JPH0735856B2 - Vacuum valve that vacuum seals around the band-shaped material - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention vacuum-seals the circumference of a strip-shaped material such as a steel plate that is continuously introduced into a vacuum chamber or continuously drawn out from the vacuum chamber. The present invention relates to a vacuum valve that maintains a vacuum inside a room.

(Prior Art) Conventionally, a strip material such as a steel plate is continuously passed through a vacuum chamber,
There is known a vacuum processing apparatus for performing a vacuum process on the band-shaped material in the vacuum chamber. In this type of apparatus, the band-shaped material of the vacuum chamber is introduced and led out in order to maintain the vacuum in the vacuum chamber. A vacuum valve a as shown in FIGS. 4 and 5 is provided in the opening to vacuum seal the periphery of the band-shaped material b. The vacuum valve a is configured by accommodating a pair of packings e that are respectively slid by sliding shafts d in a box-shaped packing case c manufactured with high dimensional accuracy. Each packing e
The sheet is housed in a packing case c with a tight fit, and both sides of the strip b are sandwiched by a sliding shaft d driven by a piston drive mechanism for vacuum sealing.

(Problems to be Solved by the Invention) In the conventional vacuum valve as described above, since the airtight contact between the packing e and the packing case c is maintained,
The packing e is housed in a box-shaped packing case c with high dimensional accuracy by tight fitting, and it is necessary to slide the packing e with strong force and in good balance when opening and closing the valve. Since a complicated piston drive mechanism for moving must be provided, the apparatus becomes expensive, and the packing is worn out, and maintenance is troublesome.

An object of the present invention is to provide a vacuum valve which does not have such inconvenience, operates lightly by a simple packing drive mechanism, and consumes the packing very little.

(Means for Solving the Problem) In the present invention, a pressure contact member that is pressed by a pair of reciprocating support members and comes into close contact with both surfaces of the strip-shaped material is provided in the opening of the vacuum chamber through which the strip-shaped material passes. A vacuum valve provided inside to vacuum seal the periphery of the strip-shaped material, wherein a pair of supporting members are provided with long holes long in the lengthwise direction of the strip-shaped material, respectively. The pressure contact members formed of rolls are axially supported, respectively, and each of the pressure contact members has a passage opening for the band members at a position facing the peripheral surface of both pressure contact members in close contact with the band members in the valve case. The above-described object is achieved by providing a valve seat having a curved surface that is approximately equal to the curvature of the roll.

(Operation) The supporting member is moved toward both sides of the belt-shaped material passing through the valve case of the vacuum valve provided in the opening of the vacuum chamber and the passage opening of the valve seat, and the pressing member composed of the roll held on the supporting member is attached. Press on both sides of the strip. Until the press-contact member comes into close contact with the strip-shaped member by the support member, each press-contact member is in a state in which it can move freely along the elongated hole and moves lightly along the valve seat, but each press-contact member becomes the strip-shaped member. When moved to the pressed position, the peripheral surface of each pressure contact member is pressed against the curved surface of the valve seat. As a result, the peripheral surface of the pressure contact member and the band-shaped member, and the peripheral surface and the valve seat are completely and reasonably shut off from each other, and the atmosphere side and the vacuum side are vacuum-sealed.

(Embodiment) An embodiment of the present invention will be described with reference to FIGS. 1 and 2 in which a band-shaped material shown in FIGS. 1 to 3 is applied to an opening for introducing the material into a vacuum chamber. Reference numeral (1) is an opening of a vacuum chamber through which the strip-shaped material (2) such as a steel plate continuously passes, and (3) is provided in the opening (1) for vacuum-sealing the periphery of the strip-shaped material (2). It is a vacuum valve provided.

The vacuum valve (3) is inserted through the valve case (4), extends inward and outward, and is composed of a pair of sliding shafts which are reciprocated by a simple and inexpensive drive means (15) such as an air cylinder. (5) and a pressure contact member (6) made of a rubber roll that is pressed by the support member (5) and is in close contact with both sides of the strip member (2). Each of the pair of supporting members (5) is integrally provided with a mounting arm (7) of a press-contacting member (6) branched into two forks, and pivotally supports a shaft (9) of the press-contacting member (6). Therefore, a long hole (8) that is long in the length direction of the strip (2) is formed at the tip of each arm (7). In the case of the first illustration, one side of the elongated hole (8) is opened, and the shaft (9) of the pressure contact member (6) is inserted from the open portion.

The pressure contact member (6) is pushed by the forward movement of the support member (5) and comes into close contact with both surfaces of the strip-shaped material (2) as shown in the second illustration. Both sides (1
The passage opening (11) for the band-shaped material (2) is located at a position opposite to (0).
And a toilet seat (13) having an arcuate curved surface (12) substantially equal to the curvature of the roll of each pressure contact member (6).
The details of the valve seat (13) are as shown in the third illustration, and the passage port (11) is formed in the middle of the ridgeline (14) where the two curved surfaces (12) intersect. In the illustrated example, the valve seat (13) is configured to also serve as the wall plate of the valve case (4), but the valve seat (13) may be provided separately from the wall plate.

In the case of this embodiment, each support member (5) is moved forward to bring the pressure contact member (6) into close contact with the strip-shaped material (2), and the strip-shaped material (2).
A vacuum seal is performed on the periphery of the support member (5) until the peripheral surface (10) of the pressure contact member (6) contacts the curved surface (12) of the valve seat (13) by its forward movement. 8) is floatingly supported by 8) and the pressure contact member (6) moves while lightly rotating along the valve seat (13), and the peripheral surface (10) of the pressure contact member (6) is a curved surface of the valve seat (13). When it comes into contact with (12), the pressure contact member (6) is guided by the elongated hole (8) to move, and the peripheral surface (10) and the curved surface (13) come into contact with each other, so that the pressure contact member (6 6) The peripheral surface (10) and the strip-shaped material (2) and between the peripheral surface (10) and the valve seat (13) are reasonably and completely isolated,
A vacuum seal is made between the atmosphere side and the vacuum side. Since the pressure contact member (6) is in a floating state, the reciprocating movement of the support member (5) can be performed with a relatively small force without losing the balance, and therefore, the drive device of the support member (5) is simple and inexpensive. Since the pressure contact member (6) is in contact with the belt-shaped member (2) and the valve seat (13) while rotating, wear is reduced.

In the above embodiment, the strip-shaped material (2) is placed in the vacuum chamber.
Although the case where the belt member (2) is introduced from the vacuum chamber has been described, the valve seat (13) is provided on the vacuum chamber side. Further, as the material of the surface of the pressure contact member (6), metal, plastic, ceramics or the like may be used depending on the application, and further, any of manual, electric, pneumatic and hydraulic can be used to drive the support member (5). May be used, and the drive speed may be changed as necessary.

(Effects of the Invention) As described above, according to the present invention, the vacuum valve provided in the opening of the vacuum chamber through which the band-shaped material passes is provided with a pair of reciprocating support members in the valve case, the length of the band-shaped member. A long hole is provided in the direction, the pressure contact member composed of a roll is axially supported in the long hole, and the band member has a passage opening at a position facing the peripheral surfaces of both pressure contact members in close contact with the band member. Since the valve seat having a curved surface approximately equal to the curvature of the roll of each pressure contact member is provided, the support member moves lightly until the pressure contact member comes into contact with the curved surfaces of the belt-shaped member and the valve seat, and the balance of the pressure contact member is lost. It is possible to reciprocate the support member with a simple and inexpensive drive device,
Since the pressure contact member makes a rotary contact with the belt-shaped member and the valve seat and seals, there is an effect that wear is reduced and durability is improved.

[Brief description of drawings]

1 is a sectional side view of an embodiment of the present invention, FIG. 2 is a sectional view taken along the line II-II of FIG. 1, FIG. 3 is a perspective view of a valve seat, and FIG. 4 is a sectional side view of a conventional example. 5 is a sectional view taken along line VV of FIG. (1) …… Opening, (2) …… Strip material (3) …… Vacuum valve, (4) …… Valve case (5) …… Supporting member, (6) …… Pressing contact member (8) …… Long hole, (9) …… Shaft (10) …… Circumferential surface, (11) …… Passage port (12) …… Curved surface, (13) …… Valve seat

Front Page Continuation (72) Inventor Masao Iguchi 1 Kawasaki-cho, Chiba-shi, Chiba Kawasaki Steel Co., Ltd. Technical Research Division

Claims (1)

[Claims] 1. A vacuum valve having a pressure contact member, which is pressed by a pair of reciprocating support members and comes into close contact with both surfaces of the strip-shaped member, in the opening of a vacuum chamber through which the strip-shaped member passes is provided in a valve case. In such a structure in which the periphery of the strip-shaped material is vacuum-sealed, long holes that are long in the lengthwise direction of the strip-shaped material are provided in the pair of support members, respectively, and a pressure-contact member composed of a roll is provided in the long hole. A curved surface having a passage opening for the strip-shaped members and a substantially equal curvature to the roll of each press-contact member is provided at a position opposed to the peripheral surfaces of both the press-contact members in the valve case, which are respectively pivotally supported and are in close contact with the strip-shaped members. A vacuum valve for vacuum-sealing the circumference of a band-shaped material, which is provided with a valve seat having.