JPH0748045B2 - Vibrating gyro - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a vibration gyro that obtains an angular velocity by detecting a Coriolis force.

[Conventional technology]

As a conventional vibration gyro of this type, for example, there is a piezoelectric type as shown in FIG. 21, which has a three-dimensional coordinate system in which each surface of the fixing means 4 orthogonal to the Y axis is Two vibrators 5 made of a piezoelectric material, such as a bimorph, a unimorph and the like, are fixed in a tuning fork shape, and the free ends of the respective vibrators 5 are provided with respective detection means 6 also made of a piezoelectric material. Each wide surface is a transducer 5
It is configured by fixing in a state of facing in the direction orthogonal to that.

When using such a vibration gyro, first,
An alternating voltage is applied to the vibrator 5 to cause the vibrator 5 to vibrate symmetrically in the direction of the solid arrow (Y-axis direction). As a method of producing such symmetrical vibration, in addition to a method of applying an AC voltage to both vibrators 5, an AC voltage is applied to only one vibrator 5 and the other vibrator 5 is used as a vibration monitor. There is a method of stabilizing the vibration by controlling the vibration state. In any of these methods, in order to increase the Coriolis force described later, the vibrator 5 is vibrated in the resonance state to increase the vibration amplitude. I have decided.

Then, under the vibrating state of the vibrator 5, the vibrating gyro is rotated about the Z axis at an angular velocity ω so that the detecting means 6 bends the vibrating gyro in the direction of the broken line arrow (X-axis direction). A Coriolis force Fc that acts is generated, and as a result, a voltage is generated in the detection means 6.

Since the generated voltage is proportional to the magnitude of the Coriolis force Fc, the angular velocity ω can be obtained by measuring the generated voltage.

Incidentally, in general, the fixing means 4 is provided with a support rod 7 to support the entire apparatus to improve the efficiency.

[Problems to be Solved by the Invention] However, in such a conventional technique, since the detection unit 6 is connected to the tip of the vibrator 5, the size of the device is increased, and The wiring for supplying an alternating current, the wiring for taking out a signal voltage from the detection means 6, and the like are complicated, and in particular, the wiring for the detection means 6 has a great deal of difficulty in routing the wire rod. It was

That is, the detection means 6 is always under vibration having an amplitude of approximately several μm to 100 μm, and the mass and elastic modulus of the wire rod for extracting the signal voltage, and further the deformation state and the like are mainly Since it has a great influence on the vibration of the vibrator 5 and causes a change in the detection sensitivity, the wire is adhered to the side surface 5 ′ of the vibrator 5 and extended to the vicinity of the fixing means 4 with small vibration. Means for pulling out from there to a predetermined connection terminal, extending the predetermined connection terminal to a position in the vicinity of the detection means 6, and shortening the length of the wire rod to reduce the influence of the wire rod. Has been taken.

However, according to this, a significant reduction in the manufacturing work efficiency of the vibration gyro was inevitable.

On the other hand, when the wide surface of the vibrator 5 and the wide surface of the detecting means 6 are not exactly orthogonal to each other, a vibration component in the Y-axis direction leaks into the detection signal of the detecting means 6. At the same time, the detection accuracy itself decreases. By the way, as shown in the figure, under the structure in which the end face of the transducer 5 and the end face of the detection means 6 are directly connected, it is possible to obtain sufficient connection accuracy by simply fixing them with an adhesive. Absent.

Therefore, there has been proposed a method of connecting the vibrator 5 and the detection means 6 via a connecting member 8 as shown in FIG.
According to the method using the connecting member 8, a part of each electrode of the vibrator 5 and the detecting means 6 is provided on the connecting member 8 and adhered to each of the surfaces facing in the directions orthogonal to each other. The vibrator 5 and the detection means 6 can be connected relatively easily with a high perpendicularity. However, in this case, since the vibrator bonding surface and the detecting means bonding surface of the connecting member 8 are oriented in directions orthogonal to each other, the bonding of the vibrator 5 and the detecting means 6 to the connecting member 8 is performed. In order to carry out simultaneously, each of the vibrator 5 and the detecting means 6 is connected to the connecting member 8 until the adhesive is cured.
In addition to the complicated jig structure required for accurate positioning and holding under a predetermined relative relationship, the jig becomes large and the workability deteriorates, and such bonding work is performed in two steps. When the steps are performed separately, the work man-hours increase significantly.

[Background technology]

In general, when a piezoelectric bimorph element whose one end is cantilevered is flexed by applying a force F as shown in FIG. 23, taking the series type bimorph 13 as an example, approximately _{= (3g 31 · l · F} ) / (2t · w) g 31: voltage output factor l: length t: thickness w: generating a voltage V represented by width. On the other hand, as shown in FIG. 24, while polarizing in the direction shown by the white arrow,
When the piezoelectric material 14 having upper and lower surfaces provided with electrodes (not shown) and acting as a slip oscillator is subjected to shear deformation by applying force F, similarly, V ′ = (t ′ · g ₁₅ · F) / ( l ′ · w ′) g ₁₅ : voltage output coefficient l ′: length t ′: thickness w ′: width to generate a voltage V ′ represented by:

Here, taking a piezoelectric ceramic material typified by lead zirconate titanate (PZT) and the like as an example, the voltage output coefficients g ₃₁ and g ₁₅ are about g ₁₅ / g ₃₁ 3 in terms of the ratio and are added. Although the slip oscillator is more advantageous in terms of voltage output coefficient than the force, the thickness t,
Considering t ', width w, w', and length l, l ', it is clear from the above two equations that the slip oscillator is not always advantageous as the output voltage.

However, as shown in FIG. 25, one end of the driving vibrator 5 is connected to the fixing means 4, and an AC voltage is applied to the vibrator 5 to vibrate in the Y-axis direction while the fixing means 4 is moved to Z direction. The Coriolis force generated when rotating at an angular velocity ω around the axis
Fc applies a torsional moment M indicated by a solid arrow to the connecting portion 9 of the fixing means 4 with the vibrator 5 in addition to the shear stress indicated by a dashed arrow to generate a force in the direction of twisting the fixing means 4. Let Therefore, by positively utilizing this twisting moment M to measure the Coriolis force Fc, it is possible to improve the workability in manufacturing the vibration gyro and to realize its miniaturization. Moreover, high measurement accuracy can be brought about.

The present invention was made with attention to such points,
The present invention provides a novel vibration gyro that has never existed before.

More specifically, as shown in FIG. 26, the base 10
And the arm 12 as shown in FIG. 27, the long side length is a,
When a force F in the X-axis direction is applied to the tip of the arm 12 when the intermediate member 11 having a rectangular contour with a short side length of b is connected, the shear stress τ = F / a is applied to the intermediate member 11.・ Along with b, the torsional moment with the Y axis as the axis of rotation M = F ・ L '
Acts, and this torsional moment M causes the intermediate member
At 11, a torsional shear stress τ'is generated centering on the intersection O of the coordinate axes X, Y, Z. This torsional shear stress τ ′ becomes maximum at the midpoint A of the long side of the intermediate member 11 shown in FIG. 27,
The value is a constant determined by τ′max = F · L ′ / α · a · b ² α: the ratio a / b of the lengths of the long side and the short side.

Since τ′max has a relative relationship of τ′max / τ = L ′ / α · b with respect to τ, it is extremely effective to measure the torsional shear stress τ ′.

In addition, here, in order to facilitate the explanation, the intermediate member
Although 11 has a rectangular outline shape of a> b, if a <b in FIG. 27, the maximum torsional shear stress acts on the midpoint B, and if a = b, both midpoints are applied. The maximum torsional shear stress acts on A and B. By the way, with the torsional shear stress τ ′, the distribution becomes zero at the center O and the four corners of the intermediate member 11 and becomes high at the midpoint of the side.

As described above, the intermediate member 11 is subjected to not only the shear stress τ but also the torsional shear stress τ ′, so that
As shown in FIG. 28, 11 is the shear strain γ due to the shear stress τ.
And a shear strain γ ′ due to the torsional shear stress τ ′. Here, regarding the relationship between the tensile and shear stresses and the electric displacement, when the electric displacement D generated when the stress T and the electric field E are applied to the piezoelectric material is expressed by an equation, If lead zirconate titanate is used as an example of the piezoelectric material, the electric displacement when only the stress T is applied is It is represented by. In this case, the applied stresses T _{1 to} T ₆
Is acting in the direction shown in FIG. 29 and FIG. 30, and the piezoelectric material is assumed to be polarized in the direction of the third axis as indicated by the white arrow.

From the above, when an electrode is provided on the surface orthogonal to the first axis, the electric displacement D _{1 in the} direction of the first axis due to stress is D ₁ = d ₁₅ · T ₅ , which is It becomes a sliding oscillator that generates electrical displacement with respect to the surrounding shear stress T ₅ .

Next, as shown in FIG. 31, planes x ₁ and x ₂ orthogonal to the X axis
And the planes y ₁ and y ₂ orthogonal to the Y axis and the plane z orthogonal to the Z axis.
It occurs when a torsional shearing stress τ'acts in the plane orthogonal to the Y-axis due to the torsional moment M about the Y-axis passing through the center of the rectangular parallelepiped piezoelectric material 14 formed by ₁ and z _2. Consider electrical displacement.

The direction of the torsional shear stress τ′p ₂ acting on the point P ₂ on the plane y ₂ of the piezoelectric material 14 polarized in the direction orthogonal to the Y axis and forming the angle α with the X axis is the angle with respect to the X axis. When forming a beta, on the plane y _1, and P ₁ point against the point P _2, in the region P _1, P ₂ connecting the the point P _2, electric displacement directed from the points P ₁ to point P ₂ Is Dp = d ₁₅ τ′p ₂ cos (α−β). A point P ₂ ′, which is axially symmetrical to the point P ₂ with respect to the Y axis, has a direction of torsional shear stress at an angle of (β + π) with respect to the X axis, and its size is the point P 2. is equal stress Tau'p ₂ acting on the _2, on the plane g _1, and 'P ₁ point against a' point P _2, 'regions P ₁ connecting the' point P _2, in the P ₂ ', point
The electric displacement from P ₁ ′ to the point P ₂ ′ is Dp ′ = d ₁₅ τ′p ₂ cos (α−β−π) = −d ₁₅ τ′p ₂ cos (α−β), and the region P ₁ , P ₂ and the regions P ₁ ′ and P ₂ ′ generate electric displacements having the same magnitude but different polarities.

Therefore, even if the electrodes are formed on the entire surfaces of the planes y ₁ and y ₂ , the generated charges cancel each other out, so that a voltage based on the action of the torsion moment M is not generated between the electrodes. , The intermediate member 11 shown in FIG.
Even with a slip oscillator having such a configuration, the torsional shear stress τ ′ is not detected, and only the shear stress τ is detected as a voltage, so the detected stress is small and high detection sensitivity cannot be obtained.

Therefore, the present invention makes it possible to detect the twisting moment M with high sensitivity by adopting a configuration in which a specific electric signal is preferentially taken out, and at the same time, the vibration gyroscope is small in size and highly accurate with excellent productivity. I will provide a.

[Means for Solving the Problems]

The vibrating gyroscope of the present invention, in particular, polarizes the piezoelectric material in a direction orthogonal to the Y axis of the three-dimensional coordinate system, and
A sliding oscillator formed by forming electrodes on each surface of the piezoelectric material orthogonal to the Y axis is provided as at least a part of fixing means for fixing one end of the oscillator, and at least the sliding oscillator is provided. The electrode on one side is omitted in a part of it.

Here, instead of omitting a part of the electrodes on at least one side, dividing the electrodes on at least one side into a plurality or dividing the sliding oscillator itself into a plurality within a plane orthogonal to the Y axis. Is also possible.

Further, preferably, two vibrators are attached to one fixing means in a tuning fork shape.

That is, according to the present invention, one end of the vibrator is fixed in the three-dimensional coordinate system by the Y
The Coriolis force generated in the X-axis direction is fixed to a surface orthogonal to the axis, and the rotational movement of the fixing means around the Z-axis under the vibration of the vibrator in the Y-axis direction causes the Coriolis force generated in the X-axis direction. In the vibrating gyro to detect, (1) the piezoelectric material is polarized in the direction orthogonal to the Y-axis, and the sliding oscillator formed by forming electrodes on each surface of the piezoelectric material orthogonal to the Y-axis is fixed as described above. Electrodes that are provided as at least a part of the means and that are formed on both sides of the piezoelectric material by omitting the electrodes on at least one side of the sliding oscillator so that the electrical displacement due to the torsional moment is not cancelled. A vibration gyro configured to detect the Coriolis force based on a differential output between the two.

(2) A sliding oscillator formed by polarizing a piezoelectric material in a direction orthogonal to the Y axis and forming electrodes on each surface of the piezoelectric material orthogonal to the Y axis serves as at least a part of the fixing means. The electrodes on at least one surface of the sliding oscillator are divided by a surface other than the surface orthogonal to the polarization direction, and the Coriolis A vibration gyro characterized by being configured to detect force.

(3) A sliding oscillator formed by polarizing a piezoelectric material in a direction orthogonal to the Y axis and forming electrodes on each surface of the piezoelectric material orthogonal to the Y axis serves as at least a part of the fixing means. It is arranged so that the sliding oscillator is divided by the planes other than the plane orthogonal to the polarization direction, and the Coriolis force is detected based on the differential output between the electrodes formed in each divided body. A vibrating gyro, which is characterized in that

In the vibrating gyro, it is preferable that the two vibrators are attached to the fixing means in a tuning fork shape.

[Action]

This vibration gyro detects the Coriolis force by both the simple shear stress acting on the slip oscillator and the torsion shear stress of the slip oscillator based on the torsion moment generated by the Coriolis force. In comparison with the case where the bending force of the detection means 6 is detected, the detection sensitivity can be greatly improved. This means that when at least one electrode on one side is omitted, at least one electrode on the one side or The same applies to any case where the slip oscillator itself is divided into a plurality of parts.

Further, in the vibration gyro in which the two vibrators for driving are attached to the fixing means in a tuning fork shape, the detection sensitivity can be doubled and the S / N ratio with respect to external vibration noise can be improved.

On the other hand, in this vibrating gyro, the slide oscillator is provided as at least a part of the fixing means of the driving oscillator, so that the detecting means 6 described in the prior art is not necessary and the apparatus is sufficiently miniaturized. In addition, you can
By concentrating the electrodes in the vicinity of the fixing means, it is possible to effectively eliminate the inconvenience associated with the wiring of the wire.

Moreover, here, when assembling the vibrating gyro, one end of the driving vibrator can be surface-bonded to the fixing means, which makes it extremely easy to position and accurately maintain both of them, and therefore variations in performance are caused. It is possible to supply a large amount of vibration gyro with small and stable performance at low cost.

〔Example〕

 Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view illustrating a slide oscillator which is a main part of the present invention.

This is to polarize the rectangular parallelepiped piezoelectric material 14 composed of the planes x ₁ , x ₂ , y ₁ , y ₂ , z ₁ , z ₂ in a direction forming an angle α with the X axis, and at the same time the planes y ₁ , y each of _2, the electrode 15a formed as shown by hatching in the figure, the 16a, Q ₁ an arbitrary point on the plane y _1,
When the point on the plane y ₂ that opposes it is Q ₂ and the Y-axis symmetric positions with respect to these respective points Q ₁ and Q ₂ are Q ₁ ′ and Q ₂ ′, respectively, point Q _1, at least one of Q _2, or the point Q ₁ ', Q _2' least one of the sliding vibrator 1 is missing electrode portion of the point Q ₂ is where shown in FIG.
Indicates.

Such a sliding oscillator 1 constitutes the fixing means 3 by attaching it to one surface of the base 2 orthogonal to the Y axis, as shown in FIG. 4, for example. The vibrator 5 is connected to the fixing means 3 at one end of one vibrator 5,
In the figure, it can be performed by fixing the lower end portion to the sliding oscillator 1 with an adhesive or the like.

Here, when an AC voltage is applied to the vibrator 5 to force it to vibrate in the Y-axis direction and the fixing means 3 is rotated around the Z-axis at an angular velocity ω to generate the force Fc of corioca, The piezoelectric material 14 is subjected to a torsional shearing stress in the plane orthogonal to the Y axis due to the torsional moment M, and the electrodes 15a, 16
An electric displacement between points Q ₁ ′ and Q ₂ ′ that is not canceled by the electric displacement generated between points Q ₁ and Q ₂ occurs between a and is detected as the voltage between both electrodes. However, if the electrode is cut off at a location where the polarization direction and the direction of action of torsional shear stress are orthogonal to each other, that is, at a location where no electrical displacement occurs, two locations of electrical displacement of equal magnitude and opposite polarity are generated. If the electrodes are missing in each, no electrical displacement is detected.

In the electrode configuration as described above, a highly practical configuration in which the detection sensitivity to the torsion moment M is maximum is a polarization angle α of 0, π / 2, π or 3 / 2π, and a plane y ₁ , y
The electrodes on at least one surface of ₂ are formed only on half of those surfaces, and furthermore, the missing edges of the half electrodes are configured to be parallel to the polarization direction,
An example is shown in FIG. 2 and FIG. In all of these, the polarization angle α = 0, and in the configuration shown in FIG. ₂ , the electrode 16b on the plane y ₂ has an area half that of the plane y ₂ and the missing side of the electrode 16b. The edge 17b is parallel to the polarization direction. The configuration shown in FIG. 3 is a biplanar y _1, y ₂ on each electrode 15c, 16c together, their plane y _1, y
The area is half the area of ₂ and the missing edges 17c and 17d
Is parallel to the polarization direction.

5, 6 and 7 are other application examples of the sliding oscillator,
In other words, it is a perspective view showing another embodiment of the present invention.

FIG. 5 shows that the slide oscillator 1 is attached to two surfaces of the base 2 which are orthogonal to the Y-axis to form the fixing means 3, and two vibrators 5 are attached at the lower end portions of the fixing means 3. It is attached to the sliding oscillator 1 like a tuning fork, and the example shown in FIG.
The fixing means 3 is configured by sandwiching one slide vibrator 1 between the bases, and the lower ends of the two vibrators 5 are respectively arranged on the respective surfaces of the bases 2 orthogonal to the Y axis. It is fixed in a shape. In the example shown in FIG. 7, the fixing means 3 is composed of only the sliding oscillator 1.

Here, for example, in the vibration gyro shown in FIG. 5, the output voltage of the two piezoelectric materials 14 can be taken out differentially by configuring the detection circuit as illustrated in FIG. , The S / N ratio with respect to external vibration noise can be improved, and the detection sensitivity of the Coriolis force Fc can be doubled.

Further, as shown in FIG. 9, when the whole is supported by the support rod 7 attached to the fixing means 3, the forced vibration of the vibrator 5 is stabilized and the efficient operation under resonance is ensured. be able to.

When the slip oscillator 1 as shown in FIG. 3 is used, the portion where electrodes are not formed is not always necessary because the electric displacement generated there cannot be used as a signal. As shown, the portion not sandwiched between the electrodes 15c and 16c can be configured by another spacing member 18,
The spacing member 18 may be integrally formed with the base 2.

FIG. 11 is a diagram illustrating another slip oscillator, and FIG.
In the sliding oscillator shown in the figure, in order to effectively use the electric displacement generated in the portion where the electrodes 15c and 16c are not formed,
The polarization direction is the X-axis direction (α = 0) and the plane y ₁
Each of the upper electrode and the electrode on the plane y ₂ is divided by each of the punching patterns 19a and 19b parallel to the X axis, and the electrodes 15d and 16d and the electrodes 15e and 16e are made to face each other. .

In this sliding oscillator 1, when a torsional moment M acts on it, electric displacements having different polarities occur between the electrodes 15d and 16d and between the electrodes 15e and 16e. Therefore, for example, a detection circuit as shown in FIG. With this configuration, it is possible to increase the amount of electric charge generated by the torsion moment M and improve the S / N ratio with respect to vibration noise. Therefore, by constructing a vibrating gyro as shown in FIGS. 4 to 7 with this slide oscillator, excellent performance can be exhibited.

Here, the direction of polarization, the position and orientation of the extraction pattern are not limited to the illustrated examples, and can be variously changed, as well as the electrodes on either the plane y ₁ or the plane y _2. Can be left undivided.

FIG. 13 is a perspective view exemplifying still another sliding oscillator. This is a polarization oscillator with the polarization direction as the X-axis direction, and is divided into two parts in a plane orthogonal to the Z-axis at the coordinate origin position. Piezoelectric material
Electrodes 15f, 15g and 16f, 16g are formed on the respective planes y ₁ and y ₂ of 14.

The slip oscillator 1 increases the amount of electric charge generated by the torsion moment M by effectively taking out the electric displacement of the opposite polarity under the circuit configuration as shown in FIGS. A good S / N ratio for noise can be achieved.

By the way, the polarization direction, the dividing position, the angle, etc. of the slide oscillator 1 can be appropriately changed as required. In addition, it is necessary to perform the division in a plane orthogonal to the Y axis with a plane crossing both planes y ₁ and y ₂ .

FIG. 16 is a diagram showing an example thereof, which is divided into four piezoelectric materials 14 having a polarization angle α = 0 and two piezoelectric materials 14 having a polarization angle α = π / 2. Is.

FIGS. 17 to 20 are views each showing an application example of the above-mentioned split slip oscillator, here the oscillator shown in FIG. 13, and excellent performance can be obtained by any of these vibration gyros. Can bring

Incidentally, in the above description, the basic shape of the piezoelectric material 14 is a rectangular parallelepiped shape for the sake of simplicity of explanation, but other shapes can achieve the intended effect of the present invention. Of course. Further, even if lead titanate, barium titanate or the like is used as the piezoelectric material, the same effect can be obtained.

〔The invention's effect〕

Thus, according to the present invention, the detection sensitivity can be greatly improved, the vibration gyro can be sufficiently miniaturized and the productivity thereof can be improved, and further, the quality can be stabilized and the accuracy can be improved. And can bring.

[Brief description of drawings]

FIGS. 1 to 3 are perspective views illustrating a slide oscillator according to the present invention, FIGS. 4 to 7 and FIGS. 9 and 10 are perspective views illustrating a vibration gyro of the present invention, and FIG. , A diagram illustrating a detection circuit, FIG. 11 is a perspective view illustrating another sliding oscillator, FIG. 12 is a perspective view illustrating another detection circuit of Coriolis force, and FIG. 14 is a perspective view illustrating another detection circuit, FIG. 16 is a perspective view illustrating an example of division of the piezoelectric material, and FIGS. Each is a perspective view illustrating a vibrating gyroscope using a split type sliding oscillator, FIG. 21 is a perspective view illustrating a conventional technique, FIG. 22 is a perspective view illustrating a conventional connecting member, and FIG. FIG. 31 is a diagram for explaining the operation of the present invention. 1 ... Slip vibrator, 2 ... base, 3 ... fixing means, 5
...... Resonator, 14 ...... Piezoelectric material, 15a to 15g, 16a to 16g ......
Electrodes, 17b to 17d ... missing edges.

Claims (4)

[Claims] 1. A vibrator, wherein one end of the vibrator is fixed to a surface of a fixing means orthogonal to the Y axis in a three-dimensional coordinate system, and the vibrator is vibrated in the Y axis direction. In a vibrating gyroscope that detects the Coriolis force generated in the X-axis direction by the rotational movement of the fixing means around the Z-axis, the piezoelectric material is polarized in a direction orthogonal to the Y-axis, and
A sliding oscillator formed by forming electrodes on each surface of the piezoelectric material orthogonal to the Y axis is provided as at least a part of the fixing means, and at least one electrode of the sliding oscillator is provided with a torsion moment. In order to prevent the electric displacement due to the electric field from being canceled out, a part of it is omitted, and the Coriolis force is detected based on the differential output between the electrodes formed on both surfaces of the piezoelectric material. Vibration gyro to be. 2. One end of the vibrator is fixed to a plane of a fixing means orthogonal to the Y-axis in a three-dimensional coordinate system, and the vibrator is vibrated in the Y-axis direction. In a vibrating gyroscope that detects the Coriolis force generated in the X-axis direction by the rotational movement of the fixing means around the Z-axis, the piezoelectric material is polarized in a direction orthogonal to the Y-axis, and
A sliding oscillator formed by forming electrodes on each surface of the piezoelectric material orthogonal to the Y axis is provided as at least a part of the fixing means, and at least one electrode of the sliding oscillator is polarized in the polarization direction. A vibrating gyroscope which is configured to detect the Coriolis force based on a differential output between electrodes formed on both surfaces of the piezoelectric material by dividing the surface except a surface orthogonal to the surface. 3. One end of a vibrator is fixed to a plane of a fixing means orthogonal to the Y-axis in a three-dimensional coordinate system, and the vibrator is vibrated in the Y-axis direction. In a vibrating gyroscope that detects the Coriolis force generated in the X-axis direction by the rotational movement of the fixing means around the Z-axis, the piezoelectric material is polarized in a direction orthogonal to the Y-axis, and
A sliding oscillator formed by forming electrodes on each surface of the piezoelectric material orthogonal to the Y axis is provided as at least a part of the fixing means, and the sliding oscillator is arranged on a surface orthogonal to the polarization direction. A vibrating gyro, which is configured to detect the Coriolis force based on a differential output between the electrodes formed on each of the divided bodies by dividing the divided surface. 4. A vibrating gyroscope according to claim 1, wherein two of said vibrators are attached to a fixing means in a tuning fork shape.