JPH0750161B2 - Magnetic sensor - Google Patents
Magnetic sensorInfo
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- JPH0750161B2 JPH0750161B2 JP62175540A JP17554087A JPH0750161B2 JP H0750161 B2 JPH0750161 B2 JP H0750161B2 JP 62175540 A JP62175540 A JP 62175540A JP 17554087 A JP17554087 A JP 17554087A JP H0750161 B2 JPH0750161 B2 JP H0750161B2
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- magnetic field
- magnetic
- detection unit
- detection
- magnetic sensor
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- Measuring Magnetic Variables (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁気センサに関する。The present invention relates to a magnetic sensor.
一般に、ブラシレスモータ、アクチュエータ等の回転部
の回転速度及び回転位置等を検出するセンサとしては、
ホール素子等の半導体磁電変換素子を使用した磁気セン
サを使用する場合があり、この場合、第８図に示す様
に、磁気センサｈは扁平の正方形状の基板ａに、略十字
状のホール素子のペレットｂが付設されてなり、該基板
ａの４辺から連設されるリード線ｃに、該ペレットｂが
連結線ｄを介して連結されている。そして、この磁気セ
ンサｈは、ペレットｂに磁界が直交状に入射したときに
感度が最良となるものである。Generally, as a sensor for detecting the rotation speed and the rotation position of a rotating portion such as a brushless motor and an actuator,
A magnetic sensor using a semiconductor magneto-electric conversion element such as a Hall element may be used. In this case, as shown in FIG. 8, the magnetic sensor h is a flat square substrate a and a substantially cross-shaped Hall element. The pellet b is additionally provided, and the pellet b is connected to the lead wire c that is continuously provided from the four sides of the substrate a through the connection line d. The magnetic sensor h has the best sensitivity when the magnetic field is orthogonally incident on the pellet b.
しかして、この磁気センサｈは、第９図に示す様に、外
周面ｅに、Ｎ極・Ｓ極が多数着磁されてなるマグネット
部ｆを形成した回転体ｇの該マグネット部ｆの近傍に配
設され、該マグネット部ｆの磁界を検出するものであ
る。しかし、この場合、第９図の実線で示す様に、該マ
グネット部ｆとセンサｈのペレットｂとが平行に相対面
していれば、磁界はペレットｂに直角に入射しその磁界
の検出感度は最良となっているが、仮想線の如く、回転
体ｇ又はこのセンサｈが傾き、マグネット部ｆとペレッ
トｂとが平行でなくなった場合、その磁界の検出感度は
不良となり、回転速度又は回転位置等の正確な検出が不
能となる。As shown in FIG. 9, this magnetic sensor h has a magnet portion f formed by magnetizing a large number of N poles and S poles on the outer peripheral surface e in the vicinity of the magnet portion f of the rotating body g. And detects the magnetic field of the magnet portion f. However, in this case, as shown by the solid line in FIG. 9, if the magnet part f and the pellet b of the sensor h face each other in parallel, the magnetic field enters the pellet b at a right angle and the detection sensitivity of the magnetic field is high. However, when the rotor g or this sensor h is tilted and the magnet part f and the pellet b are no longer parallel to each other as shown by the phantom line, the detection sensitivity of the magnetic field becomes poor, and the rotation speed or rotation It becomes impossible to detect the position accurately.
ところで、２個のホール素子を二次元的に配置した磁気
センサとしては、実開昭56−138381号に記載の磁気検出
装置があるが、この場合、２個のホール素子を90度に配
置し、樹脂によりモールドするものであって、２個のホ
ール素子の位置関係を固定しようとするものである。By the way, as a magnetic sensor in which two Hall elements are two-dimensionally arranged, there is a magnetic detection device described in Japanese Utility Model Publication No. 56-138381. In this case, two Hall elements are arranged at 90 degrees. The resin is molded by resin, and the positional relationship between the two Hall elements is fixed.
しかしながら、２個のホール素子の位置関係が高精度に
固定されたとしても、この磁気検出装置と被検出対象と
の位置関係がくずれた場合、該被検出対象の回転速度等
を感度よく測定することができない。However, even if the positional relationship between the two Hall elements is fixed with high accuracy, if the positional relationship between the magnetic detection device and the object to be detected is broken, the rotational speed and the like of the object to be detected can be measured with high sensitivity. I can't.
そこで、本発明では、従来のこのような問題点を解決し
て、回転体と平行状態がくずれた場合も、常に、正確に
回転体の回転速度又は回転位置等を検出することができ
る磁気センサを提供することを目的とする。Therefore, in the present invention, such a conventional problem is solved and a magnetic sensor capable of always accurately detecting the rotational speed or the rotational position of the rotating body even when the parallel state with the rotating body collapses. The purpose is to provide.
本発明に係る磁気センサは、相互に直交する３平面のう
ちの３平面又は２平面上に、半導体磁電変換素子のペレ
ットの一枚又は複数枚が積層されてなる磁界検出部を設
けると共に、各磁界検出部に入射した磁界の検出値を合
成して一の磁界検出部に磁界が直角に入射しないときに
直角に入射したときと略同一の感度となるように、該磁
界検出部のうちの一つを被検出対象の磁極面に対し略平
行に対向させて近接配置したものである。A magnetic sensor according to the present invention is provided with a magnetic field detection unit in which one or more pellets of a semiconductor magnetoelectric conversion element are stacked on three or two planes out of three planes orthogonal to each other, and Of the magnetic field detection units, the detection values of the magnetic fields incident on the magnetic field detection unit are combined so that the sensitivity becomes substantially the same as when the magnetic field does not enter the one magnetic field detection unit at a right angle. One of them is arranged in close proximity to the magnetic pole surface of the object to be detected so as to face it substantially in parallel.
上述の如く構成すれば、磁界検出部は相互に直交する３
平面のうちの３平面又は２平面上に設けられ、かつ、磁
界検出部のうちの一つが被検出対象の磁極面に対し略平
行に対面するように配置されているので、磁極面に対面
している一の磁界検出部に磁界が直角に入射しないとき
には、各磁界検出部に入射した磁界を、合成して、感度
を高めることができる。また、複数枚のペレットが積層
されてなる磁界検出部の場合、その検出部は高出力とな
る。If configured as described above, the magnetic field detection units are orthogonal to each other.
Since it is provided on three or two planes of the planes and one of the magnetic field detectors is arranged so as to face the magnetic pole surface of the detection target substantially in parallel, it faces the magnetic pole surface. When the magnetic field does not enter the one magnetic field detection unit at a right angle, the magnetic fields incident on the respective magnetic field detection units can be combined to enhance the sensitivity. Further, in the case of a magnetic field detection unit formed by stacking a plurality of pellets, the detection unit has high output.
以下、実施例を示す図面に基づいて本発明を詳説する。 Hereinafter, the present invention will be described in detail with reference to the drawings illustrating examples.
第１図は本発明に係る磁気センサ１を示し、この磁気セ
ンサ１は、半導体磁電変換素子（例えばホール素子等）
のペレット２からなる磁界検出部３を、相互に直交する
３平面上に設けられてなる。即ち、立方体状の基板４の
底面12と２つの側面13,14とに、十字状とされた一枚の
ペレット２が付設され、図例の如く、x,y軸で形成され
る第１平面15と、y,z軸で形成される第２平面16と、z,x
軸で形成される第３平面17と、に夫々磁界検出部３が形
成される。FIG. 1 shows a magnetic sensor 1 according to the present invention. The magnetic sensor 1 is a semiconductor magnetoelectric conversion element (for example, a Hall element).
The magnetic field detection unit 3 including the pellets 2 is provided on three planes orthogonal to each other. That is, one cross-shaped pellet 2 is attached to the bottom surface 12 and the two side surfaces 13 and 14 of the cubic substrate 4, and the first plane formed by the x and y axes as shown in the figure. 15, the second plane 16 formed by the y and z axes, and z and x
The magnetic field detector 3 is formed on each of the third planes 17 formed by the axes.
また、この基板４には、各検出部３が対応するリード線
（図示省略）が接続され、各検出部３の端部５…が該リ
ード線に接続されている。Lead wires (not shown) corresponding to the respective detection units 3 are connected to the substrate 4, and the end portions 5 ... Of the respective detection units 3 are connected to the lead wires.
しかして、この磁気センサ１は、第２図に示す様に、外
周面７に検出用マグネット部８を備えた回転体６の軸心
ｏ廻りの回転速度及び回転位置等を検出するために使用
され、該マグネット部８の近傍に配置される。即ち、こ
の回転体６は、図例では、ブラシレスモータ等のロータ
を示し、また、このロータは、第３図に示す様に、円環
状のロータマグネット９と、該ロータマグネット９を保
持するロータホルダ10と、を備え、該ロータホルダ10の
外周垂下片部11に、Ｎ極・Ｓ極が交互に円周等ピッチに
着磁されたマグネットを取付け、上記検出用マグネット
部８を形成している。この場合、第２平面16上に配設さ
れた検出部３が、被検出対象の磁極面に対し略平行に対
面している。即ち、被検出対象が回転体６であり、磁極
面が検出用マグネット部８外面である。As shown in FIG. 2, the magnetic sensor 1 is used to detect the rotational speed and the rotational position around the axis o of the rotating body 6 having the detecting magnet portion 8 on the outer peripheral surface 7. And is arranged in the vicinity of the magnet portion 8. That is, in the illustrated example, the rotating body 6 represents a rotor such as a brushless motor, and the rotor includes an annular rotor magnet 9 and a rotor holder for holding the rotor magnet 9, as shown in FIG. 10 and 10, magnets magnetized with N poles and S poles alternately arranged at equal pitches on the circumference are attached to the outer peripheral hanging piece portion 11 of the rotor holder 10 to form the detection magnet portion 8. In this case, the detection unit 3 arranged on the second plane 16 faces the magnetic pole surface of the detection target substantially in parallel. That is, the object to be detected is the rotating body 6, and the magnetic pole surface is the outer surface of the detection magnet portion 8.
従って、磁界検出部３は第４図Ｉに配設されることにな
り、第４図IIに示す様に、第１平面15と直交する方向
（つまり、ｚ軸方向）の磁界B1と、第２平面16と直交す
る方向（つまり、ｘ軸方向）の磁界B2と、第３平面17と
直交する方向（つまり、ｙ軸方向）の磁界B3と、を最良
の感度としている。Therefore, the magnetic field detector 3 is arranged in FIG. 4I, and as shown in FIG. 4II, the magnetic field B 1 in the direction orthogonal to the first plane 15 (that is, the z-axis direction), direction perpendicular to the second plane 16 (i.e., x-axis direction) and the magnetic field B 2 in the direction perpendicular to the third plane 17 (i.e., y-axis direction) as the best sensitivity and the magnetic field B 3, a.
しかして、上述の如く構成されれば、回転体６及び／又
は磁気センサ１が傾いて、マグネット部８と、マグネッ
ト部８に平行状態にて対面していた検出部３と、の平行
状態がくずれた場合、一つの検出部３（つまり、第２平
面16上の検出部３）に、磁界が直角に入射していたの
が、直角に入射しなくなり、その検出部３の感度が悪く
なる。しかし、上述の平行状態がくずれたことにより、
他の一つ又は二つの検出部３に磁界が入射することにな
るので、磁界が入射する二つ又は三つの検出部３の検出
値を合成すれば、上述の平行状態と同様な感度を得るこ
とができる。Therefore, if configured as described above, the rotating body 6 and / or the magnetic sensor 1 are tilted, and the parallel state of the magnet portion 8 and the detection portion 3 facing the magnet portion 8 in a parallel state. In the case of collapse, the magnetic field was incident on one detection unit 3 (that is, the detection unit 3 on the second plane 16) at a right angle, but the magnetic field is no longer incident at a right angle, and the sensitivity of the detection unit 3 deteriorates. . However, due to the collapse of the above parallel state,
Since the magnetic field is incident on the other one or two detection units 3, if the detection values of the two or three detection units 3 on which the magnetic field is incident are combined, the same sensitivity as in the parallel state described above is obtained. be able to.
第５図〜第７図は、検出部３が、相互に直交する３平面
のうちの２平面上に設けられた場合を示し、第５図Ｉに
示す場合は、検出部３が第１・第２平面15,16上に配設
され、第５図IIに示す様に第１平面15に直交する方向の
磁界B1と、第２平面16に直交する方向の磁界B2と、を最
良の感度としている。また、第６図Ｉに示す場合は、検
出部３が第１・第３平面15,17上に配設され、第６図II
に示す様に、第１平面15に直交する方向の磁界B1と、第
３平面17に直交する方向の磁界B3と、を最良の感度とし
ている。さらに、第７図Ｉの場合は、検出部３が第２・
第３平面16,17上に配設され、第７図IIに示す様に、第
２平面16に直交する方向の磁界B2と、第３平面17に直交
する方向の磁界B3と、を最良の感度としている。5 to 7 show the case where the detection unit 3 is provided on two planes out of three planes orthogonal to each other. In the case shown in FIG. 5I, the detection unit 3 is the first. It is best to arrange the magnetic field B 1 in the direction orthogonal to the first plane 15 and the magnetic field B 2 in the direction orthogonal to the second plane 16 on the second planes 15 and 16 as shown in FIG. And the sensitivity of. Further, in the case shown in FIG. 6I, the detection unit 3 is arranged on the first and third planes 15 and 17, and is shown in FIG.
As shown in, the magnetic field B 1 in the direction orthogonal to the first plane 15 and the magnetic field B 3 in the direction orthogonal to the third plane 17 are the best sensitivity. Further, in the case of FIG. 7I, the detection unit 3 is
As shown in FIG. 7 II, the magnetic field B 2 in the direction orthogonal to the second plane 16 and the magnetic field B 3 in the direction orthogonal to the third plane 17 are disposed on the third planes 16 and 17. It has the best sensitivity.
従って、第５図〜第７図に示すように検出部３が配設さ
れた磁気センサ１を、第２図に示す如き回転体６の回転
速度及び回転位置の検出に使用した場合において、回転
体６又はこのセンサ１が傾き、回転体６のマグネット部
８と、該マグネット部８に平行であった検出部３と、が
平行でなくなったときも、上述の第１図に示す磁気セン
サの場合と同様、他の検出部３の検出値の合成にて良好
の感度を得ることができる。Therefore, when the magnetic sensor 1 provided with the detection unit 3 as shown in FIGS. 5 to 7 is used to detect the rotation speed and the rotation position of the rotating body 6 as shown in FIG. Even when the body 6 or the sensor 1 tilts and the magnet portion 8 of the rotating body 6 and the detection portion 3 that is parallel to the magnet portion 8 are no longer parallel to each other, the magnetic sensor of the magnetic sensor shown in FIG. Similar to the case, good sensitivity can be obtained by combining the detection values of the other detection units 3.
しかして、上述の実施例では、磁界検出部３は夫々ペレ
ット２が一枚からなるが、ペレット２を複数枚積層して
形成するも好ましく、複数枚を積層すれば、この検出部
３は高出力となり、より正確に回転体６の回転速度等を
検出することができる。In the above-described embodiment, the magnetic field detection unit 3 is composed of one pellet 2 each, but it is also preferable to form a plurality of pellets 2 in a stacked manner. It becomes an output, and the rotation speed of the rotating body 6 and the like can be detected more accurately.
また、この磁気センサ１の使用用途としては、外周面７
に検出用マグネット部８を有する回転体６に限らないの
は勿論であり、例えば、マグネット部８が外周面７寄り
の上面又は下面に設けられた回転体６の検出用であって
もよい。この場合、勿論、センサ１は、該マグネット部
８に対応して、該回転体６の上面又は下面側に設けられ
る。さらに、実施例では、ロータマグネット９とは別に
検出用マグネット部８を設けているが、該検出用マグネ
ット部８を別途設けずに、ロータマグネット９の着磁部
をもって検出用マグネットとするも好ましい。The magnetic sensor 1 is used as an outer peripheral surface 7
It is needless to say that the present invention is not limited to the rotating body 6 having the detecting magnet portion 8, and for example, the magnet portion 8 may be for detecting the rotating body 6 provided on the upper surface or the lower surface near the outer peripheral surface 7. In this case, of course, the sensor 1 is provided on the upper surface or the lower surface side of the rotating body 6 corresponding to the magnet portion 8. Further, in the embodiment, the detection magnet portion 8 is provided separately from the rotor magnet 9, but it is also preferable to use the magnetized portion of the rotor magnet 9 as the detection magnet without separately providing the detection magnet portion 8. .
また、この磁気センサ１を、ガウスメータに使用して、
二次元又は三次元の磁束密度の測定用とするも好まし
く、さらには、磁界分布の分析器として使用するも好ま
しい。Also, by using this magnetic sensor 1 in a Gauss meter,
It is also preferably used for measuring a two-dimensional or three-dimensional magnetic flux density, and more preferably used as an analyzer for magnetic field distribution.
なお、この磁気センサ１を、増幅器等と同一のパッケー
ジ内に封入してワンチップIC化するも好ましい。It is also preferable that the magnetic sensor 1 is enclosed in the same package as the amplifier and the like to form a one-chip IC.
本発明は上述の如く構成されているので、次に記載する
効果を奏する。Since the present invention is configured as described above, it has the following effects.
被検出対象の磁極面に対し略平行に近接配置された磁界
検出部３に、磁界が直角に入射しない場合、つまり、被
検出対象である回転体６とこの磁気センサとの平行状態
がくずれた場合、他の一つ又は二つの磁界検出部３にも
磁界が入射し、これにより、各磁界検出部３の検出値を
合成して、被検出対象の回転速度及び回転位置を測定す
ることができる。従って、被検出対象と磁気センサとの
平行状態がくずれた場合にも、被検出対象の回転速度等
を確実に測定することができる。勿論、平行状態がくず
れていない場合、磁極面に対して略平行に近接配置され
た磁界検出部３に磁界が直角に入射し、この検出部３に
よって被検出対象の回転速度等を確実に（感度よく）測
定することができる。When the magnetic field does not enter at a right angle to the magnetic field detection unit 3 which is disposed in parallel with and substantially parallel to the magnetic pole surface of the object to be detected, that is, the parallel state between the rotating body 6 to be detected and this magnetic sensor is broken. In this case, the magnetic field is also incident on the other one or two magnetic field detection units 3, whereby the detection values of the magnetic field detection units 3 can be combined to measure the rotation speed and the rotation position of the detection target. it can. Therefore, even when the parallel state between the object to be detected and the magnetic sensor collapses, it is possible to reliably measure the rotation speed and the like of the object to be detected. Of course, when the parallel state is not broken, the magnetic field is incident at a right angle on the magnetic field detection unit 3 which is disposed close to and substantially parallel to the magnetic pole surface, and the detection unit 3 ensures the rotation speed and the like of the detection target ( It can be measured with high sensitivity.
また、磁界検出部３が複数枚のペレットを積層してなる
ものでは、各検出部３の出力は高出力となり、より正確
に被検出対象の回転速度等を検出することができる。When the magnetic field detection unit 3 is formed by stacking a plurality of pellets, the output of each detection unit 3 is high, and the rotation speed of the detection target can be detected more accurately.
さらに、この磁気センサを、被検出対象に対して高精度
に組付ける必要がないので、その組付け作業が容易であ
る。Further, since it is not necessary to assemble this magnetic sensor with high accuracy to the object to be detected, the assembling work is easy.
第１図は本発明の一実施例を示す拡大斜視図、第２図は
使用状態を示す簡略斜視図、第３図は第２図の要部拡大
断面図、第４図Ｉは磁界検出部の配置状態を示す簡略斜
視図、第４図IIはその磁界の方向を示す説明図、第５図
Ｉは磁界検出部の他の配置状態を示す簡略斜視図、第５
図IIはその磁界の方向を示す説明図、第６図Ｉは磁界検
出部の別の配置状態を示す簡略斜視図、第６図IIはその
磁界の方向を示す説明図、第７図Ｉは磁界検出部のさら
に別の配置状態を示す簡略斜視図、第７図IIはその磁界
の方向を示す説明図である。第８図は従来例を示す拡大
斜視図、第９図はその使用状態を示す簡略斜視図であ
る。 ２……ペレット、３……磁界検出部。FIG. 1 is an enlarged perspective view showing an embodiment of the present invention, FIG. 2 is a simplified perspective view showing a usage state, FIG. 3 is an enlarged sectional view of an essential part of FIG. 2, and FIG. 4 is a schematic perspective view showing the arrangement state of the magnetic field, FIG. 4 is an explanatory view showing the direction of the magnetic field, FIG. 5I is a schematic perspective view showing another arrangement state of the magnetic field detection unit, and FIG.
FIG. II is an explanatory view showing the direction of the magnetic field, FIG. 6I is a simplified perspective view showing another arrangement state of the magnetic field detection unit, FIG. 6II is an explanatory view showing the direction of the magnetic field, and FIG. FIG. 7 is a schematic perspective view showing still another arrangement state of the magnetic field detecting portion, and FIG. 7 is an explanatory view showing the direction of the magnetic field. FIG. 8 is an enlarged perspective view showing a conventional example, and FIG. 9 is a simplified perspective view showing its usage state. 2 ... Pellet, 3 ... Magnetic field detector.
Claims (1)
２平面上に、半導体磁電変換素子のペレット２の一枚又
は複数枚が積層されてなる磁界検出部３…を設けると共
に、各磁界検出部３…に入射した磁界の検出値を合成し
て一の磁界検出部３に磁界が直角に入射しないときに直
角に入射したときと略同一の感度となるように、該磁界
検出部３…のうちの一つを被検出対象の磁極面に対し略
平行に対向させて近接配置したことを特徴とする磁気セ
ンサ。1. A magnetic field detection section 3 in which one or a plurality of pellets 2 of a semiconductor magnetoelectric conversion element are laminated is provided on three or two planes out of three planes orthogonal to each other, and each of them is provided. The detection values of the magnetic fields incident on the magnetic field detection unit 3 are combined so that the magnetic field detection unit 3 has substantially the same sensitivity as the magnetic field detection unit 3 when the magnetic field does not enter at right angles. A magnetic sensor characterized in that one of the three magnetic pole faces 3 ...
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62175540A JPH0750161B2 (en) | 1987-07-13 | 1987-07-13 | Magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62175540A JPH0750161B2 (en) | 1987-07-13 | 1987-07-13 | Magnetic sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418079A JPS6418079A (en) | 1989-01-20 |
| JPH0750161B2 true JPH0750161B2 (en) | 1995-05-31 |
Family
ID=15997863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62175540A Expired - Fee Related JPH0750161B2 (en) | 1987-07-13 | 1987-07-13 | Magnetic sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750161B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4543297B2 (en) * | 2000-12-14 | 2010-09-15 | 株式会社安川電機 | Magnetic encoder |
| JP4723804B2 (en) * | 2003-10-17 | 2011-07-13 | 旭化成エレクトロニクス株式会社 | Magnetoelectric converter |
| FR2899967B1 (en) * | 2006-04-12 | 2008-06-20 | Valeo Vision Sa | METHOD FOR DETERMINING THE ANGULAR POSITION OF A PROJECTOR USING MULTIPLE MEANS FOR MEASURING A MAGNETIC FIELD |
| JP2010286401A (en) * | 2009-06-12 | 2010-12-24 | Asahi Kasei Electronics Co Ltd | Position detector |
| CN107782908B (en) * | 2016-08-28 | 2020-01-24 | 南京理工大学 | Magnetic sensor-based high-rotation bomb rotation speed measurement device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50130480A (en) * | 1974-03-29 | 1975-10-15 | ||
| JPS5779780U (en) * | 1980-10-30 | 1982-05-17 |
-
1987
- 1987-07-13 JP JP62175540A patent/JPH0750161B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6418079A (en) | 1989-01-20 |
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