JPH0743259B2 - CMM - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a coordinate measuring machine, and particularly to an orthogonal triaxial.
A driving member that moves a moving member that is movable in any of the X, Y, and Z axes (predetermined direction) in a predetermined direction along the guide member; and a guide member with which the driving unit is engaged. Regarding the improvement of.

[Background technology]

Conventionally, various three-dimensional measuring machines have been proposed as devices for accurately measuring the shape, size, etc. of an object to be measured. Some three-dimensional measuring machines of this type include a drive device for automatically feeding a moving member that can move in a predetermined direction.

As a driving device for such a coordinate measuring machine, there are a driving device using a rack and a pinion, a driving device using a feed screw shaft, and the like. However, in the former, the straightness of a general rack is not always sufficient, and it is not always appropriate as a driving device for a coordinate measuring machine that requires a straightness on the order of a few micrometers, while the coordinate measuring machine It is extremely expensive to process the product so that it has a straightness corresponding to the performance. Also, the latter is not only difficult to obtain the straightness of the long screw shaft, but also a moment is generated by the screw shaft to apply a force in the rotating direction to the moving member, and also as a driving device for the coordinate measuring machine. It wasn't always enough.

Therefore, it is conceivable to use a guide member having guide surfaces on both sides without using a rack or a screw shaft, and to sandwich the guide member with rolling rollers to move the moving member.
However, in this case, parallelism of the guide surfaces on both sides of the guide member is required, and a new problem arises that the machining is troublesome.

To solve this problem, guide rails (guide members)
There is a driving device for a coordinate measuring machine that minimizes the influence on the straightness of the moving member even if the parallelism of both sides of the is bad, and its technical idea is disclosed in JP-A-62-235513. ing.

The idea is that slide guides are provided on both sides of the base placed on the floor, guide rails are placed on the slide guides, and the main carriage (moving member) is installed along the guide rails. An oscillating body supported by a pivot is provided at a portion corresponding to the guide rail of the main carriage while being provided so as to be movable. The rocking body is pivotally supported so as to swing toward and away from the guide rail, and the driving rail (roller pair) provided on one side of the rocking body presses and clamps the guide rail. It has been configured. Further, an air pad for injecting air toward the sliding guide portion is provided in the lower portion of the main carriage, while a central pad having a measurement detection portion that is displaced in a substantially horizontal direction is provided in the upper portion of the main carriage. A carriage (moving member) is attached.

In such a coordinate measuring machine, in order to measure the object to be measured, for example, when the central carriage is displaced in the horizontal direction, the weight of the central carriage is added in the displaced direction, and the main carriage is inclined. However, by operating the air pad with this inclination, the straightness and the parallelism of the main carriage are maintained to enable precise measurement.

[Problems to be Solved by the Invention]

However, even if the guide rails are arranged substantially linearly with respect to the sliding guide portion, if the guide rails are bent or distorted due to conditions such as room temperature and humidity, the guide rails will not slide. Since the main carriage moves along the guide rail, the main carriage is displaced a minute distance by the amount of bending and distortion of the guide rail, and the measurement detecting unit is also displaced by that amount. Therefore, it exposes the drawback that precise measurement becomes difficult.

It is an object of the present invention to provide a coordinate measuring machine capable of performing a precise measurement of an object to be measured by displacing the measurement detecting portion substantially linearly even if the guide member is bent or distorted. .

[Means for Solving the Problems]

The present invention is intended to achieve the above-mentioned object by correcting the deflection of the guide member by supporting the guide member provided substantially parallel to the guide member with the support means with a predetermined rigidity, so-called floating support. .

Specifically, the present invention has three axes orthogonal to the object to be measured.
In a coordinate measuring machine that measures the shape of an object to be measured by causing the measurement and detection unit that is movable in the X, Y, and Z directions to participate in the object, moves along a guide member provided on the base body. A member is provided so as to be movable in a predetermined direction, a guide member is arranged on the base substantially parallel to the guide member, and a support means for supporting the guide member with respect to the base so as to be displaceable is provided. Further, a driving means for moving the moving member in a predetermined direction is provided on the moving member, the driving means is engaged with the guide member, and the driving means is driven by the engagement of the guide member and the driving means. Accordingly, the three-dimensional measuring machine is characterized in that the moving member can be moved in a predetermined direction.

In the present invention, the guide member is preferably a prismatic body, and the supporting means includes an elastic support portion including a compression coil spring that supports one end of the guide member so as to be displaceable in a substantially vertical direction, and a guide member other than the elastic support portion. It is preferable to include a spherical bearing that supports the end in a swingable manner.

Further, in the present invention, the drive means includes a roller pair that is rollable while sandwiching the guide member, and a roller holding member that holds the roller pair so as to be in contact with and away from the guide member and to be rollable. It is preferable that the roller pair includes a pressing member for urging the roller pair so as to sandwich the guide member via the roller holding member, and a rotary drive source connected to one of the rollers of the roller pair. It is preferable that the pressing member of the drive means includes a plurality of disc springs.

Further, the moving member in the present invention may be a moving member that moves in any direction of the X, Y, and Z axes, as long as the present invention is applied to one or more of them. .

[Action]

In the present invention as described above, when the drive means is driven, the drive means moves along the guide member with which the drive means is engaged, and accordingly, the moving member provided with the drive means also follows the guide member. To move. During this move,
Even if the guide member is bent or the parallelism between the guide members is poor, the guide member
Due to the action of the displaceable support means, the movable member is appropriately displaced and correspondingly, the moving member moves straight along the guide member.

Therefore, the measurement detection unit can also be accurately moved to the predetermined position, and precise measurement of the object to be measured is executed.

〔Example〕

 An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the overall configuration of the coordinate measuring machine 10 according to this embodiment.

The coordinate measuring machine 10 is provided with a pair of support bases 11 which are arranged as a base body and are spaced apart from each other by a predetermined distance. The support bases 11 mount and fix a beam 13 on two front and rear legs 12, respectively. Is configured. Here, a pair of left and right support bases 11
Have the same configuration except that they are arranged at opposite positions. Therefore, only one of them will be described below, and the description of the other will be given with the same reference numerals for the same components unless otherwise described. And its description is omitted.

The beam 13 forms a step along its longitudinal direction,
A guide rail 20 as a guide member is placed on the upper step surface 13A, and a prism body 48 as a guide member supported by the supporting means 30 is provided on the lower step surface 13B.

As will be described in detail later, the supporting means 30 has an elastic supporting portion 31 that elastically supports one end of the prismatic body 48 via a mounting plate 32.
And a spherical bearing 41 for swingably supporting the other end of the prismatic body 48, whereby the prismatic body 48 arranged substantially parallel to the guide rail 20 is vertically and horizontally arranged with respect to the guide rail 20. It is supported so as to be displaceable in either direction.

The guide rail 20 is formed with a groove-shaped notch 20B along both longitudinal side surfaces 20A. In this cutout portion 20B, a projection portion on one side of a plurality of engaging pieces 22 arranged on the upper step surface 13A of the beam 13 is engaged, and is inserted through the engaging piece 22. Fixing bolts (not shown) to beam 13
The guide rail 20 is pressed and fixed to the beam 13 side by the projecting portion of the engaging piece 22 by being screwed into the upper step surface 13A.

The upper step surface 13A of the beam 13 is provided between the plurality of engagement pieces 22.
A plurality of pressing members 25 that constantly press the side surfaces 20A of the guide rail 20 toward the center of the guide rail 20 are provided therein. Due to the action of the engaging piece 22 and the pressing member 25, the guide rail 20 is fixed on the upper step surface 13A of the beam 13 in a state where the straightness is correctly set.

A Y-axis moving member 50 composed of a gate-shaped frame is slidably mounted in a predetermined direction on the horizontal plane, that is, in the Y-axis direction on the pair of guide rails 20 having the straightness. The Y-axis moving member 50 is configured by bridging a cross beam 52 between a pair of leg portions 51, and the Y-axis moving member 50 is provided at the lower position of the both leg portions 51.
Y-axis drive means 60 for driving the Y-axis in the Y-axis direction are respectively provided.

The Y-axis drive means 60 includes a bracket 61, which will be described in detail later.
A servo motor 62 as a rotary drive source supported by the Y-axis moving member 50 via
A roller holding member 63 supported via 61 is provided.
The roller holding member 63 includes a roller pair 64, one of which is driven by the motor 62, and the roller pair 64 is
The prismatic body 48 is sandwiched with a predetermined pressing force via a pressing member 76 described later. As a result, when the motor 62 is driven, the roller pair 64 rolls along the straight column body 48, and the Y-axis moving member 50 moves along the guide rail 20.

An X-axis moving member 80 is mounted on the horizontal beam 52 of the Y-axis moving member 50 so as to be movable along the horizontal beam 52 in the direction orthogonal to the Y-axis direction, that is, in the X-axis direction. The X-axis moving member 80 includes X-axis driving means 87 for moving the X-axis moving member 80 in the X-axis direction along the horizontal beam 52. The X-axis driving means 87 is a servo as a rotary driving source. In addition to having the motor 88, it is composed of the same components as the Y-axis driving means 60. That is, the X-axis driving means 87 includes a prismatic body (not shown) similar to the prismatic body 48 on the beam 13, and this prismatic body is the rear surface of the transverse beam 52 of the Y-axis moving member 50 in FIG. And is driven along this prism. Here, the horizontal beam 52 of the Y-axis moving member 50 functions as a base and as a guide member for the X-axis moving member 80.

The X-axis moving member 80 is provided with a mounting plate 81 vertically provided on the front side of the Y-axis moving member 50 in FIG. Support frames 82 formed in a rectangular shape are provided at upper and lower portions of the mounting plate 81, and an angular Z-shaped support frame 82 is provided in the upper and lower support frames 82 via air bearings 83 formed of a plurality of air pads. A shaft spindle 111 is slidably supported in the vertical direction, that is, the Z-axis direction. The Z-axis spindle 111 is detachably provided with a measurement detection unit 112 including a touch sensor or the like at its lower end, and the Z-axis moving member 110 is configured by including the Z-axis spindle 111 and the measurement detection unit 112. There is.

The Z-axis spindle 111 is internally provided with an air balance device (not shown), and the air balance device is provided with an air from a compressed air supply unit 103 provided on a support plate 84 fixed on the upper support frame 82. (Compressed air) is supplied. Therefore, the air balances the weight of the Z-axis moving member 110 including the Z-axis spindle 111, the measurement detecting unit 112, etc., and the Z-axis spindle 111 can be smoothly moved in the Z-axis direction with an extremely small force. It is like this.

Between the X-axis moving member 80 and the Z-axis spindle 111,
Z-axis drive means 120 is provided. This Z-axis drive means 1
Reference numeral 20 denotes a feed screw shaft 121 composed of a ball screw or the like rotatably supported by a mounting plate 81 of the X-axis moving member 80, a servo motor 122 as a rotary drive source for rotationally driving the feed screw shaft 121, The nut member 123 is fixed to the Z-axis spindle 111 and is screwed to the feed screw shaft 121. Then, by rotating the servo motor 122, the nut member 1 screwed onto the feed screw shaft 121.
23 is moved in the Z-axis direction, so that the Z-axis spindle
The 111 can be moved in the Z-axis direction. Here, the X-axis moving member 80 is different from the Z-axis moving member 110 in
It plays a role as a base body and a role as a guide member.

On the other hand, the coordinate measuring machine 10 uses the Y-axis driving means 60, X
Operation means 1 for driving the axis drive means 87 and the Z axis drive means 120
Equipped with 30. The operation means 130 has an operation panel 132 supported by a pedestal 131, and two joysticks 133 and 134 on the left and right are provided on the operation panel 132.
One of the joysticks 133, 134 operates the Y-axis drive means 60 to operate the Y-axis moving member when the operation lever is operated in the P direction in the drawing.
50 can be moved in the Y-axis direction, while this joystick 13
When 3 is operated in the Q direction orthogonal to the P direction, the X-axis driving means 87 is operated to move the X-axis moving member 80 in the X-axis direction. When the other joystick 134 is operated in the R direction parallel to the P direction, the Z axis drive means 120
Is operated to move the Z-axis spindle 111 in the Z-axis direction.

Reference numeral W shown by a two-dot chain line in FIG. 1 is an object to be measured placed on the floor, and this object to be measured W is a relatively large object such as an engine cover for accommodating a jet engine. Is. Further, reference numeral 140 in FIG. 1 denotes a shock absorbing means which also functions as a stopper of the Y-axis moving member 50, and a sliding shaft 142 supported by the beam 13 via a bracket 141,
A spring 143 for urging the sliding shaft 142 in the projecting direction is provided. The spring 143 prevents the impact when the Y-axis moving member 50 abuts.
It is designed to be absorbed by.

2 to 5 show the detailed structure of the supporting means 30 and the Y-axis driving means 60 in this embodiment.

In FIG. 2, the elastic hand-holding portion 31 of the support means 30 is a beam.
A support plate 33 fixed on the lower step surface 13B on the left side in the figure of 13,
A shaft 34 erected on the support plate 33, a pair of nuts 35 respectively screwed on the upper and lower sides of the shaft 34, and a pair of spring bearings interposed at inner positions of the pair of nuts 35. 36, and a pair of clamping members vertically engaged with the other end of the mounting plate 32 whose one end side is screwed and fixed to the prismatic body 48.
37, a pair of compression coil springs 38 respectively interposed between the sandwiching members 37 and the pair of spring receivers 36.
It consists of and. As a result, the elastic support portion 31 is
One end of the prismatic body 48 which is a guide member can be supported so as to be displaceable in a substantially vertical direction.

On the other hand, the spherical bearing 41 of the supporting means 30 engages with the base 42 fixed on the lower step surface 13B of the beam 13 on the right side in the drawing, the shaft body 43 erected on the base 42, and the shaft body 43. It is composed of a double-row spherical seat type bearing body 44 and a bearing box 45 that supports the bearing body 44 and is fixed to the right end of the prismatic body 48, and the other end of the prismatic body 48 can be swung. I support you.

Therefore, the prismatic body 48 is supported by the beam 13 by the supporting means 30 composed of the elastic supporting portion 31 and the spherical bearing 41 so as to be displaceable in any of the vertical and horizontal directions as described above.

2 and 3, the Y-axis drive means 60 supported by the leg portion 51 of the Y-axis moving member 50 via the bracket 61 includes the servo motor 62 as a rotary drive source attached to the bracket 61. The output shaft 62A of the servomotor 62 is connected with a speed reducer 66 via a coupling 65.
66 is also supported by the bracket 61. The rotary shaft 66A on the output side of the speed reducer 66 has a drive shaft through an overload protection device 67 which is configured to slip and not transmit the torque larger than a predetermined torque when a torque larger than a predetermined transmission torque is applied.
It is connected to 68. The drive shaft 68 is the bracket
It is rotatably supported by a fixed holding body 69 of a roller holding member 63 fixed to 61. A drive roller 64A, which constitutes one of the roller pair 64, is fixed in the middle of the drive shaft 68 supported by the fixed holding body 69 so as to face the prismatic body 48 as a guide member. As shown in the enlarged sectional view of FIG. 4, the drive shaft 68 is rotatable via needle bearings 72 supported by a pair of bearing holders 71 fixed above and below the fixed holding body 69. It is supported.

The roller holding member 63 includes, in addition to the fixed holding body 69, a pair of upper and lower arms formed at one end of the fixed holding body 69 via an eccentric shaft 73 supported by bearings 69A formed on the upper and lower sides of the fixed holding body 69. The movable holding member 74 is swingably supported by the portion 74A. A driven roller 64B, which constitutes the other of the pair of rollers 64, is rotatably supported by the movable holding member 74 so as to face the prism 48 via a shaft 75. As a result, the roller holding member 63 including the fixed holding body 69 and the movable holding body 74 holds the roller pair 64 in contact with, separate from, and rollable with respect to the prismatic body 48, and the roller pair 64 is The prismatic body 48 can be rolled while being clamped. Further, the eccentric shaft 73 is
As shown in FIG. 3, an eccentric portion 73A is provided on the upper and lower sides, and the eccentric portion 73A is fitted to the arm portion 74A of the possible holding body 74, and the eccentric shaft 73 with respect to the bearing portion 69A of the fixed holding body 69. By rotating, the position of the movable holding body 74 with respect to the fixed holding body 69, and by extension, the position of the driven roller 64B with respect to the prismatic body 48, can be adjusted, and the state of sandwiching the prismatic body 48 by the roller pair 64 can be made appropriate. .

A pair of pressing members 76 are respectively interposed between the fixed holding body 69 and the end of the movable holding body 74 on the side opposite to the arm portion 74A at the upper and lower positions with the prismatic body 48 interposed therebetween. The pressing member 76 is a bolt arranged so as to penetrate the fixed holding body 69 and the movable holding body 74 as shown in an enlarged view in FIG.
77 and nuts screwed on both ends of this bolt 77
78, and a plurality of dishes that are respectively interposed between the nuts 78 on both ends thereof and the fixed holding body 69 and the movable holding body 74 to urge the fixed holding body 69 and the movable holding body 74 in directions close to each other. It is composed of a spring 79. These multiple disc springs 79
The pressing force generated by the
It is transmitted to the roller pair 64 via 74, and the driving roller 64A and the driven roller 64B constituting the roller pair 64 form a prismatic body 48.
Is clamped with a predetermined pressing force, for example, a force of about 1000 kgf per unit area.

Therefore, the coupling by the drive of the servo motor 62.
When the drive roller 64A is driven via the 65, the speed reducer 66, the overload protection device 67, and the drive shaft 68, the roller pair 64 becomes a prismatic body 48.
Rolling along the side surface of the
A Y-axis moving member 50 to which 60 and this Y-axis driving means 60 are attached via a bracket 61 is adapted to be moved back and forth in the Y-axis direction along the guide rail 20.

FIG. 6 shows an enlarged view of a portion where the lower portion of the leg portion 51 of the Y-axis moving member 50 is engaged with the guide rail 20. At the lower part of the leg portion 51, the X-axis moving member 80 has the Y-axis moving member 50.
An air bearing 150 is provided as an air bearing means for preventing the Y-axis moving member 50 from tilting due to the movement of the X-axis moving member 80 when the Y-axis moving member 50 is displaced along the horizontal beam 52 in the X-axis direction. . The air bearing 150 includes an air ejection surface 151 formed below the Y-axis moving member 50 so as to surround the guide rail 20, and the air ejection surface 151 is provided with a plurality of air ejection holes 152. . The plurality of air ejection holes 152 are connected by a connection space 153, and a nozzle 154 is attached to a part of the connection space 153, and a pressure supply source (not shown) is connected to the nozzle 154. .

Therefore, when the air from the pressure supply source is supplied to the connecting space 153 through the nozzle 154, the air is ejected from each air ejection hole 152 to the guide rail 20, and the guide rail 20 and the Y-axis moving member. It is adapted to maintain a state in which it is separated from the predetermined distance by 50.

Next, the operation of this embodiment will be described.

When measuring the object to be measured W, first, a pressure supply source (not shown) is driven to supply air to the connection space 153 via the nozzle 154 of the air bearing 150. As a result, air is ejected from the air ejection holes 152 toward the guide rail 20, so that the Y-axis moving member 50 and the guide rail 20 are separated by a predetermined distance, preferably 3 to 5 μm. The spacing is maintained.

Then, the joysticks 133 and 134 of the operating means 130 are operated to move the Y-axis moving member 50, the X-axis moving member 80, and the Z-axis moving member 110, and the measurement detecting unit 112 attached to the Z-axis spindle 111 is moved to the object to be measured. The measurement is performed while abutting on a predetermined measured point of W.

In operating the joysticks 133 and 134, if the one joystick 133 is moved to one side in the P direction, that is, to the P ₁ direction, the Y-axis moving member 50 is moved to the Y ₁ direction and the other end in the P ₂ direction. Moved in Y ₂ direction. Also,
Moving to one side Q ₁ direction Q direction X-axis moving member 80 is X ₁
Direction, is moved is moved in the Q ₂ direction X ₂ direction, the lever neutral position of the joystick 133 (in the drawing the solid line position)
When returned to the position, the Y-axis moving member 50 and the X-axis moving member 80 stop moving in their respective moving directions.

When the joystick 134 is moved in _one direction R _{1 in the} R direction, the Z-axis moving member 110 moves in the lower Z ₁ direction, and when moved in the other side R ₂ direction, it moves in the upper Z ₂ direction. The movement stops when it is returned to the neutral position.

When the joystick 133 is operated in the P direction when driving the Y-axis driving means 60, the servomotor 62 of the Y-axis driving means 60 is rotationally driven, and the rotation of the output shaft 62A thereof is coupled to the coupling 65 and the speed reducer 66. And to the drive shaft 68 via the overload protection device 67. With the rotation of this drive shaft 68,
The drive roller 64A integrally fixed to the drive shaft 68 is also rotated. At this time, since the driving roller 64A and the driven roller 64B sandwich the prismatic body 48 by the action of the pressing member 76, the rotation of the driving roller 64A causes the driving roller 64A and the driven roller 64B to face the side surface of the prismatic body 48. Rolling along the Y-axis.
As a result, the roller holding member 63 holding the roller pair 64 also moves in the Y axis direction along the prismatic body 48, and the roller holding member 63 is attached via the bracket 61 to the Y axis moving member 50. Also moves in the Y-axis direction.

When the Y-axis moving member 50 is moved in the Y-axis direction, air is supplied to the air bearing 150 formed below the leg portion 51 of the Y-axis moving member 50 as described above. The member 50 will move smoothly along the guide rail 20. At this time, if the prism 48 is bent or distorted or is not parallel to the guide rail 20, the prism
48 is displaced in a direction in which the bending or the like is corrected by the action of the supporting means 30 that supports the prism 48 with a predetermined rigidity, and the Y-axis moving member 50 is smoothly moved regardless of the bending or the like. It will be. The displacement of this prism 48 is determined by the support means.
Elastic support of the compression coil spring 38 of the elastic support portion 31 which constitutes 30 and the bearing body 44 of the spherical bearing 41.
It is absorbed by the rotation support by.

In addition, the X-axis moving member 80 is arranged along the horizontal beam 52 of the Y-axis moving member 50.
Moves by the action of the X-axis driving means 87, and the Y-axis moving member 50
When the X-axis moving member 80 tries to tilt with the moving side of the Y-axis moving member 80 downward, the tilting is blocked by the action of the air bearing 150, which also causes the Y-axis moving member 50 to move.
And the X-axis moving member 80 will move smoothly.

In this way, when the Y, X, Z axis moving members 50, 80, 110 are moved so that the measurement detection unit 112 is involved in the measurement point of the object to be measured W, the measurement detection unit 112 is brought into contact with the measurement detection unit 112 by an unillustrated calculation means. The position is calculated as the X-, Y-, and Z-axis coordinates from the reference point, that is, three-dimensional coordinates, and the size, shape, and the like of the measured object W are measured.

In the above measurement, the Y-axis moving member 50 moves along the guide rail 20, but the guide rail 20 has the engaging piece 22 as described above.
And the upper surface of the beam 13 while maintaining the straightness by the pressing member 25
Since it is fixed to 13A, the Y-axis moving member 50 guided by the guide rail 20 is also linearly guided, and no measurement error or the like occurs.

According to this embodiment as described above, there are the following effects.

That is, in this embodiment, since the supporting means 30 for absorbing the displacement of the prismatic body 48 is provided, for example, when the guide rail 20 and the prismatic body 48 are not arranged substantially parallel to the horizontal direction. In the above, even if the Y-axis moving member 50 is displaced in the Y-axis direction, the non-parallel portion can be corrected to be substantially parallel by the spherical bearing 41.

Further, in the case where the guide rail 20 and the prismatic body 48 are not arranged substantially parallel to the vertical direction, the Y-axis moving member 50
Similarly, even if the same is displaced in the Y-axis direction, the non-parallel portion can be corrected by the pair of upper and lower compression coil springs 38 of the elastic support portion 31.

Furthermore, when the prismatic body 48 is bent or deformed due to external conditions such as room temperature and humidity, even if the Y-axis moving member 50 is displaced, the compression coil spring of the spherical bearing 41 and the elastic support portion 31 is displaced. By the action with 38, it is possible to instantly correct vertical and horizontal bending and distortion. As a result, an unnecessary load is not applied to the Y-axis moving member 50, so that the interval defined by the air bearing 150 can always be kept constant, and as a result, the measurement detection unit 112 can be linearly moved. It is possible to displace the target object W accurately, and it is possible to accurately measure the size, shape, etc. of the object to be measured W.

Further, the support means 30 of the prismatic body 48 adjusts the position of the nut 35 screwed into the shaft 34 of the elastic support portion 31, changes the spring constant by replacing the compression coil spring 38, and the like,
The rigidity of the support means 30 can be changed appropriately, and thus the Y-axis moving member 50 can always be smoothly moved. Further, the structure of the supporting means 30 is such that the elastic supporting portion 31 having a relatively simple structure.
Since it is composed of the spherical bearing 41 and the spherical bearing 41, it can be provided at a low cost.

Further, the Y-axis drive means 60 engaged with the prismatic body 48 is provided with a roller holding member 63 composed of a movable holding body 74 which is openably and closably provided to the fixed holding body 69 via an eccentric shaft 73, and ,
A drive roller 64A and a driven roller 64B are rotatably supported by the fixed holding body 69 and the movable holding body 74, respectively, and further, the driving roller 64A and the driven roller 64B are prismatic bodies with a predetermined pressing force by a pressing member 76. Since the 48 is sandwiched, it can be reliably driven, and backlash does not occur unlike the conventional combination of the rack and the pinion. Similarly, no rotational moment is generated unlike the feed screw shaft in the conventional example.

Further, since the movable holding body 74 is attached to the fixed holding body 69 of the roller holding member 63 via the eccentric shaft 73, the driven roller 64B can be adjusted by adjusting the eccentric amount of the eccentric shaft 73.
The position can be adjusted, and the state in which the prismatic body 48 is held by the drive roller 64A can be made appropriate.

Further, from the servo motor 62 of the Y-axis driving means 60 to the roller pair 64
Since the series of members up to (3) are composed of relatively simple members, the Y-axis drive means 60 can be manufactured at low cost, and thus the coordinate measuring machine 10 can be manufactured at low cost.

The present invention is not limited to the above embodiment,
It goes without saying that various improvements and design changes can be made without departing from the scope of the present invention.

For example, although the large coordinate measuring machine 10 for measuring a relatively large member as the object to be measured W has been described in the above embodiment, the present invention is not limited to this and a relatively small object to be measured. It can also be applied to coordinate measuring machines that measure objects. Further, in the above embodiment, the Y-axis driving means 60
Although the three-dimensional measuring machine 10 including the pair of rollers 64 for sandwiching the prism 48 together with the X-axis drive means 87 has been described, the drive means 60 and 87 do not necessarily have to be provided in the same structure. Either one may have the structure of the above embodiment. On the other hand, the Z-axis drive unit 120 that drives the Z-axis spindle 111 may also have a structure including the prismatic body 48 and the roller pair 64. Therefore, the moving member in the present invention, Y, X,
It may be any of the Z-axis moving members 50, 80, 110, and
The driving means may be any of Y, X, Z axis driving means 60, 87, 120. At this time, a member that guides and supports the moving member serves as a base body. Further, the Y-axis driving means or the X-axis driving means which does not have the structure of the above-mentioned embodiment may be constituted by a feed screw shaft and a nut member like the Z-axis driving means 120 in the above-mentioned embodiment.

Further, in the above-described embodiment, the movable holding member 74 is openably and closably supported by the fixed holding member 69 of the roller holding member 63 via the eccentric shaft 73, but the movable holding member 74 is not necessarily supported by the eccentric shaft 73. Need not be used, and may be a simple axis.
However, if the eccentric shaft 73 is used, as described above, the fixed holder 69
There is an advantage that the position of the movable holder 74 can be adjusted. Further, an overload protection device 67 provided on the Y-axis drive means 60.
Is not limited to the structure that slips at a predetermined load or more as in the above-described embodiment, but may be another structure such as a structure that electrically detects the load current of the servo motor 62 and disconnects the clutch and the like. Good.

Further, the supporting means 30 for the prism 48 is not limited to the elastic support 31 having the compression coil spring 38 and the spherical bearing 41 as in the above-mentioned embodiment, and may have another configuration. It may be any one that can be displaceably supported with a predetermined rigidity. Furthermore, a prismatic body as a guide member
The column 48 does not necessarily have to be a prism, and may have another shape such as a column, but the prism body 48 has an advantage that the guide can be surely performed. At this time, when the guide member is a column or the like, it goes without saying that the shape of the roller pair 64 is changed according to the shape.

Further, the beams 13 of the support 11 arranged separately may be integrally formed. However, when measuring the object W to be measured which is larger when separated, there is an advantage that the height of the device can be reduced.

〔The invention's effect〕

As described above, according to the present invention, since the guide member for guiding the drive means is supported by the base body via the support means having a predetermined rigidity, even if the guide member bends or bends, There is an effect that the moving member can always be properly guided and precise measurement can be performed.

[Brief description of drawings]

FIG. 1 is a perspective view of the entire structure showing an embodiment of the present invention, FIG. 2 is an enlarged side view in which a part of the Y-axis driving means of the embodiment is partially omitted and a part thereof is shown in cross section, FIG. 4 is a right side view of FIG. 2 which is a partial cross section, FIG. 4 is an enlarged sectional view taken along line IV-IV of FIG. 2, and FIG. 5 is an enlarged view of FIG.
The drawing is an enlarged cross-sectional view showing an engaged state of the leg portion of the Y-axis moving member and the guide rail. 10 …… Coordinate measuring machine, 11 …… Support base as a base, 20 ・ ・ ・
... Guide rails as guide members, 30 ... Supporting means, 31 ...
... Elastic support part, 32 ... Mounting plate, 38 ... Compression coil spring, 41 ... Spherical bearing, 48 ... Square prism as guide member, 50 ... Y-axis moving member, 60 ... Y-axis driving means,
62 ... Servo motor as rotary drive source, 63 ... Roller holding member, 64 ... Roller pair, 65 ... Coupling, 76 ...
... Pressing member, 79 ... Disc spring, 80 ... X-axis moving member, 87 ...
... X-axis drive means, 88 ... servo motor as a rotary drive source, 110 ... Z-axis moving member, 111 ... Z-axis spindle, 11
2 …… Measurement detection part, 150 …… Air bearing as air bearing means, W …… DUT.

Claims (5)

[Claims] 1. A three-dimensional apparatus for measuring a shape or the like of a measured object by causing a measured and detected portion movable in X, Y, and Z directions which are three axes orthogonal to the measured object to be involved in the measured object. In the measuring machine,
A moving member is movably provided in a predetermined direction along a guide member provided on the base body, and a guide member is arranged on the base body substantially parallel to the guide member, and the guide member has a predetermined rigidity with respect to the base body. Supporting means for holding and displaceably supporting the moving member is provided with driving means for moving the moving member in a predetermined direction, and the driving means is engaged with the guide member, and the guide member and the driving means. A coordinate measuring machine characterized in that the moving member can be moved in a predetermined direction in response to the driving of the driving means by engaging with. 2. The coordinate measuring machine according to claim 1, wherein the guide member is a prism. 3. The elastic supporting portion having a compression coil spring for supporting one end of the guide member so as to be displaceable in a substantially vertical direction according to claim 1 or 2, and another supporting member. A three-dimensional measuring machine characterized in that it is configured to include a spherical bearing that supports the end so that it can swing. 4. The driving means according to claim 1, wherein the drive means includes a pair of rollers that are rollable while holding the guide member, and the roller pair is in contact with the guide member. A roller holding member that holds the guide member so as to be separable and rollable, a pressing member that urges the roller pair so as to sandwich the guide member via the roller holding member, and is connected to either one of the rollers of the roller pair. Coordinate measuring machine, characterized by comprising: 5. The pressing member according to claim 4,
A coordinate measuring machine comprising a plurality of disc springs, wherein the disc springs constitute the biasing force of the pressing member.