JPH0743417B2 - Method and apparatus for detecting magnetic internal property of superconductor - Google Patents
Method and apparatus for detecting magnetic internal property of superconductorInfo
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- JPH0743417B2 JPH0743417B2 JP2065550A JP6555090A JPH0743417B2 JP H0743417 B2 JPH0743417 B2 JP H0743417B2 JP 2065550 A JP2065550 A JP 2065550A JP 6555090 A JP6555090 A JP 6555090A JP H0743417 B2 JPH0743417 B2 JP H0743417B2
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- magnetic
- superconductor
- sample
- thin film
- magnetic flux
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- Measuring Magnetic Variables (AREA)
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Description
【発明の詳細な説明】 (産業上の利用分野) この発明は、超電導体の磁気的内部性状検出方法および
検出装置に関し、とくに超電導体内部の磁気的性状を、
容易かつ的確に検出しようとするものである。Description: TECHNICAL FIELD The present invention relates to a method and a device for detecting a magnetic internal property of a superconductor, and more particularly, to a magnetic property inside a superconductor.
It aims to detect it easily and accurately.
(従来の技術) 1986年に始まる、一連の新しい酸化物高温超電導体の発
見に伴い、それらの応用面での研究も進展し、その結
果、従来の金属系超電導材料ではあまり考慮が払われて
いなかった分野においても、超電導体の利用が試みられ
ている。その代表例としては、たとえばバルク状永久磁
石{第13回日本応用磁気学会講演概要集23P E-4(198
9)}、インダクター(同23P E-7)、フラックスゲート
磁界センサー(同23P E-8)並びに種々の形状の磁気シ
ールド材料および磁気ベアリングなどが挙げられる。こ
れらの製品は、従来の金属系超電導体が利用されていた
ような線材やテープとしてではなく、バルク状のままで
用いられ、従ってバルクとしてのマクロな磁気特性が重
要となる。(Prior Art) With the discovery of a series of new oxide high-temperature superconductors that began in 1986, research on their application progressed, and as a result, much consideration has been given to conventional metal-based superconducting materials. Attempts have been made to use superconductors in fields that did not exist. As a typical example, for example, bulk permanent magnets {13th Japan Society for Applied Magnetics Proceedings 23P E-4 (198
9)}, inductors (23P E-7), fluxgate magnetic field sensors (23P E-8), magnetic shield materials of various shapes, and magnetic bearings. These products are used as they are in bulk form, not as wire rods or tapes in which conventional metal-based superconductors are used, and therefore macro magnetic properties as bulk are important.
ところで従来のように、線材やテープ材として超電導体
を使用する場合には、磁場中における臨界電流密度
(Jc)が最も重要な特性とされ、超電導体として安定な
状態を維持しつつ、いかにJcを向上させるかという点に
努力が払われてきた。しかしながら上述したようなバル
ク状態で利用する場合は、Jcだけでなく、バルク全体の
磁気的性質およびその均一性が問題となる。というのは
バルク状で利用する場合、磁場が高くなると、磁束のピ
ン止め力の弱い部分から、外部磁束が一気に試料内部に
侵入する、いわゆるフラックスジャンプが極めて起き易
くなるだけでなく、反磁場効果のため、試料形状によっ
て局所的に磁場が非常に強くなる部分ができ、その部分
から磁束の侵入が始まるからである。それ故、磁場中に
おける超電導体内部のマクロ的な磁束分布を知ること
は、製品の用途に合った材料の開発や、製品の適当な形
状を決定する上で、極めて重要なわけである。By the way, when using a superconductor as a wire or tape material as in the past, the critical current density (J c ) in a magnetic field is the most important characteristic, and while maintaining a stable state as a superconductor, Efforts have been made to improve J c . However, when it is used in the bulk state as described above, not only J c but also the magnetic properties of the bulk as a whole and its uniformity become a problem. When used in bulk, when the magnetic field becomes higher, the so-called flux jump, in which the external magnetic flux penetrates into the sample all at once from the part where the pinning force of the magnetic flux is weak, is extremely likely to occur, as well as the demagnetizing effect. Therefore, a portion where the magnetic field becomes extremely strong locally is formed depending on the shape of the sample, and the penetration of magnetic flux starts from that portion. Therefore, it is extremely important to know the macroscopic magnetic flux distribution inside the superconductor in the magnetic field in order to develop a material suitable for the application of the product and to determine an appropriate shape of the product.
一般的に超電導体の磁化は、通常の磁性材料のように試
料全体で均一な磁気モーメントがあるのではなく、材料
内部の磁束のピン止め力に依存した不均一なものであ
る。従って、試料全体で平均化された値しか得られない
通常の磁気測定法では、試料内部の磁束分布や勾配など
の情報は得られない。Generally, the magnetization of a superconductor does not have a uniform magnetic moment over the entire sample as in a normal magnetic material, but is non-uniform depending on the pinning force of the magnetic flux inside the material. Therefore, information such as the magnetic flux distribution and gradient inside the sample cannot be obtained by the usual magnetic measurement method in which only the averaged value is obtained over the entire sample.
このような超電導体内部の磁束変化を直接観察する方法
としては、従来デコレーション法がよく用いられてき
た。この方法は、低温磁場中でFe、Coなどの強磁性体の
微粒子を超電導体試料に蒸着し、試料の磁束線格子パタ
ーンが転写されたレプリカを電子顕微鏡で観察するもの
で、試料内の磁束線格子の様子を見ることができる。こ
の方法は1〜10μm程度の範囲の、局所的な個々の磁束
線格子の観察には極めて便利であるが、バルク全体ある
いは広い範囲にわたる磁束線格子の分布や、その磁場、
温度依存性などを動的に観察することはできない。従っ
て、材料として利用する場合のバルク全体のマクロな磁
束挙動を検出する用途には利用できない。As a method of directly observing such a magnetic flux change inside the superconductor, a decoration method has been often used. In this method, fine particles of ferromagnetic material such as Fe and Co are vapor-deposited on a superconductor sample in a low temperature magnetic field, and a replica on which the magnetic flux line lattice pattern of the sample is transferred is observed with an electron microscope. You can see the state of the line grid. This method is extremely convenient for observing individual magnetic flux line gratings in the range of about 1 to 10 μm, but the distribution of the magnetic flux line gratings over the entire bulk or a wide range, its magnetic field,
It is not possible to dynamically observe temperature dependence. Therefore, it cannot be used for the purpose of detecting macroscopic magnetic flux behavior of the entire bulk when used as a material.
デコレーション法では観察できないマクロな磁束分布お
よび磁束分布変化を測定する方法としては、ホール素子
を用いる方法と磁気光学効果の一つであるファラデー効
果を利用する方法がある。As a method for measuring a macroscopic magnetic flux distribution and a change in magnetic flux distribution that cannot be observed by the decoration method, there are a method using a Hall element and a method utilizing a Faraday effect which is one of magneto-optical effects.
前者のホール素子を利用する方法は、超電導体上にホー
ル素子を置き、この素子を移動させながら表面の磁束を
測定してゆくものである{例えばJpn.J.Appl.Phys.26
(1987)L1348}が、一回の操作で一次元的な情報しか
得られず、また測定の分解能が0.5〜1mmと低いために、
材料の開発に適したものとは到底いえない。The former method using the Hall element is to place the Hall element on the superconductor and measure the magnetic flux on the surface while moving the element (eg Jpn.J.Appl.Phys.26).
(1987) L1348} can obtain only one-dimensional information with a single operation, and the measurement resolution is low at 0.5 to 1 mm.
It is far from being suitable for material development.
後者のファラデー効果を利用した方法は、当初、第一種
超電導体の中間状態を観察するために開発された方法で
あり、第5図に示すように、円板状試料cの上に、低温
で強磁性体となるユーロピウムカルコゲナイドたとえば
EuOまたはEuSとEuF2との混晶系の複合膜dを蒸着し、上
方から偏光子aを通った偏光を照射する。ここに試料中
の常電導部分は磁束が通過し、その上に蒸着した磁性膜
はファラデー効果によって偏光面が回転するので、この
反射光を検光子bを通して観察すると、磁束の通ってい
る部分gとそうでない部分hとは白黒のコントラストと
して観察できる{H.Kirchner,Phys.Stat.Sol.(a)4
(1971)531}。The latter method using the Faraday effect was originally developed for observing the intermediate state of the first-class superconductor, and as shown in FIG. Europium chalcogenide, which becomes a ferromagnetic substance in
A composite film d of a mixed crystal system of EuO or EuS and EuF 2 is vapor-deposited, and polarized light passing through the polarizer a is irradiated from above. Magnetic flux passes through the normal conducting portion of the sample, and the polarization plane of the magnetic film deposited on the sample rotates due to the Faraday effect. When this reflected light is observed through the analyzer b, the portion through which the magnetic flux passes g The part h that is not so and the part h that is not can be observed as a black and white contrast {H.Kirchner, Phys.Stat.Sol. (A) 4
(1971) 531}.
第5図は、中間状態の観察法を示したものであるが、こ
れを第二種超電導体に適用すると、混合状態の磁束分布
を観察することができ、白黒のコントラストの強弱から
磁性勾配を見積ることができる{H.U.Habermeier et a
l.Phys.Stat.Sol.(a)50(1978)187}。Fig. 5 shows the method of observing the intermediate state. When this is applied to a type II superconductor, the magnetic flux distribution in the mixed state can be observed, and the magnetic gradient is changed from the strength of the black and white contrast. You can estimate {HU Habermeier et a
l.Phys.Stat.Sol. (a) 50 (1978) 187}.
また最近になって、同じくEuS/EuF2の混晶系複合磁性薄
膜を蒸着して、酸化物高温超電導体であるYBa2Cu3Oxの
磁束分布を、温度10Kで観察した例が報告されている
{N.Moser et al.Physica C159(1989)117}。Recently, a case was also reported in which a mixed crystal composite magnetic thin film of EuS / EuF 2 was vapor-deposited and the magnetic flux distribution of YBa 2 Cu 3 O x , an oxide high-temperature superconductor, was observed at a temperature of 10K. {N. Moser et al. Physica C159 (1989) 117}.
(発明が解決しようとする課題) 磁気光学効果を用いた磁束分布の観察には、従来、磁性
薄膜としてユーロピウムカルコゲナイド(EuO,EuS,Eu
F2)だけが使われてきた。というのはこれらの材料がそ
なえる低温で強磁性体となり、大きなファラデー回転角
を持つという特性を利用しているためである。(Problems to be solved by the invention) Conventionally, as a magnetic thin film, europium chalcogenide (EuO, EuS, Eu) has been used to observe the magnetic flux distribution using the magneto-optical effect.
Only F 2 ) have been used. This is because these materials use the property that they become ferromagnetic at low temperatures and have a large Faraday rotation angle.
しかしながら従来の方法では、磁束分布の観察に際し
て、いちいち各試料にこれらの磁性膜を蒸着せねばなら
ず、その手間や測定後の除去を考えると非常に煩雑であ
り、材料の製造や製品の検査等に利用した場合には、大
幅なコストアップを招く。またこれらのEu系磁性膜のキ
ューリ温度は液体窒素温度(77K)よりも低いため、最
近の77K以上の臨界温度をもつ酸化物高温超電導体に対
しては、その適用は不可能である。ここに酸化物高温超
電導体では、その臨界温度の高さから液体窒素温度での
利用が考えられており、77Kで簡単に測定できないこと
は大きな欠点である。さらに試料内の磁束勾配に対応し
た白黒のコントラストの違いは、肉眼では捕らえにくい
ことから、コントラストを定量的に検出する装置やその
後の画像処理装置なども必要となる。However, in the conventional method, when observing the magnetic flux distribution, these magnetic films must be vapor-deposited on each sample one by one, and it is very complicated considering the labor and the removal after measurement, and the material manufacturing and the product inspection. If it is used for other purposes, the cost will be greatly increased. Moreover, since the Curie temperature of these Eu-based magnetic films is lower than the liquid nitrogen temperature (77K), it cannot be applied to the recent oxide high temperature superconductors with a critical temperature of 77K or higher. The high temperature oxide superconductor is considered to be used at liquid nitrogen temperature due to its high critical temperature, and the fact that it cannot be easily measured at 77K is a major drawback. Furthermore, since the difference between the black and white contrasts corresponding to the magnetic flux gradient in the sample is difficult to catch with the naked eye, a device for quantitatively detecting the contrast and an image processing device after that are required.
このように従来のEu系磁性膜を用いた磁束分布の観察法
には、測定の煩雑さに起因してコスト高となったり、使
用温度の面から制約を受けることの他、新たな装置を必
要とするなどの問題を残していたのである。As described above, the conventional method of observing the magnetic flux distribution using the Eu-based magnetic film increases the cost due to the complexity of the measurement and is restricted by the operating temperature. It left a problem such as a need.
この発明は、上記の問題を有利に解決するもので、従来
よりも容易かつ低コストで広い温度範囲にわたって利用
することができ、しかも内部の磁気的性状をより正確に
把握できる超電導体の磁気的内部性状検出方法を、その
検出装置と共に提案することを目的とする。The present invention advantageously solves the above-mentioned problems, and can be used more easily and at lower cost than conventional ones and can be used over a wide temperature range. Moreover, the magnetic properties of a superconductor capable of more accurately grasping the internal magnetic properties can be grasped. It is an object to propose an internal property detection method together with its detection device.
(課題を解決するための手段) すなわちこの発明は、超電導体の表面に、低温域におい
て自発磁化の方向が膜面に垂直な縞状磁区構造を有する
磁性薄膜を密接させ、該超電導体に磁場を印加しつつ、
その上方から偏光を照射し、この偏光照射に伴う磁気光
学効果によって磁性薄膜に表れる、超電導体内部の磁束
分布に対応した磁区幅の変化から、磁束密度分布を求め
ることにより、超電導体内部の磁気的性状を検出するこ
とからなる超電導体の磁気的内部性状検出方法(第1発
明)である。(Means for Solving the Problems) That is, the present invention is to make a magnetic thin film having a striped domain structure in which the direction of spontaneous magnetization is perpendicular to the film surface in a low temperature region in close contact with the surface of the superconductor, and the magnetic field is applied to the superconductor. While applying
By irradiating polarized light from above, and by calculating the magnetic flux density distribution from the change in the magnetic domain width corresponding to the magnetic flux distribution inside the superconductor that appears in the magnetic thin film due to the magneto-optical effect associated with this polarized light irradiation, the magnetic field inside the superconductor can be determined. It is a method for detecting a magnetic internal property of a superconductor, which comprises detecting a physical property (first invention).
またこの発明は、超電導材試料の冷却手段、該試料に対
する磁場印加手段および少なくとも偏光照射機能をもつ
該試料の観察手段を備える超電導体の磁気的内部性状検
出装置において、該試料の載置位置の上方に、少なくと
も下面に低温域において自発磁化の方向が膜面に垂直な
縞状磁区構造を有し、該縞状磁区の磁区幅が試料内部の
磁束分布に対応して変化する磁性薄膜をそなえ、かつ載
置された試料表面に対して密接する薄膜部材を、少なく
とも上下動可能に設置し、上記磁区幅の変化から、磁束
密度分布を求めることにより、超電導体内部の磁気的性
状を検出することからなる超電導体の磁気的内部性状検
出装置(第2発明)である。Further, the present invention provides a superconductor magnetic internal property detecting device comprising a superconducting material sample cooling means, a magnetic field applying means for the sample, and an observing means for the sample having at least a polarized light irradiation function. A magnetic thin film having a striped magnetic domain structure in which the direction of spontaneous magnetization is perpendicular to the film surface at least in the lower surface in the low temperature region, and the domain width of the striped magnetic domain changes corresponding to the magnetic flux distribution inside the sample. , And a thin film member that is in close contact with the mounted sample surface is installed so that it can move at least vertically, and the magnetic properties inside the superconductor are detected by obtaining the magnetic flux density distribution from the change in the magnetic domain width. It is a magnetic conductor internal property detection device (2nd invention) which consists of this.
なお、この発明において低温域とは150K以下程度の温度
域を意味する。In the present invention, the low temperature range means a temperature range of about 150 K or lower.
この発明において、磁性薄膜の素材としては、以下のも
のが有利に適合する。In the present invention, the following materials are suitable as materials for the magnetic thin film.
(1)化学式:R3Fe5O12またはR3Fe5-xMxO12 ここでR:Bi,Yおよび希土類元素のうちから選んだ一種ま
たは二種以上 M:Ga,AlおよびInのうちから選んだ一種または二種以上 x≦3 で表される鉄ガーネットを主組成とするもの。(1) Chemical formula: R 3 Fe 5 O 12 or R 3 Fe 5-x MxO 12 where one or more selected from R: Bi, Y and rare earth elements, among M: Ga, Al and In One or two or more selected ones whose main composition is iron garnet represented by x ≦ 3.
上記の化学式で表されるFeを含んだ鉄ガーネットは、一
軸磁気異方性を有し、大きなファラデー効果を持ってい
るので、縞状磁区を有する磁性膜とすることができる。
RとしてはYおよび希土類元素、さらにはBiを選ぶこと
ができ、これらを単独あるいは2種以上を適当に組み合
わせ、混合組成とすることにより、自発磁化の大きさや
温度特性、ファラデー回転角の大きさを変えることがで
きる。さらにFeの一部を、Ga,AlあるいはInで置換する
とFeによって生じる自発磁化の大きさを変えることがで
きる。なお置換によりFeの量が少なくなりすぎると効果
を失うので、この置換量xはx≦3の範囲とする。The iron garnet containing Fe represented by the above chemical formula has uniaxial magnetic anisotropy and has a large Faraday effect, so that it can be a magnetic film having a striped magnetic domain.
As R, Y and rare earth elements, and further Bi can be selected. These can be used alone or in a suitable combination of two or more kinds to form a mixed composition, whereby the magnitude of spontaneous magnetization, temperature characteristics, and Faraday rotation angle can be adjusted. Can be changed. Furthermore, by substituting a part of Fe with Ga, Al or In, the magnitude of spontaneous magnetization generated by Fe can be changed. Since the effect is lost if the amount of Fe becomes too small by the substitution, the substitution amount x is set in the range of x ≦ 3.
(2)化学式:AFeO3 ここでA:Yおよび希土類元素のうちから選んだ一種また
は二種以上 で表される希土類オルソフェライトを主組成とするも
の。(2) Chemical formula: AFeO 3 Here, the main composition is a rare earth orthoferrite represented by one or more selected from A: Y and rare earth elements.
上記の化学式で表される希土類オルソフェライトは、低
温で自発磁化がa軸方向を向くスピン再配列が起き、一
軸磁気異方性が現れて、薄膜にすると縞状磁区を得るこ
とができる。AをSmとの混合組成にするとこのスピン再
配列温度を変えることができ、磁束観察に最適なものを
選ぶことができる。またスピン再配列温度を変えるため
に、Coを少量添加することはこの発明の効果を妨げるも
のではない。In the rare earth orthoferrite represented by the above chemical formula, spin rearrangement occurs in which the spontaneous magnetization is oriented in the a-axis direction at low temperature, uniaxial magnetic anisotropy appears, and when it is made into a thin film, striped magnetic domains can be obtained. When A has a mixed composition with Sm, this spin rearrangement temperature can be changed, and the optimum one for magnetic flux observation can be selected. Also, adding a small amount of Co in order to change the spin rearrangement temperature does not hinder the effect of the present invention.
(3)化学式:BFe12O19またはBFe12-xAlxO19 ここでB:Pb,BaおよびSrのうちから選んだ一種または二
種以上 x≦6 で表されるマグネトプランバイトを主組成とするもの。(3) Chemical formula: BFe 12 O 19 or BFe 12-x Al x O 19 Here, one or more selected from B: Pb, Ba and Sr. The main composition is magnetoplumbite represented by x ≦ 6. What to do.
上記の化学式で表されるマグネトプランバイトは、立方
晶の結晶で、磁化容易軸はc軸方向であるので、薄膜に
した場合、c軸が膜面に垂直になり、縞状磁区を得るこ
とができる。BはPb,BaおよびSrの組合せで選ばれ、Al
を添加することにより自発磁化の大きさを変化させるこ
とができる。とはいえAl添加によりFeの量が少なくなり
すぎると効果を失うので、この置換量xはx≦6の範囲
とする。The magnetoplumbite represented by the above chemical formula is a cubic crystal, and the easy axis of magnetization is in the c-axis direction. Therefore, when made into a thin film, the c-axis becomes perpendicular to the film surface and a striped magnetic domain can be obtained. You can B is selected from the combination of Pb, Ba and Sr, and Al
The amount of spontaneous magnetization can be changed by adding. However, if the amount of Fe becomes too small due to the addition of Al, the effect is lost, so the substitution amount x is set within the range of x ≦ 6.
(4)化学式:XZ ここでX:Yおよび希土類元素のうちから選んだ一種また
は二種以上 Z:Fe,CoおよびNiのうちから選んだ一種または二種以上 で表されるアモルファス希土類−遷移元素合金を主組成
とするもの。(4) Chemical formula: XZ Amorphous rare earth-transition element represented by one or more selected from X: Y and rare earth elements, and one or more selected from Z: Fe, Co and Ni Main alloy composition.
上記の化学式で表されるアモルファス希土類−遷移元素
合金を主成分とする合金薄膜を、スパッター法、蒸着法
等で作製すると、任意の組成比でアモルファス構造とな
り、膜面に垂直な磁化を有するようになる。膜厚が500
Å程度以下の厚さなら、透過光のファラデー効果を利用
できるが、厚い場合は同じ磁気光学効果の磁気カー効果
を用いて磁区模様を観察することになる。また耐食性な
ど磁性以外の機能を高めるために、合金組成としてTi,A
l,Cr,Bi,Beなどの元素を添加してもこの発明の効果を妨
げるものではない。When an alloy thin film mainly composed of the amorphous rare earth-transition element alloy represented by the above chemical formula is produced by a sputtering method, a vapor deposition method, etc., it has an amorphous structure with an arbitrary composition ratio and has a magnetization perpendicular to the film surface. become. Film thickness is 500
If the thickness is less than about Å, the Faraday effect of transmitted light can be used, but if it is thick, the magnetic Kerr effect of the same magneto-optical effect is used to observe the magnetic domain pattern. In addition, in order to enhance functions other than magnetism such as corrosion resistance, the alloy composition of Ti, A
The addition of elements such as l, Cr, Bi and Be does not hinder the effect of the present invention.
(5)MnBi,MnCnBi,MnGaGeおよびMnAlGeのうちから選ん
だ少なくとも一種。(5) At least one selected from MnBi, MnCnBi, MnGaGe, and MnAlGe.
上記の組成物のうち、MnBiは六方晶系のNiAs型の構造を
とり、c軸方向に非常に大きな一軸磁気異方性を持って
いる。従って磁性膜を作るとc軸が膜面に垂直になり、
この発明の目的を達成することができる。またMnBiにCu
を加えたMnCuBiやMnGaGe,MnAlGeなども同様に使用する
ことができる。Among the above compositions, MnBi has a hexagonal NiAs type structure and has a very large uniaxial magnetic anisotropy in the c-axis direction. Therefore, when making a magnetic film, the c-axis becomes perpendicular to the film surface,
The object of the present invention can be achieved. Also MnBi to Cu
Similarly, MnCuBi, MnGaGe, MnAlGe, etc. to which is added can also be used.
この発明において、超電導体の表面に磁性薄膜を密接さ
せるには、透光性基板の少なくとも片面に、自発磁化の
方向が膜面に垂直な縞状磁区構造を有する磁性薄膜を被
着させた薄膜部材を用意し、この薄膜部材を磁性薄膜を
下面として、超電導体の研磨表面に、10-3〜10g/mm2程
度の圧力で押接する方法が簡便さの点から最も好ましい
けれども、勿論、蒸着法やイオンスパッタリングなどに
よって、超電導体の表面に直接、磁性薄膜を被成しても
良い。In the present invention, in order to bring the magnetic thin film into close contact with the surface of the superconductor, a thin film obtained by applying a magnetic thin film having a striped domain structure in which the direction of spontaneous magnetization is perpendicular to the film surface on at least one surface of the transparent substrate. From the viewpoint of simplicity, the method of preparing a member and pressing this thin film member on the polished surface of the superconductor with a pressure of about 10 -3 to 10 g / mm 2 with the magnetic thin film as the lower surface is the most preferable, but of course vapor deposition The magnetic thin film may be directly formed on the surface of the superconductor by the method or ion sputtering.
なお上記のような押接によって、薄膜部材を超電導体の
表面に密接する場合には、超電導体の表面は、中心線平
均粗さRaで1.5μm以下程度の表面粗さとしておくこと
が望ましい。When the thin film member is brought into close contact with the surface of the superconductor by the pressing as described above, it is desirable that the surface of the superconductor has a center line average roughness Ra of about 1.5 μm or less.
また、磁性薄膜を透光性基板の表面に被成するには、蒸
着法やイオンスパッタリングなどが利用できるのは勿論
のこと、上掲した各組成になる薄板(単結晶薄板)を基
板表面に貼着することによっても達成できる。なおとく
に単結晶薄板を利用する場合は、その厚みを30〜50μm
程度として基板を省略することもできる。Further, in order to coat the surface of the transparent substrate with the magnetic thin film, it goes without saying that vapor deposition or ion sputtering can be used, and a thin plate (single crystal thin plate) having each of the above-mentioned compositions is formed on the substrate surface. It can also be achieved by sticking. Especially when using a single crystal thin plate, its thickness should be 30-50 μm.
The substrate may be omitted as a degree.
さらに磁性薄膜は、必ずしも単層膜とする必要はなく、
全体として垂直磁化をもち、縞状磁区構造になるもので
あれば多層膜さらには複合膜であっても良い。また基板
としては、透光性があれば何れもが使用できるが、とり
わけガーネットなかでもガドリニウムガリウムガーネッ
ト(GGG)が有利に適合する。Furthermore, the magnetic thin film does not necessarily have to be a single layer film,
A multilayer film or a composite film may be used as long as it has perpendicular magnetization as a whole and has a striped magnetic domain structure. Any substrate can be used as long as it has a light-transmitting property, and gadolinium gallium garnet (GGG) is particularly suitable among garnets.
なおかかる磁性薄膜の厚みは、0.1〜50μm程度また薄
板の場合には5〜50μm程度とするのが好ましい。The thickness of the magnetic thin film is preferably about 0.1 to 50 μm, and in the case of a thin plate, about 5 to 50 μm.
次に、この発明法の実施に用いて好適な超電導体の磁気
的内部性状検出装置を、図面に従って説明する。Next, a magnetic internal property detecting apparatus for a superconductor suitable for carrying out the method of the present invention will be described with reference to the drawings.
第1図aに、その好適装置を模式で示す。図中番号1は
被検体である超電導材試料、2はこの試料表面に密接接
合する薄膜部材であって、この薄膜部材2の少なくとも
下面には垂直磁化をもち、縞状磁区構造を有する磁性薄
膜3が被成されている。4は試料を載置、保持するサン
プルホルダー、5は抵抗測温体からなるを可とする温度
計、6はホール素子からなるを可とする磁気測定器であ
り、7はこれらの各部材を収納するクライオスタットで
ある。また8はクライオスタット7に設けたのぞき窓、
9は電磁石からなるを可とする磁場印加装置、10は偏光
金属顕微鏡の対物レンズである。The preferred device is shown schematically in FIG. 1a. In the figure, reference numeral 1 is a specimen of a superconducting material, 2 is a thin film member that is in close contact with the surface of the sample, and at least the lower surface of the thin film member 2 has perpendicular magnetization and is a magnetic thin film having a striped domain structure. 3 are covered. Reference numeral 4 is a sample holder for mounting and holding a sample, 5 is a thermometer that can be composed of a resistance thermometer, 6 is a magnetic measuring device that can be composed of a Hall element, and 7 is each of these members. It is a cryostat to store. In addition, 8 is a viewing window provided in the cryostat 7,
Reference numeral 9 is a magnetic field applying device which can be composed of an electromagnet, and 10 is an objective lens of a polarized metal microscope.
そして11が、薄膜部材2を少なくとも上下動可能に保持
する把持部材であり、この把持部材11は、第1図b、c
およびdに示すように、試料の装入、載置時には、薄膜
部材2を載置位置の上方もしくは横方向の退避位置に待
機させておき、試料が所定の位置に装入、載置されたの
ち、その上方から薄膜部材2を下降させて、試料表面に
密接させることができるしくみになっている。Reference numeral 11 is a gripping member that holds the thin film member 2 at least vertically, and this gripping member 11 is shown in FIGS.
As shown in d and d, when the sample is loaded and placed, the thin film member 2 is made to stand by above the loading position or in the retracted position in the lateral direction, and the sample is loaded and placed in the predetermined position. After that, the thin film member 2 is lowered from above to bring it into close contact with the sample surface.
ここにかかる密接に際しては、薄膜部材2の自重をその
まま利用することもできる。In this case, the dead weight of the thin film member 2 can be used as it is.
なお薄膜部材2を試料表面に密接させるには、上記した
ように薄膜部材2を移動させる方法の他、薄膜部材2は
試料載置位置の上方に固定しておき、この固定した薄膜
部材2に対し試料を上昇させるという方法もある。In order to bring the thin film member 2 into close contact with the sample surface, in addition to the method of moving the thin film member 2 as described above, the thin film member 2 is fixed above the sample mounting position, and the thin film member 2 is fixed to the fixed thin film member 2. On the other hand, there is also a method of raising the sample.
(作用) さて上記したような装置を用いて、以下の実験を行っ
た。(Operation) The following experiment was conducted using the apparatus as described above.
まず、溶融法{M.Murakami et al.,Jpn.J.Appl.Phys.28
(1989)1189}によって、酸化物高温超電導体であるYB
a2Cu3Oxを作製し、0.4×1×1(mm3)の形状に切り出
して測定用試料1とした。ついで表面を研磨により平滑
な状態に仕上げた。この試料の超電導臨界温度は磁化測
定により92Kであった。First, the melting method {M.Murakami et al., Jpn.J.Appl.Phys.28
(1989) 1189}, YB is an oxide high temperature superconductor.
A 2 Cu 3 O x was prepared and cut into a 0.4 × 1 × 1 (mm 3 ) shape to obtain a measurement sample 1. Then, the surface was finished to be smooth by polishing. The superconducting critical temperature of this sample was 92 K as measured by magnetization.
この試料1を、第1図aに示したように、銅製のサンプ
ルホルダー4の所定位置に載置し、その上から磁性薄膜
3を被成した面を下にして薄膜部材2を密接させた。使
用した磁性薄膜3は、厚さ4μmの鉄ガーネット(BiGd
YbFe5O12)磁性薄膜で、液相エピタキシー法でガドリニ
ウムガリウムガーネット(GGG)基板上に被成したもの
である。As shown in FIG. 1A, this sample 1 was placed on a predetermined position of a sample holder 4 made of copper, and the thin film member 2 was brought into close contact with the surface on which the magnetic thin film 3 was formed facing down. . The magnetic thin film 3 used was an iron garnet (BiGd) with a thickness of 4 μm.
YbFe 5 O 12 ) magnetic thin film deposited on a gadolinium gallium garnet (GGG) substrate by liquid phase epitaxy.
その後、同図に示したクライオスタット7内に装入し、
低温ヘリウムガスを用いて試料1と磁性薄膜2を冷却し
た。After that, insert into the cryostat 7 shown in the figure,
The sample 1 and the magnetic thin film 2 were cooled using low temperature helium gas.
温度モニターと温度制御はサンプルホルダー4に埋め込
んだ温度計5とヒータ(図示省略)によって行なった。
磁場はクライオスタット7の下に配置した電磁石9で印
加し、試料1に印加される磁場の大きさはサンプルホル
ダー4に取り付けたホール素子6により測定した。クラ
イオスタット7の上面にはガラスののぞき窓8があり、
それを通して偏光金属顕微鏡により試料1および磁性薄
膜3を観察した。The temperature monitor and temperature control were performed by a thermometer 5 and a heater (not shown) embedded in the sample holder 4.
The magnetic field was applied by the electromagnet 9 arranged under the cryostat 7, and the magnitude of the magnetic field applied to the sample 1 was measured by the Hall element 6 attached to the sample holder 4. There is a glass peep window 8 on the top of the cryostat 7.
Through this, the sample 1 and the magnetic thin film 3 were observed with a polarizing metallographic microscope.
磁場0の状態から冷却し、温度を77Kに保持したのち、
磁性薄膜に偏光を照射しながら、磁場を変化させて磁性
薄膜の磁区模様を観察した。After cooling from the state of no magnetic field and maintaining the temperature at 77K,
While irradiating the magnetic thin film with polarized light, the magnetic field was changed and the magnetic domain pattern of the magnetic thin film was observed.
第2図a,bおよびcにそれぞれ、このようにして撮影し
た超電導試料と、その上の磁性薄膜に表れた磁区模様を
示す。2A, 2B and 2C show the superconducting sample photographed in this way and the magnetic domain pattern appearing on the magnetic thin film thereon.
磁区模様は、迷路状のいわゆる縞状磁区となっている
が、これは磁性薄膜の自発磁化が膜面に垂直の方向を向
き、隣接する二つの磁区内の自発磁化が互いに反対方向
を向いているからである。この原因は、磁化容易方向が
膜面に垂直であり、磁化を面と垂直に立てようとする磁
気異方性エネルギーの作用が、磁化を面内に向けようと
する反磁場の作用よりも大きくなることによる。このよ
うな磁区構造を持つ磁性薄膜に、膜面と垂直に磁場を印
加すると、磁場と同方向の自発磁化を有する磁区は広が
り、一方、反対方向の自発磁化を有する磁区は狭くな
る。The magnetic domain pattern is a labyrinthine so-called striped magnetic domain, in which the spontaneous magnetization of the magnetic thin film faces the direction perpendicular to the film surface, and the spontaneous magnetization in two adjacent magnetic domains faces the opposite directions. Because there is. This is because the direction of easy magnetization is perpendicular to the film surface, and the action of magnetic anisotropy energy that tends to set the magnetization perpendicular to the plane is larger than the action of the demagnetizing field that tends to direct the magnetization in the plane. It depends. When a magnetic field is applied to a magnetic thin film having such a magnetic domain structure in a direction perpendicular to the film surface, magnetic domains having spontaneous magnetization in the same direction as the magnetic field expand, while magnetic domains having spontaneous magnetization in the opposite direction narrow.
第2図a(340Oeの磁場を印加した場合)では、超電導
体以外の部分は印加磁場に応じた磁区幅(明部)に拡が
っているが、超電導体の内部には磁束が入り込んでな
く、磁区幅は狭いままである。ただし、試料端部や磁束
ピン止め力が比較的弱い部分には磁束が入り込み、磁区
幅が拡がっている。印加磁場が増加するにつれて、第2
図b(470Oeの磁場を印加した場合)および同図c(680
Oeの磁場を印加した場合)に示すように、磁束が超電導
体の内部に入り込んでいく様子がわかる。In Fig. 2a (when a magnetic field of 340 Oe is applied), the magnetic domain width (bright part) corresponding to the applied magnetic field expands in the parts other than the superconductor, but the magnetic flux does not enter inside the superconductor, The domain width remains narrow. However, the magnetic flux enters the edge portion of the sample and the portion where the magnetic flux pinning force is relatively weak, and the magnetic domain width is expanded. As the applied magnetic field increases, the second
Figure b (when applying a magnetic field of 470 Oe) and Figure c (680
As shown in (when a magnetic field of Oe is applied), it can be seen that the magnetic flux enters the inside of the superconductor.
なお第2図dは、第2図cの状態から印加磁場を300Oe
まで減少させたときの磁区模様を示したものであるが、
超伝導体内部において、細かい磁区構造が見えず、印加
磁束がトラップされている部分があることが明確に示さ
れている。Note that FIG. 2d shows an applied magnetic field of 300 Oe from the state of FIG. 2c.
It shows the magnetic domain pattern when it is reduced to
It is clearly shown that a fine magnetic domain structure is not visible inside the superconductor, and there is a portion where the applied magnetic flux is trapped.
従って、超電導体内部の磁気的性状を検出するには、上
述したように、超電導材料を超電導を示す温度まで冷却
したのち、磁場を印加するという手順の他、磁場を印加
した状態で超電導を示す温度まで冷却したのち、印加磁
場を減少したり取り去るという手順によっても、同様に
して検出できる。Therefore, in order to detect the magnetic properties inside the superconductor, as described above, the superconducting material is cooled to a temperature indicating superconductivity and then a magnetic field is applied. The same detection can be carried out by the procedure of cooling to temperature and then reducing or removing the applied magnetic field.
さらにこの発明に従う方法によれば、以下に述べるよう
にして、磁性薄膜に表れる縞状磁区の磁区幅から、超伝
導体内部の磁束密度分布を正確に算出することもでき
る。Further, according to the method of the present invention, the magnetic flux density distribution inside the superconductor can be accurately calculated from the magnetic domain width of the striped magnetic domain appearing in the magnetic thin film as described below.
第3図に、磁性薄膜として鉄ガーネット(BiGdYbFe
5O12)磁性薄膜を用いた場合の、85Kにおける印加磁場
と磁区幅との関係を示す。Fig. 3 shows iron garnet (BiGdYbFe) as a magnetic thin film.
5 shows the relationship between the applied magnetic field and the domain width at 85 K when using a 5 O 12 ) magnetic thin film.
同図から明らかなように、印加磁場の増加に伴って、磁
区幅も大きくなっている。As is clear from the figure, the magnetic domain width increases as the applied magnetic field increases.
従って、この関係を利用すれば、逆に磁区幅から磁場の
強さひいては超伝導体内部の磁束密度を求めることがで
きるのである。Therefore, by utilizing this relationship, on the contrary, the strength of the magnetic field and hence the magnetic flux density inside the superconductor can be obtained from the magnetic domain width.
すなわち磁性薄膜として上記の鉄ガーネット膜を用いて
実験を行い、外部磁場が340Oeのときに第4図aに示す
磁区模様が得られた場合には、第3図に示した関係曲線
を利用して、第4図bに示す磁束密度の等高線図が直ち
に求まるのである。That is, an experiment was conducted using the above iron garnet film as the magnetic thin film, and when the magnetic domain pattern shown in FIG. 4a was obtained when the external magnetic field was 340 Oe, the relational curve shown in FIG. 3 was used. Thus, the magnetic flux density contour map shown in FIG. 4b can be immediately obtained.
上記のようにして、この発明によれば、超電導体内部の
磁束密度分布が正確に測定できるのである。As described above, according to the present invention, the magnetic flux density distribution inside the superconductor can be accurately measured.
なお第3図に示したような印加磁場と磁区幅との関係
は、磁性薄膜の素材に固有のものであるから、各素材毎
に上記のような関係を求めておけば、磁区幅の測定か
ら、直ちに超電導体内部の磁束密度分布を求めることが
できるわけである。Since the relationship between the applied magnetic field and the magnetic domain width as shown in FIG. 3 is unique to the material of the magnetic thin film, if the above relationship is obtained for each material, the measurement of the magnetic domain width will be performed. Therefore, the magnetic flux density distribution inside the superconductor can be immediately obtained.
この点、従来のようにユウロピウムカルコゲナイドを利
用した場合は、磁区幅ではなく磁区そのもののコントラ
ストの強弱から磁束変化を見積もっていたため、肉眼に
よる観察から直ちに磁束勾配を把握することはできなか
ったのである。In this respect, when using europium chalcogenide as in the past, since the magnetic flux change was estimated from the strength of the contrast of the magnetic domain itself rather than the width of the magnetic domain, it was not possible to immediately grasp the magnetic flux gradient from visual observation. .
(実施例) 実施例1 溶融法によって作製した酸化物高温超電導体YBa2Cu3Ox
を、0.4×1×1.5(mm3)の形状に切り出したのち、表
面をRaで0.5μmに研磨し、試料とした。(Example) Example 1 An oxide high temperature superconductor YBa 2 Cu 3 Ox produced by a melting method.
Was cut into a 0.4 × 1 × 1.5 (mm 3 ) shape, and the surface was polished to 0.5 μm with Ra to obtain a sample.
ついでこの試料を、前掲第1図に示した装置に装入、載
置し、85Kに保持しつつ、磁気的内部性状について調査
した。なお薄膜部材としては、ガドリニウムガリウムガ
ーネット基板の片面に、液相エピタキシー法によってBi
GdYbFe5O12を厚み:4μmに被成したものを用いた。Then, this sample was loaded and placed in the apparatus shown in FIG. 1 and held at 85K, and the magnetic internal properties were investigated. As a thin film member, one surface of a gadolinium gallium garnet substrate was coated with Bi by liquid phase epitaxy.
GdYbFe 5 O 12 having a thickness of 4 μm was used.
磁場を印加しながら磁区模様を観察したところ、第2図
a,bおよびcに示したところと同じように、磁場の増加
に伴って、試料以外の薄膜および試料端部や磁束ピン止
め力が比較的弱い部分では磁区幅が拡大していったけれ
ども、超電導体内部では磁場が排除され磁区幅には変化
がないことが確かめられた。Observation of the magnetic domain pattern while applying a magnetic field, Fig. 2
As shown in a, b, and c, as the magnetic field increased, the magnetic domain width expanded in the thin film other than the sample, the sample end, and the part where the magnetic flux pinning force was relatively weak. It was confirmed that the magnetic field was eliminated inside the superconductor and the domain width did not change.
実施例2 溶融法によって作製した酸化物高温超電導体YBa2Cu3Ox
を0.4×1×1.5(mm3)の形状に切り出し、表面をRaで
0.4μmに研磨し、試料とした。Example 2 High temperature oxide superconductor YBa 2 Cu 3 Ox produced by the melting method
Is cut into a 0.4 × 1 × 1.5 (mm 3 ) shape, and the surface is Ra
It was ground to 0.4 μm and used as a sample.
ついでこの試料を、実施例1と同様、前掲第1図に示し
た装置に装入、載置し、77Kに保持しつつ、磁場を印加
しながら磁気的内部性状について調査した。なお薄膜部
材としては、ガドリニウムガリウムガーネット基板の片
面にBiYFe4A1012を液相エピタキシー法によって厚み:3
μmに被成したものを用いた。Then, this sample was charged and placed in the apparatus shown in FIG. 1 above as in Example 1, and the magnetic internal properties were investigated while applying a magnetic field while maintaining the temperature at 77K. As the thin film member, BiYFe 4 A10 12 was formed on one surface of the gadolinium gallium garnet substrate by a liquid phase epitaxy method to a thickness of 3
What was formed to a thickness of μm was used.
この場合も、実施例1と同様、磁場の増加に伴って試料
以外の部分および試料端部や磁束ピン止め力が比較的弱
い部分では磁区幅が拡がったけれども、超電導体内部で
は磁場が排除され磁区幅に変化はなかった。Also in this case, as in Example 1, the magnetic domain width was widened in the part other than the sample, the sample end, and the part where the magnetic flux pinning force was relatively weak as the magnetic field increased, but the magnetic field was eliminated inside the superconductor. There was no change in the magnetic domain width.
実施例3 溶融法によって作製した酸化物高温超電導体YBa2Cu3Ox
を0.4×1×1.5(mm3)の形状に切り出し、表面をRaで
0.9μmに研磨し、試料とした。Example 3 Oxide high temperature superconductor YBa 2 Cu 3 Ox produced by melting method
Is cut into a 0.4 × 1 × 1.5 (mm 3 ) shape, and the surface is Ra
It was ground to 0.9 μm and used as a sample.
ついでこの試料を、前掲第1図に示した装置に装入、載
置した後、ガドリニウムガリウムガーネット基板の片面
に厚み:5μmのYFe5O12磁性薄膜をそなえる薄膜部材
を、該薄膜を下にして試料研磨面に密接させた。Then, after placing this sample in the apparatus shown in FIG. 1 and mounting it, a thin film member having a YFe 5 O 12 magnetic thin film having a thickness of 5 μm on one side of a gadolinium gallium garnet substrate was placed on the bottom. The sample was brought into close contact with the polished surface.
その後、500Oeの磁場を印加しながら冷却して50Kに保持
したのち、磁場を減少させながら、そのときの磁区模様
を観察した。Then, after cooling while applying a magnetic field of 500 Oe and maintaining at 50 K, the magnetic domain pattern at that time was observed while reducing the magnetic field.
その結果、磁場の減少に伴って、試料内にトラップされ
た磁束が表れてきた、最終的には第2図dに示したよう
な磁区模様が観察された。As a result, the magnetic flux trapped in the sample appeared as the magnetic field decreased, and finally the magnetic domain pattern as shown in FIG. 2d was observed.
実施例4 溶融法によって作製した酸化物高温超電導体YBa2Cu3Ox
を0.4×1×1.5(mm3)の形状に切り出し、表面をRaで
0.6μmに研磨し、試料とした。Example 4 Oxide high temperature superconductor YBa 2 Cu 3 Ox produced by melting method
Is cut into a 0.4 × 1 × 1.5 (mm 3 ) shape, and the surface is Ra
It was ground to 0.6 μm and used as a sample.
ついでこの試料を、前掲第1図に示した装置に装入、載
置し、40Kに保持しつつ、磁場を印加しながら磁気的内
部性状について調査した。なお薄膜部材としては、厚
み:40μmのEu0.7Sm0.3FeO3単結晶薄板を用いた。Next, this sample was loaded and placed in the apparatus shown in FIG. 1 above and held at 40K, and the magnetic internal properties were investigated while applying a magnetic field. As the thin film member, an Eu 0.7 Sm 0.3 FeO 3 single crystal thin plate having a thickness of 40 μm was used.
この場合も、実施例1と同様、磁場の増加に伴って試料
以外の部分および試料端部や磁束ピン止め力が比較的弱
い部分では磁区幅が拡がったけれども、超電導体内部で
は磁場が排除され磁区幅に変化は観察されなかった。Also in this case, as in Example 1, the magnetic domain width was widened in the part other than the sample, the sample end, and the part where the magnetic flux pinning force was relatively weak as the magnetic field increased, but the magnetic field was eliminated inside the superconductor. No change was observed in the magnetic domain width.
実施例5 溶融法によって作製した酸化物高温超電導体YBa2Cu3Ox
を0.4×1×1.5(mm3)の形状に切り出し、表面をRaで
1.0μmに研磨し、試料とした。Example 5 Oxide high temperature superconductor YBa 2 Cu 3 Ox produced by melting method
Is cut into a 0.4 × 1 × 1.5 (mm 3 ) shape, and the surface is Ra
The sample was polished to 1.0 μm and used as a sample.
ついでこの試料を、前掲第1図に示した装置に装入、載
置し、40Kに保持しつつ、磁場を印加しながら磁気的内
部性状について調査した。なお薄膜部材としては、厚
み:30μmのBaFe10Al2O19単結晶薄板を用いた。Next, this sample was loaded and placed in the apparatus shown in FIG. 1 above and held at 40K, and the magnetic internal properties were investigated while applying a magnetic field. As the thin film member, a BaFe 10 Al 2 O 19 single crystal thin plate having a thickness of 30 μm was used.
この場合も、実施例1と同様、磁場の増加に伴って試料
以外の部分および試料端部や磁束ピン止め力が比較的弱
い部分では磁区幅が拡がったけれども、超電導体内部で
は磁場が排除され磁区幅に変化は観察されなかった。Also in this case, as in Example 1, the magnetic domain width was widened in the part other than the sample, the sample end, and the part where the magnetic flux pinning force was relatively weak as the magnetic field increased, but the magnetic field was eliminated inside the superconductor. No change was observed in the magnetic domain width.
以上、好適実施例について具体的に説明したけれども、
この発明は上記の実施例のみに限定されるものではな
く、その主旨を逸脱しない範囲において種々変更が可能
なことは言うまでもない。Although the preferred embodiment has been specifically described above,
It is needless to say that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the invention.
(発明の効果) かくしてこの発明法によれば、容易かつ簡便に、超電導
体内部の磁気的性状を把握することができ、従って超電
導体を使用した材料や製品の開発、製造に際して偉効を
奏する。(Effects of the Invention) Thus, according to the method of the present invention, it is possible to easily and easily grasp the magnetic properties inside the superconductor, and therefore, it is possible to achieve great effects in the development and manufacturing of materials and products using the superconductor. .
またこの発明装置は、製造工程におけるオンライン検査
装置としてライン中に組み込むことができるので、実操
業において著しい効率のアップのみならず、大幅なコス
トダウンが達成できる。Further, since the device of the present invention can be incorporated in a line as an on-line inspection device in the manufacturing process, not only the efficiency can be remarkably improved in the actual operation, but also the cost can be remarkably reduced.
第1図aは、この発明に従う好適装置の模式図、同図b,
cおよびdはいずれも、その要部詳細図、 第2図a,b,cおよびdはそれぞれ、印加磁場の変更に伴
う磁性薄膜に表れた磁区模様の変化状況を示した図、 第3図は、鉄ガーネット(BiGdYbFe5O12)磁性薄膜を用
いた場合の、85Kにおける印加磁場と磁区幅(明部)と
の関係を示したグラフ、 第4図aは、磁性薄膜上の磁区模様、同図bはこの磁区
模様から導出した磁束密度の等高線図、 第5図は、従来法に従う超電導体内部の磁気的性状観察
要領の説明図である。 1…超電導材試料、2…薄膜部材 3…磁性薄膜、4…サンプルホルダー 5…温度計、6…磁気測定器 7…クライオスタット、8…のぞき窓 9…磁場印加装置、10…対物レンズ 11…把持部材 a…偏光子、b…検光子 c…円板状試料、d…複合膜 e…液体ヘリウム、f…磁場 g…磁束が通っている部分 h…磁束が通っていない部分FIG. 1a is a schematic view of a preferred device according to the present invention, FIG.
c and d are both detailed diagrams of the main parts, and FIGS. 2 a, b, c and d are diagrams showing changes in the magnetic domain pattern appearing in the magnetic thin film due to the change of the applied magnetic field, respectively. Is a graph showing the relationship between the applied magnetic field at 85 K and the magnetic domain width (bright part) when an iron garnet (BiGdYbFe 5 O 12 ) magnetic thin film was used, and FIG. 4 a is a magnetic domain pattern on the magnetic thin film. FIG. 5B is a contour diagram of magnetic flux density derived from this magnetic domain pattern, and FIG. 5 is an explanatory diagram of a magnetic property observing procedure inside the superconductor according to the conventional method. DESCRIPTION OF SYMBOLS 1 ... Superconducting material sample, 2 ... Thin film member 3 ... Magnetic thin film, 4 ... Sample holder 5 ... Thermometer, 6 ... Magnetic measuring instrument 7 ... Cryostat, 8 ... Peep window 9 ... Magnetic field applying device, 10 ... Objective lens 11 ... Grip Member a ... Polarizer, b ... Analyzer c ... Disc-shaped sample, d ... Composite film e ... Liquid helium, f ... Magnetic field g ... Part where magnetic flux passes h ... Part where magnetic flux does not pass
───────────────────────────────────────────────────── フロントページの続き (72)発明者 後藤 聡志 東京都江東区東雲1丁目14番3号 財団法 人国際超電導産業技術研究センター超電導 工学研究所内 (72)発明者 吉田 政司 東京都江東区東雲1丁目14番3号 財団法 人国際超電導産業技術研究センター超電導 工学研究所内 (72)発明者 腰塚 直己 東京都江東区東雲1丁目14番3号 財団法 人国際超電導産業技術研究センター超電導 工学研究所内 (72)発明者 村上 雅人 東京都江東区東雲1丁目14番3号 財団法 人国際超電導産業技術研究センター超電導 工学研究所内 (56)参考文献 特開 昭47−28967(JP,A) 特開 昭53−50777(JP,A) 特開 昭61−286763(JP,A) 特開 昭62−102103(JP,A) 特開 昭58−139082(JP,A) 特開 昭59−218971(JP,A) 特開 昭62−150185(JP,A) 特開 昭62−188982(JP,A) 特公 昭40−19674(JP,B1) 「磁性体ハンドブック」pp.1200− 1201 朝倉書店 1975年6月30日発行 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Satoshi Goto 1-14-3 Shinonome, Koto-ku, Tokyo Inside the Superconducting Engineering Laboratory, Foundation Superintendent Industrial Technology Research Center (72) Masaji Yoshida Shinonome, Koto-ku, Tokyo 1-14-3 Foundation Superhuman Industrial Technology Research Center Superconductivity Engineering Laboratory (72) Inventor Naoki Koshizuka 1-14-3 Shinonome, Koto-ku Tokyo Metropolitan Superconductivity Engineering Research Center Superconductivity Engineering Laboratory (72) Inventor Masato Murakami, 1-14-3, Shinonome, Koto-ku, Tokyo Inside the Institute of Superconductivity Engineering, Research Center for International Superconductivity Technology (56) References JP 47-28967 (JP, A) JP Sho 53-50777 (JP, A) JP-A-61-286763 (JP, A) JP-A-62-102103 (JP, A) Kai 58-139082 (JP, A) JP 59-218971 (JP, A) JP 62-150185 (JP, A) JP 62-188982 (JP, A) JP 40-19674 (JP JP, B1) "Magnetic handbook" pp. 1200-1201 Asakura Shoten, June 30, 1975
Claims (2)
化の方向が膜面に垂直な縞状磁区構造を有する磁性薄膜
を密接させ、該超電導体に磁場を印加しつつ、その上方
から偏光を照射し、この偏光照射に伴う磁気光学効果に
よって磁性薄膜に表れる、超電導体内部の磁束分布に対
応した磁区幅の変化から、磁束密度分布を求めることに
より、超電導体内部の磁気的性状を検出することを特徴
とする超電導体の磁気的内部性状検出方法。1. A magnetic thin film having a striped magnetic domain structure in which the direction of spontaneous magnetization is perpendicular to the film surface in the low temperature region is brought into close contact with the surface of the superconductor, and a magnetic field is applied to the superconductor while polarizing from above. The magnetic properties inside the superconductor can be detected by determining the magnetic flux density distribution from the change in the magnetic domain width corresponding to the magnetic flux distribution inside the superconductor that appears in the magnetic thin film due to the magneto-optical effect associated with this polarized light irradiation. A method for detecting magnetic internal properties of a superconductor characterized by:
磁場印加手段および少なくとも偏光照射機能をもつ該試
料の観察手段を備える超電導体の磁気的内部性状検出装
置において、該試料の載置位置の上方に、少なくとも下
面に低温域において自発磁化の方向が膜面に垂直な縞状
磁区構造を有し、該縞状磁区の磁区幅が試料内部の磁束
分布に対応して変化する磁性薄膜をそなえ、かつ載置さ
れた試料表面に対して密接する薄膜部材を、少なくとも
上下動可能に設置し、上記磁区幅の変化から、磁束密度
分布を求めることにより、超電導体内部の磁気的性状を
検出することを特徴とする超電導体の磁気的内部性状検
出装置。2. A magnetic conductor internal property detecting device for a superconductor, comprising: a superconducting material sample cooling means; a magnetic field applying means for the sample; and a sample observing means having at least a polarized light irradiation function. A magnetic thin film having a striped magnetic domain structure in which the direction of spontaneous magnetization is perpendicular to the film surface at least in the lower surface in the low temperature region, and the domain width of the striped magnetic domain changes corresponding to the magnetic flux distribution inside the sample. , And a thin film member that is in close contact with the mounted sample surface is installed so that it can move at least vertically, and the magnetic properties inside the superconductor are detected by obtaining the magnetic flux density distribution from the change in the magnetic domain width. A magnetic internal property detecting device for a superconductor characterized by the above.
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|---|---|---|---|
| JP2065550A JPH0743417B2 (en) | 1990-03-17 | 1990-03-17 | Method and apparatus for detecting magnetic internal property of superconductor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2065550A JPH0743417B2 (en) | 1990-03-17 | 1990-03-17 | Method and apparatus for detecting magnetic internal property of superconductor |
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| Publication Number | Publication Date |
|---|---|
| JPH03267782A JPH03267782A (en) | 1991-11-28 |
| JPH0743417B2 true JPH0743417B2 (en) | 1995-05-15 |
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Cited By (2)
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|---|---|---|---|---|
| WO2011045829A1 (en) * | 2009-10-13 | 2011-04-21 | 東洋ガラス株式会社 | Silicon purity measuring instrument, silicon sorting apparatus, and silicon purity measuring method |
| KR20220162297A (en) * | 2021-06-01 | 2022-12-08 | 한국표준과학연구원 | Method and apparatus for measuring absolute value of magnetization in perpendicular thin film |
Families Citing this family (4)
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|---|---|---|---|---|
| JP2731039B2 (en) * | 1991-01-19 | 1998-03-25 | 日本飛行機 株式会社 | Flaw detector |
| JP2004354927A (en) * | 2003-05-30 | 2004-12-16 | Kansai Tlo Kk | MAGNETOOPTICAL RESPONSIVE PLASTIC CONTAINING NANOSIZE EuO CRYSTAL OR EuS CRYSTAL |
| JP4579107B2 (en) | 2005-09-06 | 2010-11-10 | 財団法人国際超電導産業技術研究センター | Continuous magnetic flux observation apparatus and method |
| KR102169505B1 (en) * | 2018-12-12 | 2020-10-23 | 한국표준과학연구원 | Method and apparatus for measuring absolute value of magnetization in perpendicular thin film |
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| JPS594670B2 (en) * | 1976-10-19 | 1984-01-31 | ケイディディ株式会社 | Magnetic field distribution measuring device |
| JPS61286763A (en) * | 1985-06-13 | 1986-12-17 | Tdk Corp | Method for evaluating magnetic head |
| JPS62102103A (en) * | 1985-10-30 | 1987-05-12 | Hitachi Ltd | Measuring instrument for fine magnetized pattern |
-
1990
- 1990-03-17 JP JP2065550A patent/JPH0743417B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| 「磁性体ハンドブック」pp.1200−1201朝倉書店1975年6月30日発行 |
Cited By (3)
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|---|---|---|---|---|
| WO2011045829A1 (en) * | 2009-10-13 | 2011-04-21 | 東洋ガラス株式会社 | Silicon purity measuring instrument, silicon sorting apparatus, and silicon purity measuring method |
| JP5138770B2 (en) * | 2009-10-13 | 2013-02-06 | 東洋ガラス株式会社 | Silicon purity measuring instrument, silicon sorting apparatus, and silicon purity measuring method |
| KR20220162297A (en) * | 2021-06-01 | 2022-12-08 | 한국표준과학연구원 | Method and apparatus for measuring absolute value of magnetization in perpendicular thin film |
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