JPH0735913B2 - Air supply device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is applied to equipment such as coating equipment that requires a comparatively clean work atmosphere, and a cleaning degree that does not adversely affect the work results. The present invention relates to an air supply device for supplying air.

[Conventional technology]

In a facility called a general clean room, 0.3 to 0.
It is designed so that it does not contain dust of μm class or more, but the coating equipment etc. need a relatively clean working atmosphere that does not contain dust of 20 μm or more.

First, the air supply duct provided in such a work facility will be described.

FIG. 4 is a diagram showing an example of a conventional air supply duct.

An intake duct 6 that connects the outside and the inside is attached to the work facility 5. This air supply duct 6 is a work facility 5
A duct body 61 having an open end provided outside, a primary filter 62 for coarse dust provided in the duct body 61, a fan 63 for sucking air, and a facility side of the duct body 61. The secondary filter 64 for fine dust was provided.

[Problems to be Solved by the Invention]

In such an air supply duct, if the dust contained in the intake air is fine and exceeds the collection performance of each filter, the dust passes through without being collected by the filter.
Therefore, the cleanliness of the air supplied from the intake duct depends on the filter performance.

It is possible to use a high density filter or increase the number of filters in order to improve the collection performance of the filter, but there is a possibility that pressure loss will occur before and after that filter and it will not be possible to obtain a regular air supply amount. There is.

Further, such a filter is always exposed to air containing dust, and the dust is collected, so that the life of the filter is shortened, so that there is a problem that the replacement frequency is increased and the running cost is increased.

The object of the present invention is to remove dust by a simple structure,
An object is to provide an air supply device that can supply clean air.

[Means for Solving the Problems]

As a result of various studies, the inventor of the present invention found that clean air can be supplied by moistening intake air containing dust and separating the air by abruptly changing the intake direction. Came to.

That is, the air supply device according to the present invention is an air supply device for supplying air containing dust that has been inhaled from the intake port through the dust removal tank by the air blowing device to supply clean air from the exhaust port. , The dust removing tank is configured by alternately arranging a plurality of shielding plates and a moistening unit that mixes air and water containing the dust with each other, and rapidly changes the flow path of the air-fuel mixture. According to the present invention, a separation section for separating clean air from the mixture is included.

The structure of the wetting portion is not particularly limited, but may be a structure that allows air containing dust to pass through a gap formed by the water surface of the water injected into the water tank and the wall surface perpendicular to the water surface. it can. By the air blower, the water surface also flows in the same direction as the air, and the water and the air are mixed, so that sufficient humidification is possible.

In addition, water can be sprayed on the dust-containing air in advance with a shower device to humidify the air.

The separation unit may have a structure in which a large number of shielding plates are alternately arranged on the inner walls of the duct that face each other and the flow path of the air-fuel mixture is rapidly changed to disperse the dust in the air. Since the dust itself contains water and its mass increases, it is possible to separate it from clean air having a light mass.

Further, a large number of the separating parts may be provided in parallel according to the air supply capacity. In addition, the length of the duct can be increased to improve cleanliness.

〔Example〕

Hereinafter, the present invention will be described in detail with reference to the drawings and the like.

FIG. 1 is a diagram showing a first embodiment of an air supply device according to the present invention, and FIG. 2 is a diagram showing an arrangement state of the first embodiment device in a working facility.

This air supply device has a structure in which air containing dust that has been sucked in through the intake port 1 passes through the dust removal tank 2 and is guided to the exhaust port 4 by the fan 3.

The dust removing tank 2 is formed by partitioning the interior of a vertically long tank main body 20 up to near the lower end by a wall 21, a first duct part 22 on the left side of the wall 21, and a water tank part 24 below the tank main body 20. , And the second duct portion 27 on the right side of the wall 1.

The first duct portion 2 is provided with an intake port 1 on the upper side wall and communicates with the outside air. A shower 23 is provided on the inner wall of the first duct portion 22 and functions to moisten the dust-containing air sucked into the first duct portion 2.

Water 25 is injected into the water tank portion 24, and the lower end 21a of the wall 21 is
A gap is formed between the water surface 25a and the water surface 25a.

The return water passage 26 is a water passage for returning the water droplets containing dust separated in the second duct portion 27 into the water tank 24. Return channel 26
Has a structure in which the upper surface is partially opened and communicates with the water tank 24.

The second duct part 27 is a part for separating clean air from the air-fuel mixture, and four shields 28A to 28D are alternately planted on the inner walls facing each other in order to rapidly change the flow of the air-fuel mixture. ing. Each of the shielding plates 28A to 28D is attached so that the tip side inclines downward, and the tips of the shielding plates 28A to 28D are further bent and bent downward.

A fan 3 for blowing air is provided at the outlet of the second duct portion 27, and the air from which the dust has been removed in the dust removing tank 2 can be sent out through the exhaust port 4.

Although the exhaust duct 4 can be used as a single unit, as shown in FIG. 2, it is further connected to the intake duct 6 similar to the conventional one, and the primary filter 62, the fan 63, and the secondary filter are connected.
It is also possible to supply highly clean air into the equipment 5 through 64.

Next, the operation of the first embodiment of the air supply device according to the present invention will be described.

By the rotation of the fan 3, the outside air is taken in through the intake port 1,
It is guided to the first duct portion 22.

In the first duct portion 22, the shower 23 sprays mist-like water to pre-wet the inhaled air containing dust.

This air is applied to the lower end 21a of the wall 21 and the water surface 2 of the water 25 in the water tank portion 24.
By passing through the gap formed with 5a,
Mixing with water produces a mixture.

Next, this air-fuel mixture is guided to the second duct portion 27 and is shielded.
By colliding with 28A, water droplets containing dust in the air-fuel mixture are separated, dropped into the return water channel 26, and the dust is precipitated in the water tank section 24.

By colliding with the shielding plates 28B to 28D while successively changing the flow path, the collision is repeated to separate clean air.

The separated clean air is guided from the exhaust port 4 through the air supply duct 6 into the equipment 5 by the fan 3.

The following measurement was performed using the apparatus of the first embodiment.
When passing only the conventional air supply duct (Fig. 4)
The removal efficiency was measured for each dust particle size when passing only the air supply device of the first embodiment (FIG. 1) and when combining them in series (FIG. 2). , The following results were obtained.

As can be seen from this result, in the case of only the conventional air supply duct, the removal effect increases as the dust particle size increases, and the air supply device of the present invention has a high removal efficiency of about 50 μm to 100 μm. I understand. Furthermore, it can be seen that it is more effective to use this device in combination with a conventional air supply duct using a filter than to use it alone.

In addition, when viewed from the absolute number of dust, 20
When the outside air mixed with 10000 dust particles of μm or more is passed only through the conventional air supply duct (Fig. 4)
In contrast, when the conventional air supply duct and the air supply device of the first embodiment were combined in series (FIG. 2), the number was reduced to 100. 20 to 50 μm mentioned above
Corresponding to the passage rate of 18% in is 0.1% in.

FIG. 3 is a diagram showing a second embodiment of the air supply device according to the present invention.

The second embodiment has a structure in which the first duct portion 22 is provided in the central portion and the second duct portions 27 are arranged on both left and right sides, and the other parts are substantially the same as those in the first embodiment.

In the second embodiment, a larger amount of air can be blown than in the first embodiment, and the dust collecting efficiency is improved due to the large number of shielding plates.

Various modifications can be made without being restricted to the embodiments described above.

For example, although the second duct has been described as being arranged in the vertical direction, it may be arranged in the horizontal direction.

〔The invention's effect〕

As described in detail above, according to the present invention, after moistening the air containing dust, it is made to separate only clean air by colliding with the shielding plate, so that a simple configuration can be easily achieved. It is possible to obtain clean air.

Furthermore, if it is used together with an air supply duct using a conventional filter, there is an effect that more clean air can be supplied and the life of the filter can be extended.

[Brief description of drawings]

FIG. 1 is a diagram showing a first embodiment of an air supply device according to the present invention, and FIG. 2 is a diagram showing an arrangement state of the first embodiment device in a working facility. FIG. 3 is a diagram showing a second embodiment of the air supply device according to the present invention. FIG. 4 is a diagram showing an example of a conventional air supply duct. 1 ... Intake port 2 ... Dust removal tank 20 ... Tank body, 21 ... Wall 22 ... First duct part, 23 ... Shower 24 ... Water tank part, 25 ... Water 26 ... Return water channel, 27 ...... Second duct part 28 ...... Shield plate 3 ...... Fan 4 ...... Exhaust port 5 ...... Equipment 6 ...... Air supply duct

Claims (1)

[Claims] 1. Dust-containing air sucked from an intake port,
An air supply device for passing clean air through a dust removal tank by an air blower and supplying clean air from an outlet, wherein the dust removal tank mixes air and water containing the dust with a mixture gas. An air supply device comprising: a moisturizing section for activating the air and a plurality of shielding plates alternately arranged to rapidly change the flow path of the air-fuel mixture to separate clean air from the air-fuel mixture.