JPH0754154B2 - Automatic control equipment - Google Patents
Automatic control equipmentInfo
- Publication number
- JPH0754154B2 JPH0754154B2 JP5054524A JP5452493A JPH0754154B2 JP H0754154 B2 JPH0754154 B2 JP H0754154B2 JP 5054524 A JP5054524 A JP 5054524A JP 5452493 A JP5452493 A JP 5452493A JP H0754154 B2 JPH0754154 B2 JP H0754154B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- stopper
- spring
- seat
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 claims description 29
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 14
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 229910000669 Chrome steel Inorganic materials 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000005489 elastic deformation Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910018167 Al—Be Inorganic materials 0.000 description 1
- 229910018507 Al—Ni Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017773 Cu-Zn-Al Inorganic materials 0.000 description 1
- 229910004337 Ti-Ni Inorganic materials 0.000 description 1
- 229910011209 Ti—Ni Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- KHYBPSFKEHXSLX-UHFFFAOYSA-N iminotitanium Chemical compound [Ti]=N KHYBPSFKEHXSLX-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
- Temperature-Responsive Valves (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は化学装置や機械装置等の
流体用管路に於いて使用する自動制御機器の改良に係
り、栓室の上方開口を密閉する断面形状が弧状の上方へ
膨出した金属薄板製のダイヤフラムを直接に栓座へ接当
させると共に、機器の駆動源に形状記憶合金製コイルバ
ネの出力を利用するようにした流体制御用の自動制御機
器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of automatic control equipment used in fluid pipelines such as chemical equipment and mechanical equipment. The present invention relates to an automatic control device for fluid control, in which an output diaphragm of a thin metal plate is directly brought into contact with a plug seat and an output of a shape memory alloy coil spring is used as a drive source of the device.
【０００２】[0002]
【従来の技術】一般に、従来の流体制御用の自動制御機
器に於いては、例えば図２に示す如くパルスモータ１等
を用いて栓棒２の回動を制御したり、或いは電磁作動器
や空気圧シリンダ（図示省略）を用いて栓棒２の昇降を
制御する構造が多く採用されている。尚、図２におい
て、３は筐体、４は栓座、５は栓体、６はダイヤフラ
ム、７は復帰用スプリングである。然し乍ら、前記パル
スモータや電磁作動器、空気圧シリンダ等により機器の
開閉を制御する構成の機器は、必然的にスピンドルの駆
動部が大形になると共にその構造も複雑になり、製造コ
ストの高騰や保守の繁雑さを招くと云う難点がある。2. Description of the Related Art Generally, in a conventional automatic control device for fluid control, for example, as shown in FIG. 2, a pulse motor 1 or the like is used to control the rotation of a stopper rod 2, or an electromagnetic actuator or A structure for controlling the lifting and lowering of the stopper rod 2 by using a pneumatic cylinder (not shown) is often adopted. In FIG. 2, 3 is a housing, 4 is a stopper seat, 5 is a stopper, 6 is a diaphragm, and 7 is a return spring. However, in a device configured to control the opening / closing of the device by the pulse motor, the electromagnetic actuator, the pneumatic cylinder, etc., the drive unit of the spindle inevitably becomes large and the structure thereof becomes complicated, and the manufacturing cost rises. There is a drawback that it causes maintenance complexity.
【０００３】また、図２の如き従来の自動制御機器にお
いては、ダイヤフラム６の下方の栓室内へ栓体５、復帰
用スプリング７等を配設しているため、必然的に栓室の
内容積が大きくなり、その結果筐体３が大きくなって機
器の小型化が困難となったり、栓室内に部材の移動によ
る摩擦粉塵を生ずることになる。Further, in the conventional automatic control device as shown in FIG. 2, since the stopper body 5, the return spring 7 and the like are arranged in the stopper chamber below the diaphragm 6, the internal volume of the stopper chamber is inevitable. Is increased, and as a result, the housing 3 is enlarged, which makes it difficult to downsize the device, and friction dust is generated in the stopper chamber due to the movement of the member.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、従前の流体
制御用自動制御機器における上述の如き問題、即ちスピ
ンドル駆動部の構造が複雑で大型化すると共に、栓室内
へ栓体や復帰用スプリングを配設するため、摩擦粉塵を
生じるのみならず栓筐も大形となり、機器の小型化及び
製造コストの引き下げが図れないという問題を基本的に
解決せんとするものであり、機器の大幅な小型化と製造
コストの引き下げ並びに粉塵汚損の防止を可能とした自
動制御機器を提供するものである。SUMMARY OF THE INVENTION The present invention has the above-mentioned problems in the conventional automatic control device for fluid control, that is, the structure of the spindle drive section is complicated and large, and the stopper body and the return spring are inserted into the stopper chamber. Since it disposes of, the problem is that not only friction dust is generated but also the plug housing becomes large, and it is not possible to downsize the device and reduce the manufacturing cost. The present invention provides an automatic control device capable of downsizing, reduction of manufacturing cost, and prevention of dust pollution.
【０００５】[0005]
【課題を解決するための手段】本発明は、流体入口９と
流体出口１０に連通する栓室２３の底面に栓座１３を設
けた筐体８と、栓座１３の上方に配設され、その外周端
縁を前記栓座１３とほぼ同じ水平高さ位置で栓室２３の
側壁へ挾持することにより栓室２３の上方開口を密封す
ると共に、弾性変形により中央部が下降して直接に栓座
１３へ接当する断面形状が弧状の上方へ膨出したステン
レス鋼製又は高クロム鋼製のダイヤフラム１５と、ダイ
ヤフラム１５の上方に配設され、栓座１３の内径よりも
大きな外径の押圧部を有するダイヤフラム押え１６と、
ダイヤフラム押え１６の上方に配設されてこれを下方へ
押圧する形状記憶合金製のスプリング１８と、該形状記
憶合金製のスプリング１８の温度を調整する温度制御器
２２とを発明の基本構成とするものである。According to the present invention, a housing 8 having a stopper seat 13 on the bottom surface of a stopper chamber 23 communicating with a fluid inlet 9 and a fluid outlet 10 is provided above the stopper seat 13. By holding the outer peripheral edge of the stopper chamber 13 to the side wall of the stopper chamber 23 at substantially the same horizontal height as the stopper seat 13, the upper opening of the stopper chamber 23 is sealed, and the central portion is lowered by elastic deformation to directly stop the stopper. A diaphragm 15 made of stainless steel or high chrome steel that has an arcuate cross-sectional shape that abuts on the seat 13 and a pressing member that is arranged above the diaphragm 15 and has an outer diameter larger than the inner diameter of the stopper seat 13. Diaphragm retainer 16 having a portion,
A spring 18 made of a shape memory alloy, which is arranged above the diaphragm retainer 16 and presses it downward, and a temperature controller 22 for adjusting the temperature of the spring 18 made of the shape memory alloy, are the basic constitutions of the invention. It is a thing.
【０００６】[0006]
【作用】ダイヤフラムの上方に配設した記憶合金製のス
プリングを加熱し、その温度をＭｓ変態温度近傍の温度
に上昇せしめると、該スプリングの出力が増大してダイ
ヤフラムを下方へ押圧し、ダイヤフラムが弾性変形して
その下面側が直接に栓座へ接当することにより、機器の
流体通路は閉鎖状態となる。また、前記スプリングの温
度を下降せしめると、スプリングの出力が減少し、下方
へ押圧されたダイヤフラムがダイヤフラム自体の有する
弾性力（若しくは当該弾性力と流体圧）によって上方へ
押し上げられ、機器は開放状態となる。その結果、流体
圧が無い場合でも、ダイヤフラムは確実に元の状態に復
元することができ、流体通路が開放される。更に、スプ
リングの温度を調整自在とすることにより、機器開度は
所望の値に制御される。When the memory alloy spring arranged above the diaphragm is heated and its temperature is raised to a temperature near the Ms transformation temperature, the output of the spring is increased and the diaphragm is pressed downward, and the diaphragm is moved. The fluid passage of the device is closed by elastically deforming and the lower surface side of the device directly contacts the plug seat. Further, when the temperature of the spring is lowered, the output of the spring is reduced, and the diaphragm pressed downward is pushed upward by the elastic force (or the elastic force and fluid pressure) of the diaphragm itself, and the device is in the open state. Becomes As a result, even when there is no fluid pressure, the diaphragm can be surely restored to its original state, and the fluid passage is opened. Further, by making the temperature of the spring adjustable, the device opening is controlled to a desired value.
【０００７】[0007]
【実施例】図１は、本発明の実施例に係る流体制御用の
自動制御機器の縦断面図であり、図に於いて、８はステ
ンレス鋼製の筐体、９は流体入口、１０は流体出口、１
１及び１２は流体通路、１３は栓座、１５はダイヤフラ
ム、１６はダイヤフラム押え、１８は形状記憶合金製ス
プリング、１９は袋ナット、２０はスプリング挿入筒、
２１は調整ねじ、２２は温度制御器、２３は栓室、２５
は合成ゴムである。1 is a longitudinal sectional view of an automatic control device for fluid control according to an embodiment of the present invention. In the figure, 8 is a stainless steel casing, 9 is a fluid inlet, and 10 is a fluid inlet. Fluid outlet, 1
1 and 12 are fluid passages, 13 is a cap seat, 15 is a diaphragm, 16 is a diaphragm retainer, 18 is a shape memory alloy spring, 19 is a cap nut, 20 is a spring insertion tube,
21 is an adjusting screw, 22 is a temperature controller, 23 is a stopper chamber, 25
Is a synthetic rubber.
【０００８】前記栓座１３は栓室２３の底面に形成した
取付孔に交換自在に螺着されており、金属若しくは合成
樹脂により形成されている。The plug seat 13 is replaceably screwed into a mounting hole formed in the bottom surface of the plug chamber 23 and is made of metal or synthetic resin.
【０００９】前記ダイヤフラム１５はステンレス鋼又は
インコネル等の高クロム鋼の薄板によって形成されてお
り、中央部が上方へ膨出した断面形状が弧状の所謂逆皿
形に形成されている。The diaphragm 15 is formed of a thin plate of stainless steel or high chrome steel such as Inconel, and has a so-called inverted dish shape in which the central portion bulges upward and the cross section is arcuate.
【００１０】当該ダイヤフラム１５は、その外周端部が
栓箱８の栓室２３を形成する側壁の段部と、スプリング
挿入筒２０の下端面の間で気密状に挾圧保持されてお
り、膨出部を上方にした姿勢で支持固定されている。ま
た、栓室２３の上方開口は、当該ダイヤフラム１５によ
って気密に密封されている。The diaphragm 15 has an outer peripheral end thereof held in a hermetically sealed condition between the step portion of the side wall forming the stopper chamber 23 of the stopper box 8 and the lower end surface of the spring insertion cylinder 20, and is expanded. It is supported and fixed in a posture with the projecting part facing upward. The upper opening of the stopper chamber 23 is hermetically sealed by the diaphragm 15.
【００１１】前記ダイヤフラム押え１６は記憶合金製ス
プリング１８の弾性力をダイヤフラム１５へ伝達するも
のであり、そのダイヤフラム１５と接触する押圧部の外
径は、栓座１３の内径よりも大きく設定されている。The diaphragm retainer 16 transmits the elastic force of the memory alloy spring 18 to the diaphragm 15, and the outer diameter of the pressing portion in contact with the diaphragm 15 is set to be larger than the inner diameter of the stopper seat 13. There is.
【００１２】前記形状記憶合金製スプリング１８は、Ｎ
ｉ５０％−Ｔｉ５０％の記憶合金（Ｍｓ変態温度約４０
℃）を使用して形成されており、３５℃〜４０℃に於い
て２０〜２５ｋｇの出力即ちダイヤフラム押え１６を下
方へ押圧する力を発生するように設定されている。スプ
リング１８の加熱は、温度制御器２２からの電流をスプ
リング１８へ流すことにより行われており、加熱用の電
流値を調整することにより、スプリング温度が制御され
ている。The shape memory alloy spring 18 is N
i50% -Ti50% memory alloy (Ms transformation temperature about 40%
C.) and is set so as to generate an output of 20 to 25 kg at 35.degree. C. to 40.degree. C., that is, a force for pressing the diaphragm retainer 16 downward. The spring 18 is heated by passing a current from the temperature controller 22 through the spring 18, and the spring temperature is controlled by adjusting the heating current value.
【００１３】尚、本実施例に於いては、スプリング１８
の材質としてＴｉ−Ｎｉ系の記憶合金線を利用している
が、Ｃｕ−Ｚｎ−Ａｌ系やＣｕ−Ａｌ−Ｂｅ系、Ｃｕ−
Ａｌ−Ｎｉ系の記憶合金でもよいことは勿論である。ま
た、本実施例に於いては、スプリング１８自体へ通電す
ることにより、これを加熱するようにしているが、適宜
のヒータをスプリング挿入筒２０内へ配設する構成とし
てもよい。更に、本実施例に於いては、加熱したスプリ
ング１８の冷却を自然冷却に依っているが、制御性を高
めるためにはスプリング１８の冷却装置を別に設ける方
が望ましい。The spring 18 is used in this embodiment.
Although a Ti-Ni-based memory alloy wire is used as the material of Cu-Zn-Al-based, Cu-Al-Be-based, Cu-
It goes without saying that an Al-Ni based memory alloy may also be used. In addition, in the present embodiment, the spring 18 itself is heated by energizing it, but an appropriate heater may be arranged in the spring insertion cylinder 20. Further, in the present embodiment, the heated spring 18 is cooled by natural cooling, but it is desirable to separately provide a cooling device for the spring 18 in order to enhance controllability.
【００１４】次に、本実施例に係る流体制御用の自動制
御機器の作動について説明する。先ず、機器を閉鎖する
場合には、スプリング１８へ温度制御器２２から適宜の
電流を通し、これを合金素材のＭｓ変態温度近傍の温度
（３５℃〜４０℃）に加熱する。これにより、予かじめ
調整ねじ２１によって適宜量の圧縮歪みを与えたスプリ
ング１８の出力（下方向への押圧力）が増加し、ダイヤ
フラム押え１６を介してダイヤフラム１５を押し下げ
る。これにより、逆皿形のダイヤフラム１５は弾性変形
をし、その中央部の下面側が栓座１３へ接当することに
より、流体通路が閉鎖される。Next, the operation of the automatic control device for fluid control according to this embodiment will be described. First, when closing the equipment, an appropriate electric current is passed from the temperature controller 22 to the spring 18, and this is heated to a temperature (35 ° C to 40 ° C) near the Ms transformation temperature of the alloy material. As a result, the output (downward pressing force) of the spring 18 to which an appropriate amount of compressive strain has been applied by the pre-squeeze adjusting screw 21 increases, and the diaphragm 15 is pushed down via the diaphragm retainer 16. As a result, the inverted dish-shaped diaphragm 15 is elastically deformed, and the lower surface side of the central portion thereof comes into contact with the plug seat 13, thereby closing the fluid passage.
【００１５】一方、閉止状態から開放状態とする場合に
は、スプリング１８への通電を遮断してその温度を下げ
る。これによりスプリング１８の出力が減少し、ダイヤ
フラム１５の弾性力（若しくはダイヤフラムの弾性力と
流体圧）により、中央部が下方へ押圧変形されたダイヤ
フラム１５が元の状態に復元し、流体通路が開放される
ことになる。On the other hand, when the closed state is changed to the open state, the current to the spring 18 is cut off to lower the temperature. As a result, the output of the spring 18 is reduced, and the elastic force of the diaphragm 15 (or the elastic force of the diaphragm and the fluid pressure) restores the diaphragm 15 whose central portion is pressed and deformed downward, and the fluid passage is opened. Will be done.
【００１６】尚、スプリング１８の加熱温度を制御して
その出力を調整することにより、ダイヤフラム押え１６
を適宣の中間開度位置に保持することが出来る。The diaphragm retainer 16 is controlled by controlling the heating temperature of the spring 18 and adjusting its output.
Can be held at an appropriate intermediate opening position.
【００１７】[0017]
【発明の効果】本発明では、ダイヤフラム１５をステン
レス鋼又は高クロム鋼の薄板により、上方部へ膨出した
断面形状が弧状の逆皿形に形成し、当該ダイヤフラム１
５の下面側を栓座２３へ直接に押圧接当させることによ
り、流体通路を閉鎖する構成としている。その結果、従
前の流体制御機器のように、所謂栓体を栓室２３の内方
に設けることが不要となり、栓室２３の内容積を大幅に
減少させることが可能となる。According to the present invention, the diaphragm 15 is formed of a thin plate of stainless steel or high chrome steel into an inverted dish shape having an arcuate cross-sectional shape bulging upward, and the diaphragm 1
The fluid passage is closed by directly pressing and contacting the lower surface side of 5 with the stopper seat 23. As a result, it becomes unnecessary to provide a so-called plug body inside the plug chamber 23 as in the conventional fluid control device, and the internal volume of the plug chamber 23 can be greatly reduced.
【００１８】また、本発明では、栓座１３へ接当せしめ
るダイヤフラム１５の形状を前述の如く逆皿形としてい
るため、弾性変形をする前のダイヤフラムの下面側と栓
座１３との間隙が平板状のダイヤフラムの場合よりも大
きくすることができる。その結果、流体通路の全開時に
於ける栓座１３部分に於ける流路抵抗を少なくすること
ができ、従前の平板状の銅やアルミニウム等の薄板を栓
座側へ押し付ける構成の制御機器に比較して、流体抵抗
が大幅に減少する。Further, in the present invention, since the shape of the diaphragm 15 which is brought into contact with the stopper seat 13 is the inverted dish shape as described above, the gap between the lower surface side of the diaphragm and the stopper seat 13 before being elastically deformed is a flat plate. It can be larger than in the case of a diaphragm. As a result, it is possible to reduce the flow path resistance at the stopper seat 13 when the fluid passage is fully opened, and to compare with the conventional control device having a structure in which a thin plate of copper or aluminum is pressed against the stopper seat side. Then, the fluid resistance is greatly reduced.
【００１９】更に、本発明では、ダイヤフラム１５の外
周縁の挾圧支持部と栓座１３の上端部との水平高さ位置
をほぼ同等とし、逆皿形のダイヤフラム１５をその弾性
変形の範囲内で押圧変形させる構成としている。その結
果、流路内の流体圧が極く低い場合でも、スプリング１
８の押圧力を解除することにより、ダイヤフラム１５は
その弾性力によって元の状態に復元することができ、流
体通路が確実に開路されることになる。Further, according to the present invention, the horizontal height positions of the confining support portion of the outer peripheral edge of the diaphragm 15 and the upper end portion of the plug seat 13 are substantially equal to each other, and the inverted dish-shaped diaphragm 15 is within its elastic deformation range. It is configured to be pressed and deformed by. As a result, even if the fluid pressure in the flow path is extremely low, the spring 1
By releasing the pressing force of 8, the diaphragm 15 can be restored to its original state by its elastic force, and the fluid passage is surely opened.
【００２０】加えて、本発明では、機器の開閉機能を掌
るダイヤフラムの駆動源として記憶合金製のスプリング
を使用し、該スプリングの温度を調整してスプリングの
出力を制御することにより、機器の開閉並びに開度の制
御を行うようにしているため、機器の駆動部を著しく小
型に出来ると共に、機器自体の構造も簡単になり、製造
コストの大幅な引下げが可能となる。また、スプリング
の熱容量が比較的少ないため、機器の制御応答性も比較
的高く、極めて正確な開度制御が行なえる。In addition, according to the present invention, a spring made of a memory alloy is used as a driving source of a diaphragm that controls the opening / closing function of the device, and the temperature of the spring is adjusted to control the output of the spring. Since the opening / closing and the opening degree are controlled, the drive unit of the device can be remarkably downsized, the structure of the device itself can be simplified, and the manufacturing cost can be significantly reduced. Further, since the heat capacity of the spring is relatively small, the control response of the device is relatively high, and extremely accurate opening control can be performed.
【００２１】本発明は上述の通り、流体制御用の自動制
御機器の大幅な小型化が図れると共に流路抵抗が少な
く、しかも無圧状態でも確実に流体通路を開放すること
ができると云う優れた実用的効用を奏するものである。As described above, the present invention is excellent in that the automatic control device for fluid control can be drastically downsized, the flow passage resistance is small, and the fluid passage can be surely opened even under no pressure. It has a practical utility.
【図１】本発明に係る自動制御機器の縦断面図である。FIG. 1 is a vertical sectional view of an automatic control device according to the present invention.
【図２】従前の自動制御機器の縦断面図である。FIG. 2 is a vertical sectional view of a conventional automatic control device.
８は栓箱、１３は栓座、１５はダイヤフラム、１６はダ
イヤフラム押え、１８は形状記憶合金製スプリング、１
９は袋ナット、２０はスプリング支持筒、２１は調整ね
じ、２２は温度制御器、２３は栓室。8 is a stopper box, 13 is a stopper seat, 15 is a diaphragm, 16 is a diaphragm retainer, 18 is a shape memory alloy spring, 1
9 is a cap nut, 20 is a spring support cylinder, 21 is an adjusting screw, 22 is a temperature controller, and 23 is a stopper chamber.
Claims (1)
通する栓室（２３）の底面に栓座（１３）を設けた筐体
（８）と、栓座（１３）の上方にこれと対向状に配設さ
れ、その外周端縁を前記栓室（２３）の側壁へ挾持する
ことにより栓室（２３）の上方開口を密封すると共に、
弾性変形によりその中央部が下降して直接に栓座（１
３）へ接当する断面形状が弧状の上方へ膨出したステン
レス鋼製又は高クロム鋼製のダイヤフラム（１５）と、
ダイヤフラム（１５）の上方に配設され、栓座（１３）
の内径よりも大きな外径の押圧部を有するダイヤフラム
押え（１６）と、ダイヤフラム押え（１６）の上方に配
設されてこれを下方へ押圧する形状記憶合金製のスプリ
ング（１８）と、該形状記憶合金製のスプリング（１
８）の温度を調整する温度制御器（２２）とから構成し
た自動制御器。1. A housing (8) having a stopper seat (13) on the bottom surface of a stopper chamber (23) communicating with a fluid inlet (9) and a fluid outlet (10), and above the stopper seat (13). The upper opening of the stopper chamber (23) is sealed by holding the outer peripheral edge of the stopper chamber (23) against the side wall of the stopper chamber (23).
Due to the elastic deformation, the central part of the plug descends and the plug seat (1
3) A diaphragm (15) made of stainless steel or high chrome steel having an arc-shaped cross-section that bulges upward,
It is arranged above the diaphragm (15) and has a plug seat (13).
A diaphragm retainer (16) having a pressing portion with an outer diameter larger than the inner diameter of the diaphragm, a spring (18) made of a shape memory alloy disposed above the diaphragm retainer (16) and pressing it downward, Memory alloy spring (1
An automatic controller comprising a temperature controller (22) for adjusting the temperature of 8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5054524A JPH0754154B2 (en) | 1993-03-16 | 1993-03-16 | Automatic control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5054524A JPH0754154B2 (en) | 1993-03-16 | 1993-03-16 | Automatic control equipment |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17382185A Division JPH0663580B2 (en) | 1985-08-07 | 1985-08-07 | Automatic control equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0617967A JPH0617967A (en) | 1994-01-25 |
| JPH0754154B2 true JPH0754154B2 (en) | 1995-06-07 |
Family
ID=12973053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5054524A Expired - Fee Related JPH0754154B2 (en) | 1993-03-16 | 1993-03-16 | Automatic control equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754154B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0617967B2 (en) * | 1985-12-26 | 1994-03-09 | キヤノン株式会社 | camera |
| KR20020081638A (en) * | 2001-04-20 | 2002-10-30 | 송정석 | Form power of recollection spring to use solenoid valae |
| WO2005046900A1 (en) * | 2003-11-14 | 2005-05-26 | Nihon University | Thin-plate shape memory alloy and method of manufacturing the same |
| JP4755483B2 (en) * | 2005-10-31 | 2011-08-24 | 日本ダイヤバルブ株式会社 | Diaphragm valve |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59153216A (en) * | 1983-02-22 | 1984-09-01 | Matsushita Electric Ind Co Ltd | gas proportional control valve |
| JPS60139981U (en) * | 1984-02-28 | 1985-09-17 | シャープ株式会社 | fluid flow path control valve |
| JPS63145064U (en) * | 1987-03-13 | 1988-09-26 | ||
| JPS6415576A (en) * | 1987-07-09 | 1989-01-19 | Hitachi Metals Ltd | Metallic diaphragm valve |
-
1993
- 1993-03-16 JP JP5054524A patent/JPH0754154B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617967A (en) | 1994-01-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |