JPH0742584B2 - Ion beam mixing device - Google Patents

Description

TECHNICAL FIELD The present invention relates to an ion beam mixing apparatus, and more particularly to an ion beam mixing apparatus suitable for modifying the surface of a large sample such as a roll.

[Prior Art] Conventionally known material surface modification by ion beam mixing is the proceedings of the 1st Ion Implantation Surface Treatment Symposium (November 20, 1985, sponsored by Ion Implantation Surface Treatment Study Group)
As described above, the target sample for surface modification is limited to the cutting edge of the cutting tool, or a small item such as a die.
The sample was attached in a vacuum container, and no particular consideration was given to the attachment and detachment of large samples such as rolls.

[Problems to be solved by the invention]

As described above, the conventional surface modification of materials by ion beam mixing is limited to small objects such as cutting tools, and even if the sample is mounted in a vacuum container, it does not cause any difficulty in the work. It was

However, when the target is a large roll, handling is difficult, and a large space is required for the mounting work, and it becomes impossible to mount or remove the sample in a vacuum container having a limited space.

The present invention has been made in view of the above-mentioned points, and it is an object of the present invention that even if the sample is a large product such as a roll, the surface modification treatment work can be sufficiently performed, and the vacuum container can have a large size. An object of the present invention is to provide an ion beam mixing device that can easily attach and detach a sample without changing its shape.

[Means for solving problems]

The above-mentioned object is that the sample is detachably and rotatably held in the sample holder, and the sample holder is rotatably supported in the vacuum container, and the sample holder is processed after the treatment in the vacuum container is completed. It is achieved by being transported to the outside of the vacuum container by the swiveling operation of.

[Action]

In the present invention, since the sample is rotatably held in the vacuum container, the ion beam irradiation by the ion source and the metal vapor irradiation by the metal vapor irradiation device can be favorably performed, and the sample surface can be sufficiently modified. After the processing is completed, the sample holder is transported to the outside of the vacuum container by the turning motion of the sample holder.
Moreover, since the sample is detachably held, the sample can be easily removed and attached outside the vacuum container, and a particularly large space is not required.

〔Example〕

Hereinafter, the present invention will be described in detail based on embodiments of the drawings.

FIG. 1 shows an embodiment of the ion beam mixing apparatus of the present invention. As shown in the figure, the ion beam mixing apparatus according to the present embodiment is rotatably attached to a vacuum container 1 and a sample holder rotating mechanism 2c above the vacuum container 1, and is rotatable as will be described later in detail. A sample holder 2 and an ion source 4 for irradiating the surface of a sample 3 such as a roll held by the sample holder 2 with an ion beam,
An EB gun 5 that generates metal vapor during irradiation of an ion beam from the ion source 4, a door 6 that opens and closes an opening 1a provided in the vacuum container 1, and a vacuum exhaust device that exhausts the vacuum inside the vacuum container 1. 7, the sample 3 is subjected to ion beam irradiation from the ion source 4, metal vapor is generated from the EB gun 5, adheres to the surface of the sample 3, and is mixed by the ion beam.

The detailed structure of the sample holder 2 will be described with reference to FIG.

As shown in the figure, the sample holder 2 is composed of a vertical axis 2a and a horizontal axis 2b, the vertical axis 2a is hung from the ceiling of the vacuum container 1, and the power of the turning motor 2j is transmitted through the gear 2i. Turn,
These constitute the sample holder rotation mechanism 2c. on the other hand,
The horizontal axis 2b is connected to the vertical axis and extends in a direction perpendicular to the vertical axis,
A rotary water supply / drainage mechanism 2f is provided at the tip thereof, and the water supply / drainage pipe 2h is used to supply / drain the rotary water supply / drainage mechanism 2f.
It holds a sample clamp 2e ₁ which supports and cools one side of. The sample clamp 2e ₁ is rotatable by transmitting the power of the rotation motor 2g held in the horizontal shaft 2b via the gear 2d. Also, the other surface of the sample 3 is held by the sample clamping 2e _2, the specimen clamps 2e ₂ is rotatably by the specimen clamp movement mechanism 2k, and is movably supported in the axial direction of the horizontal axis 2b.

Next, the operation of the configuration of this embodiment will be described. During normal processing, the sample 3 is pinched by the sample clamps 2e ₁ and 2e ₂ and stopped at the ion beam irradiation position in the vacuum container 1,
Ion source 4 while being rotated by rotation motor 2g
Is irradiated with an ion beam. During this ion beam irradiation, metal vapor is generated from the EB gun and adheres to the surface of the sample 3 and is mixed by the ion beam. After the processing is completed, the door 6 is opened as shown by the chain double-dashed line in FIG. 1, and then the sample holder 2 is swung together with the sample 3 by the sample holder swivel mechanism 2c, and the sample 3 is taken out of the vacuum container 1. In this state, the sample clamp 2e ₂
Is moved and the sample 3 is removed.

The sample 3 is attached to the sample clamp 2e outside the vacuum container 1.
₁ and 2e _{2. In} this state, the sample holder rotating mechanism 2c rotates the sample holder 2 to move it to a predetermined position in the vacuum container 1. The subsequent processing operation of the sample 3 is the same as described above.

By doing so, it is possible to perform the surface improvement treatment work while rotating and cooling the sample even if it is a large roll-shaped sample, and of course, without increasing the size of the vacuum container 1. There is an effect that the sample 3 can be easily attached and removed outside.

〔The invention's effect〕

According to the ion beam mixing apparatus of the present invention described above, the sample is detachably and rotatably held in the sample holder, and the sample holder is rotatably supported in the vacuum container. After completion of the treatment in step 1, the sample holder is swiveled to move it out of the vacuum vessel. The sample can be attached and detached without increasing the size, which is very effective for this type of ion beam mixing apparatus.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the ion beam mixing apparatus of the present invention, and FIG. 2 is a sectional view showing details of a sample holder adopted in the apparatus of FIG. 1 ... vacuum container, 2 ... sample holder, 2a ... vertical axis, 2b ...
… Horizontal axis, 2c …… Sample holder turning mechanism, 2d, 2i …… Gear, 2
e _1, 2e ₂ ...... specimen clamps, 2f ...... rotary plumbing mechanism, 2 g
...... Rotation motor, 2h …… Water supply and drain pipe, 2j …… Swing motor, 2k …… Sample clamp moving mechanism, 3 …… Sample, 4 ……
Ion source, 5 ... EB gun, 6 ... door, 7 ... vacuum exhaust device.

Claims (3)

[Claims] 1. A vacuum container, a sample holder supported by the vacuum container, an ion source for irradiating the sample held by the sample holder with an ion beam, and a sample held by the sample holder. In an ion beam mixing apparatus provided with a metal vapor irradiating device for irradiating metal vapor, the sample is detachably attached to a sample holder and is rotatably held, and the sample holder is rotatable in the vacuum container. Supported, the sample is processed in a vacuum vessel,
An ion beam mixing apparatus, wherein the sample holder is conveyed to the outside of a vacuum container by a turning operation of the sample holder. 2. An opening is provided in a part of the vacuum container, a door for opening and closing the opening is installed, and when the sample holder is rotated, the door is opened to convey the sample through the opening. The ion beam mixing apparatus according to claim 1, wherein 3. The sample holder includes a vertical axis extending downward from above the vacuum container and a horizontal axis connected to the vertical axis and extending in a horizontal direction. The horizontal axis holds the sample. One sample clamp is rotatably supported by a rotating mechanism, and another one sample clamp is movably supported by a moving mechanism, and a turning mechanism for turning the horizontal axis is connected to the vertical axis. The ion beam mixing apparatus according to claim 1.