JPH0736126B2 - Placement moving actuator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an exposure apparatus which is one of semiconductor memory manufacturing apparatuses, a processing machine using an electron beam or an ion beam, an inspection apparatus for an LSI, and an electron microscope. (SEM), Scanning Tunneling Microscope (STM), Micromechanism, Microlens manufacturing equipment, etc. or medical biotechnology such as cell manipulation and cell microinspection. The present invention relates to a mounting body moving actuator for moving a positioning table or another mounting body.

[Conventional technology]

Conventionally, by mounting a test sample or a work piece on a moving table and moving the moving table in the X and Y directions, the test sample placed on the moving table can be inspected or There was a technique for adding processing to the processed body.

FIG. 29 is a first conventional example showing such a conventional technique and is a perspective view showing the structure of a moving stage. The moving stage 1 shown in FIG. 1 moves an X stage 2 on which a sample to be inspected, an object to be processed, etc., and a Y stage supporting the X stage in directions orthogonal to each other to move the mounting body. X, Y
Configured to move in a direction. The X stage 2 and the Y stage 3 are slidably held by two guide rails 4 and 5, respectively. Then, by rotating each feed screw mechanism 6 by a rotary type motor 7, 8 such as a DC motor, the rotary motion of the motor is converted into a linear motion, and X and Y directions to the X stage 2 and the Y stage 3 are converted. Is given as a driving force to.

The moving stage 1 having the above structure has a high rigidity of the moving stage 1 itself and is hardly influenced by external vibration, and the moving distance of the X stage 2 and the Y stage 3 is long.

FIG. 30 is a perspective view showing a configuration of a moving stage which is a second conventional example. The movable stage 10 shown in the figure has a fixed base 13 through four notch springs 12a to 12d at four corners of the XY stage 11.
It is fixed to. Under the XY stage 11, metal balls 16 are arranged at four places to support the XY stage 11. One end of each of the laminated piezoelectric actuators 14 and 15 is fixed to two orthogonal inner walls of the fixed base 13, and the other end, that is, the displacement end is in contact with each of the two side walls of the XY stage 11 facing the inner wall. ing.

The movable stage 10 having the above-mentioned configuration applies the voltage to the laminated piezoelectric actuators 14 and 15 to generate the XY stage 11
Can be accurately moved in the X and Y directions. By adjusting the magnitude of the voltage applied to the laminated piezoelectric actuators 14 and 15, the displacement amount in the X direction and the Y direction can be adjusted. Moreover, this moving stage
The piezoelectric actuator 10 has the advantage of quick response because it is of the piezoelectric actuator drive type. Furthermore, since a single table can be moved in the X and Y directions on the same plane, the moving stage 10 can be made thin.

[Problems to be Solved by the Invention]

The first conventional example is excellent in rigidity and moving distance (displacement amount), but the guide rails 4, 5 and the feed screw mechanism 6 are inserted into the insertion holes provided in the X stage 2 and the Y stage 3. Therefore, rattling is likely to occur between the guide rails 4 and 5 and the insertion holes, and between the feed screw and the insertion holes, and the movement position accuracy is poor. Further, since it is a motor drive system, it has a drawback of poor response.
Particularly, since the X stage 2 and the X stage fixing base are mounted on the Y stage 3, the response becomes worse than that of the X stage 2. Furthermore, since the X and Y stages have a double structure, there is a drawback that the size of each part becomes large and the device becomes large.

The second conventional example has an advantage that it is small (thin type), high moving position accuracy can be obtained, and response is good, but the guides for moving the XY stage 11 are notched springs 12a-1.
Since it uses 2d, it has low rigidity and is easily affected by external vibration. Moreover, since the amount of displacement of the notch springs 12a to 12d beyond the elastic deformation limit cannot be obtained, the moving distance of the XY stage 11 is limited. As a result, it is suitable for a small moving stage that requires high accuracy, but cannot be used as a large moving stage that requires a relatively large amount of displacement, and is used only for a limited range of applications. I couldn't.

Therefore, an object of the present invention is to obtain a large displacement amount, with high accuracy and good response, less susceptible to external vibrations, thin and compact, and a mounting body X In other words, it is an object of the present invention to provide a mounting body movement actuator that can perform not only movement in the Y direction but also rotation operation.

[Means for Solving the Problems]

The present invention has taken the following means in order to solve the above problems and achieve the object. That is, a plurality of ultrasonic vibrators each including a vibrating body having a liquid curved surface in the length direction and a piezoelectric element that excites vibration in the vibrating body are combined in a grid shape so that the vibrating bodies do not contact each other, and the wavy shape is formed. The curved wave heads are arranged in a matrix on the same plane, and the mounting body is arranged so as to contact these wave heads.

[Action]

By taking the above means, the following effects are exhibited.
That is, when vibrations excited by a piezoelectric element are generated in a vibrating body having a wavy curved surface in the longitudinal direction that is combined in a lattice shape so as not to contact each other, the waves arranged in a matrix of the vibrating body having the wavy curved surface are generated. Driving force is generated on the head. Therefore, by causing the driving force to be generated in each of the wave heads, the mounting body arranged in contact with the wave heads can be moved in any direction.

〔Example〕

Before specifically explaining the embodiments of the present invention, the driving principle of the mounting body moving actuator according to the present invention will be described.

The feature of the present invention is that the structure of the conventional moving stages 1 and 10 shown in FIGS. 29 and 30 drives one actuator (7,8,14,15) per axis mounted on the side wall of the stage. On the other hand, a large number of driving force generating elements that generate forces in the X, Y directions or rotation directions are regularly arranged in a matrix on the same plane and placed on the driving force generating elements arranged in this way. The point is that the mounted mounting body is displaced by frictional force or electrostatic force.

FIG. 1 is a diagram showing an array state of dot-like driving force generating elements P. As shown in the figure, a large number of dot-like driving force generating elements P are regularly arranged in a matrix so as to form the same plane on the fixed base 20. By controlling the voltage applied to the dot-like driving force generating elements P arranged in this manner, the driving force in each direction is generated in each driving force generating element P. The driving principle by the point-like driving force generating element P is the same as the principle of the ultrasonic motor. That is, electric power is supplied to the point-shaped driving force generating element P to generate an elliptic displacement in each driving generating element P by inverse piezoelectric displacement,
The mounting body is pressed against the portion where this elliptical displacement has occurred.
Then, the mounting body is displaced in the X direction, the Y direction, or the rotation direction due to the frictional force between the point-shaped driving force generating element P and the mounting body.

FIG. 2 is a diagram showing an array state of the planar driving force generating elements Q. As shown in the figure, a planar driving force generating element Q
Are regularly arranged in a matrix on the fixed table 30. The driving principle by the above-mentioned planar driving force generating element Q is
It is the same as the principle of the electrostatic motor. That is, a voltage is applied to the electrodes formed on the fixed base 30 to generate an electric field, an electrostatic attractive force is generated between the electrode and the surface of the mounting body mounted thereon, and this electrostatic attractive force is controlled. To do. Then, the mount is X
Displace in direction, Y direction or rotation direction.

Next, referring to FIG. 3 to FIG. 7, a dot-shaped driving force generating element P
The driving principle by the method will be described in more detail.

FIG. 3 is a diagram showing the driving principle of the ultrasonic motor. As shown in the figure, the piezoelectric elements 24 and 25 are attached to the lower ends of the elastic body 23 in the form of a slender plate supported by the vibration absorbers 21 and 22, and the elasticity between the piezoelectric elements 24 and 25 is set. The mounting body 26 is mounted on the body 23. The elastic body 23 is made of a ferromagnetic material such as iron, and the mounting body 26 is partially or entirely made of a permanent magnet.

Thus, the piezoelectric element 24 is driven to generate a bending vibration wave that advances to the right in the drawing in the elastic body 23 as indicated by an arrow M, and at the same time, absorbs the vibration of the bending vibration wave generated in the elastic body 23. As described above, when the piezoelectric element 25 is driven, an elliptic motion is generated at each mass point P1 to P4 on the elastic body 23, as shown in FIG. This elliptic motion is a counterclockwise rotating elliptic motion in the figure.
Therefore, when the mounting body 26 is pressed with an appropriate pressing force by the magnetic force on the elastic body 23 performing such a movement,
Due to the frictional force on the contact surface between the mass points P1 and P2 and the mounting body 26, the mounting body 26 moves to the left in the figure as indicated by the arrow M.

FIG. 5 is a diagram showing a driving principle of an ultrasonic linear motor when a thin plate-shaped vibrating body having a wavy curved surface (hereinafter referred to as a wavy elastic body) is used. As shown in the figure, both ends of the wavy elastic body 27 are supported by the vibration absorbers 21 and 22, and piezoelectric elements 24 and 25 are attached near both ends of the wavy elastic body 27. In such a configuration, when the piezoelectric element 24 is driven so as to generate a bending vibration wave and the piezoelectric element 25 is driven so as to absorb this bending vibration wave, the liquid elastic body 27
Each mass point of does a spheroidal motion. At this time, the wavy elastic body
When the period of the bending vibration wave generated in 27 is increased and the amplitude thereof is decreased, the wave crests P5 to P7 of the wavy elastic body 27 perform the spheroidal motion similar to that shown in FIG. Therefore, when the plate-shaped mounting body 28 is pressed against the wavy elastic body 27 performing such a motion, the tops of the spheroidal motions generated in the plate-shaped mounting body 28 and the wave heads P5, P6, P7. Due to the frictional force with the plate-shaped mounting body 28, the plate-shaped mounting body 28 moves leftward in the drawing as indicated by an arrow N.
Further, even if a plurality of such wave-like elastic bodies 27 are arranged in parallel and the plate-like placing body 28 is placed so as to straddle on the liquid elastic body 27, the plate-like placing body 28 is formed into a wavy shape. The elastic body 27 can be moved in the length direction. Note that the piezoelectric element 25 is driven so as to generate a bending vibration wave, and the piezoelectric element 24 is driven so as to absorb the bending vibration wave that is generated, so that the plate-shaped mounting body 28 is reversed to the right in the figure. Can be moved in any direction. In addition, two wavy elastic bodies 27 are provided in parallel, and the bending vibration waves generated in the respective wavy elastic bodies are made to travel in opposite directions, so that the wavy elastic bodies 27 are placed so as to straddle over the two wavy elastic bodies. The mounted body can be rotated.

FIG. 6 is a view showing a state in which a plurality of wavy elastic bodies 27 are arranged so as to be orthogonal to each other. As shown in the figure, the bottoms of the wavy elastic bodies Y1 to Y4 are located at the respective vertices of the wavy elastic bodies X1 to X4, and the wavy elastic bodies X1 to X4 are located at the respective vertices of the wavy elastic bodies Y1 to Y4.
Each bottom is located. That is, the wavy elastic bodies X1 to X4
And the wavy elastic bodies Y1 to Y4 are woven orthogonally to each other, and the wave crests Pij of the wavy elastic bodies X1 to X4 and Y1 to Y4 are all located on the same plane.

FIG. 7 shows a wave-like elastic body X1 woven as shown in FIG.
It is the figure which showed typically the state seen from the top of X4 and Y1-Y4. Here, a bending vibration wave is generated in the corrugated elastic bodies X1 to X4 to generate a driving force in the A direction at the wave crests P11, P13, P22, P24, P31, P33, P42, P44. To perform. By doing so, the mounting body can be moved to the right (A direction) in the drawing. Wavy elastic bodies Y1 to Y4
A bending vibration wave is generated in the wave front, and the wave heads P12, P14, P21, P23, P3
2, P34, P41, P43 are caused to perform a rotating elliptic motion so that a driving force in the B direction is generated. By doing so, the mounting body can be moved in the vertical direction (B direction) in the drawing.
Further, a bending vibration wave is simultaneously generated in the wavy elastic bodies X1 to X4 and Y1 to Y4, and a spheroidal motion is generated in each of the wave crests P11, P12 ... P43, P44 so that a driving force in the C direction is generated. That is, a driving force in the A direction is generated at each of the wavefronts P11, P22, P31, P42 of X1 and X2, and each of the wavefronts P13, P24, P23, P of X3, X4 is generated.
A driving force in the −A direction is generated at 44, and a driving force in the B direction is generated at each of the crests P12, P14, P21, and P23 of Y1 and Y2.
A driving force in the -B direction is generated at the wavefronts P22, P24, P41, P43 of 3,3. By doing so, the mounting body can be rotated.

Next, the driving principle of the planar driving force generating element Q shown in FIG. 2 will be described with reference to FIGS.

FIG. 8 is a diagram showing a principle of generating an electrostatic force which is a driving source of the planar driving force generating element Q. As shown in the figure, the electrode plate
31 and 32 are made to face each other with their facing positions being offset and parallel to each other. Then, the lead wires 33a, 33b are attached to the two electrode plates 31, 32.
A voltage is applied from the DC power supply 34 via the. Then, a force F is generated in the surface direction of the electrode plates 31, 32. This force F is proportional to the square of the dielectric constant of the dielectric material interposed between the electrode plates 31 and 32 and the applied voltage. By arranging a large number of such electrode pairs (31, 32) and performing multi-phase driving, a linear motor or a rotary motor can be manufactured. Here, the electrode plate 31 and
The capacitance C between 32 and C is C = ε ₀ xl / z. Note epsilon ₀ is (using epsilon ₀ · .epsilon.r instead of epsilon ₀ when the film of the dielectric constant .epsilon.r) dielectric constant of a vacuum, the length of the portion x overlaps the electrode plate 31 and 32,
z is the distance between the electrode plates 31 and 32, and l is the width of the electrode plates 31 and 32 in the longitudinal direction. The electrostatic energy We that may accumulate between the electrode pair (31, 32) becomes We = CV ^2/2. Note that V is an applied voltage. In addition, the force Fx acting in the X direction in the figure is Becomes Therefore, the electrostatic force F acting in the surface direction of the electrode plates 31 and 32 does not depend on the overlapping width x of the electrode plates 31 and 32, and a larger electrostatic force acts in the X direction as the distance z between the electrode plates decreases. . The electrostatic attractive force Fz acting in the Z direction is Becomes As is clear from the equation (2), the electrostatic attractive force Fz (interelectrode plate attractive force) acting in the Z direction has a magnitude proportional to the magnitude of x.

Therefore, according to the equations (1) and (2), if z is reduced and the distance between the electrode plates 31 and 32 is narrowed, the accumulated energy per unit volume can be increased.

FIG. 9 is a diagram showing a state in which a large number of electrode pairs, which are the basic elements, are arranged as a mechanical drive source. As shown in the figure, electrode plates 35a to 35c, 36a to 36c, 37a having a width d on the fixed base 40 are provided.
~ 37c are arranged at a predetermined interval. And electrode plates 35a-35
Connect c to the same potential and connect to terminal A1. The electrode plates 35a to 35c are called a set AS. Electrode plate in the same way
Connect 36a to 36c so that they have the same potential and connect them to terminal B1, and use this as the set BS, and connect electrode plates 37a to 37c so that they have the same potential and connect them to terminal C1 and set this. Make with CS. At this time, an interval of d / 3 is provided between the set AS and the set BS, and an interval of 7d / 3 is provided between the set BS and the set CS. For the set AS, BS, CS formed in this way,
The mounting bodies 50 are arranged at a fixed distance. An electrode array 5 including a plurality of electrode plates 51a, 51b ... Is mounted on the mounting body 50.
1 is provided. The electrode plates 51a, 51b ... Forming the electrode array 51 each have a width d, and the electrode plates 51a, 51b ... Are arranged on the substrate 52 at a distance d. A medium (not shown) having a relative permittivity εr and a small viscous resistance is interposed between the sets AS, BS, CS and the electrode array 51.

Each terminal A1, B1, C1 of the set AS, BS, CS configured as above
The three-phase voltages AV1, BV2, CV3 shown in FIG. Then, the electrode plates 35a ~ 35c, 3 of the set AS, BS, CS
Of the electrode plates of 6a to 36c, 37a to 37c and the electrode plate 51a of the electrode array 51, the electrode plates facing each other are displaced by the force Fx, and the mounting body 50 moves to the right in the figure. Moving. Similarly,
When the three-phase voltages AV4, BV5, CV6 shown in FIG. 11 are applied to the terminals A1, B1, C1 of the sets AS, BS, CS, respectively, the mounting body 50 moves leftward in the figure.

FIG. 12 (a) is a diagram showing an example of the driving force generating element Q. One set of the driving force generating element 41 is formed by arranging the sets AS, BS, CS shown in FIG. 9 for two cycles. ing. As shown in FIG. 12 (b), the set AS which constitutes the driving force generating element 41 is arranged so that electrode plates 35a, 35b, 35c ... With a width d are arranged in a stripe pattern at intervals d. And each electrode plate 35a
Each one end is connected by a bridge portion 43 so that the stripe portions 42 composed of ~ 35c have the same potential. Set BS, C
S and the like have the same configuration. An electrode composed of the striped portion 42 and the bridge portion 43 is hereinafter referred to as a striped electrode. Further, on the driving force generating element 41, the bridge portion 43
The dielectric film 44 is formed in the region excluding. The number of sets and the number of electrode plates are set as needed.

FIG. 13 is a diagram showing a state in which a large number of rectangular driving force reaction generating elements 41 each composed of a striped electrode group are arranged on the fixed base 40. As shown in the figure, the driving force generating elements 41a and 41b adjacent to each other are arranged so that their long side directions are orthogonal to each other. The shape of the driving force generating elements 41a, 41b ... Is determined by the width and length of the electrode plates forming the striped electrodes, the spacing between the electrode plates, and the number of striped electrodes.

FIG. 14 is a plan view showing a surface of the mounting body facing the fixed base. As shown in the figure, on the surface of the substrate 52 facing the fixed base 40, the driving force generating element 41 is divided into four areas, each of which has a stripe-shaped electrode group a1, a2, b1 and b2 are arranged. In the striped electrode group aa, a2, electrode plates having a width d are arranged in a stripe shape in the left-right direction in the figure at intervals of d, and a bridge portion 53a is provided at one end of the electrode plate arranged in the stripe shape. Has been formed. In the striped electrode groups b1 and b2, electrode plates having a width d are arranged in a striped pattern at a distance d in the left-right direction in the drawing,
A bridge portion 53b is formed at one end of the electrode plate arranged in a stripe shape.

Such a mounting body 50 is mounted so as to fit in the area indicated by the broken line in FIG. At this time, the striped electrodes of the driving force generating elements 41 arranged on the fixed base 40 and the striped electrodes of the striped electrode groups a1, a2, b1, b2 of the mounting body 50 are arranged so as to be parallel to each other. . Then, an electrostatic force corresponding to the displacement acts on the opposing surfaces of the fixed base 40 and the mounting body 50. Here, when a voltage is applied to the driving force generating element 41a arranged laterally to ground the striped electrode groups b1 and b2, and the striped electrode groups a1 and a2 are electrically floated, the mounting body 5
0 receives a force in the left-right direction and moves in the left-right direction. When a voltage is applied to the driving force generating element 41b arranged vertically, the stripe electrode groups a1 and a2 are grounded, and the stripe electrode groups b1 and b2 are electrically floated, the mounting body 50 moves up and down in the figure. Move in the direction. Further, the driving force generating element 41 placed sideways
By selecting a part of a and a part of the driving force generating element 41b arranged vertically, the three-phase voltage AV shown in FIGS. 10 and 11 is selected.
Apply 1 to CV3 or AV4 to CV6. Then, the mounting body
50 can be rotated. In this case, since the opposing striped electrodes are opposed to each other with a certain angle difference, complicated control is required. Regarding the linear movement in the X and Y directions, as long as the striped portions of the striped electrodes that face each other face each other in parallel, a driving force is generated and a large amount of displacement can be obtained. In addition, the width of the striped electrode plates, the spacing between the electrode plates, the frequency of the applied voltage,
The accuracy determined by the frictional force or the like on the contact surface of the mounting body 50 can be about 1/10 to 1/100 μm depending on the voltage control method and the configuration of the closed system. Furthermore, since the electrostatic attraction that is generated acts as a suction force in a direction perpendicular to the moving surface of the mounting body 50, it is necessary to apply a pressing force to the moving body using a special means such as an ultrasonic linear motor. There is no.

Next, examples of the present invention will be specifically described.

15 and 16 are a perspective view and a side sectional view showing a first embodiment of the present invention. The present embodiment is an example using a point-like driving force generating element P. A drive absorption sheet 62 made of a material such as silicon rubber or felt is placed at the center of the base 61.
16 Wavy elastic bodies X1 to X4 and Y1 laid as shown in the figure and woven on the vibration absorbing sheet 62 as shown in FIG.
~ Install Y4. The wavy elastic bodies X3 and X4 are not shown. Both ends of the wavy elastic bodies X and Y are fixed by support members 63a and 63b for absorbing vibrations generated in the wavy elastic bodies X and Y and support members 63c and 63d (not shown). A mounting body 64 is mounted on the same plane formed by the wave crests of the wavy elastic bodies X and Y. A friction layer 65 made of a polyamide-based friction member or a coated inorganic film is formed on the contact surface of the mounting body 64 with the wave crests. Base
A U-shaped pressing member 66 for pressing the placing body 64 against the corrugated head is attached to the outer peripheral edge of the 61. Pressing member 66
A space sufficient to accommodate the movement of the mounting body 64 is provided between the mounting body 64 and the mounting body 64. The mounting body 64 is pressed by a spherical member 67 rotatably attached to the pressing member 66.

FIG. 17 is a diagram showing the structure of the wavy elastic bodies X and Y. As shown in the figure, PZT (lead zirconate titanate) piezoelectric ceramic plates 71, 72 ... Are bonded along the curved surfaces of the wavy elastic bodies X, Y. Each of the piezoelectric ceramic plates 71, 72 ... Has a length of λ / 2 with respect to the wavelength λ of the applied voltage, and adjacent piezoelectric ceramic plates such as the piezoelectric ceramic plates 71, 72 have polarization directions different from each other. Are arranged in the opposite direction. In addition, the central portions of the wavy elastic bodies X and Y are provided with a deviation of a length of λ / 4, and both ends are formed with a portion of 3λ / 8 where the piezoelectric ceramic plate is not attached. Then, the piezoelectric ceramic plates attached to the left halves of the wavy elastic bodies X and Y are respectively connected and connected to one terminal 73, and the piezoelectric ceramic plates on the right half are respectively connected and connected to the other terminals 74. . Further, a common terminal 75 is provided on the wavy elastic bodies X and Y.

In the wavy elastic body X, Y configured as above, when the common terminal 75 is grounded and two AC voltages having a phase difference of 1/4 cycle are applied through the terminals 73 and 74, the wavy elastic body X, Y A bending vibration wave is generated in Y. Therefore, when the AC frequency applied to the resonance frequency of the wavy elastic bodies X and Y is matched, the elliptic motion performed by each mass point on the liquid elastic bodies X and Y exhibits the maximum amplitude. Therefore, the maximum output can be obtained by applying such an AC frequency.

FIG. 18 is a diagram showing how to attach a flat piezoelectric ceramic plate. When the flat piezoelectric ceramics 81 to 84 are attached, the flat piezoelectric ceramics 81 to 84 are subjected to flattening so that the attachment points become flat. Then, the bonded planar piezoelectric ceramics 81 to 84 are connected to each other by a lead wire 85. In addition, as shown in FIG. 19, the piezoelectric ceramics 9
1 to 94 are ground into a corrugated shape, electrodes 95 and 96 are baked on the corrugated piezoelectric ceramics 91 to 94, island electrodes are formed, and the voltage ceramics are polarized. At this time, the adjacent piezoelectric ceramics 91 to 94 are polarized such that the adjacent piezoelectric ceramics 91 to 94 are opposite to each other in polarization direction. After polarization in this way, the electrode is removed, and a full surface electrode is formed on the entire surface of the piezoelectric ceramic plates 91 to 94 by the direction such as vacuum deposition.

Thus, according to the first embodiment, the liquid elastic bodies X1 to X4 and Y1 are
Since ~ Y4 is woven to form a large number of point-like driving force generating elements on the same plane, the mounting body 64 can be freely moved in the X direction, the Y direction, and the rotation direction.
It is possible to obtain a continuous displacement due to the spheroidal movement instead of the stepwise displacement. Moreover, since a pressing force is constantly applied to the mounting body 64, the backlash can be suppressed to a very small level, and the resolution thereof can be remarkably improved as compared with the conventional one using a motor having magnetic poles. You can Further, since the driving force can be received as long as the mounting body 64 is in contact with the wave crests of the wavy elastic bodies X and Y, the displacement amount can be made sufficiently large. Furthermore, since the driving system is basically a piezoelectric element, the response is very good. Furthermore, since the distance from the wave crests to the bottoms of the wavy elastic bodies X and Y is relatively small, it is possible to manufacture a thin moving stage.

In the first embodiment, the pressing member 66 is pressed against the mounting body 64.
Although the pressing force is applied by means of, the pressing member 66 can be omitted by substituting the pressing force with a magnetic attraction force, and the structure can be simplified.

FIG. 20 is a perspective view of a ring-shaped ultrasonic motor used as the driving force generating element Q of the second embodiment of the present invention. The ring-shaped ultrasonic motor 100 shown in the figure is a ring-shaped elastic body 101.
And a ring-shaped piezoelectric element 102 fitted to the inner circumference of the ring-shaped elastic body 101. The ring-shaped elastic body 101 is made of a material such as phosphor bronze, SUS, Al, etc., and the ring-shaped piezoelectric element 102 is adhered to the inner periphery of the ring-shaped piezoelectric element 102 using epoxy resin or the like. A ring-shaped piezoelectric element
102 is polarized by applying electrodes. Like the conventional ultrasonic motor, this polarization treatment is performed by arranging electrodes so as to form two islands with a space of λ / 4 and 3λ / 4, and a two-phase voltage shifted by 1/4 cycle. Are applied respectively. Note that λ is the wavelength of the applied voltage.

FIG. 21 is an example of an actuator using the two ring-shaped ultrasonic motors 100a and 100b thus created. As shown in the figure, two ring-shaped ultrasonic motors 100
The a and 100b are installed so that the radial direction of the ring is vertical with respect to the fixed base 103 and that they are oriented in the same direction. Note that a part of the ring-shaped elastic body 101 of each motor 100a, 100b is fixed in a state of being embedded in the fixing base 103. The mounting body 104 is mounted on the link-shaped ultrasonic motors 100a and 100b.

In such a state, two ring-shaped ultrasonic motors
A drive voltage is applied to 100a and 100b. Then, a bending traveling wave is generated by the ring-shaped elastic body 101 and the ring-shaped piezoelectric element 102, and a spheroidal motion is generated on the outer peripheral surface of the ring-shaped elastic body 101. As a result, the moving body 104 moves in the left-right direction in the drawing.

FIG. 22 is a diagram showing a state in which a large number of ring-shaped ultrasonic motors 100 are arranged on the fixed base 103. As shown in the figure, adjacent ring-shaped ultrasonic motors Aij and Bij are arranged such that their radial directions are orthogonal to each other. It is assumed that the moving body 104 is mounted on the ring-shaped ultrasonic motor group arranged in this way as in the case of FIG.

When only Aij of the ring ultrasonic motor group is driven, the moving body 104 moves in the horizontal direction in the figure, and when only the ring-shaped ultrasonic motor Bij is driven, the moving body 104 moves in the vertical direction in the figure. Moving. Further, for example, by driving A11 and A13 leftward, driving A31 and A33 rightward, driving B21 downward, and driving B23 upward, the movable body 104 is rotated counterclockwise around A22. Can be rotated.

As described above, according to the second embodiment, it is possible to obtain the same effect as that of the first embodiment, and it is possible to further cause the moving body 104 to perform various movements.

FIG. 23 is a sectional view showing the structure of the third embodiment of the present invention. This embodiment is an example in which a planar driving force generating element Q is used, and is composed of a fixed base 140 and a mounting body 150. The driving principle of the planar driving force generating element has already been described in detail, and will be omitted. The fixing base 140 is formed on the through-hole substrate 111 made of a material such as alumina or zirconia that is dense and has a surface smoothness of 0.2 μm or less.
A striped electrode 141 is formed by arranging 75 pairs of electrode plates having a length of 10 μm and a length of 4 mm in a striped pattern at intervals of 10 μm. The striped portions 142 of the striped electrode 141 are joined together by a bridge portion 143, and the bridge portion 143
To the through-hole electrode section 112. The striped electrodes are arranged as shown in FIG. That is, the next striped electrode (set BS) is separated from the right edge of the rightmost electrode plate by d / 3.
Are placed. For each striped electrode, 75 pairs of electrode plates having the same size are arrayed in a striped pattern at similar intervals. Then, the next striped electrode (set CS) is arranged 7d / 3 apart from the edge of the electrode plate located at the rightmost end of the set BS. The electrode plates of each set are electrically coupled to each other by the bridge portion 143, and are led to the nearest through-hole electrode portion. As shown in Fig. 13, such a striped electrode group is used to
The electrode patterns are formed on 140 so that adjacent electrodes do not contact each other and are orthogonal to each other. In order to form the electrode pattern as described above, a hole is formed in the through hole substrate 111, and electroless plating for applying a conductive substance is applied to the side wall of the hole. Then, one surface is mirror-polished, and a gold or platinum electrode is formed to a uniform thickness on the entire surface of this mirror-polished surface by a sputtering method or the like. Next, a photoresist is applied, dried, and exposed and etched using a photomask capable of forming a striped electrode as shown in FIGS. 13 and 14. Then, the dielectric film 144 is formed on the bridge portion 143 and all portions except the region on the side of the through hole electrode 112 from the bridge portion 143. It is desirable that the material of the dielectric film 144 has a large relative permittivity εr, a large withstand voltage, and a small dielectric loss tan δ. Therefore, a film having such a property is formed by sputtering using barium titanate as a mask, for example. At this time, the board is 50
It is preferable to heat to 0 ° C to 700 ° C. In this way, the fixed base (stator) 140 is created. The dielectric film 144
The material does not have to be barium titanate, and may be a material such as lead titanate or PZT. The film forming method is not limited to the sputtering method, and may be a sol-gel method, a CVD method, or the like.

The mounting body 150 has basically the same configuration as that of the mounting body 50 shown in FIG.
Electrode patterns similar to the striped electrode groups a1, a2, b1, b2 shown in the figure are formed. That is, width 10 μm, length 2 m
The groups a1, a2 and b1, b2 formed by arranging 10000 m electrode plates in a stripe pattern at intervals of 10 μm have a pattern in which their longitudinal directions are arranged at right angles to each other. On the outside of the striped electrode 151 formed by each group, a bridge portion 15 that bridges each electrode plate is formed.
3 is formed. The substrate 152 is thinner by several μm than the surroundings so that the portion where the bridge portion 153 is formed has a different height (lower) than the other portions. By setting the distance between the edge portion of the striped electrode 141 on the fixed base 140 side and the edge portion of the striped electrode 151 on the mounting body 150 side larger than the distance between the electrode plates of the striped electrode, or Dielectric film 144 on the edge
This prevents the bridge portion and the stripe portion 155 from intersecting each other and preventing the electric field from concentrating there. A thin solid lubricating film 154 for reducing the frictional force is provided on the striped electrode 151 on the mounting body 150 side.

According to the third embodiment, the same effect as that of the first embodiment can be obtained, and since the electrostatic force acts between the mounting body 150 and the fixed base 140, the pressing force is applied to the mounting body 150. There is no need to add specially, and the configuration is simplified. Further, since the solid lubricating film 154 is provided on the striped electrode 151 on the fixed base 140 side,
The loss due to friction is small, a large output can be obtained, and the durability can be improved. Furthermore, since the dielectric film 144 is provided except for the bridge portion 143 on the fixed base 140 side, concentration of the electric field can be prevented, and the mounting body 150 can be prevented.
Can be moved smoothly.

24 to 28 are sectional views showing modifications of the third embodiment. In the modification shown in FIG. 24, a bridge portion of a stripe-shaped electrode (hereinafter referred to as a fixed-base electrode) 141 formed on a fixed base 140 is a stripe-shaped electrode (hereinafter referred to as a mounted body) formed on a mounting body 150. At a portion of the electrode 151, which intersects the stripe portion 155, the fixed base electrode 141 and the mounting body electrode 151 are kept at a distance. As the mounting body 150, the bridge portion 153 and the stripe portion 142 of the fixed base electrode 141 are used.
In order to separate the fixed base electrode 141 and the mounting body electrode 151 at the intersection of and, the mounting body configured similarly to the mounting body 150 used in the third embodiment is used. A dielectric film 145 is formed on the fixed base electrode 141 of the fixed base 140 and the substrate 111. The dielectric film 145 is made thicker than that of the third embodiment by performing overlapping sputtering so that only the stripe portion of the electrode does not suffer pattern discharge. The dielectric film 145 has a step corresponding to the thickness of the fixed base electrode 141, but has a uniform thickness as a whole.

According to such a modification, the same effect as that of the third embodiment can be obtained, and since it is not necessary to use a mask for forming the dielectric film 145, the dielectric film 145 can be formed efficiently. Moreover, the work process can be simplified.

Note that, as shown in FIG. 25, the dielectric film 146 may be formed only on the stripe-shaped electrode 141 portion, and the electrode 151 on the mounting body 150 side may be thickened only on the stripe portion 155 portion.

Further, as shown in FIG. 26, a solid lubricating film 162 is formed on the electrode 141 and the substrate 111 where only the stripe portion on the fixed base 140 side is thick, and the dielectric material is formed on the stripe portion 155 on the mounting body 150 side. The film 163 may be formed.

Further, as shown in FIG. 27, a solid lubricant 171 which also serves as a dielectric is formed on the fixed base 140 side in a thin film of about 1 μm by, for example, MOS ₂₄ , and the dielectric property of the solid lubricant 171 is positively used as the dielectric 163. You may want to use it.

Furthermore, as shown in FIG. 28, when the mounting body 180 is a volume like a block, an electrode 181 and a lubricant 182 are formed on the outer surface of the bottom, and this is mounted on the fixing base shown in the third embodiment. You may make it mount on 140.

The present invention is not limited to the embodiments described above, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

〔The invention's effect〕

According to the present invention, a plurality of ultrasonic transducers including a vibrating body having a wavy curved surface in the length direction and a piezoelectric element for exciting the vibrating body in a lattice are combined in a lattice shape so that the wave crests of the wavy curved surface are on the same plane. They are arranged in a matrix on the top, and the mounting body is arranged so as to come into contact with these wave crests, so a large amount of displacement can be obtained, high accuracy, good response, and external influences. It is difficult to receive and can be downsized,
Furthermore, it is possible to provide a mounting body movement actuator that can perform not only movement in the X and Y directions but also rotation operation.

[Brief description of drawings]

1 to 14 are diagrams showing a driving principle of a mounting body moving actuator according to the present invention. FIG. 1 is a diagram showing an arrangement state of dot-like driving force generating elements, and FIG. Showing the arrangement of the driving force generating elements of FIG. 3, FIG. 3 is a view showing the basic configuration of the ultrasonic motor, and FIG. 4 is a diagram showing bending vibration waves generated in the elastic body of the ultrasonic motor shown in FIG. Fig. 5 is a diagram showing a basic configuration of an ultrasonic motor using a wavy elastic body,
FIG. 6 is a view showing a state in which a plurality of wavy elastic bodies are arranged so as to be orthogonal to each other, and FIG. 7 is a view schematically showing a state in which the plurality of wavy elastic bodies shown in FIG. 6 are viewed from above, FIG. 8 is a diagram showing a principle of generation of electrostatic attraction generated by a planar driving force generating element, and FIG. 9 is an arrangement state of striped electrodes provided on a fixed base and a mounting placed so as to face the fixed base. FIG. 10, FIG. 10 and FIG.
Fig. 11 is a diagram showing the waveform of the three-phase voltage for driving, Fig. 12 (a)
Is a diagram showing the configuration of a planar driving force generating element, FIG. 12 (b)
Is a plan view showing a part of the striped electrode, FIG. 13 is a plan view showing the surface of a fixed base on which a large number of rectangular driving force generating elements are arranged, and FIG. 14 is a mounting on which a striped electrode group is formed. It is a top view which shows the surface of a body. FIGS. 15 to 19 are views specifically showing the first embodiment of the present invention. FIG. 15 is a perspective view, FIG. 16 is a sectional view, and FIG. 17 is a side view showing the structure of a wavy elastic body. FIG. 18 is a side view of the wavy elastic body to which the planar piezoelectric ceramics are attached, and FIG. 19 is a side view of the wavy elastic body to which the wavy piezoelectric ceramics are attached. 20 to 22 are views specifically showing the second embodiment of the present invention. FIG. 20 is a perspective view of a ring-shaped ultrasonic motor, and FIG. 21 is upright and fixed on a fixing base. FIG. 22 is a side view showing the ultrasonic motor and the mounting body, and FIG. 22 is a plan view showing a state in which a large number of ring-shaped ultrasonic motors are arranged on a fixed base. FIG. 23 is a side sectional view showing the structure of the third embodiment of the present invention, and FIGS. 24 to 28 are side sectional views showing the structure of the modification of the third embodiment.
29 and 30 are perspective views showing the structure of a conventional moving stage. 20,30,40,103,140 …… Fixed base, 21,22 …… Vibration absorber, 2
3,28 …… Plate-shaped elastic body, 24,25 …… Piezoelectric element, 26,5
0,64,104,150,180 …… Mounting body, 27 …… Wavy elastic body, 31,3
2,35a ~ 35c, 36a ~ 36c, 37a ~ 37c ... electrode plate, 34 ... direct current power supply, 41 ... driving force generating element, 42, 142, 155 ... stripe section, 43, 53a, 53b, 143, 153 ... bridge section, 61: base, 62: vibration absorbing sheet, 63a, 63b ... support member, 65
...... Frictional layer, 66 ...... Pressing member, 71,72 ...... Piezoelectric ceramics, 81 to 84 ...... Plane piezoceramics, 85 ...... Lead wire, 91 to 94 ...... Liquid piezoceramics, 95,96 ... Electrodes, 100 ... Ring-shaped ultrasonic motors, 101 ... Ring-shaped elastic bodies, 102 ... Ring-shaped piezoelectric elements, 111 ... Through-hole substrates, 112 ... Through-hole electrodes, 141, 151 ... Striped electrodes , 144,145,146,163 …… Dielectric film, 154,162
...... Solid lubrication film.

Claims (1)

[Claims] 1. A plurality of ultrasonic vibrators, each of which is composed of a vibrating body having a liquid curved surface in the lengthwise direction and a piezoelectric element for exciting the vibrating body in a lattice form, so that the vibrating bodies do not contact each other. A mounting body moving actuator, characterized in that the wave fronts of the liquid curved surface are arranged in a matrix on the same plane, and the mounting body is arranged so as to be in contact with these wave fronts.