination means connected to the other end, and an incident angle (θ 1 ) from the plane (c) at the tip thereof
Set a light receiving optical fiber (b) for receiving the reflected light reflected at a reflection angle (θ 2 ) substantially the same as the above and delivering the received light beam to the optical sensor, and a flat plate (e) carrying the DUT. A flat plate setting jig (f) capable of displacing the flat plate (e) and irradiating the flat plate (e) with light in a desired range, and measuring the size of the displacement of the flat plate (e), The optical fiber (a) and the optical fiber (b) are interlocked with each other while having a display means (g) for displaying the measured value of the reflected light at the position in association with each other while maintaining the relationship of θ 1 ≈θ 2. A film thickness change measuring device characterized in that
JP62198016A 1987-08-10 1987-08-10 Film thickness change measuring device Expired - Lifetime JPH073388B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62198016A JPH073388B2 (en) 1987-08-10 1987-08-10 Film thickness change measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62198016A JPH073388B2 (en) 1987-08-10 1987-08-10 Film thickness change measuring device

Publications (2)

Publication Number Publication Date
JPS6441836A JPS6441836A (en) 1989-02-14
JPH073388B2 true JPH073388B2 (en) 1995-01-18

Family

ID=16384112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62198016A Expired - Lifetime JPH073388B2 (en) 1987-08-10 1987-08-10 Film thickness change measuring device

Country Status (1)

Country Link
JP (1) JPH073388B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3124251A1 (en) * 2021-06-18 2022-12-23 Safran Aircraft Engines METHOD AND DEVICE FOR DETERMINING THE THICKNESS OF A COATING BY COLORIMETRY

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113418498B (en) * 2021-06-23 2023-05-26 中国核动力研究设计院 Plate deformation measuring assembly and device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1047918A (en) * 1973-07-30 1979-02-06 General Electric Company Method and apparatus for detection and purification of proteins and antibodies
US3979184A (en) * 1975-05-27 1976-09-07 General Electric Company Diagnostic device for visually detecting presence of biological particles
JPS58122448A (en) * 1982-01-16 1983-07-21 Nippon Denshiyoku Kogyo Kk Varied-angle colorimeter
DE3215484A1 (en) * 1982-04-26 1983-11-03 Sagax Instrument AB, 18302 Täby MULTIPLE LAYERS OF LAYER AND PROCESS FOR DETECTING AND / OR MEASURING THE CONCENTRATION OF A CHEMICAL SUBSTANCE, IN PARTICULAR BIOLOGICAL ORIGIN

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3124251A1 (en) * 2021-06-18 2022-12-23 Safran Aircraft Engines METHOD AND DEVICE FOR DETERMINING THE THICKNESS OF A COATING BY COLORIMETRY

Also Published As

Publication number Publication date
JPS6441836A (en) 1989-02-14

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