JPH0745333B2 - Glass sealing method for airtight container - Google Patents
Glass sealing method for airtight containerInfo
- Publication number
- JPH0745333B2 JPH0745333B2 JP25977388A JP25977388A JPH0745333B2 JP H0745333 B2 JPH0745333 B2 JP H0745333B2 JP 25977388 A JP25977388 A JP 25977388A JP 25977388 A JP25977388 A JP 25977388A JP H0745333 B2 JPH0745333 B2 JP H0745333B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- case
- sealing
- temperature
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011521 glass Substances 0.000 title claims description 40
- 238000007789 sealing Methods 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 8
- 238000002844 melting Methods 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 18
- 230000008018 melting Effects 0.000 claims description 11
- 238000010304 firing Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000005394 sealing glass Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000001354 calcination Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Joining Of Glass To Other Materials (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、民生機器の発振回路などに使用される圧電振
動子等の気密容器におけるガラス封着方法に関するもの
である。The present invention relates to a method for sealing glass in an airtight container such as a piezoelectric vibrator used in an oscillation circuit of consumer equipment.
一般に、この種の気密容器は第４図に示すように、圧電
振動素子（11）と、リード端子（12）およびこのリード
端子（12）の先端部を支持する金属ヘッダー（13）を備
え、前記リード端子（12）を金属ヘッダー（13）に穿設
した挿通孔（14）に先端部が突出する状態で挿通すると
共に、ガラス（15）によってハーメチックシールするこ
とでベース部（16）を構成する一方、リード端子（12）
の基端部に前記圧電振動素子（11）を導電性接着剤（1
7）によって接着固定して、圧電振動素子（11）の主表
面に真空蒸着された電極（18）をリード端子（12）に電
気的に導通接続した上で、これら圧電振動素子（11）並
びにリード端子（12）を金属キャン（19）で被覆すると
共に、金属キャン（19）内の大気雰囲気をN2ガスに置換
した後、この金属キャン（19）の開口下端部を前記ベー
ス部（15）に抵抗溶接して作製されていた。Generally, this type of airtight container is provided with a piezoelectric vibrating element (11), a lead terminal (12) and a metal header (13) supporting a tip portion of the lead terminal (12), as shown in FIG. The lead terminal (12) is inserted into the insertion hole (14) formed in the metal header (13) with the tip protruding, and the glass (15) hermetically seals to form the base part (16). Meanwhile, the lead terminal (12)
Attach the piezoelectric vibrating element (11) to the base of the conductive adhesive (1).
After the electrodes (18) vacuum-deposited on the main surface of the piezoelectric vibrating element (11) are electrically connected to the lead terminals (12) by being fixed by adhesive bonding by means of (7), the piezoelectric vibrating elements (11) and After covering the lead terminal (12) with the metal can (19) and replacing the atmospheric atmosphere in the metal can (19) with N 2 gas, the lower end of the opening of the metal can (19) is connected to the base portion (15). ) Was made by resistance welding.
また、近年、小形化および表面実装に対応させるため
に、前記金属ヘッダー（13）および金属キャン（19）に
より構成される金属パッケージに代わり、セラミック製
のケースおよびカバーによって保持器を構成し、これら
ケースとカバーを低融点ガラスによって気密封止してな
るものも開発されている。この場合も、前述のものと同
様、保持器内にN2ガスを封入して長期間に亙る信頼性を
保てるようにしている。In recent years, in order to support downsizing and surface mounting, a cage is made up of a ceramic case and cover instead of the metal package made up of the metal header (13) and the metal can (19). A case in which a case and a cover are hermetically sealed with low-melting glass has been developed. Also in this case, as in the case described above, the cage is filled with N 2 gas so that long-term reliability can be maintained.
しかしながら、上記したそれぞれの従来構成において問
題となるのは、圧電振動素子は機械振動するものである
ため、圧電振動素子の収容空間にN2ガスを封入すると、
このN2ガスが圧電振動素子の負荷として作用し、等価抵
抗が増大する点にある。特に、小形の振動子は、N2ガス
の封入による影響が大きいため、このN2ガス置換に代え
て、保持器内を真空にすることも考えられる。However, the problem with each of the conventional configurations described above is that the piezoelectric vibrating element mechanically vibrates, so if N 2 gas is sealed in the accommodation space of the piezoelectric vibrating element,
This N 2 gas acts as a load on the piezoelectric vibrating element, and the equivalent resistance increases. In particular, since small-sized vibrators are greatly affected by N 2 gas encapsulation, it may be possible to replace the N 2 gas replacement with a vacuum inside the cage.
ところが、通常の低融点ガラスは真空中において封着作
業温度まで昇温すると、低融点ガラス内から気泡が発生
して好ましいガラス封着をなし得ないという問題点を生
じる。However, when the temperature of the ordinary low-melting glass is raised to the sealing operation temperature in vacuum, air bubbles are generated from the inside of the low-melting glass, so that a preferable glass sealing cannot be achieved.
また、N2ガス中や大気中のように気体の存在するところ
では保温効果を生じるので封着治具の温度分布は比較的
良好であるが、逆に真空中では熱輻射により熱が放散す
るため、封着治具の温度分布が悪化し、封着温度の管理
が困難になるという問題点もある。In addition, the temperature distribution of the sealing jig is relatively good because a heat retention effect occurs in the presence of gas such as N 2 gas or the atmosphere, but conversely heat is dissipated by heat radiation in vacuum. Therefore, there is a problem that the temperature distribution of the sealing jig is deteriorated and it becomes difficult to control the sealing temperature.
更に、一般的な金属パッケージの場合は、封着治具の温
度分布の悪化による問題点は生じないものの、表面実装
に対応することは実際上、困難である。Further, in the case of a general metal package, although the problem due to the deterioration of the temperature distribution of the sealing jig does not occur, it is practically difficult to deal with the surface mounting.
本発明は、このような従来の問題点を解決することを目
的としてなされたものである。The present invention has been made for the purpose of solving such conventional problems.
上記目的を達成するために本発明は、ケースおよびカバ
ーに設けられたガラス接着部の少なくとも一方にペース
ト状の低融点ガラスを塗布すると共にO2ガスまたは大気
雰囲気中で仮焼成し、次に、封着可能な作業温度以上に
保って5Torrを超えない範囲で真空引きすることにより
前記ガラス接着部の低融点ガラスを脱泡した後、この低
融点ガラスの軟化点以下の温度まで冷却し、この後、前
記ケース内に素子を組込んで、ケースとカバーのガラス
接着部どうしを低融点ガラスを介して接合した上で、ケ
ースとカバーにより形成される素子収容空間の雰囲気を
不活性ガスに置換し、次いで、5Torrを超えない範囲ま
で再度真空引きし、この真空度を維持しつつ封着可能な
作業温度まで昇温して本焼成することにより前記ケース
の開口部とカバーとを気密封着することを特徴とするも
のである。In order to achieve the above object, the present invention is to apply a paste low melting point glass to at least one of the glass bonding portion provided in the case and the cover and calcination in O 2 gas or atmospheric atmosphere, and then, After defoaming the low melting point glass of the glass bonding part by vacuuming in a range not exceeding 5 Torr that can be kept above the working temperature at which sealing is possible, cool to a temperature below the softening point of this low melting point glass, and After that, the element is assembled in the case, the glass bonding parts of the case and the cover are bonded to each other through the low melting point glass, and then the atmosphere of the element housing space formed by the case and the cover is replaced with an inert gas. Then, the vacuum is pulled again to a range not exceeding 5 Torr, and while maintaining this degree of vacuum, the temperature is raised to a work temperature at which sealing is possible and main firing is performed to clean the case opening and cover. It is characterized in that it is sealed.
また、前記素子収容空間に圧電振動素子を組込むことに
より、優れた特性を有する圧電振動子を得ることができ
るものである。Further, by incorporating a piezoelectric vibrating element in the element housing space, it is possible to obtain a piezoelectric vibrator having excellent characteristics.
真空度が5Torrよりも増すと、気体の保温効果が殆どな
くなり、ケースとカバーとの封着時に使用する治具の温
度分布が悪化して温度調節が困難であるが、5Torrから
は気体の保温効果が徐々に改善され、10Torr付近では殆
ど常気圧時の温度分布と変わらなくなるので、低融点ガ
ラスに含まれる気泡は容易に抜ける。また、10Torr付近
の真空度であっても、振動子の等価抵抗は高真空時と殆
ど変わらないので適切なガラス封着が行える。When the degree of vacuum is higher than 5 Torr, the heat retaining effect of the gas is almost lost, and the temperature distribution of the jig used when sealing the case and the cover deteriorates, making it difficult to control the temperature. The effect is gradually improved, and the temperature distribution around 10 Torr is almost the same as the temperature distribution at normal pressure, so the bubbles contained in the low-melting glass can easily escape. Even at a vacuum of about 10 Torr, the equivalent resistance of the vibrator is almost the same as that at high vacuum, so that proper glass sealing can be performed.
以下、本発明の実施例を図面に基づき詳細に説明する。
第１図は本発明方法によって作製される圧電振動子を示
しており、第１図において、（１）は絶縁材からなるケ
ース、（２）は同じぐ絶縁材からなるカバー、（３）は
リード端子、（４）は圧電振動素子、（５）は導電性接
着剤、（６）はバインダーとしての低融点ガラスであ
る。Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 shows a piezoelectric vibrator manufactured by the method of the present invention. In FIG. 1, (1) is a case made of an insulating material, (2) is a cover made of the same insulating material, and (3) is A lead terminal, (4) a piezoelectric vibrating element, (5) a conductive adhesive, and (6) a low melting point glass as a binder.
これらの構成材料からなる圧電振動子は、まず、ケース
（１）の開口部周縁およびカバー（２）の周縁部に設け
たガラス接着部にペースト状の低融点ガラス（６）を塗
布して、大気雰囲気中で仮焼成し、次いで真空過熱炉に
より10Torrの真空圧を保持しつつ封着可能な作業温度以
上（この実施例では450℃）に昇温保持して脱泡した
後、気泡が抜けた時点で低融点ガラス（６）の軟化点以
下の温度まで冷却する。In the piezoelectric vibrator made of these constituent materials, first, a paste-like low-melting glass (6) is applied to the glass bonding portions provided on the peripheral edge of the opening (1) and the peripheral edge of the cover (2), After calcination in an air atmosphere and then degassing by raising the temperature to a working temperature or higher (450 ° C. in this example) capable of sealing while maintaining a vacuum pressure of 10 Torr in a vacuum heating furnace, the bubbles escape At that time, the glass is cooled to a temperature below the softening point of the low melting point glass (6).
次に、圧電振動素子（４）を導電性接着剤（５）により
リード端子（３）の先端部に接着した上で、リード端子
（３）を前記ケース（１）およびカバー（２）のガラス
接着部間に介装して両ガラス接着部どうしを接合し、且
つ、これらケース（１）とカバー（２）間に形成される
素子収容空間（Ｓ）内に圧電振動素子（４）が内装され
る状態で、封着用治具（図示せず）中に組込んだ上で、
前記素子収容空間（Ｓ）の大気雰囲気をN2ガスに置換す
る。Next, the piezoelectric vibrating element (4) is adhered to the tip of the lead terminal (3) with a conductive adhesive (5), and then the lead terminal (3) is attached to the glass of the case (1) and the cover (2). The glass vibrating portions are bonded to each other by being interposed between the adhering portions, and the piezoelectric vibrating element (4) is internally provided in the element accommodating space (S) formed between the case (1) and the cover (2). In the state of being assembled, after incorporating it in a sealing jig (not shown),
The atmosphere in the element housing space (S) is replaced with N 2 gas.
更に、10Torrまで再度真空引きし、この真空度を維持し
つつ封着可能な作業温度（この実施例では430℃）まで
昇温し、この温度を維持しながら本焼成し、これによっ
て、前記ケース（１）の開口部とカバー（２）とを気密
封着して、気密容器内に圧電振動素子（４）を封入して
なる小形圧電振動子が形成されるものである。Further, the vacuum is again pulled down to 10 Torr, the working temperature (430 ° C. in this embodiment) capable of sealing is maintained while maintaining this degree of vacuum, and the main firing is performed while maintaining this temperature. The small piezoelectric vibrator is formed by hermetically sealing the opening of (1) and the cover (2) and enclosing the piezoelectric vibrating element (4) in an airtight container.
なお、仮焼成の効率を促進するために、この仮焼成時に
O2ガスを導入してもよい。また、本焼成時において、昇
温前に予め治具内を高真空度に真空引きした上で、所定
の真空度までN2ガスをリークさせるようにすることによ
っても、N2ガスの置換を行うことができる。更に、N2ガ
スに代えてその他の不活性ガスを使用してもよい。In order to promote the efficiency of calcination,
O 2 gas may be introduced. Further, during the main firing, the N 2 gas may be replaced by leaking the N 2 gas to a predetermined vacuum degree after the inside of the jig is evacuated to a high vacuum degree before the temperature is raised. It can be carried out. Further, other inert gas may be used instead of N 2 gas.
第２図は4MHzの小形圧電振動子の等価抵抗値と真空度と
の関係の実験結果を示している。Fig. 2 shows the experimental results of the relationship between the equivalent resistance value and the degree of vacuum of a 4MHz small piezoelectric vibrator.
一般に、圧電振動子は機械振動しているので、その等価
抵抗値は周囲の大気雰囲気の影響を受ける。したがっ
て、N2ガスが圧電振動素子（４）の機械振動の負荷とし
て作用するとになり、このため、気圧が下がるにつれて
負荷が小さくなり、圧電振動子の等価抵抗値も小さくな
る。第２図に示す実験結果では、常気圧から100Torr付
近までは振動子の等価抵抗値は真空度に比例しており、
5Torrでは高真空時の値とほぼ同じになっている。In general, the piezoelectric vibrator is mechanically vibrating, so that its equivalent resistance value is affected by the ambient atmosphere. Therefore, the N 2 gas acts as a load for mechanical vibration of the piezoelectric vibrating element (4). Therefore, the load decreases as the atmospheric pressure decreases, and the equivalent resistance value of the piezoelectric vibrator also decreases. In the experimental results shown in Fig. 2, the equivalent resistance of the oscillator is proportional to the vacuum degree from atmospheric pressure to around 100 Torr.
At 5 Torr, it is almost the same as the value at high vacuum.
このように５〜10Torr程度の真空度においても高真空の
場合とほぼ同じ特性の圧電振動子が得られた。Thus, even at a vacuum degree of about 5 to 10 Torr, a piezoelectric vibrator having substantially the same characteristics as in a high vacuum was obtained.
また、この実施例ではMHzの圧電振動子を対象としてい
るが、その他の周波数の圧電振動子であっても同様の効
果を奏することは容易に予想されるものである。Further, although the piezoelectric vibrator of MHz is targeted in this embodiment, it is easily expected that the same effect can be obtained even with piezoelectric vibrators of other frequencies.
第３図はこの実施例の実験に用いた封着治具の各真空度
における温度分布およびヒーターと封着治具の温度差を
示す特性図である。FIG. 3 is a characteristic diagram showing the temperature distribution at each vacuum degree of the sealing jig used in the experiment of this example and the temperature difference between the heater and the sealing jig.
この実験に用いた装置は約100mm角のヒーター上に60mm
×80mmの大きさの封着治具を載置し、周囲を断熱して真
空装置中に組入れたものであって、ヒーターの温度と封
着治具の温度を別々にモニターできるように構成してい
る。The equipment used for this experiment is 60 mm on a heater of about 100 mm square.
A sealing jig with a size of × 80 mm is placed, the surroundings are insulated, and it is installed in a vacuum device.It is configured so that the temperature of the heater and the temperature of the sealing jig can be monitored separately. ing.
第３図から明らかなように、5Torrを超えると封着治具
の温度分布は悪化して常気圧の２倍以上となり、ヒータ
ーと封着治具の温度差も３倍以上になった。ここで、封
着治具の温度分布を５ポイント測定し、最大値と最小値
との差値をプロットした。また、ヒーターの温度はほぼ
中央部で測定し、封着治具の測定温度の中央値と比較し
た。As is clear from FIG. 3, when the pressure exceeds 5 Torr, the temperature distribution of the sealing jig deteriorates and becomes twice or more the atmospheric pressure, and the temperature difference between the heater and the sealing jig also becomes three times or more. Here, the temperature distribution of the sealing jig was measured at 5 points, and the difference between the maximum value and the minimum value was plotted. Further, the temperature of the heater was measured almost at the center and compared with the median of the measured temperatures of the sealing jig.
前掲のガラス封着方法により作製された圧電振動子は、
従来のような高真空度にする必要もなく、また、低融点
ガラス（６）中の気泡の発生による封着の不適性も生じ
ないので小形化が容易であり、また、ケース（１）また
はカバー（２）を利用しての表面実装も可能であるの
で、この圧電振動子を用いて構成した発振回路を民生機
器に使用することにより高密度実装が実現でき、自動実
装によるコストダウンを図ることができる。The piezoelectric vibrator manufactured by the glass sealing method described above is
It is not necessary to have a high degree of vacuum as in the prior art, and inadequacy of sealing due to the generation of bubbles in the low melting point glass (6) does not occur, so that it is easy to miniaturize, and the case (1) or Since surface mounting using the cover (2) is also possible, high density mounting can be realized by using the oscillation circuit configured by using this piezoelectric vibrator for consumer equipment, and cost reduction can be achieved by automatic mounting. be able to.
以上説明したように、本発明の気密容器のガラス封着方
法によるときは、ケースおよびカバーに設けられたガラ
ス接着部の少なくとも一方にペースト状の低融点ガラス
を塗布すると共にO2ガスまたは大気雰囲気中で仮焼成
し、次に、封着可能な作業温度以上に保って5Torrを超
えない範囲で真空引きすることにより前記ガラス接着部
の低融点ガラスを脱泡した後、この低融点ガラスの軟化
点以下の温度まで冷却し、この後、前記ケース内に素子
を組込んで、ケースとカバーのガラス接着部どうしを低
融点ガラスを介して接合した上で、ケースとカバーによ
り形成される素子収容空間の雰囲気を不活性ガスに置換
し、次いで、5Torrを超えない範囲まで再度真空引き
し、この真空度を維持しつつ封着可能な作業温度まで昇
温して本焼成することにより前記ケースの開口部とカバ
ーとを気密封着するようにしたので、実用的な真空度に
おけるガラス封着が可能になるという優れた効果を奏す
るものであり、また、本発明方法を用いて小形化が容易
で表面実装が可能な圧電振動子を得ることができるに至
った。As described above, in the case of the method for sealing a glass of an airtight container of the present invention, a paste-like low-melting-point glass is applied to at least one of glass adhering portions provided on the case and the cover, and O 2 gas or atmospheric atmosphere After calcination in, then after defoaming the low-melting glass of the glass bonding part by keeping the working temperature above the sealing temperature and vacuuming within a range not exceeding 5 Torr, softening of the low-melting glass After cooling to a temperature below the point, after incorporating the element in the case, the glass bonding parts of the case and the cover are bonded together through the low melting point glass, and then the element housing formed by the case and the cover By replacing the atmosphere in the space with an inert gas, then evacuating again to a range not exceeding 5 Torr, raising the temperature to a sealing-enabling working temperature while maintaining this degree of vacuum, and performing main firing. Since the opening of the case and the cover are air-tightly sealed, it has an excellent effect that the glass can be sealed at a practical degree of vacuum, and a small size is obtained by using the method of the present invention. It has become possible to obtain a piezoelectric vibrator that can be easily realized and that can be surface-mounted.
第１図は本発明の一実施例により構成した圧電振動子の
縦断面図、第２図は4MHzの小形圧電振動子の等価抵抗値
と真空度との関係を実験的に調べた特性図、第３図はこ
の実施例の実験に用いた封着治具の各真空度における温
度分布およびヒーターと封着治具の温度差を示す特性
図、第４図は従来の圧電振動子の半截断面図である。 （１）……ケース、（２）……カバー、（３）……リー
ド端子、（４）……圧電振動素子、（６）……低融点ガ
ラス、（Ｓ）……素子収容空間。FIG. 1 is a longitudinal sectional view of a piezoelectric vibrator constructed according to an embodiment of the present invention, and FIG. 2 is a characteristic diagram experimentally examining the relationship between the equivalent resistance value and vacuum degree of a small piezoelectric vibrator of 4 MHz, FIG. 3 is a characteristic diagram showing the temperature distribution at each vacuum degree of the sealing jig used in the experiment of this example and the temperature difference between the heater and the sealing jig, and FIG. 4 is a half cross section of the conventional piezoelectric vibrator. It is a figure. (1) ... case, (2) ... cover, (3) ... lead terminal, (4) ... piezoelectric vibrating element, (6) ... low melting point glass, (S) ... element housing space.
Claims (2)
着部の少なくとも一方にペースト状の低融点ガラスを塗
布すると共にO2ガスまたは大気雰囲気中で仮焼成し、次
に、封着可能な作業温度以上に保って5Torrを超えない
範囲で真空引きすることにより前記ガラス接着部の低融
点ガラスを脱泡した後、この低融点ガラスの軟化点以下
の温度まで冷却し、この後、前記ケース内に素子を組込
んで、ケースとカバーのガラス接着部どうしを低融点ガ
ラスを介して接合した上で、ケースとカバーにより形成
される素子収容空間の雰囲気を不活性ガスに置換し、次
いで、5Torrを超えない範囲まで再度真空引きし、この
真空度を維持しつつ封着可能な作業温度まで昇温して本
焼成することにより前記ケースの開口部とカバーとを気
密封着することを特徴とする気密容器のガラス封着方
法。1. A paste-like low melting point glass is applied to at least one of glass adhering portions provided on a case and a cover, and is calcined in an O 2 gas or air atmosphere, and then a work temperature at which sealing is possible. After defoaming the low-melting glass of the glass-bonded portion by pulling a vacuum in a range not exceeding 5 Torr while keeping the temperature above, it is cooled to a temperature equal to or lower than the softening point of the low-melting glass, and then, in the case. After incorporating the element, the glass-bonded parts of the case and the cover were bonded together via the low melting point glass, and then the atmosphere of the element housing space formed by the case and the cover was replaced with an inert gas, and then 5 Torr was applied. Vacuuming is performed again to a range not exceeding, and while maintaining this degree of vacuum, the temperature is raised to a working temperature at which sealing is possible and main firing is performed to hermetically seal the opening of the case and the cover. A method for sealing glass in an airtight container.
電振動子を得るようにした気密容器のガラス封着方法。2. A glass sealing method for an airtight container, wherein a piezoelectric vibrating element is incorporated in the case to obtain a piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25977388A JPH0745333B2 (en) | 1988-10-14 | 1988-10-14 | Glass sealing method for airtight container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25977388A JPH0745333B2 (en) | 1988-10-14 | 1988-10-14 | Glass sealing method for airtight container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02107541A JPH02107541A (en) | 1990-04-19 |
| JPH0745333B2 true JPH0745333B2 (en) | 1995-05-17 |
Family
ID=17338768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25977388A Expired - Lifetime JPH0745333B2 (en) | 1988-10-14 | 1988-10-14 | Glass sealing method for airtight container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0745333B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109836055A (en) * | 2017-11-29 | 2019-06-04 | 辽宁法库陶瓷工程技术研究中心 | A kind of method of vacuum glass sealing device |
-
1988
- 1988-10-14 JP JP25977388A patent/JPH0745333B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02107541A (en) | 1990-04-19 |
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