JPH0736650B2 - Gas switch - Google Patents
Gas switchInfo
- Publication number
- JPH0736650B2 JPH0736650B2 JP62067640A JP6764087A JPH0736650B2 JP H0736650 B2 JPH0736650 B2 JP H0736650B2 JP 62067640 A JP62067640 A JP 62067640A JP 6764087 A JP6764087 A JP 6764087A JP H0736650 B2 JPH0736650 B2 JP H0736650B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- switch
- processing unit
- body case
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000354 decomposition reaction Methods 0.000 claims description 21
- 239000011148 porous material Substances 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 44
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 5
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 238000000746 purification Methods 0.000 description 3
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 3
- 229960000909 sulfur hexafluoride Drugs 0.000 description 3
- 229910018503 SF6 Inorganic materials 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 1
- 239000005935 Sulfuryl fluoride Substances 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000005180 public health Effects 0.000 description 1
- OBTWBSRJZRCYQV-UHFFFAOYSA-N sulfuryl difluoride Chemical compound FS(F)(=O)=O OBTWBSRJZRCYQV-UHFFFAOYSA-N 0.000 description 1
- LSJNBGSOIVSBBR-UHFFFAOYSA-N thionyl fluoride Chemical compound FS(F)=O LSJNBGSOIVSBBR-UHFFFAOYSA-N 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Gas-Insulated Switchgears (AREA)
Description
【発明の詳細な説明】 発明の目的 （産業上の利用分野） この発明はSF6よりなる絶縁性ガスを封入したガス開閉
器に関するものである。Detailed Description of the Invention (Industrial field of application) The present invention relates to a gas switch which is filled with an insulating gas of SF 6 .
（従来の技術） 従来、この種のガス開閉器の電気開閉部において相間短
絡等の事故によりアークが発生した場合、SF6（６弗化
硫黄）よりなる絶縁性ガスによって消孤させ、ケース内
の圧力上昇に伴って放圧蓋を開放して、本体ケースの破
裂を防止するようになっている。(Prior Art) Conventionally, when an arc occurs due to an accident such as a phase-to-phase short circuit in an electric switch of this type of gas switch, it is extinguished by an insulating gas made of SF 6 (sulfur hexafluoride) and As the pressure rises, the pressure relief lid is opened to prevent the main body case from bursting.
（発明が解決しようとする問題点） ところが、従来のガス開閉器におけるSF6よりなる絶縁
ガスのアーク熱による分解生成物には、極めて微量では
あるが、SF4（４弗化硫黄），F2（弗素），SO2（亜硫酸
ガス）,HF（弗化水素），SOF2（弗化チオニル），SO2F2
（弗化スルフリル）等の有毒ガスが含まれており、事故
発生時にはそれらが外部へ放出されて公衆衛生を害する
おそれがあり、このため、例えば、実公昭49−26439号
公報に示されるように、放圧用の破裂板の前方にSF6分
解生成物を排除するために活性アルミナなどを吸着剤と
した吸着フィルタを設けていた。しかし、前記吸着フィ
ルタは、吸着剤をフィルタケース内に充填したものであ
るため、ガスの通過が局部的に偏り易く、分解生成物の
排除能力が不安定であった。(Trying invention solve that problem) However, the decomposition products arc heat insulating gas consisting of SF 6 in a conventional gas switch, there is an extremely small amount but, SF 4 (4 sulfur fluoride), F 2 (fluorine), SO 2 (sulfurous acid gas), HF (hydrogen fluoride), SOF 2 (thionyl fluoride), SO 2 F 2
Containing toxic gases such as (sulfuryl fluoride), there is a risk that they will be released to the outside in the event of an accident and harm public health. Therefore, for example, as shown in Japanese Utility Model Publication No. 49-26439. In front of the rupture disc for pressure release, an adsorption filter using activated alumina as an adsorbent was provided to eliminate SF 6 decomposition products. However, since the adsorption filter has an adsorbent filled in the filter case, the passage of gas is likely to be locally biased, and the ability to remove decomposition products is unstable.
この発明は上記の問題点を解消するためになされたもの
であって、その目的はガス開閉器に相間短絡等の事故が
発生した時、高圧化したガスを外部へ速やかに放出する
とともに、絶縁性ガスからの分解生成物が外部に放出さ
れることを抑制して安全性を向上させることが可能なガ
ス開閉器を提供することにある。The present invention has been made to solve the above problems, and its purpose is to promptly release a high-pressure gas to the outside when an accident such as a phase short circuit occurs in a gas switch and to provide insulation. It is intended to provide a gas switch which can improve the safety by suppressing the decomposition products from the volatile gas to be released to the outside.
発明の構成 （問題点を解決するための手段） 上記の目的を達成するために、この発明では、開閉器の
本体ケース（１）内に電気開閉部を収容して、SF6より
なる絶縁性ガスを封入し、放圧蓋（３）の前方に前記絶
縁性ガスの分解生成物を排除する処理ユニット（16）を
前記放圧蓋（３）に対向して配置したガス開閉器におい
て、前記処理ユニット（16）は、本体ケース（１）内に
取り付けた隔壁（13）に設けた筒状ホルダ（14）に嵌合
固定し、さらに、この処理ユニット（16）を、同一大の
多数の細孔を備えたハニカム状に形成するとともに少な
くとも細孔の内周面をγ−アルミナ等のSF6分解生成物
の吸着性に優れた物質よりなる処理層（17）としてい
る。Configuration of the Invention (Means for Solving the Problems) In order to achieve the above-mentioned object, in the present invention, an electrical switch part is housed in a switch case body (1), and an insulating property of SF 6 is provided. A gas switch in which a processing unit (16) for enclosing gas and removing decomposition products of the insulating gas in front of the pressure release lid (3) is arranged facing the pressure release lid (3), The processing unit (16) is fitted and fixed to a cylindrical holder (14) provided on a partition wall (13) mounted in the main body case (1), and the processing unit (16) is provided in a large number in the same size. The treatment layer (17) is formed in a honeycomb shape having pores, and at least the inner peripheral surface of the pores is made of a substance having excellent adsorptivity for SF 6 decomposition products such as γ-alumina.
（作用） 分解生成物を排除する処理ユニットを隔壁に設けた筒状
ホルダに嵌合するようにしたので、開閉器への処理ユニ
ットの組付が簡単になり、又、この処理ユニットをハニ
カム状に形成してガスが通過する細孔の内周面を分解生
成物の吸着性に優れた処理層としたので、放圧蓋に向か
う放出ガスの流通や分解生成物の排除機能が安定化す
る。(Function) Since the processing unit for removing the decomposition products is fitted into the cylindrical holder provided on the partition wall, the assembly of the processing unit to the switch is simplified, and the processing unit is formed into a honeycomb shape. Since the inner peripheral surface of the pores formed on the inner surface of the pores is a treatment layer with excellent adsorption of decomposition products, the circulation of the released gas toward the pressure relief lid and the function of eliminating decomposition products are stabilized. .
（実施例） 以下、この発明を具体化した一実施例を図面に従って詳
細に説明する。(Embodiment) An embodiment of the present invention will be described in detail below with reference to the drawings.
第１図及び第２図に示すように、ガス開閉器の本体ケー
ス１には電気開閉部（図示略）が収容され、その側壁1a
には開口２が形成されている。この開口２には皿状をな
す放圧蓋３がパッキング４を介して装着されている。該
放圧蓋３の外周には四方へ放射状に突出する取付片５が
設けられ、各取付片５にはその突出方向へ延びる長孔5a
が形成されている。そして、各長孔5aに挿通された本体
ケース１に螺着された４個のボトル６により、前記放圧
蓋３が本体ケース１に固定され、本体ケース１内の圧力
が上昇した時には、各取付片５の基端近傍が自身の弾性
に抗して変形され、それに伴い各長孔5aに沿って各取付
片５が放圧蓋３の中心へ向って移動されると同時に放圧
蓋３が開口２から離脱し、開口２が開放される。As shown in FIGS. 1 and 2, an electric switch (not shown) is housed in the main body case 1 of the gas switch, and a side wall 1a thereof is housed therein.
An opening 2 is formed in the. A plate-shaped pressure release lid 3 is attached to the opening 2 via a packing 4. Mounting pieces 5 are provided on the outer circumference of the pressure release lid 3 so as to radially project in four directions, and each mounting piece 5 has an elongated hole 5a extending in the projecting direction.
Are formed. Then, the pressure release lid 3 is fixed to the main body case 1 by the four bottles 6 screwed into the main body case 1 inserted into the respective long holes 5a, and when the pressure in the main body case 1 rises, The vicinity of the base end of the mounting piece 5 is deformed against its own elasticity, and accordingly, each mounting piece 5 is moved toward the center of the pressure release lid 3 along each long hole 5a, and at the same time, the pressure release lid 3 is moved. Separates from the opening 2 and the opening 2 is opened.
前記放圧蓋３に突設された支柱７にはボルト８によりカ
バー９が取着され、そのカバー９によって前記放圧蓋３
が覆われている。一方、本体ケース１の周壁1bには通気
管11と封栓12などをもってなる密閉栓10が設けられ、該
密閉栓10を介してSF6ガスが本体ケース１内に充填され
る。A cover 9 is attached to a column 7 protruding from the pressure release lid 3 with a bolt 8, and the cover 9 is used to attach the cover 9.
Is covered. On the other hand, the peripheral wall 1b of the main body case 1 is provided with a sealing plug 10 including a ventilation pipe 11 and a sealing plug 12, and SF 6 gas is filled into the main body case 1 through the sealing plug 10.
前記密閉栓10と放圧蓋３との間において、この放圧蓋の
前方に位置して本体ケース１の内部には中央に開口13a
を有する側壁13が取付けられている。該開口13aの外周
において隔壁13の右側面には筒状ホルダ14が突設され、
その筒状ホルダ14の外周には中央に開口15aを有する蓋
体15が着脱可能に螺着されている。前記隔壁13、筒状ホ
ルダ14及び蓋体15によって区画された空間Ｓ内には処理
ユニット16が前記放圧蓋３の前方に位置して着脱可能に
収容されている。Between the sealing plug 10 and the pressure release lid 3, the main body case 1 is positioned in front of the pressure release lid and has an opening 13a in the center thereof.
Is attached to the side wall 13. A cylindrical holder 14 is projectingly provided on the right side surface of the partition wall 13 on the outer periphery of the opening 13a,
A lid 15 having an opening 15a in the center is detachably screwed to the outer circumference of the cylindrical holder 14. In the space S defined by the partition wall 13, the cylindrical holder 14 and the lid body 15, a processing unit 16 is located in front of the pressure release lid 3 and is detachably accommodated therein.
この処理ユニット16はセラミックス或いは鉄−クロム合
金等の金属がハニカム状に形成されて、第３図に示すよ
うい同一大の６角筒状の細孔をなす多数の構成単位16a
を備えている。又、該構成単位16aは左右両端において
開口するガス通路Ｐを形成し、ガスの通路となる各構成
単位16aの内周面には後記するSF6分解生成物の吸着性に
優れたγ−アルミナを焼付けてなる処理層17が形成され
ている。This processing unit 16 is made of a ceramic or a metal such as an iron-chromium alloy in a honeycomb shape, and has a large number of structural units 16a having hexagonal cylindrical pores of the same size as shown in FIG.
Is equipped with. Further, the structural unit 16a forms a gas passage P which is open at both left and right ends, and the inner peripheral surface of each structural unit 16a which serves as a gas passage has excellent γ-alumina excellent in adsorbing SF 6 decomposition products described later. A processed layer 17 formed by baking is formed.
なお、SF6分子の極性は小さいため、そのガス中に処理
ユニット16が配置されても、SF6分子が処理層17に吸着
されることはない。Since the SF 6 molecules have a small polarity, even if the processing unit 16 is placed in the gas, the SF 6 molecules are not adsorbed by the processing layer 17.
さて、上記のように構成されたガス開閉器において、本
体ケース１内の電気開閉部で相間短絡等の事故によりア
ークが発生し、本体ケース１内の圧力が上昇すると、取
付片５の基端部近傍が自身の弾性に抗して変形され、そ
れに伴って放圧蓋３が開口２から離脱するとともに、各
取付片５が長孔5aに沿って放圧蓋３の中央へ向かって移
動される。その結果開口２が開放され、内圧上昇に伴う
本体ケース１の破裂が未然に防止される。Now, in the gas switch configured as described above, when an arc occurs due to an accident such as a phase-to-phase short circuit in the electric switch in the body case 1 and the pressure in the body case 1 rises, the base end of the mounting piece 5 The vicinity of the part is deformed against its own elasticity, and accordingly the pressure release lid 3 separates from the opening 2, and each attachment piece 5 is moved toward the center of the pressure release lid 3 along the long hole 5a. It As a result, the opening 2 is opened, and the rupture of the main body case 1 due to the increase in internal pressure is prevented.
又、前記の事故発生に伴い、第４図に示すように、SF6
がアーク熱によって分解され、SF4及びF2が生成され
る。これらの一次分解生成物の内、SF4は水分と反応し
てHF及びSO2を生成する。さらに、SO2はF2と反応してSO
F2及びSO2F2を生成するとともに、さらに水分と反応し
てH2SO3を生成する。Further, with the accident of the, as shown in FIG. 4, SF 6
Is decomposed by arc heat to generate SF 4 and F 2 . Of these primary decomposition products, SF 4 reacts with water to produce HF and SO 2 . Furthermore, SO 2 reacts with F 2 to generate SO 2.
It produces F 2 and SO 2 F 2 , and further reacts with water to produce H 2 SO 3 .
上記のようにして生成された一次分解生成物SF4，F2，
二次分解生成物HF,SO2及び三次分解生成物SOF2，SO
2F2，H2，SO3は有害であるが、本体ケース１の内方から
開放された放圧蓋３へ向い処理ユニット16の多数の細孔
を通過して移動する間に、各分解生成物自身の極性によ
り、処理ユニット16の処理層17に吸着される。従って、
有毒な分解生成ガスが外部に放出されることを未然に防
止することができ、又、放出ガスの通路を同一大の多数
の細孔により形成しているので、ガスの流通や分解生成
物の吸着による排除能力が安定化してガス開閉器の安全
性をより一層向上させることができる。The primary decomposition products SF 4 , F 2 , produced as described above,
Secondary decomposition products HF, SO 2 and tertiary decomposition products SOF 2 , SO
Although 2 F 2 , H 2 and SO 3 are harmful, they are decomposed while moving through the large number of pores of the processing unit 16 from the inside of the main body case 1 to the open pressure release lid 3. Due to the polarity of the product itself, it is adsorbed on the treatment layer 17 of the treatment unit 16. Therefore,
It is possible to prevent the toxic decomposition product gas from being released to the outside, and since the passage of the release gas is formed by a large number of pores of the same size, gas flow and decomposition products The removal capacity by adsorption is stabilized, and the safety of the gas switch can be further improved.
ちなみに、一般的なガス開閉器において６弗化硫黄から
分解生成されるガスの総濃度は約100〜300ppmである
が、その分解生成ガスの内、代表的な２種類のガス（H
F,SO2）について、前記γ−アルミナの処理層17を有す
る処理ユニット16による浄化処理能力を実験的に確認し
た。この実験では、処理ユニット16に供給されるガスの
濃度と、そのガスが処理ユニット16を通過した後の濃度
とを共に測定し、次式によって浄化処理率を算出した。By the way, the total concentration of the gas decomposed and produced from sulfur hexafluoride in a general gas switch is about 100 to 300 ppm.
Regarding F, SO 2 ), the purification treatment capacity of the treatment unit 16 having the γ-alumina treatment layer 17 was experimentally confirmed. In this experiment, the concentration of the gas supplied to the treatment unit 16 and the concentration after the gas passed through the treatment unit 16 were both measured, and the purification treatment rate was calculated by the following equation.
処理率（％）＝（供給濃度−残留濃度）／供給濃度×10
0 その結果、第５図に示すHFの場合、供給濃度が100ppm以
下である時には完全に浄化することができ、第６図に示
すSO2の場合、供給濃度が2,000ppm以下である時に完全
に浄化することができた。Treatment rate (%) = (supply concentration-residual concentration) / supply concentration x 10
0 As a result, in the case of HF shown in FIG. 5, it can be completely purified when the supply concentration is 100 ppm or less, and in the case of SO 2 shown in FIG. 6, it can be completely purified when the supply concentration is 2,000 ppm or less. I was able to purify.
又、本発明では、前記分解生成ガスが処理層17を通過す
る間に冷却作用を受けるので、ガスの高温放出を抑制で
きる。Further, in the present invention, since the decomposition product gas is subjected to the cooling action while passing through the treatment layer 17, high temperature emission of the gas can be suppressed.
（別の実施例） この発明を具体化した別の実施例について説明すると、
この実施例では図示しないが処理ユニット16全体をγ−
アルミナによって一体形成することにより、放出ガスの
通路となる細孔の内周面を前記処理層17とした点におい
て前記実施例と異なっている。この別においても前記実
施例と同様に処理ユニット16による浄化処理能力を実験
的に確認したところ、SO2の場合2,000ppm以下の供給濃
度で90％以上浄化することができた。従って、この別の
実施例においても前記実施例と同様に事故発生時に有毒
な分解生成ガスが通過中に前記細孔の内周面に吸着され
て外部に放出されることを未然に防止することができ、
ガス開閉器の安全性をより一層向上させることができ
る。(Other Embodiment) Another embodiment of the present invention will be described.
In this embodiment, although not shown, the entire processing unit 16 is
It is different from the above embodiment in that the treatment layer 17 is formed on the inner peripheral surface of the pores which are the passages of the released gas by integrally forming the alumina. In this case as well, when the purification treatment capacity of the treatment unit 16 was experimentally confirmed in the same manner as in the above example, it was possible to purify 90% or more at a supply concentration of 2,000 ppm or less in the case of SO 2 . Therefore, in this other embodiment as well, similar to the above embodiment, it is possible to prevent the toxic decomposition product gas from being adsorbed to the inner peripheral surface of the pore and being released to the outside during passage in the event of an accident. Can
The safety of the gas switch can be further improved.
発明の効果 以上詳述したようにこの発明は、放出ガスの経路にハニ
カム状の処理ユニットを設けてガス開閉器に相間短絡等
の事故によるアークが発生した時、絶縁性ガスからの分
解生成物が外部に放出されることを未然に防止するとと
もに、放出ガスの流通を安定化することができ、アーク
熱により高圧化したケース内のガスが速やかに放出され
て、ガス開閉器の安全性を向上させることができるとい
う優れた効果を発揮する。Effects of the Invention As described in detail above, the present invention provides a decomposition product from insulating gas when an arc due to an accident such as a phase short circuit is generated in a gas switch by providing a honeycomb-shaped processing unit in the path of the released gas. It is possible to prevent the gas from being released to the outside, stabilize the flow of the released gas, and quickly release the gas in the case whose pressure has been increased due to the arc heat, thus ensuring the safety of the gas switch. It has an excellent effect that it can be improved.
第１図はこの発明を具体化したガス開閉器の一実施例を
示す側面図、第２図は第１図におけるＡ−Ａ線断面図、
第３図は処理ユニットの部分拡大断面図、第４図は分解
生成ガスの生成過程を示す説明図、第５図及び第６図は
それぞれ実験結果を示すグラフである。 １…本体ケース、３…放圧蓋、13…隔壁、14…筒状ホル
ダ、16…処理ユニット、17…処理層。FIG. 1 is a side view showing an embodiment of a gas switch embodying the present invention, FIG. 2 is a sectional view taken along the line AA in FIG.
FIG. 3 is a partially enlarged cross-sectional view of the processing unit, FIG. 4 is an explanatory view showing a generation process of decomposition product gas, and FIGS. 5 and 6 are graphs showing experimental results, respectively. DESCRIPTION OF SYMBOLS 1 ... Main body case, 3 ... Pressure release lid, 13 ... Partition wall, 14 ... Cylindrical holder, 16 ... Processing unit, 17 ... Processing layer.
Claims (1)
を収容して、SF6よりなる絶縁性ガスを封入し、放圧蓋
（３）の前方に前記絶縁性ガスの分解生成物を排除する
処理ユニット（16）を前記放圧蓋（３）に対向して配置
したガス開閉器において、 前記処理ユニット（16）は、本体ケース（１）内に取り
付けた隔壁（13）に設けた筒状ホルダ（14）に嵌合固定
し、さらに、この処理ユニット（16）を、同一大の多数
の細孔を備えたハニカム状に形成するとともに少なくと
も細孔の内周面をγ−アルミナ等のSF6分解生成物の吸
着性に優れた物質よりなる処理層（17）としたことを特
徴とするガス開閉器。1. A main body case (1) of a switch, wherein an electric switch is housed, an insulating gas made of SF 6 is enclosed, and the insulating gas is decomposed and produced in front of a pressure relief lid (3). In a gas switch in which a processing unit (16) for removing a substance is arranged so as to face the pressure release lid (3), the processing unit (16) is mounted on a partition wall (13) mounted in the main body case (1). The treatment unit (16) is fitted and fixed to the provided cylindrical holder (14), and the treatment unit (16) is formed into a honeycomb shape having a large number of pores of the same size, and at least the inner peripheral surface of the pores is γ- A gas switch, characterized in that the treatment layer (17) is made of a substance having excellent adsorption properties for SF 6 decomposition products such as alumina.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62067640A JPH0736650B2 (en) | 1987-03-20 | 1987-03-20 | Gas switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62067640A JPH0736650B2 (en) | 1987-03-20 | 1987-03-20 | Gas switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63234812A JPS63234812A (en) | 1988-09-30 |
| JPH0736650B2 true JPH0736650B2 (en) | 1995-04-19 |
Family
ID=13350799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62067640A Expired - Lifetime JPH0736650B2 (en) | 1987-03-20 | 1987-03-20 | Gas switch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0736650B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS537620Y2 (en) * | 1972-06-06 | 1978-02-27 | ||
| JPS5859308U (en) * | 1981-10-16 | 1983-04-21 | 株式会社日立製作所 | gas insulated switchgear |
-
1987
- 1987-03-20 JP JP62067640A patent/JPH0736650B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63234812A (en) | 1988-09-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH07308538A (en) | Hazardous gas purifier | |
| JP2000254438A (en) | Treatment, treating agent and treating device for halogen fluoride-containing waste gas | |
| JPH0736650B2 (en) | Gas switch | |
| US5804146A (en) | Chemical oxygen generator | |
| JPH09225301A (en) | Method for purifying fumigation exhaust gas and catalyst therefor | |
| JP3340510B2 (en) | Hazardous gas purification method | |
| KR101115206B1 (en) | Processing method of exhaust gas and processing apparatus of exhaust gas | |
| JPH0693339B2 (en) | Gas switch | |
| RU95113142A (en) | Catalyst for treatment gases containing sulfur compounds and a method of treatment of the indicated gas | |
| JP4952413B2 (en) | Etching exhaust gas treatment apparatus and etching exhaust gas treatment method | |
| JP2000024457A (en) | DECREASING SYSTEM FOR ClF3-CONTAINING WASTE GAS | |
| JP3516716B2 (en) | Purification method of trifluoromethane | |
| JP4334004B2 (en) | Plasma discharge reactor and gas treatment device | |
| JPS63151608A (en) | Purification of nitrogen trifluoride gas | |
| US3411879A (en) | Purification of aqueous hydrochloric acid | |
| WO2009040396A1 (en) | Adsorption box for single distillation column within the insulating enclosure | |
| JPS60150819A (en) | Filter | |
| KR102318490B1 (en) | Purification method and purification unit for carbon dioxide gas | |
| JP2571176B2 (en) | Removal method of CVD exhaust gas | |
| JP3708262B2 (en) | Toxic gas removal method | |
| JPH0417082B2 (en) | ||
| CN211753216U (en) | Moisture filtering device for inert gas | |
| US3337302A (en) | Desulfurization of chlorine | |
| JPH10192644A (en) | Deodorizing device | |
| KR100264050B1 (en) | Gas purifier |