JPH0756322B2 - Rotation introduction machine - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a rotation / rotation mechanism that transmits a rotational force through an elastic seal member that shuts off two different atmospheres, and particularly applies the rotational force to a vacuum or special gas atmosphere. The present invention relates to an improvement of a rotary introduction machine suitable for transmission.

[Prior Art] In a loaded particle beam application device and a dry process device, a sample is observed and processed in a special atmosphere in which a vacuum or gas replacement is performed, and power is transmitted to a sealed special atmosphere. Rotational force is often used for.

As a rotational force introduction means, as a method of transmitting the rotational force through an elastic seal member that shuts off two different atmospheres,
A rotation introducing machine using a bellows having an excellent airtight sealing property has been put into practical use.

Similarly, as a method of transmitting a rotational force through an elastic seal member that shuts off two different atmospheres, there is a sealed rotation transmission mechanism that uses a harmonic hagrumma with an input / output 1: 1 ratio that provides high transmission capacity. (This is described in US Pat. No. 3,196,713).

[Problems to be Solved by the Invention] The rotary introduction machine using the bellows is excellent in airtight sealability and can be used particularly in an ultrahigh vacuum 10 _-7 Pa (10 _-9 Torr) region. Is. Furthermore, it is a rotary introduction machine that can perform vacuum heating and baking (200 ° C to 350 ° C) which is indispensable when starting up an ultra-high vacuum.

FIG. 6 is a sectional view of a rotation introducing machine using a bellows.
In the figure, a tip portion 33 of a bellows 32 which is attached to a housing 31 and performs an airtight seal is attached to an eccentric bearing portion 35 of a rotary drive shaft 34, and a rotary driven shaft 36 is a rotary driven portion via a tip portion 33 of the bellows 32. It is connected to 36 eccentric bearing portions 37. When the rotary drive shaft 34 rotates, the bellows 32 makes a rasping motion to rotate the driven shaft 36 and transmit the rotational force.
As described above, it is the most suitable rotation introducing means for transmitting the rotational force into the vacuum or special gas atmosphere, and is most practically used. However, in the rotational force transmission system according to the above-mentioned conventional technique, the drive shaft 34 and the driven shaft 36 are eccentrically connected to each other to transmit the rotational torque. A large amount of eccentricity is required to transmit a large rotational torque. This results in bellows
The amount of deflection of the bellows 32 also increases, the stress due to the bending of the bellows 32 also increases, and the life of the bellows is significantly shortened. Further, if the length of the bellows 32 is increased in order to reduce the flexural stress of the bellows 32, the length of the driven shaft 36 also increases, and the torsional rigidity decreases. As a result, it becomes impossible to transmit a large rotational torque. From the above results, when a large rotating torque is given, the driven shaft 36 is twisted,
The rotation angle of the drive shaft 34 cannot be correctly transmitted to the passive shaft 36, and the dead zone at the time of forward rotation and reverse rotation also increases, which causes damage to the eccentric bearing portion.

"Harmonic Haguruma" widely known as conventional technology
Is a rotation transmission mechanism that transmits rotation at a 1: 1 ratio of output speed to input speed through a sealed barrier, and is obtained from the rigid spline meshing of harmonic haggrum. It is a rotation introducing means that enables high torque transmission.

FIG. 7 is a sectional view showing a window-closed type rotation transmission mechanism using a flexible meshing gear device. 8 is a sectional view taken along line IV-IV in FIG. 7. FIG. 9 is a sectional view taken along line VV in FIG.

In FIG. 7, a cup-shaped flex spline 37 that can be bent in the radial direction is a circular spline that acts as an input (input circular spline 38) and a circular spline that acts as an output (output circular spline 39).
Internal teeth 42 and external teeth 43 that mesh with their respective teeth 40, 41
Is formed. As shown in FIG. 8, in the major axis direction of the wave generator 44 having an elliptical shape, the outer side 43 of the flex spline 37 is pressed against and meshed with the inner teeth 41 of the output spline 39. In the short axis direction, these teeth have gaps and do not engage. As shown in FIG. 9, the relationship between the internal teeth 42 of the flex spline 37 and the external teeth 41 of the input circular spline 38 is 90 degrees out of phase. The input rotation of the circular spline 38 causes an accelerated rotation of the rotation free wave generator 44, the rotation of the wave generator 44 outputs the flex spline 37 between the circular splines 39 at high torque and at a very reduced speed. The rotational force is transmitted. Input and output circular splines 38,3
When 9 has the same gear ratio, a 1: 1 coupling is obtained and the directions of rotation are reversed.

In this way, high transmission torque can be obtained from the engagement of the rigid splines of the harmony hagrumah.
However, in the above prior art, the input rotation is changed to the circular spline 38
, And the wave generator 44 is rotated at the first speed.

The speed-up relationship is rotated at a rotational speed determined by the tooth ratio of the internal teeth 42 of the flex spline 37 and the teeth 40 of the input circular spline 38. The second stage deceleration is decelerated at the same rate to make the output speed the same as the input speed. Harmoning Haguruma has a high speed ratio and is practically 50: 1.
The 1: 1 input / output ratio is obtained by combining the speed increaser and the 1:50 speed reducer. As a result, if 100 revolutions per minute is input, the wave generator 44 will rotate at a high speed at 5000 revolutions per minute, which will significantly shorten the life of the wave generator 44. Further, since the input rotation speed is determined by the maximum allowable rotation speed of the wave generator 44 and the speed increasing ratio, the transferable rotation speed will be about 100 rotations per minute, which is higher than 100 rotations per minute. It is unsuitable as a 1: 1 closed-type rotating earth reaching mechanism with input and output. Further, the rotation of the wave generator 44 at a high speed causes rotation vibration. In addition, the window-closed rotation transmission mechanism that uses a harmony haggler does not give sufficient consideration to the airtight sealing function, and it is not possible to obtain a sufficient airtight seal when used in a special gas atmosphere such as ultra-high vacuum or vacuum displacement. Can not.

Therefore, the object of the present invention is, except for the performance drawbacks described above, to introduce a rotation having an output speed suitable for transmitting rotation to a vacuum or a special gas atmosphere with a ratio of 1: 1 with respect to an input device. Machine and a rotation introduction machine having a deceleration function for the input speed.

[Means for Solving Problems] In order to achieve the above object, in a rotary introduction machine having an input / output rotation ratio of 1: 1, the input / output terminal is set to a wave generator, and the input side wave generator is provided. The rotation is slowed down in the first stage (1/50 in the embodiment), a low speed rotation is applied to the circular spline, and the rotation of the circular spline is accelerated in the second stage through an airtight seal (50 in the embodiment).
/ 1) By transmitting the rotation to the output side wave generator, abnormal high speed rotation of the wave generator is prevented and rotation transmission to a high rotation range is achieved.

In the rotation introduction machine with a deceleration function, input rotation is given to the wave generator and deceleration is performed through the airtight seal.
A deceleration rotation introduction machine is achieved.

As a means for reducing the starting torque of the rotation transmission, it is possible to facilitate elastic deformation by providing a bellows at the opening of the flex spline and a diaphragm at the bottom of the cup.

The air-tight seal of the rotation introducing machine has a cup-type air-tight seal part that shuts off two different atmospheres, and the opening of the flexspline is joined to the flange that has a controlled air-tight seal function to form an air-tight seal. A rotary introduction machine with excellent torque transmission and small backlash lost motion that can be used especially in the ultra-high vacuum 10 _-7 Pa (10 _-9 Torr) region is achieved.

[Operation] Furthermore, in order to enable vacuum heating and bakeout, the gasket seal member has a flange structure that accommodates a metal gasket, and all the component parts of the rotation introducing machine are metalized mainly with stainless steel mesh. It is possible to perform vacuum heating at 200 to 350 ° C., and it is possible to obtain a rotary introduction machine with a small amount of released gas.

[Examples] Hereinafter, the present invention will be described in detail with reference to Examples.

FIG. 1 is a detailed view showing a cross-sectional structure of a rotary introduction machine having a speed ratio of 1: 1 according to the present invention, FIG. 2 is a cross-sectional view taken along the line I--I of FIG. 1, and FIG. FIG. 11 is a sectional view taken along line II-II. The casing portion is omitted in FIGS. 2 and 3 for the sake of simplicity.

As shown in FIG. 1, n pieces of spline-shaped teeth 2 are provided on the outer periphery of the middle portion of a thin cup-shaped flexspline 1 made of an elastic pair capable of maintaining airtightness by shutting off a vacuum or special gas atmosphere. The airtight joint is formed on the fitting 4 of the flange 3 having the airtight sealing function. The airtight seal part of the flange 3 is the most reliable of the currently known ultra-high vacuum flanges, and the metall flange using the conical seal edge 5 (CONF
LAT FLANGE: trademark of Varian) is applied to enable installation in ultra-high vacuum equipment. As shown in FIG. 3, a wave generator 6 is provided inside the flex spline 1.
Is attached, the flex spline 1 is deformed into an elliptical shape from the inner circumference, and fitted on the outer circumference of the flex spline 1, the inner diameter is larger than the outer diameter of the flex spline 1, and the inner diameter of the cylinder of the circular spline 7 is less than n. Wave generator 6 having rotatable circular spline 7 having a plurality of spline teeth 8
Mesh in the long axis direction.

On the other hand, as shown in FIG. 2, the wave generator 10 is also attached to the cup-shaped flex spline 9 which is partly joined to the bottom of the cup of the flex spline 1 in the same manner as above, and the flex spline 9 is attached. The flex spline 9 is deformed to an elliptical shape from the inner circumference, and n ′ spline-shaped teeth 11 are provided on the outer circumference of the flex spline 9, and a plurality of spline-shaped teeth 12 and a wave generator 10 are provided on the inner circumference of the cylinder of the circular spline 7. Mesh in the long axis direction.

Here, assuming that the shaft to which the wave generator 10 is attached is the input shaft 13, the rotation of the circular spline rotates at a decelerated rotation speed determined by the ratio of the number of teeth 11 and 12 with respect to the input rotation of the wave generator 10. To be made. The rotation of the decelerated circular spline 7 in the first stage rotates at a speed increased with respect to the output shaft 14 that is determined by the ratio of the number of teeth sets 2 and 8. In this way, the deceleration relationship in the first stage is increased at the same rate in order to make the output speed the same as the input speed.

In the rotary introduction machine of the present invention, a 1: 1 input / output ratio is obtained by combining a 50: 1 speed reducer and a 1:50 speed increaser. This ratio is, for example, the teeth of the flex spline 9 on the reducer side.
By setting the number of 11 teeth to 100 and the number of teeth 12 of the circular spline 7 to 102, the reduction ratio is Then, the speed increasing ratio when the number of teeth 8 of the circular spline 7 on the speed increaser side is 100 and the number of teeth 2 of the flex spline 1 is 98 is Obtained as. As a result, a total output of 1: 1 is obtained and the output shaft rotates in the same direction as the input shaft.

By using the wave generators 10 and 6 of the rotary introduction machine having such a speed ratio of 1: 1 as the input / output means,
By using the bearings 15 and 16 of the wave generators 10 and 6 and the rolling bearings of the bearings 17 and 18 of the input and output shafts 13 and 14, the rotational friction coefficient can be reduced, so the input and output shafts 13 and 14 can be operated at high speed. It becomes possible to rotate. As described above, it is desirable to use the wave generator on the side of better usage conditions and environment. Further, in order to further enable use in a vacuum or special gas atmosphere, surface treatment of Au, Ag, molybdenum disulfide or the like is performed as a lubricating means, so that the life can be remarkably extended.

Although the embodiment of the rotary introduction machine having a speed ratio of 1: 1 has been described in detail above, by setting the speed ratio of the speed reducer and the speed increaser of the embodiment, it is possible to set the sealing wall against the input rotation speed. It is possible to determine the output speed that is transmitted through.

Furthermore, by increasing the size of the component consisting of the wave generator, flex spline, and circular spline on the speed reducer side rather than on the speed increaser side, the starter torque of the speed increaser is increased, and the rotation torque of the rotation introducing machine is increased. The transmission can be done more effectively.

FIG. 4 is a detailed view showing a cross-sectional structure of a rotation introducing machine having a speed reducing function according to the present invention, and FIG. 5 is a cross-sectional view taken along line III-III of FIG. Also in this case, as in FIGS. 2 and 3, the illustration of the casing portion is omitted for the sake of simplicity.

As shown in FIG. 4, Zc spline-shaped teeth 20 are provided on the outer periphery of the middle portion of the thin cup-shaped flex spline 19 made of an elastic body capable of blocking the vacuum or special gas atmosphere and maintaining airtightness. The airtight joint is formed on the fitting 22 of the flange 21 having the airtight sealing function. Similar to the embodiment shown in FIG. 1, the airtight seal portion of the flange 21 is the most reliable of the currently known flanges, and the metal seal flange (DONFLAT) using the conical seal edge 23 which is easy to handle. FLANGE .: trademark of Varian)
It is possible to attach to a de-high vacuum device by applying. The flex spline 19 is attached to a wave generator 24 that deforms into an elliptical shape from the inner circumference, is fitted to the outer circumference of the flex spline 19, has an inner diameter larger than the outer diameter of the flex spline 19, and the inner circumference of the circular spline 25. More spline teeth than Zc
It has a rotatable circular spline 25 having 26 Zf and is meshed in the longitudinal direction of the wave generator 24.

On the other hand, as shown in FIG. 5, in transmitting the rotational force, the flex spline 19 is elastically deformed into an elliptical shape by the wave generator 24, and the flex spline is formed at both ends of the major axis.
The teeth 20 of 10 and the teeth 26 of the circular spline 25 mesh with each other and are separated from each other in the minor axis direction. Here, generally, the teeth 20 of the flex spline 19 are provided two more than the teeth 26 of the circular spline 25. The flex spline is airtightly bonded and fixed to the flange 21. When the wave generator 24 is rotated once in this state, the circular spline rotates in the same direction as the rotation direction of the wave generator 24 by a difference of two teeth. In this way, the rotational force is transmitted from the rotary input shaft 27 attached to the wave generator 24 to the rotary output shaft 28 attached to the circular spline 25.

As explained above, the rotation speed ratio is the flex spline.
19 and 20 teeth on the circular spline 25 and
26 and is represented by the following equation.

Where R = speed ratio Zc = number of flexspline teeth Af = number of circular spline teeth Generally, the difference in the number of teeth is set to 2 Therefore, the rotation direction is the same as that of the wave generator.

Although the embodiment has been described in detail with respect to the rotation introducing machine having the speed reducing function, it is possible to obtain the speed reducing ratio according to the purpose of use by setting the ratio of the number of teeth of the speed reducer of the embodiment.

The bellows 29 attached to the opening side of the flex splines 1 and 19 and the diaphragm 30 attached to the cup bottoms of the flex splines 1 and 9 and 19 shown in FIGS. 1 and 4 are elastic deformations of the flex splines. This has the effect of facilitating and reducing the rotation transmission starting torque.

[Effects of the Invention] As described above, according to the present invention, as a rotation introducing machine to a sealed atmosphere of a vacuum or a special gas, a sealing property, a rotation transmission force, a rotation torsional rigidity, durability, wear resistance,
It has the characteristics as a rotary introduction machine such as the accuracy of rotational position division, and there is no defect that affects the operating environment due to leakage magnetic flux and released gas found in magnet couplings and magnetic fluid seals, and vacuum heating and baking (200 to 350 It is a rotary introduction machine that is suitable for use in the ultra high vacuum 10 ^-7 Pa (10 ^-9 Torr) range. Further, the rotary introducer is a rotary introducer with simple components and excellent assemblability, which allows easy maintenance and inspection work and has excellent productivity. Furthermore, in addition to the original 1: 1 rotation introduction machine of the rotation introduction machine, it is possible to provide a rotation introduction machine equipped with a deceleration function, such as a physics and chemistry device using a charged particle beam or a dry process device. It is an optimum rotation introduction machine used for semiconductor manufacturing equipment seen,
By using this rotation introducing machine, a durable, highly accurate and highly reliable device can be realized.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional configuration diagram of a rotary introduction machine having a speed ratio of 1: 1, FIG. 2 is a sectional view taken along the line II of FIG. 1, and FIG. 3 is a sectional view of FIG. II-
II line sectional view, FIG. 4 is a sectional configuration diagram of a rotary introduction machine having a deceleration function, FIG. 5 is a sectional view taken along line III-III of FIG. 4, and FIG. 6 is a sectional view of a rotary introduction machine using a bellows. , FIG. 7 is a cross-sectional view showing a hermetically-sealed rotation transmission mechanism using a harmonic hugger, FIG. 8 is a cross-sectional view taken along line IV-IV of FIG. 7, and FIG.
It is the VV sectional view taken on the line of FIG. 1 ... Flex Spline, 3 ... Flange, 5 ...
Seal edge, 6 ... Wave generator, 7 ... Circular spline, 9 ... Flex spline, 10
...... Wave generator, 13 …… Input shaft, 14 …… Output shaft, 19 …… Flex spline, 21 …… Flange, 23
...... Seal edge, 24 ...... Wave generator, 25 ...
… Circular spline, 27 …… Input shaft, 28 …… Output shaft.

Claims (6)

[Claims] 1. A hollow having a flange for attaching to a penetrating portion provided on a wall separating two different atmospheres, the flange being connectable to the penetrating portion in an airtight structure, and a bottom portion mechanically integrated with the flange. Of the casing part, a cup-shaped first flexspline that extends from the flange side or the bottom part side of the casing part toward the other side, and the opening side is fixed to the flange or the bottom part, and is joined at the bottom part of the first flexspline. A cup-shaped second flexspline opening in the direction opposite to the first flexspline, teeth of the flexspline provided on the outer surface of the intermediate portion of the first spline, and openings of the second spline. Flex spline teeth provided on the outer surface of the portion, rotatably supported on the inner surface of the casing, and the first and second teeth. And a tooth of a circular spline that surrounds the first and second flex splines and is provided in the direction from the middle portion of the first flex spline to the opening of the second flex spline, and both ends of which are engageable with the teeth of the respective flex spline. The circular spline, the first wave generator provided at the position of the teeth of the flex spline and inside the first flex spline, and rotatably supported by the bottom portion or the flange of the casing, the free spline A rotation introducing machine comprising a second wave generator which is provided at a tooth position and inside the second flex spline, and is rotatably supported by the flange or the bottom of the casing. 2. The rotation introducing machine according to claim 1, wherein the reduction ratio is determined by setting the number of teeth of the flex spline and the number of teeth of the circular spline in a predetermined relationship. . 3. The number of teeth of the first or second flexspline and the number of teeth of the circular spline engaging with the teeth of the first or second flexspline are set to have a predetermined relationship, respectively. Claim 1 wherein the reduction ratio and the acceleration ratio are determined on the other hand
The rotary introduction machine described in the item. 4. The rotation introducing machine according to claim 3, wherein the acceleration ratio and the deceleration ratio are set to be equal to each other. 5. The rotation introducing machine according to claim 3, wherein the reduction ratio is set larger than the acceleration ratio. 6. The rotation introducing machine according to claim 1, wherein a bellows is provided at an opening of the flex spline, and a diaphragm is provided at a bottom of the cup.