JPH0757455B2 - Fine motion rotation device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention relates to a fine-motion rotary device applied to, for example, an LSI inspection device, a manufacturing device, a measuring instrument, a machine tool, or other precision rotary positioning device.

<Background of the Invention> As this kind of fine movement rotating device, one having a mechanism shown in Fig. 4 has been conventionally proposed (known document: Nikkei Mechanical, February 27, 1984, p. 86, Fig. 1).

In this fine movement rotation device, several points on the outer circumference of the rotary table 4 are supported by a freely rotatable guide wheel 5, while a reciprocating mechanism 6 is arranged in the tangential direction with respect to the rotary table 4. In the reciprocating mechanism 6, a slider 62 screwed onto the feed shaft 61 is provided with a protruding rod 63 so that its tip is brought into contact with the table 4, and the rotary table 4 is placed close to and parallel to the protruding rod 63.
And a fixed portion 64 such as a motor frame, a tension spring 65 is interposed. In this fine movement rotation device, the slider 62 on the feed shaft 61 reciprocates by the operation of the pulse motor 66, so that the pushing force of the thrust rod 63 or the tension spring 65 is applied.
Tensile force acts on the table 4 from the tangential direction,
The rotary table 4 is finely rotated in the forward and reverse directions.

However, in such a structure, in order to improve the rotational resolution of the rotary table 4, it is necessary to set the screw pitch of the feed shaft 61 to a small pitch or to use the pulse motor 66 having a small step angle. In the case of 1, the feed shaft 61 is not easily processed, and in the latter case, the weight and shape of the pulse motor 66 are large, which causes a problem in downsizing of the device. Moreover, since the guide wheel 5 is damaged in several places on the outer circumference of the turntable 4, backlash is generated between the turntable 4 and the guide wheel 5, which adversely affects the rotation accuracy. There were many problems such as wear, similarly lowering of rotation accuracy and deterioration of fine movement rotation characteristics.

<Purpose of the Invention> The present invention provides a fine movement rotating device which realizes high precision, high resolution and high stability by finely rotating a rotary table by elastic deformation of a material, thereby solving the above-mentioned conventional problems. The purpose is to

<Structure and Effect of the Invention> The fine movement rotation device of the present invention has the fixing portion at the center, and the rotating portion is continuously provided on the outer periphery of the fixing portion through the plurality of thin elastic pieces radially protruding. The fine-movement rotary table and the fixed portion attached to the rotary portion of the fine-movement rotary table have the movable portion projecting to the outer periphery of the fine-movement rotary table through the thin portion, and the movable portion includes the rotary portion of the fine-movement rotary table. And a reciprocating drive mechanism that is arranged to be linked to the tip of the fine movement lever and that finely rotates the fine movement lever about the thin portion. It consists of

According to the present invention, since the rotation of the fine-movement rotary table is realized by elastic deformation of the plurality of thin elastic pieces, the rotary wheel in the conventional fine-movement rotary device is not required, and the structure can be simplified. Problems such as backlash with the table and wear of bearings can be solved at once, and high-precision and stable fine-motion rotation can be realized.

Moreover, since the fine-movement rotary table is finely moved by the deformation of the thin portion of the fine-movement lever, the movement of the rotary portion of the fine-movement rotary table is reduced to a fraction of the movement of the reciprocating drive mechanism, which results in high-precision and high-resolution table movement. There is an effect that can be realized.

<Description of Embodiments> FIG. 1 shows a fine movement rotating device according to an embodiment of the present invention, which comprises a fine movement rotary table 1, a fine movement lever 2, and a reciprocating drive mechanism 3.

The fine motion rotary table 1 has a fixed portion 11 at the center thereof, and a plurality of thin elastic pieces 12 radially projected on the outer periphery of the fixed portion 11.
The rotating unit 13 is integrally connected via the. The fine movement lever 2 includes a fixed portion 21 attached to the rotating portion 13 and a thin portion 22.
The movable portion 23 is projected to the outer periphery of the fine movement rotary table 1 via the pin, and a pin 24 that engages with the engaging portion 14 formed on the rotary portion 13 of the fine movement rotary table 1 is projectingly provided on the movable portion 23. It was done. The reciprocating drive mechanism 3 is provided so as to be connected to the tip end portion of the fine movement lever 2, and the fine movement lever 2 is connected to the thin portion.
Rotate slightly around 22.

In the fine movement rotary table 1, a central fixed portion 11 is fixed to a key part such as a semiconductor manufacturing apparatus with a screw. An L-shaped member 16 is provided on the outer peripheral portion of the rotary portion 13 of the fine motion rotary table 1 with right-angled notches 15 aligned on the diameter line passing through the thin elastic piece 12.
An engaging portion 14 for engaging the pin 24 of the fine movement lever 2 is formed between the rising wall of the L-shaped member 16 and the notch portion 15.

In the fine movement lever 2, the fixed portion 21 is fixed to the substantially intermediate portion between the engaging portion 14 and the thin elastic piece 12 with a screw so that the thin portion 22 is aligned on the diameter line, and the movable portion 23 has the engaging portion. A pin 24 engaging with 14 is implanted. A pin 25 is provided at the tip of the movable portion 23 in correspondence with the diameter line passing through the thin elastic piece 12 and the thin portion 22.
And the L-shaped member 26 are vertically disposed so as to face each other, and an engaging portion 27 for engaging the transmission pin 36 of the reciprocating drive mechanism 3 is provided between the pin 25 and the rising wall of the L-shaped member 26.

The reciprocating drive mechanism 3 has a feed shaft 32, one end of which is connected to a drive motor 31 and a thread groove is formed on the shaft body, which is arranged so as to be orthogonal to the tip of the fine movement lever 2. In the feed shaft 32,
As shown in FIG. 2, a slider 35, which is prevented from rotating by a guide 33 and a guide pin 34, is screwed, and a transmission pin 36 is projectingly provided on one side of the slider 35.
36 is engaged with the engaging portion 27 at the tip of the fine movement lever 2.

However, in FIG. 3, when the slider 35 moves in the direction of the arrow A by the operation of the drive motor 31 and the transmission pin 36 follows the tip of the fine movement lever 2, the fine movement lever 2 has a thin portion 22.
Deforms against the resilience, and makes fine movement around the thin portion 22 as the center of rotation. As a result, the pin 24 of the movable portion 23 causes the fine-rotation power to act on the rotary portion 13 of the fine-motion rotary table 1, and the rotary portion
Reference numeral 13 denotes each thin elastic piece by the rotation input of the fine movement lever 2.
The 12 deforms against its elasticity and makes a fine rotation. When the slider 35 retreats, the thin portion 22 returns to the original state due to the elasticity of the material in response to the return of the fine movement lever 2 and the thin elastic piece 12 according to the return of the rotating portion 13 of the fine rotation table 1. When the slider 35 moves in the opposite direction, the fine movement lever 2
Moves slightly in the opposite direction to the rotating part of the fine rotation table 1.
Finely rotate 13 in the opposite direction.

[Brief description of drawings]

1 is a plan view showing an example of a fine movement rotation device according to an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II in FIG. 1,
FIG. 3 is a plan view for explaining an operating condition, and FIG. 4 is a plan view of a conventional device. 1 ... Fine-motion rotary table, 11 ... Fixed part 12 ... Elastic piece, 13 ... Rotating part 14 ... Engaging part, 2 ... Fine-motion lever 21 ... Fixed part, 22 ... Thin-walled part 23 ... Moving part, 24 …… Pin 3 …… Reciprocating drive mechanism, 35 …… Slider 36 …… Transmission pin

Claims (2)

[Claims] 1. A fine-movement rotary table having a fixed portion at the center, and a rotary portion connected to the outer periphery of the fixed portion via a plurality of thin elastic pieces radially protruding, and a fine-movable rotary table. The movable portion is projected to the outer periphery of the fine movement rotary table through the thin portion of the fixed portion attached to the rotary portion, and the movable portion is engaged with the engaging portion formed on the rotary portion of the fine movement rotary table. A fine-movement rotating device comprising a fine-moving lever provided with a protruding pin, and a reciprocating drive mechanism which is arranged to be linked to the tip of the fine-moving lever and finely rotates the fine-moving lever around the thin portion. 2. The reciprocating drive mechanism comprises a feed shaft disposed orthogonal to the fine movement lever, a slider screwed to the feed shaft, and a transmission pin provided on the slider, and the transmission pin is provided. The fine movement rotation device according to claim 1, wherein the fine movement rotation device is connected to the fine movement lever.