JPH0740359B2 - Method of manufacturing magnetic recording medium - Google Patents
Method of manufacturing magnetic recording mediumInfo
- Publication number
- JPH0740359B2 JPH0740359B2 JP26699986A JP26699986A JPH0740359B2 JP H0740359 B2 JPH0740359 B2 JP H0740359B2 JP 26699986 A JP26699986 A JP 26699986A JP 26699986 A JP26699986 A JP 26699986A JP H0740359 B2 JPH0740359 B2 JP H0740359B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording medium
- film
- tape
- lubricant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 16
- 238000000576 coating method Methods 0.000 claims description 9
- 230000005294 ferromagnetic effect Effects 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229920006254 polymer film Polymers 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 12
- 239000010408 film Substances 0.000 description 9
- 239000000314 lubricant Substances 0.000 description 9
- 239000010409 thin film Substances 0.000 description 6
- 238000001035 drying Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 229910020630 Co Ni Inorganic materials 0.000 description 2
- 229910002440 Co–Ni Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910020647 Co-O Inorganic materials 0.000 description 1
- 229910020704 Co—O Inorganic materials 0.000 description 1
- 229910020517 Co—Ti Inorganic materials 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 229910018553 Ni—O Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- XUDJZDNUVZHSKZ-UHFFFAOYSA-N methyl tetracosanoate Chemical compound CCCCCCCCCCCCCCCCCCCCCCCC(=O)OC XUDJZDNUVZHSKZ-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006290 polyethylene naphthalate film Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する強磁性金属薄膜を磁気
記録層とする磁気記録媒体の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic recording medium having a ferromagnetic metal thin film suitable for high density magnetic recording as a magnetic recording layer.
従来の技術 高密度磁気記録に適する強磁性金属薄膜を磁気記録層と
する磁気記録媒体は、磁気記録層を電子ビーム蒸着法,
スパッタリング法等で形成したのち、トップコート層を
溶液塗布法,真空蒸着法等で配したものを所定の寸法に
加工して得られる〔例えば電子通信学会磁気記録研究会
試料,MR81−2(1981),特開昭57−189331号,特開昭5
7−150136号,特開昭57−179948号,特開昭61−126627
号,特開昭61−11930号,特開昭61−151835号,特開昭6
1−151837号等の公報参照〕。2. Description of the Related Art A magnetic recording medium using a ferromagnetic metal thin film suitable for high-density magnetic recording as a magnetic recording layer has a magnetic recording layer formed by an electron beam evaporation method,
After being formed by a sputtering method or the like, the top coat layer is provided by a solution coating method, a vacuum deposition method or the like and processed into a predetermined size [for example, the Institute of Electronics and Communication Engineers Magnetic Recording Research Group sample, MR81-2 (1981 ), JP-A-57-189331, JP-A-5
7-150136, JP-A-57-179948, JP-A-61-126627
No. 6, JP-A-61-1930, JP-A-61-151835, JP-A-Sho 6
References such as 1-151837).
トップコート層の重要性の認識は最近になり特に高ま
り、材料について多くの提案がなされている。The importance of the topcoat layer has recently been particularly recognized, and many proposals have been made for materials.
特に耐久性の向上目的として、ダイアモンド状炭素膜,
プラズマ重合膜,SiO2スパッタ膜,MoS2スパッタ膜と潤
滑剤の積層型が注目されている。Especially for the purpose of improving durability, diamond-like carbon film,
Attention has been focused on plasma polymerized film, SiO 2 sputtered film, MoS 2 sputtered film and laminated type of lubricant.
潤滑剤のコーティングは、有機蒸着法よりも量産性にす
ぐれる湿式の溶液塗布法で行われることが多く、この方
法では、潤滑剤と溶剤の組み合わせ、乾燥条件により最
適化をはかっている。Lubricant coating is often carried out by a wet solution coating method, which has better mass productivity than the organic vapor deposition method. In this method, optimization is attempted depending on the combination of the lubricant and solvent and the drying conditions.
発明が解決しようとする問題点 しかしながら上記した構成では、高温,多湿な環境下で
くり返し用いると、潤滑剤が減少して十分な潤滑作用が
なくなるために、雑音が増大したり、スチル特性が低下
するといった問題や、くり返し使用後高温,多湿で長時
間保存するとドロップアウトが増大する問題があり改善
が望まれていた。本発明は上記した事情に鑑み、なされ
たもので、耐久性,耐候性の改良された磁気記録媒体を
得るのに適した製造方法を提供するものである。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in the above-mentioned configuration, when repeatedly used in a high temperature and high humidity environment, the amount of lubricant decreases and the sufficient lubricating action disappears, so noise increases and the still characteristic deteriorates. Therefore, there is a problem that the dropout increases when stored at high temperature and high humidity for a long time after repeated use, and improvement is desired. The present invention has been made in view of the above circumstances, and provides a manufacturing method suitable for obtaining a magnetic recording medium having improved durability and weather resistance.
問題点を解決するための手段 上記した問題点をするため、本発明の磁気記録媒体の製
造方法は、高分子フィルム上に配した強磁性金属薄膜上
に溶液塗布法にて潤滑剤を配した後、オゾン処理するも
のである。Means for Solving the Problems In order to solve the above-mentioned problems, in the method for producing a magnetic recording medium of the present invention, a lubricant is arranged on a ferromagnetic metal thin film arranged on a polymer film by a solution coating method. After that, ozone treatment is performed.
作用 本発明の磁気記録媒体の製造方法は、上記した構成によ
り、潤滑剤と強磁性金属薄膜の反応が進行し、強固に付
着するのと、オゾンの酸化作用で強磁性金属薄膜で酸化
の程度が弱い部分を補強するので、耐候性も改善されそ
の作用は潤滑剤の反応付着を伴うものと考えられるので
改善度合も大きいのである。Action The method for producing a magnetic recording medium of the present invention has the above-described configuration, in which the lubricant and the ferromagnetic metal thin film undergo a reaction to firmly adhere to each other, and the degree of oxidation of the ferromagnetic metal thin film by the oxidizing action of ozone. Since it reinforces the weak portion, the weather resistance is also improved, and its action is considered to be accompanied by the reactive adhesion of the lubricant, so the degree of improvement is large.
実施例 以下、本発明の実施例について図面を参照しながら詳し
くて説明する。図は本発明を実施するのに用いたオゾン
処理装置である。図で1は処理用基板で、高分子フィル
ム上に強磁性金属薄膜を配しその上に容液塗布法で潤滑
剤を配したものである。高分子フィルムとしてはポリエ
チレンテレフタレート,ポリフェニレンサルファイド,
ポリイミド,ポリカーボネート等が適しており、強磁性
金属膜としては、電子ビーム蒸着法,スパッタリング法
等で形成された0.05〜0.2μm程度のCo−Cr,Co−Ti,Co
−Mo,Co−O,Co−Ni,Co−Fe,Co−Cr−Nb,Co−Ni−O等の
高保磁力膜が用いられる。溶液塗布法は、潤滑剤を容剤
に溶かして、それをリバースロールコータ,バーコータ
等で塗布,乾燥させるもので、潤滑剤としては、脂肪
酸,脂肪酸エステル,脂肪酸アミド,弗素化合物,シリ
コーン油,等の単独又は混合剤で、特別制限はない。Examples Hereinafter, examples of the present invention will be described in detail with reference to the drawings. The figure shows an ozone treatment apparatus used for carrying out the present invention. In FIG. 1, reference numeral 1 denotes a processing substrate in which a ferromagnetic metal thin film is arranged on a polymer film and a lubricant is arranged thereon by a solution coating method. Polymer films include polyethylene terephthalate, polyphenylene sulfide,
Polyimide, polycarbonate, etc. are suitable, and as the ferromagnetic metal film, Co-Cr, Co-Ti, Co having a thickness of about 0.05 to 0.2 μm formed by electron beam evaporation method, sputtering method or the like is used.
A high coercive force film such as -Mo, Co-O, Co-Ni, Co-Fe, Co-Cr-Nb, Co-Ni-O is used. The solution coating method is a method in which a lubricant is dissolved in a dispersant, which is then coated with a reverse roll coater, bar coater, etc., and dried. There is no special limitation, either alone or as a mixture.
2は送り出し軸、3は巻取り軸、4はコーティングヘッ
ドを模式的に示したもので5は乾燥炉で、熱風乾燥方式
が適している。6はオゾン処理槽で7は電子ビーム発生
器である。8は回転ローラで、オゾン発生法は、電子ビ
ームを加速して、チタン箔などから大気中に取出して、
空気中の酸素からオゾンを製造する方法に限らず、気中
放電による等、方法による差はない。Reference numeral 2 is a feeding shaft, 3 is a winding shaft, 4 is a coating head, and 5 is a drying furnace, and a hot air drying method is suitable. Reference numeral 6 is an ozone treatment tank, and 7 is an electron beam generator. 8 is a rotating roller, the ozone generation method, by accelerating the electron beam, taken out from the titanium foil into the atmosphere,
The method is not limited to the method of producing ozone from oxygen in the air, and there is no difference between the methods, such as by air discharge.
但し、電子ビーム照射の効果を加えることも条件によっ
ては出来るのは勿論であるが、オゾンによる作用効果が
大きい。However, it is needless to say that the effect of electron beam irradiation can be added depending on the conditions, but the effect of ozone is large.
更に具体的に実施例について説明する。厚み12μmのポ
リエチレンテレフタレートフィルム上に、2×10-4(To
rr)の酸素中で、Co−Ni(Ni,20wt%)を最小入射角36
度で斜め蒸着し、0.15μm,保磁力1000(Oe)のCo−Ni−
O膜を配し、トルエンに溶かしたステアリン酸を乾燥後
4mg/m2となるように塗布し、オゾン処理したものをテー
プA,オゾン処理なしのものをテープBとして準備した。
オゾン処理は、厚み15μmのチタン箔より200KVに加速
した電子ビームを0.04mA/cm2で取り出し、発生させたオ
ゾン雰囲気に50m/minでさらしたものである。オゾン濃
度は6000ppmとした。Examples will be described more specifically. On a polyethylene terephthalate film with a thickness of 12 μm, 2 × 10 -4 (To
rr) in oxygen, Co-Ni (Ni, 20wt%) with a minimum incident angle of 36
Obliquely deposited at a rate of 0.15 μm and a coercive force of 1000 (Oe) Co-Ni-
After placing the O film and drying the stearic acid dissolved in toluene,
A tape A was prepared by applying 4 mg / m 2 and subjected to ozone treatment, and a tape B was prepared without ozone treatment.
The ozone treatment was carried out by extracting an electron beam accelerated to 200 KV from a 15 μm thick titanium foil at 0.04 mA / cm 2 and exposing it to the generated ozone atmosphere at 50 m / min. The ozone concentration was 6000 ppm.
又厚み16μmのポリエチレンナフタレートフィルム上に
高周波スパッタリング法で、0.16μmのCo−Cr(Cr20.6
wt%)垂直磁化膜〔垂直保磁力590(Oe)〕を配した上
に、メチルイソブチルケトンに溶かしたリグノセリン酸
メチルを乾燥時6mg/m2となるように塗布乾燥し、オゾン
処理をテープAと同じ条件で処理したものをテープCと
し、未処理品をテープDとした。On a polyethylene naphthalate film with a thickness of 16 μm, 0.16 μm Co-Cr (Cr20.6
wt%) Perpendicular magnetic film [perpendicular coercive force 590 (Oe)] is placed, and methyl lignocerate dissolved in methyl isobutyl ketone is applied and dried to a dry amount of 6 mg / m 2, and ozone treatment is applied to tape A. Tape C was treated under the same conditions as above, and tape D was an untreated product.
テープA〜Dを、市販の8ミリビデオでくり返し記録再
生を行った。45℃87%RHの環境でジッターの増大により
画面に乱れが認められたパス回数は、テープBが68パ
ス,テープDが73パスだったのに比して、実施例は、50
0パスくり返しても全く認められなかった。Tapes A to D were repeatedly recorded and reproduced with a commercially available 8 mm video. In the environment of 45 ° C. and 87% RH, the number of passes in which the screen was disturbed due to the increase in jitter was 68 in the case of tape B and 73 in the case of tape D.
It was not recognized at all even after repeated 0 passes.
又60℃80%RHに4ケ月保存後ドップアウトを測定したと
ころ、初期値で規格化した倍率で表わすと、テープAは
2.2倍,テープBは16.9倍,テープCは1.8倍,テープD
は24.5倍であった。Moreover, when the dopout was measured after storing at 60 ° C and 80% RH for 4 months, tape A was
2.2 times, Tape B 16.9 times, Tape C 1.8 times, Tape D
Was 24.5 times.
又50℃80%RHで50回走行させたテープを、常温,常湿で
C/Nとスチル特性を初期値と比較した。Also, tape that has been run 50 times at 50 ° C and 80% RH should be used at room temperature and humidity.
The C / N and still characteristics were compared with the initial values.
C/Nは輝度信号の信号対雑音比で、ヘッドはメタルイン
ギャップ型である。スチル特性は、再生出力が3(dB)
定価する時間での比較である。C / N is the signal-to-noise ratio of the luminance signal, and the head is a metal-in-gap type. Still output is 3 (dB) playback output
It is a comparison at a fixed price.
テープA,B,C,DのC/N変化は、O(dB),−3.9(dB),O
(dB),−4.7(dB),スチル特性は、98分,17分,95分,
21分であった。The C / N changes of the tapes A, B, C, D are O (dB), -3.9 (dB), O
(DB), -4.7 (dB), still characteristics are 98 minutes, 17 minutes, 95 minutes,
It was 21 minutes.
発明の効果 以上のように本発明によれば、高温,多湿での使用,保
存特性の改良された磁気記録媒体を大量に得られるとい
ったすぐれた効果がある。EFFECTS OF THE INVENTION As described above, according to the present invention, there are excellent effects such as use at high temperature and high humidity, and a large amount of magnetic recording media having improved storage characteristics can be obtained.
図は本発明の実施例に用いたオゾン処理装置の概略構成
図である。 1……処理基板、4……コーティングヘッド、5……乾
燥炉、6……オゾン処理槽。FIG. 1 is a schematic configuration diagram of an ozone treatment device used in an example of the present invention. 1 ... Processed substrate, 4 ... Coating head, 5 ... Drying furnace, 6 ... Ozone treatment tank.
Claims (1)
に溶液塗布法にて潤活剤を配した後、オゾン処理するこ
とを特徴とする磁気記録媒体の製造方法。1. A method for producing a magnetic recording medium, which comprises arranging a activating agent on a ferromagnetic metal film on a polymer film by a solution coating method, followed by ozone treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26699986A JPH0740359B2 (en) | 1986-11-10 | 1986-11-10 | Method of manufacturing magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26699986A JPH0740359B2 (en) | 1986-11-10 | 1986-11-10 | Method of manufacturing magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121119A JPS63121119A (en) | 1988-05-25 |
| JPH0740359B2 true JPH0740359B2 (en) | 1995-05-01 |
Family
ID=17438653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26699986A Expired - Lifetime JPH0740359B2 (en) | 1986-11-10 | 1986-11-10 | Method of manufacturing magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740359B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002334427A (en) * | 2001-05-09 | 2002-11-22 | Fujitsu Ltd | Method of manufacturing magnetic recording medium and magnetic recording / reproducing apparatus |
-
1986
- 1986-11-10 JP JP26699986A patent/JPH0740359B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63121119A (en) | 1988-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4495242A (en) | Magnetic recording medium | |
| JPH0445889B2 (en) | ||
| JPH0740359B2 (en) | Method of manufacturing magnetic recording medium | |
| JPH0715751B2 (en) | Method of manufacturing magnetic recording medium | |
| US4526131A (en) | Magnetic recording medium manufacturing apparatus | |
| JPH0418371B2 (en) | ||
| JP2833444B2 (en) | Manufacturing method of magnetic recording medium | |
| JPS59167831A (en) | Magnetic recording medium | |
| JPS61284829A (en) | magnetic recording medium | |
| KR960000822B1 (en) | A magnetic recording medium | |
| JPH01319119A (en) | Magnetic recording medium | |
| JPS63127427A (en) | Method for manufacturing magnetic recording media | |
| JPS6045271B2 (en) | Vacuum deposition equipment | |
| JPH01229419A (en) | Magnetic recording medium | |
| JPH0518176B2 (en) | ||
| JPH0443326B2 (en) | ||
| JPS60205825A (en) | Magnetic recording medium and its production | |
| JPS61162824A (en) | Production of magnetic recording medium | |
| JPH0461413B2 (en) | ||
| JPH10105951A (en) | Magnetic recording media | |
| JPS60109027A (en) | Magnetic recording medium | |
| JPS62236138A (en) | Production of magnetic recording medium | |
| JPH0479043B2 (en) | ||
| JPS63271709A (en) | Magnetic recording medium | |
| JPH10105952A (en) | Magnetic recording media |