JPH0745884B2 - Dynamic pressure gas bearing device - Google Patents
Dynamic pressure gas bearing deviceInfo
- Publication number
- JPH0745884B2 JPH0745884B2 JP62066840A JP6684087A JPH0745884B2 JP H0745884 B2 JPH0745884 B2 JP H0745884B2 JP 62066840 A JP62066840 A JP 62066840A JP 6684087 A JP6684087 A JP 6684087A JP H0745884 B2 JPH0745884 B2 JP H0745884B2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- rotary shaft
- dynamic pressure
- pressure gas
- bearing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000576 coating method Methods 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 16
- 230000001050 lubricating effect Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 12
- 238000005299 abrasion Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 238000005238 degreasing Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- 239000002585 base Substances 0.000 description 6
- 239000011701 zinc Substances 0.000 description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- 229910052582 BN Inorganic materials 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005554 pickling Methods 0.000 description 3
- CYKMNKXPYXUVPR-UHFFFAOYSA-N [C].[Ti] Chemical compound [C].[Ti] CYKMNKXPYXUVPR-UHFFFAOYSA-N 0.000 description 2
- MEOSMFUUJVIIKB-UHFFFAOYSA-N [W].[C] Chemical compound [W].[C] MEOSMFUUJVIIKB-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Sliding-Contact Bearings (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、例えばポリゴンミラー回転駆動装置や回転磁
気ヘッド装置等に使用可能な動圧気体軸受装置に関す
る。Description: TECHNICAL FIELD The present invention relates to a dynamic pressure gas bearing device that can be used, for example, in a polygon mirror rotation drive device, a rotary magnetic head device, or the like.
（従来の技術） 従来の動圧気体軸受装置の例として、Al、Bs（真鍮）等
の切削加工性のよい材料を使用して回転軸及び軸受を作
り、グループが形成された回転軸及軸受の表面に、例え
ばTiC（チタンカーボン）、WC（タングステンカーボ
ン）等の超硬質複合材料をイオンプレーティングにより
コーティングし、軸および軸受表面の耐摩耗性を高めた
ものがある。特開昭59−89823号公報記載のものはその
例である。(Prior Art) As an example of a conventional dynamic pressure gas bearing device, a rotary shaft and a bearing are formed by using a material having good machinability such as Al and Bs (brass), and a rotary shaft and a bearing in which a group is formed. The surface of the bearing is coated with an ultra-hard composite material such as TiC (titanium carbon) or WC (tungsten carbon) by ion plating to improve the wear resistance of the shaft and the bearing surface. The example described in JP-A-59-89823 is an example.
（発明が解決しようとする問題点） 上記従来の動圧気体軸受装置によれば、回転軸及び軸受
の表面共に耐摩耗性処理を施しているため、起動、停止
時に両者が接触すると、互いに両者の表面を傷付けて摩
耗粉を発生し、回転異常等を起こすという問題がある。
また、イオンプレーティングを用いた表面処理は、工程
数が多くなりコスト高となる。(Problems to be Solved by the Invention) According to the above-described conventional dynamic pressure gas bearing device, since the surfaces of the rotating shaft and the bearing are subjected to wear resistance treatment, if they come into contact with each other at the time of start and stop, they will be mutually damaged. However, there is a problem in that the surface of is damaged and abrasion powder is generated to cause abnormal rotation.
In addition, the surface treatment using ion plating requires a large number of steps and is costly.
本発明は、かかる従来の問題点を解消するためになされ
たもので、起動、停止時における回転軸と軸受との接触
による摩耗粉の発生を防止し、長期にわたり安定した回
転状態を維持することができる動圧気体軸受装置を提供
することを目的とする。The present invention has been made to solve such conventional problems, and prevents generation of abrasion powder due to contact between a rotating shaft and a bearing at the time of starting and stopping, and maintains a stable rotating state for a long period of time. An object of the present invention is to provide a dynamic pressure gas bearing device capable of achieving the above.
（問題点を解決するための手段） 本発明は、回転軸の表面とこの回転軸の表面に対向する
軸受の表面の何れか一方の表面は耐摩耗性皮膜で被覆さ
れ、他方の表面は潤滑性皮膜で被覆されていることを特
徴とする。(Means for Solving the Problems) According to the present invention, one of the surface of the rotating shaft and the surface of the bearing facing the surface of the rotating shaft is coated with an abrasion resistant film, and the other surface is lubricated. It is characterized in that it is covered with a conductive film.
（作用） 起動、停止時に回転軸の表面と軸受の表面とが互いにこ
すれ合っても、一方の表面が耐摩耗性皮膜で被覆され、
他方の表面が耐摩耗性皮膜とは異なる材料からなる潤滑
性皮膜で被覆されているので、摩擦係数が減少し、摩耗
粉の発生がない。ある回転数以上では動圧効果により回
転軸表面と軸受表面とが接触することはない。(Operation) Even when the surface of the rotating shaft and the surface of the bearing rub against each other at the time of starting and stopping, one surface is covered with a wear resistant film,
Since the other surface is coated with a lubricating film made of a material different from that of the wear resistant film, the friction coefficient is reduced and no abrasion powder is generated. At a certain rotational speed or higher, the surface of the rotating shaft does not come into contact with the surface of the bearing due to the effect of dynamic pressure.
（実施例） 第１図において、符号１で示されているベースの中央部
からはボス部1aが立ち上がっており、ボス部1a内には支
柱４が圧入されている。支柱４の上半部は径が小さくな
っており、この小径部外周には二つのリング状の永久磁
石7,17が嵌め込まれて固定されている。永久磁石17はベ
ース１のボス部1a内にあり、永久磁石７は支柱４の上端
部に固定されている。永久磁石７の上端には磁石押さえ
12が被せられ、永久磁石７が支柱４から抜け出るのを防
止している。ベース１のボス部1aの外周側には固定子コ
イル９が配置されている。(Embodiment) In FIG. 1, a boss portion 1a stands up from a central portion of a base indicated by reference numeral 1, and a column 4 is press-fitted into the boss portion 1a. The diameter of the upper half portion of the column 4 is small, and two ring-shaped permanent magnets 7 and 17 are fitted and fixed to the outer periphery of the small diameter portion. The permanent magnet 17 is inside the boss portion 1 a of the base 1, and the permanent magnet 7 is fixed to the upper end portion of the column 4. A magnet holder is attached to the upper end of the permanent magnet 7.
12 is covered to prevent the permanent magnet 7 from coming out of the column 4. A stator coil 9 is arranged on the outer peripheral side of the boss portion 1a of the base 1.
ベース１の外周縁上部には外周側に段が付けられた円筒
状の軸受３がねじ止めされている。この軸受３の内周側
にはカップ状の回転軸２が軸受３の内周面との間に所定
の間隙をおいて配置されている。回転軸２のカップの底
に相当する部分に形成された中心孔部にはリング状の永
久磁石６が一体に嵌められており、この永久磁石６は前
記永久磁石7,17間において支柱４の外周部に位置してい
る。永久磁石６は、支柱４との間に所定の間隙が設けら
れることによって支柱４の周りに回転することができ
る。また、永久磁石６の上下の端面は上下の永久磁石7,
17の端面と対向すると共に、これら相対向する永久磁石
の端面間で互いに反発するように着磁され、永久磁石６
が永久磁石7,17に接触することなく回転しうるようにな
っている。回転軸２のカップ状の内周面にはリング状を
なしかつ周方向に極端に形成された永久磁石５が固着さ
れ、この永久磁石５は前記固定子コイル９に所定の間隙
をおいて対向している。回転軸２のカップの底に相当す
る面には周波数発電機の一部を構成する永久磁石11が固
着されている。回転軸２の上端部にはポリゴンミラー８
が取りつけられている。A cylindrical bearing 3 having a step on the outer peripheral side is screwed to the upper portion of the outer peripheral edge of the base 1. A cup-shaped rotating shaft 2 is arranged on the inner peripheral side of the bearing 3 with a predetermined gap from the inner peripheral surface of the bearing 3. A ring-shaped permanent magnet 6 is integrally fitted in a central hole formed in a portion of the rotary shaft 2 corresponding to the bottom of the cup. The permanent magnet 6 is disposed between the permanent magnets 7 and 17 of the column 4. It is located on the outer periphery. The permanent magnet 6 can rotate around the column 4 by providing a predetermined gap with the column 4. Also, the upper and lower end faces of the permanent magnet 6 have upper and lower permanent magnets 7,
The permanent magnet 6 is magnetized so as to oppose the end faces of 17 and to repel each other between the end faces of the opposing permanent magnets.
Can rotate without contacting the permanent magnets 7,17. A ring-shaped and extremely circumferentially formed permanent magnet 5 is fixed to the cup-shaped inner peripheral surface of the rotating shaft 2, and the permanent magnet 5 faces the stator coil 9 with a predetermined gap. is doing. A permanent magnet 11 forming a part of the frequency generator is fixed to the surface of the rotary shaft 2 corresponding to the bottom of the cup. A polygon mirror 8 is provided on the upper end of the rotary shaft 2.
Is installed.
符号10は回路基板であって、周波数発電機からの出力信
号の処理回路や固定子コイル９への通電制御回路等が形
成されており、軸受３の内周側のベース１上に固定され
ている。Reference numeral 10 is a circuit board on which a processing circuit for the output signal from the frequency generator, an energization control circuit for the stator coil 9 and the like are formed, and is fixed on the base 1 on the inner peripheral side of the bearing 3. There is.
回転軸２は、アルミ材（AI材）を用いて機械加工され、
第２図に示されているように、表面にエッチング加工に
よってグループ13が形成されている。そして、この回転
軸２の表面は、SiCを含有した無電解複合Niメッキが施
されることによって耐摩耗性皮膜で被覆されている。The rotating shaft 2 is machined using aluminum material (AI material),
As shown in FIG. 2, a group 13 is formed on the surface by etching. The surface of the rotary shaft 2 is coated with a wear-resistant film by applying electroless composite Ni plating containing SiC.
同様に、軸受３もAl材を用いて作られ、上記回転軸２の
表面と対向する軸受３の表面は、潤滑アルマイトからな
る潤滑性皮膜15で被覆されている。Similarly, the bearing 3 is also made of an Al material, and the surface of the bearing 3 facing the surface of the rotating shaft 2 is covered with a lubricating film 15 made of lubricating alumite.
なお、軸受３の表面に耐摩耗性被膜を形成し、これと対
向する回転軸２の表面に潤滑性被膜を形成してもよい。A wear resistant coating may be formed on the surface of the bearing 3 and a lubricating coating may be formed on the surface of the rotating shaft 2 facing the wear resistant coating.
第３図はSiCを含有した無電解Niメッキによる耐摩耗性
皮膜の形成方法の例を示すもので、溶剤脱脂→アルカリ
脱脂→酸洗→亜鉛置換→酸洗→亜鉛置換→メッキ→乾
燥、の各工程を経て行われる。溶剤脱脂工程とアルカリ
脱脂工程はAl材表面の油を除去するためのものである。
１回目の酸洗工程は表面の焼けを取り除くためと酸化物
除去のためである。２回目の亜鉛置換工程までは前処理
工程である。このうち１回目の亜鉛置換工程から２回目
の亜鉛置換工程まではAl材の場合にのみ行われるもので
あり、NiメッキがAl材に付きにくいのでAl表面にZnを付
けるための工程である。Fig. 3 shows an example of the method for forming a wear-resistant film by electroless Ni plating containing SiC. Solvent degreasing → alkaline degreasing → pickling → zinc substitution → pickling → zinc substitution → plating → drying. It is performed through each process. The solvent degreasing step and the alkaline degreasing step are for removing oil on the surface of the Al material.
The first pickling step is to remove surface burn and oxide removal. Up to the second zinc replacement step is a pretreatment step. Of these, the first zinc replacement step to the second zinc replacement step are performed only for the Al material, and are the steps for attaching Zn to the Al surface because the Ni plating is difficult to adhere to the Al material.
耐摩耗性材料としてはSiCのほかにWC（タングステンカ
ーボン）、TiC（チタンカーボン）、ダイヤ粉末等を用
いることができ、これらを含有した無電解複合Niメッキ
を施すことにより耐摩耗性被膜を形成することができ
る。In addition to SiC, WC (tungsten carbon), TiC (titanium carbon), diamond powder, etc. can be used as wear resistant materials, and wear resistant coatings are formed by applying electroless composite Ni plating containing these can do.
第４図は潤滑アルマイト処理による潤滑性被膜の形成方
法の例を示すもので、溶剤脱脂→アルカリ脱脂→中和→
陽極酸化、潤滑化処理→封孔処理→乾燥、の各工程を経
て行われる。溶剤脱脂工程から中和工程までは前処理で
ある。陽極酸化工程は酸化被膜を形成する工程である。FIG. 4 shows an example of a method for forming a lubricious film by lubricating alumite treatment. Solvent degreasing → alkali degreasing → neutralization →
It is performed through the steps of anodic oxidation, lubrication, sealing, and drying. Pretreatment is performed from the solvent degreasing step to the neutralization step. The anodizing step is a step of forming an oxide film.
潤滑アルマイト処理の潤滑材としてMoS2（二硫化モリブ
デン）を用いた。そのほかに潤滑材料としてBN（窒化ボ
ロン）やテフロン粒子を用いこれを含有した無電解Niメ
ッキで処理してもよい。何れにしても、潤滑性処理する
ことにより、耐摩耗性を有する潤滑性被膜が形成され
る。Lubrication MoS 2 (molybdenum disulfide) was used as the lubricant for the alumite treatment. Alternatively, BN (boron nitride) or Teflon particles may be used as a lubricating material and electroless Ni plating containing the particles may be used for treatment. In any case, the lubricity treatment forms a lubricious coating having abrasion resistance.
第５図は潤滑アルマイト処理で形成した被膜の断面を示
すものであり、アルミ（AI）のベース20上に、MoS2の潤
滑材22が摩耗性のある酸化アルマイト層21中に規則的に
混在してなる潤滑性被膜が形成されている。Fig. 5 shows the cross section of the film formed by lubrication alumite treatment, in which the MoS 2 lubricant 22 is regularly mixed in the abradable oxide alumite layer 21 on the aluminum (AI) base 20. A lubricating coating formed by the above is formed.
第６図はBNを含有した無電解複合Niメッキを施した場合
の潤滑性被膜の断面図であって、Alのベース20上に、潤
滑性のあるBNの粒子24が耐摩耗性のあるNi層23中に混在
してなる潤滑性被膜が形成されている。FIG. 6 is a cross-sectional view of a lubricative coating when electroless composite Ni plating containing BN is applied, in which the BN particles 24 having lubricity are provided on the Al base 20 and Ni having wear resistance. A lubricous coating mixed in the layer 23 is formed.
第１図及び第２図に示した実施例によれば、コイル９に
通電制御することにより永久磁石５を有する回転軸２が
回転し始める。始動時は、回転軸２の表面がこれと対向
する軸受３の表面をこすりながら回転を始めるが、軸受
３の表面は耐摩耗性を有する潤滑性被膜15が形成され、
回転軸２の表面には耐摩耗性被膜が形成されているた
め、摩擦係数が減少し、摩耗粉の発生が防止される。そ
のため、安定した回転を維持することができる。According to the embodiment shown in FIGS. 1 and 2, when the coil 9 is energized, the rotary shaft 2 having the permanent magnet 5 starts to rotate. At the time of starting, the surface of the rotary shaft 2 starts to rotate while rubbing the surface of the bearing 3 facing the surface of the rotary shaft 2. The surface of the bearing 3 is formed with a lubricating coating 15 having wear resistance.
Since the wear-resistant coating is formed on the surface of the rotating shaft 2, the friction coefficient is reduced and the generation of wear powder is prevented. Therefore, stable rotation can be maintained.
一定の回転数以上になると、回転軸２に形成されたグル
ープ13により動圧効果を発生して回転軸２と軸受３とが
非接触状態で回転し続ける。停止時は、始動時と逆の過
程を経て回転軸２と軸受３とがこすれ合いながら停止す
る。このときも摩耗粉の発生が防止される。When the rotational speed exceeds a certain value, the dynamic pressure effect is generated by the group 13 formed on the rotary shaft 2, and the rotary shaft 2 and the bearing 3 continue to rotate in a non-contact state. At the time of stop, the rotary shaft 2 and the bearing 3 rub against each other through the process reverse to that at the start and then stop. Also at this time, generation of abrasion powder is prevented.
潤滑性被膜をアルマイト処理とすれば、無電解Niメッキ
に潤滑剤を含有した場合に比べ、回転軸と軸受の接触時
に被膜の剥離が非常に起こり難く、起動・停止の繰り返
し寿命を長くすることができる。If the lubricous coating is anodized, it is much less likely that the coating will peel off when the rotating shaft and the bearing come into contact, and the start / stop cycle life will be extended, compared to the case where the electroless Ni plating contains a lubricant. You can
なお、耐摩耗性処理を施した表面はラッピング処理を施
すことが望ましい。これは、固い突起を残しておくと、
潤滑性処理を施した柔らかい表面を傷付けることになる
ので、これを防止するためである。It is desirable that the surface that has been subjected to the abrasion resistance treatment be subjected to lapping treatment. This is because if you leave a hard protrusion,
This is to prevent the soft surface that has been subjected to the lubricity treatment from being damaged.
（発明の効果） 本発明によれば、回転軸と、この回転軸を支持する軸受
とからなる動圧気体軸受装置において、上記回転軸の表
面とこの表面に対向する軸受の表面の何れか一方の表面
は耐摩耗性皮膜で被覆され、他方の表面は上記耐摩耗性
皮膜とは異なる材料からなる潤滑性皮膜で被覆されてい
るので、起動、停止時において回転軸と軸受とが接触し
ても摩耗粉の発生が防止され、回転の安定性が向上す
る。(Effect of the Invention) According to the present invention, in a dynamic pressure gas bearing device including a rotary shaft and a bearing supporting the rotary shaft, one of the surface of the rotary shaft and the surface of the bearing facing the surface is provided. Since the surface of is coated with a wear resistant film and the other surface is coated with a lubricious film made of a material different from the above wear resistant film, the rotating shaft and the bearing may come into contact with each other during start and stop. Also, the generation of abrasion powder is prevented, and the rotation stability is improved.
第１図は本発明に係る動圧気体軸受装置の実施例を示す
一部断面正面図、第２図は同上要部の一部断面正面図、
第３図は本発明に適用可能な耐摩耗性処理方法の例を示
す工程図、第４図は本発明に適用可能な潤滑性処理方法
の例を示す工程図、第５図は潤滑性被膜の一例を示す断
面図、第６図は潤滑性被膜の別の例を示す断面図であ
る。 ２……回転軸、３……軸受、15……潤滑性被膜。FIG. 1 is a partially sectional front view showing an embodiment of a dynamic pressure gas bearing device according to the present invention, and FIG. 2 is a partially sectional front view of the same as above.
FIG. 3 is a process diagram showing an example of a wear resistance treatment method applicable to the present invention, FIG. 4 is a process diagram showing an example of a lubricity treatment method applicable to the present invention, and FIG. 5 is a lubricating coating. FIG. 6 is a cross-sectional view showing one example, and FIG. 6 is a cross-sectional view showing another example of the lubricating coating. 2 ... Rotary shaft, 3 ... Bearing, 15 ... Lubricating film.
Claims (1)
らなる動圧気体軸受装置において、上記回転軸の表面と
この回転軸の表面に対向する軸受の表面の何れか一方の
表面は耐摩耗性皮膜で被覆され、他方の表面は上記耐摩
耗性皮膜とは異なる材料からなる潤滑性皮膜で被覆され
ていることを特徴とする動圧気体軸受装置。1. A dynamic gas bearing device comprising a rotary shaft and a bearing for supporting the rotary shaft, wherein one of the surface of the rotary shaft and the surface of the bearing facing the surface of the rotary shaft is A dynamic pressure gas bearing device, characterized in that it is coated with a wear-resistant coating, and the other surface is coated with a lubricating coating made of a material different from that of the wear-resistant coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62066840A JPH0745884B2 (en) | 1987-03-20 | 1987-03-20 | Dynamic pressure gas bearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62066840A JPH0745884B2 (en) | 1987-03-20 | 1987-03-20 | Dynamic pressure gas bearing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63235719A JPS63235719A (en) | 1988-09-30 |
| JPH0745884B2 true JPH0745884B2 (en) | 1995-05-17 |
Family
ID=13327448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62066840A Expired - Lifetime JPH0745884B2 (en) | 1987-03-20 | 1987-03-20 | Dynamic pressure gas bearing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0745884B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03186608A (en) * | 1989-12-14 | 1991-08-14 | Fuji Electric Co Ltd | Dynamic pressure gas bearing |
| JPH0421341A (en) * | 1990-05-14 | 1992-01-24 | Sankyo Seiki Mfg Co Ltd | Dynamic-pressure pneumatic bearing motor |
| US5769544A (en) * | 1993-05-12 | 1998-06-23 | Ricoh Company, Ltd. | Dynamic pressure pneumatic bearing device and manufacturing method thereof |
| US6155721A (en) * | 1994-04-01 | 2000-12-05 | Sankyo Seiki Mfg. Co., Ltd. | Dynamic-pressure fluid bearing |
| JPH11223214A (en) * | 1998-02-05 | 1999-08-17 | Koyo Seiko Co Ltd | Bearing device |
| JP4261730B2 (en) | 1999-04-22 | 2009-04-30 | キヤノン株式会社 | Hydrodynamic bearing structure and deflection scanning device |
| JP2001124061A (en) * | 1999-10-28 | 2001-05-08 | Matsushita Electric Ind Co Ltd | Hydrodynamic gas bearing device and method of manufacturing the same |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5712116A (en) * | 1980-06-24 | 1982-01-22 | Nippon Seiko Kk | Supporting member for spiral group bearing and molding method thereof |
| JPS5744219U (en) * | 1980-08-28 | 1982-03-11 | ||
| JPS5989823A (en) * | 1982-11-11 | 1984-05-24 | Matsushita Electric Ind Co Ltd | Hydrodynamic bearing device |
-
1987
- 1987-03-20 JP JP62066840A patent/JPH0745884B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63235719A (en) | 1988-09-30 |
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