JPH074726B2 - Table transfer device with linear motor - Google Patents
Table transfer device with linear motorInfo
- Publication number
- JPH074726B2 JPH074726B2 JP62010092A JP1009287A JPH074726B2 JP H074726 B2 JPH074726 B2 JP H074726B2 JP 62010092 A JP62010092 A JP 62010092A JP 1009287 A JP1009287 A JP 1009287A JP H074726 B2 JPH074726 B2 JP H074726B2
- Authority
- JP
- Japan
- Prior art keywords
- stator
- movable table
- dust
- linear motor
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/08—Arrangements for covering or protecting the ways
- F16C29/084—Arrangements for covering or protecting the ways fixed to the carriage or bearing body movable along the guide rail or track
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/08—Protective coverings for parts of machine tools; Splash guards
- B23Q11/0875—Wipers for clearing foreign matter from slideways or slidable coverings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Auxiliary Devices For Machine Tools (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明はたとえば産業用ロボット、各種工作機械等に用
いられるリニアモータ付テーブル移送装置に関する。The present invention relates to a table transfer device with a linear motor used in, for example, industrial robots, various machine tools, and the like.
(従来の技術) 従来、この種のテーブル移送装置としては、基台にリニ
アベアリングを介して可動テーブルを移動自在に支持す
ると共に、基台と可動テーブル間に駆動部としてのリニ
アパルスモータが介装されたものが知られている。この
ようにリニアモータを使用することによりボールねじ等
の送り機構を不要として装置の簡素化を図ると共に、モ
ータ自体の磁気吸引力によって可動テーブルを所定の停
止位置に正確に自己保持することができ高精度の位置決
めを図るようになっている。リニアパルスモータは可動
子と、可動テーブルの移動方向に一定ピッチで設けられ
た固定歯を有する固定子とから成り、固定歯のピッチを
基準にして高精度の微動駆動を可能とするものである。(Prior Art) Conventionally, as a table transfer device of this type, a movable table is movably supported by a base through a linear bearing, and a linear pulse motor as a drive unit is interposed between the base and the movable table. What is dressed is known. By using a linear motor in this way, it is possible to simplify the device by eliminating the need for a feed mechanism such as a ball screw and to accurately hold the movable table at a predetermined stop position by the magnetic attraction force of the motor itself. It is designed for highly accurate positioning. The linear pulse motor is composed of a mover and a stator having fixed teeth provided at a constant pitch in the moving direction of the movable table, and enables fine-precision driving with high precision based on the pitch of the fixed teeth. .
(発明が解決しようとする問題点) しかし斯かる従来例の場合には、可動子は固定子の長さ
分だけ移動するようになっており、固定子の可動子と対
面していない部分は外部に露出しているために、たとえ
ば点検時等において固定子上面に工具等が落下した場
合、固定歯が破損するおそれがあった。また長期間使用
するにつれて固定子の固定歯間の溝に塵埃が入りこみ易
い。一方可動子と固定子間のギャップは僅少であり、溝
内に滞溜した塵埃が可動子と干渉したり金属粉の場合に
は磁束が漏れたりして可動テーブルの円滑な作動が阻害
され、位置決め精度も悪くなってしまうという問題があ
る。(Problems to be Solved by the Invention) However, in the case of such a conventional example, the mover is moved by the length of the stator, and the portion of the stator not facing the mover is Since it is exposed to the outside, if a tool or the like falls onto the upper surface of the stator at the time of inspection, for example, the fixed teeth may be damaged. Further, as it is used for a long period of time, dust easily enters the groove between the fixed teeth of the stator. On the other hand, the gap between the mover and the stator is very small, and the dust accumulated in the groove interferes with the mover, and in the case of metal powder, the magnetic flux leaks, hindering the smooth operation of the movable table. There is a problem that the positioning accuracy also deteriorates.
このような固定子に滞溜する塵埃を除去するために、た
とえば可動テーブルにワイパを取付けて、固定子表面に
付着した塵埃を可動テーブルの移動に伴って掻き落すこ
とが考えられる。しかしワイパを取付けても固定歯間の
溝内の塵埃まで除去することはできず、さらにワイパ先
端が固定歯にぶつかるためにワイパが損傷を受け、さら
に固定歯のエッジ部も損傷してしまうという問題を招来
する。In order to remove such dust accumulated on the stator, it is conceivable to attach a wiper to the movable table and scrape off the dust adhering to the surface of the stator as the movable table moves. However, even if the wiper is attached, it is not possible to remove even the dust in the groove between the fixed teeth, and the tip of the wiper bumps against the fixed tooth, which damages the wiper and also damages the edge of the fixed tooth. Bring problems.
本発明は、上記した従来技術の問題点を解決するために
なされたもので、その目的とするところは、リニアモー
タの駆動特性を変えないで、固定子の固定歯を保護する
と共に溝内への塵埃の侵入を防止し得るリニアモータ付
テーブル移送装置を提供することにある。The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to protect the fixed teeth of the stator and to move them into the groove without changing the drive characteristics of the linear motor. It is an object of the present invention to provide a table transfer device with a linear motor capable of preventing the intrusion of dust.
(問題点を解決するための手段) 上記目的を達成するために、本発明にあって基台にリニ
アベアリングを介して可動テーブルを移動自在に支持す
ると共に、基台と可動テーブル間に、可動子と、可動テ
ーブルの移動方向に一定ピッチで設けられた固定歯を有
する固定子と、からなるリニアモータを介在させたリニ
アモータ付きテーブル移送装置において、固定子と可動
子間の磁気吸引力が阻害されない程度の厚みを有する非
磁性材の防塵カバーを前記固定子上の少なくとも固定歯
をカバーする範囲に固定状態で設けると共に、前記可動
テーブル側に防塵カバー上の塵芥を掻き取る掻き取り部
材を設けたことを特徴とする。(Means for Solving Problems) In order to achieve the above object, in the present invention, a movable table is movably supported on a base through a linear bearing, and movable between the base and the movable table. In a table transfer device with a linear motor in which a linear motor consisting of a child and a stator having fixed teeth provided at a constant pitch in the moving direction of the movable table, the magnetic attraction force between the stator and the mover is A dustproof cover made of a non-magnetic material having a thickness that is not obstructed is provided in a fixed state in a range covering at least the fixed teeth on the stator, and a scraping member for scraping dust on the dustproof cover is provided on the movable table side. It is characterized by being provided.
(作用) 而して、固定子上に衝撃が加わっても固定歯は防塵カバ
ーによって保護される。また防塵カバーによって固定子
の固定歯間の溝内への塵埃の侵入が防止される。さらに
可動テーブルの移動に伴なって掻き取り部材が防塵カバ
ー表面を摺動し、防塵カバーに付着した塵埃が掻き取ら
れて塵埃が除去される。(Operation) Therefore, even if an impact is applied to the stator, the fixed teeth are protected by the dustproof cover. Further, the dust cover prevents dust from entering the groove between the fixed teeth of the stator. Further, as the movable table moves, the scraping member slides on the surface of the dustproof cover, and the dust adhering to the dustproof cover is scraped off to remove the dust.
また、防塵カバーは非磁性体であり、しかも磁気吸引力
を阻害しない程度の厚みに構成されているので、リニア
モータの駆動特性は変化しない。Further, since the dustproof cover is made of a non-magnetic material and has a thickness that does not impede the magnetic attraction force, the drive characteristics of the linear motor do not change.
(実施例) 以下に本発明を図示の実施例に基づいて説明する。本発
明の第1実施例に係るリニアモータ付テーブル移送装置
を示す第1図乃至第8図において、1は長尺の基台であ
り、この基台1に可動テーブル2がリニアベアリング3
を介して基台1の長手方向に移動自在に支持されてい
る。すなわち、基台1の両側縁には長手方向に全長に亘
って延びる一対の軌道台4,4が互いに平行に配設されて
おり、これらの軌道台4,4は可動テーブル2に取付けら
れた1対のリニアベアリング3,3によって挾持され、可
動テーブル2はこの軌道台4,4に沿って摺動自在となっ
ている。軌道台4,4の上面は基台1の上面と連続して同
一平面となるように組付けられている。(Example) Below, this invention is demonstrated based on the Example shown in figure. 1 to 8 showing a table transfer device with a linear motor according to a first embodiment of the present invention, 1 is a long base, on which a movable table 2 and a linear bearing 3 are attached.
It is movably supported in the longitudinal direction of the base 1 via. That is, a pair of raceways 4, 4 extending in the longitudinal direction over the entire length are arranged in parallel with each other on both side edges of the base 1, and these raceways 4, 4 are attached to the movable table 2. It is held by a pair of linear bearings 3,3, and the movable table 2 is slidable along the rails 4,4. The upper surfaces of the rails 4, 4 are assembled so as to be flush with the upper surface of the base 1 in the same plane.
上記リニアベアリング3,…は第6図に示すように、片側
に2条のボール転走溝3a,3aが設けられかつ内部にボー
ル逃げ穴3b,3bが設けられたベアリングブロック3cと、
2条の負荷ボール列を保持する保持器3dと、ボール転走
溝3a,3aとボール逃げ穴3b,3bとを連通する側蓋3e,3eと
から構成されており、負荷ボール3f,…はボール転走溝3
a,3aおよびボール逃げ穴3b,3b間を循環するようになっ
ている。このボール転走溝3a,3aと負荷ボール3fとの接
触角αは略45度となっているが、45度に限定されるもの
ではなく30〜60度の範囲であればよい。As shown in FIG. 6, the linear bearings 3, ... Have a bearing block 3c having two ball rolling grooves 3a, 3a on one side and ball escape holes 3b, 3b provided therein,
It consists of a cage 3d that holds two rows of loaded balls, and side lids 3e and 3e that connect the ball rolling grooves 3a and 3a to the ball escape holes 3b and 3b. Ball rolling groove 3
It circulates between a and 3a and ball escape holes 3b and 3b. The contact angle α between the ball rolling grooves 3a, 3a and the loaded ball 3f is approximately 45 degrees, but is not limited to 45 degrees and may be in the range of 30 to 60 degrees.
また5は隙間調整ボルトであり、一方のリニアベアリン
グ3を一方の軌道台4側に押圧すると共に、押圧力の反
力によって可動テーブル2を介して反対側のリニアベア
リング3を他方の軌道台4に押圧して負荷ボール3f,…
に予圧を付与するものである。Numeral 5 is a clearance adjusting bolt that presses one of the linear bearings 3 toward one of the way 4 and causes the reaction of the pressing force to move the linear bearing 3 on the opposite side to the other way 4 through the movable table 2. Press to load ball 3f,…
Preload is applied to the.
一方基台1と可動テーブル2の間には、リニアモータ6
が介在されている。リニアモータ6は本実施例ではリニ
アパルスモータが用いられており、可動子7と固定子8
とにより構成されており、パルス発生源(図示せず)か
ら可動子7にパルスを入力することにより作動するよう
になっている。固定子8は上記基台1上にその全長に亘
って取付けられていて、その上面には上記可動テーブル
2の移動方向に所定ピッチでもって固定歯8a,…が全長
に亘って刻設されている。固定子8の上面は基台1上面
および軌道台4,4の上面を略同一平面上に配置させてお
り、またその幅は可動子7の幅と略同一幅で基台1の両
側縁部を残した中央部分に取付けられている。On the other hand, a linear motor 6 is provided between the base 1 and the movable table 2.
Is intervening. As the linear motor 6, a linear pulse motor is used in this embodiment, and the mover 7 and the stator 8 are
It is configured to operate by inputting a pulse to the mover 7 from a pulse generation source (not shown). The stator 8 is mounted on the base 1 over its entire length, and fixed teeth 8a, ... Are engraved on the upper surface of the stator 8 at a predetermined pitch in the moving direction of the movable table 2. There is. As for the upper surface of the stator 8, the upper surface of the base 1 and the upper surfaces of the raceways 4, 4 are arranged on substantially the same plane, and the width thereof is substantially the same as the width of the mover 7, and both side edges of the base 1 are arranged. It is attached to the central part that leaves.
一方可動テーブル2の下面には上記固定子8と対面させ
て可動子7が取付けられている。各可動子7は永久磁石
7aを中心に介在させてその左右に2つの磁気コアを対向
配置して構成されており、一方の磁気コアには永久磁石
7aによりN極に磁化された第1の磁極7bおよび第2の磁
極7cが形成され、他方の磁気コアには永久磁石7aにより
S極に磁化された第3の磁極7dおよび第4の磁極7eが形
成されている。On the other hand, a mover 7 is attached to the lower surface of the movable table 2 so as to face the stator 8. Each mover 7 is a permanent magnet
7a is interposed in the center, and two magnetic cores are arranged to face each other on the left and right sides, and one magnetic core is a permanent magnet.
The first magnetic pole 7b and the second magnetic pole 7c magnetized to the N pole by 7a are formed, and the third magnetic pole 7d and the fourth magnetic pole 7e magnetized to the S pole by the permanent magnet 7a are formed on the other magnetic core. Are formed.
固定子8にはその固定歯8a,…間に形成される溝8b,…を
被覆する非磁性体より成る防塵カバー9が固着されてい
る。防塵カバー9は薄板で固定子8の各固定歯8a,…上
面に接着等により固着されていて溝8b,…を外部から遮
蔽している。防塵カバー9としては、ステンレス板ある
いはプラスチックシート等が使用されている。また防塵
カバー9は、固定子8と可動子7間の磁気吸引力が阻害
されない程度の厚みに形成され、その表面は可動子7と
干渉しないように取付られている。もっとも防塵カバー
9を低摩擦部材によって構成しておけば、可動子7と接
触してもよい。この防塵カバー9の幅は本実施例では固
定子8の幅と同等に形成され、その上面が基台1上面と
同一平面となるように組付けられている。A dustproof cover 9 made of a nonmagnetic material is fixed to the stator 8 to cover the grooves 8b formed between the fixed teeth 8a. The dustproof cover 9 is a thin plate and is fixed to the upper surface of each fixed tooth 8a, ... Of the stator 8 by adhesion or the like to shield the grooves 8b ,. As the dustproof cover 9, a stainless plate, a plastic sheet, or the like is used. The dust cover 9 is formed to a thickness that does not hinder the magnetic attraction between the stator 8 and the mover 7, and its surface is attached so as not to interfere with the mover 7. However, if the dustproof cover 9 is made of a low friction member, it may come into contact with the mover 7. In this embodiment, the width of the dustproof cover 9 is formed to be equal to the width of the stator 8, and the dustproof cover 9 is assembled so that its upper surface is flush with the upper surface of the base 1.
一方、可動子7には先端が防塵カバー9に摺動して防塵
カバー9表面の塵埃を掻き取る掻き取り部材10が取付け
られている。掻き取り部材10は鉄板等の金属板10aにゴ
ム10bを焼付けて構成されていて、本実施例においては
可動テーブル2の前後両端面にボルト10cにより取付け
られている。掻き取り部材10のゴム10bの幅は、上記防
塵カバー9の幅と等しく形成されていて、可動テーブル
2の移動によって塵埃を掻き取るものである。掻き取り
部材10のゴム10bは摺動抵抗とならないように摩擦抵抗
が小さく、かつ耐摩耗性に優れ、しかも追従性に優れた
材料で成形されている。また掻き取り部材10の取付部位
としては可動テーブル2の他に可動子7の移動方向両端
部に取付けてもよく、また可動テーブル2と可動子7の
両方に二重に取付けるようにしてもよい。On the other hand, the movable member 7 is provided with a scraping member 10 whose tip slides on the dustproof cover 9 to scrape off dust on the surface of the dustproof cover 9. The scraping member 10 is formed by baking a rubber plate 10b on a metal plate 10a such as an iron plate. In this embodiment, the scraping member 10 is attached to the front and rear end surfaces of the movable table 2 with bolts 10c. The width of the rubber 10b of the scraping member 10 is formed to be the same as the width of the dustproof cover 9 and scrapes dust by the movement of the movable table 2. The rubber 10b of the scraping member 10 is formed of a material having a small frictional resistance so as not to have a sliding resistance, excellent abrasion resistance, and excellent followability. The scraping member 10 may be attached to both ends of the movable table 7 in the moving direction in addition to the movable table 2, or may be double mounted to both the movable table 2 and the movable table 7. .
一方、上記リニアベアリング3の移動方向両端部には、
軌道台4,4のボール転走面4a,4a,…に摺動してボール転
走面4a,…上の塵埃を掻き取るワイパ11が取付けられて
いて、リニアベアリング3の摺動部をクリーニングして
いる。On the other hand, at both ends of the linear bearing 3 in the moving direction,
A wiper 11 that slides on the ball raceways 4a, 4a, ... Of the raceways 4, 4 to scrape off the dust on the ball raceways 4a ,. is doing.
上記構成のリニアモータ付テーブル移送装置にあって
は、リニアモータ6の可動子7に図示しないパルス発生
源よりパルスを入力することにより、各磁極7b,7c,…と
固定子8の固定歯8a,8a…間に磁気吸引力が生じ、この
磁気吸引力によって可動子7と固定子8間に生じる推力
によって可動テーブル2が基台1に対してその長手方向
に相対移動する。可動テーブル2の移動に伴なって、そ
の進行方向側の端部に取付けられた掻き取り部材10によ
って防塵カバー9表面に付着した塵埃Dが第8図に示す
ように掻き取られて除去される。また、本実施例にあっ
ては掻き取り部材10を低摩擦材料により成形しているの
で、可動テーブル2の円滑な移動が阻害されることはな
く、また推力の損失も小さい。In the table transfer device with the linear motor having the above-described configuration, by inputting a pulse to the mover 7 of the linear motor 6 from a pulse generation source (not shown), each magnetic pole 7b, 7c, ... A magnetic attraction force is generated between the movable tables 2 and 8a, and the magnetic attraction force causes the movable table 2 to move relative to the base 1 in the longitudinal direction by the thrust force generated between the mover 7 and the stator 8. Along with the movement of the movable table 2, the dust D adhering to the surface of the dust-proof cover 9 is scraped off and removed by the scraping member 10 attached to the end of the movable table 2 on the traveling direction side, as shown in FIG. . Further, in the present embodiment, since the scraping member 10 is formed of a low friction material, smooth movement of the movable table 2 is not hindered and thrust loss is small.
このように防塵カバー9表面の可動テーブル2の移動領
域は上記掻き取り部材10によって塵埃が除去されるの
で、可動子7が塵埃と干渉したり、たとえば塵埃に鉄粉
等の磁性粉が混入している場合に可動子7と固定子8間
の磁束が漏れるようなことはなく、可動テーブル2はス
ムースに作動する。In this way, since the dust is removed by the scraping member 10 in the moving area of the movable table 2 on the surface of the dustproof cover 9, the mover 7 interferes with the dust, or magnetic powder such as iron powder is mixed with the dust. In this case, the magnetic flux between the mover 7 and the stator 8 does not leak, and the movable table 2 operates smoothly.
また点検時等において固定子8上に工具等を落とした場
合でも、その固定歯8a,…は防塵カバー9によって保護
され損傷が防止される。Further, even when a tool or the like is dropped on the stator 8 at the time of inspection or the like, the fixed teeth 8a, ... Are protected by the dust cover 9 to prevent damage.
さらに、第7図に示すように、掻き取り部材10のゴム10
b′幅を広げて基台1両側の軌道台4,4上面に付着する塵
埃まで除去するようにすれば、リニアベアリング3の転
走面側への塵埃の回り込みが防止されてリニアベアリン
グ3の円滑な作動をも保障できる。Further, as shown in FIG. 7, the rubber 10 of the scraping member 10 is
If the b'width is widened to remove even the dust adhering to the upper surfaces of the raceways 4, 4 on both sides of the base 1, it is possible to prevent the dust from wrapping around the rolling surface side of the linear bearing 3 and prevent the linear bearing 3 from moving. It can guarantee smooth operation.
第9図および第10図には本発明の第2実施例に係るリニ
アモータ付テーブル移送装置を示しており、第1実施例
と同一の構成部分については同一の符号を付して説明す
ると、本第2実施例にあっては、掻き取り部材12の幅を
拡げて両側端部12a,12aによって第1実施例のリニアベ
アリング3のワイパ11の機能を持たせている。すなわち
掻き取り部材12が基台1に設けた軌道台4,4のボール転
走面4a,4a,…および防塵カバー9を含む基台1上面の全
面に摺接していて、可動テーブル2の移動に伴なって防
塵カバー9表面のみならず、軌道台4,4のボール転走面4
a,4a,…に付着した塵埃をも掻き取ってクリーニングす
るものである。その他の構成および作用については第1
実施例と同様であるので説明を省略する。FIGS. 9 and 10 show a table transfer device with a linear motor according to a second embodiment of the present invention. The same components as those in the first embodiment are designated by the same reference numerals and described below. In the second embodiment, the width of the scraping member 12 is expanded so that both side end portions 12a, 12a have the function of the wiper 11 of the linear bearing 3 of the first embodiment. That is, the scraping member 12 is in sliding contact with the entire upper surface of the base 1 including the ball rolling surfaces 4a, 4a of the raceways 4, 4 provided on the base 1 and the dustproof cover 9, and the movable table 2 moves. As a result, not only the surface of the dustproof cover 9 but also the ball rolling surface 4 of the raceways 4, 4
Dust adhering to a, 4a, ... Is scraped off for cleaning. Regarding other configurations and operations, the first
The description is omitted because it is similar to the embodiment.
尚、上記各実施例においてはリニアベアリングとしてこ
ろがり軸受を用いたが、すべり軸受としてもよい。また
本発明では防塵カバー9によって固定子8を被覆するよ
うにしたが、各固定歯8a間の溝を非磁性体により埋設す
るようにしても同様の効果が得られる。Although the rolling bearings are used as the linear bearings in the above-mentioned embodiments, sliding bearings may be used. Although the stator 8 is covered with the dustproof cover 9 in the present invention, the same effect can be obtained by burying the grooves between the fixed teeth 8a with a non-magnetic material.
(発明の効果) 本発明は以上の構成および作用から成るもので、可動テ
ーブルと基台間に介装されるリニアモータの固定子の固
定歯間に形成される溝を、固定子と可動子間の磁気吸引
力を阻害しない程度の厚みを有する防塵カバーにより被
覆したので、固定歯間の溝内への塵埃の滞留を防止でき
る。(Effects of the Invention) The present invention has the above-described configuration and operation, and the groove formed between the fixed teeth of the stator of the linear motor interposed between the movable table and the base is formed in the stator and the movable element. Since it is covered with a dust-proof cover having a thickness that does not impede the magnetic attraction force between them, it is possible to prevent dust from accumulating in the groove between the fixed teeth.
また、防塵カバーあるいは非磁性体が設けられた固定子
上に付着した塵埃は掻き取り部材によって除去したの
で、塵埃の影響がなく安定した駆動特性を維持すること
ができる。Further, since the dust adhering to the dustproof cover or the stator provided with the non-magnetic material is removed by the scraping member, stable driving characteristics can be maintained without being influenced by the dust.
第1図は本発明の第1実施例に係るリニアモータ付テー
ブル移送装置の縦断側面図、第2図は第1図の装置の縦
断正面図、第3図は第1図の装置の概略全体斜視図、第
4図は第3図の基台の端部の一部破断拡大斜視図、第5
図は第4図のV−V線拡大断面図、第6図は第1図の装
置のリニアベアリングの軌道台との組付状態を示してお
り、第6図(イ)は平面図、第6図(ロ)は軌道台を一
部省略して示した正面図、第6図(ハ)は側面図、第6
図(ニ)は横断面図、第7図は第1図の装置の掻き取り
部材の他の態様を示す斜視図、第8図は第1図の装置の
掻き取り部材近傍の拡大断面図、第9図は本発明の第2
実施例に係るリニアモータ付テーブル移送装置の縦断正
面図、第10図は第9図の装置の縦断側面図である。 符号の説明 1…基台、2…可動テーブル 3…リニアベアリング、6…リニアモータ 7…可動子、8…固定子 8a…固定歯、9…防塵カバー 10,12…掻き取り部材1 is a vertical sectional side view of a table transfer device with a linear motor according to a first embodiment of the present invention, FIG. 2 is a vertical sectional front view of the device of FIG. 1, and FIG. 3 is a schematic overall view of the device of FIG. FIG. 5 is a perspective view, FIG. 4 is a partially cutaway enlarged perspective view of an end portion of the base of FIG.
FIG. 6 is an enlarged cross-sectional view taken along the line VV of FIG. 4, FIG. 6 shows an assembled state of the linear bearing of the apparatus of FIG. 1 with a way, and FIG. 6 (a) is a plan view. FIG. 6 (b) is a front view showing a part of the way, and FIG. 6 (c) is a side view.
7D is a cross-sectional view, FIG. 7 is a perspective view showing another aspect of the scraping member of the apparatus of FIG. 1, FIG. 8 is an enlarged cross-sectional view of the vicinity of the scraping member of the apparatus of FIG. FIG. 9 shows the second of the present invention.
FIG. 10 is a vertical sectional front view of the table transfer device with a linear motor according to the embodiment, and FIG. 10 is a vertical sectional side view of the device of FIG. Explanation of symbols 1 ... Base, 2 ... Movable table 3 ... Linear bearing, 6 ... Linear motor 7 ... Mover, 8 ... Stator 8a ... Fixed tooth, 9 ... Dust cover 10,12 ... Scraping member
Claims (1)
ブルを移動自在に支持すると共に、基台と可動テーブル
間に、可動子と、可動テーブルの移動方向に一定ピッチ
で設けられた固定歯を有する固定子と、からなるリニア
モータを介在させたリニアモータ付きテーブル移送装置
において、 固定子と可動子間の磁気吸引力が阻害されない程度の厚
みを有する非磁性材の防塵カバーを前記固定子上の少な
くとも固定歯をカバーする範囲に固定状態で設けると共
に、 前記可動テーブル側に防塵カバー上の塵芥を掻き取る掻
き取り部材を設けたことを特徴とするリニアモータ付き
テーブル移送装置。1. A movable table is movably supported on a base through linear bearings, and a movable element and fixed teeth provided at a constant pitch in the moving direction of the movable table are provided between the base and the movable table. In the table transfer device with a linear motor having a linear motor interposed between the stator and the stator, a dustproof cover made of a non-magnetic material having a thickness that does not hinder the magnetic attraction between the stator and the mover is provided on the stator. A fixed table is provided in a range covering at least the fixed teeth, and a scraping member for scraping dust on the dust cover is provided on the movable table side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62010092A JPH074726B2 (en) | 1987-01-21 | 1987-01-21 | Table transfer device with linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62010092A JPH074726B2 (en) | 1987-01-21 | 1987-01-21 | Table transfer device with linear motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63180443A JPS63180443A (en) | 1988-07-25 |
| JPH074726B2 true JPH074726B2 (en) | 1995-01-25 |
Family
ID=11740688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62010092A Expired - Lifetime JPH074726B2 (en) | 1987-01-21 | 1987-01-21 | Table transfer device with linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074726B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0487551A (en) * | 1990-07-26 | 1992-03-19 | Nippon Seiko Kk | linear motor device |
| JP3453991B2 (en) * | 1995-03-31 | 2003-10-06 | ミノルタ株式会社 | Linear motor |
| JP2002066867A (en) * | 2000-09-04 | 2002-03-05 | Mori Seiki Co Ltd | Machine tool feeder |
| DE10320553B4 (en) * | 2003-05-07 | 2025-05-28 | Sew-Eurodrive Gmbh & Co. Kg | linear motor |
| DE202007002504U1 (en) * | 2007-02-16 | 2007-04-26 | Fischer, Peter | Electrical linear drive for use in linear motor, has base carrier that is operated together with linear guide of profile-guide rail, and two carriages that are aligned on profile-guide rail and are moved along rail |
| JP2009060730A (en) * | 2007-08-31 | 2009-03-19 | Hitachi Ltd | Linear motor |
| JP2010136606A (en) * | 2008-10-28 | 2010-06-17 | Yaskawa Electric Corp | Linear slider |
| CN103511458A (en) * | 2013-09-06 | 2014-01-15 | 苏州凯欧机械科技有限公司 | Sealing positioner of medical clean positioning apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4971571A (en) * | 1972-11-14 | 1974-07-10 | ||
| JPS6016338A (en) * | 1983-07-04 | 1985-01-28 | Hitachi Seiki Co Ltd | Guide surface protective cover of machine tool |
-
1987
- 1987-01-21 JP JP62010092A patent/JPH074726B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63180443A (en) | 1988-07-25 |
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