JPH0754682B2 - Vacuum pump system status display for electron microscope - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a status display device used in a vacuum exhaust system of an electron microscope.

[0002]

2. Description of the Related Art As shown in FIG. 8, a conventional vacuum exhaust system state display device displays a vacuum exhaust system diagram including an exhaust chamber, an exhaust pump, a vacuum valve, etc. on a panel. In a device for providing a light emitting element at a portion corresponding to a vacuum valve and displaying the operation state of the vacuum valve by emitting light, the light emitting element is provided at a portion corresponding to an exhaust pipe connecting the exhaust chamber, the exhaust pump and the vacuum valve, The light emitting element corresponding to the exhaust pipe is configured to emit light in association with the opening / closing operation of the vacuum valve.

[0003]

The representative example described above informs the user of vacuum evacuation information such as which chamber to be evacuated and which vacuum pump is currently evacuating which chamber to be evacuated. It is very useful in terms of deterring dangerous operations and raising awareness of safe operation.

The inventor of the present invention has been more convenient for the user.
Based on the pressure measurement values of vacuum gauges installed in various parts of the vacuum exhaust system, it was considered to display the pressure distribution in the exhaust system using color pixels corresponding to the measured pressure values.

An object of the present invention is to provide a status display device including an exhaust system diagram of a vacuum exhaust system in an electron microscope including an exhaust chamber, a vacuum pump, a vacuum valve, a vacuum gauge, and piping connecting them. At this point, based on the pressure measurement value from the vacuum gauge, the portion of the exhaust system diagram corresponding to the exhausted chamber having the measurement value pressure is determined by using the color pixels preset according to the range of the measurement pressure value. It is an object of the present invention to provide a vacuum exhaust system status display device in an electron microscope provided with a display unit for dyeing and displaying a pressure.

Another object of the present invention is to provide an evacuation system for an electron microscope provided with a display section for displaying the evacuation process of the vacuum evacuation system, the cause of an abnormal situation occurring during the evacuation process, and a countermeasure method. To provide a status display device.

Still another object of the present invention is to provide a voice notifying section for notifying the cause of an abnormal situation occurring during the exhaust process of the vacuum exhaust system, the abnormal situation occurring in the middle of the exhaust process and a countermeasure method by voice using a language. An object is to provide a vacuum pumping system status display device for an electron microscope.

Still another object of the present invention is to provide an electronic microscope provided with a voice notifying unit which can limit the voice notifying to the cause of an abnormal situation during evacuation and a countermeasure for the countermeasure in the voice notifying unit. The purpose of the present invention is to provide a vacuum exhaust system status display device.

[0009]

According to the present invention, a state including an exhaust system diagram of a vacuum exhaust system in an electron microscope including an exhaust system, a vacuum pump, a vacuum valve, a vacuum gauge, and piping connecting them. In the display device, based on the pressure measurement value from the vacuum gauge, an exhaust system diagram corresponding to the exhausted substance having the measurement value pressure by using color pixels preset according to the range of the measurement pressure value There is provided an evacuation system status display device in an electron microscope, which is provided with a display section for dyeing a portion for displaying pressure.

Further, according to the present invention, the vacuum exhaust system in the electron microscope provided with a display section for displaying the exhaust process of the vacuum exhaust system, the cause of the abnormal situation occurring in the middle of the exhaust process and the countermeasure method. A status display device is provided.

Further, according to the present invention, the electron microscope provided with a voice notifying section for notifying the cause of the exhausting process of the vacuum exhausting system and the abnormal situation occurring in the middle of the exhausting process and the countermeasure method by voice using a language. There is provided a vacuum exhaust system status display device.

Further, according to the present invention, in the above-mentioned voice notifying unit, in the electron microscope provided with the voice notifying unit which can be limited to the voice notifying the cause of the abnormal situation during the vacuum evacuation and the countermeasure method by the selection. Another object is to provide a vacuum exhaust system status display device.

[0013]

According to the present invention, in the state display device including the exhaust system diagram of the vacuum exhaust system in the electron microscope including the system to be evacuated, the vacuum pump, the vacuum valve, the vacuum gauge and the pipes connecting them, Based on the pressure measurement value from the vacuum gauge, the portion of the exhaust system diagram corresponding to the exhausted chamber having the measurement value pressure is dyed by using the color pixel preset according to the range of the measurement pressure value. Pressure display can be performed.

Further, according to the present invention, it is possible to display on the display unit the cause of the abnormal situation which occurred during the exhaust process of the vacuum exhaust system and the above-mentioned process, and the countermeasure.

Further, according to the present invention, it is possible to inform the cause of the abnormal situation which occurred during the exhaust process of the vacuum exhaust system and the intermediate state and the countermeasure method by the voice using the language.

Further, according to the present invention, the voice notification can be limited to only the notification of the cause of the abnormal situation occurring during the vacuum evacuation process and the countermeasure method by selection.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below.
1 and 2 are views showing an example of a state display of an electron microscope vacuum exhaust system displayed according to the present invention, FIG. 3 is a configuration diagram of an embodiment of the device of the present invention, and FIG. It is a flow chart which shows a control procedure.

1 and 2, 1 is an electron gun unit, 2 is a mirror body, 3 is a sample chamber, 4 is an observation chamber, and 5 and 5a, 5b, 5
c is a rough reference pipe, and 6, 7, 8, and 9 are main piping. Further, 10 to 18 represent vacuum valves, the color of which changes depending on the operating state of the vacuum valve. 19-23
Is a leak valve, which, like the vacuum valve, changes its color depending on the operating state.

24 to 26 are ion pumps, 27 is a rough reference oil rotary pump, and 28 is an oil diffusion pump. 29
Denoted at 34 are color pixels used to stain the system diagram corresponding to pressure values, 29 is red, 34 is orange, 31 is yellow,
32 is green, 33 is blue, and 34 is light blue.

In FIG. 3, 35 is a vacuum exhaust system, 36 is a vacuum control circuit, 37 is a display control circuit, 38 is a display circuit,
Reference numeral 39 is a display unit, and 40 is an evacuation operation means. Reference numeral 41 is a voice generation control circuit, 42 is a voice generation circuit, 43 is a voice notification unit, and 44 is a voice notification selection means.

From the display of FIG. 1, the electron gun unit 1 has a ^pressure of 10 ⁻⁵ Pa.
Table, the mirror body 2 is 10 ^-6 Pa, the sample chamber 3 is also 10 ^-6 Pa,
It can be seen from the exhausting process display section 45 that the observation chamber 4 is still at a pressure of 10 ⁻³ Pa or higher and is currently being roughly pumped by the roughing oil rotary pump 27. Vacuum valves 10, 14, 15,
The user can also know from the display of FIG. 1 that 16 and 17 are open. The user can also know that the observation room 4 is in the rough-pulled state by the notification from the audio notification unit 43 that "the observation room is being roughly-pulled."

From the display of FIG. 2, the electron gun 1 is 10 ⁻⁴ Pa, the mirror body 2 and the sample chamber 3 are 10 ⁻⁵ Pa, and the observation chamber 4 is also 10 ⁻⁴ Pa.
However, since the water pressure of the cooling water in the vacuum exhaust system of the electron microscope has dropped, a safety action is performed, all vacuum valves are closed, and exhaust by the vacuum pump is interrupted.
9. The sentence "Cooling water pressure is low. Please check if there is no water source and water leak." Is displayed on the screen 9, or the voice notification unit 43 gives a voice notification of the same content.
As a result, the user can promptly and surely take measures such as checking the water source, searching for water leaks, or turning off the power of the vacuum pump with a manual switch of the vacuum evacuation operation means 40 for further safety. is there.

Further, by the changeover switch of the voice notification selecting means 44, the voice notification by the voice notification unit 43 can be limited to only the voice notification of the cause and the countermeasure when the abnormal situation occurs.

Next, these mechanisms will be described with reference to FIG. Evacuation is performed in the vacuum exhaust system 35, and the state is monitored and controlled by the vacuum control circuit 36. In a normal state, the information about the exhaust operation from the vacuum control circuit 36 is displayed on the display control circuit 37 and the sound generation control circuit 4.
1, and the display circuit 38 and the voice generation circuit 42 are received respectively.
The display unit 39 displays the exhaust state of the vacuum exhaust system via the, and the voice notification unit 43 performs voice notification.

If an abnormal situation occurs in the vacuum exhaust system 35 during the exhaust operation, the vacuum control circuit 36 performs a protective operation and a safe operation, and the exhaust operation is interrupted. At this time, the vacuum control circuit 36 sends information about the cause of this abnormal situation and the coping method for restarting the exhaust or for safety, to the display control circuit 37 and the sound generation control circuit 41, respectively. A message corresponding to the remedy is displayed in characters on the display unit 39 via the display circuit 38, and the voice generation circuit 42
A voice notification is given by the voice notification unit 43 via. Based on these messages, the user turns ON / OFF the corresponding switch of the vacuum operation means 40, or inspects the component equipment.
The abnormal situation can be dealt with by repair or the like, and safety can be secured or the exhaust operation can be restarted.

Further, by operating the changeover switch of the voice notification selection means 44, the voice notification by the voice notification unit 43 can be limited to only the voice notification of the cause and the countermeasure when an abnormal situation occurs.

FIG. 5 is a flow chart showing the procedure for dyeing the exhaust system diagram displayed on the CRT according to the measured pressure value, and FIG. 6 shows the exhaust process, the cause of the abnormal situation, and the countermeasures, respectively, on the CRT display and voice. FIG. 7 is a flowchart showing a processing procedure for making notification, and FIG. 7 is a flowchart for limiting the audio notification to the notification of the cause of the abnormality and the countermeasure when the abnormality occurs.

[0028]

According to the present invention, in an electron microscope vacuum exhaust system status display device, a color pixel corresponding to the actual pressure measurement value of a vacuum gauge is used to provide an exhaust chamber having that pressure. The corresponding part of the exhaust system part is dyed and displayed, and the transition of each exhaust process, the cause of the occurring abnormal situation and the countermeasure method are sequentially displayed in letters on the display part and also notified by voice. As a result, the overall pressure distribution of each part of the exhaust system and the state of the exhaust process and its transition can be grasped more visually and vividly, and even if an abnormal situation occurs, the cause and countermeasures are displayed in letters and the language is Since the notification is also given by the voice using, the user can calmly and swiftly and accurately perform the treatment without panic, and the function in terms of safety can be improved.

Further, according to the present invention, the voice notification can be limited to only the voice notification of the cause of the abnormal situation in the vacuum evacuation process and the countermeasure method according to the present invention. This has the effect of calming the emotional excitement of the user who feels redundant and annoying to the user.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of a state display of an electron microscope vacuum exhaust system according to the present invention.

FIG. 2 is a diagram showing an example of a state display of an electron microscope vacuum exhaust system according to the present invention.

FIG. 3 is a configuration diagram of an embodiment of the present invention.

FIG. 4 is a flowchart showing a processing / control procedure of an embodiment of the present invention.

FIG. 5 is a flowchart showing a procedure for dyeing an exhaust system diagram displayed on a CRT according to a measured pressure value.

FIG. 6 is a flowchart showing a processing procedure for performing CRT display and voice notification of an exhaust process, a cause of abnormality, and a countermeasure.

FIG. 7 is a flow chart for limiting the voice notification to the notification of the cause of the abnormality and the countermeasure when the abnormality occurs by selection.

FIG. 8 is a diagram showing an example of a conventional technique.

[Explanation of Codes] 1 ... Electron gun, 2 ... Mirror body, 3 ... Sample chamber, 4 ... Observation chamber,
5, 5a, 5b, 5c ... Coarse reference piping, 6-9 ... Main reference piping, 10-18 ... Vacuum valve, 19-23 ... Leak valve, 24
~ 26 ... Ion pump, 27 ... Crude oil pump, 2
8 ... Oil diffusion pump, 29 ... Red pixel, 30 ... Orange pixel,
31 ... Yellow pixel, 32 ... Green pixel, 33 ... Blue pixel, 3
4 ... Light blue pixel, 35 ... Vacuum exhaust system, 36 ... Vacuum control circuit, 37 ... Display control circuit, 38 ... Display circuit, 39 ... Display unit, 40 ... Vacuum exhaust operating means, 41 ... Voice generation control circuit, 42 ... Voice Generation circuit, 43 ... Voice notification section, 44 ... Voice notification selection means, 45 ... Exhaust chamber section, 46 ... Oil diffusion pump section, 47 ... Oil rotation pump section, 48-53 ... Exhaust pipe section,
54 to 56 ... Vacuum valve section

Claims (4)

[Claims] 1. A vacuum gauge in a status display device including an exhaust system diagram of a vacuum exhaust system in an electron microscope including an exhausted chamber, a vacuum pump, a vacuum valve, a vacuum gauge, and piping connecting them. Based on the measured pressure value from, the portion of the exhaust system diagram corresponding to the exhausted chamber having the measured value pressure is dyed using a color pixel preset according to the range of the measured pressure value to display the pressure. An evacuation system status display device for an electron microscope, which is provided with a display section for performing the operation. When middle abnormal situations wherein the exhaust process and exhaust process of the vacuum exhaust system occurs, and characterized in that a display unit for sequentially displaying the causes and countermeasures of the abnormal situation, further provided The vacuum exhaust system status display device in the electron microscope according to claim 1 . 3. A middle resulting cause of abnormality in the exhaust process and exhaust process of the vacuum exhaust system, and a voice notification unit for sequentially sound reporting using language countermeasure method further set <br/> The vacuum pumping system status display device for an electron microscope according to claim 1, wherein 4. The voice notifying unit according to claim 3, wherein the voice notifying unit is provided so that the voice notifying can be limited to the voice notifying the cause of the abnormal situation in the vacuum evacuation process and the countermeasure method by selection. Vacuum pumping system status display for electron microscope.